Double-cover transfer device and sealing system

Abstract

The present invention discloses a double-cover transfer device and a sealing system including the double-cover transfer device. The double-cover transfer device includes a first sealing mechanism, a second sealing mechanism, and a door opening mechanism. The first sealing mechanism includes a first cover plate, a first rotating assembly, and a first sealing ring. The first cover plate is arranged in the opening of the first sealed chamber. The second sealing mechanism includes a second cover plate, a second sealing ring, a second rotating assembly, and a flange. The flange is fixed in the opening of the second sealed chamber. The second cover plate is arranged in the inner hole of the flange. The door opening mechanism is arranged in the first sealed chamber. When the first cover plate is meshed with the second cover plate, the door opening mechanism lifts the meshed first cover plate and the second cover plate into the first sealed chamber. The double-cover transfer device can provide a channel for the transfer of equipment in a sealed chamber with a high sealing level, and meet the sealing requirements of the sealed chamber with a high sealing level.

Description

Technical Field

[0001] The invention relates to a double-cover transfer device and a sealing system comprising the double-cover transfer device. Background Art

[0002] Sealed chambers (hot chambers, glove boxes) are widely used in the nuclear industry as a sealed containment device. During daily equipment maintenance and when a fault occurs, if the process equipment in the sealed chamber cannot be completed in the chamber, it needs to be transferred to a special maintenance chamber. Due to the high radioactivity and high α contamination in the sealed chamber (especially the hot chamber), in order to provide necessary protection for personnel during the maintenance and transportation process, ensure α sealing, and prevent the spread of contamination, double-cover transfer technology is often used.

[0003] The existing double-cover transfer devices in China are mostly used in boxes and chambers with low sealing levels and small cross-sectional dimensions of transfer parts (large-sized transfer parts are mostly transferred in the traditional bag-sealed form). They can no longer meet the maintenance and transfer needs of boxes and chambers with higher sealing requirements (especially the transfer needs of large-sized transfer parts).

[0004] Therefore, there is an urgent need for a double-cover transfer device for use in sealed boxes with high sealing levels. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a double-cover transfer device and a sealing system including the double-cover transfer device in view of the above-mentioned deficiencies in the prior art. The double-cover transfer device can provide a channel for the transfer of equipment in a sealed chamber with a high sealing level and meet the sealing requirements of the sealed chamber with a high sealing level.

[0006] In order to solve the above problems, the present invention adopts the following technical solutions:

[0007] 14. The double-cover transfer device as claimed in claim 13, wherein the first sealing mechanism comprises a first cover plate, a swing arm, a first rotating assembly and a first sealing ring. The first cover plate is arranged in the opening of the first sealed chamber, and the longitudinal section of the opening of the first sealed chamber is an inverted cone. The longitudinal section of the first cover plate is an inverted cone that matches the shape of the opening of the first sealed chamber. The first sealing ring is used to seal between the first cover plate and the first sealed chamber, and is located on the outer side of the first cover plate. The first rotating assembly is passed through the center of the first cover plate, and the first rotating assembly has a first tooth. One end of the swing arm is connected to the first rotating assembly. The second sealing mechanism comprises a second cover plate, a second sealing ring, a second rotating assembly, a telescopic assembly and a flange. The flange is fixed in the opening of the second sealed chamber. The second cover plate is arranged in the inner hole of the flange, and the longitudinal section of the inner hole of the flange is an inverted cone. The longitudinal section of the second cover plate is a shape that matches the shape of the inner hole of the flange. The inverted cone shape, the contact surface between the first cover plate and the first sealed chamber is the first contact surface, the contact surface between the second cover plate and the flange is the second contact surface, the second contact surface is the same plane extending downward from the first contact surface, the second sealing ring is used to seal between the second cover plate and the flange, and it is located on the outside of the second cover plate, the second rotating component is passed through the center of the second cover plate, the second rotating component has a second tooth, and the second tooth can be engaged with the first tooth, the telescopic component is arranged at the bottom of the second cover plate, which is connected to the second rotating component, and the telescopic end of the telescopic component is directly below the flange, and the door opening mechanism is arranged inside the first sealed chamber, when the first tooth is engaged with the second tooth, by driving the swing arm to move, the first rotating component and the second rotating component are driven to rotate, so that the telescopic end of the telescopic component is retracted from below the flange to below the second cover plate, and at this time, the door opening mechanism is used to lift the meshed first cover plate and the second cover plate into the first sealed chamber.

[0008] Preferably, the telescopic assembly includes a turntable, a connecting rod, a pin rod, a bearing seat and a first roller, the turntable is fixedly arranged at the bottom of the second rotating assembly, the bearing seat is installed at the bottom of the second cover plate, one end of the connecting rod is connected to the turntable, and the other end is connected to one end of the pin rod, the other end of the pin rod passes through the bearing seat, and the first roller is arranged at one end of the pin rod away from the connecting rod, and the roller is directly below the flange.

[0009] Preferably, the bottom of the flange is a slope, and the end of the flange away from the second cover plate is higher than the end of the flange close to the second cover plate, and the double-cover transfer device also includes a driving mechanism, which is arranged in the first sealed box chamber and its output end is connected to the swing arm.

[0010] Preferably, the first sealing mechanism also includes a limit plate, which is arranged on the first cover plate and has an annular groove. A second roller is also provided at the bottom of the swing arm, and when the driving mechanism drives the swing arm to swing, the second roller rolls in the groove.

[0011] Preferably, the first sealing mechanism also includes a limiting assembly, which includes a spring and a steel ball. The spring is arranged at the bottom of the swing arm, and the steel ball is installed on the free end of the spring. A limiting hole is also provided on the first cover plate. The position of the limiting hole corresponds to the position of the steel ball. The limiting hole is annular in shape, and the size of the limiting hole matches the size of the steel ball. When the driving mechanism drives the swing arm to swing, the steel ball rolls in the limiting hole from one end of the limiting hole to the other end, and the swing arm moves from an initial position to a target position.

[0012] Preferably, the first rotating assembly includes a first transmission shaft, a first bearing, a third sealing ring, and a first end cover. The first bearing is installed at the center position of the first cover plate. The first transmission shaft is supported on the first bearing and passes through the center of the first cover plate. The first transmission shaft is connected to the swing arm through a first flat key. The first end cover is sleeved on the first transmission shaft and fixed on the first cover plate. The third sealing ring is arranged between the first end cover and the first cover plate; the first tooth is arranged on the bottom end of the first transmission shaft.

[0013] Preferably, the second rotating assembly includes a second transmission shaft, a second bearing, a fourth sealing ring, and a second end cover. The second bearing is installed at the center position of the second cover plate. The second transmission shaft is supported on the second bearing and passes through the center of the second cover plate. The telescopic assembly is connected to the second transmission shaft through a second flat key. The second end cover is sleeved on the second transmission shaft and fixed on the second cover plate. The fourth sealing ring is arranged between the second end cover and the second cover plate; the second tooth is arranged at the top end of the second transmission shaft.

[0014] Preferably, a positioning pin / pin hole is provided on the top surface of the second end cover, and a pin hole / positioning pin with a corresponding position is provided on the bottom surface of the first end cover.

[0015] Preferably, the first sealing ring is arranged at the bottom of the first cover plate, and the second sealing ring is arranged at the top of the second cover plate, so that the first sealing ring and the second sealing ring can contact each other.

[0016] Preferably, the first sealing ring and the second sealing ring are both lip-shaped, and each sealing surface of the first sealing ring and the second sealing ring is provided with a toothed structure to increase the sealing area.

[0017] The present invention also provides a sealing system, comprising a first sealed box chamber and a second sealed box chamber, and also comprising the above-mentioned double-cover transfer device.

[0018] The double-cover transfer device in the present invention can provide a channel for the transfer of equipment in a high-grade sealed chamber, and meet the sealing requirements of the sealed chamber with a high sealing level, ensure α sealing, and prevent the spread of pollution; the double-cover transfer device has a breakthrough effective diameter of Φ640mm, and can realize the maintenance and transfer of large parts and process equipment in a high-grade sealed chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic structural diagram of a double-cover transfer device in Example 1 of the present invention;

[0020] Figure 2 is a cross-sectional view of the first sealing mechanism in Example 1 of the present invention;

[0021] Figure 3 is a top view of the first sealing mechanism in Example 1 of the present invention;

[0022] Figure 4 is a cross-sectional view of the second sealing mechanism in Example 1 of the present invention;

[0023] Figure 5 is a top view of the second sealing mechanism in Example 1 of the present invention;

[0024] Figure 6a is a schematic diagram of the first cover plate and the second cover plate being separated in Embodiment 1 of the present invention;

[0025] Figure 6b is a schematic diagram of the first cover plate and the second cover plate being connected to each other in Embodiment 1 of the present invention;

[0026] Figure 6c is a schematic diagram of the engagement of the first cover plate and the second cover plate in Embodiment 1 of the present invention;

[0027] Figure 6d It is a schematic diagram of the door opening mechanism in Example 1 of the present invention transferring the first cover plate and the second cover plate into the first sealed box chamber.

[0028] In the figure: 1-first sealing ring, 2-first cover plate, 3-second cover plate, 4-second sealing ring, 5-flange, 6-swing arm, 7-limiting plate, 8-second roller, 9-limiting assembly, 10-locating pin, 14-second bearing, 15-pin rod, 16-connecting rod, 17-turntable, 18-first roller, 19-second transmission shaft, 20-second fastener, 21-second end cover, 22-fourth sealing ring, 23-second flat key, 24-first transmission shaft, 25-third sealing ring, 26-first bearing, 29-first fastener, 30-first flat key, 31-first end cover, 32-limiting hole, 33-pin hole, 34-first sealed box chamber, 35-second sealed box chamber, 36-bearing seat. DETAILED DESCRIPTION

[0029] The following will be combined with the accompanying drawings in the present invention to clearly and completely describe the technical solutions in the invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of the present invention.

[0030] In the description of the present invention, it should be noted that the term "upper" and the like to indicate orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0031] In the description of the present invention, the terms “first” and “second” are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0032] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connect", "set", "install", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0033] The present invention provides a double-cover transfer device, comprising a first sealing mechanism, a second sealing mechanism, and a door opening mechanism, wherein the first sealing mechanism comprises a first cover plate, a swing arm, a first rotating component, and a first sealing ring, wherein the first cover plate is arranged in the opening of the first sealed chamber, and the longitudinal section of the opening of the first sealed chamber is an inverted cone, and the longitudinal section of the first cover plate is an inverted cone matching the shape of the opening of the first sealed chamber, the first sealing ring is used to seal between the first cover plate and the first sealed chamber, and is located on the outer side of the first cover plate, the first rotating component is penetrated through the center of the first cover plate, the first rotating component has a first tooth, one end of the swing arm is connected to the first rotating component, the second sealing mechanism comprises a second cover plate, a second sealing ring, a second rotating component, a telescopic component, and a flange, the flange is fixed in the opening of the second sealed chamber, the second cover plate is arranged in the inner hole of the flange, and the longitudinal section of the inner hole of the flange is an inverted cone, and the longitudinal section of the second cover plate is an inverted cone matching the shape of the inner hole of the flange The second contact surface is the same plane extending downward from the first contact surface; the second sealing ring is used to seal between the second cover plate and the flange; the second sealing ring is located on the outside of the second cover plate; the second rotating component is passed through the center of the second cover plate; the second rotating component has a second tooth, and the second tooth can be engaged with the first tooth; the telescopic component is arranged at the bottom of the second cover plate, which is connected to the second rotating component; the telescopic end of the telescopic component is directly below the flange; the door opening mechanism is arranged inside the first sealed chamber; when the first tooth is engaged with the second tooth, the swing arm is driven to move, thereby driving the first rotating component and the second rotating component to rotate, thereby causing the telescopic end of the telescopic component to retract from below the flange to below the second cover plate; at this time, the door opening mechanism is used to lift the meshed first cover plate and the second cover plate into the first sealed chamber.

[0034] The present invention also provides a sealing system, comprising a first sealed box chamber and a second sealed box chamber, and also comprising the above-mentioned double-cover transfer device.

[0035] Example 1

[0036] like Figure 1As shown, this embodiment discloses a double-cover transfer device, including a first sealing mechanism, a second sealing mechanism, and a door opening mechanism, the first sealing mechanism including a first cover plate 2, a swing arm 6, a first rotating assembly, and a first sealing ring 1, the first cover plate 2 is arranged in the opening of the first sealed chamber 34, and the longitudinal section of the opening of the first sealed chamber 34 is an inverted cone, the longitudinal section of the first cover plate 2 is an inverted cone matching the opening shape of the first sealed chamber 34, the first sealing ring 1 is used to seal between the first cover plate 2 and the first sealed chamber 34, and it is located on the outside of the first cover plate 2, the first rotating assembly is penetrated through the center of the first cover plate 2, the first rotating assembly has a first tooth, and one end of the swing arm 6 is connected to the first rotating assembly.

[0037] The second sealing mechanism includes a second cover plate 3, a second sealing ring 4, a second rotating assembly, a telescopic assembly, and a flange 5. The flange 5 is fixedly arranged in the opening of the second sealing chamber 35. The second cover plate 3 is arranged in the inner hole of the flange 5, and the longitudinal section of the inner hole of the flange 5 is an inverted cone. The longitudinal section of the second cover plate 3 is an inverted cone that matches the shape of the inner hole of the flange 5. The first cover plate 2 and the second cover plate 3 are arranged in an inverted cone, which helps to ensure the sealing and the centering of the double covers (the first cover plate 2 and the second cover plate 3). The contact surface between the first cover plate 2 and the first sealing chamber 34 is the first contact surface, and the contact surface between the second cover plate 3 and the inner hole of the flange 5 is the second contact surface. The second contact surface is the same plane extending downward from the first contact surface. That is to say, when the first sealing mechanism is butt-coupled with the second sealing mechanism, the first cover plate and the second cover plate 3 are combined to form an integrated inverted cone. In this embodiment, a step is provided on the upper edge of the opening of the first sealed chamber 34, and a lap joint is provided on the top of the first cover plate 2, which is overlapped on the step at the opening, and the lower part of the first contact surface is located in the same plane as the second contact surface. The second sealing ring 4 is used to seal between the second cover plate 3 and the flange 5, which is located on the outside of the second cover plate 3, the second rotating assembly is penetrated through the center of the second cover plate 3, the second rotating assembly has a second tooth, and the second tooth can be meshed with the first tooth, the telescopic assembly is arranged at the bottom of the second cover plate 3, and is connected to the second rotating assembly, and the telescopic end of the telescopic assembly is directly below the flange 5, the fixed end of the door opening mechanism is arranged inside the first sealed chamber 34, and the other end of the door opening mechanism is connected to the inner side of the first cover plate 2. When the first tooth is meshed with the second tooth, the swing arm 6 is driven to move, thereby driving the first rotating assembly and the second rotating assembly to rotate, and then the telescopic end of the telescopic assembly is retracted from below the flange 5 to below the second cover plate 3, and the door opening mechanism is used to lift the meshed first cover plate 2 and the second cover plate 3 into the first sealed chamber 34.

[0038] like Figure 4As shown, the telescopic assembly includes a turntable 17, a connecting rod 16, a pin 15, a bearing seat 36 and a first roller 18. The turntable 17 is circular and is fixed to the bottom of the second rotating assembly. The bearing seat 36 is installed at the bottom of the second cover plate 3 and is located at the outer edge of the second cover plate 3. One end of the connecting rod 16 is connected to the turntable 17, and the other end is connected to one end of the pin 15. The other end of the pin 15 passes through the bearing seat 36, and the first roller 18 is arranged at one end of the pin 15 away from the connecting rod 16, and the first roller 18 is directly below the flange 5.

[0039] Specifically, there are four bearing seats 36 located on the same circumference of the bottom of the second cover plate 3, and the central angle between two adjacent bearing seats 36 is 90°. Similarly, there are four corresponding connecting rods 16, pin rods 15 and first rollers 18.

[0040] In this embodiment, the bottom of the flange 5 is a slope, which is inclined upward, so that the end of the flange 5 away from the second cover plate 3 is higher than the end of the flange 5 close to the second cover plate 3. The transfer device also includes a driving mechanism, which is arranged in the first sealed box chamber 34, and an interface for coupling the driving mechanism is provided on the swing arm 6, and the output end of the driving mechanism is connected to the swing arm 6 through the interface.

[0041] Specifically, when the driving mechanism drives the swing arm 6 to move, the swing arm 6 drives the first rotating assembly and the second rotating assembly to rotate in the first direction (before the first cover plate 2 and the second cover plate 3 are separated), and the pin rod 15 moves linearly in the direction away from the turntable 17, thereby driving the first roller 18 to slide on the bottom surface of the flange 5, and the sliding direction is the direction away from the second cover plate 3. Since the bottom of the end of the flange 5 away from the second cover plate 3 is higher than the bottom of the end of the flange 5 close to the second cover plate 3, the first roller 18 will drive the second cover plate 3 as a whole to press the second contact surface downward when moving, thereby pressing the second sealing ring 4.

[0042] The swing arm 6 drives the first rotating assembly and the second rotating assembly to rotate in the second direction (after the first cover plate 2 and the second cover plate 3 are coupled), and the pin rod 15 moves linearly in the direction close to the turntable 17, thereby driving the first roller 18 to slide on the bottom surface of the flange 5, and the sliding direction is the direction close to the second cover plate 3. Since the bottom of the end of the flange 5 away from the second cover plate 3 is higher than the bottom of the end of the flange 5 close to the second cover plate 3, the first roller 18 will reduce the pressure of the second cover plate 3 on the second contact surface, and the pressing force of the second sealing ring 4 on the second contact surface when moving, until the second roller 8 shrinks to the bottom of the second cover plate 3. Then it is convenient for the subsequent door opening mechanism to lift the first cover plate 2 and the second cover plate 3 to the inside of the first sealed box chamber 34 at the same time.

[0043] like Figure 1 , 2As shown in Figures 3 and 4, the first sealing mechanism further includes a limit plate 7, which is arranged on the inner side of the first cover plate 2 and located on the outer edge of the circumference of the first cover plate 2, and the limit plate 7 is located on a concentric circle of the outer circle of the first cover plate 2. An annular groove is provided in the vertical plane of the limit plate 7, and a second roller 8 is also provided at the bottom of the swing arm 6. When the driving mechanism drives the swing arm 6 to swing, the second roller 8 rolls in the groove for rotational guidance.

[0044] In this embodiment, the first sealing mechanism further includes a limiting assembly 9, which includes a spring and a steel ball. The spring is arranged at the bottom of the swing arm 6, between the center of the circle and the second roller 8, and close to the second roller 8. The steel ball is installed on the free end of the spring, and a limiting hole 32 is further arranged on the first cover plate 2. The position of the limiting hole 32 corresponds to the position of the steel ball, and the shape of the limiting hole 32 is annular, and the size of the limiting hole 32 matches the size of the steel ball. When the driving mechanism drives the swing arm 6 to swing, the steel ball rolls from one end of the limiting hole 32 to the other end in the limiting hole 32, and the swing arm 6 moves from the initial position to the target position.

[0045] Specifically, the first rotating assembly includes a first transmission shaft 24, a first bearing 26, a third sealing ring 25, and a first end cover 31. The first bearing 26 is installed at the center position of the first cover plate 2. The first transmission shaft 24 is supported on the first bearing 26 and passes through the center of the first cover plate 2. The first transmission shaft 24 is connected to the swing arm 6 through the first flat key 30. The first end cover 31 is sleeved on the first transmission shaft 24 and fixed to the first cover plate 2 through the first fastener 29. The third sealing ring 25 is arranged between the first end cover 31 and the first cover plate 2; the first tooth is arranged on the bottom end of the first transmission shaft 24.

[0046] Specifically, the second rotating assembly includes a second transmission shaft 19, a second bearing 14, a fourth sealing ring 22, and a second end cover 21. The second bearing 14 is installed at the center position of the second cover plate 3. The second transmission shaft 19 is supported on the second bearing 14 and passes through the center of the second cover plate 3. The telescopic assembly is connected to the second transmission shaft 19 through a second flat key 23. The second end cover 21 is sleeved on the second transmission shaft 19 and fixed on the second cover plate 3 through a second fastener 20. The fourth sealing ring 22 is arranged between the second end cover 21 and the second cover plate 3; the second tooth is arranged at the top end of the second transmission shaft 19. When the first cover plate 2 and the second cover plate 3 are docked and coupled together, the first tooth and the second tooth are meshed with each other.

[0047] like Figure 1 , 5As shown, a positioning pin 10 / pin hole 33 is provided on the top surface of the second end cover 21, and a pin hole 33 / positioning pin 10 is provided on the bottom surface of the first end cover 31 at a corresponding position. When the first cover plate 2 and the second cover plate 3 are engaged with each other, the positioning pin 10 and the pin hole 33 are aligned with each other, and are used for guiding when the first cover plate 2 and the second cover plate 3 are installed and docked, and the upper end of the positioning pin 10 is chamfered to facilitate docking with the pin hole 33 on the first cover plate 2 / the second cover plate 3.

[0048] In this embodiment, the first sealing ring 1 is arranged at the bottom of the first cover plate 2, the second sealing ring 4 is arranged at the top of the second cover plate 3, the first sealing chamber 34 is provided with a first mounting groove at the lower edge of the opening, and the first sealing ring 1 is installed inside the first mounting groove; the second cover plate 3 is provided with a second mounting groove at the upper edge of the top, and the second sealing ring 4 is installed inside the second mounting groove, so that the first sealing ring 1 and the second sealing ring 4 can contact each other. And the shape of the first sealing ring 1 and the second sealing ring 4 are both lip-shaped, that is, they have two sealing surfaces, and the tips of the two lip-shaped sealing rings are against each other, and each sealing surface of the first sealing ring 1 and the second sealing ring 4 is provided with a tooth-shaped structure, which is perpendicular to the sealing surface, so as to increase the sealing area and further improve the sealing performance of the device.

[0049] Figure 6a-6d This is a diagram of the use process of the double-cover transfer device of the present invention:

[0050] Docking process:

[0051] like Figure 6a As shown, when there is no need for maintenance and transportation of the equipment / parts in the second sealed chamber 35, the first sealed chamber 34 and the second sealed chamber 35 are separated and work independently. At this time, the first cover plate 2 and the first sealing ring 1 are installed at the opening of the first sealed chamber 34 as sealing parts of the first sealed chamber 34; the second cover plate 3, the flange 5, and the second sealing ring 4 are installed at the opening of the second sealed chamber 35 as sealing parts of the second sealed chamber 35.

[0052] like Figure 6b As shown, when the equipment / parts in the second sealed chamber 35 need to be repaired and transported, the supporting equipment in the plant transports the first sealed chamber 34 to the second sealed chamber 35 and docks with the second sealed chamber 35, so that the first cover plate 2 is aligned with the second cover plate 3, and the first teeth on the first cover plate 2 and the second teeth on the second cover plate 3 are meshed with each other;

[0053] like Figure 6c As shown, the driving mechanism in the first sealed chamber 34 drives the swing arm 6 to rotate, so that the first cover plate 2 is coupled with the second cover plate 3. At this time, the first roller 18 shrinks to within the inner diameter of the flange 5 (below the second cover plate 3);

[0054] like Figure 6d As shown, the door opening mechanism in the first sealed chamber 34 lifts the double covers (the first cover plate 2, the second cover plate 3 and the second sealing ring 4 sandwiched therebetween) that are coupled together into the first sealed chamber 34 and rotates them aside so that the transfer channel is opened and the first sealed chamber 34 is connected to the second sealed chamber 35. At this time, the second sealing ring 4 isolates the lower surface of the first cover plate 2 and the upper surface of the second cover plate 3 from the atmosphere in the chamber to ensure that the two surfaces are not contaminated.

[0055] Then, the auxiliary mechanism transports the equipment to be repaired in the second sealed chamber 35 to the first sealed chamber 34 or transports the new process equipment in the first sealed chamber 34 to the second sealed chamber 35 .

[0056] Separation process:

[0057] The door opening mechanism in the first sealed box chamber 34 resets the first cover plate 2 and the second cover plate 3, and the transfer channel is closed;

[0058] The driving mechanism in the first sealed chamber 34 drives the swing arm 6 to rotate in the opposite direction, so that the first cover plate 2 and the second cover plate 3 (the first tooth and the second tooth) are separated; at this time, the first roller 18 moves to the outermost end of the bottom of the flange 5, and the flange 5 and the second cover plate 3 are in a sealed state;

[0059] The supporting equipment in the factory moves the first sealed chamber 34 away, so that the first sealed chamber 34 is separated from the second sealed chamber 35; at this time, the lower surface of the first cover plate 2 and the upper surface of the second cover plate 3 that are not contaminated are exposed in the factory again;

[0060] The first sealed chamber 34 and the second sealed chamber 35 return to their respective independent states, and the transfer of process equipment between the two is completed.

[0061] The double-cover transfer device in this embodiment can provide a channel for the transfer of equipment in a high-grade sealed chamber, and meet the sealing requirements of the high-grade sealed chamber, ensure α sealing, and achieve the sealing requirement that the chamber sealing level is better than level 2, thereby preventing the spread of pollution; through the use of a variety of conical structures and guide mechanisms, the reliable positioning of the double covers (the first cover plate 2 and the second cover plate 3) is achieved; and the double-cover transfer device has a breakthrough in the effective diameter of Φ640mm, which can realize the maintenance and transfer of large components and process equipment in high-sealed chambers.

[0062] Example 2

[0063] This embodiment discloses a sealing system, including a first sealed chamber 34 and a second sealed chamber 35 , and also includes the double-cover transfer device in Embodiment 1.

[0064] Among them, the opening of the first sealed chamber 34 is provided with a first cover plate 2, the opening of the second sealed chamber 35 is provided with a second cover plate 3, and the second sealed chamber 35 is provided with equipment and other components. When the equipment in the second sealed chamber 35 fails and needs maintenance, the first cover plate 2 is docked with the second cover plate 3, and the door opening mechanism in the first sealed chamber 34 lifts the coupled first cover plate 2 and the second cover plate 3 and transfers them to the first sealed chamber 34, so that the opening of the first sealed chamber 34 is connected with the opening of the second sealed chamber 35, so that the transfer channel between the two is opened, so that the equipment in the second sealed chamber 35 can be transferred to the first sealed chamber 34 for maintenance.

[0065] In this embodiment, the opening diameters of the first sealed chamber 34 and the second sealed chamber 35 are relatively large, and their diameters are greater than Φ640mm. The double-cover transfer device in Example 1 can effectively adapt to such large-diameter openings and ensure their sealing, thereby facilitating the transfer and maintenance of large equipment.

[0066] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A double-cover transfer device, characterized in that: It includes a first sealing mechanism, a second sealing mechanism, and a door opening mechanism. The first sealing mechanism comprises a first cover plate (2), a swing arm (6), a first rotating assembly, and a first sealing ring (1). The first cover plate (2) is arranged in the opening of the first sealed box chamber (34), and the longitudinal section of the opening of the first sealed box chamber (34) is an inverted cone. The longitudinal section of the first cover plate (2) is an inverted cone that matches the shape of the opening of the first sealed box chamber (34). The first sealing ring (1) is used to seal between the first cover plate (2) and the first sealed box chamber (34), and is located on the outside of the first cover plate (2). The first rotating component is passed through the center of the first cover plate (2), and the first rotating component has a first tooth. One end of the swing arm (6) is connected to the first rotating component. The second sealing mechanism comprises a second cover plate (3), a second sealing ring (4), a second rotating assembly, a telescopic assembly, and a flange (5). The flange (5) is fixedly arranged in the opening of the second sealed chamber (35); the second cover plate (3) is arranged in the inner hole of the flange (5); the longitudinal section of the inner hole of the flange (5) is an inverted cone; the bottom of the flange (5) is a slope; the end of the flange (5) away from the second cover plate (3) is higher than the end of the flange (5) close to the second cover plate (3); the longitudinal section of the second cover plate (3) is an inverted cone matching the shape of the inner hole of the flange (5); the contact surface between the first cover plate (2) and the first sealed chamber (34) is a first contact surface; the contact surface between the second cover plate (3) and the flange (5) is a second contact surface; the second contact surface is the same plane extending downward from the first contact surface; the second sealing ring (4) is used for sealing between the second cover plate (3) and the flange (5); it is located on the outer side of the second cover plate (3); the second rotating component is passed through the center of the second cover plate (3); the second rotating component has a second tooth; the second tooth can mesh with the first tooth; The telescopic assembly is arranged at the bottom of the second cover plate (3) and is connected to the second rotating assembly. The telescopic end of the telescopic assembly is located directly below the flange (5). The door opening mechanism is arranged inside the first sealed chamber (34). When the first tooth is meshed with the second tooth, the swing arm (6) is driven to move, thereby driving the first rotating assembly and the second rotating assembly to rotate, thereby causing the telescopic end of the telescopic assembly to retract from below the flange (5) to below the second cover plate (3). At this time, the door opening mechanism is used to lift the meshed first cover plate (2) and the second cover plate (3) into the first sealed box chamber (34).

2. The double-cover transfer device according to claim 1, characterized in that: The telescopic assembly comprises a rotating disk (17), a connecting rod (16), a pin rod (15), a bearing seat (36) and a first roller (18). The turntable (17) is fixedly mounted on the bottom of the second rotating assembly, the bearing seat (36) is mounted on the bottom of the second cover plate (3), one end of the connecting rod (16) is connected to the turntable (17), and the other end is connected to one end of the pin rod (15), the other end of the pin rod (15) passes through the bearing seat (36), and the first roller (18) is arranged at one end of the pin rod (15) away from the connecting rod (16), and the roller is located directly below the flange (5).

3. The double-cover transfer device according to claim 2, characterized in that: It also includes a driving mechanism, which is arranged in the first sealed box chamber (34) and has an output end connected to the swing arm (6).

4. The double-cover transfer device according to claim 3, characterized in that: The first sealing mechanism further comprises a limit plate (7), wherein the limit plate (7) is arranged on the first cover plate (2), and an annular groove is formed on the limit plate (7). A second roller (8) is also provided at the bottom of the swing arm (6); when the driving mechanism drives the swing arm (6) to swing, the second roller (8) rolls in the groove.

5. The double-cover transfer device according to claim 4, characterized in that: The first sealing mechanism further comprises a limiting assembly (9), the limiting assembly (9) comprising a spring and a steel ball, the spring being arranged at the bottom of the swing arm (6), and the steel ball being mounted on the free end of the spring. The first cover plate (2) is also provided with a limiting hole (32), the position of the limiting hole (32) corresponds to the position of the steel ball, the limiting hole (32) is annular in shape, and the size of the limiting hole (32) matches the size of the steel ball. When the driving mechanism drives the swing arm (6) to swing, the steel ball rolls in the limiting hole (32) from one end of the limiting hole (32) to the other end, and the swing arm (6) moves from an initial position to a target position.

6. The double-cover transfer device according to claim 1, characterized in that: The first rotating assembly comprises a first transmission shaft (24), a first bearing (26), a third sealing ring (25), and a first end cover (31). The first bearing (26) is mounted at a central position of the first cover plate (2); the first transmission shaft (24) is supported on the first bearing (26) and passes through the center of the first cover plate (2); the first transmission shaft (24) is connected to the swing arm (6) via a first flat key (30); the first end cover (31) is sleeved on the first transmission shaft (24) and fixed on the first cover plate (2); and the third sealing ring (25) is arranged between the first end cover (31) and the first cover plate (2); The first tooth is arranged on the bottom end of the first transmission shaft (24).

7. The double-cover transfer device according to claim 6, characterized in that: The second rotating assembly comprises a second transmission shaft (19), a second bearing (14), a fourth sealing ring (22), and a second end cover (21). The second bearing (14) is mounted at a central position of the second cover plate (3); the second transmission shaft (19) is supported on the second bearing (14) and passes through the center of the second cover plate (3); the telescopic assembly is connected to the second transmission shaft (19) via a second flat key (23); the second end cover (21) is sleeved on the second transmission shaft (19) and fixed on the second cover plate (3); and the fourth sealing ring (22) is provided between the second end cover (21) and the second cover plate (3); The second tooth is arranged at the top end of the second transmission shaft (19).

8. The double-cover transfer device according to claim 7, characterized in that: A positioning pin (10) / pin hole (33) is provided on the top surface of the second end cover (21), and a pin hole (33) / positioning pin (10) with a corresponding position is provided on the bottom surface of the first end cover (31).

9. The double-cover transfer device according to any one of claims 1 to 8, characterized in that: The first sealing ring (1) is arranged at the bottom of the first cover plate (2), and the second sealing ring (4) is arranged at the top of the second cover plate (3), so that the first sealing ring (1) and the second sealing ring (4) can contact each other.

10. The double-cover transfer device according to claim 8, characterized in that: The first sealing ring (1) and the second sealing ring (4) are both lip-shaped, and each sealing surface of the first sealing ring (1) and the second sealing ring (4) is provided with a tooth-shaped structure for increasing the sealing area.

11. A sealing system, comprising a first sealed chamber (34) and a second sealed chamber (35), characterized in that: It also includes the double-cover transfer device according to any one of claims 1-10.

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