Film reading device and method of using the film reading device

Abstract

The purpose of the embodiment of the present application is to provide a film reading device. The film reading device of the embodiment of the present application includes a housing, a base, a laser sensor device, a drive device, a lead screw, a control device and a power supply; wherein, the housing of the film reading device is marked with indication information and an indicator light; the indication information is used to indicate each slot, and the indicator light is used to indicate whether there is a wafer in the corresponding slot; wherein, the laser sensor device is used to sense the position of the wafer, and the laser sensor is arranged on the drive device, so as to move along the lead screw with the drive device. The embodiment of the present application has the following advantages: the position of the wafer in the crystal box is identified by the sensor device, the size is small, and it is portable and easy to use; and, according to the embodiment of the present application, the base height of the film reading device is adjustable, so that it can be applied to crystal boxes of various specifications.

Description

Technical Field

[0001] The present invention relates to the field of semiconductors, and in particular to a film reading device and a method using the film reading device. Background Art

[0002] The smallest unit for wafer storage and transmission is a "box" (or "batch"), and a box of wafers generally contains 25 wafers. Due to various reasons, such as some wafers being scrapped or separated for other experiments, a box of wafers is not a full batch of 25 wafers, that is, not all slots in the wafer box have wafers. However, based on the solutions of the prior art, it is generally necessary to manually determine which slots of the wafer box have wafers. In addition, the existing wafer reading equipment is integrated on a large machine, the position is fixed, and the efficiency is low. Summary of the invention

[0003] The purpose of the embodiments of the present application is to provide a film reading device and a method for using the film reading device.

[0004] An embodiment of the present application provides a film reading device, characterized in that the film reading device includes a housing, a base, a laser sensor device, a driving device, a screw, a control device and a power supply; wherein the housing of the film reading device is marked with indication information and an indicator light; the indication information is used to indicate each slot, and the indicator light is used to indicate whether there is a wafer in the corresponding slot; wherein the laser sensor device is used to sense the position of the wafer, and the laser sensor is arranged on the driving device so as to move along the screw with the driving device.

[0005] According to one embodiment, the height of the base is adjustable.

[0006] According to one embodiment, the shell is made of lightweight material and the base is made of high-density material.

[0007] The present application embodiment provides a method for using the image reading device according to the present embodiment, wherein the method includes:

[0008] After the indicating scale is aligned with the slot of the crystal box, the film reading device is started, so that the laser sensor device moves up and down under the action of the driving device and the lead screw to perform scanning;

[0009] The scanning data is transmitted from the laser sensor device to the control device;

[0010] The control device performs calculation based on the scan data to obtain corresponding result information, wherein the result information is used to indicate the slot where the wafer is located;

[0011] Based on the result information, the control device lights up the indicator light corresponding to the slot where the wafer is located.

[0012] Compared with the prior art, the embodiments of the present application have the following advantages: the film reading device according to the embodiments of the present application uses a sensor device to identify the position of the wafer in the crystal box, is small in size, and is portable and easy to use; and the base height of the film reading device according to the embodiments of the present application is adjustable, so that it can be suitable for crystal boxes of various specifications. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0014] FIG. 1( a ) shows a schematic structural diagram of an exemplary film reading device according to an embodiment of the present application;

[0015] FIG1( b ) shows a schematic structural diagram of an exemplary film reading device according to an embodiment of the present application;

[0016] Figure 2 A flow chart of a method for using a film reading device according to an embodiment of the present application is shown.

[0017] The same or similar reference numerals in the drawings represent the same or similar components. DETAILED DESCRIPTION

[0018] The film reading device according to the embodiment of the present application can be used as a separate device for wafer storage and film reading, or the film reading device according to the embodiment of the present application can be externally connected to other devices that do not have a film reading function.

[0019] According to an embodiment of the present application, the film reading device includes a housing, a base, a laser sensor device, a driving device, a lead screw, a control device and a power supply.

[0020] Wherein, the outer shell of the film reading device is marked with indication information and indicator lights.

[0021] Thereafter, the indication information is used to indicate each slot of the wafer box, and the indicator light is used to indicate whether there is a wafer in the corresponding slot.

[0022] The indication information includes various information that can identify each slot, such as numbers or text.

[0023] According to one embodiment, the indication information is an indication scale, each indication scale corresponds to an indicator light, and when the indicator light is on, it means that there is a wafer in the slot indicated by the corresponding indication scale.

[0024] The laser sensor device is used to sense the position of the wafer, and the laser sensor is arranged on the driving device so as to move along the lead screw along with the driving device.

[0025] Wherein, the control device includes various devices that can be used to process data of the laser sensor device. Preferably, the control device is a control panel.

[0026] According to one embodiment, the height of the base is adjustable.

[0027] According to one embodiment, the shell is made of lightweight material and the base is made of high-density material.

[0028] The present invention is further described in detail below in conjunction with the accompanying drawings.

[0029] FIG. 1( a ) and FIG. 1( b ) are schematic diagrams showing the structure of an exemplary film reading device according to an embodiment of the present application.

[0030] Among them, Figure 1(a) is a front view, and Figure 1(b) is a side view.

[0031] The reference numerals and their corresponding components in FIG. 1( a ) and FIG. 1( b ) are shown as follows:

[0032] 101: Shell;

[0033] 102: base;

[0034] 103: laser sensor;

[0035] 104: Driver;

[0036] 105: screw;

[0037] 106: control panel;

[0038] 107: Power supply;

[0039] 108: indicating scale;

[0040] 109: indicator light;

[0041] 110: Start button;

[0042] 1( a ) and 1 ( b ), the image reader according to the present embodiment includes a housing 101 , a base 102 , a laser sensor 103 , a driver 104 , a lead screw 105 , a control board 106 , and a power supply 107 .

[0043] The housing 101 of the image reader according to this embodiment is marked with an indication scale 108 and an indicator light 109 .

[0044] The indicator scale 108 includes numbers from 1 to 25, which are used to indicate the 25 slots of the wafer box. When the indicator light 109 is on, it means that there is a wafer in the slot indicated by the corresponding number. As shown in FIG. 1(a), the indicator lights corresponding to the indicator scales 6, 14 and 23 are on, indicating that there are wafers in these three slots.

[0045] The height of the base 102 is adjustable.

[0046] Wherein, a start button 110 is disposed on the top of the housing 101 .

[0047] The housing 101 is made of light material, and the base 102 is made of high-density material.

[0048] The laser sensor 103 is used to sense the position of the wafer, and the laser sensor 103 is on the driver 104 , so as to move along the lead screw 105 along with the driver 104 .

[0049] It should be noted that the above examples are only for better illustrating the technical solutions of the present invention, rather than limiting the present invention. Those skilled in the art should understand that any implementation of the film reading device according to the embodiments of the present application should be included in the scope of the present invention.

[0050] The film reading device according to the embodiment of the present application uses a sensor device to identify the position of the wafer in the crystal box, and is small in size, portable and easy to use. Moreover, the base height of the film reading device according to the embodiment of the present application is adjustable, so that it can be applied to crystal boxes of various specifications.

[0051] Figure 2 A flow chart of a method for using a film reading device according to an embodiment of the present application is shown.

[0052] The method according to the embodiment of the present application includes step S1, step S2, step S3 and step S4.

[0053] Reference Figure 2 In step S1, after the indicating scale is aligned with the slot of the crystal box, the film reading device is started, so that the laser sensor device moves up and down under the action of the driving device and the lead screw to perform scanning.

[0054] In step S2, scanning data is transmitted from the laser sensor device to the control device.

[0055] The scanning data includes various sensing data generated by the laser sensor device.

[0056] In step S3, the control device performs calculation based on the scan data to obtain corresponding result information, wherein the result information is used to indicate the slot where the wafer is located.

[0057] According to one embodiment, the result information is used to indicate the number of wafers in the wafer box and the slot corresponding to each wafer.

[0058] It should be noted that those skilled in the art should be familiar with the method of determining the position of the laser sensor device itself and the position of the corresponding slot with the wafer based on the scanning data of the laser sensor device, which will not be described in detail here.

[0059] In step S4, the control device lights up the indicator light corresponding to the slot where the wafer is located based on the result information.

[0060] According to one embodiment, the method further comprises a step S5 before the step S1.

[0061] In step S5, the base height of the wafer reading device is set and locked so that the indicating scale is aligned with the slot of the wafer box.

[0062] Continuing with reference to FIG. 1( a ) and FIG. 1( b ), the process of using the film reading device shown in FIG. 1( a ) and FIG. 1( b ) includes:

[0063] The height of the base 102 of the wafer reader is set according to the factory wafer box specifications and locked so that the indicator scale is aligned with the slot of the wafer box;

[0064] Align the front of the reader to the direction where the wafer can be seen through the transparent cassette, press the start button 110 to start the reader, so that the laser sensor 103 completes scanning from bottom to top under the action of the driver 104 and the lead screw 105;

[0065] After completing the scan, the laser sensor 103 transmits the scan data to the control board 106;

[0066] The control board 106 performs calculations based on the scan data and feeds the results back to the indicator panel, so that the indicator lights corresponding to the slots where the wafers are located light up.

[0067] According to the method of the embodiment of the present application, the position of the wafer in the wafer box is identified by a sensor device, which is small in size and easy to carry and use.

[0068] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any figure mark in the claims should not be regarded as limiting the claims involved. In addition, it is obvious that the word "comprising" does not exclude other units or steps, and the singular does not exclude the plural. Multiple units or devices stated in the system claim can also be implemented by one unit or device through software or hardware. The words first, second, etc. are used to indicate names, and do not indicate any particular order.

Claims

1. A film reading device, It is characterized in that The film reading device comprises a housing, a base, a laser sensor device, a drive device, a lead screw, a control device and a power supply; The housing of the wafer reading device is marked with indication information, an indicator light and a scanning window; the indication information is an indication scale, each indication scale corresponds to an indicator light, and when the indicator light is on, it means that there is a wafer in the slot indicated by the corresponding indication scale; Wherein, the laser sensor device senses the position of the wafer through the scanning window, and the laser sensor device is arranged on the driving device. Under the action of the driving device and the lead screw, the laser sensor device moves up and down in the scanning window to scan and transmit the scanning data to the control device; Wherein, the height of the base is adjustable; The control device performs calculations based on the scan data to obtain corresponding result information, and the result information is used to indicate the number of wafers in the wafer box and the slot corresponding to each wafer.

2. The film reading device according to claim 1, It is characterized in that The shell is made of light material, and the base is made of high-density material.

3. A method of using the film reading device according to claim 1 or 2, in, The method comprises: After the indicating scale is aligned with the slot of the crystal box, the film reading device is started, so that the laser sensor device moves up and down in the scanning window under the action of the driving device and the lead screw to perform scanning; The scanning data is transmitted from the laser sensor device to the control device; The control device performs calculation based on the scan data to obtain corresponding result information, wherein the result information is used to indicate the number of wafers in the wafer box and the slot corresponding to each wafer; Based on the result information, the control device lights up the indicator light corresponding to the slot where the wafer is located, wherein each indicator scale corresponds to an indicator light, and when the indicator light is on, it means that there is a wafer in the slot indicated by the corresponding indicator scale.

4. The method according to claim 3, in, The method comprises: Set the base height of the film reader and lock it so that the indicator scale is aligned with the slot of the crystal box.

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