Lamp, light source device, exposure apparatus, and article manufacturing method

Abstract

The present invention relates to a lamp, a light source apparatus, an exposure apparatus, and an article manufacturing method. A lamp has fins provided around a periphery of a metal base. The fins include a first surface proximate to a focal point of a light emitting tube and a second surface distal from the focal point on an opposite side of the first surface. A distance between a focal point plane, which is a plane including the focal point orthogonal to a central axis of the metal base, and a first inner edge of the first surface is shorter than a distance between the focal point plane and a first outer edge of the first surface. A distance between the first inner edge and the first outer edge of the first surface is not shorter than a distance between a second inner edge and a second outer edge of the second surface.

Description

Technical Field

[0001] This invention relates to lamps, light source devices, exposure apparatuses, and methods for manufacturing articles. Background Technology

[0002] An exposure apparatus is used in a photolithography step for manufacturing devices such as semiconductor devices or display devices. A light source device is incorporated into the exposure apparatus and may include a replaceable lamp. This lamp, for example, includes: a pair of metal bases; a light-emitting tube disposed between the pair of metal bases; and a pair of electrodes disposed in the light-emitting tube and respectively connected to the pair of metal bases. Mercury or the like, as a luminescent material, can be enclosed within the light-emitting tube. When power is supplied between the pair of electrodes through the pair of metal bases, an arc discharge is generated between the pair of electrodes, thereby allowing the lamp to emit light. When the lamp emits light, the temperature of the metal bases is very high, and the metal bases need to be cooled. Japanese Patent Application Publication No. 2003-17003 describes a light source device that includes fins in the metal base portion configured to improve cooling efficiency, and cools the metal base portion by blowing cooling air onto the fins.

[0003] The temperature of the metal base tends to rise as the lamp's output increases. To adequately cool the metal base, it is necessary to blow a sufficient flow of gas into it. However, if the light-emitting tube is excessively cooled by the gas, luminescent materials such as mercury inside the tube may not evaporate sufficiently, potentially causing the lamp to malfunction. Summary of the Invention

[0004] This invention provides a technique that facilitates stable light emission from a lamp.

[0005] The present invention provides a lamp in a first aspect, comprising: a light-emitting tube having a glow point; a metal base connected to an end of the light-emitting tube; and fins disposed around the periphery of the metal base, wherein the fins include a first surface near the glow point and a second surface opposite the first surface away from the glow point, the distance between the glow point plane and a first inner edge of the first surface is shorter than the distance between the glow point plane and a first outer edge of the first surface, the glow point plane being a plane including the glow point and orthogonal to the central axis of the metal base, and the distance between the first inner edge and the first outer edge of the first surface is not shorter than the distance between the second inner edge and the second outer edge of the second surface.

[0006] The invention provides a light source device in its second aspect, comprising: a holder configured to hold a lamp according to the first aspect; a condenser lens configured to converge light generated by the lamp; and a nozzle including a jet orifice configured to jet gas to cool a metal base.

[0007] The present invention provides, in a third aspect, an exposure apparatus comprising: a light source device according to the second aspect; an illumination optical system configured to illuminate a manuscript with light from the light source device; and a projection optical system configured to project a pattern of the manuscript onto a substrate.

[0008] The present invention provides, in its fourth aspect, a method for manufacturing an article, comprising: exposing a substrate using an exposure apparatus according to the third aspect; developing the exposed substrate; and obtaining an article by processing the developed substrate.

[0009] Further features of the invention will become apparent from the following description of exemplary embodiments (with reference to the accompanying drawings). Attached Figure Description

[0010] Figure 1 It is a view that schematically illustrates the structure of the exposure apparatus;

[0011] Figure 2 It is a view that schematically illustrates the structure of the light source device;

[0012] Figure 3A and Figure 3B These are views showing examples of lead wire arrangements;

[0013] Figure 4A and Figure 4B It is a view that schematically illustrates the structure of the light source device;

[0014] Figure 5 It is a schematic view showing the nozzle in the light source device;

[0015] Figure 6 This is a schematic view showing the construction of the metal base in the lamp;

[0016] Figure 7A and Figure 7B It is a view used to illustrate the flow of gas around the metal base;

[0017] Figure 8 This is a view showing the construction of the experimental system;

[0018] Figure 9A and Figure 9B This is a view showing the shapes of multiple fins used in the comparative experiment;

[0019] Figure 10 This is a diagram showing the airflow velocity distribution with the metal base removed.

[0020] Figure 11A and Figure 11B It is a diagram used to illustrate the differences in air velocity distribution caused by differences in fin shape;

[0021] Figures 12A to 12I This is a view showing a variation of the fin shape; and

[0022] Figure 13 It is a view that schematically shows the structure of the light source device. Detailed Implementation

[0023] In the following description, embodiments will be illustrated with reference to the accompanying drawings. Note that the following embodiments are not intended to limit the scope of the claimed invention. Several features are described in the embodiments, but the invention is not limited to requiring all of these features, and multiple such features can be suitably combined. Furthermore, in the drawings, the same reference numerals denote the same or similar constructions, and repeated descriptions thereof are omitted.

[0024] In this specification and accompanying drawings, directions are indicated in an XYZ coordinate system with the horizontal plane as the XY plane. Generally, the substrate to be exposed is placed on a substrate stage such that the surface of the substrate is parallel to the horizontal plane (XY plane). In the following description, mutually orthogonal directions along the plane of the substrate surface are respectively defined as the X-axis and Y-axis, while the direction perpendicular to the X-axis and Y-axis is defined as the Z-axis. Furthermore, directions parallel to the X-axis, Y-axis, and Z-axis in the XYZ coordinate system will be referred to hereinafter as the X direction, Y direction, and Z direction, respectively.

[0025] <First Embodiment>

[0026] Figure 1 The structure of an exposure apparatus 100 according to a first embodiment of the present invention is shown. The exposure apparatus 100 is an apparatus that forms a latent image pattern corresponding to the pattern of the original document on a photosensitive substrate by projecting the pattern of the original document onto the substrate coated with a photosensitive substrate via an optical system. The exposure apparatus 100 may include, for example, a light source device 110; a shutter device 120; an illumination optical system 130; an original document holder 140; a projection optical system 150; and a substrate holder 160. The light source device 110 may include a holder 20 for a holding lamp 10. The original document holder 140 holds the original document 142. The original document holder 140 is positioned by an original document positioning mechanism (not shown), and the original document 142 can therefore be positioned. The substrate holder 160 holds the substrate 162. The substrate 162, coated with photoresist (photosensitive material) by a photoresist coating device, is supplied to the exposure apparatus 100. The substrate holder 160 is positioned by a substrate positioning mechanism (not shown), and the substrate 162 can therefore be positioned.

[0027] The shutter device 120 is arranged to block the light flux in the optical path between the light source device 110 and the original document holder 140. The illumination optics system 130 illuminates the original document 142 using light from the light source device 110. The projection optics system 150 projects the pattern of the original document 142 illuminated by the illumination optics system 130 onto a substrate 162, thus exposing the substrate 162. This forms a latent image pattern on the resist coated on the substrate 162. The latent image pattern is developed by a developing apparatus (not shown), forming a resist pattern on the substrate 162.

[0028] Figure 2 The structure of the light source device 110 is shown. The light source device 110 may include: a holder 20 for holding the lamp 10, a condenser lens 50 for converging the light generated by the lamp 10, and nozzles 42a and 42b including injection holes that inject gas to cool the metal bases 11a and 11b of the lamp 10. Furthermore, the light source device 110 may include a power supply unit (lamp power supply) 30 that supplies power to the lamp 10 via leads (cables) 32a and 32b, and a gas supply unit 40 that supplies gas to the nozzles 42a and 42b via supply pipes 41a and 41b, respectively.

[0029] Lamp 10 can be, for example, a short-arc lamp such as a mercury lamp, xenon lamp, or metal halide lamp. Condenser 50 can be, for example, an ellipsoidal mirror with two focal points FP1 and FP2. The glow point AP of lamp 10 is located at or near the first focal point FP1, and condenser 50 can reflect the light radiated from the glow point AP and converge it to the second focal point FP2. The diameter of the opening of condenser 50 can depend on the size of lamp 10, for example, 300 mm to 400 mm. Furthermore, lamp 10 can be arranged on the optical axis OAX of condenser 50 (the axis connecting the first focal point FP1 and the second focal point FP2). Nozzles 42a and 42b can be arranged to blow high-pressure air supplied from gas supply unit 40 onto metal bases 11a and 11b, respectively. This cools metal bases 11a and 11b. To avoid obstructing the effective luminous flux 52 reflected by condenser 50, nozzle 42a can be arranged outside the effective luminous flux 52. To cool the metal bases 11a and 11b, other cooling media, such as nitrogen or helium, may be used instead of air.

[0030] Lamp 10 may include: a light-emitting tube 13 having a glow point AP; a pair of metal bases 11a and 11b connected to both ends of the light-emitting tube 13; and stems 14a and 14b extending from the metal bases 11a and 11b respectively. The light-emitting tube 13 may be arranged between the stems 14a and 14b. The stems 14a and 14b and the light-emitting tube 13 may be integrally formed. Lamp 10 may further include a pair of electrodes 12a and 12b, which are arranged in the stems 14a and 14b and the light-emitting tube 13. In the example, the metal base 11a may be an anode-side metal base, the metal base 11b may be a cathode-side metal base, the electrode 12a may be an anode, and the electrode 12b may be a cathode.

[0031] The metal base 11a and electrode 12a can be connected via a connector such as a molybdenum foil. Similarly, the metal base 11b and electrode 12b can be connected via a connector such as a molybdenum foil. Rare gases such as neon or xenon, metals such as mercury, sodium, or scandium, or mixtures thereof can be enclosed in the light-emitting tube 13. Light is emitted through an electric arc discharge between a pair of electrodes 12a and 12b. The metal bases 11a and 11b can be connected to the power supply unit 30 via leads 32a and 32b, respectively. Figure 2 An example is shown in which leads 32a and 32b are connected to the side surfaces of metal bases 11a and 11b, respectively. Figure 3A As shown, leads 32a and 32b can be connected to the end faces of metal bases 11a and 11b, respectively. Optionally, as... Figure 3B As exemplified, leads 32a and 32b can be connected to metal bases 11a and 11b respectively via connectors 11c and 11d, such as lead connection terminals, adapters, or fixing fittings. Furthermore, leads 32a and 32b can be formed of conductive wires or other conductive components.

[0032] Note that when metal bases 11a and 11b are described without distinction, they will be referred to as metal base 11 in the following text. The description of metal base 11 is a description of metal base 11a and / or metal base 11b. Similarly, when leads 32a and 32b are described without distinction, they will be referred to as leads 32 in the following text. The description of leads 32 is a description of leads 32a and / or leads 32b. Similarly, when nozzles 42a and 42b are described without distinction, they will be referred to as nozzles 42 in the following text. The description of nozzles 42 is a description of nozzles 42a and / or nozzles 42b. Similarly, when supply tubes 41a and 41b are described without distinction, they will be referred to as supply tubes 41 in the following text. The description of supply tubes 41 is a description of supply tubes 41a and / or supply tubes 41b.

[0033] Figure 4A and Figure 4B An example of the arrangement of the metal base 11, nozzle 42 and condenser lens 50 is shown schematically. Figure 4A The diagram shows a plan view when viewed from the Z direction, i.e., an orthogonal projection onto the XY plane. Figure 4B A side view, viewed from the Y direction, is shown, i.e., an orthogonal projection onto the XZ plane, which is parallel to the central axis CAX of the metal base 11. The metal base 11 may include a cylindrical surface CS and at least one cooling fin 15 extending radially beyond the cylindrical surface. The nozzle 42 includes an injection orifice 45 that injects gas to cool the metal base 11. The injection orifice 45 has a central axis HAX. For example, if the injection orifice 45 is cylindrical, the central axis HAX of the injection orifice 45 matches the central axis of the cylinder. The nozzle 42 is arranged such that the central axis HAX intersects the center of the metal base 11 or at least a portion of the metal base 11 or the fin 15. The flow of the gas injected from the injection orifice 45 is schematically shown as F1, F2, and F3.

[0034] Figure 5 The structure of nozzle 42 and supply pipe 41 is shown. Nozzle 42 can be engaged or connected to supply pipe 41, thus preventing air or gas leakage. The injection hole 45 of nozzle 42 can be, for example, a circular opening with a diameter ΦD falling within the range of 1 mm (inclusive) to 2 mm (inclusive). The velocity distribution of the air or gas injected from injection hole 45 can be symmetrical about the central axis HAX of injection hole 45. The flow rate of the air or gas injected from injection hole 45 can be set, for example, to 0.02 m at 20°C and 1 atm (atmosphere). 3 / min (including 0.02m) 3 ( / min) to 0.2m 3 / min (including 0.2m) 3 Within the range of ( / min).

[0035] In the example, such as Figure 4BAs shown, the metal base 11, fins 15, and nozzle 42 are positioned higher than the opening end 50a of the condenser lens 50. In this case, the nozzle 42 is arranged such that the line including the central axis HAX of the injection hole 45 is perpendicular to the central axis CAX of the metal base 11. In this example, the elevation angle of the central axis HAX of the injection hole 45 of the nozzle 42 can fall within the range of -10° (inclusive) to +10° (inclusive), while the angle of the central axis CAX of the metal base 11 relative to the vertical direction (Z-axis direction) can fall within the range of -10° (inclusive) to +10° (inclusive). In other views, on a plane including the central axis HAX of the injection hole 45 and parallel to the central axis CAX of the metal base 11, the angle formed by the line L1 including the central axis HAX of the injection hole 45 and the plane perpendicular to the central axis CAX of the metal base 11 can fall within the range of -10° (inclusive) to +10° (inclusive).

[0036] Figure 6 An example of the construction of the metal base 11 and the fins 15 is shown. The first surface 15a and the second surface 15b are surfaces that substantially form the fins and can be considered as a single surface by including discontinuous surfaces. The inner edge (inner periphery) indicates the bend where the cylindrical surface CS of the metal base 11 intersects with the first surface 15a or the bend where the cylindrical surface CS of the metal base 11 intersects with the second surface 15b. Furthermore, the outer edge (outer periphery) indicates the bend on the first surface 15a or the second surface 15b away from the central axis CAX of the metal base. That is, on the first surface 15a or the second surface 15b, the inner edge indicates the bend close to the central axis CAX of the metal base, while the outer edge indicates the bend away from the central axis CAX of the metal base and existing outside the inner edge.

[0037] The fin 15 may include a first surface 15a near the lamp's glow point AP and a second surface 15b opposite the first surface 15a and away from the lamp's glow point AP. The fin 15 may have a shape symmetrical about the central axis CAX of the metal base 11. (See reference...) Figure 6A plane including the luminous point AP and orthogonal to the central axis CAX of the metal base 11 is defined as the luminous point plane P. The luminous point plane P is typically a horizontal plane. When h1 represents the distance between the luminous point plane P and the inner edge 151 (first inner edge) of the first surface 15a, and h2 represents the distance between the luminous point plane P and the outer edge 152 (first outer edge) of the first surface 15a, the relationship between h1 and h2 is h2 > h1. That is, the first surface 15a has a shape such that the distance from the luminous point plane P (as a plane including the luminous point AP and orthogonal to the central axis CAX of the metal base 11) to the inner edge 151 is shorter than the distance from the luminous point plane P to the outer edge 152. In other words, the distance between the luminous point plane P and the inner edge 151 is shorter than the distance between the luminous point plane P and the outer edge 152.

[0038] The first surface 15a may include a slope that extends from the inner edge 151 to the outer edge 152 in a direction away from the luminous point plane P. Figure 6 In the example shown, the inclined surface can form part of a conical surface with the central axis CAX of the metal base 11 as the axis of the cone. On the other hand, the second surface 15b can, for example, be formed from a flat surface orthogonal to the central axis CAX of the metal base 11. When R1 represents the distance between the inner edge 151 and the outer edge 152 of the first surface 15a, and R2 represents the distance between the inner edge 153 (second inner edge) and the outer edge 154 (second outer edge) of the second surface 15b, the relationship between R1 and R2 is R1 ≥ R2. That is, the distance between the inner edge 151 and the outer edge 152 of the first surface 15a is equal to or longer than the distance between the inner edge 153 and the outer edge 154 of the second surface 15b.

[0039] Reference Figure 7A and Figure 7B The flow of gas around the metal base 11 according to this embodiment is described. Figure 7A This is a plan view of the metal base 11 as viewed from the Z direction, and Figure 7B This is a side view of the metal base 11 when viewed from the Y direction. Figure 7A and Figure 7B It is achieved by magnification respectively Figure 4A and Figure 4B A view obtained from the portion surrounding the middle fin 15.

[0040] Reference Figure 7A The air stream F1 ejected from nozzle 42 is separated into two streams F2 on the side surface of the metal base 11. After the air flows along the side surface of the metal base 11, the two streams F2 merge again to form stream F3. (See reference...) Figure 7BBy focusing on the flow along the upper and lower surfaces of the fin 15, the air flow F1 injected from the nozzle 42 passes through the outer periphery 15c of the fin 15 (corresponding to...). Figure 6 The outer edges 152 and 154 of the cylinder separate into an upper flow and a lower flow, thus forming flow F2 along the periphery of the cylindrical surface CS. Downstream of flow F2, the flow along the second surface 15b becomes flow F22 without changing its height, while the flow along the first surface 15a changes its direction through the Coanda effect and becomes an upward flow F21. Flows F22 and F21 merge at the outer periphery 15c' on opposite sides of the outer periphery 15c to form an upward flow F3.

[0041] Notice, Figure 6 , Figure 7A and Figure 7B The example shown illustrates a case where three fins are arranged in the metal base 11. However, the invention is not limited to this. One or more fins 15 may be provided. Multiple nozzles 42 may be arranged corresponding to multiple fins 15. Furthermore, the fins 15 may be integrally formed with the metal base 11, or joined or connected to the metal base 11 by methods such as press fitting. The fins 15 may be arranged in... Figure 3B The connector 11c or 11d shown is connected to the metal base 11a or 11b.

[0042] Figure 8 A side view of the experimental system used for actual measurement of the flow of air ejected from nozzle 42 is shown. Line L1, including the central axis HAX of the injection hole 45, and the central axis CAX of the metal base 11 are orthogonal to each other and pass through the center of the metal base in the height direction (Z direction). Let D1 be the distance between the distal end of nozzle 42 and the cylindrical surface CS1. Furthermore, let F1 be the flow of air from the injection hole 45 to the cylindrical surface CS1, and F3 be the flow of air after passing through the cylindrical surface CS1. A position at a distance D2 from the cylindrical surface CS1 in the X direction is set as the location for measuring the velocity distribution, and the velocity distribution in the Z direction is also measured. The diameter Φ of the cylindrical surface CS is set to 40 mm, the ΦD of the injection hole 45 of nozzle 42 is set to 1.5 mm, and the flow rate of the air ejected from nozzle 42 is set to 0.05 m³ / s. 3 / min (at 20°C and 1 atm).

[0043] Figure 9A and Figure 9B A side view of several fins used in the comparative experiment is shown. Figure 9AThe shape of the fin based on this embodiment is shown. In this example, the fin thickness FH1 is set to 3 mm, the height FH2 of the cylindrical portion between the upper and lower fins is set to 3 mm, and the stretch length FL from the diameter Φ of the cylindrical surface CS1 is set to 6 mm. Furthermore, the lower first surface and the upper second surface of the fin are... Figure 6 The same applies to the example shown. That is, the first surface of the fin is formed, for example, by an inclined plane that constitutes part of a conical surface with the central axis CAX as the conical axis, and the second surface of the fin is formed, for example, by a flat surface orthogonal to the central axis CAX.

[0044] Figure 9B The shape of the fin according to a comparative example is shown. In this comparative example, the fin thickness FH1 is set to 3 mm, the height FH2 of the cylindrical portion between the fins is set to 3 mm, and the extension length FL from the diameter Φ of the cylindrical surface CS1 is set to 6 mm. The lower first surface and the upper second surface of the fin are parallel flat surfaces, and the outer surface of the fin is a cylindrical surface. Figure 9A and Figure 9B In this case, the number of fins is set to 6.

[0045] Figure 10 The results show the velocity distribution of air ejected from nozzle 42 measured at a distance D1 = 120 mm from the distal end of nozzle 42. During this measurement operation, Figure 8 The metal base 11 shown has been removed. That is, a state has been established where nothing obstructs the flow of air ejected from nozzle 42. Figure 10 In the diagram shown, the horizontal axis represents the position in the Z direction when line L1, including the central axis HAX, is set as the center, and the vertical axis represents the air velocity. It can be understood that the air velocity distribution is symmetrical with respect to line L1, including the central axis HAX. When the diameter of the condenser lens 50 is 300 mm and the diameter Φ of the cylindrical surface CS of the metal base 11 is 40 mm, the distance D1 = 120 mm is when the distal end of the nozzle 42 is not obstructed. Figure 2 The minimum distance for the effective luminous flux of 52 is shown.

[0046] Figure 11A and Figure 11B The results of measuring the velocity distribution in the ±Z direction at a distance of D2 = 100 mm from the cylindrical surface CS1 are shown. Figure 11A and Figure 11B In the diagram shown, the horizontal axis represents the position in the Z direction when line L1, which includes the central axis HAX, is set as the center, and the vertical axis represents the air velocity. Figure 11A This is shown in use according to this embodiment. Figure 9A The velocity distribution is shown when the fin shape is as indicated. Figure 11B It is shown that when using surfaces that are parallel to each other... Figure 9B The velocity distribution is shown for the fin shape. Figure 11A The spread ratio of the medium velocity distribution in the ±Z direction Figure 11B The flow is narrower in the middle, thus increasing the maximum flow velocity. It can be seen that the velocity distribution shifts towards the +Z side (upper side).

[0047] In the example, the distance in the height direction (length of the neck 14) between the metal base 11 and the light-emitting tube 13 in the lamp 10 is approximately 80 mm, and the distance in the height direction (Z direction) between the upper metal base 11a and the upper end (open end) of the condenser lens 50 can be set to approximately 50 mm. Therefore, by adopting the construction of this embodiment, the diffusion of air blown toward the metal base 11 to areas outside the metal base 11 can be suppressed. This can suppress the direct cooling of the light-emitting tube 13 of the lamp 10 by the air blown toward the metal base 11 or the indirect cooling of the light-emitting tube 13 by the air flowing into the internal space of the condenser lens 50, and prevent lighting failure or failure to light up due to overcooling of the lamp 10. Therefore, according to the first embodiment, the lamp 10 can emit light stably.

[0048] Furthermore, according to this embodiment, the fin thickness is thinner in the outer periphery 15c and thickens towards the cylindrical surface CS of the metal base 11. That is, the channel through which the air ejected from the nozzle 42 flows gradually narrows. Therefore, the air velocity ejected from the nozzle 42 increases from the outer periphery 15c of the fin towards the cylindrical surface CS. This improves the cooling efficiency of the metal base 11.

[0049] Furthermore, as the output of lamp 10 increases, the temperature of lead 32a, which supplies power to metal base 11a, may rise when irradiated by light flux reflected by condenser lens 50, leading to oxidation and deterioration of lead 32a. If a dedicated air blowing mechanism is provided to cool lead 32a, the operating cost of exposure apparatus 100 may increase due to the increased cost of light source device 110 or the increased airflow. By arranging lead 32a such that an air or gas flow F3 is formed in the portion of lead 32a irradiated by light flux (the temperature rise portion), a portion of lead 32a can be cooled at a low cost.

[0050] <Second Embodiment>

[0051] The second embodiment will now be described. Matters not mentioned in the second embodiment may be followed according to the first embodiment. (Refer to...) Figures 12A to 12I A variation of the shape of the fins 15 disposed in the metal base 11 of the light source device 110 is described. Figures 12A to 12I Each of the figures is a cross-sectional view of the metal base 11 passing through the central axis CAX of the metal base 11. Figures 12A to 12IThe shapes of the individual fins 15 shown are axially symmetrical with respect to the central axis CAX.

[0052] Figure 12A The shape of the fins described in the first embodiment is shown. Figure 12A The fin 15 shown includes a first surface 15a near the glow point AP of the lamp and a second surface 15b on the opposite side of the first surface 15a away from the glow point AP of the lamp. The first surface 15a may include a surface away from the glow point plane P (see...). Figure 6 A sloped surface that slopes from the inner edge to the outer edge in the direction of the metal base 11. This slope can, for example, form part of a conical surface with the central axis CAX of the metal base 11 as the axis of the cone. (See reference...) Figure 12A The second surface 15b forms a flat surface that is parallel to a plane orthogonal to the central axis CAX of the metal base 11.

[0053] Figures 12B to 12I The various figures in the text show relative to... Figure 12A A variation example. Note that, for visual convenience, Figures 12B to 12I No reference numerals or symbols are shown in the accompanying drawings. The following description will relate to... Figure 12A The differences and characteristics.

[0054] Reference Figure 12B The first surface 15a includes a spherical surface, an annular surface, or a freely curved surface that connects the inner edge and the outer edge.

[0055] Reference Figure 12C The first surface 15a is formed by a combination of a conical surface (inclined surface) and a flat surface orthogonal to the central axis CAX of the metal base 11.

[0056] refer to Figure 12D The first surface 15a is formed by a stepped-shaped surface obtained from a combination of a flat surface and a cylindrical or conical surface. The stepped shape can be understood as essentially forming... Figure 12A The shape of the overall inclined plane is shown. The advantage of this stepped shape is that fins can be easily manufactured to achieve this. Figures 12A to 12C The inclined surface of the first surface 15a shown in each of them.

[0057] and Figures 12A to 12D In comparison, the construction of the second surface 15b is... Figures 12E to 12G The differences are present in each of them. Figures 12A to 12D In each of these, the second surface 15b is formed by a flat surface orthogonal to the central axis CAX of the metal base 11. Conversely, referring to... Figure 12E The second surface 15b may include a slope that is inclined from the inner edge to the outer edge in a direction close to the plane P of the light spot. This slope may, for example, form part of a conical surface with the central axis CAX of the metal base 11 as its conical axis. (See reference...) Figure 12F The second surface 15b may include a slope that is inclined from the inner edge to the outer edge in a direction away from the plane P of the luminous point. This slope may form part of a conical surface with the central axis CAX of the metal base 11 as its conical axis. The inclination of this conical surface is smaller than that of the first surface 15a. Conversely, in Figure 12G In this case, the inclination of the second surface 15b is equal to the inclination of the first surface 15a. That is to say, Figure 12G The second surface 15b shown includes a slope that is inclined from the inner edge to the outer edge in a direction away from the plane P of the luminous point, and the slope of this slope is the same as that of the first surface 15a. In other words, Figure 12G The fin 15 shown is a plate-shaped fin with a uniform thickness.

[0058] Reference Figure 12H The side surface of the outer periphery 15c of the fin 15 is formed by a cylindrical surface or a conical surface.

[0059] Reference Figure 12I The side surface of the outer periphery 15c of the fin 15 is formed by an annular surface or a freely curved surface.

[0060] As mentioned above, fins 15 can have various shapes. These shapes all have the relationship R1 ≥ R2, such as... Figure 12E and Figure 12F As shown, R1 represents the distance between the inner and outer edges of the first surface 15a, and R2 represents the distance between the inner and outer edges of the second surface 15b. Note that the shape of the fins 15 can be arbitrarily combined. Figures 12A to 12I The first surface 15a and the second surface 15b shown are used to obtain the shape. In addition, at least one of the first surface 15a and the second surface 15b may have an axisymmetric shape with respect to the central axis CAX of the metal base 11.

[0061] According to the second embodiment, the same effects as the first embodiment can be achieved, and the flow of gas around the metal base 11 is optimized. The manufacturing of the fins becomes easier, thereby allowing for cost reduction. Furthermore, the risk of injury or damage to people or objects from contact with the distal portion of the fins can be reduced.

[0062] <Third Embodiment>

[0063] The following will refer to Figure 13 The construction of the light source device 110 in the exposure apparatus according to the third embodiment is described. Matters not mentioned in the third embodiment may be followed according to the first embodiment. Figure 13 This is a side view showing an example arrangement of the metal base 11, nozzle 42 and condenser lens 50 in the light source device 110 according to the third embodiment.

[0064] According to the first embodiment Figure 4B In the original configuration, the metal base 11, fins 15, and nozzle 42 are positioned higher than the opening end 50a of the condenser lens 50. However, to improve the light capture efficiency of the condenser lens 50 from the lamp 10, the size of the condenser lens 50 can be increased, and the position of the opening end 50a of the condenser lens 50 can become higher than the position of the metal base 11 of the lamp 10 in the vertical direction (Z-axis direction). That is, at least a portion of the metal base 11 and fins 15 can be positioned lower than the opening end 50a of the condenser lens 50. However, the nozzle 42 is positioned higher than the opening end 50a of the condenser lens 50. Figure 13 An example like this is shown.

[0065] Reference Figure 13 The metal base 11 may include a cylindrical surface CS and at least one fin 15 extending radially outside the cylindrical surface CS. The nozzle 42 includes an injection hole 45 that injects gas to cool the metal base 11. The injection hole 45 has a central axis HAX. For example, if the injection hole 45 is cylindrical, then the central axis HAX of the injection hole 45 matches the central axis of the cylinder. The nozzle 42 is arranged such that the central axis HAX intersects the center of the metal base 11 or at least a portion of the metal base 11 or the fin 15. The gas flows injected from the injection hole 45 are schematically shown as F1, F2, and F3.

[0066] In this embodiment, as described above, although the metal base 11 is arranged below the opening end 50a of the condenser lens 50 (-Z side), the nozzle 42 is arranged above the opening end 50a of the condenser lens 50 (+Z side). In this configuration, the nozzle 42 is arranged such that the line including the central axis HAX of the injection hole 45 intersects the side surface of the metal base 11. In this example, the elevation angle of the central axis HAX of the injection hole 45 of the nozzle 42 can fall within the range of -30° (inclusive) to 0° (inclusive), and the angle of the central axis CAX of the metal base 11 relative to the vertical direction (Z-axis direction) can fall within the range of -10° (inclusive) to +10° (inclusive). In other viewpoints, on a plane including the central axis HAX of the injection hole 45 and parallel to the central axis CAX of the metal base 11, the angle formed by the line L1 including the central axis HAX of the injection hole 45 and the plane perpendicular to the central axis CAX of the metal base 11 can fall within the range of -30° (inclusive) to 0° (inclusive).

[0067] In this embodiment, the metal base 11 and fins 15 are constructed the same as in the first or second embodiment. Similar to the first embodiment, in the airflow passing over the cylindrical surface CS of the metal base 11, a flow F3 can be obtained in the direction away from the lamp's glow point AP. Therefore, as... Figure 13 As shown, even though the metal base 11 is positioned below (on the -Z side) the opening end 50a of the condenser lens 50, excessive airflow into the internal space of the condenser lens 50 caused by the air blowing towards the metal base 11 can be prevented. Therefore, in this embodiment, similar to the first embodiment, the diffusion of air blown towards the metal base 11 to areas outside the metal base 11 can be suppressed, thereby preventing lighting failure or failure to light up due to excessive cooling of the lamp 10.

[0068] <Example of Article Manufacturing Method>

[0069] A method for manufacturing an article according to an embodiment of the present invention will now be described. This method is suitable for manufacturing, for example, articles such as devices (semiconductor elements, magnetic storage media, liquid crystal display elements, etc.) or color filters. The method may include an exposure step of exposing a substrate (coated with a photosensitive agent) using the aforementioned exposure apparatus, a development step of developing the exposed substrate, and a processing step of processing the substrate after the development step to obtain an article. The processing steps may include, for example, known processes (e.g., oxidation, deposition, vapor deposition, doping, planarization, etching, resist removal, cutting, bonding, and encapsulation). Compared to conventional methods, the article manufacturing method according to this embodiment is advantageous in at least one aspect of article performance, quality, productivity, and production cost.

[0070] While the invention has been described with reference to exemplary embodiments, it should be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the appended claims should be interpreted in the broadest possible sense to include all such variations and equivalent structures and functions.

Claims

1. A light source device, comprising: A lamp comprising a light-emitting tube and a metal base, the light-emitting tube having a glow point, and the metal base being connected to an end of the light-emitting tube; as well as A nozzle, comprising an injection orifice configured to inject gas to cool the metal base. The lamp includes fins disposed around the periphery of the metal base, wherein the fins include a first surface and a second surface opposite to the first surface, wherein the first surface is closer to the glow point than the second surface. The first and second surfaces are configured such that the flow of gas ejected from the nozzle is separated into a first flow along the first surface and a second flow along the second surface. The first and second flows advance along the side surface of the metal substrate, and then the first flow is drawn into the second flow, thereby merging the first and second flows. Wherein, the distance between the luminous dot plane and the first inner edge of the first surface is shorter than the distance between the luminous dot plane and the first outer edge of the first surface, and the luminous dot plane is a plane including the luminous dot and orthogonal to the central axis of the metal base, and Wherein, the distance between the first inner edge and the first outer edge of the first surface is not less than the distance between the second inner edge and the second outer edge of the second surface.

2. The light source device according to claim 1, wherein, The first surface includes an inclined surface that slopes from the first inner edge toward the first outer edge in a direction away from the plane of the luminous dot.

3. The light source device according to claim 2, wherein, The inclined surface forms part of a conical surface with the central axis as the axis of the cone.

4. The light source device according to claim 2, wherein, The first surface includes the inclined surface and a flat surface orthogonal to the central axis.

5. The light source device according to claim 1, wherein, The first surface includes one of a spherical surface and an annular surface connecting the first inner edge and the first outer edge.

6. The light source device according to claim 1, wherein, The second surface includes a flat surface orthogonal to the central axis.

7. The light source device according to claim 1, wherein, The second surface includes an inclined surface that slopes from the second inner edge toward the second outer edge in a direction close to the plane of the luminous dot.

8. The light source device according to claim 1, wherein, The second surface includes an inclined surface that slopes from the second inner edge toward the second outer edge in a direction away from the plane of the luminous dot.

9. The light source device according to claim 2, wherein the second surface comprises an inclined surface that slopes from the second inner edge toward the second outer edge in a direction away from the glow point plane, the inclination of the inclined surface being the same as the inclination of the first surface.

10. The light source device according to claim 1, wherein, At least one of the first surface and the second surface has an axisymmetric shape relative to the central axis of the metal base.

11. The light source device according to claim 1, further comprising: A retainer, configured to hold the lamp; as well as A condenser lens is configured to converge the light produced by the lamp.

12. The light source device according to claim 11, wherein... In an orthogonal projection onto a plane parallel to the central axis of the metal base, the metal base, fins, and nozzles are positioned higher than the opening end of the condenser lens, and The nozzle is arranged such that the line including the central axis of the jet hole is perpendicular to the central axis of the metal substrate.

13. The light source device according to claim 11, wherein... In an orthogonal projection onto a plane parallel to the central axis of the metal base, at least a portion of the metal base and fins are arranged at a position lower than the opening end of the condenser lens, and the nozzle is arranged at a position higher than the opening end of the condenser lens. The nozzle is arranged such that a line including the central axis of the injection hole intersects the side surface of the metal base.

14. The light source device according to claim 11, wherein, The nozzle is positioned outside the effective luminous flux emitted from the lamp and reflected by the condenser.

15. The light source device according to claim 11, wherein, The velocity distribution of the gas ejected from the injection hole is axially symmetric with respect to the central axis of the injection hole.

16. The light source device according to claim 11, wherein, The condenser lens is an ellipsoidal lens.

17. An exposure apparatus comprising: The light source device according to claim 11; An illumination optical system configured to illuminate the manuscript using light from a light source device; as well as A projection optics system configured to project the pattern of an original onto a substrate.

18. A method for manufacturing an article, comprising: The substrate is exposed using the exposure apparatus according to claim 17; The exposed substrate is then developed; as well as Articles are obtained by processing the developed substrate.

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