Substrate Transfer Device and Substrate Processing Equipment with Substrate Transfer Device

Abstract

The present disclosure relates to a substrate transfer device for sensing the deflection of an end effector and a substrate processing apparatus having the substrate transfer device. The substrate transfer device includes: an end effector that extends in a first direction and supports a substrate; an end effector gripper that is connected to one side of the end effector in the first direction; a horizontal movement unit that is connected to the end effector gripper and moves the end effector in the first direction; and a deflection sensing unit that includes a light emitting component and a light receiving component and senses the deflection of the end effector, wherein the light emitting component and the light receiving component are respectively disposed on both sides of the movement path of the end effector.

Description

Technical Field

[0001] The present disclosure relates to a substrate transfer device and a substrate processing apparatus having the substrate transfer device, and more particularly to a substrate transfer device for sensing deflection of an end effector and a substrate processing apparatus having the substrate transfer device. Background Art

[0002] To perform unit processes in a semiconductor manufacturing process, a plurality of devices suitable for the characteristics of each process are required, and each device includes a substrate transfer device for transferring a substrate.

[0003] Generally, a substrate transfer device of a semiconductor device is used to transfer a substrate from a load-lock chamber to a substrate storage member (e.g., a front opening unified pod (FOUP), a carrier, etc.) or from the substrate storage member to the load-lock chamber.

[0004] A batch-type substrate processing apparatus performs a substrate processing process on a plurality of substrates after stacking the plurality of substrates in a multi-stage manner in a substrate boat from a load-lock chamber. Here, the substrate transfer device may have two or more end effectors to reduce the transfer time of the substrate (e.g., stacking time), and two or more substrates are taken out from the substrate storage member at once and stacked in the substrate boat.

[0005] When using the substrate transfer device, deflection of each end effector may occur. When the pitch between the plurality of end effectors changes according to the deflection of the end effector, damage (e.g., scratch) may be caused to the substrate while the substrate enters the substrate boat or the substrate storage member, or a major accident (e.g., dropping of the substrate boat) may occur.

[0006] Therefore, to solve the above limitations, a technique for sensing the deflection of the end effector and determining an abnormality in the pitch between the plurality of end effectors is required.

[0007] [Prior Art]

[0008] [Patent Document]

[0009] Korean Patent Publication No. 10-2020-0130058 Summary of the Invention

[0010] The present disclosure provides a substrate transfer device for sensing deflection of an end effector to prevent substrate transfer failure and a substrate processing apparatus having the substrate transfer device.

[0011] According to an exemplary embodiment, a substrate transfer device includes: an end effector extending in a first direction and configured to support a substrate; an end-effector hand connected to one side of the end effector in the first direction; a horizontal movement unit connected to the end-effector hand and configured to move the end effector in the first direction; and a deflection sensing unit including a light emitting component and a light receiving component and configured to sense deflection of the end effector, wherein the light emitting component and the light receiving component are respectively disposed on both sides of a movement path of the end effector.

[0012] A plurality of end effectors may be provided and arranged in multiple stages, and the light emitting component may include a plurality of light sources corresponding to the plurality of end effectors.

[0013] The substrate transfer device may further include a pitch adjustment unit connected to the end-effector hand and configured to adjust the pitch of the plurality of end effectors.

[0014] The deflection sensing unit may further include: a light quantity measuring component configured to measure a light quantity received by the light receiving component; and an abnormality determination component configured to determine an abnormality of the pitch of the plurality of end effectors based on the measured light quantity.

[0015] The horizontal movement unit may include a support plate extending in the first direction to provide the movement path of the end effector caused by the operation of the end-effector hand, and the light emitting component and the light receiving component may be respectively supported by both sides of the support plate in a second direction intersecting the first direction.

[0016] The substrate transfer device may further include a rotation driving unit connected to the support plate to rotate the support plate about a rotation axis.

[0017] The substrate transfer device may further include a lifting unit including a lifting shaft disposed on one side of the support plate in the first direction to lift the rotation driving unit along the lifting shaft, and the rotation axis may be spaced apart from the lifting shaft in the first direction toward the other side.

[0018] The light emitting component and the light receiving component may be disposed from a central portion of the support plate to the other side of the support plate opposite to one side in the first direction.

[0019] The deflection sensing unit may further include a position adjusting member configured to adjust the position of at least one of the light emitting member and the light receiving member.

[0020] The deflection sensing unit may further include an irradiation angle adjusting member configured to adjust the irradiation angle of the light emitting member.

[0021] The light emitting member may emit direct light having a minimum distance from the bottom surface of the end effector in a horizontal state, and the minimum distance is 20% or more than 20% of the thickness of the end effector.

[0022] According to another exemplary embodiment, a substrate processing apparatus includes: the substrate transfer device according to the exemplary embodiment; a substrate boat in which substrates supported by the end effector are transferred and stacked in multiple stages; and a process tube having an inner space in which the substrate boat is accommodated.

[0023] The substrate transfer device may be disposed between a substrate storage member accommodating a plurality of substrates and the substrate boat to transfer the plurality of substrates between the substrate storage member and the substrate boat. Description of the Drawings

[0024] Exemplary embodiments can be understood in more detail by reading the following description in conjunction with the accompanying drawings, in which:

[0025] Figure 1 is a view showing a substrate transfer device according to an exemplary embodiment.

[0026] Figure 2 is a conceptual diagram for explaining deflection sensing of an end effector according to an exemplary embodiment.

[0027] Figure 3 is a schematic cross-sectional view for explaining a pitch adjusting unit according to an exemplary embodiment.

[0028] Figure 4 is a schematic cross-sectional view showing a light quantity measuring member according to an exemplary embodiment.

[0029] Figure 5 is a schematic perspective view for explaining a rotation driving unit according to an exemplary embodiment.

[0030] Figure 6 is a conceptual diagram for explaining the pitch of direct light irradiated from a light emitting member according to an exemplary embodiment.

[0031] Figure 7It is a schematic cross-sectional view showing a substrate processing apparatus according to another exemplary embodiment.

[0032] [Description of Symbols]

[0033] 10: Substrate

[0034] 20: Direct light

[0035] 50: Substrate storage member

[0036] 100: Substrate transfer device

[0037] 110: End effector

[0038] 110a: Bottom surface

[0039] 120: End effector handshake

[0040] 130: Horizontal movement unit

[0041] 131: Support plate

[0042] 140: Deflection sensing unit

[0043] 141: Light emitting component

[0044] 141a: Light source

[0045] 142: Light receiving component

[0046] 142a: Light receiving surface

[0047] 143: Light quantity measuring component

[0048] 144: Position adjusting component

[0049] 150: Pitch adjusting unit

[0050] 160: Rotation driving unit

[0051] 170: Lifting unit

[0052] 171: Lifting shaft

[0053] 180: Substrate sensing unit

[0054] 181: Transmitter

[0055] 182: Receiver

[0056] 200: Substrate processing apparatus

[0057] 210: Substrate boat

[0058] 220: Process tube

[0059] g: Minimum gap / clearance

[0060] p: Pitch

[0061] r: Axis of rotation DETAILED DESCRIPTION

[0062] Hereinafter, exemplary embodiments will be described in more detail with reference to the accompanying drawings. However, the present invention may be implemented in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the scope of the invention to those skilled in the art. In each possible case, the same reference numerals are used in the description and the drawings to refer to the same or similar elements. In the figures, the dimensions of layers and regions are exaggerated for clarity of illustration. The same reference numerals in the drawings denote the same elements and thus their description will be omitted.

[0063] Figure 1 is a view showing a substrate transfer device according to an exemplary embodiment.

[0064] Referring to Figure 1 , a substrate transfer device 100 according to an exemplary embodiment may include: an end effector 110 extending in a first direction and supporting a substrate 10; an end effector gripper 120 connected to one side of the end effector 110 in the first direction; a horizontal moving unit 130 connected to the end effector gripper 120 and moving the end effector 110 in the first direction; and a deflection sensing unit 140 including a light emitting member 141 and a light receiving member 142 and sensing the deflection of the end effector 110, the light emitting member 141 and the light receiving member 142 being respectively disposed on both sides of the moving path of the end effector 110.

[0065] The end effector 110 may extend in a first direction and support the substrate 10. For example, the end effector 110 may have a fork shape and contact the bottom surface of the substrate 10 to support the substrate 10. Additionally, the end effector 110 may be made of a ceramic material (such as quartz, alumina (Al2O3), aluminum nitride (AlN), silicon carbide (SiC), titanium dioxide (TiO2), and silicon dioxide (SiO2)). Here, the substrate 10 may be a wafer. However, the exemplary embodiments are not limited thereto. For example, the substrate 10 may be a glass substrate.

[0066] The end effector gripper 120 can be connected to one side of the end effector 110 in the first direction and fix (or maintain) the end effector 110 in a horizontal state. For example, the end effector gripper 120 can be made of a material different from that of the end effector 110 (e.g., metal (such as aluminum (Al))). However, the exemplary embodiment is not limited thereto. Since the end effector 110 and the end effector gripper 120 are made of different materials, abnormal deflection (or deflection anomaly) of the end effector 110 may occur due to breakage of the end effector 110 or loosening of the bolts used to couple the end effector 110 and the end effector gripper 120.

[0067] The horizontal movement unit 130 can be connected to the end effector gripper 120 and move the end effector 110 in the first direction. For example, the horizontal movement unit 130 can adjust the length of the end effector gripper 120 to move the end effector 110 in the first direction or move the end effector 110 and the end effector gripper 120 together in the first direction.

[0068] The deflection sensing unit 140 can sense the deflection of the end effector 110 and check (or identify) an abnormality (such as transfer failure) of the end effector 110. When the end effector 110 tilts due to deflection, even when the substrate 10 is stacked in the substrate carrier 210, the substrate 10 may be damaged (e.g., scratched) when the substrate 10 slides or the substrate 10 may collide with a stepped portion (e.g., a partition or a substrate support tip) protruding from the inner surface of the substrate carrier 210. Additionally, in the worst case, the end effector 110 may push the substrate carrier 210 to fall, resulting in a major accident. However, in the exemplary embodiment, the deflection of the end effector 110 can be sensed by the deflection sensing unit 140 before the substrate 10 is transferred, and thus an abnormality of the end effector 110 can be identified to prevent damage to the substrate 10 and / or the fall of the substrate carrier 210 in advance.

[0069] Here, the deflection sensing unit 140 can include a light emitting component 141 and a light receiving component 142 respectively disposed on both sides of the movement path (first direction) of the end effector 110. The light emitting component 141 and the light receiving component 142 can be respectively disposed on both sides of the movement path of the end effector 110 moving in the first direction and are disposed opposite to each other in a second direction intersecting the first direction.

[0070] For example, when the light emitting component 141 irradiates direct light 20 towards the light receiving component 142, the deflection abnormality of the end effector 110 can be determined according to the light receiving state of the direct light 20 in the light receiving component 142 (or whether light is received). Generally, the light emitting component 141 and the light receiving component 142 can be arranged at the same height to emit and receive horizontal direct light 20. Here, the direct light 20 can be a thru-beam, such as a laser beam or an infrared ray (IR).

[0071] That is to say, the deflection sensing unit 140 can sense the deflection of the end effector 110 by an optical sensing method through the light emitting component 141 and the light receiving component 142. The deflection of the end effector 110 can be sensed by an always non-sensing method, in which the direct light 20 is blocked by the deflected end effector and is not received by the light receiving component 142, while in the normal state, the direct light 20 is received by the light receiving component 142. As another option, the deflection of the end effector 110 can be sensed by an always sensing method, in which when the end effector 110 deflects, the direct light 20 is received by the light receiving component 142, while in the normal state, the direct light 20 is blocked by the end effector 110 sensed by the direct light 20 and is not received by the light receiving component 142.

[0072] Therefore, in an exemplary embodiment, since the light emitting component 141 and the light receiving component 142 are respectively arranged on both sides of the moving path of the end effector 110, the deflection of the end effector 110 can be effectively sensed by using an optical sensing method without being interfered by the movement of the end effector 110.

[0073] Figure 2 is a conceptual diagram for explaining the deflection sensing of an end effector according to an exemplary embodiment, Figure 2 (a) of shows the normal state of the always non-sensing method, Figure 2 (b) of shows the deflection state of the always non-sensing method, Figure 2 (c) of shows the normal state of the always sensing method, and Figure 2 (d) of shows the deflection state of the always sensing method.

[0074] Referring to Figure 2 , a plurality of end effectors 110 can be arranged and arranged in multiple levels, and the light emitting component 141 can include a plurality of light sources 141a corresponding to the plurality of end effectors 110.

[0075] The end effectors 110 may be provided in plural, and the plural end effectors 110 may be stacked in the vertical direction and arranged in multiple stages. Accordingly, two or more substrates 10 corresponding to the number of the end effectors 110 may be transferred at once.

[0076] Here, the light emitting member 141 may include a plurality of light sources 141a that emit (or irradiate) direct light 20, and the plurality of light sources 141a may be provided corresponding to the plurality of end effectors 110. That is, one light source 141a may be provided for one end effector 110, and the number of the light sources 141a may be equal to the number of the end effectors 110. For example, each of the plurality of light sources 141a may be an optical fiber or a laser. Here, the light receiving member 142 may have light receiving surfaces 142a whose number corresponds to (or is equal to) the number of the plurality of light sources 141a, or one light receiving surface 142a may receive the direct light 20 irradiated from the plurality of light sources 141a. Although the light receiving member 142 may have a plurality of light receiving surfaces 142a corresponding to the plurality of light sources 141a to effectively sense the deflection of the end effector 110, the exemplary embodiments are not limited thereto.

[0077] For example, as Figure 2 shown in (a) of Figure 2 and Figure 2 shown in (b) of Figure 2 shown in (c) of

[0078] The deflection sensing unit 140 may sense the deflection of the end effector 110 by using the plurality of light sources 141a in a permanent non-sensing method to determine an abnormality in the pitch p between the plurality of end effectors 110. As another alternative, as

[0079] Figure 3 shown in (d) of Figure 2 shown in (c) of Figure 2 shown in (d) of

[0078] The deflection sensing unit 140 may sense the deflection of the end effector 110 by using the plurality of light sources 141a in a permanent sensing method to determine an abnormality in the pitch between the plurality of end effectors 110.

[0078] Accordingly, when the plurality of end effectors 110 are arranged in multiple stages, an abnormality in the pitch between the plurality of end effectors 110 may be determined by sensing the deflection of the end effector 110. Accordingly, damage to the substrate 10 and / or dropping of the susceptor 210 caused by an inappropriate pitch between the plurality of end effectors 110 may be prevented, and two or more substrates 10 may also be stably stacked on the susceptor 210 having a fixed substrate stacking pitch. Here, since the light emitting member 141 includes the plurality of light sources 141a corresponding to the plurality of end effectors 110, the deflection of each end effector 110 may be effectively sensed.

[0079] Figure 3 is a schematic cross-sectional view for explaining a pitch adjustment unit according to an exemplary embodiment.Figure 3 (a) shows a narrow pitch between the end effectors, Figure 3 (b) shows a medium pitch between the end effectors, and Figure 3 (c) shows a wide pitch between the end effectors.

[0080] Refer to Figure 3 , according to an exemplary embodiment, the substrate transfer device 100 may further include a pitch adjustment unit 150, which is connected to the end effector gripper 120 and adjusts the pitch between the plurality of end effectors 110.

[0081] The pitch adjustment unit 150 may be connected to the end effector gripper 120 and adjust the pitch between the plurality of end effectors 110. The substrate stacking pitch of the substrate boat 210 may vary according to the process performed in the substrate processing apparatus 200 and / or the configuration (or structure) of the substrate boat 210. Here, two or more substrates 10 can be stably stacked at once corresponding to various substrate boats 210 having different substrate stacking pitches through the pitch adjustment unit 150.

[0082] Additionally, the substrate storage pitch of the substrate storage member 50 may be different from the substrate stacking pitch of the substrate boat 210. Even in such a case, two or more substrates 10 can be taken out from the substrate storage member 50 at once by adjusting the pitch of the plurality of end effectors 110 to be suitable for the substrate storage pitch of the substrate storage member 50 via the pitch adjustment unit 150. Thereafter, the two or more substrates 10 taken out from the substrate storage member 50 can be stacked at once by adjusting the pitch of the plurality of end effectors 110 to be suitable for the substrate stacking pitch of the substrate boat 210. Conversely, two or more processed substrates 10 can be removed from the substrate boat 210 by adjusting the pitch of the plurality of end effectors 110 to be suitable for the substrate storage pitch of the substrate boat 210 via the pitch adjustment unit 150. Thereafter, the processed substrates 10 can be stored in the substrate storage member 50 by adjusting the pitch of the plurality of end effectors 110 to be suitable for the substrate storage pitch of the substrate storage member 50.

[0083] Accordingly, the pitch of the plurality of end effectors 110 can be adjusted by the pitch adjustment unit 150 to correspond to various substrate boats 210 having different substrate stacking pitches and to correspond to the case where the substrate storage pitch of the substrate storage member 50 is different from the substrate stacking pitch of the substrate boat 210.

[0084] Figure 4 is a schematic cross-sectional view showing a light quantity measuring component according to an exemplary embodiment.

[0085] Refer to Figure 4, the deflection sensing unit 140 may further include: a light quantity measuring component 143 for measuring the amount of light received by the light receiving component 142; and an abnormality determining component (not shown) for determining an abnormality in the pitch between the plurality of end effectors 110 based on the measured light quantity. The light quantity measuring component 143 may measure the amount of light received by the light receiving component 142, check the on / off state of determining whether the direct light 20 is received by the light receiving component 142, and check the amount (or quantity) of the direct light 20 blocked by the end effector 110 due to the deflection of the end effector 110. In addition, when light is irradiated from the plurality of light sources 141a, the number of abnormal end effectors 110 may be checked by using the total amount of light received by the light receiving component 142.

[0086] The abnormality determining component (not shown) may determine an abnormality in the pitch between the plurality of end effectors 110 based on the light quantity measured by the light quantity measuring component 143. The abnormality determining component may determine an abnormality in the pitch between the plurality of end effectors 110 when the light quantity measured by the light quantity measuring component 143 differs from the normal quantity (or normal state) by a predetermined amount.

[0087] For example, the abnormality determining component may determine an abnormality in the pitch between the plurality of end effectors 110 when the light quantity measured by the light quantity measuring component 143 differs from the normal quantity by 100%. In addition, the abnormality determining component may determine an abnormality in the pitch between the plurality of end effectors 110 when the light quantity measured by the light quantity measuring component 143 differs from the normal quantity by 50%. Here, the predetermined amount may be determined as an amount suitable for accurately determining an abnormality in the pitch between the plurality of end effectors 110.

[0088] Generally, when an abnormality in the pitch between the plurality of end effectors 110 occurs, the end effector 110 may completely block the direct light 20, and when a small error occurs due to the environment, the end effector 110 may deflect slightly more or less compared to the position of the direct light 20. When the end effector 110 deflects slightly more or less compared to the position of the direct light 20, a part of the total light quantity of the direct light 20 may be received by the light receiving component 142. In this case, when determining an abnormality in the pitch between the plurality of end effectors 110 only through the on / off of the direct light 20, a case of a small error due to the environment may not be determined as an abnormality in the pitch between the plurality of end effectors 110.

[0089] Conversely, although the amount of light measured by the light quantity measurement component 143 changes slightly, when determining an abnormality in the pitch between the plurality of end effectors 110, even a non-abnormal pitch between the plurality of end effectors 110 may be determined as an abnormality in the pitch between the plurality of end effectors 110. That is, since even a slight deflection of the end effector 110 caused by the load of the substrate 10 or a slight shaking caused by the movement of the end effector 110 may cause a slight change in the amount of light, even a non-abnormal pitch between the plurality of end effectors 110 may be determined as an abnormality in the pitch between the plurality of end effectors 110. Accordingly, although a case where the amount of light measured by the light quantity measurement component 143 changes by 50% (i.e., 50% of the amount of direct light) or more than 50% may be determined as an abnormality in the pitch between the plurality of end effectors 110, the exemplary embodiments are not limited thereto.

[0090] In addition, although a slight deflection of the end effector 110 occurs, the substrate 10 may be transferred according to the substrate stacking pitch of the susceptor 210 and / or the substrate storage pitch of the substrate storage member 50. Here, when the substrate stacking pitch of the susceptor 210 and / or the substrate storage pitch of the substrate storage member 50 is wide, since the substrate 10 can be stacked or stored without difficulty even though a slight deflection of the end effector 110 occurs, the substrate 10 can be stacked or stored. However, when the substrate stacking pitch of the susceptor 210 and / or the substrate storage pitch of the substrate storage member 50 is narrow, since a slight deflection of the end effector 110 may easily cause damage (e.g., scratches) to the substrate 10, even a slight deflection of the end effector 110 needs to be determined as an abnormality in the pitch between the plurality of end effectors 110.

[0091] Therefore, a predetermined amount can be determined according to the substrate stacking pitch of the susceptor 210 and / or the substrate storage pitch of the substrate storage member 50. For example, the predetermined amount may decrease as the substrate stacking pitch of the susceptor 210 and / or the substrate storage pitch of the substrate storage member 50 decreases, or may increase in proportion to the substrate stacking pitch of the susceptor 210 and / or the substrate storage pitch of the substrate storage member 50 as the substrate stacking pitch of the susceptor 210 and / or the substrate storage pitch of the substrate storage member 50 increases.

[0092] Therefore, it is possible to accurately determine whether the substrate 10 can be transferred according to the substrate stacking pitch of the susceptor 210 and / or the substrate storage pitch of the substrate storage member 50, such that the deflection sensing unit 140 measures the amount of light received by the light receiving member 142 through the light quantity measurement component 143 to determine an abnormality in the pitch between the plurality of end effectors 110.

[0093] In addition, maintenance of the end effector 110 can be determined based on the amount of light measured by the light amount measuring component 143. Deflection of the end effector 110 can be caused by breakage of the end effector 110 made of a ceramic material or loosening of bolts used to couple the end effector 110 to the end effector handshake 120. Here, the deflection of the end effector 110 can have different deflection inclinations (or angles) according to the cause of the deflection, and the cause of the deflection can be known through the difference in the amount of light received by the light receiving component 142 caused by the difference in the deflection inclination. When the end effector 110 is broken, the end effector 110 needs to be replaced, and when the bolts are loose, the bolts need to be tightened. Therefore, the transfer of the substrate 10 can be temporarily stopped and maintenance of the end effector 110 can be performed. In addition, when deflection occurs due to loosening of the bolts, the deflection gradually increases according to the degree of loosening of the bolts. Therefore, after the deflection of the end effector 110 exceeds a predetermined inclination (or a predetermined angle), maintenance of the end effector 110 can be determined. Here, the inclination of the deflection can be obtained by calculation using the amount of light measured by the light amount measuring component 143.

[0094] Since the substrate transfer device 100 according to the exemplary embodiment further includes a deflection compensation component (not shown) for compensating for the deflection of the end effector 110, although the end effector 110 is deflected, the end effector 110 can be continuously used until a predetermined inclination is reached while compensating for the deflection of the end effector 110 by the deflection compensation component (not shown). In addition, when the deflection of the end effector 110 exceeds a predetermined inclination, maintenance of the end effector 110 can be performed while compensating for the deflection of the end effector 110 through the deflection compensation component (not shown) while using the end effector 110.

[0095] The horizontal movement unit 130 may include a support plate 131 extending in a first direction to provide a movement path of the end effector 110 caused by the operation of the end effector gripper 120. The support plate 131 may extend in the first direction, provide an operation path of the end effector gripper 120, and move the end effector 110 in the first direction when the end effector gripper 120 operates on the support plate 131. That is, the support plate 131 may provide a movement path of the end effector 110 caused by the operation of the end effector gripper 120 and be supported when the light emitting component 141 is connected to the light receiving component 142. The light emitting component 141 and the light receiving component 142 may be respectively disposed (or provided) on both sides of the movement path of the end effector 110. Here, the end effector gripper 120 may operate along the operation path on the support plate 131 and move the end effector 110 in the first direction. Here, the end effector gripper 120 may directly operate in the first direction on the support plate 131 or operate in the first direction on the support plate 131 through the operation of the pitch adjustment unit 150 connected to the end effector gripper 120.

[0096] For example, the horizontal movement unit 130 may enable the end effector gripper 120 and / or the pitch adjustment unit 150 to operate in the first direction through a track. However, the exemplary embodiments are not limited thereto. For example, the support plate 131 may provide an operation path of the end effector gripper 120.

[0097] In addition, the light emitting component 141 and the light receiving component 142 may be respectively connected to both sides of the support plate 131 in a second direction intersecting the first direction and be supported by the support plate 131. Since the light emitting component 141 and the light receiving component 142 are respectively connected to both sides of the support plate 131 in the second direction intersecting the first direction, a movement path of the end effector 110 (or an operation path of the end effector gripper) can be ensured, and the end effector 110 can move in the first direction without being interfered by the light emitting component 141 and the light receiving component 142. The light emitting component 141 and the light receiving component 142 may sense the deflection of the end effector 110 disposed between the light emitting component 141 and the light receiving component 142 or passing through between the light emitting component 141 and the light receiving component 142. Thus, an abnormality of the end effector 110 caused by the deflection can be identified, and damage to the substrate 10 and / or dropping of the substrate carrier 210 can be prevented in advance. In addition, since the light emitting component 141 and the light receiving component 142 are connected and fixed to both sides of the support plate 131 in the second direction, the light emitting component 141 and the light receiving component 142 can be stably supported and can more effectively sense the deflection of the end effector 110 without being interfered by the movement of the end effector 110.

[0098] When sensing the deflection of the end effector 110 while the end effector 110 moves in the first direction and passes between the light emitting member 141 and the light receiving member 142, even in a situation where the end effector 110 allows the direct light 20 to pass through and the other side (portion) of the end effector 110 opposite to the side connected to the end effector handshake 120 is greatly inclined (or deflected), the central portion of the one side (portion) of the end effector 110 in the first direction can still block the direct light 20 and can effectively sense the deflection of the end effector 110.

[0099] Figure 5 is a schematic perspective view for explaining a rotation driving unit according to an exemplary embodiment. Figure 5 (a) of shows the right rotation of the support plate, and Figure 5 (b) of shows the left rotation of the support plate.

[0100] Referring to Figure 5 , the substrate transfer device 100 according to an exemplary embodiment may further include a rotation driving unit 160 that is connected to the support plate 131 and rotates the support plate 131 about a rotation axis r.

[0101] The rotation driving unit 160 may be connected to the support plate 131 and rotate the support plate 131 about the rotation axis r. For example, the rotation driving unit 160 may rotate the support plate 131 in the clockwise direction (or the right side) about the rotation axis r so that the end effector 110 faces the substrate storage member 50, as shown in Figure 5 (a) of. Thereafter, the substrate 10 may be taken out from the substrate storage member 50 by moving the end effector 110 in the first direction. In addition, the rotation driving unit 160 may rotate the support plate 131 in the counterclockwise direction (or the left side) about the rotation axis r so that the end effector 110 faces the substrate boat 210, as shown in Figure 5 (b) of. Thereafter, the substrate 10 taken out from the substrate storage member 50 and supported by the end effector 110 may be stacked in the substrate boat 210 by moving the end effector 110 in the first direction.

[0102] In addition, the substrate boats 210 may be respectively provided in the left 45° direction and the right 45° direction, and the support plate 131 may rotate toward the left 45° and the right 45° to alternately stack substrates in the two substrate boats 210.

[0103] The substrate transfer device 100 according to an exemplary embodiment may further include a lifting unit 170 that includes a lifting shaft 171 provided at one side of the support plate 131 in the first direction and lifts the rotation driving unit 160 along the lifting shaft 171.

[0104] The lifting unit 170 may include a lifting shaft 171 disposed at one side of the support plate 131 in the first direction and lift the rotation driving unit 160 along the lifting shaft 171. The susceptor 210 may have a long vertical length (or height), and a plurality of substrates 10 more than the substrates 10 transferred by the plurality of end effectors 110 may be stacked in the susceptor 210 in multiple stages. Here, by lifting the rotation driving unit 160 connected to the end effector 110 through the support plate 131, the end effector 110 may be lifted together with the rotation driving unit 160, so that the plurality of substrates 10 are stacked in the susceptor 210 having a long vertical length in multiple stages. Here, the rotation driving unit 160 may be lifted along the lifting shaft 171.

[0105] Here, the lifting shaft 171 may be disposed at one side of the support plate 131 in the non-rotating state (or the non-rotating state) in the first direction, stand upright in the vertical direction, and be connected to the rotation driving unit 160 to be lifted.

[0106] Here, the rotation axis r may be spaced apart from the lifting shaft 171. For example, the rotation axis r may be spaced apart toward the other side in the first direction. Since the light emitting member 141 and the light receiving member 142 are respectively connected to both sides of the support plate 131 in the second direction, when the support plate 131 rotates, the light emitting member 141 or the light receiving member 142 may be interfered by the lifting shaft 171. Therefore, the rotation axis r may be sufficiently spaced apart from the lifting shaft 171 toward the other side in the first direction. Thus, the feature that the light emitting member 141 and / or the light receiving member 142 is interfered by the lifting shaft 171 due to the rotation of the support plate 131 can be prevented. Therefore, even in the rotating state of the support plate 131, the deflection of the end effector 110 can be sensed, and the deflection of the end effector 110 can be sensed in real time instantaneously while transferring the substrate 10 between the substrate storage member 50 and the susceptor 210.

[0107] In addition, the light emitting component 141 and the light receiving component 142 may be disposed at the central portion of the support plate 131 on the other side opposite to the one side in the first direction of the support plate 131. One side of the end effector 110 connected to the end effector handshake 120 is disposed at the one side of the support plate 131 in the first direction. Since one side of the end effector 110 is connected to the end effector handshake 120, the deflection (or inclination) of the end effector 110 is not significantly generated. Therefore, when the light emitting component 141 and the light receiving component 142 are disposed at the one side of the support plate 131 in the first direction, it may not be possible to effectively sense the abnormal deflection of the end effector 110. In addition, when the light emitting component 141 and the light receiving component 142 are disposed at the one side of the support plate 131 in the first direction, the light emitting component 141 or the light receiving component 142 may be interfered by the lifting shaft 171 when the support plate 131 rotates as the light emitting component 141 and the light receiving component 142 approach the lifting shaft 171.

[0108] Therefore, the light emitting component 141 and the light receiving component 142 may be disposed at the central portion of the support plate 131 on the other side (part) opposite to the one side in the first direction of the support plate 131, rather than being disposed at the one side of the support plate 131 in the first direction.

[0109] As described above, according to the exemplary embodiment, since the light emitting component 141 and the light receiving component 142 are respectively connected to the two sides of the support plate 131 of the horizontal movement unit 130, the characteristics that the light emitting component 141 and the light receiving component 142 affect the movement of the end effector 110 can be prevented. Therefore, according to the coupling structure of the support plate 131, the rotation driving unit 160, and the lifting unit 170, the light emitting component 141 and the light receiving component 142 may not be interfered by the movement of the support plate 131 and / or the end effector 110.

[0110] The deflection sensing unit 140 may further include a position adjusting component 144 for adjusting the position of at least one of the light emitting component 141 and the light receiving component 142. The position adjusting component 144 can adjust the position of at least one of the light emitting component 141 and the light receiving component 142 (i.e., the position of at least one of the light source of the light emitting component and the light receiving surface of the light receiving component). Thus, the position adjusting component 144 can adjust the position and the inclination (or angle) of the direct light 20.

[0111] For example, since the pitch of the plurality of end effectors 110 can be adjusted by the pitch adjustment unit 150, the position of the direct light 20 can be adjusted by adjusting the position of at least one of the light emitting component 141 and the light receiving component 142 according to the adjusted pitch of the plurality of end effectors 110. In addition, the position adjustment component 144 can adjust the position of at least one of the light emitting component 141 and the light receiving component 142 to adjust the inclination of the direct light 20, thereby improving the sensing performance of the deflection of the end effector 110.

[0112] Generally, since the height of the light emitting component 141 and the height of the light receiving component 142 (i.e., the height of the light source of the light emitting component and the height of the light receiving surface of the light receiving component) are equally adjusted, the light emitting component 141 can irradiate light in the horizontal direction to form the horizontal direct light 20. To maintain this, the positions of the light emitting component 141 and the light receiving component 142 can be adjusted simultaneously. However, the exemplary embodiment is not limited thereto.

[0113] In addition, the deflection sensing component 140 may further include an irradiation angle adjustment component (not shown) for adjusting the irradiation angle of the light emitting component 141. The irradiation angle adjustment component (not shown) can adjust the irradiation angle of the light emitting component 141. The irradiation angle adjustment component (not shown) can adjust the irradiation angle of the light emitting component 141 to be inclined with respect to the direction horizontally intersecting the first direction. Here, the position of the light receiving surface 142a of the light receiving component 142 can be adjusted, or only the position of the direct light 20 incident on the wide light receiving surface 142a can be changed. That is, the direct light 20 irradiated from the light emitting component 141 toward the light receiving component 142 can be inclined with respect to the direction horizontally intersecting the first direction.

[0114] Since the direct light 20 has a small size or width, the end effector 110 can pass through the direct light 20 by deflection, and the deflection of the end effector 110 may not be sensed. Therefore, since the direct light 20 is inclined with respect to the direction horizontally intersecting the first direction, the sensing range of the deflection of the end effector 110 can be expanded (or increased), and the sensing performance of the deflection of the end effector 110 can be improved.

[0115] Here, the direct light 20 can be inclined with respect to the vertical direction, and the height difference between the light emitting component 141 and the light receiving component 142 (or the height difference between the starting point and the ending point of the direct light) can be equal to or less than the thickness of the end effector 110. When the inclination of the direct light 20 increases, the sensing range of the deflection of the end effector 110 can increase. However, when the deflection of the end effector 110 has the same inclination as the inclination of the direct light 20, the deflection of the end effector 110 may not be sensed. Therefore, the inclination of the direct light 20 can be restricted.

[0116] Therefore, the height difference between the light emitting component 141 and the light receiving component 142 (or the height difference between the light source of the light emitting component and the light receiving surface of the light receiving component) can be equal to or less than the thickness of the end effector 110. In this case, the sensing range of the deflection of the end effector 110 can be expanded until it reaches the thickness of the end effector 110, and moreover, within the thickness of the end effector 110, there may not be a situation where the deflection of the end effector 110 is not sensed because the deflection of the end effector 110 has the same inclination as the inclination of the direct light 20.

[0117] Figure 6 is a conceptual diagram for explaining the pitch of the direct light irradiated from the light emitting component according to an exemplary embodiment.

[0118] Referring to Figure 6 , the light emitting component 141 can irradiate the direct light 20 having the minimum distance from the bottom surface 110a of the end effector 110 in the horizontal state, and the minimum distance is equal to or greater than 20% of the thickness of the end effector 110. That is, the light emitting component 141 can irradiate the direct light 20, and the direct light 20 can have the minimum distance equal to or greater than 20% of the thickness of the end effector 110. Here, the minimum distance can be the minimum distance from the bottom surface 110a of the end effector 110 in the horizontal state. For example, the light emitting component 141 can irradiate the direct light 20 spaced from the bottom surface 110a of the end effector 110 by 20% or more than 20% of the thickness of the end effector 110. Here, the minimum clearance g in the vertical direction between the direct light 20 and the bottom surface 110a of the end effector 110 can be 20% or more than 20% of the thickness of the end effector 110. Here, the upper limit of the clearance g of the direct light 20 may not be greater than the pitch p of the plurality of end effectors 110. In the case where there is only one end effector 110, the upper limit of the clearance g of the direct light 20 may not be greater than the length of the end effector 110 in the first direction and / or the length from the bottom surface 110a of the end effector 110 to the top surface of the support plate 131.

[0119] When the direct light 20 is not spaced from the bottom surface 110a of the end effector 110 by 20% or more of the thickness of the end effector 110 in the vertical direction, even due to a slight deflection of the end effector 110 caused by the load of the substrate 10 or a slight sway caused by the movement of the end effector 110, the deflection sensing unit 140 may determine that the deflection of the end effector 110 is abnormal. However, according to an exemplary embodiment, when the light emitting component 141 irradiates the direct light 20 at a minimum distance equal to or greater than 20% or more of the thickness of the end effector 110 from the bottom surface 110a of the end effector 110 in a horizontal state, such a situation can be prevented and the deflection abnormality of the end effector 110 can be sensed (or determined) more effectively.

[0120] For example, the end effector 110 may be deflected by less than 0.5 mm due to the load of the substrate 10, and the minimum gap g between the direct light 20 and the bottom surface 110a of the end effector 110 in the vertical direction may be equal to or greater than 0.5 mm. Here, the substrate 10 may have a thickness of about 0.8 mm, and the end effector 110 may have a thickness of about 1.8 mm.

[0121] Therefore, in the exemplary embodiment, since the direct light 20 irradiated from the light emitting component 141 toward the light receiving component 142 is spaced from the bottom surface 110a of the end effector 110 in a horizontal state by 20% or more of the thickness of the end effector 110, it is possible to prevent a slight deflection of the end effector 110 caused by the load of the substrate 10 from being determined as a characteristic of an abnormality of the end effector 110.

[0122] The substrate transfer device 100 according to an exemplary embodiment may further include a substrate sensing unit 180, and the substrate sensing unit 180 includes a pair of transmitters 181 and receivers 182 and senses the substrate 10 supported by the end effector 110.

[0123] The substrate sensing unit 180 may sense the substrate 10 supported by the end effector 110 and includes a pair of transmitters 181 and receivers 182. The transmitters 181 and the receivers 182 may be paired with each other and transmit and receive light or ultrasonic waves. For example, when the transmitter 181 irradiates light and the receiver 182 receives the light, the substrate 10 may be sensed. When the light is not received by the receiver 182, it is determined that the substrate 10 is supported by the end effector 110, and when the light is received by the receiver 182, it is determined that the substrate 10 is not supported by the end effector 110.

[0124] Here, the emitter 181 and the receiver 182 may be spaced apart from each other in the vertical direction, and a pair of the emitter 181 and the receiver 182 may be disposed at each of the both sides of the support plate 131 in the second direction. For example, a pair of the emitter 181 and the receiver 182 may be connected to and supported (or fixed) to each of the light emitting member 141 and the light receiving member 142. Since a pair of the emitter 181 and the receiver 182 are disposed at each of the both sides of the support plate 131 in the second direction, it is possible to identify whether the substrate 10 is supported on the end effector 110 and whether the substrate 10 is supported at a normal position.

[0125] Figure 7 is a schematic cross-sectional view showing a substrate processing apparatus according to another exemplary embodiment.

[0126] Reference will be made to Figure 7 describe a substrate processing apparatus according to another exemplary embodiment. In the description of the substrate processing apparatus according to another exemplary embodiment, the description overlapping with that of the substrate processing apparatus according to the exemplary embodiment will be omitted.

[0127] A substrate processing apparatus 200 according to another exemplary embodiment may include: a substrate transfer device 100; a substrate boat 210 in which substrates 10 supported by an end effector 110 are transferred and stacked in multiple levels; and a process tube 220 having an inner space in which the substrate boat 210 is accommodated.

[0128] The substrate transfer device 100 may be the substrate transfer device 100 according to the exemplary embodiment and transfers substrates between the substrate storage member 50 and the substrate boat 210. A detailed description of the substrate transfer device 100 has been set forth above and will be omitted.

[0129] The multiple substrates 10 may be stacked in a substrate boat 210 in multiple levels (or in the vertical direction) to perform a process in a batch mode. The substrate boat 210 can be lifted to stack the substrates or perform a processing operation. For example, the substrate boat 210 can stack 22 substrates 10 in multiple levels. When the substrate boat 210 is located in a stacking space (or stacking position) disposed below the process tube 220, the substrates 10 can be stacked in the substrate boat 210. More specifically, when one or more substrates 10 are stacked in the substrate boat 210 by the substrate transfer device 100, the substrate boat 210 or the end effector 110 can be raised, and the substrates 10 can be stacked below or above the stacked substrates 10. When all of the multiple substrates 10 are stacked in the substrate boat 210, the substrate boat 210 can be moved to the accommodation space (or process position) of the process tube 220 so that a substrate processing operation is performed in the accommodation space of the process tube 220. Here, the substrate boat 210 can be made of ceramics such as silicon carbide (SiC), quartz, and synthetic quartz.

[0130] An accommodation space for accommodating the substrate boat 210 may be defined in the process tube 220 to perform a processing operation on the substrates 10 stacked in the substrate boat 210. The process tube 220 may have a cylindrical shape. Additionally, the process tube 220 may have an open lower portion and a closed upper portion. Thus, when the substrate boat 210 is lifted in the vertical direction to be positioned in the accommodation space of the process tube 220, the substrate boat 210 can be inserted into or withdrawn from the accommodation space of the process tube 220 through the lower opening of the process tube 220. Here, the process tube 220 can be a single tube or multiple tubes including an outer tube and an inner tube.

[0131] In addition, the substrate transfer device 100 may be disposed between the substrate storage member 50 that accommodates the plurality of substrates 10 and the susceptor 210 to transfer the substrate 10 between the substrate storage member 50 and the susceptor 210. Here, the substrate transfer device 100 may be disposed between the susceptor 210 and a loading port (e.g., a front-opening interface mechanical standard (FIMS)) to transfer the substrate 10 between the susceptor 210 and the substrate storage member 50 that is open at the loading port. For example, the substrate transfer device 100 may be disposed (or positioned) between the susceptor 210 and the substrate storage member 50 provided at the loading port. The substrate storage member 50 may be disposed on the left side of the substrate transfer device 100, and the susceptor 210 may be disposed on the right side of the substrate transfer device 100. Here, by rotating the support plate 131 in the counterclockwise direction (or to the left), the end effector 110 can face the substrate storage member 50. Thereafter, the end effector 110 may move in a first direction to pick up the substrate 10 from the substrate storage member 50. In addition, by rotating the support plate 131 in the clockwise direction (or to the right), the end effector 110 can face the susceptor 210. Thereafter, the end effector 110 may move in the first direction to stack the substrate 10 picked up from the substrate storage member 50 and supported by the end effector 110 in the susceptor 210. Conversely, by rotating the support plate 131 in the clockwise direction (or to the right), the end effector 110 can face the susceptor 210. Thereafter, the end effector 110 may move in the first direction to remove the fully processed substrate 10 from the susceptor 210. In addition, by rotating the support plate 131 in the counterclockwise direction, the end effector 110 can face the substrate storage member 50. Thereafter, the end effector 110 may move in the first direction to store the substrate 10 that has been fully processed and supported by the end effector 110 in the substrate storage member 50.

[0132] Here, the substrate stacking pitch of the susceptor boat 210 may be different from the substrate storage pitch of the substrate storage member 50. In such a case, two or more substrates 10 may be taken out from the substrate storage member 50 at once by adjusting the pitch of the plurality of end effectors 110 to be suitable for the substrate storage pitch of the substrate storage member 50 via the pitch adjustment unit 150. Thereafter, the two or more substrates 10 taken out from the substrate storage member 50 may be stacked at once by adjusting the pitch of the plurality of end effectors 110 to be suitable for the substrate stacking pitch of the susceptor boat 210. Conversely, two or more processed substrates 10 may be removed from the susceptor boat 210 by adjusting the pitch of the plurality of end effectors 110 to be suitable for the substrate storage pitch of the susceptor boat 210 via the pitch adjustment unit 150. Thereafter, the processed substrates 10 may be stored in the substrate storage member 50 by adjusting the pitch of the plurality of end effectors 110 to be suitable for the substrate storage pitch of the substrate storage member 50.

[0133] As described above, according to an exemplary embodiment, since the deflection of the end effector is sensed by the deflection sensing unit, an abnormality of the end effector can be identified before the substrate is transferred, and damage to the substrate caused by transfer failure of the end effector and / or dropping of the susceptor can be prevented in advance. Here, the deflection sensing unit may include a light emitting component and a light receiving component, and the light emitting component and the light receiving component are respectively disposed on both sides of the movement path of the end effector to effectively sense the deflection of the end effector without being disturbed by the movement of the end effector. In addition, when the plurality of end effectors are arranged in multiple stages, an abnormality in the pitch between the plurality of end effectors can be determined by sensing the deflection of the end effectors. Accordingly, damage to the substrate caused by an abnormality in the pitch between the plurality of end effectors and / or dropping of the susceptor can be prevented, and two or more substrates can be stably stacked at one time in a susceptor having a determined substrate stacking pitch. Here, since the light emitting component includes the plurality of light sources corresponding to the plurality of end effectors, the deflection of each of the plurality of end effectors can be effectively sensed. In addition, the pitch of the plurality of end effectors can be adjusted via the pitch adjustment unit to adapt to various susceptors having different substrate stacking pitches. In addition, when the deflection sensing unit measures the amount of light received by the light receiving component to determine an abnormality in the pitch between the plurality of end effectors, it is possible to accurately determine whether the substrate can be transferred according to the substrate stacking pitch of the susceptor and / or the substrate storage pitch of the substrate storage member. Here, by allowing the direct light irradiated from the light emitting component toward the light receiving component to be spaced apart from the bottom surface of the end effector in a horizontal state by at least 20% or more than 20% of the thickness of the end effector, it is possible to prevent a slight deflection of the end effector caused by the load of the substrate from being recognized as an abnormal feature. In addition, since the light emitting component and the light receiving component are respectively connected to both sides of the support plate of the horizontal movement unit, the light emitting component and the light receiving component do not affect the movement of the end effector, and according to the coupling structure of the support plate, the rotation driving unit, and the lifting unit, the light emitting component and the light receiving component are not disturbed by the movement of the support plate and / or the end effector.

[0134] The substrate transfer device according to an exemplary embodiment can sense the deflection of the end effector through the deflection sensing unit to identify an abnormality of the end effector before the substrate is transferred and prevent damage to the substrate caused by transfer failure of the end effector and / or dropping of the susceptor in advance. Here, the deflection sensing unit may include a light emitting component and a light receiving component, and the light emitting component and the light receiving component are respectively disposed on both sides of the movement path of the end effector to effectively sense the deflection of the end effector without being disturbed by the movement of the end effector.

[0135] In addition, when the plurality of end effectors are arranged in multiple levels, the abnormality of the pitch between the plurality of end effectors can be determined by sensing the deflection of the end effectors. Therefore, damage to the substrate caused by the abnormality of the pitch between the plurality of end effectors and / or the dropping of the susceptor can be prevented, and two or more substrates can be stably stacked at one time in a susceptor with a determined substrate stacking pitch. Here, since the light emitting component includes the plurality of light sources corresponding to the plurality of end effectors, the deflection of each of the plurality of end effectors can be effectively sensed.

[0136] In addition, various susceptors with different substrate stacking pitches can be adapted by adjusting the pitch of the plurality of end effectors via the pitch adjustment unit. In addition, when the deflection sensing unit measures the amount of light received by the light receiving component to determine the abnormality of the pitch between the plurality of end effectors, it is possible to accurately determine whether the substrate can be transferred according to the substrate stacking pitch of the susceptor and / or the substrate storage pitch of the substrate storage member.

[0137] Here, by allowing the direct light irradiated from the light emitting component toward the light receiving component to be spaced apart from the bottom surface of the end effector in a horizontal state by at least 20% or more than 20% of the thickness of the end effector, it is possible to prevent the feature of recognizing a slight deflection of the end effector caused by the load of the substrate as an abnormality.

[0138] In addition, since the light emitting component and the light receiving component are respectively connected to both sides of the support plate of the horizontal movement unit, the light emitting component and the light receiving component can have no influence on the movement of the end effector, and according to the coupling structure of the support plate, the rotation driving unit, and the lifting unit, the light emitting component and the light receiving component can be free from interference from the movement of the support plate and / or the end effector.

[0139] Although the embodiments of the present invention have been described, it should be understood that the present invention should not be limited to these embodiments, but various changes and modifications can be made by those of ordinary skill in the art within the spirit and scope of the present invention as claimed hereinafter. Therefore, the true scope of protection of the present invention will be determined by the technical scope of the appended claims.

Claims

1. A substrate transfer device, comprising: An end effector extending in a first direction and configured to support a substrate; An end effector gripper connected to one side of the end effector in the first direction; A horizontal movement unit connected to the end effector gripper and configured to move the end effector in the first direction; And A deflection sensing unit including a light emitting component and a light receiving component and configured to sense deflection of the end effector, the light emitting component and the light receiving component being respectively disposed on both sides of a movement path of the end effector, Wherein the horizontal movement unit includes a support plate extending in the first direction to provide the movement path of the end effector caused by operation of the end effector gripper, and The light emitting component and the light receiving component are respectively connected to both sides of the support plate in a second direction intersecting the first direction and supported by the support plate, The light emitting component irradiates direct light having a minimum distance from a bottom surface of the end effector in a horizontal state, the minimum distance being 20% or more than 20% of a thickness of the end effector.

2. The substrate transfer device according to claim 1, wherein a plurality of end effectors are provided and arranged in multiple stages, and The light emitting component includes a plurality of light sources corresponding to the plurality of end effectors.

3. The substrate transfer device according to claim 2, further comprising a pitch adjustment unit connected to the end effector gripper and configured to adjust a pitch of the plurality of end effectors.

4. The substrate transfer device according to claim 2, wherein the deflection sensing unit further includes: A light quantity measuring component configured to measure a light quantity received by the light receiving component; And An abnormality determination component configured to determine an abnormality of a pitch of the plurality of end effectors based on the measured light quantity.

5. The substrate transfer device according to claim 1, further comprising a rotation driving unit connected to the support plate to rotate the support plate about a rotation axis.

6. The substrate transfer device according to claim 5, further comprising a lifting unit including a lifting shaft disposed at one side of the support plate in the first direction to lift the rotation driving unit along the lifting shaft, Wherein the rotation axis is spaced apart from the lifting shaft in the first direction toward the other side.

7. The substrate transfer device according to claim 1, wherein the light emitting component and the light receiving component are provided from a central portion of the support plate to the other side of the support plate opposite to one side in the first direction.

8. The substrate transfer device according to claim 1, wherein the deflection sensing unit further includes a position adjustment component configured to adjust a position of at least one of the light emitting component and the light receiving component.

9. The substrate transfer device according to claim 1, wherein the deflection sensing unit further includes an irradiation angle adjustment member configured to adjust the irradiation angle of the light emitting member.

10. A substrate processing apparatus, comprising: The substrate transfer device according to any one of claims 1 to 9; A substrate boat in which the substrates supported by the end effector are transferred and stacked in multiple stages; And A process tube having an inner space in which the substrate boat is accommodated.

11. The substrate processing apparatus according to claim 10, wherein the substrate transfer device is disposed between a substrate storage member that accommodates a plurality of the substrates and the substrate boat to transfer the plurality of substrates between the substrate storage member and the substrate boat.

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