Sample analysis method and sample preparation method

Abstract

The present application discloses a sample analysis method and a sample preparation method. The sample analysis method includes a sample preparation step, a feeding step, and an analysis step. The sample preparation step includes: an acquisition step: acquiring identification information; a labeling and placement step: first, a sample carrier member having at least one sample disposed thereon is fed into a labeling device, and the labeling device uses the identification information to form an identification structure on the sample carrier member, and then the sample carrier member is disposed in a corresponding receiving groove according to the identification information; the feeding step: taking out a sample carrier member having an identification structure from one of the receiving grooves of the storage box, and then disposing the sample carrier member in an electron microscope device; the analysis step: using the electron microscope device to photograph the sample to generate an analysis image.

Description

Technical Field

[0001] This application relates to a sample analysis method and a sample preparation method, in particular to a sample analysis method and a sample preparation method suitable for analyzing a sample using an electron microscope device. Background Art

[0002] The general process of observing a sample using an electron microscope device is as follows: Relevant personnel take out a component carrying the sample from a temporary storage device and record with a pen and paper the position in the temporary storage device from which the component is taken.

[0003] When the relevant personnel have completed observing the sample using the electron microscope device, the relevant personnel will put the component back into the original temporary storage device. At this time, if the recording paper used to record the position in the temporary storage device from which the component was taken cannot be found, it is possible that the relevant personnel will place the component in a position different from the position from which it was taken originally. For this reason, subsequent related processes will be incorrect. Summary of the Invention

[0004] This application discloses a sample analysis method and a sample preparation method, mainly for improving the problem that in the conventional sample analysis method or sample preparation method, it is easy for the user to place the copper mesh in the wrong position in the storage box after observing the sample.

[0005] One embodiment of this application discloses a sample analysis method, which includes: a sample preparation step, which is executed at least once. The sample preparation step includes: an acquisition step: acquiring an identification information; wherein the identification information is used to represent the position of one of the accommodation slots of a storage box, and the storage box includes a plurality of accommodation slots; a labeling and placement step: first sending a sample carrier member provided with at least one sample into a labeling device, and enabling the labeling device to form an identification structure on the sample carrier member using the identification information, and then setting the sample carrier member in the corresponding accommodation slot according to the identification information; wherein the sample carrier member includes a body and at least one mesh structure, the body has at least one through hole penetrating the body, the mesh structure is connected to the body, the mesh structure is located in the through hole, the mesh structure divides the through hole into a plurality of mesh holes, and the mesh structure is used to carry the sample; a feeding step: taking out a sample carrier member with an identification structure from one of the accommodation slots of the storage box, and then setting the sample carrier member in an electron microscope device; an analysis step: using the electron microscope device to take a picture of the sample to generate an analysis image.

[0006] Optionally, in the acquisition step, in addition to acquiring the identification information, a system information is also acquired, where the system information includes at least one system number and a customer data; after the analysis step, it further includes a data transmission step: integrating the system information and the analyzed image into an analysis information, and transmitting the analysis information to a remote device; wherein, a customer connected to the remote device can read the analyzed image in the analysis information containing the corresponding customer data.

[0007] Optionally, between the feeding step and the analysis step, there is also a judgment step S14, which includes: using an electron microscope device to photograph the sample carrier member to generate a judgment image; interpreting the identification structure from the judgment image to generate a real-time information; comparing whether at least a part of the data included in the real-time information corresponds to at least a part of the data included in the system information; if at least a part of the data included in the real-time information corresponds to at least a part of the data included in the system information, then execute the analysis step; if at least a part of the data included in the real-time information does not correspond to at least a part of the data included in the system information, then control a warning device to actuate to prompt the user that the sample carrier member currently in the electron microscope device does not match the system information.

[0008] Optionally, before the acquisition step, there is also a pre-step: setting the sample on the mesh structure of the sample carrier member, and setting the sample carrier member with the sample set thereon in one of the accommodating slots of the storage box; in the labeling and placement step, taking out the sample carrier member with the sample set thereon from one of the accommodating slots of the storage box, and using an input device to input the content presented by a labeling structure beside the accommodating slot of the storage box into the input device to form the identification information.

[0009] Optionally, before the pre-step, there is also a labeling and cutting step: using a labeling device to form a plurality of combined labeling structures with different styles on a large-sized substrate; using a cutting device to perform at least one cutting operation on the large-sized substrate to cut the large-sized substrate into a plurality of small-sized substrates; each small-sized substrate includes a combined labeling structure; using a sampling device to cut one of the small-sized substrates to obtain a sample.

[0010] Optionally, the identification structure is recessed on one side of the body, or the identification structure is a perforated structure penetrating the body; the identification structure is presented in at least one of the ways of text, numbers, symbols, and patterns.

[0011] Optionally, in the marking and placement step, two identification structures are formed on the sample carrier member by using a marking device, and each identification structure is presented in at least one of the ways of text, numbers, symbols, and patterns. One of the identification structures is used to provide the user with the ability to identify a longitudinal position of the sample carrier member disposed in the storage box, and the other identification structure is used to provide the user with the ability to identify a lateral position of the sample carrier member disposed in the storage box.

[0012] Optionally, in the marking and placement step, at least one of at least one position identification structure, a direction identification structure, and at least one sample identification structure is further formed on the sample carrier member by using a marking device. The sample carrier member is connected to at least one of the body and the mesh structure. Each position identification structure is used to provide the user with the ability to identify the position of the sample carried by the sample carrier member relative to the central position of the sample carrier member; the position identification structure is presented in at least one of the ways of text, numbers, symbols, and patterns; the direction identification structure is connected to at least one of the body and the mesh structure; the direction identification structure is disposed on one side of the body, or the direction identification structure is disposed at the central position of the mesh structure; the direction identification structure is presented in at least one of the ways of text, numbers, symbols, and patterns; the sample identification structure is connected to at least one of the body and the mesh structure; the sample identification structure is presented in at least one of the ways of text, numbers, symbols, and patterns.

[0013] One embodiment of the present application discloses a sample preparation method, which includes: an acquisition step: acquiring an identification information; wherein the identification information is used to represent the position of one of the accommodation slots of a storage box, and the storage box includes a plurality of accommodation slots; a marking and placement step: first sending a sample carrier member provided with at least one sample into a marking device, and enabling the marking device to form an identification structure on the sample carrier member by using the identification information, and then setting the sample carrier member in the corresponding accommodation slot according to the identification information; wherein the sample carrier member includes a body and at least one mesh structure, the body has at least one through hole, the through hole penetrates the body, the mesh structure is connected to the body, the mesh structure is located in the through hole, the mesh structure divides the through hole into a plurality of mesh holes, and the mesh structure is used to carry the sample.

[0014] Optionally, before the acquisition step, a pre-step is further included: setting the sample on the mesh structure of the sample carrier member, and setting the sample carrier member provided with the sample in one of the accommodation slots of the storage box; in the marking and placement step, taking out the sample carrier member provided with the sample from one of the accommodation slots of the storage box, and using an input device to input the content presented by a marking structure beside the accommodation slot of the storage box into the input device to form the identification information.

[0015] Optionally, before the previous step, it further includes a marking and cutting step: using a marking device to form a plurality of combined marking structures on a large-sized substrate; using a cutting device to perform at least one cutting operation on the large-sized substrate to cut the large-sized substrate into a plurality of small-sized substrates; each small-sized substrate includes a combined marking structure; using a sampling device to cut one of the small-sized substrates to obtain a sample; wherein, after the analysis step, it further includes an assembling step: according to the combined marking structures of the small-sized substrates, assembling the plurality of small-sized substrates into a large-sized substrate.

[0016] Optionally, the identification structure is recessedly formed on one side of the body, or the identification structure is a perforated structure penetrating the body; the identification structure is presented in at least one of the ways of characters, numbers, symbols, and patterns.

[0017] Optionally, in the marking and placing step, a marking device is used to form two identification structures on the sample carrier member, and each identification structure is presented in at least one of the ways of characters, numbers, symbols, and patterns. One of the identification structures is used to provide the user with the identification of a longitudinal position of the sample carrier member in the storage box, and the other identification structure is used to provide the user with the identification of a transverse position of the sample carrier member in the storage box.

[0018] Optionally, in the marking and placing step, the marking device is further used to form at least one of at least one position identification structure, a direction identification structure, and at least one sample identification structure on the sample carrier member. The sample carrier member is connected to at least one of the body and the mesh structure. Each position identification structure is used to provide the user with the identification of the position of the sample carried by the sample carrier member relative to the central position of the sample carrier member; the position identification structure is presented in at least one of the ways of characters, numbers, symbols, and patterns; the direction identification structure is connected to at least one of the body and the mesh structure; the direction identification structure is disposed on one side of the body, or the direction identification structure is disposed at the central position of the mesh structure; the direction identification structure is presented in at least one of the ways of characters, numbers, symbols, and patterns; the sample identification structure is connected to at least one of the body and the mesh structure; the sample identification structure is presented in at least one of the ways of characters, numbers, symbols, and patterns.

[0019] In summary, the sample analysis method and the sample preparation method of the present application can greatly reduce the problem that relevant personnel place the sample carrier member and the sample carried thereon in the wrong position in the storage box after observing the sample using an electron microscope device.

[0020] To further understand the features and technical content of the present application, please refer to the following detailed description and drawings of the present application. However, these descriptions and drawings are only used to illustrate the present application and do not impose any limitation on the protection scope of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic flow diagram of the first embodiment of the sample analysis method of the present application.

[0022] Figure 2 It is a schematic diagram of a storage box and a sample carrier member in the sample analysis method of the present application.

[0023] Figure 3 It is a top view schematic diagram of a storage box provided with a sample carrier member in the sample analysis method of the present application.

[0024] Figure 4 It is a top view schematic diagram of a sample carrier member carrying a sample in the sample analysis method of the present application.

[0025] Figure 5 It is a top view schematic diagram of another embodiment of the storage box in the sample analysis method of the present application.

[0026] Figure 6 It is a top view schematic diagram of one of the embodiments of a sample carrier member carried in the sample analysis method of the present application.

[0027] Figure 7 It is a top view schematic diagram of one of the embodiments of a sample carrier member carried in the sample analysis method of the present application.

[0028] Figure 8 It is a top view schematic diagram of one of the embodiments of a sample carrier member carried in the sample analysis method of the present application.

[0029] Figure 9 It is a schematic flow diagram of the second embodiment of the sample analysis method of the present application.

[0030] Figure 10 It is a schematic flow diagram of the third embodiment of the sample analysis method of the present application.

[0031] Figure 11 It is a schematic flow diagram of the fourth embodiment of the sample analysis method of the present application.

[0032] Figure 12 It is a schematic diagram of a large-size substrate and a small-size substrate of the fourth embodiment of the sample analysis method of the present application.

[0033] Figure 13 It is a schematic flow diagram of the sample preparation method of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0034] In the following description, if specific figures are referred to or as shown in specific figures, it is only used to emphasize that in the subsequent description, most of the relevant content mentioned appears in that specific figure, but it does not limit that only the specific figure can be referred to in the subsequent description.

[0035] Please also refer to Figures 1 to 4 , the sample analysis method of the present application includes:

[0036] A sample preparation step S11, which is executed at least once. The sample preparation step S11 includes:

[0037] An acquisition step S111: acquiring an identification information; wherein, the identification information is used to represent the position of one of the accommodation slots 211 of a storage box 2;

[0038] An identification and placement step S112: first, a sample carrier member 1 provided with at least one sample S is sent into an identification device, and the identification device forms an identification structure 13 on the sample carrier member 1 according to the identification information, and then the sample carrier member 1 is placed in the corresponding accommodation slot 211 according to the identification information;

[0039] A feeding step S13: first, take out a sample carrier member 1 with an identification structure 13 from one of the accommodation slots 211 of the storage box 2, and then place the sample carrier member 1 in an electron microscope device;

[0040] An analysis step S15: using the electron microscope device to photograph the sample S to generate an analysis image.

[0041] Regarding the number of times the sample preparation step S11 is executed, it can be determined according to actual needs and the number of accommodation slots 211 included in the storage box 2, and is not limited herein. Specifically, relevant personnel can first repeatedly execute the sample preparation step S11 multiple times to store multiple sample carrier members 1 with identification structures 13 in the storage box 2, and then execute the feeding step S13 and the analysis step S15.

[0042] In different embodiments, the identification information obtained in the acquisition step S111 may include, in addition to the relevant content used to represent the position of one of the accommodation slots of the storage box 2, other relevant content about the storage box 2, relevant content of the sample carrier member 1 provided in the storage box 2, relevant content of the sample provided on the sample carrier member, etc. For example, the identification information may further include information such as the material of the sample, the observation magnification of the sample, and the number of sampling observation areas.

[0043] Please refer to Figures 2 to 4, in practical applications, the storage box 2 may include a box body 21, a lid body 22, and 12 marking structures 23. The box body 21 includes 12 accommodating grooves 211. Each accommodating groove 211 is used to accommodate a sample carrier member 1. The number of accommodating grooves 211 included in the box body 21 can be increased or decreased according to requirements, not limited to what is shown in the figure. The lid body 22 is detachably connected to the box body 21, and the user can operate the lid body 22 to shield all the accommodating grooves 211, thereby preventing the sample carrier member 1 disposed in the accommodating groove 211 from leaving the accommodating groove 211. Regarding the dimensions and shapes of the box body 21 and the lid body 22, and the way the lid body 22 is connected to the box body 21, it is not limited to what is shown in the figure. In different embodiments, the storage box 2 may also not include the lid body 22.

[0044] Twelve marking structures 23 with different styles are provided on one side of the storage box 2, and each marking structure 23 is disposed adjacent to one of the accommodating grooves 211. Each marking structure 23 is used to provide the user with identification of different accommodating grooves 211. Each of the said marking structures 23 is presented in at least one of the following ways: text (such as English, Chinese, or the language of any country), numbers (such as Arabic numerals, Roman numerals, etc.), symbols (such as various geometric figures, etc.), patterns (such as any pattern defined by the user). For example, the twelve marking structures 23 can be presented on the box body 21 in the English letters A, B, C, D, E, F, G, H, I, J, K, L respectively. In another specific example, each marking structure 23 can also include both text and numbers. For example, the twelve marking structures 23 can be A1, A2, A3, B1, B2, B3, C1, C2, C3, D1, D2, D3. The number of marking structures 23 corresponds to the number of accommodating grooves 211, and the marking structures 23 are used to enable the user to distinguish each accommodating groove 211.

[0045] As Figure 4 shown, each sample carrier member 1 is used to carry a sample S. The sample carrier member 1 carrying the sample S is used to be disposed in an electron microscope device (such as various TEMs, SEMs, AFM, etc.), and relevant personnel can observe the sample S disposed on the sample carrier member 1 through the electron microscope device. Each sample carrier member 1 includes: a body 11, a mesh structure 12, and an identification structure 13.

[0046] The main body 11 has a through hole 111, and the through hole 111 passes through the main body 11. The shape and size of the main body 11 and the through hole 111 are not limited to those shown in the figure. The material of the main body 11 and the mesh structure 12 may include copper, nickel, etc., which may be selected according to the type of sample and is not limited here. The mesh structure 12 is connected to the main body 11, and the mesh structure 12 is located in the through hole. The mesh structure 12 divides the through hole 111 into a plurality of mesh holes 112, and the mesh structure 12 is used to carry the sample S. The shape and size of the mesh hole 112 may be determined according to the size and shape of the sample S and is not limited here. In practical applications, the material of the mesh structure 12 may be the same as that of the main body 11.

[0047] The identification structure 13 may be presented in at least one of the following forms: text, numbers, symbols, and patterns. In practical applications, the identification structure 13 may be formed concavely on one side of the body 11, or the identification structure 13 may be a perforated structure that penetrates the body 11. For example, the marking device may form the identification structure 13 on the body 11 by laser technology, chemical etching, physical processing, ink printing, and the like.

[0048] The identification structure 13 may be presented in the same style as one of the marking structures 23 of the storage box 2. For example, in the diagram of this embodiment, Figure 4 The sample supporting member 1 shown is arranged on Figure 3 In the receiving groove 211 at the upper left corner of the storage box 2 shown, the marking structure 23 next to the receiving groove 211 is presented as "A". In the marking and placement step S112, the marking device will first form an identification structure 13 presented as "A" on the main body 11, and then place the sample carrying component 1 in the receiving groove 211 at the upper left corner of the storage box 2.

[0049] In practical applications, the identification information includes all the information required for the marking device to form the identification structure 13 on the sample supporting member 1; for example, Figure 1 , Figure 3 and Figure 4 As shown, it is assumed that in step S13, Figure 3 The sample-carrying component 1 located in the receiving groove 211 of "A" is taken out from the storage box 2 shown. Then, in the obtaining step S111, the identification information may at least include the character string "A" or any corresponding data that can be read by the marking device, so that the marking device can correctly form an identification structure 13 presented as "A" on the sample-carrying component 1 in the marking and placement step S112.

[0050] As described above, through the design of the marking and placement step S112, in the analysis step S15, when the user observes the sample S using the electron microscope device, the recognition structure 13 can be viewed to understand which accommodation groove 211 of the storage box 2 the currently observed sample S was originally placed in. In this way, when the user finishes observing the sample S and returns the sample carrier member 1 to the storage box 2, errors are less likely to occur.

[0051] Please also refer to Figure 5 and Figure 6 , in different embodiments, the number of marking structures included in the storage box 2 can be less than the number of accommodation grooves 211, and the marking structures can be divided into 3 longitudinally marking structures 23A with different styles from each other and 4 laterally marking structures 23B with different styles from each other according to their set positions. For example, if the accommodation grooves 211 included in the storage box 2 are arranged in a 3*4 matrix, the storage box 2 can include 4 longitudinally marking structures 23A with different styles from each other and 3 laterally marking structures 23B with different styles from each other. Each longitudinally marking structure 23A can be presented in at least one of the ways of text, numbers, symbols, and patterns, and each laterally marking structure 23B can be presented in at least one of the ways of text, numbers, symbols, and patterns. For example, the 4 longitudinally marking structures 23A can be presented as Arabic numerals 1, 2, 3, 4, and the 3 laterally marking structures 23B can be presented as English letters A, B, C, but this is not limited thereto.

[0052] Relatively, in the marking and placement step S112, the marking device forms two recognition structures 13A, 13B on the sample carrier member 1; wherein, the recognition structure 13A is used to represent a lateral position of the sample carrier member 1 in the storage box 2, the recognition structure 13B is used to represent a longitudinal position of the sample carrier member 1 in the storage box 2, and the recognition structure 13A has the same style as one of the longitudinally marking structures 23A, and the recognition structure 13B has the same style as one of the laterally marking structures 23B. Specifically, the recognition structure 13A can be presented as the English letter "C", and the recognition structure 13B can be presented as the Arabic numeral "3".

[0053] As described above, in the analysis step S15, the user can view the "C3" presented by the two recognition structures 13A, 13B on the sample carrier member 1 using the electron microscope device, and know Figure 6 the sample carrier member 1 shown Figure 5 is set at the position of the 3rd row (the row marked with the English letter C) and the 3rd column (the column marked with the Arabic numeral 3) of the storage box 2 shown

[0054] It should be noted that the positions where the two identification structures 13A and 13B are provided on the main body 11 can vary according to requirements and are not limited to those shown in the figure. Additionally, the distance between the two identification structures 13A and 13B can be designed according to requirements, and in special applications, the two identification structures 13A and 13B can also be arranged non-adjacent to each other (for example, the identification structure 13A is provided on the left side of the main body 11, and the identification structure 13B is provided on the right side of the main body 11).

[0055] As Figures 6 to 9 shown, in different embodiments, in the marking and placement step S112, at least one of at least one position identification structure 14 (14A, 14B), a direction identification structure 15, and at least one sample identification structure 16A, 16B can also be formed on the sample carrier member 1 by using a marking device. As Figure 6 shown, each position identification structure 14 is used to represent the position of the sample S carried by the sample carrier member 1 relative to the center C position of the sample carrier member 1. The position identification structure 14 can be presented in at least one of the ways of text, numbers, symbols, and patterns.

[0056] In practical applications, when forming the position identification structure 14 on the main body 11 by using a marking device, the style presented by the position identification structure 14 can be determined according to the position of the sample S carried by the sample carrier member 1 relative to the center C of the mesh structure 12; as Figure 6 shown, for example, relevant personnel can make the position identification structure 14 presented in the styles of RU, RD, LU, and LD respectively, so as to represent that the sample S is located in the upper right, lower right, upper left, and lower left positions relative to the center C; that is, after the user sets the sample S at the lower right of the center C of the mesh structure 12, a position marking structure 23 presented in the style of "RD" can be formed on the main body 11 by using a marking device (such as a laser engraving machine, etc.).

[0057] In practical applications, the identification structure 13 and the position identification structure 14 can both be provided at fixed positions on the main body 11. In the analysis step S15, the user can first move the stage carrying the sample carrier member 1 and the lens relative to each other, so that the position identification structure 14 is within the field of view of the electron microscope device. Then, the user or a relevant image capture device can determine the relative movement direction of the stage and the lens by observing the position identification structure 14. In this way, relevant personnel can find the sample S carried by the sample carrier member 1 relatively quickly and observe it.

[0058] As Figure 6As shown, the direction recognition structure 15 can be presented in at least one of the ways of text, numbers, symbols, and patterns. Before viewing the position recognition structure 14, relevant personnel or devices can first view the direction recognition structure 15. In this way, after viewing the position recognition structure 14, the viewing range of the microscope can be ensured to move to the correct position.

[0059] Specifically, assuming that when the marking device forms the position recognition structure 14 on the main body 11, the direction recognition structure 15 is above the center C of the mesh structure 12, and the sample S is at the lower right of the center C of the mesh structure 12, then the marking device can form the position recognition structure 14 presented in the style of "RD" on the main body 11; then, in the analysis step S15, the user can determine the subsequent movement direction of the viewing range by viewing whether the direction recognition structure 15 is above the center C of the mesh structure 12; that is, if the user sees the direction recognition structure 15 above the center C of the mesh structure 12 in the viewing range, then the subsequent viewing range will be controlled to move downward and to the right relative to the center C of the mesh structure 12, and vice versa, the viewing range will be moved upward and to the left.

[0060] As Figure 7 shown, in different embodiments, if the sample carrier 1 carries two samples S1 and S2 at the same time, then in the marking and placement step S112, the marking device will form two position recognition structures 14A, 14B and two sample recognition structures 16A, 16B on the sample carrier 1. The number of the position recognition structure and the sample recognition structure is determined according to the number of samples carried by the mesh structure. The position recognition structure 14A is used to represent the position of the sample S1 arranged on the mesh structure 12 relative to the center of the mesh structure 12, and the position recognition structure 14B is used to represent the position of the sample S2 arranged on the mesh structure 12 relative to the center of the mesh structure 12.

[0061] The sample recognition structure 16A is arranged adjacent to the position recognition structure 14A, and the sample recognition structure 16B is arranged adjacent to the position recognition structure 14B. Each of the sample recognition structures 16A, 16B is used for the user to identify the relevant information of the samples S1, S2 arranged on the mesh structure 12. For example, in the figure, MA in MA-001 and MA-002 can represent the company label, and 001 and 002 can be labeled as the sample numbers of the company.

[0062] As described above, specifically, in the analysis step S15, the relevant personnel can use an electron microscope device to view the position recognition structure 14A and the sample recognition structure 16A presented as "RD-MA-001", and learn that the sample S2 with the company label MA and the sample label 001 is set at the lower right of the mesh structure 12. And the relevant personnel can use the electron microscope device to view the position recognition structure 14B and the sample recognition structure 16B presented as "LU-MA-002", and learn that the sample S1 with the company label MA and the sample label 002 is set at the upper left of the mesh structure 12.

[0063] As Figure 6 and Figure 7 shown, it is worth mentioning that in the embodiment where the position recognition structure 14 (14A, 14B) and the sample recognition structure 16A, 16B are formed on the sample carrier member 1 after the marking and placement step S112, the recognition information obtained in the acquisition step S111 may include data such as "RD", "RD-MA-001", "LU-MA-002", or relevant data sufficient for the marking device to interpret, so that the marking device can correctly form the position recognition structure 14 (14A, 14B) and the sample recognition structure 16A, 16B presented in the styles of "RD", "RD-MA-001", "LU-MA-002" on the sample carrier member 1.

[0064] As Figure 8 shown, in different embodiments, in the marking and placement step S112, the marking device can also present the recognition structure 13 on the sample carrier member 1 in the form of a pattern. In particular, the marking device can present the recognition structure 13 on the main body 11 in the form of a two-dimensional barcode pattern. Of course, the marking device can also present the recognition structure 13 on the main body 11 in the form of a one-dimensional barcode pattern. In practical applications, any relevant information about the sample S and the sample carrier member 1 can be stored in the one-dimensional barcode or two-dimensional barcode. For example, the barcode can store the company information (company code) of the sample, the sample number, the position of the sample relative to the mesh structure 12, the sample type, the position of the sample carrier member 1 in the storage box 2, etc. Conversely, in Figure 8 the embodiment shown, the recognition information obtained in the acquisition step S111 includes relevant data sufficient for the marking device to interpret, and enables the marking device to form a one-dimensional barcode or a two-dimensional barcode on the sample carrier member 1.

[0065] As described above, by forming an identification structure, a position identification structure, a direction identification structure and a sample identification structure on the sample supporting component 1 in the marking and placement step S112, the user is less likely to have observation and recording errors when multiple samples are set on the mesh structure 12.

[0066] In summary, the sample analysis method of the present application can greatly reduce the occurrence of recording errors, sample carrying component removal and placement errors, and other problems caused by relevant personnel through the design of acquisition step S111 and labeling and placement step S112, thereby reducing the error probability of the entire analysis process.

[0067] In practical applications, in the analysis step S15, relevant personnel may, for example, use an electron microscope to view the identification structure 13 on the sample carrier 1 to determine whether the sample carrier 1 currently located in the electron microscope is the same as the sample currently scheduled to be analyzed. Figure 6 As shown, assuming that the relevant personnel observe through the electron microscope equipment that the identification structure 13 on the sample-carrying component 1 is presented as "C3", the relevant personnel may view the identification information through the relevant display to confirm whether the identification information is also "C3"; if the relevant personnel does not see "C3" on the relevant display, it means that the sample S carried by the sample-carrying component 1 currently located in the electron microscope equipment is not the sample currently scheduled to be analyzed; otherwise, it means that the sample currently located in the electron microscope equipment is the sample currently scheduled to be analyzed, and then the analysis image generated in the analysis step S15 will be correctly recorded in the relevant equipment (such as a computer, server, etc.).

[0068] See also Figure 9 The biggest difference between the sample analysis method of this embodiment and the above-mentioned embodiment is that: in addition to obtaining identification information in the acquisition step S111, a system information can also be obtained. The system information can include at least a system number and a customer data; and after the analysis step S15, a data transmission step S16 can also be included: integrating the system information and the analysis image into an analysis information, and transmitting the analysis information to a remote device. Among them, the customer connected to the remote device can read the analysis image in the analysis information containing the corresponding customer data. The remote device is, for example, a server and other cloud devices, which are not limited here.

[0069] For example, when a sample analysis manufacturer is entrusted by a customer to analyze a sample, the sample analysis manufacturer will use devices such as a computer to generate relevant information corresponding to the customer and the sample (i.e., system information). Then, after the sample analysis manufacturer uses an electron microscope device to observe and analyze the sample, the analysis images captured by the electron microscope device, the relevant data of the customer, and the relevant data of the sample (i.e., analysis information) will be uploaded to the cloud. And when the customer connects to the cloud and logs in to the account, the customer will be able to view or download the analysis images, etc. Of course, in different embodiments, the analysis information may also include an analysis result data generated by relevant personnel or relevant computers based on the analysis images. And when the customer connects to the cloud and logs in to the account, the customer will be able to view or download the analysis result data.

[0070] The system number can be, for example, a string determined by the sample analysis manufacturer itself. And the system number can be used to provide information such as the order of the sample currently being analyzed, the customer name, the sample type, etc. for the sample analysis manufacturer. Or, the system number can also be a serial number defined by the sample analysis manufacturer itself, which is not limited here.

[0071] Please refer to Figure 10 , the biggest difference between the sample analysis method of this embodiment and the foregoing embodiments is that: between the feeding step S13 and the analysis step S15, there is also a judgment step S14, and the judgment step S14 includes:

[0072] An image generation step S141: Use an electron microscope device to photograph the sample carrier member 1 to generate a judgment image;

[0073] A real-time information generation step S142: Interpret and identify the structure 13 from the judgment image to generate a real-time information;

[0074] A comparison step S143: Compare whether at least a part of the data included in the real-time information corresponds to at least a part of the data included in the system information;

[0075] If at least a part of the data included in the real-time information corresponds to at least a part of the data included in the system information, then execute the analysis step S15;

[0076] If at least a part of the data included in the real-time information does not correspond to at least a part of the data included in the system information, then control a warning device to act to prompt the user that the sample carrier member currently in the electron microscope device does not match the system information.

[0077] It should be noted that in practical applications, the real-time information generation step S142 can be executed, for example, by a computer or other device connected to the electron microscope device, or by a relevant processor within the electron microscope device. The computer or the relevant processor performs an image recognition operation on the judgment image to identify the content presented by the recognition structure 13 formed on the sample carrier 1, and generates the real-time information accordingly.

[0078] For example, assume that the sample carrier 1 after the marking and placement step S112 is as Figure 6 shown. Then, the judgment image generated in the image generation step S141 will be equivalent to the Figure 6 image shown. In the real-time information generation step S142, the relevant computer or processor performs image recognition on the Figure 6 judgment image shown to read out the character string "C3" corresponding to the recognition structure on the sample carrier 1. Then, in the comparison step S143, the computer or the processor determines whether the system information contains "C3" or related data equivalent to this character string. If it contains the relevant data of this character string, it is determined that the sample carrier currently located in the electron microscope device is the same as the sample carrier that the current system default wants to analyze. Thus, the analysis step S15 will continue.

[0079] Continuing from the above, conversely, when the computer or the processor determines that the system information does not contain "C3" or related data equivalent to this character string, the analysis step S15 will not be executed. Instead, the warning device (such as various devices that can emit sounds, information, lights, etc., sufficient to alert relevant operators) is controlled to actuate to prompt the user that the sample carrier 1 currently located in the electron microscope device is different from the sample carrier 1 that the system default wants to analyze at present. In this way, it can greatly reduce the situation where the analysis step S15 is still executed when relevant personnel set the incorrect sample carrier 1 in the electron microscope device, resulting in subsequent recording errors and other problems.

[0080] Please refer to Figure 11 . The biggest difference between the sample analysis method of this embodiment and the foregoing embodiments is that: before the obtaining step S111, there is also a pre-step S02: setting the sample on the mesh structure 12 of the sample carrier 1, setting the sample carrier 1 with the sample S set thereon in one of the accommodating grooves 211 of the storage box 2, and using an input device to input the content presented by a marking structure 23 beside the accommodating groove 211 of the storage box 2 to generate the recognition information.

[0081] For example, an electron microscope device can be connected to a computer, which can be connected to a mouse and a keyboard (i.e., input devices), a screen, etc. In the pre-step S02, for example, relevant personnel can place the sample S on the sample carrier member 1 and then place the sample carrier member 1 with the sample S in the receiving slot 211 marked as "C3" on the storage box 2 (as Figure 6 shown). Then, using the mouse and keyboard, input "C3" into the computer, and the computer will generate identification information containing the string "C3" or related data equivalent to this string. Of course, the input device referred to here can be any device that can input a string, such as a touch screen or physical buttons, etc. In addition, the computer referred to here can be a device independent of the electron microscope device or can also be a related processing device inside the electron microscope device.

[0082] Please also refer to Figure 11 and Figure 12 . Another difference between the sample analysis method of this embodiment and the previous embodiment is that before the pre-step S02, it can also include a marking and cutting step S01, which includes:

[0083] A combined marking and placement step S011: Using a marking device, form 8 combined marking structures B1 - B8 with different styles on a large-sized substrate A;

[0084] A large-sized cutting step S012: Using a cutting device, perform at least one cutting operation on the large-sized substrate A to cut the large-sized substrate A into multiple small-sized substrates A1; each small-sized substrate A1 contains a combined marking structure;

[0085] A sampling step S013: Using a sampling device, cut one of the small-sized substrates A1 to obtain a sample S;

[0086] Among them, after the analysis step S15, it also includes a combining step S17: According to the combined marking structures B of each small-sized substrate A1, splice multiple small-sized substrates A1.

[0087] In practical applications, the marking device referred to in the combined marking and placement step S01A can be the same as the marking device referred to in the marking and placement step S112, but this is not limited to this. The cutting device and sampling device referred to in the large-sized cutting step S012 and the sampling step S013 can be determined according to the type, material, etc. of the large-sized substrate A, and are not limited here.

[0088] Specifically, a sample analysis manufacturer may receive a large-sized substrate A provided by a customer. The customer requests the sample analysis manufacturer to take samples and conduct analysis on the failure location of the large-sized substrate A. At this time, the large-sized substrate A can be cut by the sample analysis method of this embodiment, and the part located at the failure location can be taken out from the small-sized substrate B to make a sample. After the sample analysis manufacturer completes the analysis of the sample, the sample analysis manufacturer can splice multiple small-sized substrates A1 through the combined marking structure B marked on each small-sized substrate A1, and finally return the spliced multiple small-sized substrates A1 to the customer.

[0089] As described above, the sample analysis method of this embodiment enables the sample analysis manufacturer to quickly and correctly splice multiple small-sized substrates A1 back to an appearance substantially the same as the original large-sized substrate A provided by the customer after completing the analysis of the sample.

[0090] Please refer to Figure 13 , the sample preparation method of this application includes:

[0091] An acquisition step S21: Acquire an identification information; wherein, the identification information is used to represent the position of one of the accommodation slots of a storage box, and the storage box includes multiple accommodation slots;

[0092] A marking and placement step S22: First, send a sample carrier member provided with at least one sample into a marking device, and enable the marking device to form an identification structure on the sample carrier member by using the identification information, and then place the sample carrier member in the corresponding accommodation slot according to the identification information; wherein, the sample carrier member includes a body and at least one mesh structure, the body has at least one through hole, the through hole penetrates the body, the mesh structure is connected to the body, the mesh structure is located in the through hole, and the mesh structure divides the through hole into multiple mesh holes, and the mesh structure is used to carry the sample.

[0093] The acquisition step S21 and the marking and placement step S22 exemplified in this embodiment are the same as the acquisition step S111 and the marking and placement step S112 exemplified in the foregoing embodiment, and will not be elaborated here.

[0094] The above description is only a preferred and feasible embodiment of this application, and does not limit the patent scope of this application. Therefore, all equivalent technical changes made by using the content of the specification and drawings of this application are included in the protection scope of this application.

Claims

1. A sample analysis method, characterized in that, The sample analysis method includes: A sample preparation step, which is performed at least once, and the sample preparation step includes: An acquisition step: acquiring an identification information; wherein, the identification information is used to represent the position of one of the accommodating grooves of a storage box, and the storage box includes a plurality of the accommodating grooves; An identification and placement step: first, a sample carrier member on which at least one sample has been set is sent into an identification device, and the identification device uses the identification information to form an identification structure on the sample carrier member, and then the sample carrier member is placed in the corresponding accommodating groove according to the identification information; wherein, the sample carrier member includes a body and at least one mesh structure, the body has at least one through hole, the through hole penetrates the body, the mesh structure is connected to the body, the mesh structure is located in the through hole, the mesh structure divides the through hole into a plurality of mesh holes, and the mesh structure is used to carry the sample; A feeding step: taking out a sample carrier member with the identification structure from one of the accommodating grooves of the storage box, and then setting the sample carrier member in an electron microscope device; An analysis step: using the electron microscope device to photograph the sample to generate an analysis image; Wherein, before the acquisition step, there is also a pre-step: setting the sample on the mesh structure of the sample carrier member, and setting the sample carrier member on which the sample has been set in one of the accommodating grooves of the storage box; in the identification and placement step, the sample carrier member on which the sample has been set is taken out from one of the accommodating grooves of the storage box, and the content presented by a marking structure beside the accommodating groove of the storage box is input into an input device by using the input device to form the identification information; Wherein, before the pre-step, there is also a marking and cutting step: Using the marking device to form a plurality of combined marking structures with different styles on a large-sized substrate; Using a cutting device to perform at least one cutting operation on the large-sized substrate to cut the large-sized substrate into a plurality of small-sized substrates; each small-sized substrate includes one of the combined marking structures; Using a sampling device to cut one of the small-sized substrates to obtain a sample.

2. The sample analysis method according to claim 1, characterized in that In the acquisition step, in addition to acquiring the identification information, a system information is also acquired, and the system information includes at least one system number and a customer data; after the analysis step, there is also a data transmission step: integrating the system information and the analysis image into an analysis information, and transmitting the analysis information to a remote device; wherein, a customer connected to the remote device can read the analysis image in the analysis information including the corresponding customer data.

3. The sample analysis method according to claim 2, wherein There is also a judgment step S14 between the feeding step and the analysis step, which includes: Using the electron microscope device to photograph the sample carrier member to generate a judgment image; Interpret the recognition structure in the judgment image to generate a real-time message; Compare whether at least part of the data included in the real-time message corresponds to at least part of the data included in the system message; If at least part of the data included in the real-time message corresponds to at least part of the data included in the system message, perform the analysis step; If at least part of the data included in the real-time message does not correspond to at least part of the data included in the system message, control an alarm device to actuate to prompt the user that the sample carrier member in the electron microscope device does not match the system message.

4. The sample analysis method according to claim 1, wherein The recognition structure is recessed on one side of the body, or the recognition structure is a perforated structure penetrating the body; the recognition structure is presented in at least one of the ways of text, numbers, symbols, and patterns.

5. The sample analysis method according to claim 1, characterized in that, In the marking and placing step, two of the recognition structures are formed on the sample carrier member by using the marking device, and each of the recognition structures is presented in at least one of the ways of text, numbers, symbols, and patterns. One of the recognition structures is used to provide the user with the identification of a longitudinal position of the sample carrier member disposed in the storage box, and the other recognition structure is used to provide the user with the identification of a lateral position of the sample carrier member disposed in the storage box.

6. The sample analysis method according to claim 1, wherein, In the marking and placing step, at least one of at least one position recognition structure, a direction recognition structure, and at least one sample recognition structure is further formed on the sample carrier member by using the marking device. The sample carrier member is connected to at least one of the body and the mesh structure. Each of the position recognition structures is used to provide the user with the identification of the position of the sample carried by the sample carrier member relative to the central position of the sample carrier member; The position recognition structure is presented in at least one of the ways of text, numbers, symbols, and patterns; the direction recognition structure is connected to at least one of the body and the mesh structure; The direction recognition structure is disposed on one side of the body, or the direction recognition structure is disposed at the central position of the mesh structure; The direction recognition structure is presented in at least one of the ways of text, numbers, symbols, and patterns; the sample recognition structure is connected to at least one of the body and the mesh structure; The sample recognition structure is presented in at least one of the ways of text, numbers, symbols, and patterns.

7. A sample preparation method, characterized in that, The sample preparation method includes: An obtaining step: obtaining an identification information; wherein the identification information is used to represent the position of one of the accommodating grooves of a storage box, and the storage box includes a plurality of the accommodating grooves; An identification and placement step: First, a sample carrier member having at least one sample already disposed thereon is fed into an identification device, and the identification device uses the identification information to form an identification structure on the sample carrier member, and then the sample carrier member is disposed in the corresponding accommodation groove according to the identification information; wherein, the sample carrier member includes a body and at least one mesh structure, the body has at least one through hole penetrating the body, the mesh structure is connected to the body, the mesh structure is located in the through hole, the mesh structure divides the through hole into a plurality of mesh holes, and the mesh structure is used to carry the sample; Wherein, before the obtaining step, there is also a pre-step: disposing the sample on the mesh structure of the sample carrier member, and disposing the sample carrier member having the sample disposed thereon in one of the accommodation grooves of the storage box; in the identification and placement step, the sample carrier member having the sample disposed thereon is taken out from one of the accommodation grooves of the storage box, and the content presented by a marking structure beside the accommodation groove of the storage box is input into the input device by using an input device to form the identification information; Wherein, before the pre-step, there is also a marking and cutting step: Using the marking device, forming a plurality of combined marking structures on a large-sized substrate; Using a cutting device to perform at least one cutting operation on the large-sized substrate to cut the large-sized substrate into a plurality of small-sized substrates; each of the small-sized substrates includes one of the combined marking structures; Using a sampling device to cut one of the small-sized substrates to obtain one sample; Wherein, after the sample is analyzed, there is also an assembling step: splicing a plurality of the small-sized substrates into the large-sized substrate according to the combined marking structures of each of the small-sized substrates.

8. The sample preparation method according to claim 7, characterized in that, The identification structure is recessedly formed on one side of the body, or the identification structure is a through-hole structure penetrating the body; the identification structure is presented in at least one of the ways of text, numbers, symbols, and patterns.

9. The sample preparation method according to claim 7, characterized in that, In the identification and placement step, two of the identification structures are formed on the sample carrier member by using the identification device, and each of the identification structures is presented in at least one of the ways of text, numbers, symbols, and patterns. One of the identification structures is used to provide the user with identification of a longitudinal position of the sample carrier member disposed in the storage box, and the other identification structure is used to provide the user with identification of a transverse position of the sample carrier member disposed in the storage box.

10. The sample preparation method according to claim 7, characterized in that, In the marking and placement steps, the marking device is further used to form at least one of at least one position recognition structure, a direction recognition structure, and at least one sample recognition structure on the sample carrier member. The sample carrier member is connected to at least one of the body and the mesh structure. Each of the position recognition structures is used to enable a user to identify the position of the sample carried by the sample carrier member relative to the center position of the sample carrier member. The position recognition structure is presented in at least one of the ways of text, numbers, symbols, and patterns; the direction recognition structure is connected to at least one of the body and the mesh structure. The direction recognition structure is provided on one side of the body, or the direction recognition structure is provided at the center position of the mesh structure. The direction recognition structure is presented in at least one of the ways of text, numbers, symbols, and patterns; the sample recognition structure is connected to at least one of the body and the mesh structure. The sample recognition structure is presented in at least one of the ways of text, numbers, symbols, and patterns.

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