A linear grating displacement sensor precision calibration device, method and system

Abstract

The application discloses a linear grating displacement sensor precision calibration device, method, system, control device and computer storage medium, which comprises a base 10, a calibration motion structure 9 is installed on the base 10, the upper surface of the calibration motion structure 9 is used for installing the dynamic structure of a linear grating displacement sensor 8 to be calibrated, a posture adjuster 3 is fixed with the base 10 through corresponding supports and is installed above the calibration motion structure 9, the lower surface of the posture adjuster 3 is used for installing the static structure of the linear grating displacement sensor 8, and a laser interferometer 21 is installed on one side of the static structure and is aligned with the static structure. The application uses the posture adjuster 3 to adjust the pose of the static structure of the linear grating displacement sensor 8, so that the best use posture of the linear grating displacement sensor 8 is determined, and finally, calibration is carried out in the posture, and accurate calibration results are obtained.

Description

Technical Field

[0001] This application relates to the field of optics, and in particular to a linear grating displacement sensor accuracy calibration device, method, system, control device, and computer storage medium. Background Technology

[0002] With the increasing demands for adjustment speed and precision, optical displacement sensors are increasingly used in high-speed, high-precision micro-displacement mechanisms to provide displacement feedback. Among these, linear grating displacement sensors are favored for real-time displacement feedback in adjustment mechanisms due to their small size, high resolution, and good stability.

[0003] The displacement measurement reference of a linear grating displacement sensor depends on the grating's marking period, i.e., the uniformity of the grating pitch. Due to the influence of grating marking process, environment, and vibration, the grating pitch cannot reach the nanometer precision level. Furthermore, during application, the accuracy of the linear grating displacement sensor is affected by installation posture errors, which can also lead to a decrease in the sensor's accuracy.

[0004] Therefore, a calibration device with higher accuracy for linear grating displacement sensors is needed. Summary of the Invention

[0005] In view of this, the purpose of this application is to provide a linear grating displacement sensor accuracy calibration device, method, system, control device, and computer storage medium, achieving higher calibration accuracy. The specific solution is as follows:

[0006] A linear grating displacement sensor accuracy calibration device includes: an attitude adjuster 3, a laser interferometer 21, a calibration motion structure 9, a signal receiving device, and a base 10;

[0007] The calibration motion structure 9 is mounted on the base 10. The upper surface of the calibration motion structure 9 is used to mount the dynamic structure of the linear grating displacement sensor 8 to be calibrated. The attitude adjuster 3 is fixed to the base 10 by a corresponding bracket and is mounted above the calibration motion structure 9. The lower surface of the attitude adjuster 3 is used to mount the static structure of the linear grating displacement sensor 8. The laser interferometer 21 is mounted on one side of the static structure and aligned with the static structure.

[0008] The calibration motion structure 9 is used to drive the dynamic structural displacement of the linear grating displacement sensor 8.

[0009] The attitude adjuster 3 is used to adjust the attitude of the static structure of the linear grating displacement sensor 8;

[0010] The laser interferometer 21 is used to detect the displacement of the dynamic structure of the linear grating displacement sensor 8;

[0011] The signal receiver is used to receive the attitude signal transmitted by the attitude adjuster 3 and the grating signal transmitted by the linear grating displacement sensor 8.

[0012] Optionally, the attitude adjuster 3 includes a mounting base 31, an attitude adjustment driver 1, and a capacitive sensor 2;

[0013] The attitude adjustment driver 1 and the capacitive sensor 2 are mounted on the upper surface of the mounting base 31, and the static structure of the linear grating displacement sensor 8 is mounted on the lower surface of the mounting base 31.

[0014] The attitude adjustment driver 1 is used to adjust the attitude of the mounting base 31 in space;

[0015] The capacitive sensor 2 is used to output the attitude signal of the mounting base 31 to the signal receiver.

[0016] Optionally, the attitude adjuster 3 includes a front-back adjustment driver, a left-right adjustment driver, a height adjustment driver, a front-back detection capacitive sensor, a left-right detection capacitive sensor, and a height capacitive sensor.

[0017] The front and rear adjustment driver is used to adjust the front and rear posture of the mounting base 31;

[0018] The left and right adjustment driver is used to adjust the left and right posture of the mounting base 31;

[0019] The height adjustment driver is used to adjust the height and orientation of the mounting base 31;

[0020] The front and rear detection capacitive sensors are used to detect the front and rear attitude signals of the mounting base 31.

[0021] The left and right detection capacitive sensors are used to detect the left and right attitude signals of the mounting base 31.

[0022] The height detection capacitive sensor is used to detect the height attitude signal of the mounting base 31.

[0023] Optionally, the calibration motion structure 9 includes a motion base 91 and a motion adjustment driver 4;

[0024] The motion base 91 is mounted on the base 10. The motion base 91 carries a motion structure. The upper surface of the motion structure is used to mount the dynamic structure. The motion adjustment driver 4 is mounted on one side of the motion structure.

[0025] The motion adjustment driver 4 is used to drive the motion structure to cause the dynamic structure to move.

[0026] Optionally, the laser interferometer 21 includes: a laser interferometer mirror 5, a laser interferometer interferometer mirror 6, and a laser interferometer laser 7;

[0027] The laser interferometer reflector 5 is mounted on one side of the moving base 91, and the laser interferometer interferometer mirror 6 and the laser interferometer laser 7 are mounted on the same side of the base 10, corresponding to the laser interferometer reflector 5.

[0028] This application also discloses a method for calibrating the accuracy of a linear grating displacement sensor, applied in the aforementioned linear grating displacement sensor accuracy calibration device, comprising:

[0029] Adjust the attitude of the attitude adjuster 3 so that the signal receiver receives the grating signal output by the static structural displacement of the linear grating displacement sensor 8 on the attitude adjuster 3;

[0030] Adjust the attitude of the attitude adjuster 3 and record the target attitude of the attitude adjuster 3 when the grating signal of the linear grating displacement sensor 8 is at its maximum value;

[0031] Adjust the attitude of the attitude adjuster 3 to the target attitude, drive the calibration motion structure 9, and use the grating signals of the laser interferometer 21 and the linear grating displacement sensor 8 to calibrate the linear grating displacement sensor 8;

[0032] The laser interferometer 21 is pre-calibrated with the dynamic structure of the linear grating displacement sensor 8 mounted on the calibration motion structure 9 as the target.

[0033] Optionally, the process of adjusting the attitude of the attitude adjuster 3 and recording the target attitude of the attitude adjuster 3 when the grating signal of the linear grating displacement sensor 8 is at its maximum value includes:

[0034] Adjust the attitude of the attitude adjuster 3;

[0035] The maximum value of the grating signal of the linear grating displacement sensor 8 is determined using Fourier analysis.

[0036] The target attitude of the attitude adjuster 3 is recorded when the grating signal of the linear grating displacement sensor 8 is at its maximum value.

[0037] This application also discloses a precision calibration system for a linear grating displacement sensor 8, comprising:

[0038] An attitude adjustment module is used to adjust the attitude of the attitude adjuster 3 so that the signal receiver receives the grating signal output by the linear grating displacement sensor 8 on the attitude adjuster 3 due to the static structural displacement.

[0039] The attitude recording module is used to adjust the attitude of the attitude adjuster 3 and record the target attitude of the attitude adjuster 3 when the grating signal of the linear grating displacement sensor 8 is at its maximum value.

[0040] The calibration module is used to adjust the attitude of the attitude adjuster 3 to the target attitude, drive the calibration motion structure 9, and calibrate the linear grating displacement sensor 8 using the grating signals of the laser interferometer 21 and the linear grating displacement sensor 8.

[0041] The laser interferometer 21 is pre-calibrated with the dynamic structure of the linear grating displacement sensor 8 mounted on the calibration motion structure 9 as the target.

[0042] This application also discloses a precision calibration control device for a linear grating displacement sensor 8, comprising:

[0043] Memory, used to store computer programs;

[0044] A processor is used to execute the computer program to implement the accuracy calibration method for the linear grating displacement sensor as described above.

[0045] This application also discloses a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the aforementioned accuracy calibration method for a linear grating displacement sensor.

[0046] In this application, a linear grating displacement sensor accuracy calibration device includes: an attitude adjuster 3, a laser interferometer 21, a calibration motion structure 9, a signal receiving device, and a base 10. The calibration motion structure 9 is mounted on the base 10. The upper surface of the calibration motion structure 9 is used to mount the dynamic structure of the linear grating displacement sensor 8 to be calibrated. The attitude adjuster 3 is fixed to the base 10 via a corresponding bracket and mounted above the calibration motion structure 9. The lower surface of the attitude adjuster 3 is used to mount the static structure of the linear grating displacement sensor 8. The laser interferometer 21 is mounted on one side of the static structure and aligned with it. The calibration motion structure 9 is used to drive the dynamic structure displacement of the linear grating displacement sensor 8. The attitude adjuster 3 is used to adjust the attitude of the static structure of the linear grating displacement sensor 8. The laser interferometer 21 is used to detect the displacement of the dynamic structure of the linear grating displacement sensor 8. The signal receiver is used to receive the attitude signal transmitted by the attitude adjuster 3 and the grating signal transmitted by the linear grating displacement sensor 8.

[0047] This application uses an attitude adjuster 3 to adjust the static structure of the linear grating displacement sensor 8, thereby determining the optimal usage attitude of the linear grating displacement sensor 8, and finally performing calibration in this attitude to obtain accurate calibration results. Attached Figure Description

[0048] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0049] Figure 1 This is a schematic diagram of a linear grating displacement sensor accuracy calibration device disclosed in an embodiment of this application;

[0050] Figure 2 This is a schematic diagram of an attitude adjuster 3 disclosed in an embodiment of this application;

[0051] Figure 3 This is a flowchart of a method for calibrating the accuracy of a linear grating displacement sensor disclosed in an embodiment of this application;

[0052] Figure 4 This is a structural diagram of a precision calibration system for a linear grating displacement sensor 8 disclosed in an embodiment of this application. Detailed Implementation

[0053] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0054] This application discloses a linear grating displacement sensor accuracy calibration device. See [link to relevant documentation]. Figure 1 and Figure 2 As shown, the device includes: an attitude adjuster 3, a laser interferometer 21, a calibration motion structure 9, and a base 10;

[0055] A calibration motion structure 9 is mounted on the base 10. The upper surface of the calibration motion structure 9 is used to mount the dynamic structure of the linear grating displacement sensor 8 to be calibrated. The attitude adjuster 3 is fixed to the base 10 by a corresponding bracket and is mounted above the calibration motion structure 9. The lower surface of the attitude adjuster 3 is used to mount the static structure of the linear grating displacement sensor 8. The laser interferometer 21 is mounted on one side of the static structure and aligned with the static structure.

[0056] The calibration motion structure 9 is used to drive the dynamic structural displacement of the linear grating displacement sensor 8;

[0057] Attitude adjuster 3 is used to adjust the attitude of the static structure of linear grating displacement sensor 8;

[0058] Laser interferometer 21 is used to detect the displacement of the dynamic structure of linear grating displacement sensor 8;

[0059] The signal receiver is used to receive the attitude signal transmitted by the attitude adjuster 3 and the grating signal transmitted by the linear grating displacement sensor 8.

[0060] Specifically, the attitude adjuster 3 can achieve multi-axis adjustment in space, such as three-axis adjustment, to achieve comprehensive adjustment in three directions: front, back, left, right and up. Through the attitude adjuster 3, the position of the static structure of the linear grating displacement sensor 8 to be calibrated relative to the dynamic structure can be adjusted, thereby obtaining the attitude of the linear grating displacement sensor 8 to be calibrated that can output the maximum signal, which is the optimal attitude of the linear grating displacement sensor 8 to be calibrated when detecting.

[0061] Specifically, the attitude adjuster 3 can transmit its own attitude to the signal receiver as a corresponding signal, so that the signal receiver can obtain the signal corresponding to each attitude of the attitude adjuster 3. Then, the attitude adjuster 3 can be readjusted to the corresponding attitude according to the signal corresponding to each attitude. Similarly, after the static and dynamic structures of the linear grating displacement sensor 8 undergo relative displacement, they will also generate signals and send them to the signal receiver. According to the strength of the signal and the corresponding algorithm, it can be analyzed whether the grating signal of the linear grating displacement sensor 8 is in the optimal attitude, as well as the displacement amount corresponding to the signal and other information.

[0062] Specifically, the signal receiver may include a data acquisition card, which is dedicated to collecting the attitude signal output by the linear grating displacement sensor 8, and another signal sub-receiver dedicated to receiving the attitude signal output by the attitude adjuster 3.

[0063] Specifically, firstly, the attitude adjuster 3 and calibration motion structure 9 can be coarsely adjusted to ensure that the dynamic and static structures of the linear grating displacement sensor 8 correspond to each other, enabling the linear grating displacement sensor 8 to output signals and ensuring its operation. Then, the attitude adjuster 3 can be finely adjusted by continuously changing its attitude to obtain the signals output by the linear grating displacement sensor 8 in different attitudes. The maximum signal output by the linear grating displacement sensor 8 during the adjustment period is then found, i.e., the maximum value of the grating signal. Once the maximum signal is found, the corresponding attitude is recorded and determined as the optimal attitude. The linear grating displacement sensor 8 can then be adjusted to the optimal attitude. Then, the calibration motion structure 9 is used to drive the linear grating displacement sensor 8 to move, achieving calibration while the linear grating displacement sensor 8 is in the optimal attitude, thereby obtaining the best calibration result.

[0064] Specifically, the laser interferometer 21 is used to make accurate judgments on the displacement of the dynamic structure of the linear grating displacement sensor 8 driven by the calibration motion structure. The laser interferometer 21 can obtain the accurate displacement of the dynamic structure of the linear grating displacement sensor 8.

[0065] Understandably, the laser interferometer 21 is pre-calibrated before use to control the Abbe and cosine errors in its application and reduce installation errors in the measurement optical path. Calibration of the laser interferometer 21 can be achieved using ray tracing, i.e., by adding a plane mirror to the optical path and determining the quality of the optical path by observing the return light.

[0066] As can be seen, this application uses the attitude adjuster 3 to adjust the static structure of the linear grating displacement sensor 8, thereby determining the optimal usage attitude of the linear grating displacement sensor 8, and finally calibrating it in this attitude to obtain accurate calibration results.

[0067] This application discloses a specific linear grating displacement sensor accuracy calibration device. Compared with the previous embodiment, this embodiment further explains and optimizes the technical solution. See also... Figure 1 and Figure 2 As shown:

[0068] Specifically, the attitude adjuster 3 may include a mounting base 31, an attitude adjustment driver 1, and a capacitive sensor 2.

[0069] The upper surface of the mounting base 31 is equipped with an attitude adjustment driver 1 and a capacitive sensor 2, and the lower surface of the mounting base 31 is used to mount a static structure for a linear grating displacement sensor 8.

[0070] Attitude adjustment driver 1 is used to adjust the attitude of mounting base 31 in space;

[0071] Capacitive sensor 2 is used to output the attitude signal of mounting base 31 to signal receiver.

[0072] Specifically, the attitude of the mounting base 31 can be adjusted by multiple attitude adjustment drivers 1, thereby changing the attitude of the static structure of the linear grating displacement sensor 8 installed under the mounting base 31. At the same time, the capacitive sensor 2 can generate a signal change according to the attitude change of the mounting base, thereby reflecting the attitude of the mounting base. Therefore, the signal output by the capacitive sensor 2 is output as the attitude signal of the mounting base 31 to the signal receiver, so that the signal receiver can confirm the corresponding attitude according to the signal.

[0073] It is understandable that in order to achieve multi-dimensional attitude adjustment, multiple attitude adjustment drivers 1 can be included. Similarly, in order to measure multi-dimensional attitude changes, multiple capacitive sensors 2 can be set accordingly. For example, the attitude adjuster 3 can specifically include a front-back adjustment driver, a left-right adjustment driver, a height adjustment driver, a front-back detection capacitive sensor, a left-right detection capacitive sensor, and a height capacitive sensor.

[0074] A front-to-back adjustment driver is used to adjust the front-to-back posture of the mounting base 31;

[0075] Left and right adjustment driver, used to adjust the left and right posture of mounting base 31;

[0076] A height adjustment driver is used to adjust the height and orientation of the mounting base 31;

[0077] Front and rear capacitive sensors are used to detect the front and rear attitude signals of the mounting base 31;

[0078] Left and right detection capacitive sensors are used to detect the left and right attitude signals of the mounting base 31;

[0079] A height detection capacitive sensor is used to detect the height attitude signal of the mounting base 31.

[0080] Specifically, through the front-back adjustment driver, the left-right adjustment driver, and the height adjustment driver, the attitude adjuster 3 can achieve attitude adjustment in three dimensions without any dead angles. At the same time, the front-back detection capacitive sensor, the left-right detection capacitive sensor, and the height detection capacitive sensor can detect attitude changes in each dimension respectively, and output front-back attitude signal, left-right attitude signal, and height attitude signal to the signal receiver respectively.

[0081] Specifically, the calibration motion structure 9 includes a motion base 91 and a motion adjustment actuator 4;

[0082] The motion base 91 is mounted on the base 10. The motion base 91 supports the motion structure. The upper surface of the motion structure is used to install the dynamic structure. A motion adjustment driver 4 is installed on one side of the motion structure.

[0083] The motion adjustment actuator 4 is used to drive the moving structure to cause dynamic structural displacement.

[0084] Specifically, during calibration, the motion adjustment driver 4 first drives the motion structure on the base 10 to move the dynamic structure of the linear grating displacement sensor 8 to the zero position. Then, the motion adjustment driver 4 can slowly drive the dynamic structure to move, and together with the laser interferometer 21, achieve accurate calibration of the linear grating displacement sensor 8.

[0085] Specifically, the motion base 91 can support a motion structure, and the motion adjustment driver directly acts on the motion structure to drive the motion structure to move, thus indirectly adjusting the dynamic structure of the linear grating displacement sensor 8.

[0086] Specifically, the laser interferometer 21 may include: a laser interferometer mirror 5, a laser interferometer interferometer mirror 6, and a laser interferometer laser 7;

[0087] The laser interferometer reflector 5 is installed on one side of the moving base 91, and the laser interferometer interferometer mirror 6 and the laser interferometer laser 7 are installed on the same side of the base 10, corresponding to the laser interferometer reflector 5.

[0088] Specifically, the laser interferometer reflector 5 can be mounted on the motion base 91 of the calibration motion structure 9.

[0089] Furthermore, in order to better and more precisely adjust the posture and drive the dynamic structure of the motion structure, all actuators can be piezoelectric actuators. High-precision piezoelectric actuators can achieve the most precise adjustments possible.

[0090] Accordingly, this application also discloses a method for calibrating the accuracy of a linear grating displacement sensor, see [link to relevant documentation]. Figure 3 As shown, the device applied in the aforementioned linear grating displacement sensor accuracy calibration apparatus includes:

[0091] S11: Adjust the attitude of the attitude adjuster 3 so that the signal receiver receives the grating signal output by the static structural displacement of the linear grating displacement sensor 8 on the attitude adjuster 3.

[0092] S12: Adjust the attitude of the attitude adjuster 3 and record the target attitude of the attitude adjuster 3 when the grating signal of the linear grating displacement sensor 8 is at its maximum value.

[0093] S13: Adjust the attitude of the attitude adjuster 3 to the target attitude, drive the calibration motion structure 9, and use the grating signal of the laser interferometer 21 and the linear grating displacement sensor 8 to calibrate the linear grating displacement sensor 8.

[0094] Among them, the laser interferometer 21 is pre-calibrated with the dynamic structure of the linear grating displacement sensor 8 installed on the calibration motion structure 9 as the target.

[0095] Specifically, the linear grating displacement sensor 8 is mounted on the calibration structure, and its signal is acquired via a data acquisition card. The grating signal of the linear grating displacement sensor 8 is in sin / cos format. The installation quality of the linear grating displacement sensor 8 can be judged based on the quality of the grating signal, which can be evaluated using a Lissajous curve. This step is the coarse adjustment stage, achieving only a rough adjustment of the linear grating displacement sensor 8.

[0096] Specifically, the laser interferometer 21 is installed and calibrated to control the Abbe and cosine errors in its application. Calibration of the laser interferometer 21 can be achieved using ray tracing, which involves adding a plane mirror to the optical path and determining the quality of the optical path by observing the returned light.

[0097] Specifically, the fine-tuning of the linear grating displacement sensor 8 is achieved through the capacitive sensor 2 and the attitude adjustment motor driving the attitude adjuster 3. Adjusting the attitude adjuster 3 enables the linear grating displacement sensor 8 to traverse various adjustment poses at equal intervals in the vertical and two tilt directions. During the attitude adjustment process, a data acquisition card records the signal quality at each adjustment pose to determine the optimal spatial adjustment pose. The signal determination criterion for the adjustment pose is the orthogonality of the signals. Fourier analysis is used to determine the orthogonality of the signals. The grating signals of the linear grating displacement sensor 8 are x1(n) and x2(n), and their corresponding Fourier transforms are...

[0098] In the formula, x1(n) and x2(n) represent the signals output by the linear grating displacement sensor 8, n represents the number of sampling points of the signal, and X i [k] represents the Fourier transform coefficients corresponding to x1(n) and x2(n);

[0099] The phase angle corresponding to the maximum magnitude of the Fourier transform coefficients is the basis for phase determination.

[0100] m = max(X) i (k)), 0≤k≤N-1;

[0101]

[0102] In the formula, m represents the maximum value of the coefficient. This is the phase angle corresponding to the maximum value of the Fourier transform coefficients.

[0103] Specifically, the attitude adjuster 3 of the linear grating displacement sensor 8 is adjusted to the optimal state, i.e., the target attitude, and the adjustment driver of the calibration mechanism is moved to the zero position of the grating ruler to obtain the absolute position of the linear grating displacement sensor 8. The calibration mechanism is then moved to the negative end point of its stroke by the adjustment driver again. At this time, the reading of the laser interferometer 21 is cleared to zero.

[0104] Specifically, the linear grating displacement sensor 8 moves at equal intervals toward the positive endpoint of the calibration mechanism, with the interferometer reading as the reference, and the readings of the laser interferometer 21 and the linear grating displacement sensor 8 are recorded simultaneously.

[0105] Specifically, the linear grating displacement sensor 8 is calibrated by setting the measured value of the laser interferometer 21 as the true value and calibrating the measured value of the linear grating displacement sensor 8. The calibration adopts the least squares algorithm, that is, the minimum sum of the squares of the deviations between the linear grating displacement sensor 8 and the laser interferometer 21 is used as the criterion. The calibration coefficient of the linear grating displacement sensor 8 is obtained and written into the controller of the linear grating displacement sensor 8 for subsequent use.

[0106] As can be seen, this application uses the attitude adjuster 3 to adjust the static structure of the linear grating displacement sensor 8, thereby determining the optimal usage attitude of the linear grating displacement sensor 8, and finally calibrating it in this attitude to obtain accurate calibration results.

[0107] Accordingly, this application also discloses a precision calibration system for a linear grating displacement sensor 8, see [link to relevant documentation]. Figure 4 As shown, the system includes:

[0108] The attitude adjustment module 11 is used to adjust the attitude of the attitude adjuster 3 so that the signal receiver receives the grating signal output by the static structural displacement of the linear grating displacement sensor 8 on the attitude adjuster 3.

[0109] The attitude recording module 12 is used to adjust the attitude of the attitude adjuster 3 and record the target attitude of the attitude adjuster 3 when the grating signal of the linear grating displacement sensor 8 is at its maximum value.

[0110] The calibration module 13 is used to adjust the attitude of the attitude adjuster 3 to the target attitude, drive the calibration motion structure 9, and use the grating signals of the laser interferometer 21 and the linear grating displacement sensor 8 to calibrate the linear grating displacement sensor 8.

[0111] Among them, the laser interferometer 21 is pre-calibrated with the dynamic structure of the linear grating displacement sensor 8 installed on the calibration motion structure 9 as the target.

[0112] As can be seen, this application uses the attitude adjuster 3 to adjust the static structure of the linear grating displacement sensor 8, thereby determining the optimal usage attitude of the linear grating displacement sensor 8, and finally calibrating it in this attitude to obtain accurate calibration results.

[0113] Furthermore, this application also discloses a precision calibration control device for a linear grating displacement sensor 8, comprising:

[0114] Memory, used to store computer programs;

[0115] A processor is used to execute computer programs to implement the accuracy calibration method for linear grating displacement sensors as described above.

[0116] In addition, this application also discloses a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the aforementioned accuracy calibration method for a linear grating displacement sensor.

[0117] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0118] Those skilled in the art will further recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the components and steps of the various examples have been generally described in terms of functionality in the foregoing description. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0119] The technical content provided in this application has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A linear grating displacement sensor accuracy calibration device, characterized in that, include: Attitude adjuster (3), laser interferometer (21), calibration motion structure (9) and base (10); The calibration motion structure (9) is installed on the base (10). The upper surface of the calibration motion structure (9) is used to install the dynamic structure of the linear grating displacement sensor (8) to be calibrated. The attitude adjuster (3) is fixed to the base (10) by a corresponding bracket and installed above the calibration motion structure (9). The lower surface of the attitude adjuster (3) is used to install the static structure of the linear grating displacement sensor (8). The laser interferometer (21) is installed on one side of the static structure and aligned with the static structure. The calibration motion structure (9) is used to drive the dynamic structural displacement of the linear grating displacement sensor (8); The attitude adjuster (3) is used to adjust the attitude of the static structure of the linear grating displacement sensor (8); The laser interferometer (21) is used to detect the displacement of the dynamic structure of the linear grating displacement sensor (8); The attitude adjuster (3) includes a mounting base (31), an attitude adjustment driver (1), and a capacitive sensor (2). The attitude adjustment driver (1) and the capacitive sensor (2) are mounted on the upper surface of the mounting base (31), and the static structure of the linear grating displacement sensor (8) is mounted on the lower surface of the mounting base (31). The attitude adjustment driver (1) is used to adjust the attitude of the mounting base (31) in space; The capacitive sensor (2) is used to output the attitude signal of the mounting base (31) to the signal receiver; The attitude adjuster (3) includes a front-back adjustment driver, a left-right adjustment driver, a height adjustment driver, a front-back detection capacitive sensor, a left-right detection capacitive sensor and a height detection capacitive sensor. The front and rear adjustment driver is used to adjust the front and rear posture of the mounting base (31); The left and right adjustment driver is used to adjust the left and right posture of the mounting base (31); The height adjustment driver is used to adjust the height and orientation of the mounting base (31); The front and rear detection capacitive sensors are used to detect the front and rear attitude signals of the mounting base (31); The left and right detection capacitive sensors are used to detect the left and right attitude signals of the mounting base (31); The height detection capacitive sensor is used to detect the height attitude signal of the mounting base (31).

2. The linear grating displacement sensor accuracy calibration device according to claim 1, characterized in that, The calibration motion structure (9) includes a motion base (91) and a motion adjustment driver (4). The motion base (91) is mounted on the base (10). The motion base (91) carries a motion structure. The upper surface of the motion structure is used to mount the dynamic structure. The motion adjustment driver (4) is mounted on one side of the motion structure. The motion adjustment driver (4) is used to drive the motion structure to move the dynamic structure.

3. The linear grating displacement sensor accuracy calibration device according to claim 2, characterized in that, The laser interferometer (21) includes: a laser interferometer mirror (5), a laser interferometer interferometer mirror (6), and a laser interferometer laser (7). The laser interferometer reflector (5) is installed on one side of the moving base (91), and the laser interferometer interferometer mirror (6) and the laser interferometer laser (7) are installed on the same side of the base (10) corresponding to the laser interferometer reflector (5).

4. The linear grating displacement sensor accuracy calibration device according to any one of claims 1 to 3, characterized in that, It also includes signal receivers that are connected to the attitude adjustment machine (3) and the linear grating displacement sensor (8) respectively; The signal receiver is used to receive the attitude signal transmitted by the attitude adjuster (3) and the grating signal transmitted by the linear grating displacement sensor (8).

5. A method for calibrating the accuracy of a linear grating displacement sensor, characterized in that, Applied in the linear grating displacement sensor accuracy calibration device as described in any one of claims 1 to 4, comprising: Adjust the attitude of the attitude adjuster (3) so that the signal receiver receives the grating signal output by the static structural displacement of the linear grating displacement sensor (8) on the attitude adjuster (3); Adjust the attitude of the attitude adjuster (3) and record the target attitude of the attitude adjuster (3) when the grating signal of the linear grating displacement sensor (8) is at its maximum value; Adjust the attitude of the attitude adjuster (3) to the target attitude, drive the calibration motion structure (9), and use the grating signal of the laser interferometer (21) and the linear grating displacement sensor (8) to calibrate the linear grating displacement sensor (8); The laser interferometer (21) is pre-calibrated with the dynamic structure of the linear grating displacement sensor (8) mounted on the calibration motion structure (9) as the target.

6. A precision calibration system for a linear grating displacement sensor, characterized in that, The linear grating displacement sensor accuracy calibration device according to any one of claims 1 to 4 includes: The attitude adjustment module is used to adjust the attitude of the attitude adjuster (3) so that the signal receiver receives the grating signal output by the static structural displacement of the linear grating displacement sensor (8) on the attitude adjuster (3). The attitude recording module is used to adjust the attitude of the attitude adjuster (3) and record the target attitude of the attitude adjuster (3) when the grating signal of the linear grating displacement sensor (8) is at its maximum value. The calibration module is used to adjust the attitude of the attitude adjuster (3) to the target attitude, drive the calibration motion structure (9), and use the grating signals of the laser interferometer (21) and the linear grating displacement sensor (8) to calibrate the linear grating displacement sensor (8); The laser interferometer (21) is pre-calibrated with the dynamic structure of the linear grating displacement sensor (8) mounted on the calibration motion structure (9) as the target.

7. A precision calibration control device for a linear grating displacement sensor, characterized in that, include: Memory, used to store computer programs; A processor for executing the computer program to implement the accuracy calibration method for the linear grating displacement sensor as described in claim 5.

8. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, implements the accuracy calibration method for the linear grating displacement sensor as described in claim 5.

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