Electroplating and immersion plating integrated coating device

Abstract

The application relates to the technical field of vacuum coating, in particular to a permeation and plating integrated coating device. The permeation and plating integrated coating device comprises a permeation and plating module, the permeation and plating module comprises a coating chamber, a coating arc source, an anode component, a first arc striking mechanism and an ion gun; the coating arc source, the first arc striking mechanism and the ion gun are connected with the coating chamber, the inside of the coating chamber is provided with a containing station for placing a workpiece, the anode component is arranged on the side of the containing station which is away from the ion gun, a working space is used for inputting nitrogen gas for nitriding or coating reaction gas, the first arc striking mechanism is arranged corresponding to the ion gun, so that the ion gun emits a hot electron beam towards the anode component. The permeation and plating integrated coating device can perform nitriding and coating treatment on the workpiece, so that nitrogen ions penetrate into the inside of the workpiece, so as to increase the hardness of the workpiece, and the film layer performance and the overall hardness performance of the treated workpiece are greatly improved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of vacuum coating, in particular to a permeation and plating integrated coating device. BACKGROUND

[0002] Vacuum ion coating refers to a process in which a film material is evaporated or sputtered by using an evaporation source or a sputtering target in a vacuum atmosphere, and a part of the particles evaporated or sputtered are ionized into metal ions in a gas discharge space, and the particles are deposited on a substrate under the action of an electric field to form a thin film.

[0003] However, the current vacuum ion coating machine generally has a single function, usually only has a coating function, which leads to that the internal workpiece hardness of some workpieces is insufficient after coating, and further leads to that the overall performance of the workpiece after coating is not ideal. SUMMARY

[0004] The application aims to provide a permeation and plating integrated coating device to solve the technical problem that the internal workpiece hardness of the film layer after coating is insufficient, which leads to that the overall performance of the workpiece is not ideal.

[0005] The application provides a permeation and plating integrated coating device, which comprises:

[0006] A permeation and plating module, which comprises a coating chamber, a coating arc source, an anode member, a first arc striking mechanism and an ion gun;

[0007] The coating arc source, the first arc striking mechanism and the ion gun are connected with the coating chamber, an internal space of the coating chamber forms a working space, the working space comprises a containing station for placing a workpiece, the anode member is arranged on a side of the containing station which is away from the ion gun, the working space is used for introducing nitrogen gas for nitriding or coating reaction gas, and the first arc striking mechanism is arranged corresponding to the ion gun so that the ion gun emits a hot electron beam towards the anode member.

[0008] In the above technical solution, further, the permeation and plating integrated coating device further comprises:

[0009] A vacuum pumping module, which is connected with the coating chamber to perform vacuum pumping treatment on the coating chamber;

[0010] A water cooling module, which can supply cooling fluid to the vacuum pumping module and the permeation and plating module;

[0011] A power supply module, which can supply power to the permeation and plating module, the vacuum pumping module and the water cooling module;

[0012] An electronic control module is electrically connected to the power supply module, the water cooling module, the vacuum pumping module, and the plating module. The electronic control module is capable of coordinating the control of the power supply module, the water cooling module, the vacuum pumping module, and the plating module.

[0013] In any of the above technical solutions, the ion gun further includes a main body, a first electrode, a second electrode, and a tungsten filament;

[0014] The main body is connected to the coating chamber, and a generating cavity is opened inside the main body. The main body has a jet port facing the receiving station and communicating with the generating cavity.

[0015] Both the first electrode and the second electrode are disposed on the main body. One end of the first electrode and one end of the second electrode are respectively used to be electrically connected to the positive and negative terminals of the power supply. The other ends of the first electrode and the second electrode extend into the generating cavity. The tungsten wire is disposed in the generating cavity and electrically connected between the first electrode and the second electrode.

[0016] In any of the above technical solutions, the main body further includes a fixed main body and a movable main body. The fixed main body has a generating groove. The first electrode and the second electrode are disposed on the movable main body. The movable main body is detachably connected to the fixed main body so that the generating groove can be covered by the movable main body to form the generating cavity.

[0017] In any of the above technical solutions, the main body further includes fastening connection members and hinge members;

[0018] The hinge member is connected between one end of the fixed main body and one end of the movable main body;

[0019] The fastening connection member is detachably connected between the fixed main body and the movable main body;

[0020] And / or, a first cooling channel is provided inside the side wall of the fixed main body;

[0021] A second cooling channel is provided inside the side wall of the active main body.

[0022] In any of the above technical solutions, the diffusion coating module further includes an etching arc source, which is connected to the coating chamber, and the etching arc source and the anode component are correspondingly disposed on the same side of the accommodating station;

[0023] The coating chamber includes a top plate, a bottom plate, and a side cylinder. The side cylinder includes eight side plates connected in an octagonal shape. The top plate and bottom plate respectively cover the top opening and bottom opening of the side cylinder.

[0024] In any of the above technical solutions, the number of ion guns is multiple, the number of first arc-starting mechanisms is multiple, and the multiple first arc-starting mechanisms are arranged in a one-to-one correspondence with the multiple ion guns;

[0025] Multiple ion guns form the ion gun group, and the number of ion gun groups is at least one. Multiple ion guns in each ion gun group are disposed on the same side plate and arranged sequentially at intervals along the height direction of the coating chamber.

[0026] The number of etching arc sources is multiple, and the multiple etching arc sources form an etching arc source group. The number of etching arc source groups is at least one. The multiple etching arc sources in each etching arc source group are disposed on the same side plate and arranged sequentially at intervals along the height direction of the coating chamber.

[0027] The number of coating arc sources is multiple, and the multiple coating arc sources form a coating arc source group. The number of coating arc source groups is at least one. Multiple coating arc sources in each coating arc source group are disposed on the same side plate and arranged sequentially at intervals along the height direction of the coating chamber.

[0028] In any of the above technical solutions, the eight side panels further include a first side panel, a second side panel, a third side panel, a fourth side panel, a fifth side panel, a sixth side panel, a seventh side panel, and an eighth side panel that are sequentially arranged.

[0029] The number of etching arc source groups is one, the number of ion gun groups is one, the etching arc source group and the ion gun group are respectively disposed on the first side plate and the fifth side plate facing each other, the third side plate is provided with a vacuum extraction port, and the seventh side plate is provided with a heating component.

[0030] The number of coating arc source groups is four, and the four coating arc source groups are respectively disposed on the second side plate, the fourth side plate, the sixth side plate and the eighth side plate.

[0031] In any of the above technical solutions, the diffusion coating module further includes a plurality of second arc-starting mechanisms, which are respectively disposed on the side of the etching arc source and the side of the coating arc source.

[0032] In any of the above technical solutions, the second arc-initiating mechanism further includes a fixed base assembly, an arc-initiating pin, and a drive assembly;

[0033] One end of the fixed base assembly is connected to the coating chamber, and the arc-starting needle is movably connected to the other end of the fixed base assembly and located within the working space;

[0034] The drive assembly is connected between the fixed base assembly and the arc-starting pin, and is capable of driving the arc-starting pin to move relative to the fixed base assembly, so that the arc-starting pin moves closer to or further away from the etching arc source or the coating arc source.

[0035] In any of the above technical solutions, the two ends of the arc-initiating needle along its length are a first end and a second end, respectively, and the first end of the arc-initiating needle is rotatably connected to the fixed base assembly.

[0036] The drive assembly includes a linear drive component, an arc-starting electric rod, and a transmission assembly.

[0037] The fixed base assembly has a first through hole, and one end of the arc-starting electric rod is movably inserted into the first through hole and connected to the linear drive component within the first through hole;

[0038] The transmission assembly is connected between the arc-initiating rod and the first end of the arc-initiating needle, and can convert the linear motion of the arc-initiating rod into the rotation of the arc-initiating needle, so that the second end of the arc-initiating needle moves closer to or further away from the etching target.

[0039] In any of the above technical solutions, the transmission assembly further includes a rack, a gear, and a connecting shaft;

[0040] One end of the rack is connected to the arc-starting electric rod, and the rack meshes with the gear;

[0041] One axial end of the connecting shaft is pivotally connected to the fixed base assembly, and the other axial end of the connecting shaft is connected to the gear.

[0042] The second end of the arc-initiating needle is connected to the connecting shaft so that the arc-initiating needle rotates with the connecting shaft under the drive of the gear.

[0043] In any of the above technical solutions, the arc-initiating needle further includes a body segment and a bending segment. One end of the body segment is connected to the fixing base assembly, and the other end of the body segment is connected to the bending segment. The bending segment bends relative to the body segment toward the arc target of the etching arc source or the arc target of the coating arc source.

[0044] In any of the above technical solutions, the coating arc source and the etching arc source further include an arc target, a magnetic field generating mechanism, and an insulating connection assembly;

[0045] The insulating connection assembly is connected to the coating chamber, and the arc target is connected to the portion of the insulating connection assembly located within the working space;

[0046] The magnetic field generating mechanism is detachably connected to the portion of the insulating connection assembly located outside the coating chamber. The magnetic field generating mechanism includes multiple magnetic field generating components, each of which generates magnetic fields with different distribution patterns, so that the magnetic field generating mechanism can generate a composite magnetic field acting on the arc target.

[0047] In any of the above technical solutions, the magnetic field generating mechanism of the coating arc source further includes a first magnetic field generating component, a second magnetic field generating component, and a third magnetic field generating component;

[0048] The magnetic field generating mechanism of the etching arc source includes the second magnetic field generating component and the third magnetic field generating component.

[0049] In any of the above technical solutions, the first magnetic field generating component is further arranged in a ring shape coaxial with the arc target. The first magnetic field generating component includes a plurality of first magnets, which are arranged in a ring. One end of the first magnet along the radial direction of the ring is the N pole and the other end is the S pole.

[0050] In any of the above technical solutions, the second magnetic field generating component is further arranged in a ring coaxially with the arc target. The second magnetic field generating component includes a plurality of second magnets, which are arranged in a ring. One end of the second magnet along the axial direction of the ring is the N pole and the other end is the S pole.

[0051] In any of the above technical solutions, the third magnetic field generating component further includes a coil frame movably connected relative to the insulating connection component and an electromagnetic coil sleeved on the coil frame;

[0052] The second magnetic field generating component is disposed on the coil frame and spaced out on the outside of the electromagnetic coil, so that the electromagnetic coil and the second magnetic field generating component can move with the coil frame relative to the first magnetic field generating component.

[0053] In any of the above technical solutions, the coating arc source and the etching arc source further include a first adjustment driving component and a second adjustment driving component;

[0054] The first adjustment drive component is connected to the first magnetic field generating component and can drive the first magnetic field generating component to reciprocate along the axial direction of the ring.

[0055] The second adjustment drive component is connected to the coil frame and can drive the second magnetic field generating component and the third magnetic field generating component to reciprocate along the axial direction of the ring.

[0056] In any of the above technical solutions, the first adjustment drive assembly further includes a drive cylinder, the cylinder body of the drive cylinder is fixedly disposed relative to the insulating connection assembly, and the cylinder rod of the drive cylinder is connected to the first magnetic field generating assembly, so that the drive cylinder can drive the first magnetic field generating assembly to move to a first position or a second position.

[0057] The second adjustment drive assembly includes a motor and a transmission screw. The motor is fixedly disposed relative to the insulating connection assembly. One end of the transmission screw is connected to the output shaft of the motor, and the other end of the transmission screw is screwed to the coil frame, so that the motor can drive the second magnetic field generating assembly and the third magnetic field generating assembly to move to any position between the third position and the fourth position through the transmission screw.

[0058] Compared with the prior art, the beneficial effects of this application are as follows:

[0059] The integrated nitriding and coating apparatus provided in this application includes a nitriding module. The nitriding module performs coating treatment on the surface of the workpiece through a coating arc source, and performs nitriding treatment on the interior of the workpiece through an anode component, a first arc ignition mechanism, and an ion gun. Specifically, the first arc ignition mechanism causes the ion gun to emit a thermionic beam towards the anode component, and causes the thermionic beam to sweep across the workpiece. The thermionic beam ionizes the nitrogen gas in the nitriding reaction chamber into nitrogen ions, which then penetrate into the interior of the workpiece to enhance the hardness of the workpiece. Thus, the integrated nitriding and coating apparatus can perform nitriding and coating treatment on the workpiece, and the internal properties, film properties, and overall properties of the treated workpiece are all significantly improved. Attached Figure Description

[0060] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0061] Figure 1 A first structural schematic diagram of the integrated diffusion coating apparatus provided in an embodiment of this application;

[0062] Figure 2 This is a second structural schematic diagram of the integrated diffusion coating apparatus provided in the embodiments of this application;

[0063] Figure 3 for Figure 2 A magnified view of a portion at point A;

[0064] Figure 4 This is a schematic diagram of the ion gun structure of the integrated diffusion coating apparatus provided in the embodiments of this application;

[0065] Figure 5 A first structural schematic diagram of the main body segment of the side cylinder of the coating chamber provided in an embodiment of this application;

[0066] Figure 6 A second structural schematic diagram of the main body segment of the side cylinder of the coating chamber provided in an embodiment of this application;

[0067] Figure 7 A third structural schematic diagram of the main body section of the side cylinder of the coating chamber provided in an embodiment of this application;

[0068] Figure 8 A first structural schematic diagram of the door segment of the coating chamber provided in an embodiment of this application;

[0069] Figure 9 A second structural schematic diagram of the door segment of the coating chamber provided in an embodiment of this application;

[0070] Figure 10 This is a schematic diagram of the first structure of the second arc-starting mechanism provided in an embodiment of this application;

[0071] Figure 11 This is a schematic diagram of the second structure of the second arc-starting mechanism provided in the embodiments of this application;

[0072] Figure 12 A schematic diagram of the third structure of the second arc-starting mechanism provided in the embodiments of this application;

[0073] Figure 13 This is a schematic diagram of the structure of the coating arc target provided in the embodiments of this application.

[0074] Figure label:

[0075] 1-Diffusion plating module; 100-Side cylinder; 1001-First side plate; 1002-Second side plate; 1003-Third side plate; 1004-Fourth side plate; 1005-Fifth side plate; 1006-Sixth side plate; 1007-Seventh side plate; 101-Top plate; 102-Exhaust port; 11-Ion gun; 110-Main body; 1100-Generation chamber; 1101-Fixed main body; 1102-Modible main body; 1103-Fastening connection component; 1104-Hinge component; 1105-First cooling channel; 1106-Second cooling channel; 111-First electrode; 112-Second electrode; 113-Tungsten wire; 12-Etching arc source; 13-Coating arc source; 130-Insulating connection assembly; 1301-Connecting flange; 1302-Shell; 131 132-First magnetic field generating component; 133-Second magnetic field generating component; 134-Third magnetic field generating component; 135-First adjustment drive component; 136-Cylinder rod of drive cylinder; 137-Cylinder body of drive cylinder; 138-Second adjustment drive component; 139-Motor; 130-Transmission screw; 131-Shielding cover; 132-Arc target; 133-Third electrode; 14-First arc ignition mechanism; 15-Second arc ignition mechanism; 150-Arc ignition needle; 1500-Body section; 1501-Bending section; 151-Fixed base assembly; 1520-First through hole; 1521-Arc ignition rod; 1522-Rack; 1523-Gear; 1524-Connecting shaft; 16-Anode component; 2-Vacuum pumping module; 3-Water cooling module; 4-Electrical control module; 5-Power supply module. Detailed Implementation

[0076] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0077] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0078] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0079] See Figures 1 to 13 As shown, an embodiment of this application provides an integrated diffusion coating device including a diffusion coating module 1, a water cooling module 3, an electrical control module 4, a vacuum module 2, a power supply module 5, and a workpiece rotating frame.

[0080] The diffusion coating module 1 is used to perform at least nitriding and coating treatments on the workpiece. Furthermore, in order to improve the adhesion of the coating layer, it is also used to perform etching treatment on the workpiece. Further, the diffusion coating module 1 includes a coating chamber, a workpiece rotating frame, an etching arc source 12, a coating arc source 13, an anode component 16, a first arc ignition mechanism, a second arc ignition component, and an ion gun 11.

[0081] The coating arc source 13, etching arc source 12, first arc ignition mechanism, and ion gun 11 are all connected to the coating chamber. The interior of the coating chamber is hollow to form a working space. The working space is used to introduce reaction gas, which can be etching reaction gas, nitriding reaction gas, or coating reaction gas. Specifically, the working space is first evacuated by the vacuum module 2 to form a clean vacuum environment inside the coating chamber. Then, the working space is filled with reaction gas by the gas filling mechanism. The type of reaction gas can be selected according to the coating process and working progress. For example, argon, nitrogen, or acetylene can be introduced into the working space as coating reaction gas, or nitrogen can be introduced into the working space as etching reaction gas or nitriding reaction gas.

[0082] The working space includes a accommodating station for placing workpieces. The anode component 16 is disposed on the side of the accommodating station opposite to the ion gun 11. The etching arc source 12 and the anode component 16 are correspondingly disposed on the same side of the accommodating station. The working space is used to introduce nitrogen gas for nitriding, etching reaction gas or coating reaction gas. The first arc ignition mechanism is disposed corresponding to the ion gun 11 so that the ion gun 11 emits a thermionic beam toward the anode component 16.

[0083] The anode component 16 includes an anode electrode and an anode holder for supporting the anode electrode.

[0084] An etching arc source 12 is used to etch the workpiece to clean impurities and roughen the surface before coating, which helps to improve the adhesion between the coated film and the workpiece surface. The working principle of the etching arc source 12 is as follows: the etching arc source 12, the baffle, and the anode component 16 are used together. The anode component 16 and the etching arc source 12 are respectively connected to the anode and cathode of the same power supply. After the etching arc source 12 is ignited by the second arc ignition mechanism 15, ions and electrons are emitted simultaneously. The baffle is placed outside the etching arc source 12 and between the anode component 16 and the etching arc source 12. The baffle blocks ions but not electrons, allowing electrons to pass through the baffle and be emitted towards the anode component 16. As the electrons are emitted towards the anode component 16, they sputter and bombard the surface of the workpiece, thereby achieving the purpose of etching the workpiece surface.

[0085] Optionally, the target material of the arc target of the etching arc source 12 can be, for example, a single-element target material such as titanium or chromium.

[0086] Ion gun 11 is used to nitrid the workpiece to enhance its internal hardness before coating, which is beneficial to improving the overall hardness and performance of the workpiece with the coating layer after coating. The working principle of ion gun 11 is as follows: ion gun 11, first arc ignition mechanism 14 and anode component 16 are used in conjunction. The first arc ignition mechanism 14 is connected to a high-voltage power supply to perform high-voltage arc ignition. Under the high-voltage arc ignition action of the first arc ignition mechanism 14, ion gun 11 can emit a thermionic beam towards anode component 16. The thermionic beam can sweep across the workpiece at the accommodating station and ionize the nitrogen gas in the nitriding reaction space into nitrogen ions. The nitrogen ions penetrate into the interior of the workpiece, thereby improving the hardness of the workpiece through nitriding. Among them, etching arc source 12 and ion gun 11 share anode component 16.

[0087] The coating arc source 13 is used to coat the workpiece. The basic working principle of the coating arc source 13 is based on the cold cathode vacuum arc discharge theory. The coating chamber and the coating arc source 13 are connected to the anode and cathode of the same power supply, respectively. After the vacuum arc of the coating arc source 13 is ignited, some discontinuous, bright spots of various sizes and shapes will appear on the surface of the arc target 137 of the coating arc source 13. These arc spots move irregularly and rapidly on the surface of the arc target 137 of the coating arc source 13. When some arc spots are extinguished, some arc spots are formed in other places, so that the arc target 137 can maintain the arc combustion. Thus, the arc target 137 of the coating arc source 13 emits target material vapor into the coating space at the arc spot. For every 10 electrons emitted, one metal atom is emitted. These atoms are then ionized into high-energy positive ions. When the positive ions run in the coating chamber, they combine with other ions (coating reaction gas ions) and are deposited on the surface of the workpiece to form a coating.

[0088] Optionally, the material of the arc target 137 of the coating arc source 13 can be, for example, a single-element target such as titanium or chromium, a binary target, a ternary target, or a more multi-element target.

[0089] Specifically, the integrated diffusion coating device first etches the workpiece surface using an etching arc source 12 in conjunction with a baffle and an anode component 16, then nitrides the workpiece using an ion gun 11 in conjunction with a first arc ignition mechanism 14 and an anode component 16, and finally deposits a base film and a functional film using a coating arc source 13, so that the integrated diffusion coating device is suitable for coating hobs, bar end mills, micro drills, cutting bits, and saw blades.

[0090] In this embodiment, the workpiece rotating frame is located inside the coating chamber. Specifically, the workpiece rotating frame is placed in the receiving station, and the workpiece is placed on the workpiece rotating frame. The workpiece is then suspended and rotated by the workpiece rotating frame, thereby ensuring the uniformity of nitriding, etching, and coating of the workpiece.

[0091] In this embodiment, the biasing mechanism is used to introduce bias voltage to the workpiece to be coated, so that more electrons move toward the workpiece. Specifically, the biasing mechanism includes an insulating protection, an introducing electrode, and a connecting plate. The insulating protection penetrates the base plate, and the introducing electrode is disposed inside the insulating protection. One end of the introducing electrode is connected to the bottom side of the base plate with negative pressure, and the other end of the introducing electrode is connected to the hanger on the workpiece rotating frame through the connecting plate. Thus, the negative pressure is introduced into the workpiece through the hanger on the workpiece rotating frame. The negatively charged workpiece can adsorb the electrons emitted by the etching arc source 12 and the ion gun 11, thereby greatly improving the probability and efficiency of electron bombardment of the workpiece.

[0092] In this embodiment, the ion gun 11 includes a main body 110, a first electrode 111, a second electrode 112, and a tungsten wire 113.

[0093] The main body 110 is connected to the coating chamber. The main body 110 has a generating cavity 1100 inside. The main body 110 has a jet port facing the receiving position and communicating with the generating cavity 1100. It can be understood that the diameter of the jet port is smaller than the inner diameter of the generating cavity 1100 to ensure that the jet port can guide the thermionic electrons to be emitted in a beam.

[0094] The first electrode 111 and the second electrode 112 are both disposed on the main body 110. One end of the first electrode 111 and one end of the second electrode 112 are respectively used to be electrically connected to the positive and negative terminals of the power supply. The other end of the first electrode 111 and the other end of the second electrode 112 extend into the generating chamber 1100. The tungsten wire 113 is disposed in the generating chamber 1100 and electrically connected between the first electrode 111 and the second electrode 112.

[0095] The tungsten wire 113 is heated by passing electricity through the first electrode 111 and the second electrode 112, so that the tungsten wire 113 generates thermionic electrons in the generating chamber 1100. The thermionic electrons accumulate in the generating chamber 1100 and fill the generating chamber. The first arc-starting mechanism 14, which is connected to the high voltage, ignites the thermionic electrons in the generating chamber 1100, so that the thermionic electrons are emitted into the working space in the form of a thermionic electron beam through the jet port.

[0096] Optionally, the first electrode 111 and the second electrode 112 are arranged in a group. The ion gun 11 may include two groups of first electrodes 111 and second electrodes 112, one group for use and the other group for standby. In this embodiment, since the tungsten wire 113 of the ion gun 11 is a consumable and needs to be replaced frequently, the main body 110 is designed as a detachable structure to facilitate the replacement of the tungsten wire 113. Specifically, the main body 110 includes a fixed main body part 1101 and a movable main body part 1102. The fixed main body part 1101 is used to connect with the coating chamber and has a generation groove. The first electrode 111 and the second electrode 112 are disposed on the movable main body part 1102, so that the tungsten wire 113 is connected to the movable main body part 1102 through the first electrode 111 and the second electrode 112 to form an integral structure.

[0097] The active main body 1102 and the fixed main body 1101 are detachably connected. On the one hand, when the active main body 1102 and the fixed main body 1101 are connected, the tungsten wire 113 extends into the generating tank. The generating tank can be covered by the active main body 1102 to form a generating cavity 1100, and the tungsten wire 113 is located in the generating cavity 1100 to accumulate thermoelectric electrons and then emit them in a beam. On the other hand, the fixed main body 1101 is connected to the coating chamber, so that the tungsten wire 113 can be removed from the generating tank by simply disassembling the active main body 1102 relative to the fixed main body 1101, which facilitates the replacement of the tungsten wire 113. After the tungsten wire 113 is replaced, the active main body 1102 and the fixed main body 1101 can be reassembled to restore its use.

[0098] In this embodiment, in order to facilitate the disassembly of the main body 110 of the ion gun 11, the main body 110 also includes a fastening connection member 1103 and a hinge member 1104.

[0099] A hinge member 1104 is connected between one end of the fixed main body 1101 and one end of the movable main body 1102, thereby hinged the fixed main body 1101 and the movable main body 1102. A fastening connection member 1103 is detachably connected between the fixed main body 1101 and the movable main body 1102, so as to lock or unlock the fixed main body 1101 and the movable main body 1102 by means of the fastening connection member 1103. Specifically, the fastening connection member 1103 can be a connecting bolt.

[0100] It is understandable that the fastening connection member 1103 can fasten the fixed main body 1101 and the movable main body 1102 at multiple points, and the use of the hinge member 1104 can improve the efficiency of disassembly and assembly of the two, eliminating the assembly step of matching the movable main body 1102 with the fixed main body 1101.

[0101] In this embodiment, to prevent the fixed main body 1101 and the movable main body 1102 from overheating, a first cooling channel 1105 is provided inside the side wall of the fixed main body 1101, and a second cooling channel 1106 is provided inside the side wall of the movable main body 1102. The cooling system can supply cooling fluid to the first cooling channel 1105 and the second cooling channel 1106, thereby liquid cooling the fixed main body 1101 through the cooling fluid in the first cooling channel 1105 and liquid cooling the movable main body 1102 through the cooling fluid in the second cooling channel 1106.

[0102] Regarding the structure of the coating chamber, in an optional embodiment, the coating chamber includes a top plate 101, a bottom plate, and a side cylinder 100. To control the temperature of the coating chamber itself and its internal coating space, a third cooling channel is formed on the outer wall of the coating chamber. The cooling system can supply cooling fluid into the third cooling channel. The third cooling channel has a narrower and taller shape, which can reduce the stagnation and deposition of cooling fluid in the third cooling channel, achieving rapid inflow and outflow and improving the cooling effect. Optionally, the third cooling channel is formed on the side cylinder 100, the top plate 101, and the bottom plate of the coating chamber.

[0103] Specifically, the side cylinder 100 of the coating chamber can be configured as a polygonal structure. As a commonly used structure, the side cylinder 100 includes eight side plates connected in an octagonal shape. The top plate 101 and the bottom plate respectively cover the top opening and bottom opening of the side cylinder 100, thereby setting the cross-sectional area of ​​the side cylinder 100 to an octagonal shape, which facilitates the installation of coating arc source 13, ion gun 11 and etching arc source 12, etc. on the side cylinder 100.

[0104] Optionally, the anode component 16 is connected to the top plate 101 via an anode seat, and the anode electrode extends from top to bottom along the height direction of the coating chamber.

[0105] Based on the above description of the coating chamber structure, the installation structure of the coating arc source 13, ion gun 11, and etching arc source 12 relative to the coating chamber is further described. In the optional scheme of this embodiment, there are multiple coating arc sources 13, multiple ion guns 11, and multiple etching arc sources 12. Multiple coating arc sources 13 work together to perform coating operations, multiple ion guns 11 work together to perform nitriding operations, and multiple etching arc sources 12 work together to perform etching operations, so as to improve the coating effect, hardness enhancement effect, and etching effect.

[0106] Each coating arc source 13 and each etching arc source 12 is provided with a corresponding reaction gas supply pipe. The gas inlet of the reaction gas supply pipe is connected to the gas filling mechanism through the gas supply distribution pipeline, so as to deliver sufficient reaction gas to the vicinity of the coating arc source 13 and the etching arc source 12 through the reaction gas supply pipe, thereby improving the coating effect and etching effect.

[0107] In this embodiment, multiple etching arc sources 12 form an etching arc source group, such as two, three or four, etc. The number of etching arc source groups is at least one group. All etching arc sources 12 in each etching arc source group are disposed on the same side plate and arranged sequentially at intervals along the height direction of the coating chamber, thereby improving the etching uniformity of each etching arc source group along the height direction of the coating chamber.

[0108] In this embodiment, multiple coating arc sources 13 form a coating arc source group, such as two, three or four. The number of coating arc source groups is at least one group. All coating arc sources 13 in each coating arc source group are arranged on the same side plate and sequentially spaced along the height direction of the coating chamber, thereby improving the coating uniformity of each coating arc source group along the height direction of the coating chamber.

[0109] Understandably, multiple coating arc source groups can be used individually or in combination to meet different coating process requirements.

[0110] Specifically, further, depending on the reaction gas and the target material selected for each coating arc source group, the achievable films include, but are not limited to, 1-1.5 μm thick multilayer ZrN with a Vickers hardness (HV) of up to 2900-3200, 2-3 μm thick TiAlN with a Vickers hardness (HV) of up to 2900-3200, 2-2.5 μm thick TiAlN (high aluminum) with a Vickers hardness (HV) of up to 3100-3400, and 2-3 μm thick TiSi with a Vickers hardness (HV) of up to 3200-3700. N, 2-3 μm thick AlSi with Vickers hardness (HV) up to 3300-3700, 3-4 μm thick AlCr-silicon tungsten substrate with Vickers hardness (HV) up to 3200-3500, 4-5 μm thick AlCr-boron substrate with Vickers hardness (HV) up to 3300-3700, 4-5 μm thick AlCr with Vickers hardness (HV) up to 3100-3300, 2-3 μm thick TiN with Vickers hardness (HV) up to 2200-2400, etc.

[0111] For example, with a 3-4 μm thick AlCr-silicon tungsten substrate, tungsten silicide targets can be selected for part of the coating arc source group to complete the silicon tungsten substrate film deposition process, while AlCr targets can be selected for the rest of the coating arc source group to complete the functional film deposition process. Similarly, with a 4-5 μm thick AlCr-boron substrate, boron targets can be selected for part of the coating arc source group to complete the boron substrate film deposition process, while AlCr targets can be selected for the remaining coating arc source groups to complete the functional film deposition process. And for a 2-3 μm thick TiN substrate, Zr targets can be selected for all coating arc sources 13.

[0112] The aforementioned film layer can be a single layer or multiple layers. Accordingly, the integrated diffusion coating device can complete the deposition of the film layer in one step or in layers.

[0113] In this embodiment, there are multiple first arc-starting mechanisms 14, and each arc-starting mechanism is arranged in a one-to-one correspondence with a multiple ion gun 11, so that the multiple arc-starting mechanisms correspond one-to-one to perform high-voltage arc-starting on the multiple ion guns 11.

[0114] Multiple ion guns 11 form an ion gun group 11, and the number of ion gun groups 11 is at least one. Multiple ion guns 11 in each ion gun group 11 are arranged on the same side plate and are arranged sequentially at intervals along the height direction of the coating chamber, so that each ion gun group 11 can fully cover the workpiece on the rotating frame along the height direction of the coating chamber, thereby improving the uniformity of nitriding treatment along the height direction of the coating chamber.

[0115] Furthermore, by combining the rotation of the workpiece with the rotation of the rotating frame, the uniformity of nitriding treatment on the workpiece on the rotating frame can be improved along the circumference of the coating chamber.

[0116] Specifically, the side cylinder 100 includes eight side plates, which are sequentially connected: a first side plate 1001, a second side plate 1002, a third side plate 1003, a fourth side plate 1004, a fifth side plate 1005, a sixth side plate 1006, a seventh side plate 1007, and an eighth side plate. The first side plate 1001, the second side plate 1002, the third side plate 1003, the fourth side plate 1004, and the fifth side plate 1005 are connected as a single unit to form the main body 110 segment. The sixth side plate 1006, the seventh side plate 1007, and the eighth side plate are connected as a single unit to form a door segment. The door segment is closable and connectable to the main body 110 segment, facilitating the assembly and disassembly of the workpiece frame relative to the workspace after the door segment is opened. Optionally, the assembly and disassembly of the workpiece frame can be assisted by a liftable trolley. Specifically, the trolley includes a carriage body and forks mounted on the carriage body. The forks are used to lift the workpiece frame. The forks are liftable and can be mounted on the carriage body so that the workpiece frame can be raised and lowered relative to the base plate. Thus, when the forks are extended into the workspace, they can be extended under the workpiece frame placed on the base plate and lifted, or the forks supporting the workpiece frame can be extended into the base plate and the workpiece frame can be placed on the base plate.

[0117] To achieve precise docking between the trolley and the coating chamber, a guide groove can be installed below the coating chamber. Correspondingly, guide wheels can be installed on both sides of the trolley in the width direction. After the guide wheels dock with the guide groove, the trolley can be pushed to achieve precise docking between the trolley and the coating chamber, so that the workpiece rotating frame is precisely aligned with the receiving station.

[0118] As a specific example, the etching arc source group includes two etching arc sources 12, and the coating arc source group includes three coating arc sources 13. There is one set of etching arc source groups, one set of ion gun groups 11, and four sets of coating arc source groups. The etching arc source groups are located on the first side plate 1001, and the ion gun groups 11 are located on the fifth side plate 1005. The first side plate 1001 and the fifth side plate 1005 face each other to facilitate sharing the anode component 16. The third side plate 1003 is provided with a vacuum extraction port 102. The vacuum extraction module 2 is connected to the coating chamber through the vacuum extraction port 102 to perform vacuum treatment on the working space. The second side plate 1002, the fourth side plate 1004, the sixth side plate 1006, and the eighth side plate are each provided with a corresponding coating arc source group to perform coating through the coordinated action of the four coating arc source groups. The seventh side plate 1007 is provided with a heating component to regulate the working temperature within the working space.

[0119] In this embodiment, there are multiple second arc-ignition mechanisms 15 for igniting the coating arc source 13 and the etching arc source 12. The multiple second arc-ignition mechanisms 15 are arranged one-to-one on the side of the etching arc source 12 and the side of the coating arc source 13. That is, each side of the etching arc source 12 is provided with a second arc-ignition mechanism 15, and each side of the coating arc source 13 is provided with a second arc-ignition mechanism 15.

[0120] The second arc-starting mechanism 15 includes a fixed base assembly 151, an arc-starting needle 150, and a drive assembly. One end of the fixed base assembly 151 is connected to the coating chamber, and the arc-starting needle 150 is movably connected to the other end of the fixed base assembly 151 and located in the working space, thereby connecting the arc-starting needle 150 to the coating chamber through the fixed base assembly 151. The arc-starting needle 150 located in the working space is adjacent to the arc target of the corresponding ignited etching arc source 12 or the arc target 137 of the coating arc source 13.

[0121] The driving component is connected between the fixed base assembly 151 and the arc-igniting needle 150, and can drive the arc-igniting needle 150 to move relative to the fixed base assembly 151, so that the arc-igniting needle 150 approaches or moves away from the arc target of the etching arc source 12 or the arc target 137 of the coating arc source 13. Specifically, when it is necessary to ignite an arc on the arc target 137, the driving component drives the arc-igniting needle 150 to approach the arc target 137 and make contact with the arc target 137. After both the arc-igniting needle 150 and the arc target 137 are energized, an arc can be ignited on the arc target 137. After the arc is successfully ignited, unlike the first arc-igniting mechanism 14 which needs to continuously perform high-voltage arc ignition at the outlet of the ion gun 11, after the arcs of the etching arc source 12 and the coating arc source 13 are ignited, the arc-igniting needle 150 needs to be moved away from the arc target 137, so that the driving component drives the arc-igniting needle 150 away from the arc target 137.

[0122] In this embodiment, the driving component includes a linear driving component, an arc-starting electric rod 1521, and a transmission component. The linear driving component can be, for example, a linear motor or a driving cylinder, thereby realizing linear driving.

[0123] The fixed base assembly 151 has a first through hole 1510. One end of the arc-starting electric rod 1521 is movably inserted into the first through hole 1510 and connected to the linear drive member within the first through hole 1510. Thus, the arc-starting electric rod 1521 is accommodated and guided through the first through hole 1510, so that the linear drive member can drive the arc-starting electric rod 1521 to reciprocate linearly along the axial direction of the first through hole 1510.

[0124] One end of the arc-starting rod 1521 is used to connect to an external power source. The two ends of the arc-starting needle 150 along its length are the first end and the second end, respectively. The transmission assembly is connected between the arc-starting rod 1521 and the first end of the arc-starting needle 150, so that the current input from the external power source is transmitted to the arc-starting needle 150 through the arc-starting rod 1521 and the transmission assembly, making the arc-starting needle 150 energized. The transmission assembly is made of a conductor.

[0125] The transmission assembly can convert the linear motion of the arc-initiating rod 1521 into the rotation of the arc-initiating needle 150, so that the first end of the arc-initiating needle 150 is rotatably connected to the fixed base assembly 151, thereby enabling the arc-initiating needle 150 to move closer to or further away from the arc target 137 in a rotating manner.

[0126] As one embodiment of the transmission assembly, the transmission assembly includes a rack 1522, a gear 1523 and a connecting shaft 1524. One end of the rack 1522 is connected to the arc-starting electric rod 1521 so that the rack 1522 moves linearly synchronously with the arc-starting electric rod 1521. The rack 1522 meshes with the gear 1523 so that the gear 1523 rotates under the drive of the rack 1522.

[0127] One axial end of the connecting shaft 1524 is pivotally connected to the fixed base assembly 151, and the other axial end of the connecting shaft 1524 is connected to the gear 1523, so that the connecting shaft 1524 pivots synchronously with the gear 1523 relative to the fixed base assembly 151.

[0128] The second end of the arc-initiating needle 150 is connected to the connecting shaft 1524, so that the arc-initiating needle 150 rotates synchronously with the connecting shaft 1524, that is, the arc-initiating needle 150 pivots synchronously with the connecting shaft 1524 under the drive of the gear 1523.

[0129] This gear 1523 and rack 1522 transmission method not only facilitates precise control of the rotation amplitude of the arc-initiating needle 150, but also, compared with the traditional lead screw transmission structure, facilitates drive, avoids manual adjustment, and simplifies the adjustment operation of the arc-initiating needle 150. In addition, it realizes automatic adjustment of the arc-initiating needle 150 by rotation. Compared with the linear drive method of the lead screw, it can make the arc-initiating needle 150 avoid the working range of the arc target 137 when not in use, which is conducive to extending the service life of the arc-initiating needle 150.

[0130] In this embodiment, the arc-starting needle 150 includes a body segment 1500 and a bent segment 1501. One end of the body segment 1500 is connected to the fixing base assembly 151, and the other end of the body segment 1500 is connected to the bent segment 1501. The bent segment 1501 bends relative to the body segment 1500 toward the arc target 137. Specifically, the end of the body segment 1500 connected to the fixing base assembly 151 is the first end of the arc-starting needle 150, and the end of the bent segment 1501 opposite to the body segment 1500 is the second end of the arc-starting needle 150. By configuring the arc-starting needle 150 to include the body segment 1500 and the bent segment 1501 bent relative to the body segment 1500, the reciprocating travel of the arc-starting pole 1521 can be reduced.

[0131] Optionally, the bending segment 1501 includes at least one sub-bending segment, and when there are multiple sub-bending segments, the multiple sub-bending segments bend sequentially toward the side where the fixing seat assembly 151 is located.

[0132] Optionally, the second arc-initiating mechanism 15 further includes a cover, which covers the outside of the rack 1522 and the gear 1523, and the cover has a notch corresponding to the arc-initiating needle 150 for the arc-initiating needle 150 to rotate.

[0133] In this embodiment, both the coating arc source 13 and the etching arc source 12 include an insulating connection assembly 130, a magnetic field generating mechanism, and an arc target 137.

[0134] The insulating connection assembly 130 is connected to the coating chamber. Specifically, the coating chamber has an installation hole, and a target is provided in the installation hole. The insulating connection assembly 130 is connected to the coating chamber through the target.

[0135] Optionally, the insulating connection assembly 130 includes a connection flange 1301 for fastening to the target base, and a housing 1302 covering the arc target 137 and the magnetic field generating mechanism, the housing 1302 being connected to the connection flange.

[0136] One end of the insulating connection assembly 130 extends into the interior of the coating chamber, that is, into the working space. The arc target 137 is connected to the end of the insulating connection assembly 130 located in the working space to fix the arc target 137 in the working space. The insulating characteristics of the insulating connection assembly 130 can ensure that the charging characteristics of the arc target 137 do not interfere with the side plate of the coating chamber.

[0137] Furthermore, in order to connect the arc target 137 to the cathode of the power supply, both the coating arc source 13 and the etching arc source 12 also include a third electrode 138. One end of the third electrode 138 is electrically connected to the arc target 137, and the other end of the third electrode 138 is electrically connected to the cathode of the power supply, thereby connecting the arc target 137 and the cathode of the power supply through the third electrode 138.

[0138] Optionally, both the coating arc source 13 and the etching arc source 12 further include a shield 136 connected to the insulating connection assembly 130. The shield 136 is cylindrical and is arranged around the outside of the arc target 137 along the circumference of the arc target 137. In this way, the shield 136 constrains the movement path of the target metal evaporated and emitted from the arc target 137, so that the target metal moves toward the interior of the coating space rather than toward its edge, thereby improving the metal ionization rate.

[0139] In this embodiment, in order to magnetically control the trajectory of the electric arc on the arc target 137, the magnetic field generating mechanism is detachably connected to the part of the insulating connection assembly 130 located outside the coating chamber. The reason for setting the magnetic field generating mechanism and the insulating connection assembly 130 to be detachably connected is to facilitate the replacement, maintenance and adjustment of the magnetic field generating mechanism. Specifically, the two are detachably connected by fasteners.

[0140] The magnetic field generating mechanism includes multiple magnetic field generating components, each generating a magnetic field with a different distribution pattern, so that the magnetic field generating mechanism can generate a composite magnetic field acting on the arc target 137, thereby making the composite magnetic field more three-dimensional and the magnetic field distribution in three-dimensional space more flexible.

[0141] In this embodiment, the magnetic field generating mechanism of the coating arc source 13 includes a first magnetic field generating component 131, a second magnetic field generating component 132, and a third magnetic field generating component 133. That is, the composite magnetic field acting on the arc target 137 of the coating arc source 13 is composed of the magnetic field of the first magnetic field generating component 131, the magnetic field of the second magnetic field generating component 132, and the magnetic field of the third magnetic field generating component 133.

[0142] The first magnetic field generating component 131 is arranged in a ring shape coaxially with the arc target 137. The first magnetic field generating component 131 includes a plurality of first magnets arranged in a ring. One end of the first magnet along the radial direction of the ring is the N pole and the other end is the S pole, thereby generating magnetic field by the first magnetic field generating component 131.

[0143] Optionally, a plurality of first magnets are evenly arranged along the ring, for example, four first magnets.

[0144] The second magnetic field generating component 132 is arranged in a ring coaxially with the arc target 137. The second magnetic field generating component 132 includes a plurality of second magnets arranged in a ring. One end of the second magnet along the axial direction of the ring is the N pole and the other end is the S pole.

[0145] Optionally, multiple second magnets are evenly arranged along the ring, and the number of second magnets is greater than the number of first magnets, for example, 16 second magnets.

[0146] The third magnetic field generating component 133 includes a coil frame movably connected relative to the insulating connection component 130. The coil frame includes a frame body and an electromagnetic coil arranged around the frame body. When energized, the electromagnetic coil generates a magnetic field according to the right-hand rule.

[0147] It is evident that the magnetic field characteristics produced by the three magnetic field generating components are different. Therefore, combining the magnetic fields of the three components can improve the three-dimensionality of the composite magnetic field.

[0148] The second magnetic field generating component 132 is disposed on the coil frame and spaced around the outside of the electromagnetic coil, so that the electromagnetic coil and the second magnetic field generating component 132 can move with the coil frame relative to the first magnetic field generating component 131.

[0149] Specifically, multiple rings can be set coaxially, and the coil holder can be set to be movable along the axis of the rings.

[0150] In this embodiment, in order to facilitate precise adjustment of the magnetic field generating mechanism, thereby reasonably controlling the movement trajectory of the electric arc on the arc target 137 of the coating arc source 13, and thus improving the target metal ionization rate of the two types of arc targets 137.

[0151] The coating arc source 13 also includes a first adjustment drive component 134 and a second adjustment drive component 135. The first adjustment drive component 134 is connected to the first magnetic field generating component 131 and can drive the first magnetic field generating component 131 to reciprocate along the axial direction of the ring, thereby changing the magnetic field distribution characteristics of the first magnetic field generating component 131 acting on the arc target 137 by adjusting the distance between the first magnetic field generating component 131 and the arc target 137 along the axial direction of the ring.

[0152] The second adjustment drive assembly 135 is connected to the coil frame and can drive the second magnetic field generating assembly 132 and the third magnetic field generating assembly 133 to reciprocate along the axial direction of the ring, thereby changing the magnetic field distribution characteristics of the second magnetic field generating assembly 132 acting on the arc target 137 by adjusting the distance between the second magnetic field generating assembly 132 and the arc target 137 along the axial direction of the ring.

[0153] The relative positional relationship and superposition effect of the magnetic field generating components are adjusted by the first adjustment drive component 134 and the second adjustment drive component 135, that is, the composite magnetic field acting on the surface of the target material of the arc target 137 is adjusted. Specifically, under the adjustment operation, the composite magnetic field changes along a predetermined action curve, adjusting the magnetic field distribution and intensity of the composite magnetic field acting on the surface of the arc target 137, thereby achieving the purpose of magnetic control of the electric arc on the surface of the target material of the arc target 137.

[0154] Furthermore, the composite magnetic field can be adjusted according to requirements, thereby increasing the probability of electron and argon collision ionization, improving the deposition rate, and increasing the probability of electron and metal atom collision, thus significantly improving the metal ionization rate.

[0155] This embodiment describes the specific structure of the first adjustment drive component 134 and the second adjustment drive component 135.

[0156] The first adjustment drive assembly 134 includes a drive cylinder, which includes a cylinder body 1341 and a cylinder rod 1340 retractably disposed within the cylinder body 1341. The cylinder body 1341 of the drive cylinder is fixedly disposed relative to the insulating connection assembly 130, and the cylinder rod 1340 of the drive cylinder is connected to the first magnetic field generating assembly 131, so that the drive cylinder can drive the first magnetic field generating assembly 131 to move to a first position or a second position. That is, the first adjustment drive assembly 134 is configured to drive the first magnetic field generating assembly 131 in two positions.

[0157] The second adjustment drive assembly 135 includes a motor 1350 and a transmission screw 1351. The motor 1350 is fixedly disposed relative to the insulating connection assembly 130. One end of the transmission screw 1351 is connected to the output shaft of the motor 1350, and the other end of the transmission screw 1351 is screwed to the coil frame, so that the motor 1350 can drive the second magnetic field generating assembly 132 and the third magnetic field generating assembly 133 to move to any position between the third position and the fourth position through the transmission screw 1351.

[0158] In other words, by configuring the second adjustment drive component 135 to perform stepless adjustment of the second magnetic field generating component 132 and the third magnetic field generating component 133, and combining it with the first adjustment drive component 134 which performs two-level adjustment, stepless adjustment of the composite magnetic field is realized, and the adjustment structure is reasonably simplified, which is conducive to reducing costs.

[0159] Understandably, without considering cost and structural complexity, the first adjustment drive component 134 can be replaced with the second adjustment drive component 135, that is, the first magnetic field generating component 131 can also be configured to be driven by the second adjustment drive component 135.

[0160] In this embodiment, the magnetic field generating mechanism of the etching arc source 12 includes a second magnetic field generating component 132 and a third magnetic field generating component 133. Referring to the magnetic field generating mechanism of the coating arc source 13, the structures of the second magnetic field generating component 132 and the third magnetic field generating component 133 are the same as those of the coating arc source 13. Furthermore, the second magnetic field generating component 132 and the third magnetic field generating component 133 are driven to adjust their positions by the second adjustment driving component 135, thereby changing the magnetic field distribution on the arc target 137 of the etching arc source 12, and thus adjusting the control effect on the arc's trajectory.

[0161] In an optional embodiment, in order to control the surface temperature of the arc target 137, both the coating arc source 13 and the etching arc source 12 further include a water-cooled base. The water-cooled base is disposed between the arc target 137 and the magnetic field generating mechanism, and the arc target 137 is in close contact with the water-cooled base. A fourth cooling channel for introducing cooling fluid is formed inside the water-cooled base, so that the arc target 137 is efficiently cooled and cooled by the cooling fluid flowing in the fourth cooling channel, so as to achieve the purpose of controlling the surface temperature of the arc target 137.

[0162] In this embodiment, observation windows are provided at multiple locations on the side cylinder 100 to facilitate observation of the operation inside the coating chamber.

[0163] In an optional embodiment, to achieve vacuuming of the workspace, the vacuuming module 2 includes a multi-position integrated valve, a coarse pump assembly, and a fine pump assembly. The coarse pump assembly and the fine pump assembly are connected to the vacuum extraction port 102 via the multi-position integrated valve. The coarse pump assembly performs coarse evacuation, and the fine pump assembly performs fine evacuation. First, the coarse pump assembly evacuates the workspace to the required vacuum level. Then, the fine pump assembly maintains the vacuum level in the workspace and performs high-precision adjustment. Fine evacuation can be performed continuously or intermittently after the coarse evacuation operation stops.

[0164] In this embodiment, the multi-position integrated valve includes a valve body, a sealing assembly, and an opening / closing drive assembly. The valve body has an air inlet, an air outlet, and multiple suction channels connecting the air inlet and the air outlet. The valve body is connected to the vacuum extraction port 102 of the coating chamber through the air inlet. The coarse pump assembly performs suction between the air inlet and the vacuum extraction port 102. The valve body also has a fine pump outlet, which is connected to the suction channels and is located between the air inlet and the air outlet. Thus, the coarse pump assembly can directly extract gas from the working space through the vacuum extraction port 102 without passing through the valve body, which can prevent gas containing impurities from being diverted into the multiple suction channels, thereby slowing down the flow rate to a certain extent and achieving a noise reduction effect.

[0165] When the coarse pump assembly stops and the fine pump assembly starts operating, the fine pump assembly performs fine pumping by dividing the pump into multiple pumping channels. This enables multi-channel fine pumping, improving the accuracy of vacuum maintenance. In addition, setting the multiple pumping channels to be unconnected can prevent the fine pumping operations of multiple fine pump assemblies from interfering with each other.

[0166] The sealing component can be opened and closed to seal the fine extraction outlet, thereby blocking the fine extraction outlet when the fine extraction pump assembly is shut down, especially when the roughing pump assembly is operating, ensuring that there is no air leakage through the fine extraction outlet.

[0167] The opening and closing drive component is used to drive and block the opening and closing of the fine extraction outlet, so as to realize the automatic opening and closing of the fine extraction outlet.

[0168] The opening and closing drive assembly includes a drive component, such as a cylinder, capable of pushing and pulling the push-pull rod, and a push-pull rod. The drive component is located outside the valve body. One end of the push-pull rod is connected to the drive component, and the other end of the push-pull rod extends into the air extraction channel and is connected to the sealing assembly. The drive component drives the push-pull rod to push or pull the sealing assembly relative to the fine extraction outlet, so that the sealing assembly closes or opens the fine extraction outlet.

[0169] Specifically, the fine pump assembly includes a first direct-connect pump, a first connecting pipe assembly, and a molecular pump. The first direct-connect pump is connected to the molecular pump via the first connecting pipe assembly, and the molecular pump is connected to the fine pump outlet. There is one first direct-connect pump, and multiple molecular pumps, the number of which is the same as the number of pumping channels in the multi-position integrated valve. Each molecular pump is connected to one of the multiple pumping channels, and the multiple molecular pumps are connected to the first direct-connect pump after converging through the first connecting pipe assembly.

[0170] The coarse pump assembly includes a second direct-coupled pump, a Roots pump, a second filter, and a second connecting pipe assembly. The second filter, the Roots pump, and the second direct-coupled pump are connected sequentially via the second connecting pipe assembly, and the inlet end of the second filter is connected to the outlet via the second connecting pipe assembly. The number of second direct-coupled pumps can be adjusted as needed, for example, to two, with each pump connected to a Roots pump.

[0171] Optionally, both the first and second connecting pipe assemblies may include structures such as bellows, connecting pipes, tees, elbows, and bends. By adjusting the length and position of the bellows, the spatial applicability of the vacuuming mechanism can be greatly improved.

[0172] Both the first and second connecting pipe assemblies are equipped with leak detection holes, which are used to install leak detection components, namely leak detection probes, to facilitate self-testing for leaks in the vacuum module.

[0173] In an optional embodiment, the water-cooled module 3 includes a first liquid inlet pipe, a first liquid outlet pipe, a second liquid inlet pipe, a second liquid outlet pipe, a first liquid inlet connector, a first liquid outlet connector, a second liquid inlet structure, and a second liquid outlet connector.

[0174] The first liquid inlet pipe is provided with multiple first liquid inlet connectors to deliver the first cooling fluid to the easily heated component through the multiple first liquid inlet connectors. The first liquid outlet pipe is provided with multiple first liquid outlet connectors to allow the first cooling fluid in the easily heated component to flow back to the first liquid outlet pipe through the multiple first liquid outlet connectors. The first cooling fluid is cold water at a low temperature, which can be obtained by cooling room temperature water with a chiller.

[0175] Thus, by cooperating with the first liquid inlet pipe and the first liquid outlet pipe, the first cooling fluid is introduced into the easily heated component through the first liquid inlet pipe. After cooling the easily heated component, the first cooling fluid flows to the first liquid outlet pipe and is discharged through the first liquid outlet pipe.

[0176] The second inlet pipe is equipped with multiple second inlet connectors to deliver the second cooling fluid to the easily heated component. The second outlet pipe is equipped with multiple second outlet connectors to allow the second cooling fluid in the easily heated component to flow back to the second outlet pipe through the multiple second outlet connectors. The temperature of the first cooling fluid is lower than that of the second cooling fluid. The second cooling fluid is room temperature warm water, which can be directly connected to a tap water source.

[0177] Thus, through the cooperation of the second liquid inlet pipe and the second liquid outlet pipe, the second cooling fluid is introduced into the second cooling channel through the second liquid inlet pipe. After the second cooling fluid cools down the easily heated components it passes through, it flows to the second liquid outlet pipe and is discharged through the second liquid outlet pipe.

[0178] The temperature of the first cooling fluid is 12-19℃, and the temperature of the second cooling fluid is 25-30℃. The first inlet and outlet pipes are used for components requiring higher cooling capacity and prone to overheating, improving their cooling effect. The second inlet and outlet pipes are used for other components prone to overheating, which not only reduces resource waste but also prevents condensation at these components, thus achieving targeted and precise cooling.

[0179] Optionally, the first and second cooling fluids can be supplied to the heat-generating component through channels formed inside the component, or through pipes external to and in contact with the component. The specific method of supplying the cooling fluids needs to be analyzed based on the characteristics of the heat-generating component.

[0180] Specifically, the molecular pump, Roots pump, etching arc source, coating arc source and anode components have high cooling requirements. Therefore, the first cooling fluid needs to be delivered to the molecular pump, Roots pump, etching arc source, coating arc source and anode components through the first liquid inlet pipe to cool them. After the first cooling fluid is cooled, its temperature rises and it is discharged through the first liquid outlet pipe.

[0181] The cooling requirements of the power supply for the target holder, the first arc ignition mechanism, the biasing mechanism, the second arc ignition mechanism, the observation window, the door section, and the anode component can be met by the second cooling fluid. That is, the second cooling fluid is supplied to the power supply of the arc source mounting base, the first arc ignition mechanism, the biasing mechanism, the second arc ignition mechanism, the observation window, the door section, and the anode component through the second liquid inlet pipe to cool them. After the first cooling fluid completes the cooling, its temperature rises and it is discharged through the second liquid outlet pipe.

[0182] Optionally, a second filter can be installed at the inlet end of the second inlet pipe to filter the second cooling fluid before distributing it to the components prone to overheating through the second inlet pipe, thereby reducing the risk of pipe blockage. Furthermore, since the first cooling fluid output by the chiller is usually already purified water, there is no need to install a filter at the inlet end of the first inlet pipe.

[0183] In this embodiment, the first liquid inlet pipe, the first liquid outlet pipe, the second liquid inlet pipe, and the second liquid outlet pipe all include a first end and a second end.

[0184] The first end of the first liquid inlet pipe is used to introduce the first cooling fluid, the first end of the second liquid inlet pipe is used to connect the second cooling fluid, and the second end of the first liquid inlet pipe is connected to the second end of the second liquid inlet pipe.

[0185] The water-cooled module 3 also includes a first switching valve and a second switching valve. The first switching valve is located at the second end of the first liquid inlet pipe, and the second switching valve is located in the first liquid inlet pipe and spaced apart from the first end of the first liquid inlet pipe. A plurality of first liquid inlet connectors for connecting the inlet of the molecular pump and the inlet of the Roots pump are provided between the second switching valve and the first end of the first liquid inlet pipe. The first liquid inlet connector for connecting the inlet of the molecular pump and the inlet of the Roots pump is defined as the first specific liquid inlet connector.

[0186] The first end of the first outlet pipe is used to discharge the first cooling fluid, the first end of the second outlet pipe is used to discharge the second cooling fluid, and the second end of the first outlet pipe is connected to the second end of the second outlet pipe.

[0187] The water-cooled module 3 also includes a third switching valve and a fourth switching valve. The third switching valve is located at the second end of the first liquid outlet pipe, and the fourth switching valve is located in the first liquid outlet pipe and spaced apart from the first end of the first liquid outlet pipe. Multiple first liquid outlet connectors for connecting the outlet of the molecular pump and the outlet of the Roots pump are provided between the fourth switching valve and the first end of the first liquid outlet pipe. The first liquid outlet connector for connecting the outlet of the molecular pump and the outlet of the Roots pump is defined as the first specific liquid outlet connector.

[0188] Therefore, the water-cooled module 3 can operate in the following modes:

[0189] The first mode: The first switching valve is closed, the second switching valve is open, the third switching valve is closed, and the fourth switching valve is open. In this state, the first inlet pipe is disconnected from the second inlet pipe, and the first outlet pipe is disconnected from the second outlet pipe. This allows the first inlet and first outlet pipes to be cooled by the first cooling fluid, and the second inlet and second outlet pipes to be cooled by the second cooling fluid. This first mode is suitable for operating environments where both the first and second cooling fluid supplies are available.

[0190] In the second mode, the first switching valve is open, the second switching valve is closed, the third switching valve is open, and the fourth switching valve is closed. Thus, the portion of the first inlet pipe connected to the second inlet pipe is used to introduce the second cooling fluid, and the portion of the first inlet pipe separated by the second switching valve is used to introduce the first cooling fluid. Correspondingly, the portion of the first outlet pipe connected to the second outlet pipe is used to discharge the second cooling fluid, and the portion of the first outlet pipe separated by the fourth switching valve is used to discharge the first cooling fluid. That is, the molecular pump and the Roots pump can still be cooled by the first cooling fluid in the first inlet pipe and the first outlet pipe through the first specific inlet connector and the first specific outlet connector.

[0191] In other words, molecular pumps and Roots pumps can only be cooled by the first cooling fluid, while the coating arc source, etching arc source, and anode components can be cooled by either the first or the second cooling fluid depending on the actual situation.

[0192] Because the water-cooled module 3 is prone to pressure fluctuations after operating for a certain period of time, resulting in a significant pressure difference between the first inlet pipe and the first outlet pipe, which can easily damage the pipes. Therefore, in this embodiment, the water-cooled module 3 also includes a first pressure regulating pipe, which includes a first pressure regulating pipe assembly and a first pressure regulating element. The inlet end of the first pressure regulating element is connected to the first inlet pipe, and the outlet end of the first pressure regulating element is connected to the first outlet pipe through the first pressure regulating pipe assembly. When the first pressure regulating element is activated, the first inlet pipe delivers cooling fluid to the first outlet pipe, making the internal pressure of the first inlet pipe and the first outlet pipe consistent, thereby ensuring the pressure stability of the water-cooled module 3.

[0193] Optionally, the first pressure regulating component is a pressure relief valve.

[0194] Because the water-cooled module 3 is prone to pressure fluctuations after operating for a certain period of time, resulting in a significant pressure difference between the second inlet pipe and the second outlet pipe, it can easily damage the pipes. Therefore, in this embodiment, the water-cooled module 3 also includes a second pressure regulating pipe, which includes a second pressure regulating pipe assembly and a second pressure regulating element. The inlet end of the second pressure regulating element is connected to the second inlet pipe, and the outlet end of the second pressure regulating element is connected to the second outlet pipe. When the second pressure regulating element is activated, the second inlet pipe delivers cooling fluid towards the second outlet pipe, making the internal pressure of the second inlet pipe and the second outlet pipe consistent, thereby ensuring the pressure stability of the water-cooled module 3.

[0195] Optionally, the second pressure regulating component is a pressure relief valve.

[0196] Optionally, to facilitate pressure monitoring, pressure detection components, such as pressure gauges, can be installed in the first inlet pipe, the second inlet pipe, the first outlet pipe, and the second outlet pipe.

[0197] In this embodiment, the water-cooled module 3 also includes a pressure relief pipeline, which includes four pressure relief valves and a pressure relief pipe assembly. The inlets of the four pressure relief valves are respectively connected to the first liquid inlet pipeline, the first liquid outlet pipeline, the second liquid inlet pipeline, and the second liquid outlet pipeline. The pressure relief pipe assembly connects the outlets of the four pressure relief valves to the outside.

[0198] Therefore, when any of the first inlet pipe, the first outlet pipe, the second inlet pipe, and the second outlet pipe experiences overpressure, the corresponding pressure relief valve is triggered. The overpressured pipe discharges gas to the outside through the triggered pressure relief valve and the outlet of the pressure relief pipe assembly, thereby achieving the purpose of pressure relief.

[0199] In this embodiment, flow detection components and temperature detection components are installed on the second and first liquid outlet connectors to monitor the drainage flow rate and drainage temperature of the first and second cooling fluids in real time, preventing leakage or overheating. Specifically, it is necessary to ensure that the drainage temperature of both channels does not exceed 35°C; if the temperature is too high, the chiller compressor will be controlled to sound an alarm.

[0200] In this embodiment, the electronic control module 4 includes a main control panel disposed on the side of the coating chamber along the second direction. The main control panel is disposed on the side of the door section of the coating chamber to facilitate monitoring and control of the status of all instruments, the diffusion process, and the working status of each module.

[0201] In the optional embodiments of this example, regarding the overall layout of the integrated diffusion coating device, the multi-position integrated valve, the water-cooling module 3, and the diffusion coating module 1 are integrated into the first structural part, and the power supply module 5, the coarse pump group, the fine pump group, and the electrical control module 4 are integrated into the second structural part.

[0202] The multi-position integrated valve is connected to the diffusion coating module 1, and is detachably connected to the coarse pump group and the fine pump group, so that the first structural part and the second structural part can be detachably connected, and the air pump group is connected to the coating chamber through the multi-position integrated valve. This allows the integrated diffusion coating device to be transported in a split configuration, saving transportation and handling costs, and the connection between the two parts is easy to operate, thus enabling efficient assembly and disassembly of the first and second structural parts.

[0203] The power supply module 5 can supply power to the diffusion coating module 1, the vacuum module 2, and the water cooling module 3. Specifically, the power supply module 5 is used to supply power to the third electrode 138 and the anode component 16 of the etching arc source 12, to the third electrode 138 and the coating chamber of the coating arc source 13, to the first electrode 111 and the second electrode 112 of the ion gun 11, to the first arc ignition mechanism 14, to the second arc ignition mechanism 15, to the biasing mechanism, to the water cooling module 3, and to the vacuum module 2.

[0204] The electrical control module 4 is electrically connected to the power supply module 5, the water cooling module 3, the vacuuming module 2, and the nitriding module 1 to perform coordinated electrical control of the power supply module 5, the water cooling module 3, the vacuuming module 2, and the nitriding module 1, so as to realize the automated control of the integrated nitriding coating device, and to perform real-time detection and automatic adjustment of the nitriding coating process and the nitriding coating status.

[0205] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention. In addition, those skilled in the art can understand that although some embodiments described herein include certain features included in other embodiments but not other features, combinations of features of different embodiments are meant to be within the scope of the present invention and form different embodiments. For example, any one of the claimed embodiments can be used in any combination. The information disclosed in this background section is only intended to enhance the understanding of the overall background technology of the present invention, and should not be regarded as an admission or in any form implying that such information constitutes prior art known to those skilled in the art.

Claims

1. A diffusion coating integrated coating apparatus, characterized in that, include: A diffusion plating module, comprising a plating chamber, a plating arc source, an anode component, a first arc ignition mechanism, and an ion gun; The coating arc source, the first arc ignition mechanism, and the ion gun are all connected to the coating chamber. The interior of the coating chamber forms a working space, which includes a receiving station for placing the workpiece. The anode component is disposed on the side of the receiving station opposite to the ion gun. The working space is used to introduce nitrogen gas for nitriding or coating reaction gas. The first arc ignition mechanism is disposed corresponding to the ion gun so that the ion gun emits a thermionic beam toward the anode component. The diffusion coating module also includes an etching arc source, which is connected to the coating chamber. The etching arc source and the anode component are respectively arranged on the same side of the receiving station. The coating chamber includes a top plate, a bottom plate, and a side cylinder. The side cylinder includes eight side plates connected in an octagonal shape. The top plate and bottom plate respectively cover the top opening and bottom opening of the side cylinder. Both the coating arc source and the etching arc source further include an arc target, a magnetic field generating mechanism, and an insulating connection assembly; The insulating connection assembly is connected to the coating chamber, and the arc target is connected to the portion of the insulating connection assembly located within the working space; The magnetic field generating mechanism is detachably connected to the portion of the insulating connection assembly located outside the coating chamber. The magnetic field generating mechanism includes multiple magnetic field generating components, each of which generates a magnetic field with a different distribution pattern, so that the magnetic field generating mechanism can generate a composite magnetic field acting on the arc target. A vacuum module is connected to the coating chamber to perform vacuum treatment on the coating chamber.

2. The integrated diffusion coating apparatus according to claim 1, characterized in that, Also includes: A water-cooling module, which can supply cooling fluid to the vacuuming module and the plating module; A power supply module, which is capable of supplying power to the plating module, the vacuuming module and the water cooling module; An electronic control module is electrically connected to the power supply module, the water cooling module, the vacuum pumping module, and the plating module. The electronic control module is capable of coordinating the control of the power supply module, the water cooling module, the vacuum pumping module, and the plating module.

3. The integrated diffusion coating apparatus according to claim 2, characterized in that, The ion gun includes a main body, a first electrode, a second electrode, and a tungsten filament; The main body is connected to the coating chamber, and a generating cavity is opened inside the main body. The main body has a jet port facing the receiving station and communicating with the generating cavity. Both the first electrode and the second electrode are disposed on the main body. One end of the first electrode and one end of the second electrode are respectively used to be electrically connected to the positive and negative terminals of the power supply. The other ends of the first electrode and the second electrode extend into the generating cavity. The tungsten wire is disposed in the generating cavity and electrically connected between the first electrode and the second electrode.

4. The integrated diffusion coating apparatus according to claim 3, characterized in that, The main body includes a fixed main body and a movable main body. The fixed main body has a generating groove. The first electrode and the second electrode are disposed on the movable main body. The movable main body is detachably connected to the fixed main body so that the generating groove can be covered by the movable main body to form the generating cavity.

5. The integrated diffusion coating apparatus according to claim 4, characterized in that, The main body also includes fastening connection components and hinge components; The hinge member is connected between one end of the fixed main body and one end of the movable main body; The fastening connection member is detachably connected between the fixed main body and the movable main body; And / or, a first cooling channel is provided inside the side wall of the fixed main body; A second cooling channel is provided inside the side wall of the active main body.

6. The integrated diffusion coating apparatus according to claim 1, characterized in that, The number of ion guns is multiple, and the number of first arc-starting mechanisms is multiple, with each of the multiple first arc-starting mechanisms corresponding to one of the multiple ion guns; Multiple ion guns form the ion gun group, and the number of ion gun groups is at least one. Multiple ion guns in each ion gun group are disposed on the same side plate and arranged sequentially at intervals along the height direction of the coating chamber. The number of etching arc sources is multiple, and the multiple etching arc sources form an etching arc source group. The number of etching arc source groups is at least one. The multiple etching arc sources in each etching arc source group are disposed on the same side plate and arranged sequentially at intervals along the height direction of the coating chamber. The number of coating arc sources is multiple, and the multiple coating arc sources form a coating arc source group. The number of coating arc source groups is at least one. Multiple coating arc sources in each coating arc source group are disposed on the same side plate and arranged sequentially at intervals along the height direction of the coating chamber.

7. The integrated diffusion coating apparatus according to claim 6, characterized in that, The eight side panels include a first side panel, a second side panel, a third side panel, a fourth side panel, a fifth side panel, a sixth side panel, a seventh side panel, and an eighth side panel that are sequentially connected. The number of etching arc source groups is one, the number of ion gun groups is one, the etching arc source group and the ion gun group are respectively disposed on the first side plate and the fifth side plate facing each other, the third side plate is provided with a vacuum extraction port, and the seventh side plate is provided with a heating component. The number of coating arc source groups is four, and the four coating arc source groups are respectively disposed on the second side plate, the fourth side plate, the sixth side plate and the eighth side plate.

8. The integrated diffusion coating apparatus according to claim 1, characterized in that, The diffusion coating module also includes multiple second arc-starting mechanisms, which are respectively disposed on the side of the etching arc source and the side of the coating arc source.

9. The integrated diffusion coating apparatus according to claim 8, characterized in that, The second arc-starting mechanism includes a fixed base assembly, an arc-starting pin, and a drive assembly; One end of the fixed base assembly is connected to the coating chamber, and the arc-starting needle is movably connected to the other end of the fixed base assembly and located within the working space; The drive assembly is connected between the fixed base assembly and the arc-starting pin, and is capable of driving the arc-starting pin to move relative to the fixed base assembly, so that the arc-starting pin moves closer to or further away from the etching arc source or the coating arc source.

10. The integrated diffusion coating apparatus according to claim 9, characterized in that, The two ends of the arc-initiating needle along its length are a first end and a second end, respectively, and the first end of the arc-initiating needle is rotatably connected to the fixed base assembly; The drive assembly includes a linear drive component, an arc-starting electric rod, and a transmission assembly. The fixed base assembly has a first through hole, and one end of the arc-starting electric rod is movably inserted into the first through hole and connected to the linear drive component within the first through hole; The transmission assembly is connected between the arc-starting rod and the first end of the arc-starting needle, and can convert the linear motion of the arc-starting rod into the rotation of the arc-starting needle, so that the second end of the arc-starting needle moves closer to or further away from the etching arc source.

11. The integrated diffusion coating apparatus according to claim 10, characterized in that, The transmission assembly includes a rack, a gear, and a connecting shaft; One end of the rack is connected to the arc-starting electric rod, and the rack meshes with the gear; One axial end of the connecting shaft is pivotally connected to the fixed base assembly, and the other axial end of the connecting shaft is connected to the gear. The second end of the arc-initiating needle is connected to the connecting shaft so that the arc-initiating needle rotates with the connecting shaft under the drive of the gear.

12. The integrated diffusion coating apparatus according to claim 9, characterized in that, The arc-initiating needle includes a body section and a bending section. One end of the body section is connected to the fixing base assembly, and the other end of the body section is connected to the bending section. The bending section bends relative to the body section toward the arc target of the etching arc source or the arc target of the coating arc source.

13. The integrated diffusion coating apparatus according to claim 1, characterized in that, The magnetic field generating mechanism of the coating arc source includes a first magnetic field generating component, a second magnetic field generating component, and a third magnetic field generating component; The magnetic field generating mechanism of the etching arc source includes the second magnetic field generating component and the third magnetic field generating component.

14. The integrated diffusion coating apparatus according to claim 13, characterized in that, The first magnetic field generating component is arranged in a ring shape coaxial with the arc target. The first magnetic field generating component includes a plurality of first magnets arranged in a ring. One end of the first magnet along the radial direction of the ring is the N pole and the other end is the S pole.

15. The integrated diffusion coating apparatus according to claim 14, characterized in that, The second magnetic field generating component is arranged in a ring shape coaxial with the arc target. The second magnetic field generating component includes a plurality of second magnets arranged in a ring. One end of each second magnet along the axial direction of the ring is an N pole and the other end is an S pole.

16. The integrated diffusion coating apparatus according to claim 15, characterized in that, The third magnetic field generating component includes a coil frame movably connected relative to the insulating connection component and an electromagnetic coil sleeved on the coil frame; The second magnetic field generating component is disposed on the coil frame and spaced out on the outside of the electromagnetic coil, so that the electromagnetic coil and the second magnetic field generating component can move with the coil frame relative to the first magnetic field generating component.

17. The integrated diffusion coating apparatus according to claim 16, characterized in that, The coating arc source and the etching arc source further include a first adjustment driving component and a second adjustment driving component; The first adjustment drive component is connected to the first magnetic field generating component and can drive the first magnetic field generating component to reciprocate along the axial direction of the ring. The second adjustment drive component is connected to the coil frame and can drive the second magnetic field generating component and the third magnetic field generating component to reciprocate along the axial direction of the ring.

18. The integrated diffusion coating apparatus according to claim 17, characterized in that, The first adjustment drive assembly includes a drive cylinder, the cylinder body of which is fixedly disposed relative to the insulating connection assembly, and the cylinder rod of which is connected to the first magnetic field generating assembly, so that the drive cylinder can drive the first magnetic field generating assembly to move to a first position or a second position. The second adjustment drive assembly includes a motor and a transmission screw. The motor is fixedly disposed relative to the insulating connection assembly. One end of the transmission screw is connected to the output shaft of the motor, and the other end of the transmission screw is screwed to the coil frame, so that the motor can drive the second magnetic field generating assembly and the third magnetic field generating assembly to move to any position between the third position and the fourth position through the transmission screw.

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