A dielectric grating integrated infrared narrow-band detector and spectral detection chip

Through the infrared narrowband detector integrated with dielectric grating, incident light is coupled into the waveguide layer, solving the problem of low light absorption of ultra-thin detection materials and achieving efficient narrowband detection and multi-band detection capabilities.

CN115295639BActive Publication Date: 2025-03-18SUN YAT SEN UNIV
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Patent Information

Application Number
CN202210924012.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-08-02
Publication Date
2025-03-18
Estimated Expiration
2042-08-02

AI Technical Summary

Technical Problem

While the existing infrared detectors reduce the device size, the light absorption rate of the material has significantly decreased and cannot effectively respond to incident light. Especially for two-dimensional materials, their application is limited by extremely low light absorption.

Method used

Through the dielectric grating integrated structure, incident light is coupled into the waveguide layer with a high refractive index, increasing the interaction distance between the detection material and light, thereby improving the light absorption rate. The structure includes a substrate layer, a waveguide layer, a detection material layer and a grating layer. The grating layer allows the incident light to satisfy the waveguide coupling conditions through diffraction.

Benefits of technology

Narrowband detection of incident light of specified bands is achieved, while significantly improving the absorption efficiency of ultra-thin detection materials on incident light, with an absorption rate of more than 40%, and the ability to detect multiple bands simultaneously and output the response spectrum.

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Abstract

The present invention discloses a dielectric grating integrated infrared narrow-band detector and a spectral detection chip, the detector comprising: a substrate layer for carrying the infrared narrow-band detection device; a waveguide layer covering the upper surface of the substrate layer, for coupling the incident light into a waveguide to enhance the detection material's absorption of the incident light; a detection material layer covering the upper surface of the waveguide layer, for absorbing the waveguide leaked in the waveguide layer and converting it into an electrical signal; a grating layer placed on the upper surface of the detection material layer, for assisting in coupling incident light of a specific wavelength band into the waveguide layer. By using the present invention, waveguide coupling of incident light of a specified wavelength band can be achieved, thereby improving the absorption efficiency of the ultra-thin detection material for incident light of the wavelength band, thereby achieving narrowband detection. As a dielectric grating integrated infrared narrow-band detector and a spectral detection chip, the present invention can be widely used in the field of photoelectric detector technology.
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