The invention provides a split type
residual gas analyzer device, which relates to the technical field of
mass spectrometry instruments, and comprises an
electronic unit, a probe and a compensation and amplification unit, the
electronic unit is connected with the probe through a cable; the
electronic unit comprises a main control module and a
radio frequency module, and the main control module is configured to adjust the frequency of the
radio frequency module to realize
resonance; the compensation and amplification unit comprises a feedback
signal compensation module used for compensating the
voltage drop loss of the
radio frequency feedback
signal; the compensation and amplification unit further comprises a
signal primary amplification module used for amplifying signals output by the probe. Wherein a signal output by the probe is amplified by the signal primary amplification module and then is transmitted to the electronic unit through a cable. The split type
residual gas analyzer provided by the invention can be effectively applied to
radiation-containing fields such as
synchrotron radiation light sources and
nuclear industry, effectively ensures that the electronic unit is used in a non-
radiation or weak-radiation environment, and prolongs the service life of the whole analyzer.