One method of obtaining an initial adjusted
mass flow controller valve start position comprises obtaining a
mass flow controller
delay period and setting a
mass flow controller valve to an initial
valve opening position that is less than an expected optimal
valve opening position. An initial desired flow rate and initial operating conditions are input into a
control system that is in communication with the valve, and the
control system is initiated. The
control system is adapted to adjust the
valve opening position to achieve the initial desired flow rate, while taking into account flow rate and valve position feedback to the control
system. During operation of the MFC and control
system, the valve position and the flow rate are recorded in one embodiment and a flow rate that one of meets and exceeds a threshold is detected. An initial-
flow time-period extending from the time of control
system initiation to detection of the threshold being one of met and exceeded is determined and the mass flow controller
delay period from the initial
flow time period is subtracted from the initial-
flow time-period to obtain an adjusted
start time. The valve opening position at the adjusted
start time is set as the initial adjusted mass flow controller valve start position.