A device for forming a low-oxygen ultra-high purity arsenic rod

Abstract

The present invention relates to a device for forming a low-oxygen ultra-high purity arsenic rod, which includes a bracket and an arsenic rod forming furnace liner installed on the bracket; the arsenic rod forming furnace liner includes a furnace body, and a furnace cavity is formed inside the furnace body; a forming die fixing seat is installed in the furnace cavity, and an installation groove is provided on the forming die fixing seat for installing an arsenic rod forming die; a gas pipeline assembly is further provided on the outer side of the furnace body, and the gas pipeline assembly is communicated with the furnace cavity for controlling the gas in the furnace cavity; the bracket is also installed with a horizontal rotation mechanism, and the horizontal rotation mechanism is connected to the arsenic rod forming furnace liner for driving the arsenic rod forming furnace liner to rotate horizontally; the bracket is also installed with a heating mechanism, and the heating mechanism cooperates with the arsenic rod forming furnace liner for heating the arsenic rod forming furnace liner. The device for forming a low-oxygen ultra-high purity arsenic rod of the present invention can effectively assist in reducing the oxygen content of the formed arsenic rod, can also effectively assist in improving the density of the formed arsenic rod and making the surface of the arsenic rod smooth and flat; meeting the requirements of the corresponding industry for ultra-high purity arsenic rods.

Description

Technical Field

[0001] The present invention relates to the field of arsenic rod forming, and particularly to a device for forming a low-oxygen ultra-high-purity arsenic rod. Background Art

[0002] Ultra-high-purity arsenic refers to metallic arsenic with a total impurity content of less than 1 ppm, a non-metallic element widely distributed in nature. When exposed to air, its surface gradually oxidizes and turns black. High-purity arsenic can be used to prepare III-V group compound semiconductor materials such as GaAs and InA, as well as dopants for silicon and germanium single crystals. It can also be used to prepare As2Se3 (infrared transmission glass, laser printers, etc.) and As2S3 (infrared transmission glass). Its main function is to synthesize gallium arsenide, and the demand for high-purity arsenic is basically determined by the market of gallium arsenide. Now gallium arsenide is widely used in making diodes, infrared emitting tubes, lasers, and solar cells, and it is also playing an increasingly important role in cutting-edge technology fields such as the microelectronics field, optoelectronics, military industry, aerospace industry, and computers.

[0003] Currently, ultra-high-purity arsenic is mainly used in compound semiconductors, and the shape of the ultra-high-purity arsenic used is irregular fragmented blocks. It is inevitable to introduce other impurities or have a relatively high oxygen content during the processing. However, with the rapid development of semiconductor material technology, especially the development of molecular beam epitaxy technology, the downstream industry has higher requirements for the shape and oxygen content of ultra-high-purity arsenic.

[0004] Conventional methods for forming arsenic rods generally use direct casting or machining. However, arsenic has special properties. Its melting point is 814 °C, but it starts to sublime into gaseous arsenic when heated to 615 °C, that is, solid high-purity arsenic sublimes into arsenic vapor when heated to 615 °C and then liquefies into high-purity liquid when heated to 814 °C. Due to the special properties of arsenic, the method of direct casting cannot be achieved. At the same time, high-purity arsenic is relatively brittle and it is difficult to machine it into the required shape by mechanical processing. Moreover, when processed, high-purity arsenic has to come into contact with other metals or substances, which easily causes pollution to high-purity arsenic.

[0005] Therefore, it is necessary to study a forming device for ultra-high-purity arsenic rods to meet the development needs of the semiconductor material industry. However, there is no relevant equipment for forming low-oxygen dense ultra-high-purity arsenic rods in the currently available information. Therefore, the development of this forming equipment for high-purity arsenic rods can meet the requirements of the development of molecular beam epitaxy technology in the semiconductor industry. Summary of the Invention

[0006] To solve the above technical problems, the present invention provides a device for forming a low-oxygen ultra-high-purity arsenic rod, which can effectively assist in reducing the oxygen content of the formed arsenic rod, effectively assist in improving the density of the formed arsenic rod and make the surface of the arsenic rod smooth and flat, meeting the requirements of the corresponding industry for ultra-high-purity arsenic rods.

[0007] The technical solution adopted by the present invention to solve its technical problems is: a low-oxygen ultra-high purity arsenic rod forming device, including a bracket and an arsenic rod forming furnace liner installed on the bracket; the arsenic rod forming furnace liner includes a furnace body, and a furnace cavity is formed inside the furnace body; a forming die fixing seat is installed in the furnace cavity, and an installation groove is provided on the forming die fixing seat for installing an arsenic rod forming die; a gas pipeline assembly is further provided on the outer side of the furnace body, and the gas pipeline assembly is communicated with the furnace cavity for controlling the gas in the furnace cavity; the bracket is also installed with a horizontal rotation mechanism, and the horizontal rotation mechanism is connected to the arsenic rod forming furnace liner for driving the arsenic rod forming furnace liner to rotate horizontally; the bracket is also installed with a heating mechanism, and the heating mechanism cooperates with the arsenic rod forming furnace liner for heating the arsenic rod forming furnace liner.

[0008] Further, the gas pipeline assembly includes a gas pipeline manifold communicated with the furnace cavity; the gas pipeline manifold is connected with a vacuum pumping pipeline, an inert gas pressurizing pipeline, and a tail gas discharge pipeline; a vacuum control valve is provided on the vacuum pumping pipeline, and a pressurizing control valve is provided on the inert gas pressurizing pipeline; a discharge valve is provided on the tail gas discharge pipeline.

[0009] Further, the forming device further includes a control module; the vacuum control valve, the pressurizing control valve, and the discharge valve are valves that can be switched on and off in response to the control commands of the control module; the furnace body is also provided with a pressure sensor for monitoring the pressure in the furnace cavity; the control module is configured to: in response to a vacuum pumping instruction, control the vacuum control valve to open; in response to a horizontal rotation instruction, control the horizontal rotation mechanism to start; in response to a pressurizing instruction, control the vacuum control valve to close and control the pressurizing control valve to open, receive the furnace cavity pressure data monitored by the pressure sensor, and when the pressure value reaches a first set value, control the pressurizing control valve to close; in response to an out-of-furnace instruction, control the discharge valve to open.

[0010] Further, the gas pipeline assembly further includes a safety protection pipeline, and a safety valve is further provided on the safety protection pipeline; the safety valve is a valve that can be switched on and off in response to the control commands of the control module; the control module is further configured to: receive the furnace cavity pressure data monitored by the pressure sensor, and when the pressure value reaches a second set value, control the safety valve to open.

[0011] Further, the top of the furnace body is open, and a furnace cover is installed at the opening; the furnace cover is connected to the furnace body through a connecting piece; a sealing member is further provided between the furnace cover and the furnace body; a cooling mechanism is also provided on the side wall of the furnace body in the area close to the top opening.

[0012] Further, the heating mechanism includes a heating part, and a heating channel with upper and lower openings is formed inside the heating part; the heating channel cooperates with the arsenic rod forming furnace liner for heating the arsenic rod forming furnace liner.

[0013] Further, the heating mechanism further includes a temperature sensor installed on the heating part, and the working end of the temperature sensor is close to the heating channel; the control module is further configured to: receive the temperature data monitored by the temperature sensor and control the heating of the heating part according to the set temperature parameter.

[0014] Further, the forming device further includes a lifting mechanism installed on the bracket; the heating mechanism is fixed to the lifting mobile end of the lifting mechanism.

[0015] Further, the lifting mechanism includes a lead screw assembly installed on the bracket, a lifting drive element for driving the lead screw, and a mounting frame fixed to the lead screw nut. This mounting frame serves as the lifting mobile end of the lifting mechanism and is fixed to the heating mechanism.

[0016] Further, the forming die fixing seat includes a fixing seat body; a plurality of holes are opened on the top side of the fixing seat body, and the holes are used as mounting grooves for placing the arsenic rod forming die.

[0017] Advantages of the present invention: For a low-oxygen ultra-high purity arsenic rod forming device of the present invention, when the gas pipeline assembly controls the gas in the furnace cavity, the deoxidation effect of arsenic is improved by horizontal rotation, effectively reducing the oxygen content of the formed ultra-high purity arsenic rod. Moreover, the bubbles inside the material liquid can be removed by horizontal rotation, improving the density of the formed ultra-high purity arsenic rod and making the surface of the ultra-high purity arsenic rod smooth and flat, meeting the requirements of the corresponding industry for ultra-high purity arsenic rods. Description of the Drawings

[0018] Figure 1 It is a schematic diagram of a low-oxygen ultra-high purity arsenic rod forming device of this embodiment;

[0019] Figure 2 It is a schematic diagram of the arsenic rod forming furnace liner of a low-oxygen ultra-high purity arsenic rod forming device of this embodiment;

[0020] Figure 3 It is a schematic diagram of the forming die fixing seat of a low-oxygen ultra-high purity arsenic rod forming device of this embodiment;

[0021] Figure 4 It is a top view schematic diagram of the forming die fixing seat of a low-oxygen ultra-high purity arsenic rod forming device of this embodiment;

[0022] Among them, 1 - bracket, 2 - heating mechanism, 3 - arsenic rod forming furnace liner, 4 - horizontal rotation mechanism, 5 - lifting mechanism, 11 - supporting vertical frame, 12 - supporting base, 13 - supporting top frame, 21 - heating part, 22 - heating channel, 23 - temperature sensor, 31 - furnace body, 32 - furnace cover, 33 - furnace cavity, 34 - cooling mechanism, 35 - gas pipeline assembly, 36 - forming die fixing seat, 37 - connecting piece, 351 - gas pipeline manifold, 352 - vacuum pumping pipeline, 353 - inert gas pressurizing pipeline, 354 - tail gas discharge pipeline, 355 - safety protection pipeline, 356 - vacuum control valve, 357 - pressurizing control valve, 358 - discharge valve, 359 - safety valve, 361 - fixing seat body, 362 - hole, 51 - lead screw assembly, 52 - lifting drive element, 53 - mounting frame. Detailed implementation mode

[0023] To deepen the understanding of the present invention, the present invention will be further described in detail below in conjunction with the drawings and embodiments. The embodiments are only used to explain the present invention and do not limit the protection scope of the present invention.

[0024] Embodiment

[0025] Please refer to Figures 1 to 4 As shown, this embodiment provides a low - oxygen ultra - high - purity arsenic rod forming device, including a bracket 1 and an arsenic rod forming furnace liner 3 installed on the bracket 1; the arsenic rod forming furnace liner 3 includes a furnace body 31, and a furnace cavity 33 is formed inside the furnace body 31; a forming die fixing seat 36 is installed in the furnace cavity 33, and an installation groove is provided on the forming die fixing seat 36 for installing an arsenic rod forming die; a gas pipeline assembly 35 is further provided on the outer side of the furnace body 31, and the gas pipeline assembly 35 is communicated with the furnace cavity for controlling the gas in the furnace cavity 33; the bracket 1 is further installed with a horizontal rotation mechanism 4, and the horizontal rotation mechanism 4 is connected to the arsenic rod forming furnace liner 3 for driving the arsenic rod forming furnace liner 3 to rotate horizontally; the bracket 1 is further installed with a heating mechanism 2, and the heating mechanism 2 cooperates with the arsenic rod forming furnace liner 3 for heating the arsenic rod forming furnace liner 3. Among them, the gas control methods of the gas pipeline assembly 35 include but are not limited to: vacuum pumping, filling with inert gas, exhausting, etc.; the horizontal rotation mechanism provides the horizontal rotation function for the arsenic rod forming furnace liner 3, and when the gas pipeline assembly controls the gas in the furnace cavity, the deoxidation effect of arsenic can be improved by horizontal rotation, effectively reducing the oxygen content of the formed ultra - high - purity arsenic rod, and the bubbles inside the material liquid can also be removed by horizontal rotation, improving the density of the formed ultra - high - purity arsenic rod and making the surface of the ultra - high - purity arsenic rod smooth and flat.

[0026] Refer to again Figure 1As shown, the bracket 1 includes a supporting vertical frame 11, a supporting base 12 located at the bottom side of the supporting vertical frame 11, and a supporting top frame 13 located at the top side of the supporting vertical frame 11; the supporting top frame 13 is used for installing 3; a horizontal rotation mechanism 4 is also installed on the top side of the supporting vertical frame 11, and the output end of the horizontal rotation mechanism 4 is in transmission connection with the arsenic rod forming furnace liner 3 of the arsenic rod forming furnace.

[0027] Refer to again Figure 2 As shown, the gas pipeline assembly 35 includes a gas pipeline manifold 351 communicated with the furnace cavity 33; the gas pipeline manifold is connected with a vacuum pumping pipeline 352, an inert gas pressurization pipeline 353, and a tail gas discharge pipeline 354; a vacuum control valve 356 is arranged on the vacuum pumping pipeline 352, and a pressurization control valve 357 is arranged on the inert gas pressurization pipeline 353; a discharge valve 358 is arranged on the tail gas discharge pipeline 354.

[0028] In a low-oxygen ultra-high purity arsenic rod forming device of this embodiment, the forming device further includes a control module; the vacuum control valve 356, the pressurization control valve 357, and the discharge valve 358 are valves that can perform opening and closing actions in response to control commands of the control module; the furnace body 31 is further provided with a pressure sensor for monitoring the pressure in the furnace cavity; the control module is configured to: in response to a vacuum pumping instruction, control the vacuum control valve 356 to open; in response to a horizontal rotation instruction, control the horizontal rotation mechanism to start; in response to a pressurization instruction, control the vacuum control valve 356 to close, and control the pressurization control valve 357 to open, receive the furnace cavity pressure data monitored by the pressure sensor, and when the pressure value reaches a first set value, control the pressurization control valve 357 to close; in response to an out-of-furnace instruction, control the discharge valve 358 to open. In this embodiment, the vacuum pumping pipeline 352 is used to connect to a vacuum pumping system (vacuum pump), the inert gas pressurization pipeline 353 is used to connect to a high-pressure high-purity inert gas source, and the tail gas discharge pipeline 354 is used to connect to a tail gas scrubbing system; under the control of the control module: the vacuum control valve 356 opens during vacuum pumping and closes during pressurization; the pressurization control valve 357 opens during pressurization to fill the furnace cavity with high-purity inert gas, and the pressurization control valve 357 forms an interlock control with the pressure sensor to adjust the gas pressure filled into the furnace cavity until the required pressure (first set value) is reached; the discharge valve 358 remains closed during the forming process and only opens when preparing to take out the furnace to relieve the pressure in the furnace cavity, and the discharged gas is processed through the tail gas scrubbing system.

[0029] Refer to again Figure 2As shown, the gas pipeline assembly 35 further includes a safety protection pipeline 355, and a safety valve 359 is further provided on the safety protection pipeline 355; the safety valve 359 is a valve that can be switched in response to a control command of the control module; the control module is further configured to: receive the furnace chamber pressure data monitored by the pressure sensor, and control the safety valve 359 to open when the pressure value reaches the second set value. In this embodiment, the outlet end of the safety protection pipeline 355 can be connected to the outlet end of the tail gas discharge pipeline 354; under the control of the control module, the safety valve 359 and the pressure sensor form an interlock control; when the pressure in the furnace chamber is too high (the second set value), the safety valve 359 opens to relieve the pressure of the furnace chamber, and the discharged gas is processed by the tail gas scrubbing system.

[0030] Referring again to Figure 2 As shown, the top of the furnace body 31 is open, and a furnace cover 32 is installed at the opening; the furnace cover 32 and the furnace body 31 are connected by a connecting member 37; a sealing member is further provided between the furnace cover 32 and the furnace body 31; a cooling mechanism 34 is further provided on the side wall of the furnace body 31 in the area close to the top opening. Among them, the connecting member 37 can be a bolt, and the bolts are evenly distributed around the joint area of the furnace body and the furnace cover. In this embodiment, specifically eight bolts are evenly distributed along the circumference. The cooling mechanism 34 can be a circulating cooling water jacket, which is used to reduce the temperature of the furnace body 31 near the end. On the one hand, it can protect the sealing member from being affected by high temperature and reducing the sealing effect. On the other hand, it can also play a role in reducing arsenic vapor.

[0031] Referring again to Figure 1 As shown, the heating mechanism 2 includes a heating part 21, and a heating channel 22 with upper and lower openings is formed in the heating part 21; the heating channel 22 cooperates with the arsenic rod forming furnace liner 3 to heat the arsenic rod forming furnace liner 3. Among them, the heating part 21 can adopt an electric resistance heating furnace.

[0032] Referring again to Figure 1 As shown, the heating mechanism 2 further includes a temperature sensor 23 installed on the heating part 21, and the working end of the temperature sensor 23 is close to the heating channel 22; the control module is further configured to: receive the temperature data monitored by the temperature sensor 23 and control the heating of the heating part 21 according to the set temperature parameters. Among them, the temperature sensor can adopt a temperature control thermocouple, and through the real-time feedback of the temperature control thermocouple, the heating device performs precise temperature control.

[0033] Referring again to Figure 1As shown in the figure, the forming device further includes a lifting mechanism 5 installed on the bracket 1; the heating mechanism 2 is fixed to the lifting mobile end of the lifting mechanism 5. Among them, the driving of the lifting mechanism 5 enables the heating mechanism 2 to move up and down. The design of the heating channel with upper and lower openings in the heating mechanism enables the heating mechanism to adopt an upward movement method during the solidification forming of the arsenic rod. In this way, the arsenic rod forming die can gradually cool from bottom to top. This cooling and forming method enables the arsenic material to cool and solidify from the bottom first and the top surface last. The directional solidification forming can ensure the density of the formed arsenic rod. In this embodiment, by the method of moving the heating channel upward relative to the arsenic rod forming die, it can also ensure that the top surface of the arsenic rod is flat and there is no shrinkage cavity after solidification.

[0034] Referring again to Figure 1 As shown in the figure, the lifting mechanism 5 includes a lead screw assembly installed on the bracket 1, a lifting drive element (servo motor) for driving the lead screw, and a mounting bracket 53 fixed to the lead screw nut. The mounting bracket 53 serves as the lifting mobile end of the lifting mechanism 5 and is fixed to the heating mechanism 2.

[0035] Referring again to Figure 3 and Figure 4 As shown in the figure, the forming die fixing seat 36 includes a fixing seat body 361; a plurality of holes 362 are opened on the top side of the fixing seat body 361. The holes are used as mounting grooves for placing the arsenic rod forming die. In this embodiment, there are 5 holes 362, which are distributed in a cross shape.

[0036] Usage Example 1

[0037] This usage example adopts a low-oxygen ultra-high purity arsenic rod forming device of the embodiment, and prepares an ultra-high purity arsenic rod through the following steps:

[0038] S1. Select five quartz tubes made of high-purity quartz with a diameter of φ35×300mm (as arsenic rod forming dies), soak them in aqua regia for 24 hours, rinse them thoroughly with high-purity water, and dry them for standby.

[0039] S2. Weigh 445g of arsenic with a purity of 99.999995% in a glove box under the protection of high-purity argon, and put the weighed material into the arsenic rod forming die prepared in step S1.

[0040] S3. Insert the loaded arsenic rod forming die into the holes on the forming die fixing seat, fix it, cover the furnace lid, and tighten the bolts to firmly fix the furnace lid to the furnace body.

[0041] S4. Start the lifting mechanism, drive the heating mechanism to move upward, so that the corresponding area of the furnace body equipped with the arsenic rod forming die is located in the heating channel.

[0042] S5. Close the pressure control valve of the inert gas pressurization pipeline, close the exhaust valve of the tail gas exhaust pipeline, open the vacuum control valve of the vacuum pipeline, start vacuuming, and the pressure sensor will feedback the real-time pressure in the furnace chamber. When the vacuum degree in the furnace chamber reaches 10 -4 Pa, start the heating mechanism, and heat it up according to the set heating program. At the same time, start the horizontal rotation mechanism, and drive the arsenic rod forming furnace to rotate horizontally according to the set horizontal rotation operation program. After heating to 530℃-580℃, keep the temperature constant for 1h to carry out high-purity arsenic deoxidation treatment under high temperature and high vacuum;

[0043] S6. After the deoxidation treatment is completed, the horizontal rotation mechanism is closed, the arsenic rod forming furnace stops horizontal rotation, and the heating mechanism continues to heat up according to the set heating program. During the heating process, the vacuum control valve of the vacuum pipeline is closed, and the pressure control valve of the inert gas pressurization pipeline is opened, and high-purity argon gas is filled into the furnace chamber at a constant pressure of 3.8-4.2MPa; the heating process is: at a heating rate of 1℃ / min, the temperature is raised to 815℃-850℃ and then constant temperature is maintained, and the pressure is kept constant during the constant temperature;

[0044] S7. After the constant temperature is finished, the horizontal rotation mechanism is started again, the arsenic rod forming furnace is horizontally rotated, and according to the set directional solidification program, the lifting mechanism is started to drive the heating mechanism to rise, and the moving speed is 10-50mm / h. The heating channel moves upward until it leaves the corresponding area of the furnace body equipped with the arsenic rod forming mold; the heating mechanism, the horizontal rotation mechanism, and the lifting mechanism are closed, and the temperature is naturally cooled to room temperature;

[0045] S8. Open the exhaust valve of the exhaust pipe to relieve the pressure in the furnace chamber. After the pressure relief is completed, unscrew the bolts, open the furnace cover, take out the arsenic rod forming mold in the forming mold fixing seat, demold the quartz mold in the glove box under the protection of high-purity argon gas, and take out the arsenic rod.

[0046] Test the arsenic rod formed in Example 1:

[0047] 1. Weigh the weight of 5 arsenic rods respectively. The weight of each rod is in the range of 435-443g, and the surface of each ultra-high purity arsenic rod is smooth, dense and free of pores;

[0048] 2. A high-purity arsenic rod was randomly selected for sample testing. The purity of the arsenic rod reached 99.999995%, and the oxygen content in the arsenic rod was <1PPm.

[0049] Use case two

[0050] The difference between this use example and use example 1 is that in step S1, a flat-bottomed quartz tube made of high-purity quartz material of φ115×300mm is selected (as an arsenic rod forming mold); in step S2, 7072g of arsenic with a purity of 99.999995% is weighed and placed in the arsenic rod forming mold prepared in step S1. The rest is the same as use example 1.

[0051] Test the arsenic rod formed in Usage Example 2:

[0052] 1. Weigh the arsenic rod: 7064 g. The surface of the arsenic rod is smooth, dense, and pore-free;

[0053] 2. Send the arsenic rod for sample testing. The purity of the arsenic rod reaches 99.999995%, and the oxygen content in the arsenic rod < 1 ppm.

[0054] A device for forming a low-oxygen ultra-high purity arsenic rod of the present invention can prepare an ultra-high purity arsenic rod by weighing materials according to different size requirements in a forming die, putting them into a forming cavity, sealing the forming cavity and then starting to evacuate, and then performing a series of operations such as deoxidation under high temperature and high vacuum, program-controlled pressurization, program-controlled heating for melting materials, constant temperature, horizontal rotation to remove air bubbles, directional solidification, cooling and taking out of the furnace for demolding. This device avoids problems such as the surface of the ingot being not smooth with shrinkage holes and high oxygen content in conventional ingot casting. Moreover, the forming form is flexible and variable, and the die can be replaced according to the required forming size. During the forming process, the materials only contact high-purity quartz, which will not affect the purity of the ultra-high purity arsenic rod; the device has a high degree of automation and good safety, can be automatically controlled, and can be started and run with one key according to the set program. The prepared high-purity arsenic rod is dense, smooth, without shrinkage holes, and the oxygen content is less than 1 ppm, meeting the requirements of the corresponding industry for ultra-high purity arsenic rods.

[0055] The above embodiments should not limit the present invention in any way. All technical solutions obtained by using equivalent replacements or equivalent conversions fall within the protection scope of the present invention.

Claims

1. A device for forming a low-oxygen ultra-high purity arsenic rod, characterized in that: It includes a bracket and an arsenic rod forming furnace liner installed on the bracket; the arsenic rod forming furnace liner includes a furnace body, and a furnace cavity is formed inside the furnace body; a forming die fixing seat is installed in the furnace cavity, and an installation groove is provided on the forming die fixing seat for installing an arsenic rod forming die; a gas pipeline assembly is further provided on the outer side of the furnace body, and the gas pipeline assembly is communicated with the furnace cavity for controlling the gas in the furnace cavity; the bracket is also installed with a horizontal rotation mechanism, and the horizontal rotation mechanism is connected with the arsenic rod forming furnace liner for driving the arsenic rod forming furnace liner to rotate horizontally; the bracket is also installed with a heating mechanism, and the heating mechanism cooperates with the arsenic rod forming furnace liner for heating the arsenic rod forming furnace liner. The gas pipeline assembly includes a gas pipeline manifold communicated with the furnace cavity; the gas pipeline manifold is connected with a vacuum pumping pipeline, an inert gas pressurizing pipeline, and a tail gas discharge pipeline; a vacuum control valve is provided on the vacuum pumping pipeline, and a pressurizing control valve is provided on the inert gas pressurizing pipeline; a discharge valve is provided on the tail gas discharge pipeline. The forming die fixing seat includes a fixing seat body; a plurality of holes are opened on the top side of the fixing seat body, and the holes are used as installation grooves for placing the arsenic rod forming die.

2. The forming device for a low-oxygen ultra-high purity arsenic rod according to claim 1, wherein: The forming device further includes a control module; the vacuum control valve, the pressurizing control valve, and the discharge valve are valves that can be switched on and off in response to the control commands of the control module; the furnace body is also provided with a pressure sensor for monitoring the pressure in the furnace cavity; the control module is configured to: in response to a vacuum pumping instruction, control the vacuum control valve to open; in response to a horizontal rotation instruction, control the horizontal rotation mechanism to start; in response to a pressurizing instruction, control the vacuum control valve to close and control the pressurizing control valve to open, receive the furnace cavity pressure data monitored by the pressure sensor, and control the pressurizing control valve to close when the pressure value reaches a first set value; in response to an out-of-furnace instruction, control the discharge valve to open.

3. The low-oxygen ultra-high purity arsenic rod forming device according to claim 2, characterized in that: The gas pipeline assembly further includes a safety protection pipeline, and a safety valve is further provided on the safety protection pipeline; the safety valve is a valve that can be switched on and off in response to the control commands of the control module; the control module is further configured to: receive the furnace cavity pressure data monitored by the pressure sensor and control the safety valve to open when the pressure value reaches a second set value.

4. A hypoxic ultra-high purity arsenic rod forming device according to any one of claims 1-3, characterized in that: The top of the furnace body is open, and a furnace cover is installed at the opening; the furnace cover is connected with the furnace body through a connecting piece; a sealing member is further provided between the furnace cover and the furnace body; a cooling mechanism is further provided on the side wall of the furnace body in the area close to the top opening.

5. The forming device for a low-oxygen ultra-high purity arsenic rod according to claim 2, characterized in that: The heating mechanism includes a heating part, and a heating channel with upper and lower openings is formed inside the heating part; the heating channel cooperates with the arsenic rod forming furnace liner for heating the arsenic rod forming furnace liner.

6. The low-oxygen ultra-high purity arsenic rod forming device according to claim 5, wherein: The heating mechanism further includes a temperature sensor installed in the heating part, and the working end of the temperature sensor is close to the heating channel; the control module is further configured to: receive the temperature data monitored by the temperature sensor and control the heating part to heat according to the set temperature parameters.

7. A low-oxygen ultra-high purity arsenic rod forming device according to claim 5 or 6, characterized in that: The forming device further includes a lifting mechanism installed on the bracket; the heating mechanism is fixed to the lifting mobile end of the lifting mechanism.

8. A low-oxygen ultra-high purity arsenic rod forming device according to claim 7, characterized in that: The lifting mechanism includes a lead screw assembly installed on the bracket, a lifting drive element for driving the lead screw, and a mounting bracket fixed to the lead screw nut. This mounting bracket serves as the lifting mobile end of the lifting mechanism and is fixed to the heating mechanism.

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