Power supply with impedance measurement and method of controlling the same

Abstract

The application relates to a power supply with impedance measurement and a control method thereof. The power supply comprises a system control unit, a power circuit module and an impedance measurement module; the output ends of the power circuit module and the impedance measurement module are connected with input electrodes of a carrier; the system control unit is electrically connected with the power circuit module and the impedance measurement module, and the system control unit is used for controlling the on-off state between the power circuit module and the impedance measurement module and the input electrodes according to a received control instruction. The scheme provided by the application can realize monitoring of the impedance of the carrier, ensure that the carrier is in an optimal impedance state, improve the efficiency of a deposition process, improve the safety of process operators, and ensure the quality of the deposition process.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of power supply, in particular to a power supply with impedance measurement and a control method thereof. BACKGROUND

[0002] At present, the thin film deposited by the deposition process has conductivity, which leads to poor insulation between adjacent electrodes after covering the surface of the graphite boat, directly affecting the plasma discharge condition, and then reducing the usable number of the graphite boat. Although improvements have been made on the insulation structure in the traditional technology, the impedance value of the graphite boat still decreases with the number of uses, which is one of the key problems of the equipment. At the same time, considering that the specifications of the graphite boat are not unified and the impedance changes rapidly, it is necessary to monitor the impedance value of the graphite boat online to adapt to the adaptive automatic adjustment of the process parameters with the number of uses of the graphite boat, which is also convenient for production of the graphite boat.

[0003] The existing impedance measurement method of the carrier including the graphite boat is to manually remove the electrode terminal after the process ends, and manually measure the impedance value between the two electrodes by using a multimeter. This method affects the process efficiency, and the leakage voltage of the power supply output may cause danger, and high temperature may also endanger the safety of the operator. Therefore, it is necessary to monitor the impedance value of the carrier to ensure the quality of the deposition process. SUMMARY

[0004] To overcome the problems in the related art, the present application provides a power supply with impedance measurement and a control method thereof. The power supply with impedance measurement can monitor the impedance of the carrier, ensure the optimal impedance state of the carrier, improve the efficiency of the deposition process, improve the safety of the process operator, and ensure the quality of the deposition process.

[0005] The first aspect of the present application provides a power supply with impedance measurement, comprising:

[0006] a system control unit, a power circuit module, and an impedance measurement module;

[0007] The output ends of the power circuit module and the impedance measurement module are respectively connected with the input electrodes of the carrier;

[0008] The system control unit is electrically connected with the power circuit module and the impedance measurement module, and the system control unit is used to control the on-off state between the power circuit module and the impedance measurement module and the input electrodes according to the received control instruction.

[0009] In an embodiment, the power supply with impedance measurement further comprises a first double-path double-break switch and a second double-path double-break switch.

[0010] The first double-path double-break switch comprises a switch S1 and a switch S2.

[0011] The second double-path double-break switch comprises switch S3 and switch S4.

[0012] The first double-path double-break switch is arranged between the power circuit module and the input electrode, and is used for controlling the on-off between the power circuit module and the input electrode.

[0013] The second double-path double-break switch is arranged between the impedance measurement module and the input electrode, and is used for controlling the on-off between the impedance measurement module and the input electrode.

[0014] In an embodiment, switch S1 and switch S4 are connected to form a first node, and the first node is connected to the input electrode.

[0015] Switch S2 and switch S3 are connected to form a second node, and the second node is connected to the input electrode.

[0016] In an embodiment, the impedance measurement module is provided with a constant voltage source and an impedance range adjusting device, the constant voltage source is used for providing a constant voltage when measuring the impedance value, and the impedance range adjusting device is used for adjusting the measurement range of the impedance value.

[0017] In an embodiment, the impedance measurement module is provided with a voltage source for voltage division measurement, and the resistance value is obtained by reverse calculation based on the divided voltage and the resistance value of the voltage division resistor.

[0018] Or

[0019] The impedance measurement module is provided with a current source.

[0020] Or

[0021] The impedance measurement module is provided with a special impedance measurement chip or a special measuring instrument.

[0022] Or

[0023] The impedance measurement module is used for directly measuring the output of the power part, and the impedance value is determined by calculating the ratio of the voltage and the current.

[0024] In an embodiment, the system control unit is provided with a display device, and the display device is used for displaying the impedance value measured by the impedance measurement module.

[0025] In an embodiment, the impedance measurement module is a module arranged inside the power supply, or the impedance measurement module is a module externally connected to the power supply.

[0026] The second aspect of the present application provides a control method of a power supply with impedance measurement, which is used for controlling the power supply with impedance measurement as any one of the first aspect, and the control method comprises:

[0027] Receiving a control instruction, the control instruction comprising a discharge instruction and a measurement instruction;

[0028] According to the control instruction, the on-off state between the power circuit module and the input electrode and the on-off state between the impedance measurement module and the input electrode are controlled.

[0029] In an embodiment, according to the control instruction, the on-off state between the power circuit module and the input electrode and the on-off state between the impedance measurement module and the input electrode are controlled, including:

[0030] According to the control instruction, the on-off of the first double-path double-break switch and / or the second double-path double-break switch is controlled; the first double-path double-break switch is arranged between the power circuit module and the input electrode, and the second double-path double-break switch is arranged between the impedance measurement module and the input electrode.

[0031] In an embodiment, according to the control instruction, the on-off of the first double-path double-break switch and / or the second double-path double-break switch is controlled, including:

[0032] If the discharge instruction and the measurement instruction are not received, the first double-path double-break switch and the second double-path double-break switch are controlled to be turned off, so as to avoid that the non-output voltage is connected to the output end and damage the output end;

[0033] If the discharge instruction is received, the first double-path double-break switch is controlled to be turned on, and the impedance value is determined by the voltage, the current and the power parameter;

[0034] If the measurement instruction is received, the second double-path double-break switch is controlled to be turned on;

[0035] If the discharge instruction and the measurement instruction are received, the first double-path double-break switch and the second double-path double-break switch are controlled to be turned on.

[0036] In an embodiment, after the on-off state between the power circuit module and the input electrode and the on-off state between the impedance measurement module and the input electrode are controlled according to the control instruction, the method further includes:

[0037] An initial impedance value measured by the impedance measurement module for the first time is obtained;

[0038] According to the initial impedance value, a measurement range of the impedance range adjustment device is adjusted to obtain a target range;

[0039] A target impedance value is measured based on the target range.

[0040] In an embodiment, after the target impedance value is measured based on the target range, the method further includes:

[0041] The target impedance value is compared with an impedance threshold value, and if the target impedance value is less than the impedance threshold value, a vehicle cleaning reminding information is generated;

[0042] According to the target impedance value and an original set impedance value, an impedance attenuation ratio is determined, and according to the impedance attenuation ratio, a power supply power compensation ratio and a process time compensation ratio are determined.

[0043] The technical scheme provided in the application can have the following beneficial effects.

[0044] The power supply with impedance measurement provided in the application comprises a system control unit, a power circuit module and an impedance measurement module, wherein the output ends of the power circuit module and the impedance measurement module are connected with input electrodes of a carrier respectively, the system control unit is electrically connected with the power circuit module and the impedance measurement module respectively, and the system control unit is used for controlling the on-off state between the power circuit module and the impedance measurement module and the input electrodes according to the received control instruction, so that the power supply can not only supply power to the carrier, but also monitor the impedance value of the carrier, ensure that the carrier is in the best impedance state, avoid affecting the production quality of the deposition process due to the problems such as silicon wafer fragments, wafer falling and too small conduction impedance, improve the production efficiency and production quality, and improve the safety of process operators.

[0045] It should be understood that the foregoing general description and the following detailed description are only exemplary and explanatory, and are not limiting to the application. BRIEF DESCRIPTION OF DRAWINGS

[0046] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which like reference characters refer to like parts throughout and in which:

[0047] Figure 1 is a circuit structure schematic diagram of the power supply with impedance measurement shown in the embodiments of the application;

[0048] Figure 2 is a schematic diagram of the power supply with impedance measurement shown in the embodiments of the application for monitoring the carrier;

[0049] Figure 3 is a flowchart of the control method of the power supply with impedance measurement shown in the embodiments of the application;

[0050] Figure 4 is a structure schematic diagram of an electronic device shown in the embodiments of the application. DETAILED DESCRIPTION

[0051] The preferred embodiments of the application will be described in more detail below with reference to the accompanying drawings. Although the preferred embodiments of the application are shown in the drawings, it should be understood that the application can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to make the application more thorough and complete, and to fully convey the scope of the application to those skilled in the art.

[0052] The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting. As used in this application and the appended claims, the singular forms "a," "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will also be understood that the term "and / or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

[0053] It should be understood that although the terms "first", "second", "third" and the like can be used herein to describe various information, the information should not be limited to these terms. These terms are only used to distinguish one type of information from another type of information. For example, without departing from the scope of the application, first information can also be referred to as second information, and similarly, second information can also be referred to as first information. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0054] Embodiment one

[0055] The thin film deposited by the current deposition process has electrical conductivity, which leads to poor insulation between adjacent electrodes after covering the surface of the graphite boat, directly affecting the plasma discharge condition, and then reducing the number of uses of the graphite boat. Although improvements have been made on the insulation structure in the traditional technology, the impedance value of the graphite boat still decreases with the number of uses, which is one of the key problems of the equipment. At the same time, considering that the specifications of the graphite boat are not unified and the impedance changes rapidly, it is necessary to monitor the impedance value of the graphite boat online to adapt to the adaptive automatic adjustment of the process parameters with the number of uses of the graphite boat, which is also convenient for production of the graphite boat.

[0056] The existing impedance measurement method of the carrier including the graphite boat is to manually remove the electrode terminal after the process ends, and manually measure the impedance value between the two electrodes by using a multimeter. This method affects the process efficiency, and the leakage voltage of the power output may cause danger, and high temperature may also endanger the safety of the operator. Therefore, it is necessary to monitor the impedance value of the carrier to ensure the quality of the deposition process.

[0057] To solve the above problems, the embodiment of the application provides a power supply with impedance measurement, which can monitor the impedance of the carrier, ensure the optimal impedance state of the carrier, improve the efficiency of the deposition process, improve the safety of the process operator, and ensure the quality of the deposition process.

[0058] The technical solutions of the embodiments of the application are described in detail below with reference to the drawings.

[0059] Figure 1 is a circuit structure schematic diagram of the power supply with impedance measurement shown in the embodiments of the application.

[0060] Referring to Figure 1 The embodiment of the power supply with impedance measurement provided in the application comprises:

[0061] The system control unit, the power circuit module and the impedance measurement module, wherein the output terminals of the power circuit module and the impedance measurement module are connected with the input electrodes of the carrier, which can be a graphite boat or other equipment, and the actual application condition is required to be determined, and the unique limitation is not made here. It can be understood that the power circuit module is a module for supplying power to the carrier, and the impedance measurement module is a module for measuring the impedance of the carrier. The impedance measurement module can be a device containing a multimeter measurement chip or a multimeter. In actual application, the implementation method of impedance measurement is various, and the impedance measurement method needs to be set according to the actual application condition, and the unique limitation is not made here.

[0062] The system control unit can be regarded as the controller of the power supply, which has the function of transmitting and receiving signals. The system control unit is electrically connected with the power circuit module and the impedance measurement module, and is used for controlling the on-off state between the power circuit module, the impedance measurement module and the input electrodes according to the received control instruction. It can be understood that the power circuit module can supply power to the carrier when it is turned on, and the impedance measurement module can measure the impedance of the carrier when it is turned on.

[0063] The following beneficial effects can be seen from the above embodiment one:

[0064] The power supply with impedance measurement provided in the application comprises a system control unit, a power circuit module and an impedance measurement module, wherein the output terminals of the power circuit module and the impedance measurement module are connected with the input electrodes of the carrier, the system control unit is electrically connected with the power circuit module and the impedance measurement module, and the system control unit is used for controlling the on-off state between the power circuit module, the impedance measurement module and the input electrodes according to the received control instruction. Therefore, the power supply can not only supply power to the carrier, but also monitor the impedance value of the carrier, so as to ensure that the carrier is in the best impedance state, avoid affecting the production quality of the deposition process due to the problems such as silicon wafer fragments, wafer reversal and too small on-state impedance, improve the production efficiency and production quality, and improve the safety of process operators.

[0065] Embodiment two

[0066] In order to facilitate understanding, one embodiment of the power supply with impedance measurement is provided below for illustration. In actual application, the first double-path double-break switch and the second double-path double-break switch are set to control the on-off between the power circuit module, the impedance measurement module and the input electrodes.

[0067] Figure 1is a circuit structure schematic diagram of the power supply with impedance measurement shown in the embodiment of the present application, Figure 2 is a schematic diagram of the power supply with impedance measurement shown in the embodiment of the present application monitoring a vehicle.

[0068] Please refer to Figure 1 and Figure 2 , the second embodiment of the power supply with impedance measurement shown in the embodiment of the present application comprises:

[0069] In the embodiment of the present application, the power supply with impedance measurement further comprises a first double-path double-break switch and a second double-path double-break switch, wherein the first double-path double-break switch comprises switch S1 and switch S2, and the second double-path double-break switch comprises switch S3 and switch S4, the first double-path double-break switch is arranged between the power circuit module and the input electrode, and is used to control the on-off between the power circuit module and the input electrode, and the second double-path double-break switch is arranged between the impedance measurement module and the input electrode, and is used to control the on-off between the impedance measurement module and the input electrode. It can be understood that in the embodiment of the present application, the system control unit can control the opening and closing of the first double-path double-break switch and the second double-path double-break switch.

[0070] As shown in Figure 1 and Figure 2 , in the embodiment of the present application, switch S1 and switch S4 are connected to form a first node, and the first node is connected with the input electrode; switch S2 and switch S3 are connected to form a second node, and the second node is connected with the input electrode.

[0071] In the embodiment of the present application, a constant voltage source and an impedance range adjusting device can be arranged in the impedance measurement module, the constant voltage source is used to provide a constant voltage when measuring the impedance value, and the impedance range adjusting device is used to adjust the measurement range of the impedance value, so as to improve the accuracy of the measurement. The impedance measurement module can also be used to measure the voltage through the voltage source, and then calculate the resistance value through the divided voltage and the resistance value of the voltage dividing resistor, or the impedance measurement module is provided with a current source; or the impedance measurement module is provided with a special impedance measurement chip or a special measuring instrument; or the impedance measurement module is used to input the voltage and current on the input electrode, and determine the impedance value through the ratio of the voltage and current. It can be understood that in actual application, the impedance measurement module can also be provided with other devices for measuring impedance. The above description is only for illustration, and the impedance measurement device in the impedance measurement module should be determined according to the actual application, which is not limited to the above, and other circuits and methods for measuring resistance are also included.

[0072] Further, the system control unit is provided with a display device, which is used to display the impedance value measured by the impedance measurement module, so that the operator can monitor the impedance value at any time, and timely process the carrier or adjust the process parameters, which can include but are not limited to power supply power, process time length, and duty cycle, etc. and need to be adjusted according to the actual application, which is not uniquely limited here.

[0073] The impedance measurement module is a module arranged in the power supply, or the impedance measurement module is a module externally connected to the power supply. The external voltage source can also be connected in parallel. After the voltage dividing resistor and the carrier are connected in series, the divided voltage is measured, and then the carrier resistance is derived.

[0074] Embodiment three

[0075] Corresponding to the foregoing embodiments of the power supply with impedance measurement, the application also provides a control method of the power supply with impedance measurement and corresponding embodiments.

[0076] Figure 3 is a flowchart of the control method of the power supply with impedance measurement shown in the embodiments of the application.

[0077] Please refer to Figure 3 The control method of the power supply with impedance measurement shown in the embodiments of the application includes:

[0078] 301, receiving a control instruction;

[0079] In the embodiments of the application, the control instruction includes a discharge instruction and a measurement instruction. The discharge instruction refers to the instruction that the power circuit module needs to supply power to the carrier. The measurement instruction refers to the instruction that the impedance measurement module needs to measure the impedance of the carrier.

[0080] 302, controlling the on-off state between the power circuit module and the impedance measurement module and the input electrode according to the control instruction;

[0081] In the embodiments of the present application, the on-off of the first double-path double-break switch and / or the second double-path double-break switch is controlled according to the control instruction. Specifically, if no discharge instruction and measurement instruction are received, the first double-path double-break switch and the second double-path double-break switch are controlled to be turned off, so as to avoid that the non-output voltage is connected to the output end and damage the output end; if the discharge instruction is received, the first double-path double-break switch is controlled to be turned on, and the impedance value is determined according to the voltage, current and power parameters; if the measurement instruction is received, the second double-path double-break switch is controlled to be turned on; if the discharge instruction and the measurement instruction are received, the first double-path double-break switch and the second double-path double-break switch are controlled to be turned on. That is, the on-off of the power circuit module and the impedance measurement module is controlled by the switches S1, S2, S3 and S4, the power circuit module can be controlled to be connected or disconnected alone, or the impedance measurement module can be controlled to be connected or disconnected alone, or the power circuit module and the impedance measurement module can be controlled to be connected simultaneously, so that the power supply with impedance measurement can not only supply power to the carrier, but also monitor the impedance of the carrier online, or all the switches can be controlled to be completely disconnected, so as to prevent the user from connecting the input line to the output line by mistake. Preferably, the first double-path double-break switch is arranged between the power circuit module and the input electrode, and the second double-path double-break switch is arranged between the impedance measurement module and the input electrode. It can be understood that the switch S1 and the switch S2 of the first double-path double-break switch are closed or disconnected at the same time, and the switch S3 and the switch S4 of the second double-path double-break switch are closed or disconnected at the same time.

[0082] 303、acquire an initial impedance value measured by the impedance measurement module for the first time, adjust the measurement range of the impedance range adjustment device according to the initial impedance value to obtain a target range, and measure a target impedance value based on the target range;

[0083] It can be understood that the output of the impedance measurement module is applied to the input electrode, so that the impedance value can be measured. The impedance value measured for the first time may have some errors, because the measurement range may be too large or too small to measure. Therefore, an initial impedance value is measured roughly, the approximate range of the impedance of the carrier is predicted according to the initial impedance value, so that the original measurement range of the impedance range adjustment device is adjusted to a more suitable range corresponding to the position, so as to obtain a target range. Based on the target range, the impedance is measured again to obtain an accurate target impedance value, and the accuracy of the impedance value measurement is improved.

[0084] 304、compare the target impedance value with the impedance threshold value, and determine whether the carrier needs to be cleaned according to the comparison result;

[0085] If the target impedance value is less than the impedance threshold value, a vehicle cleaning reminding information is generated, in the embodiment of the present application, the impedance threshold value can be 3kΩ, in actual application, the impedance threshold value can be obtained in various ways, and a suitable value can be obtained according to actual application, which is not limited herein.

[0086] 305. Determine the impedance attenuation ratio according to the target impedance value and the original set impedance value, determine the power supply power compensation ratio and the process time compensation ratio according to the impedance attenuation ratio.

[0087] It can be understood that the original set impedance value can be regarded as a standard impedance value when the vehicle is shipped, and the impedance attenuation ratio can be obtained by subtracting the target impedance value from the original set impedance value, and then dividing the impedance difference by the original set impedance value. In actual application, other methods can also be used to calculate the impedance attenuation ratio, which needs to be determined according to actual application, and is not limited herein.

[0088] Further, in the embodiment of the present application, the impedance attenuation ratio can be used as the power supply power compensation ratio and the process time compensation ratio, so as to adjust the process flow. In actual application, other methods can also be used to determine the power supply power compensation ratio and the process time compensation ratio according to the impedance attenuation ratio, which needs to be determined according to actual application, and is not limited herein.

[0089] It can be understood that the pulse width compensation ratio, the temperature compensation ratio and the flow compensation ratio can also be determined according to the target impedance value, and the process flow and parameters can be dynamically adjusted according to the change of the target impedance value. The adjustment method needs to be determined according to actual application, and is not limited herein.

[0090] It can also be understood that there is no strict execution order between step 304 and step 305, and step 304 and step 305 can be executed simultaneously or sequentially, which needs to be determined according to actual application, and is not limited herein.

[0091] From the above embodiment three, the following beneficial effects can be obtained:

[0092] By receiving the control instruction, the on-off state between the power circuit module and the impedance measurement module and the input electrode is controlled according to the control instruction, the initial impedance value measured by the impedance measurement module for the first time is obtained, the measurement range of the impedance range adjusting device is adjusted according to the initial impedance value, the target range is obtained, the target impedance value is measured based on the target range, the target impedance value is compared with the impedance threshold value, whether the carrier needs to be cleaned is determined according to the comparison result, the impedance attenuation ratio is determined according to the target impedance value and the original set impedance value, the power supply power compensation ratio and the process time compensation ratio are determined according to the impedance attenuation ratio, so that the process of the deposition process can be dynamically compensated according to the target impedance value, and the carrier can be cleaned in time, the production efficiency and the production quality of the deposition process are ensured, and each process link can be monitored.

[0093] Embodiment four

[0094] Figure 4 is a structural schematic diagram of an electronic device shown in the embodiments of the present application.

[0095] Referring to Figure 4 , the electronic device 1000 includes a memory 1010 and a processor 1020.

[0096] The processor 1020 can be a central processing unit (CPU), and can also be other general-purpose processors, digital signal processors (DSPs), application specific integrated circuits (ASICs), field programmable gate arrays (FPGAs) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor.

[0097] The memory 1010 can include various types of storage units such as a system memory, a read-only memory (ROM), and a permanent storage device. Among them, the ROM can store static data or instructions required by the processor 1020 or other modules of the computer. The permanent storage device can be a rewritable storage device. The permanent storage device can be a non-volatile storage device that does not lose stored instructions and data even after the computer is powered off. In some embodiments, the permanent storage device uses a mass storage device (such as a magnetic or optical disk, a flash memory) as a permanent storage device. In some other embodiments, the permanent storage device can be a removable storage device (such as a floppy disk, an optical drive). The system memory can be a readable and writable storage device or a volatile readable and writable storage device, such as a dynamic random access memory. The system memory can store some or all instructions and data required by the processor during runtime. In addition, the memory 1010 can include a combination of any computer readable storage media, including various types of semiconductor storage chips (DRAM, SRAM, SDRAM, flash memory, programmable read-only memory), magnetic disks and / or optical disks. In some embodiments, the memory 1010 can include a readable and / or writable removable storage device, such as a compact disc (CD), a read-only digital versatile disc (such as DVD-ROM, double-layer DVD-ROM), a read-only Blu-ray disc, an ultra-density optical disc, a flash memory card (such as an SD card, a minSD card, a Micro-SD card, etc.), a magnetic floppy disk, etc. The computer readable storage medium does not include a carrier wave and a transient electronic signal transmitted through wireless or wired transmission.

[0098] The memory 1010 stores executable code, which, when processed by the processor 1020, can cause the processor 1020 to perform part or all of the above-mentioned methods.

[0099] The solutions of the present application have been described in detail above with reference to the accompanying drawings. In the above-described embodiments, the description of each embodiment focuses on different aspects, and the parts not described in detail in a certain embodiment can be referred to the related description of other embodiments. Those skilled in the art should also know that the actions and modules involved in the specification are not necessarily required by the present application. In addition, it can be understood that the steps in the method embodiments of the present application can be adjusted, combined and reduced in sequence according to actual needs, and the modules in the device embodiments of the present application can be combined, divided and reduced according to actual needs.

[0100] In addition, the method according to the present application can also be implemented as a computer program or computer program product, which includes computer program code instructions for executing part or all of the steps of the above-mentioned methods of the present application.

[0101] Alternatively, the application can also be implemented as a non-transitory machine readable storage medium (or computer readable storage medium, or machine readable storage medium) on which an executable code (or computer program, or computer instruction code) is stored, and when the executable code (or computer program, or computer instruction code) is executed by a processor of an electronic device (or electronic device, server, etc.), the processor is caused to execute part or all of the steps of the above method according to the application.

[0102] Those skilled in the art will further appreciate that the various illustrative logical blocks, modules, circuits, and algorithm steps described in connection with the present disclosure can be implemented as electronic hardware, computer software, or combinations of both.

[0103] The flow diagrams and block diagrams in the drawings are presented to illustrate the architecture, functionality, and operations of possible implementations of systems and methods according to various embodiments of the present application. In this regard, each block in the flow diagrams and block diagrams can represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical functions. It should also be noted that in some alternative implementations, the functions noted in the blocks can occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently or the blocks may be executed in the reverse order, depending on the functionality involved. It will also be noted that each block of the block diagrams and / or flowchart illustrations, and combinations thereof, can be implemented by special purpose hardware-based systems that perform the specified functions or operations, or combinations of special purpose hardware and computer instructions.

[0104] The embodiments of the present application have been described above, the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes are obvious to those skilled in the art without departing from the scope and spirit of the described embodiments. The choice of terms used herein is intended to best explain the principles, practical applications, or improvements to the technology in the market of the embodiments, or to enable other ordinary skilled in the art to understand the embodiments disclosed herein.

Claims

1. A power supply with impedance measurement, characterized in that, The power supply with impedance measurement comprises: a system control unit, a power circuit module, and an impedance measurement module; the output ends of the power circuit module and the impedance measurement module are connected with the input electrode of the vehicle respectively; the system control unit is electrically connected with the power circuit module and the impedance measurement module respectively, and is used for controlling the on-off state between the power circuit module, the impedance measurement module, and the input electrode according to the received control instruction; the power supply with impedance measurement further comprises: a first double-path double-break switch and a second double-path double-break switch; the first double-path double-break switch comprises a switch S1 and a switch S2; the second double-path double-break switch comprises a switch S3 and a switch S4; the first double-path double-break switch is arranged between the power circuit module and the input electrode, and is used for controlling the on-off state between the power circuit module and the input electrode; the second double-path double-break switch is arranged between the impedance measurement module and the input electrode, and is used for controlling the on-off state between the impedance measurement module and the input electrode.

2. The power supply with impedance measurement according to claim 1, wherein: the switch S1 and the switch S4 are connected to form a first node, and the first node is connected with the input electrode; the switch S2 and the switch S3 are connected to form a second node, and the second node is connected with the input electrode.

3. The power supply with impedance measurement according to claim 1, wherein: a constant voltage source and an impedance range adjusting device are arranged in the impedance measurement module, the constant voltage source is used for providing a constant voltage when measuring the impedance value, and the impedance range adjusting device is used for adjusting the measurement range of the impedance value.

4. The power supply with impedance measurement according to claim 1, wherein: a voltage source is arranged in the impedance measurement module to perform voltage division measurement, and the resistance value is obtained by reverse calculation according to the divided voltage and the resistance value of the voltage division resistor; or a current source is arranged in the impedance measurement module; or a special impedance measurement chip or a special measuring instrument is arranged in the impedance measurement module; or the impedance measurement module is used for directly measuring the output of the power part, and the impedance value is determined by calculating the ratio of the voltage and the current.

5. The power supply with impedance measurement according to claim 1, wherein: a display device is arranged in the system control unit, and the display device is used for displaying the impedance value measured by the impedance measurement module.

6. The power supply with impedance measurement according to claim 1, wherein: the impedance measurement module is a module arranged inside the power supply, or the impedance measurement module is a module externally connected to the power supply.

7. A control method of an impedance measuring power supply, characterized by, The control method of the power supply with impedance measurement according to any one of claims 1-6 comprises: receiving a control instruction, wherein the control instruction comprises a discharge instruction and a measurement instruction; controlling the on-off state between the power circuit module, the impedance measurement module, and the input electrode of the vehicle according to the control instruction.

8. The control method of the power supply with impedance measurement according to claim 7, wherein: The control of the power circuit module and the on-off state between the impedance measurement module and the input electrode according to the control instruction comprises: The on-off of the first double-path double-break switch and / or the second double-path double-break switch is controlled according to the control instruction; the first double-path double-break switch is arranged between the power circuit module and the input electrode, and the second double-path double-break switch is arranged between the impedance measurement module and the input electrode.

9. The control method of the impedance measurement power supply according to claim 8, wherein The control of the on-off of the first double-path double-break switch and / or the second double-path double-break switch according to the control instruction comprises: If the discharge instruction and the measurement instruction are not received, the first double-path double-break switch and the second double-path double-break switch are controlled to be turned off to avoid the non-output voltage connected to the output end and damage to the output end; If the discharge instruction is received, the first double-path double-break switch is controlled to be turned on, and the impedance value is determined by the voltage, current and power parameters; If the measurement instruction is received, the second double-path double-break switch is controlled to be turned on; If the discharge instruction and the measurement instruction are received, the first double-path double-break switch and the second double-path double-break switch are controlled to be turned on.

10. The control method of the impedance measurement power supply according to claim 7, wherein After the control of the on-off state between the power circuit module and the impedance measurement module and the input electrode according to the control instruction, the method further comprises: An initial impedance value measured by the impedance measurement module for the first time is obtained; The measurement range of the impedance range adjustment device is adjusted according to the initial impedance value to obtain a target range; A target impedance value is measured based on the target range.

11. The control method of the impedance measurement power supply according to claim 10, wherein After the target impedance value is measured based on the target range, the method further comprises: The target impedance value is compared with an impedance threshold value, and if the target impedance value is less than the impedance threshold value, a vehicle cleaning reminder information is generated; The impedance decay ratio is determined according to the target impedance value and the original set impedance value, and the power supply power compensation ratio and the process time compensation ratio are determined according to the impedance decay ratio.

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