A cooling plate with an embedded pipeline and a preparation method thereof

Abstract

The present invention relates to the technical field of cooling plates, and discloses an embedded pipeline cooling plate and a preparation method thereof, which include: a U-shaped chassis, a disc core, a spiral water channel cover plate, a spiral water channel, a water outlet pipe, a water inlet pipe, a water outlet avoidance hole, a water inlet avoidance hole, a positioning pin hole and a through hole. All these components are made of PVDF material. Through hot melt welding and infrared laser welding technologies, the components of the cooling plate are welded seamlessly. Through the welding and combination of its own base materials, the minimum repulsion between its own materials is ensured and the tight combination between each component is improved. This cooling plate can greatly improve the cooling effect and aging of wafers, greatly improve the durability of the cooling plate and the non-damage of wafer sheets, and can avoid the introduction of impurities during wafer processing, etc.

Description

Technical Field

[0001] The present invention relates to the technical field of cooling plates, and particularly relates to a cooling plate with an embedded pipeline and a preparation method thereof. Background Art

[0002] At present, with the rapid development of technology, the integrated circuit industry is booming. Currently, the chips on the market are mainly made of silicon-based or compound semiconductor materials. Silicon-based or compound semiconductor chips are now designed and manufactured using 6-inch, 8-inch, and 12-inch wafers. In the production and manufacturing of these integrated circuit chips, heating and cooling processes are often involved. Heating is generally used to deposit various thin films or dope ions on the wafers. After the thin film deposition or ion doping, if natural cooling is adopted, it takes a long time to cool, and the cooling effect and cooling time of the wafers are important links in the entire chip processing, which has a great impact on the timeliness of integrated circuit manufacturing; if a cooling device is used for cooling, the cost is relatively high, and the cooling device generally uses cooling pipes for serpentine or circular routing. Although this pipe routing can cool down and the integrally formed pipeline can avoid the influence of welding and leakage, the cooling of the pipeline is not uniform, and it occupies a relatively large space. In the micro-nano size of integrated circuits, several chip units are arranged. If the cooling is not uniform, it will have a great impact on the yield of the chips.

[0003] In cooling plates, water circulation is often used for cooling. The flow rate and intensity inside the water channels will directly affect the heat dissipation efficiency of the plate body, and there should be no abnormal problems such as welding defects and leakage in the water channels. This places strict requirements on the material of the cooling plate, its processing requirements, and its later use requirements. Therefore, it is also crucial to find a reasonable cooling plate material. Polyvinylidene fluoride (PVDF) is a highly non-reactive thermoplastic fluoropolymer, which can be synthesized by the polymerization reaction of 1,1-difluoroethylene and has excellent properties such as anti-aging, chemical resistance, weather resistance, and resistance to ultraviolet radiation. It can be used as an engineering plastic for making sealing rings, corrosion-resistant equipment, capacitors, and also as coating materials, insulating materials, and ion exchange membrane materials, etc. It is quite difficult to process a large-area cooling plate from polyvinylidene fluoride material, and it is difficult for traditional processing techniques to process a cooling plate with excellent performance. Summary of the Invention

[0004] The present invention selects PVDF material, and through milling technology, drilling technology, welding technology and other multi-processes, processes the U-shaped chassis, disk core, spiral water channel cover plate, spiral water channel, water outlet pipe, water inlet pipe, water outlet avoidance hole, water inlet avoidance hole, positioning pin hole and through hole. Combining hot melt welding technology and infrared laser welding technology, the various components of the cooling disk are welded and spliced correspondingly to realize the preparation of the cooling disk. This cooling disk can work durably and efficiently, evenly cool the wafer, and will not introduce impurities, realizing clean cooling, etc.

[0005] A cooling disk with an embedded pipeline, the cooling disk includes: a U-shaped chassis, a U-shaped disk core, a spiral water channel cover plate, a spiral water channel, a water outlet pipe, a water inlet pipe, a water outlet avoidance hole, a water inlet avoidance hole, a positioning pin hole and a through hole. Through holes are provided around the U-shaped chassis, and the through holes are used to define the position of the U-shaped chassis and the associated equipment and the discharge of debris inside the U-shaped chassis. The spiral water channel is fixedly connected inside the U-shaped disk core, and the U-shaped disk core is completely connected to the spiral water channel. The water outlet pipe and the water inlet pipe are respectively connected to both ends of the spiral water channel, and both the water outlet pipe and the water inlet pipe are fixedly connected to the U-shaped disk core. The spiral water channel cover plate is respectively provided with a water outlet avoidance hole and a water inlet avoidance hole, and the water outlet avoidance hole and the water inlet avoidance hole cooperate with the corresponding water outlet pipe and water inlet pipe. The spiral water channel cover plate is fixedly connected to the U-shaped disk core equipped with the spiral water channel, the U-shaped disk core is fixedly connected to the U-shaped chassis, the positioning pin hole penetrates through the U-shaped chassis, the spiral water channel cover plate and the U-shaped disk core, and the U-shaped disk core, the spiral water channel, the spiral water channel cover plate, the water outlet pipe and the water inlet pipe form a smooth water channel from water inlet to water outlet, and form a closed space except for the water outlet and water inlet.

[0006] Further, the center of the U-shaped disk core is on the same straight line as the center of the U-shaped chassis.

[0007] Further, the U-shaped disk core, the spiral water channel cover plate and the U-shaped chassis are all circular.

[0008] Further, the U-shaped disk core, the U-shaped chassis, the spiral water channel cover plate, the spiral water channel, the water outlet pipe and the water inlet pipe are all made of organic materials.

[0009] Further, the organic material selects polyvinylidene fluoride (PVDF).

[0010] Further, the fixed connection selects the fixed connection processed by welding technology.

[0011] Further, the fixed connection selects the welding of hot melt welding and / or the welding of an infrared laser.

[0012] Further, the welding of the hot melt welding includes solder and a welding heater, and the solder is made of polyvinylidene fluoride (PVDF) material.

[0013] Further, the thickness of the spiral water channel wall is less than the width of the spiral water channel.

[0014] Further, the thickness of the spiral water channel wall is 0.4 - 0.8 times the width of the spiral water channel.

[0015] Further, the inlet pipe is fixedly connected to the center of the U-shaped disc core, and the outlet pipe is fixedly connected to the edge of the U-shaped disc core.

[0016] Further, the spiral water channel wall is a square water channel wall.

[0017] Further, the inner side of the bottom plate of the U-shaped disc core is arranged as a plane.

[0018] Further, the contact surfaces where the U-shaped bottom plate is fixedly connected to the U-shaped disc core are all arranged as planes.

[0019] Further, from the connection edge of the U-shaped bottom plate and the U-shaped disc core to the inner side of the U-shaped bottom plate wall is arranged as an inclined surface, and the inclined surface slopes downward towards the U-shaped bottom plate wall.

[0020] Further, the cutting angle of the inclined surface is selected to be 5 - 15°.

[0021] Further, the U-shaped disc core is selected as a 6-inch, 8-inch or 12-inch disc core.

[0022] Further, the ratio of the diameter of the U-shaped disc core to the diameter of the U-shaped bottom plate is 2:3 - 4:5.

[0023] A preparation method of a cooling disc with an embedded pipeline, the steps are as follows:

[0024] Step 1: Making the blank

[0025] According to different specifications of the blank materials, round ingots made of PVDF materials with different specifications are selected, placed on a cutting machine tool, and cut according to their corresponding specification sizes using the large-tooth cutting tool on the cutting machine tool, and then cut with the assistance of cutting fluid to cut out disc blanks with specification sizes as the original blanks for subsequent processing of the disc core, spiral water channel cover plate and bottom plate;

[0026] Step 2: Making the bottom plate

[0027] Select the original chassis blank from Step 1, place it on a milling and grinding machine tool, and firmly fix it with a fixture; use the cooperation of the face milling cutter and the spherical milling cutter on the milling and grinding machine tool to mill the original chassis blank multiple times; select a small-diameter spherical milling cutter, adjust the center of its running trajectory to the central axis with the center of the original chassis blank, place the small-diameter spherical milling cutter perpendicular to the surface of the original chassis blank, and at a position corresponding to the outer diameter of the disc core, start the cutter to mill one circle to form the first annular groove body; select a large-diameter spherical milling cutter, adjust the center of the running trajectory of the large-diameter spherical milling cutter to the central axis with the center of the original chassis blank. The large-diameter spherical milling cutter can freely switch the size of the running trajectory. Place the large-diameter spherical milling cutter on the trajectory passed by the small-diameter spherical milling cutter, start the cutter to mill, and mill according to the set thickness and milling range to complete the first grooving process and form a shallow groove U-shaped disc blank; select a large face milling cutter, adjust its center to the central axis with the center of the original chassis blank, and perform plane trimming of the shallow groove U-shaped disc blank and deep groove machining at the center of the shallow groove U-shaped disc blank according to the set thickness and range to machine a stepped groove body, complete the trimming of the first grooving process, and form a deep groove U-shaped disc blank. The bottom surface of the deep groove U-shaped disc blank is a plane; select a spiral milling cutter, adjust the center of its running trajectory to the central axis with the center of the original chassis blank, drill through holes in the steps of the original chassis blank, and according to the set machining program, the spiral milling cutter machines the required through holes on the steps; select a small face milling cutter, adjust the center of its running trajectory to the central axis with the center of the original chassis blank, and according to the set machining route, machine the through hole wall, cut the steps, and make the inclined surface. Finally, a through hole wall with a certain thickness and an inclined surface with a higher inner part and a lower outer part at the steps are realized, and the inner side of this surface is flush with the bottom surface of the deep groove U-shaped disc blank to machine the disc blank chassis; use the chamfering milling cutter on the milling and grinding machine tool to perform chamfering cutting on the exposed four edges of the disc blank chassis, and the carrier table cooperates with the cutter to run and stop, and finally machine a U-shaped chassis.

[0028] Step 3: Manufacture the disc core

[0029] Select the core blank in Step 1, place it on the stage of the milling machine tool, and firmly fix it with a tooling fixture. Select a double straight-edge milling cutter from the flat milling cutter and straight-edge milling cutter on the milling machine tool, adjust the center of its running trajectory to the center axis of the core blank, and perform edge cutting on the core blank, trimming it to the size of the bottom surface of the deep groove U-shaped disc blank in Step 2. Select a large flat milling cutter, adjust the center of its running trajectory to the center axis of the core blank, start the large flat milling cutter, and let the milling cutter groove on the core blank. Select a small flat milling cutter, adjust the center of its running trajectory to the center axis of the core blank, start the small flat milling cutter, and perform groove trimming to form a groove disc blank with a flat bottom surface. Use the chamfering milling cutter on the milling machine tool to perform chamfering cutting on the exposed four edges of the groove blank disc, and the stage rotates and stops in cooperation with the chamfering milling cutter to finally machine a U-shaped core;

[0030] Step 4: Manufacture the water channel wall

[0031] Select the spiral water channel blank in Step 1, use a small-tooth cutting tool to cut the spiral water channel wall, cut out paired square water channel walls, and polish them to make the side walls form flat water channel walls;

[0032] Step 5: Manufacture the spiral water channel cover plate

[0033] Select the spiral water channel cover plate blank in Step 1, place it on the stage of the milling machine tool, and firmly fix it with a tooling fixture. Select a small flat milling cutter, adjust the center of its running trajectory to the center axis of the core blank, start the small flat milling cutter, and perform milling and trimming on the disc surface. Select a double straight-edge milling cutter to trim its edge to the required size. Then use a large-diameter drill bit tool to drill out the water outlet avoidance hole and the water inlet avoidance hole according to the positions of the water outlet avoidance hole and the water inlet avoidance hole to prepare the spiral water channel cover plate;

[0034] Step 6: Forming of the spiral water channel

[0035] Select the water channel wall in Step 4, perform softening treatment on it, then put it into the spiral water channel mold for spiral shaping of the square water channel wall, perform spiral bending of the water channel wall at an appropriate temperature, and after bending and forming, cool it to room temperature. Combine the two spiral water channel walls to form a spiral water channel;

[0036] Step 7: Combination of the spiral water channel and the core

[0037] Select the core of the disc in Step 3 and the spiral water channel in Step 6. Place the spiral water channel inside the U-shaped disc core, and ensure that the spiral water channel and the center of the disc core are on the same central axis. Select PVDF welding wire and use the hot melt welding technique to weld the spiral water channel and the disc core. Weld evenly on both sides of the water channel wall. After welding is completed, cool to room temperature and use a trimming milling cutter to trim the welded area to complete the welding of the spiral water channel and the disc core;

[0038] Step 8: Assembly of the outlet pipe and the inlet pipe

[0039] Select PVDF pipes and use a small-tooth cutting milling cutter to cut them into pipes of the required specifications. Select two pipes and use a small-diameter drill bit milling cutter to drill holes at the required positions on their side walls. Select the disc core welded with the spiral water channel in Step 6 and weld the water outlet and water inlet on the spiral water channel to the corresponding outlet pipe and inlet pipe respectively. At this time, use the hot melt welding technique of PVDF welding wire for welding. At the same time, also weld the outlet pipe and the inlet pipe to the inner side of the disc core in contact to complete the combination of the outlet pipe and the inlet pipe with the disc core having the spiral water channel;

[0040] Step 9: Assembly of the spiral water channel cover plate

[0041] Select the disc core with the spiral water channel, the outlet pipe and the inlet pipe in Step 8, and then select the spiral water channel cover plate in Step 5. Cover the spiral water channel cover plate on the disc core according to the alignment of the outlet pipe and the inlet pipe. Use the welding technique of an infrared laser to weld the spiral water channel cover plate and the spiral water channel wall. Select an absorbent material and evenly coat a thin layer of absorbent material on the upper surface of the spiral water channel wall and the lower surface of the spiral water channel cover plate corresponding to the spiral water channel wall. This absorbent material is used to absorb the heat energy of the infrared light of the infrared laser so that the local PVDF material of the spiral water channel cover plate and the spiral water channel wall is highly softened for softening welding. The infrared laser slowly welds the spiral cover plate and the spiral water channel wall with its local hot melt. To avoid the PVDF being in a softened state for a long time and the area increasing during the welding of the infrared laser, use liquid nitrogen to quickly cool the periphery and after the welding of the infrared laser. Finally, realize the welding of the spiral water channel cover plate and the spiral water channel wall. Then use the combination of PVDF welding wire and hot melt welding technique to weld the edges of the spiral water channel cover plate and the disc core and the edges of the outlet pipe and the inlet pipe to prepare the disc core of the cooling disc;

[0042] Step 10: Combination of the disc core of the cooling disc and the chassis

[0043] Select the disc core of the cooling disc in Step 9 and the chassis in Step 2 to align the central axes. Use PVDF welding wire and hot melt welding technique to weld the edges, and then use a trimming milling cutter to trim the welded area to complete the production of the cooling disc;

[0044] Step 11: Hydrostatic pressure detection

[0045] Flush and test the cooling plate in Step 10, and the hydrostatic pressure can reach 3 Mpa.

[0046] Furthermore, both the large-tooth cutting tool and the small-tooth cutting tool are cutting saws.

[0047] Furthermore, the large-diameter spherical milling cutter is of the DF300 model, and the small-diameter spherical milling cutter is of the DF600 model.

[0048] Furthermore, the large-scale face milling cutter is the MWEMF63 milling cutter, and the small-scale face milling cutter is the MWEMF50 milling cutter.

[0049] Furthermore, the helical milling cutter is the HS-D01 milling cutter.

[0050] Furthermore, the chamfer milling cutter is the TCM milling cutter.

[0051] Beneficial effects

[0052] The present invention preferably selects a U-shaped chassis, a disk core, a spiral water channel cover plate, a spiral water channel, a water outlet pipe, a water inlet pipe, a water outlet avoidance hole, a water inlet avoidance hole, a positioning pin hole, and a through hole, and combines hot melt welding and infrared laser welding technologies to realize the preparation of the cooling plate. The cooling plate can work durably and efficiently to cool the wafer, etc.; and these components are all made of PVDF material. Through hot melt welding and infrared laser welding technologies, the components of the cooling plate are welded seamlessly. Through the welding and combination of its own base materials, the minimum repulsion between its own materials is ensured and the tight combination between each component is improved. The cooling plate can greatly improve the cooling effect and aging of the wafer, greatly improve the durability of the cooling plate and the non-damage to the wafer, and can avoid the introduction of impurities during wafer processing, etc. Description of the drawings

[0053] Figure 1 It is a schematic diagram of a cooling plate with an embedded pipeline according to the present invention.

[0054] Figure 2 It is a schematic diagram of the disk core-cover plate-water channel of a cooling plate with an embedded pipeline according to the present invention.

[0055] Figure 3 It is a schematic diagram of the disk core of a cooling plate with an embedded pipeline according to the present invention.

[0056] Figure 4 It is a schematic diagram of the disk core-cover plate of a cooling plate with an embedded pipeline according to the present invention.

[0057] Figure 5 It is a schematic diagram of the cover plate of a cooling plate with an embedded pipeline according to the present invention.

[0058] Figure 6 Schematic diagram of the core - water channel of a cooling disk with an embedded pipeline according to the present invention.

[0059] Figure 7 Schematic diagram of the preparation process of a cooling disk with an embedded pipeline according to the present invention.

[0060] Description of the drawings: 1. U - shaped core; 2. Spiral water - channel cover plate; 3. Positioning pin hole; 4. Water - outlet avoidance hole; 5. Water - outlet pipe; 6. Water - inlet avoidance hole; 7. Water - inlet pipe; 9. U - shaped bottom plate; 10. Through - hole; 11. Core - plate groove; 91. Spiral water - channel wall; 01. Blank making; 02. Bottom - plate making; 03. Core making; 04. Water - channel wall making; 05. Spiral water - channel cover - plate making; 06. Molding of the spiral water - channel; 07. Combination of the spiral water - channel and the core; 08. Splicing of the water - outlet pipe and the water - inlet pipe; 09. Splicing of the spiral water - channel cover plate; 010. Combination of the core and the bottom plate of the cooling disk; 011. Water - pressure detection. Detailed implementation manners

[0061] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0062] In the present invention, "a plurality of" means two or more. "And / or": Describes the association relationship of associated objects, indicating that three relationships can exist. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. The character " / " generally represents an "or" relationship between the associated objects before and after.

[0063] Refer to Figures 1-6 As shown, a cooling disk with an embedded pipeline, the cooling disk includes: a U - shaped bottom plate 9, a U - shaped core 1, a spiral water - channel cover plate 2, a spiral water - channel, a water - outlet pipe 5, a water - inlet pipe 7, a water - outlet avoidance hole 4, a water - inlet avoidance hole 6, a positioning pin hole 3 and a through - hole 10. The U - shaped core 1, the spiral water - channel cover plate 2 and the U - shaped bottom plate 9 are all circular. The U - shaped core 1, the U - shaped bottom plate 9, the spiral water - channel cover plate 2, the spiral water - channel, the water - outlet pipe 5 and the water - inlet pipe 7 are all preferably made of polyvinylidene fluoride (PVDF). The U - shaped core 1 is preferably a 6 - inch, 8 - inch or 12 - inch core.

[0064] Through holes 10 are provided around the U-shaped chassis 9. The through holes 10 are arranged on the inner side of the side wall of the U-shaped chassis 9. Inside the U-shaped disc core 1, the spiral water channel wall 91 is fixedly connected by hot melt welding technology and PVDF welding wires. The spiral water channel wall 91 forms a spiral water channel. An outlet pipe 5 and an inlet pipe 7 are respectively arranged at both ends of the spiral water channel. The inlet pipe 7 is arranged at the center of the U-shaped disc core 1, and the outlet pipe 5 is arranged at the edge of the U-shaped disc core 1. Both the outlet pipe 5 and the inlet pipe 7 are fixedly connected to the U-shaped core disc 1 by hot melt welding technology and PVDF welding wires. Water outlet avoidance holes 4 and water inlet avoidance holes 6 are respectively arranged on the spiral water channel cover plate 2. The water outlet avoidance holes 4 and the water inlet avoidance holes 6 are matched with the corresponding outlet pipe 7 and inlet pipe 5. The spiral water channel cover plate 2 is quickly welded and fixedly connected to the U-shaped core disc 1 with a spiral water channel through the welding of an infrared laser and the cooling of nitrogen. The outer surface of the U-shaped core disc 1 is fixedly connected to the inside of the U-shaped chassis 9 by hot melt welding technology and PVDF welding wires, and the center of the U-shaped disc core 1 and the center of the U-shaped chassis 9 are on the same central axis. The positioning pin holes 3 penetrate through the U-shaped chassis 9, the spiral water channel cover plate 2, the spiral water channel and the U-shaped disc core 1.

[0065] A preparation method of a cooling disc with an embedded pipeline, refer to Figure 7 , and the specific steps are as follows:

[0066] Step 1: Blank making

[0067] According to the different specifications of the blank materials, round ingots made of PVDF materials with different specifications are selected and placed on a cutting machine tool. According to their corresponding specification sizes, large tooth cutting knives on the cutting machine tool are used, and cutting auxiliary liquid is used for cutting to cut out disc blanks with specification sizes as the original blanks for the subsequent processing of the disc core, spiral water channel cover plate and chassis;

[0068] Step 2: Chassis making

[0069] Select the original chassis blank from Step 1, place it on a milling and grinding machine tool, and firmly fix it with a fixture; use the cooperation of a face milling cutter and a spherical milling cutter on the milling and grinding machine tool to mill the original chassis blank multiple times; select a small-diameter spherical milling cutter, adjust the center of its running trajectory to the central axis with the center of the original chassis blank, place the small-diameter spherical milling cutter perpendicular to the surface of the original chassis blank, and at a position corresponding to the outer diameter of the disc core, start the cutter to mill one circle to form a first annular groove body; select a large-diameter spherical milling cutter, adjust the center of the running trajectory of the large-diameter spherical milling cutter to the central axis with the center of the original chassis blank. The large-diameter spherical milling cutter can freely switch the size of the running trajectory. Place the large-diameter spherical milling cutter on the trajectory passed by the small-diameter spherical milling cutter, start the cutter to mill, and mill according to the set thickness and milling range to complete the first grooving process and form a shallow groove U-shaped disc blank; select a large face milling cutter, adjust its center to the central axis with the center of the original chassis blank, and perform plane trimming of the shallow groove U-shaped disc blank and deep groove machining at the center of the shallow groove U-shaped disc blank according to the set thickness and range to machine a stepped groove body, complete the trimming of the first grooving process, and form a deep groove U-shaped disc blank. The bottom surface of the deep groove U-shaped disc blank is a plane; select a spiral milling cutter, adjust the center of its running trajectory to the central axis with the center of the original chassis blank, drill a through hole in the step of the original chassis blank, and according to the set machining program, the spiral milling cutter machines the required through hole on the step; select a small face milling cutter, adjust the center of its running trajectory to the central axis with the center of the original chassis blank, and according to the set machining route, machine the through hole wall, cut the step, and make the inclined surface. Finally, a through hole wall with a certain thickness and an inclined surface with a higher inner side and a lower outer side at the step are realized, and the inner side of this surface is flush with the bottom surface of the deep groove U-shaped disc blank to machine the disc blank chassis; use a chamfering milling cutter on the milling and grinding machine tool to perform chamfering cutting on the exposed four edges of the disc blank chassis, and the carrier table cooperates with the cutter to rotate and stop, and finally machine a U-shaped chassis;

[0070] Step 3: Manufacture the disc core

[0071] Select the core blank in Step 1, place it on the stage of the milling machine tool, and firmly fix it with a tooling fixture. Select a double straight-edge milling cutter from the flat milling cutter and straight-edge milling cutter on the milling machine tool, adjust the center of its running trajectory to the central axis of the core blank, and perform edge cutting on the core blank, trimming it to the size of the bottom surface of the deep groove U-shaped disk blank in Step 2; select a large flat milling cutter, adjust the center of its running trajectory to the central axis of the core blank, start the large flat milling cutter, and let the milling cutter cut a groove on the core blank. Then select a small flat milling cutter, adjust the center of its running trajectory to the central axis of the core blank, start the small flat milling cutter, and perform groove trimming to form a groove disk blank with a flat bottom surface; use a chamfering milling cutter on the milling machine tool to perform chamfering cutting on the exposed four edges of the groove blank disk, and the stage rotates and stops in cooperation with this chamfering milling cutter to finally machine a U-shaped core;

[0072] Step 4: Manufacture the water channel wall

[0073] Select the spiral water channel blank in Step 1, use a small-tooth cutting tool to cut the spiral water channel wall, cut out paired square water channel walls, and polish them to make the side walls form flat water channel walls;

[0074] Step 5: Manufacture the spiral water channel cover plate

[0075] Select the spiral water channel cover plate blank in Step 1, place it on the stage of the milling machine tool, and firmly fix it with a tooling fixture. Select a small flat milling cutter, adjust the center of its running trajectory to the central axis of the core blank, start the small flat milling cutter, and perform milling and trimming on the disk surface. Select a double straight-edge milling cutter to trim its edge to the required size. Then use a large-diameter drill bit tool to drill out the water outlet avoidance hole and the water inlet avoidance hole according to the positions of the water outlet avoidance hole and the water inlet avoidance hole to prepare the spiral water channel cover plate;

[0076] Step 6: Forming of the spiral water channel

[0077] Select the water channel wall in Step 4, perform softening treatment on it, then put it into a spiral water channel mold, perform spiral shaping of the square water channel wall, perform spiral bending of the water channel wall at an appropriate temperature, and after bending and forming, cool it to room temperature, and combine the two spiral water channel walls to form a spiral water channel;

[0078] Step 7: Combination of the spiral water channel and the core

[0079] Select the core of step 3 and the spiral water channel of step 6. Place the spiral water channel inside the U-shaped core, and ensure that the spiral water channel and the center of the core are on the same central axis. Select PVDF welding wire and use the hot melt welding technology to weld the spiral water channel and the core. Weld evenly on both sides of the water channel wall. After welding is completed, cool to room temperature and use a trimming milling cutter to trim the welding area to complete the welding of the spiral water channel and the core.

[0080] Step 8: Assembly of the outlet pipe and the inlet pipe

[0081] Select PVDF pipes and use a small-tooth cutting milling cutter to cut them into pipes of the required specifications. Select two pipes and use a small-diameter drill bit milling cutter to drill holes at the required positions on their side walls. Select the core welded with the spiral water channel in step 6 and weld the water outlet and water inlet on the spiral water channel to the corresponding outlet pipe and inlet pipe respectively. At this time, use the hot melt welding technology of PVDF welding wire for welding. At the same time, also weld the outlet pipe and the inlet pipe to the inner side of the core in contact to complete the combination of the outlet pipe and the inlet pipe with the core with the spiral water channel.

[0082] Step 9: Assembly of the spiral water channel cover plate

[0083] Select the core with the spiral water channel, the outlet pipe and the inlet pipe in step 8, and then select the spiral water channel cover plate in step 5. Cover the spiral water channel cover plate on the core according to the alignment of the outlet pipe and the inlet pipe. Use the welding technology of an infrared laser to weld the spiral water channel cover plate and the spiral water channel wall. Select an absorbent material and evenly coat a thin layer of absorbent material on the upper surface of the spiral water channel wall and the lower surface of the spiral water channel cover plate corresponding to the spiral water channel wall. This absorbent material is used to absorb the heat energy of the infrared light of the infrared laser so that the local PVDF material of the spiral water channel cover plate and the spiral water channel wall is highly softened for softening welding. The infrared laser slowly welds the spiral cover plate and the spiral water channel wall with its local hot melting. In order to prevent the PVDF from being in a softened state for a long time and the area increasing during the welding of the infrared laser, use liquid nitrogen to quickly cool the periphery and after the welding of the infrared laser. Finally, realize the welding of the spiral water channel cover plate and the spiral water channel wall. Then, combine the PVDF welding wire with the hot melt welding technology to weld the edges of the spiral water channel cover plate and the core and the edges of the outlet pipe and the inlet pipe to prepare the core of the cooling plate.

[0084] Step 10: Combination of the core of the cooling plate and the chassis

[0085] Select the core of the cooling plate in step 9 and the chassis in step 2 to align the central axes, use PVDF welding wire and hot melt welding technology for edge welding, and then use a trimming milling cutter to trim the welding area to complete the production of the cooling plate.

[0086] Step 11: Water pressure detection

[0087] Perform a flushing test on the cooling tray in Step 10, and the water pressure can reach 3 Mpa.

[0088] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cooling plate with an embedded pipe, characterized in that, The cooling plate includes: a U-shaped chassis, a U-shaped core, a spiral water channel cover plate, spiral water channels, a water outlet pipe, a water inlet pipe, a water outlet avoidance hole, a water inlet avoidance hole, a positioning pin hole, and a through hole. Through holes are provided around the U-shaped chassis. The through holes are used to define the position of the U-shaped chassis and the associated equipment and to discharge debris inside the U-shaped chassis. The spiral water channels are fixedly connected inside the U-shaped core, and the U-shaped core is completely connected to the spiral water channels. The water outlet pipe and the water inlet pipe are respectively connected to both ends of the spiral water channels, and both the water outlet pipe and the water inlet pipe are fixedly connected to the U-shaped core. The spiral water channel cover plate is respectively provided with a water outlet avoidance hole and a water inlet avoidance hole. The water outlet avoidance hole and the water inlet avoidance hole cooperate with the corresponding water outlet pipe and water inlet pipe. The spiral water channel cover plate is fixedly connected to the U-shaped core equipped with the spiral water channels. The U-shaped core is fixedly connected to the U-shaped chassis. The positioning pin hole penetrates through the U-shaped chassis, the spiral water channel cover plate, and the U-shaped core. The U-shaped core, the spiral water channels, the spiral water channel cover plate, the water outlet pipe, and the water inlet pipe form a smooth water channel from water inlet to water outlet and form a closed space except for the water outlet and the water inlet; Among them, the U-shaped core, the U-shaped chassis, the spiral water channel cover plate, the spiral water channels, the water outlet pipe, and the water inlet pipe are all made of organic materials; Among them, the organic material is selected as polyvinylidene fluoride.

2. The cooling tray with an embedded pipe according to claim 1, wherein The center of the U-shaped core is on the same straight line as the center of the U-shaped chassis.

3. The cooling plate with an embedded pipeline according to claim 1, wherein The U-shaped core, the spiral water channel cover plate, and the U-shaped chassis are all circular.

4. The cooling tray with an embedded pipeline according to claim 1, wherein, The fixed connection is selected as the fixed connection processed by welding technology.

5. The cooling plate with an embedded pipe according to claim 4, characterized in that, The fixed connection is selected as the welding of hot melt welding and / or the welding of an infrared laser.

6. The cooling plate with an embedded pipeline according to claim 5, wherein The welding of the hot melt welding includes a solder, and the solder is selected as a polyvinylidene fluoride material.

7. The cooling tray with an embedded pipeline according to claim 1, wherein The U-shaped core is selected as a 6-inch, 8-inch, or 12-inch core.

8. A preparation method of a cooling plate with an embedded pipeline, characterized in that, The steps are as follows: Step 1: Making the blank According to the different specifications of the blank, round ingots of PVDF materials with different specifications are selected and placed on a cutting machine tool. According to their corresponding specifications and dimensions, a large-tooth cutting tool on the cutting machine tool is used, and cutting is carried out in cooperation with a cutting auxiliary liquid to cut out a blank with the specified size and dimensions as the original blank for the subsequent processing of the core, the spiral water channel cover plate, and the chassis; Step 2: Making the chassis Select the chassis original blank in Step 1 and place it on a milling and grinding machine tool, and firmly fix it with a tooling fixture; the plane milling cutter and the spherical milling cutter on the milling and grinding machine tool are used in cooperation to mill the chassis original blank multiple times; a small-diameter spherical milling cutter is selected, and the center of its running track is adjusted to the central axis with the center of the chassis original blank. The small-diameter spherical milling cutter is perpendicular to the surface of the chassis original blank and is started to cut at a position corresponding to the outer diameter of the core, and one circle is milled to form a first annular groove body; Select a large-diameter spherical milling cutter. The center of the running track of the large-diameter spherical milling cutter is adjusted to the central axis with the center of the chassis original blank. The large-diameter spherical milling cutter can freely switch the size of the running track. The large-diameter spherical milling cutter is placed on the track passed by the small-diameter spherical milling cutter and is started to cut. The large-diameter spherical milling cutter mills according to the specified thickness and milling range to complete the first grooving link and form a shallow-groove U-shaped blank; Select a large flat milling cutter, adjust its center to the center axis of the original chassis blank, and perform planar trimming of the shallow groove U-shaped disc blank and deep groove machining at the center of the shallow groove U-shaped disc blank according to the set thickness and range to machine a stepped groove body, complete the trimming of the first grooving link, and form a deep groove U-shaped disc blank. The bottom surface of the deep groove U-shaped disc blank is a plane; select a spiral milling cutter, adjust the center of its running trajectory to the center axis of the original chassis blank, drill through holes in the steps of the original chassis blank, and according to the set machining program, the spiral milling cutter machines the required through holes on the steps; select a small flat milling cutter, adjust the center of its running trajectory to the center axis of the original chassis blank, and according to the set machining route, machine the through hole wall, cut the steps and make the inclined surface, finally realizing a through hole wall with a certain thickness and an inclined surface with a higher inner side and a lower outer side at the steps, and the inner side of this surface is flush with the bottom surface of the deep groove U-shaped disc blank, and machine the disc blank chassis; use a chamfering milling cutter on the milling and grinding machine to perform chamfering cutting on the exposed four peripheral edges of the disc blank chassis, and the carrier table cooperates with this milling cutter to rotate and stop, and finally machine the U-shaped chassis; Step 3: Manufacture the disc core Select the disc core blank in Step 1, place it on the carrier table of the milling and grinding machine, and firmly fix it with a tooling fixture. Use the flat milling cutter and straight-edge milling cutter on the milling and grinding machine. Select a double straight-edge milling cutter, adjust the center of its running trajectory to the center axis of the disc core blank, and perform edge cutting of the disc core blank, and trim it to the size of the bottom surface of the deep groove U-shaped disc blank in Step 2; select a large flat milling cutter, adjust the center of its running trajectory to the center axis of the disc core blank, start the large flat milling cutter, and the milling cutter machines a groove on the disc core blank. Select a small flat milling cutter, adjust the center of its running trajectory to the center axis of the disc core blank, start the small flat milling cutter, and perform groove trimming to form a groove disc blank with a flat bottom surface; use a chamfering milling cutter on the milling and grinding machine to perform chamfering cutting on the exposed four peripheral edges of the groove blank disc, and the carrier table cooperates with this chamfering milling cutter to rotate and stop, and finally machine the U-shaped disc core; Step 4: Manufacture the water channel wall Select the spiral water channel blank in Step 1, use a small tooth cutting tool to cut the spiral water channel wall, cut out paired square water channel walls, and polish them to make the side walls form flat water channel walls; Step 5: Manufacture the spiral water channel cover plate Select the spiral water channel cover plate blank in Step 1, place it on the carrier table of the milling and grinding machine, and firmly fix it with a tooling fixture. Select a small flat milling cutter, adjust the center of its running trajectory to the center axis of the disc core blank, start the small flat milling cutter, and perform milling and trimming of the disc surface. Select a double straight-edge milling cutter to trim its edge to the required size. Then use a large-diameter drill bit tool to drill the water outlet avoidance hole and the water inlet avoidance hole according to the positions of the water outlet avoidance hole and the water inlet avoidance hole, and prepare the spiral water channel cover plate; Step 6: Forming of the spiral water channel Select the water channel wall in Step 4, soften it, then place it in the spiral water channel mold for spiral shaping of the square water channel wall. Carry out spiral bending of the water channel wall at an appropriate temperature. After bending and forming, cool it to room temperature. Combine two spiral water channel walls to form a spiral water channel. Step 7: Combination of the spiral water channel and the disc core Select the disc core in Step 3 and the spiral water channel in Step 6. Place the spiral water channel inside the U-shaped disc core, and ensure that the center of the spiral water channel and the disc core are on the same central axis. Select PVDF welding wire and use the hot melt welding technique to weld the spiral water channel and the disc core. Uniformly weld both sides of the water channel wall. After welding is completed, cool it to room temperature. Use a trimming milling cutter to trim the welding area to complete the welding of the spiral water channel and the disc core. Step 8: Assembly of the outlet pipe and the inlet pipe Select PVDF pipes, use a small-tooth cutting milling cutter to cut them into pipes of the required specifications. Select two pipes and use a small-diameter drill bit milling cutter to drill holes at the required positions on the side walls. Select the disc core welded with the spiral water channel in Step 6. Weld the water outlet and the water inlet on the spiral water channel to the corresponding outlet pipe and inlet pipe respectively. At this time, use the hot melt welding technique of PVDF welding wire for welding. At the same time, also weld the outlet pipe and the inlet pipe to the inner side of the disc core in contact to complete the combination of the outlet pipe and the inlet pipe with the disc core having a spiral water channel. Step 9: Assembly of the spiral water channel cover plate Select the disc core with a spiral water channel, an outlet pipe, and an inlet pipe in Step 8, and then select the spiral water channel cover plate in Step 5. Cover the spiral water channel cover plate on the disc core according to the alignment of the outlet pipe and the inlet pipe. Use the welding technique of an infrared laser to weld the spiral water channel cover plate and the spiral water channel wall. Select an absorbent material and uniformly coat a thin layer of the absorbent material on the upper surface of the spiral water channel wall and the lower surface of the spiral water channel cover plate corresponding to the spiral water channel wall. This absorbent material is used to absorb the thermal energy of the infrared light of the infrared laser so as to highly soften the local PVDF material of the spiral water channel cover plate and the spiral water channel wall for softening welding. The infrared laser slowly welds the spiral cover plate and the spiral water channel wall with its local hot melt. In order to prevent the PVDF from being in a softened state for a long time and the area from increasing during the welding of the infrared laser, use liquid nitrogen to quickly cool the periphery and after the welding of the infrared laser. Finally, realize the welding of the spiral water channel cover plate and the spiral water channel wall. Then, use the combination of PVDF welding wire and hot melt welding technique to weld the edges of the spiral water channel cover plate and the disc core and the edges of the outlet pipe and the inlet pipe to prepare the disc core of the cooling disc. Step 10: Combination of the disc core of the cooling disc and the chassis Select the disc core of the cooling disc in Step 9 and the chassis in Step 2 to align the central axes. Use PVDF welding wire and hot melt welding technique to weld the edges, and then use a trimming milling cutter to trim the welding area to complete the production of the cooling disc. Step 11: Water pressure detection Conduct a flushing test on the cooling disc in Step 10, and the water pressure can reach 3 Mpa.

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