Probe card device and disposable adjustment sheet thereof

Abstract

The present invention discloses a probe card device and a disposable adjustment sheet thereof. The disposable adjustment sheet is an integrally formed one-piece structure and comprises a probe hole and a plurality of first slots arranged parallel to each other. The disposable adjustment sheet is defined with two pre-break lines extending from its two opposite edges to the probe hole respectively, and the two pre-break lines are respectively arranged crosswise with the plurality of first slots. The disposable adjustment sheet can be subjected to force along a direction parallel to any one of the first slots and away from each other on a plane where the disposable adjustment sheet is located, so that the disposable adjustment sheet is broken into two discarded sheets along the two pre-break lines. Accordingly, the disposable adjustment sheet will be constrained and limited by other components, so that in the process of being subjected to force and broken into two discarded sheets, other disposable adjustment sheets will not be displaced, thereby maintaining the overall precision of the probe seat.

Description

Technical Field

[0001] The invention relates to a probe card, in particular to a probe card device and a disposable adjusting sheet thereof. Background Art

[0002] The existing probe card device is provided with a plurality of stacked and arranged padding layers in the probe seat, and each of the padding layers has two separately arranged padding sheets. The two padding sheets of each padding layer can be removed from the probe seat as required. However, when any two padding sheets located in different layers and stacked are removed, any one of the padding sheets will interfere with the other padding sheet (e.g., displacement), thereby affecting the overall precision of the probe seat.

[0003] Therefore, the inventors believe that the above defects can be improved, and have devoted themselves to research and applied scientific principles, and finally proposed the present invention which has a reasonable design and effectively improves the above defects. Summary of the invention

[0004] The embodiment of the present invention provides a probe card device and a disposable adjustment sheet thereof, which can effectively improve the defects that may occur in the existing probe card device.

[0005] The embodiment of the present invention discloses a probe card device, which includes: a probe seat, including: two guide plate units, which are arranged at intervals from each other; a spacer plate, which is located between the two guide plate units; and a plurality of disposable adjustment sheets, which are stacked and arranged along a height direction and clamped between the spacer plate and at least one guide plate unit; wherein each disposable adjustment sheet is an integrally formed single-piece structure and is formed with a probe hole and a plurality of first slots parallel to each other; each disposable adjustment sheet is defined with two pre-break lines extending from two edges located on opposite sides thereof to the probe hole, respectively, and the two pre-break lines are respectively intersected with the plurality of first slots fork configuration; and a plurality of locking members, fixing two guide plate units, a spacer plate and a plurality of disposable adjustment sheets, and the plurality of locking members respectively pass through a plurality of first slots of each disposable adjustment sheet; and a plurality of conductive probes, mounted on a probe holder and passing through the probe holes of the plurality of disposable adjustment sheets; wherein any disposable adjustment sheet can be subjected to force in a plane in a vertical height direction along a direction parallel to any first slot and away from each other, so that the disposable adjustment sheet is broken into two discarded sheet bodies along two pre-breaking lines, and the two discarded sheet bodies are moved away from the probe holder along the plurality of locking members through the plurality of first slots.

[0006] Preferably, each disposable adjustment plate is formed with a plurality of needle implantation positioning holes, and the probe seat can selectively be positioned from a needle implantation mode to a needle detection mode by adjusting the relative positions of the two guide plate units; when the probe seat is in the needle implantation mode, each disposable adjustment plate is positioned at a preset position through the plurality of needle implantation positioning holes.

[0007] Preferably, in each disposable adjustment sheet, the probe hole includes a pin hole and two offset holes respectively connected to the pin hole on opposite sides; when the probe seat is in the pin implantation mode, each conductive probe passes through the pin hole; when the probe seat is in the needle detection mode, the two guide plate units are offset from each other so that each conductive probe is subjected to force and is bent, and each offset hole is for at least one conductive probe to pass through.

[0008] Preferably, each disposable adjustment piece is formed with a plurality of second slots, and the plurality of second slots are connected to the probe hole; the probe seat includes a plurality of guide pins, the plurality of guide pins are passed through the two guide plate units, the spacer plate and the plurality of disposable adjustment pieces, and the plurality of guide pins respectively pass through the plurality of second slots of each disposable adjustment piece.

[0009] Preferably, each disposable adjustment sheet has two end edges each perpendicular to the two edges, and each end edge includes at least one force-applying portion, and the multiple force-applying portions of any two adjacent disposable adjustment sheets are staggered with each other.

[0010] Preferably, each disposable adjustment sheet is formed with a plurality of perforations arranged along two pre-break lines, and the thickness of each disposable adjustment sheet is between 50 μm and 500 μm, and the difference in thickness between any two disposable adjustment sheets is not greater than 10 μm.

[0011] Preferably, the probe card device includes an adapter plate, one end of each conductive probe passes through one of the guide plate units and is fixed to the adapter plate, and the other end passes through another guide plate unit and is defined as a needle test wear section, which is used to test an object to be tested; a plurality of disposable adjustment plates are clamped between the spacer plate and the guide plate unit away from the adapter plate.

[0012] Preferably, the needle measuring wear section of each conductive probe has a preset length; when the needle measuring wear section of each conductive probe is worn a preset amount of wear during testing, one of the disposable adjustment sheets can be broken into two discarded sheets and detached from the probe seat, and the distance between the two guide plate units can be shortened through a plurality of locking pieces to extend the needle measuring wear section of each conductive probe to a reuse length that is not less than the preset length.

[0013] Preferably, the preset wear amount is 70% to 80% of the thickness of any disposable adjustment sheet, the reuse length is greater than the preset length, and each conductive probe with the reuse length can be shortened to the preset length through a leveling operation so that the free ends of the needle measuring wear sections of multiple conductive probes are arranged in a coplanar manner.

[0014] An embodiment of the present invention also discloses a disposable adjustment piece of a probe card device, which is an integrally formed one-piece structure and includes: a probe hole; and a plurality of first slots arranged parallel to each other; wherein the disposable adjustment piece is defined with two pre-break lines extending from its two opposite edges to the probe hole respectively, and the two pre-break lines are respectively cross-configured with the plurality of first slots; wherein the disposable adjustment piece can be subjected to force on a plane where it is located in a direction parallel to any one of the first slots and away from each other, so that the disposable adjustment piece is broken into two discarded pieces along the two pre-break lines.

[0015] In summary, in the probe card device disclosed in the embodiment of the present invention, each of the disposable adjustment pieces adopted is an integrally formed one-piece structure, and thus will be constrained and limited by other components (such as: multiple locking pieces and multiple guide pins). Therefore, when any one of the disposable adjustment pieces is subjected to force and breaks into two discarded pieces, it will not cause displacement of the other disposable adjustment pieces, thereby maintaining the overall precision of the probe seat.

[0016] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and are not intended to limit the protection scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 FIG. 1 is a schematic top view of a probe seat of a probe card device according to the first embodiment of the present invention.

[0018] Figure 2 for Figure 1 Schematic cross-sectional view along section line II-II.

[0019] Figure 3 FIG. 4 is a cross-sectional schematic diagram of a probe card device according to Embodiment 1 of the present invention.

[0020] Figure 4 FIG. 1 is a top view of a disposable adjustment sheet according to a first embodiment of the present invention.

[0021] Figure 5 FIG. 4 is a top view of a plurality of disposable adjustment sheets according to the first embodiment of the present invention.

[0022] Figure 6 for Figure 5 A top view of one of the disposable adjustment sheets being broken into two disposable sheet bodies.

[0023] Figure 7 for Figure 3 A schematic cross-sectional view of the wear sections of the multiple conductive probes after being worn by a preset amount of wear.

[0024] Figure 8for Figure 7 A cross-sectional schematic diagram of the probe card device after one of the disposable adjustment sheets is removed.

[0025] Fig. 9 for Figure 8 Schematic cross-sectional view of the wear section of the needles of multiple conductive probes after leveling operation.

[0026] Fig.10 FIG. 1 is a top view of a disposable adjustment sheet according to a second embodiment of the present invention.

[0027] Fig.11 FIG. 1 is a top view of a disposable adjustment sheet according to a third embodiment of the present invention. DETAILED DESCRIPTION

[0028] The following is an explanation of the implementation of the "probe card device and its disposable adjustment sheet" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual dimensions. It is stated in advance. The following embodiments will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention.

[0029] It should be understood that, although the terms "first", "second", "third", etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein may include any one or more combinations of the associated listed items depending on the actual situation.

[0030] [Example 1]

[0031] See also Figures 1 to 9 As shown, it is the first embodiment of the present invention. Figures 1 to 3 As shown, this embodiment discloses a probe card device 1000, which is, for example, a vertical probe card device, wherein the probe card device 1000 comprises a probe seat 100, a plurality of conductive probes 200 mounted on the probe seat 100, and a transfer plate 300 located at one side of the probe seat 100.

[0032] It should be noted that the probe card device 1000 in this embodiment is described by including the above-mentioned components, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the probe card device 1000 may not include the adapter plate 300 for use (e.g., sales). The following will first describe the structure of each component of the probe card device 1000, and then explain their connection relationship when appropriate.

[0033] The probe seat 100 includes two guide plate units 1, a partition plate 2 located between the two guide plate units 1, a plurality of disposable adjustment pieces 3 clamped between the partition plate 2 and at least one of the guide plate units 1, a plurality of locking pieces 4 and a plurality of guide pins 5. It should be noted that the probe seat 100 in this embodiment is described as including the above-mentioned components, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the probe seat 100 may not include the plurality of guide pins 5; or, the disposable adjustment piece 3 may be used alone (e.g., sold) without other components. The following will first describe the structure of each component of the probe seat 100, and then describe their connection relationship when appropriate.

[0034] like Figure 2 and Figure 3 As shown, the two guide plate units 1 are arranged at intervals from each other and are substantially parallel to the adapter plate 300, and one of the guide plate units 1 (eg, located at Figure 3 The guide plate unit 1 at the top is adjacent to the adapter plate 300, and the other guide plate unit 1 (eg, located at Figure 3 The guide plate unit 1 below is away from the adapter plate 300. In more detail, any of the guide plate units 1 is formed with a plurality of holes (not shown) corresponding to the disposable adjustment sheet 3 in this embodiment, and is described as a single guide plate, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, any of the guide plate units 1 may include two guide plates and a spacer body clamped between the two guide plates.

[0035] The partition plate 2 is annular in this embodiment and is formed with a plurality of holes (not shown) corresponding to the disposable adjustment pieces 3. The plurality of disposable adjustment pieces 3 are stacked one on another along a height direction H, and the plurality of disposable adjustment pieces 3 are clamped between the partition plate 2 and the guide plate unit 1 (e.g., located at a position away from the adapter plate 300) in this embodiment. Figure 3 The guide plate unit 1 below, and the partition plate 2 and the guide plate unit 1 adjacent to the adapter plate 300 (eg, located Figure 3 A plurality of spacer sheets 6 are sandwiched between the guide plate units 1 at the top, but the present invention is not limited thereto.

[0036] For example, in other embodiments not shown in the present invention, the plurality of disposable adjustment sheets 3 may be clamped between the partition plate 2 and the guide plate unit 1 adjacent to the adapter plate 300, and a plurality of spacer sheets 6 may be clamped between the partition plate 2 and the guide plate unit 1 away from the adapter plate 300; or, the plurality of disposable adjustment sheets 3 may be clamped respectively between the partition plate 2 and any one of the guide plate units 1.

[0037] Each of the disposable adjustment sheets 3 is an integrally formed single-piece structure, and the thickness of each of the disposable adjustment sheets 3 is between 50 micrometers (μm) and 500 micrometers, and the difference in the thickness of any two of the disposable adjustment sheets 3 is not greater than 10 micrometers. Since the multiple disposable adjustment sheets 3 are of substantially the same structure in this embodiment, for the sake of convenience, the structure of a single disposable adjustment sheet 3 will be first introduced below, and then the connection relationship between the multiple disposable adjustment sheets 3 will be described, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the structures of the multiple disposable adjustment sheets 3 may also be slightly different.

[0038] Specifically, if Figure 1 and Figure 4 As shown, the disposable adjustment sheet 3 is generally square (e.g., square or rectangular) and is formed with a probe hole 31, a plurality of first slots 32 parallel to each other, a plurality of second slots 33 connected to the probe hole 31, and a plurality of needle placement holes 34. The probe hole 31 includes a needle placement hole 311 and two opposite sides of the needle placement hole 311 (e.g., Figure 4 There are two offset holes 312 (on the left and right sides of the needle hole 311), and the needle hole 311 is roughly located at the center of the disposable adjustment piece 3.

[0039] Furthermore, the number of the plurality of first slots 32 is four in this embodiment, and the plurality of first slots 32 are respectively located on the opposite sides of the needle placement hole 311 (eg: Figure 4 The two first slots 32 adjacent to the pin hole 311 are connected to the two offset holes 312 respectively, and the other two first slots 32 are parallel to and adjacent to the two edges 35 on the opposite sides of the disposable adjustment sheet 3 (e.g.: Figure 4 The left and right edges of the disposable adjustment sheet 3 in the embodiment of the present invention are provided, and the length direction of each of the first slots 32 is perpendicular to the two end edges 36 of the disposable adjustment sheet 3 (such as: Figure 4that is, each of the end edges 36 is perpendicular to the two edges 35.

[0040] The number of the plurality of second slots 33 is four in this embodiment, and the plurality of second slots 33 are respectively connected to the two ends of the needle placement hole 311 (eg: Figure 4 In other words, the plurality of second slots 33 are located between two first slots 32 adjacent to the needle placement holes 311. In addition, the distance between the two first slots 32 adjacent to the needle placement holes 311 can be divided into three equal parts by the two second slots 33 connected to either end of the needle placement holes 311, but the present invention is not limited thereto.

[0041] The number of the plurality of implant needle positioning holes 34 is two in this embodiment, any of the implant needle positioning holes 34 is in the shape of a circular hole and is not connected to any hole on the disposable adjustment sheet 3, and the plurality of implant needle positioning holes 34 are respectively located at two obliquely opposite corners of the disposable adjustment sheet 3 (e.g.: Figure 4 The disposable adjustment sheet 3 is located at the upper left corner and the lower right corner), but the present invention is not limited thereto.

[0042] From another perspective, the disposable adjustment piece 3 is defined with two pre-break lines P extending from the two edges 35 to the probe hole 31, and the two pre-break lines P are respectively arranged to cross with the plurality of first slots 32, and the disposable adjustment piece 3 is preferably 180 degrees rotationally symmetrical (2-fold symmetry) with respect to the two pre-break lines P. In this embodiment, the two pre-break lines P are located in the same straight line direction and are perpendicular to any one of the edges 35 of the disposable adjustment piece 3, so that the disposable adjustment piece 3 is mirror symmetrical (mirror symmetry) with respect to the two pre-break lines P, but the present invention is not limited thereto.

[0043] In more detail, the structural strength of the disposable adjustment piece 3 at any of the pre-break lines P is weaker than the structural strength of the surrounding parts, so that the disposable adjustment piece 3 can be broken along the two pre-break lines P when subjected to force. In this embodiment, the disposable adjustment piece 3 is formed with a plurality of through holes 37 arranged along the two pre-break lines P, and any two adjacent through holes 37 can be partially connected or separated from each other. In addition, each of the end edges 36 of the disposable adjustment piece 3 can include at least one force-applying portion 361 in the form of a convex sheet.

[0044] In addition, if Figure 4 and Figure 5As shown, among the multiple disposable adjustment pieces 3 stacked on each other, the multiple force-applying portions 361 of any two adjacent disposable adjustment pieces 3 are staggered with each other, and the outline of any disposable adjustment piece 3 except the force-applying portion 361 (such as: the probe hole 31, the multiple first slots 32, the multiple second slots 33, the multiple implant needle positioning holes 34 and the two edges 35) is roughly aligned with the outline of the remaining disposable adjustment pieces 3 along the height direction H, but the present invention is not limited to this.

[0045] like Figure 1 , Figure 3 and Figure 4 As shown, the plurality of locking members 4 (through the probe base 100) fix the two guide plate units 1, the spacer plate 2 and the plurality of disposable adjustment sheets 3, and the plurality of locking members 4 respectively pass through the plurality of first slots 32 of each of the disposable adjustment sheets 3. In this embodiment, the number of the plurality of locking members 4 is twice the number of the plurality of first slots 32, so that one locking member 4 is respectively passed through the two ends of any first slot 32. Furthermore, the plurality of guide pins 5 are passed through the two guide plate units 1, the spacer plate 2 and the plurality of disposable adjustment sheets 3, and the plurality of guide pins 5 respectively pass through the plurality of second slots 33 of each of the disposable adjustment sheets 3.

[0046] The above is a structural description of the probe base 100 of this embodiment. When the probe base 100 is actually operated (eg: Figure 6 ), any of the disposable adjustment pieces 3 can be moved in a plane perpendicular to the height direction H (that is, the plane where the disposable adjustment piece 3 is located) along a direction parallel to any of the first slots 32 and moving away from each other (such as: Figure 6 The disposable adjustment sheet 3 is subjected to force in both upward and downward directions, so that the disposable adjustment sheet 3 is broken into two discarded sheets 3a along the two pre-breaking lines P, and the two discarded sheets 3a are moved away from the probe seat 100 along the plurality of first slots 32 (and the plurality of second slots 33) and along the plurality of locking members 4 (and the plurality of guide pins 5), thereby reducing the overall height of the probe seat 100.

[0047] In addition, the probe base 100 can first loosen the plurality of locking members 4 to facilitate any of the disposable adjustment sheets 3 to be broken into two discarded sheets 3a by force, and then tighten the plurality of locking members 4 to fix the relative positions of the various components of the probe base 100. Furthermore, the two discarded sheets 3a are substantially identical or symmetrical in structure in this embodiment, but the present invention is not limited thereto.

[0048] Accordingly, since each of the disposable adjustment pieces 3 is an integrally formed one-piece structure, it will be constrained and limited by other components (such as: multiple locking pieces 4 and multiple guide pins 5). Therefore, when any one of the disposable adjustment pieces 3 is subjected to force and breaks into two discarded pieces 3a, it will not cause displacement of other disposable adjustment pieces 3, thereby maintaining the overall precision of the probe seat 100.

[0049] like Figures 1 to 3 As shown, a plurality of the conductive probes 200 are installed on the probe holder 100 and pass through the probe holes 31 of the disposable adjustment sheets 3, and the plurality of the conductive probes 200 also pass through the two guide plate units 1 and the spacer plate 2. One end of each conductive probe 200 (e.g.: Figure 3 The top end of any one of the conductive probes 200) passes through one of the guide plate units 1 and is fixed to the adapter plate 300, and the other end (such as: Figure 3 The bottom end of any one of the conductive probes 200) passes through another of the guide plate units 1 and is defined as a needle measuring wear section 201, which is used to test an object to be tested (not shown in the figure, such as a semiconductor chip) and has a preset length L0.

[0050] It should be noted that in the probe card device 1000, the type of the conductive probe 200 can be adjusted according to design requirements, which results in the two guide plate units 1 of the probe seat 100 being able to form a structure that can be displaced or not displaced depending on the type of the conductive probe 200.

[0051] The type of the conductive probe 200 in this embodiment is illustrated by using two guide plate units 1 that can be offset from each other; that is, the probe holder 100 in this embodiment can selectively be in a needle implantation mode (e.g.: Figure 2 ) by adjusting the relative positions of the two guide plate units 1 (e.g., the two guide plate units 1 are offset from each other) to be in a needle detection mode (e.g., Figure 3 ), but the present invention is not limited thereto.

[0052] In more detail, Figure 2 As shown, when the probe seat 100 is in the needle implanting mode, each of the disposable adjustment sheets 3 is positioned at a preset position through a plurality of the needle implanting positioning holes 34 (e.g., a plurality of needle implanting pins are inserted into the probe seat 100 in a manner of respectively passing through a plurality of the needle implanting positioning holes 34), so as to facilitate each of the conductive probes 200 to be passed through the probe seat 100, and each of the conductive probes 200 passes through the needle placement hole 311 (but not through the offset hole 312).

[0053] Furthermore, if Figure 3 As shown, when the probe holder 100 is in the probe test mode, the two guide plate units 1 are offset from each other so that each conductive probe 200 is bent by force, and each offset hole 312 is provided for at least one conductive probe 200 to pass through. In other words, any one of the disposable adjustment sheets 3 is provided with two offset holes 312 to provide the conductive probe 200 with the space required for deformation by force.

[0054] Further, if Figure 3 , Figure 7 and Figure 8 As shown, when the needle measuring wear section 201 of each conductive probe 200 is used for testing and is worn by a preset wear amount (such as: Figure 7 The length of the needle measuring wear section 201 is a reduced length L1 less than the preset length L0), wherein one of the disposable adjustment sheets 3 can be broken into two discarded sheets 3a and separated from the probe seat 100 (eg: Figure 6 and Figure 8 ), and shorten the distance between the two guide plate units 1 through a plurality of the locking members 4, so as to extend the needle measuring wear section 201 of each of the conductive probes 200 to a reuse length L2 that is not less than the preset length L0.

[0055] Preferably, if Figure 8 and Fig. 9 As shown, the preset wear amount is 70% to 80% of the thickness of any one of the disposable adjustment sheets 3, the reuse length L2 is greater than the preset length L0, and each of the conductive probes 200 having the reuse length L2 can be shortened to the preset length L0 by a leveling operation, so that the free ends of the needle measuring wear sections 201 of the plurality of conductive probes 200 are arranged in a coplanar manner, so as to continue to be used for testing the object to be tested.

[0056] [Example 2]

[0057] See also Fig.10 As shown, this is the second embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be described in detail, and the differences between this embodiment and the above-mentioned first embodiment are roughly described as follows:

[0058] In this embodiment, the disposable adjustment piece 3 is defined with two pre-break lines P extending obliquely from the two edges 35 to the probe hole 31, and the two pre-break lines P are respectively arranged to cross with the plurality of first slots 32, and the disposable adjustment piece 3 is preferably 180 degrees rotationally symmetrical (2-fold symmetry) with respect to the two pre-break lines P. The two pre-break lines P are located in the same straight line direction and form an acute angle with any one of the edges 35 of the disposable adjustment piece 3, but the present invention is not limited thereto.

[0059] [Example 3]

[0060] See also Fig.11 As shown, it is the third embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the above-mentioned first embodiment are roughly described as follows:

[0061] In this embodiment, the disposable adjustment piece 3 is defined with two pre-break lines P extending vertically from the two edges 35 to the probe hole 31, and the two pre-break lines P are respectively arranged crosswise with the plurality of first slots 32, and the disposable adjustment piece 3 is preferably 180 degrees rotationally symmetrical (2-fold symmetry) with respect to the two pre-break lines P. The two pre-break lines P are located in two different linear directions, but the present invention is not limited thereto.

[0062] [Technical Effects of Embodiments of the Invention]

[0063] In summary, in the probe card device disclosed in the embodiment of the present invention, each of the disposable adjustment pieces adopted is an integrally formed one-piece structure, and thus will be constrained and limited by other components (such as: multiple locking pieces and multiple guide pins). Therefore, when any one of the disposable adjustment pieces is subjected to force and breaks into two discarded pieces, it will not cause displacement of the other disposable adjustment pieces, thereby maintaining the overall precision of the probe seat.

[0064] The contents disclosed above are only preferred feasible embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the patent scope of the present invention.

Claims

1. A probe card device, characterized in that: The probe card device comprises: A probe holder, comprising: Two guide plate units are arranged spaced apart from each other; a spacer plate located between the two guide plate units; and A plurality of disposable adjustment sheets are stacked one on another in a height direction and clamped between the spacer plate and at least one of the guide plate units; wherein each of the disposable adjustment sheets is an integrally formed one-piece structure and is formed with a probe hole and a plurality of first slots parallel to each other; each of the disposable adjustment sheets is defined with two pre-break lines extending from two edges located on opposite sides thereof to the probe hole, respectively, and the two pre-break lines are respectively arranged in a cross configuration with the plurality of first slots; and a plurality of locking members, fixing the two guide plate units, the spacer plate and the plurality of disposable adjustment sheets, and the plurality of locking members respectively pass through the plurality of first slots of each of the disposable adjustment sheets; and A plurality of conductive probes mounted on the probe holder and passing through the probe holes of the plurality of disposable adjustment sheets; Among them, any one of the disposable adjustment pieces can be subjected to force in a plane perpendicular to the height direction along a direction parallel to any one of the first slots and away from each other, so that the disposable adjustment piece is broken into two discarded pieces along the two pre-breaking lines, and the two discarded pieces are moved away from the probe seat through multiple first slots along multiple locking pieces.

2. The probe card device according to claim 1, wherein: Each of the disposable adjustment plates is formed with a plurality of needle implantation positioning holes, and the probe seat can selectively be positioned from a needle implantation mode to a needle detection mode by adjusting the relative positions of the two guide plate units; when the probe seat is in the needle implantation mode, each of the disposable adjustment plates is positioned at a preset position through the plurality of needle implantation positioning holes.

3. The probe card device according to claim 2, wherein: In each disposable adjustment sheet, the probe hole includes a pin hole and two offset holes respectively connected to the opposite sides of the pin hole; when the probe seat is in the pin implantation mode, each conductive probe passes through the pin hole; when the probe seat is in the needle detection mode, the two guide plate units are offset from each other so that each conductive probe is subjected to force and bends, and each offset hole allows at least one conductive probe to pass through.

4. The probe card device according to claim 1, wherein: Each of the disposable adjustment sheets is formed with a plurality of second slots, and the plurality of second slots are connected to the probe holes; the probe seat includes a plurality of guide pins, the plurality of guide pins are passed through the two guide plate units, the spacer plate and the plurality of disposable adjustment sheets, and the plurality of guide pins respectively pass through the plurality of second slots of each of the disposable adjustment sheets.

5. The probe card device according to claim 1, wherein: Each of the disposable adjustment sheets has two end edges each perpendicular to the two edges, and each of the end edges includes at least one force-applying portion, and the multiple force-applying portions of any two adjacent disposable adjustment sheets are staggered with each other.

6. The probe card device according to claim 1, wherein: Each of the disposable adjustment sheets is formed with a plurality of perforations arranged along the two pre-break lines, and the thickness of each of the disposable adjustment sheets is between 50 microns and 500 microns, and a difference in the thickness between any two of the disposable adjustment sheets is no greater than 10 microns.

7. The probe card device according to claim 1, wherein: The probe card device includes an adapter plate, one end of each of the conductive probes passes through one of the guide plate units and is fixed to the adapter plate, and the other end passes through another guide plate unit and is defined as a needle test wear section, which is used to test an object to be tested; a plurality of disposable adjustment sheets are clamped between the spacer plate and the guide plate unit away from the adapter plate.

8. The probe card device according to claim 7, wherein: The needle measuring wear section of each conductive probe has a preset length; when the needle measuring wear section of each conductive probe is worn out by a preset amount of wear for testing, one of the disposable adjustment sheets can be broken into two discarded sheets and detached from the probe seat, and the distance between the two guide plate units can be shortened by a plurality of locking pieces to extend the needle measuring wear section of each conductive probe to a reuse length that is not less than the preset length.

9. The probe card device according to claim 8, wherein: The preset wear amount is 70% to 80% of the thickness of any one of the disposable adjustment sheets, the reuse length is greater than the preset length, and each of the conductive probes having the reuse length can be shortened to the preset length through a leveling operation so that the free ends of the needle measuring wear sections of the plurality of conductive probes are arranged in a coplanar manner.

10. A disposable adjustment sheet for a probe card device, characterized in that: The disposable tab of the probe card device is an integrally formed one-piece structure and includes: a probe hole; and A plurality of first slots are arranged in parallel with each other; wherein the disposable adjustment sheet is defined with two pre-break lines extending from two opposite edges thereof to the probe hole respectively, and the two pre-break lines are respectively arranged to cross with the plurality of first slots; The disposable adjustment sheet can be subjected to force in a plane on which it is located in a direction parallel to any one of the first slot holes and away from each other, so that the disposable adjustment sheet is broken into two discarded sheets along the two pre-breaking lines.

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