Laser Precision Adjustment Device

Abstract

The present invention relates to a laser precision adjustment device, comprising: a first power source, an output end of which is used to provide a driving force for moving along a first direction; a linkage module, which is connected to the output end of the first power source and has multiple connecting parts, and the multiple connecting parts are driven by the first power source to move at equal intervals along the first direction; multiple support plates, with one support plate correspondingly connected to one connecting part; multiple mirror modules, with one mirror module installed on a support plate and comprising a reflector group and a galvanometer, the reflector group being used to receive and reflect laser light emitted by the laser module, and the galvanometer being used to receive reflected light from the reflector group and perform precision compensation; the multiple connecting parts are equidistantly moved in the first direction to realize equidistant adjustment of multiple lasers, and the laser light is highly precisely compensated in the galvanometer after being reflected by the reflector group, so that the product yield is high, the production capacity is high, the structure is relatively simple, it is easy to operate, the maintenance cost is low, the debugging is convenient, and the long-term operation stability is high.

Description

Technical Field

[0001] The present invention relates to the technical field of laser cutting, in particular to a laser precision adjustment device. Background Art

[0002] Laser cutting is widely used due to its non-contact, fast processing speed and excellent quality. In particular, laser modules that use multi-channel laser scribing for large-scale cutting are gradually being used in large and small-format cutting industries due to their advantages such as fast and efficient cutting and strong applicability.

[0003] At present, in order to ensure the accuracy requirements of multi-channel laser marking, an adjustment device is usually designed to be used in conjunction with the laser module. However, the existing adjustment device is difficult to achieve the required laser marking accuracy, resulting in low product yield and low production capacity. In addition, the structure of the adjustment device is relatively cumbersome and complicated, and debugging and laser accuracy calibration are relatively troublesome, which places high technical requirements on maintenance personnel, resulting in high maintenance costs, inconvenient debugging, and poor long-term operation stability. Summary of the Invention

[0004] Based on this, it is necessary to provide a laser precision adjustment device to address the problem that the adjustment device has a complex structure and is difficult to achieve the required multi-path laser marking accuracy.

[0005] The present invention provides a laser precision adjustment device, used in conjunction with a laser module, comprising:

[0006] a first power source, the output end of which is used to provide a driving force for movement along a first direction;

[0007] a linkage module connected to the output end of the first power source, the linkage module having a plurality of connection parts, and the plurality of connection parts are driven by the first power source to move at equal intervals along the first direction;

[0008] A plurality of support plates, wherein one support plate is connected to one of the connecting parts;

[0009] Multiple mirror modules, one of the mirror modules is installed on one of the support plates, and includes a reflector group and a galvanometer. The reflector group is used to receive and reflect the laser emitted by the laser module, and the galvanometer is used to receive the reflected light from the reflector group and perform precision compensation.

[0010] When the above-mentioned laser precision adjustment device is in use, the output end of the first power source drives the linkage module to move along the first direction, and the multiple connection parts of the linkage module move equidistantly in the first direction, so as to drive the support plate and the mirror module to move equidistantly in the first direction, so as to realize the equidistant adjustment of the multiple lasers in the first direction after the laser emitted by the laser module is acted upon by the mirror module. At the same time, the laser emitted by the laser module is reflected by the reflector group and input into the galvanometer, and high-precision compensation is performed in the galvanometer, so that the multiple lasers can be accurately positioned, the laser marking adjustment accuracy is improved, the product yield is higher, and the production capacity is higher. Moreover, the structure of the above-mentioned laser precision adjustment device is relatively simple, and the debugging and laser precision calibration are relatively simple and easy to operate, and the technical requirements for maintenance personnel are relatively low, the maintenance cost is low, the debugging is convenient, and the long-term operation stability is high.

[0011] In one embodiment, the linkage module is a hinge linkage structure having a plurality of linkage components that extend and retract along the first direction, and the connecting portion is located between two adjacent linkage components.

[0012] In one embodiment, the linkage module includes a plurality of first plates and a plurality of second plates arranged in parallel and at intervals, wherein:

[0013] The middle areas of the second plate and the first plate are arranged opposite to each other and are rotatably connected to form the connecting portion;

[0014] The ends of the second plate and the first plate are rotatably connected, two adjacent second plates and two adjacent first plates form the linkage assembly, and the second plate and the first plate at one end are connected to the output end of the first power source.

[0015] In one embodiment, the linkage module also includes a plurality of threaded connectors for locking the first plate body, the second plate body and the support plate, the threaded connector having a threaded section and an optical axis section along its axis, the optical axis section being rotatably accommodated in the middle area of the first plate body, and the threaded section being threadedly connected to the middle area of the support plate and the second plate body respectively.

[0016] In one embodiment, the linkage module further includes a plurality of spacer rings, which are arranged between the middle area of the second plate body and the middle area of the first plate body and are sleeved on the threaded connector.

[0017] In one embodiment, the second plate and the end portions of the first plate are rotatably connected via bearings or pins.

[0018] In one embodiment, the linkage module also includes two third plates, the length of which is half the length of the second plate, one end of the two third plates is rotatably connected and fixedly connected to the output end of the first power source, and the other end is rotatably connected to the end of the second plate and the end of the first plate respectively.

[0019] In one embodiment, the laser precision adjustment device also includes a base plate and multiple slide rails. The multiple slide rails are divided into two groups and arranged on both sides of the linkage module. The slide rails are installed on the base plate, and the extension direction of the base plate is parallel to the first direction. A slider protrudes from the side of the support plate away from the mirror module, and the slider slides in cooperation with the slide rails.

[0020] In one embodiment, the reflector assembly includes a first reflector and a second reflector mounted at both ends of the support plate along its extension direction, wherein:

[0021] The first reflector is used to receive the laser from the laser module, and a plurality of the first reflectors are staggered in the extension direction of the support plate;

[0022] The second reflector is disposed close to the galvanometer mirror and is configured to receive the light reflected by the first reflector and input the reflected light to the galvanometer mirror.

[0023] In one embodiment, the mirror module further includes a second power source, a fixed end of the second power source is mounted on the support plate, an output end is used to provide a driving force for moving in a vertical direction, and the galvanometer and the second reflector are mounted on the output end of the second power source. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic structural diagram of a module composed of a laser precision adjustment device and two laser modules in one embodiment of the present invention;

[0025] Figure 2 A top view of a laser precision adjustment device according to an embodiment of the present invention;

[0026] Figure 3 A front view of a laser precision adjustment device according to an embodiment of the present invention;

[0027] Figure 4 This is a bottom view of the laser precision adjustment device in one embodiment of the present invention with the bottom plate removed;

[0028] Figure 5 1. A top view of a linkage module in a laser precision adjustment device according to an embodiment of the present invention.

[0029] Reference numerals:

[0030] 10. Laser precision adjustment device; X, first direction; Y, second direction; Z, vertical direction;

[0031] 100. First power source; 110. Linear module; 120. Transplanting module;

[0032] 200, linkage module; 210, connecting portion; 220, linkage assembly; 230, first plate; 240, second plate; 250, threaded connector; 260, spacer ring; 270, bearing; 280, pin; 290, third plate;

[0033] 300, support plate; 310, slider;

[0034] 400, mirror module; 410, reflector assembly; 411, first reflector; 412, second reflector; 420, galvanometer; 430, mirror frame;

[0035] 500, bottom plate;

[0036] 600, slide rail;

[0037] 700, second power source;

[0038] 20. Laser module. DETAILED DESCRIPTION

[0039] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0040] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0041] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0042] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0043] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0044] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0045] The technical solutions provided by the embodiments of the present invention are described below with reference to the accompanying drawings.

[0046] like Figure 1 、 Figure 2 as well as Figure 3As shown, the present invention provides a laser precision adjustment device 10 for achieving precision adjustment of multi-path laser scribing. The laser precision adjustment device 10 is used in conjunction with a laser module 20 and is suitable for high-precision processing of large and small-format glass etching. The laser precision adjustment device 10 includes a first power source 100, a linkage module 200, multiple support plates 300, and multiple mirror modules 400, wherein:

[0047] The output end of the first power source 100 is used to provide a driving force for moving along the first direction X. In a specific setting, the first power source 100 can be directly a linear module 110. The first power source 100 can also be a combination of a linear module 110 and a transplanting module 120. The transplanting module 120 is provided to facilitate the connection between the first power source 100 and the linkage module 200 and ensure high-precision and smooth movement of the linkage module 200. Of course, the structural form of the first power source 100 is not limited to this, and can also be other forms that can meet the requirements.

[0048] The linkage module 200 is connected to the output end of the first power source 100. The connection between the two can be a threaded connection, a concave-convex fit, or a snap-fit connection. The linkage module 200 has multiple connecting parts 210. The first power source 100 drives the multiple connecting parts 210 to move at equal intervals along the first direction X. In a specific configuration, the number of connecting parts 210 can be two, three, four, five, or more. The multiple connecting parts 210 have the same structure to ensure that the multiple connecting parts 210 move at equal intervals.

[0049] The number of support plates 300 can be two, three, four, five or more than five. The number of support plates 300 is adapted to the number of connecting parts 210. One connecting part 210 corresponds to one support plate 300, and one support plate 300 is correspondingly connected to one connecting part 210. The connection method between the two can be a threaded connection, a concave-convex fit, a snap connection, etc.; in the specific setting, multiple support plates 300 are arranged at intervals along the first direction X, and the thickness direction of each support plate 300 is the vertical direction Z, which is perpendicular to the first direction X and the second direction Y.

[0050] The number of mirror modules 400 can be two, three, four, five or more than five. The number of mirror modules 400 is adapted to the number of support plates 300. One support plate 300 corresponds to one mirror module 400. One mirror module 400 is installed on one support plate 300. The connection method between the two can be threaded connection, concave-convex fit, snap connection, etc.; the mirror module 400 includes a reflector group 410 and a galvanometer 420. The reflector group 410 is used to receive the laser emitted by the laser module 20 and reflect the received laser multiple times. The galvanometer 420 is used to receive the reflected light from the reflector group 410 and perform precision compensation on the received reflected light.

[0051] When the laser precision adjustment device 10 is in use, the output end of the first power source 100 drives the linkage module 200 to move along the first direction X, and the multiple connection parts 210 of the linkage module 200 move equidistantly in the first direction X, so as to drive the support plate 300 and the mirror module 400 to move equidistantly in the first direction X, thereby realizing equidistant adjustment of the multiple lasers in the first direction X after the laser module 20 is acted upon by the mirror module 400. At the same time, the laser light emitted by the laser module 20 is reflected by the reflective mirror group 410 and input to the galvanometer 420, and high-precision compensation is performed in the galvanometer 420, so that the multiple lasers can be accurately positioned, the laser scribing adjustment accuracy is improved, the product yield is higher, and the production capacity is higher. In addition, the structure of the laser precision adjustment device 10 is relatively simple, and debugging and laser precision calibration are relatively simple and easy to operate, with relatively low technical requirements for maintenance personnel, low maintenance cost, convenient debugging, and high long-term operation stability.

[0052] The linkage module 200 has various structures. In a preferred embodiment, the linkage module 200 is a hinge linkage structure, having multiple linkage components 220, and the multiple linkage components 220 are extended and retracted along the first direction X. The connecting part 210 is located between two adjacent linkage components 220. In the specific setting, the number of linkage components 220 and connecting parts 210 can be two, three, four, five or more than five, and the structures of the multiple linkage components 220 are the same to ensure that the multiple linkage components 220 and the connecting parts 210 move at equal intervals.

[0053] When the laser precision adjustment device 10 is in use, the output end of the first power source 100 drives the linkage module 200 to move along the first direction X. The multiple linkage components 220 of the linkage module 200 extend or contract equidistantly in the first direction X, and the multiple connecting portions 210 thereon move equidistantly in the first direction X, thereby driving the support plate 300 and the mirror module 400 to move equidistantly in the first direction X. This enables the mirror module 400 to adjust the multiple laser beams emitted by the laser module 20 equidistantly in the first direction X. Of course, the structure of the linkage module 200 is not limited to this, and can also adopt other structures that meet the requirements, such as similar to an equidistant screw module.

[0054] When the linkage module 200 is a hinge linkage structure, in a preferred embodiment, Figure 4 as well as Figure 5 As shown, the linkage module 200 includes a plurality of first plates 230 and a plurality of second plates 240. The plurality of first plates 230 are arranged parallel and spaced apart in one direction, and the plurality of second plates 240 are arranged parallel and spaced apart in another direction, wherein:

[0055] The middle areas of the second plate 240 and the first plate 230 are arranged opposite each other and are rotatably connected to each other. The middle areas of the second plate 240 and the first plate 230 are connected to form the connecting portion 210 .

[0056] The ends of the second plate 240 and the first plate 230 are rotatably connected. Two adjacent second plates 240 and two adjacent first plates 230 form a linkage assembly 220. The second plate 240 and the first plate 230 located at one end of the linkage module 200 are connected to the output end of the first power source 100. In a specific configuration, the length of the first plate 230 and the length of the second plate 240 are the same, so that the linkage assembly 220 is in the shape of a parallelogram, simplifying the structure and facilitating the equal-spaced movement of the multiple connecting portions 210.

[0057] When the laser precision adjustment device 10 is in use, the output end of the first power source 100 applies force to the second plate 240 and the first plate 230 at one end of the linkage module 200, driving the second plate 240 and the first plate 230 at one end of the linkage module 200 to move and rotate relative to each other. The power is transmitted within the linkage module 200, causing all remaining second plates 240 and first plates 230 to move and rotate relative to each other, thereby achieving equidistant extension or contraction of the multiple linkage components 220 in the first direction X. The linkage module 200 has a simple structure and can relatively easily achieve movement adjustment in the first direction X.

[0058] like Figure 5 As shown, specifically, the linkage module 200 further includes a plurality of threaded connectors 250. The number of threaded connectors 250 can be two, three, four, five, or more than five. The number of threaded connectors 250 corresponds to the number of connecting portions 210, with one connecting portion 210 corresponding to one threaded connector 250. The threaded connectors 250 are used to lock the first plate 230, the second plate 240, and the support plate 300 together. The threaded connector 250 has a threaded section and an optical axis section along its axis. The optical axis section is rotatably accommodated in the middle area between the first plate 230 and the second plate 240 to reduce friction between the contraction and extension of the linkage module 200. The threaded section is fixedly connected to the support plate 300.

[0059] In the specific setting, the first plate body 230 is provided with a first through hole running through its thickness, the second plate body 240 is provided with a second through hole running through its thickness, and the support plate 300 is provided with a first threaded hole running through its thickness. The threaded connecting member 250 can be a bolt. After the bolt passes through the first through hole and the second through hole, its optical axis section is located in the first through hole and the second through hole, and its nut presses the first plate body 230 and the second plate body 240 together. Its threaded section passes through the first through hole and the second through hole, and extends into the first threaded hole of the support plate 300 and is threadedly connected.

[0060] Of course, the threaded connection part 250 is not limited thereto, and may also be a nut+stud, or other structural forms that can meet the requirements.

[0061] When the above-mentioned laser precision adjustment device 10 is in use, when the first plate 230 is subjected to force, the first plate 230 rotates relative to the second plate 240 with the optical axis segment as the rotation axis, and the projection length of the first plate 230 in the first direction X changes, thereby driving the second plate 240 and the support plate 300 to move in the first direction X, thereby realizing the equidistant extension or contraction of multiple linkage components 220 in the first direction X.

[0062] like Figure 5 As shown, more specifically, the linkage module 200 further includes a plurality of spacer rings 260. The number of spacer rings 260 can be two, three, four, five, or more than five. The number of spacer rings 260 corresponds to the number of support plates 300, with one spacer ring 260 corresponding to each support plate 300. The spacer rings 260 are disposed between the middle region of the second plate 240 and the middle region of the first plate 230, and are sleeved on the threaded connector 250. When the laser precision adjustment device 10 is in use, the spacer rings 260 separate the middle region of the second plate 240 from the middle region of the first plate 230, thereby reducing the contact area between the middle region of the second plate 240 and the middle region of the first plate 230, reducing friction between the middle region of the second plate 240 and the middle region of the first plate 230 during relative rotation, and ensuring high long-term operational stability.

[0063] like Figure 5 As shown, specifically, the end of the second plate body 240 and the end of the first plate body 230 are rotatably connected by a bearing 270 or a pin 280, so as to realize the rotational connection between the end of the second plate body 240 and the end of the first plate body 230, and can reduce the friction between the end of the second plate body 240 and the end of the first plate body 230 during relative rotation, ensuring high long-term operating stability. Of course, the structural form that can realize the rotational connection between the end of the second plate body 240 and the end of the first plate body 230 is not limited to this, and can also be other forms that can meet the requirements.

[0064] like Figure 5 As shown, specifically, the linkage module 200 also includes two third plates 290, the length of the third plate 290 is half the length of the second plate 240, one end of the two third plates 290 is rotatably connected, and after connection, is fixedly connected to the output end of the first power source 100, and the other end of the two third plates 290 is rotatably connected to the end of the second plate 240 and the first plate 230 through bearings 270 or pins 280 respectively. In the specific setting, the connection method between one end of the two third plates 290 and the output end of the first power source 100 can be the same as the above-mentioned threaded connection 250, or after the two third plates 290 are rotated and connected, the output end of the first power source 100 is connected to a third plate 290 by a snap connection, concave-convex fitting, etc. By setting the above-mentioned two third plates 290, the connection between the linkage module 200 and the output end of the first power source 100 can be realized more conveniently. Of course, in order to ensure the symmetry of the structure of the linkage module 200 and the stability of the movement, two third plates 290 can also be provided at both ends of the linkage module 200 along the first direction X.

[0065] like Figure 1 、 Figure 2 、 Figure 3 as well as Figure 4 As shown, in order to improve the accuracy of movement along the first direction X, in a preferred embodiment, the laser precision adjustment device 10 further includes a base plate 500 and a plurality of slide rails 600, the number of which is multiple, for example, 2, 4, or 6. The plurality of slide rails 600 are divided into two groups and arranged on both sides of the linkage module 200. The slide rails 600 are mounted on the base plate 500 by threaded connection, concave-convex fit, snap connection, etc., and the extension direction of the slide rails 600 and the base plate 500 are parallel to the first direction X. A slider 310 is protruded on the side of the support plate 300 away from the mirror module 400. The slider 310 slides with the slide rail 600. In a specific configuration, the number of slide rails 600 can be one, two, three, four, or more than four. The slider 310 is adapted to the number of the slide rails 600. The slider 310 and the support plate 300 can be integrally formed. The slider 310 and the support plate 300 can also be prepared separately and then assembled into one.

[0066] When the laser precision adjustment device 10 is in use, the output of the first power source 100 drives the linkage module 200 to move, causing the multiple connecting portions 210 to move equidistantly in the first direction X. During this movement, the sliders 310 on the support plate 300 slide under the guidance of the slide rails 600 to ensure the straightness, accuracy, and stability of the support plate 300 and the mirror module 400 along the first direction X. In a specific configuration, the first power source 100 can be mounted on the base plate 500 to facilitate the movement of the entire laser precision adjustment device 10. After the support plate 300 and the mirror module 400 move a set distance along the first direction X, the clamps on the slide rails 600 secure the sliders 310 and the slide rails 600, reducing the possibility of errors caused by laser vibration that could affect precision. In a specific configuration, the positions of the slide rails 600 and the sliders 310 can be interchanged, and the two sets of slide rails 600 are symmetrically positioned relative to the linkage module 200 to ensure uniform force distribution across the support plate 300, improve the reliability of the support plate 300's movement, and ensure high long-term operational stability.

[0067] like Figure 1 、 Figure 2 as well as Figure 3 As shown, the reflector assembly 410 has various structural forms. In a preferred embodiment, the reflector assembly 410 includes a first reflector 411 and a second reflector 412. The first reflector 411 and the second reflector 412 are respectively mounted on the two ends of the support plate 300 along the extension direction thereof through a mirror frame 430, wherein:

[0068] The first reflector 411 is used to receive laser light from the laser module 20. The laser light is reflected on the first reflector 411 and then transmitted to the second reflector 412. The plurality of first reflectors 411 are staggered in the extension direction of the support plate 300 so that each of the plurality of first reflectors 411 can receive laser light from the laser module 20.

[0069] The second reflector 412 is disposed close to the galvanometer mirror 420 . The second reflector 412 is used to receive the light reflected by the first reflector 411 . The light is input to the galvanometer mirror 420 after being reflected by the second reflector 412 .

[0070] When the laser precision adjustment device 10 is used, after completing the coarse adjustment of equidistant movement in the first direction X, the laser light emitted by the laser module 20 is reflected by the first reflector 411 and input to the second reflector 412. After being reflected by the second reflector 412, it is transmitted to the galvanometer 420. The reflected light is precisely positioned and highly accurately compensated within the galvanometer 420, thereby enabling precise positioning of multi-path laser marking and improving the adjustment accuracy of the laser marking. In specific settings, one laser precision adjustment device 10 can correspond to one laser module 20 or multiple laser modules 20. The setting position of the reflector group 410 is adaptively adjusted according to the position of the laser module 20. The structure of the reflector group 410 is not limited to this and can also be other forms that meet the requirements.

[0071] like Figure 1 as well as Figure 2 As shown, specifically, the mirror module 400 further includes a second power source 700. The fixed end of the second power source 700 is mounted to the support plate 300 by means of a threaded connection, a concave-convex fit, a snap-fit connection, etc. The output end of the second power source 700 is used to provide a driving force for movement along the vertical direction Z. The galvanometer 420 and the second reflector 412 are mounted on the output end of the second power source 700 by means of a threaded connection, a concave-convex fit, a snap-fit connection, etc. In a specific configuration, the second power source 700 can be directly the linear module 110, or it can be in other forms that meet the requirements.

[0072] When the laser precision adjustment device 10 is used, the second power source 700 is activated to drive the galvanometer 420 and the second reflector 412 to move up and down along the vertical direction Z, and adjust the focus to achieve automatic focusing, thereby achieving high-precision positioning of multi-path laser marking.

[0073] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0074] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. A laser precision adjustment device, used in conjunction with a laser module, characterized in that: include: a first power source, the output end of which is used to provide a driving force for movement along a first direction; a linkage module connected to the output end of the first power source, the linkage module having a plurality of connection parts, and the plurality of connection parts are driven by the first power source to move at equal intervals along the first direction; A plurality of support plates, wherein one support plate is connected to one of the connecting parts; A plurality of mirror modules, one of the mirror modules being mounted on one of the support plates and comprising a reflector group and a galvanometer mirror, the reflector group being used to receive and reflect the laser light emitted by the laser module, the galvanometer mirror being used to receive the reflected light from the reflector group and perform precision compensation; The reflector assembly includes a first reflector and a second reflector mounted at both ends of the support plate along its extension direction, wherein: The first reflector is used to receive the laser from the laser module, and a plurality of the first reflectors are staggered in the extension direction of the support plate; The second reflector is disposed close to the galvanometer mirror and is used to receive the light reflected by the first reflector and input the reflected light to the galvanometer mirror for precise positioning and accuracy compensation; The mirror module further includes a second power source, a fixed end of the second power source is mounted on the support plate, an output end is used to provide a driving force for movement in a vertical direction, and the galvanometer and the second reflector are mounted on the output end of the second power source; After a rough adjustment of evenly spaced movement in the first direction, the second power source is activated to drive the galvanometer mirror and the second reflector to move in the vertical direction for precise positioning and accuracy compensation.

2. The laser precision adjustment device according to claim 1, characterized in that: The linkage module is a hinge linkage structure having a plurality of linkage components that are telescopic along the first direction, and the connecting portion is located between two adjacent linkage components.

3. The laser precision adjustment device according to claim 2, characterized in that: The linkage module includes a plurality of first plates and a plurality of second plates arranged in parallel and at intervals, wherein: The middle areas of the second plate and the first plate are arranged opposite to each other and are rotatably connected to form the connecting portion; The ends of the second plate and the first plate are rotatably connected, two adjacent second plates and two adjacent first plates form the linkage assembly, and the second plate and the first plate at one end are connected to the output end of the first power source.

4. The laser precision adjustment device according to claim 3, characterized in that: The linkage module also includes a plurality of threaded connectors for locking the first plate body, the second plate body and the support plate. The threaded connectors have a threaded section and an optical axis section along their axis. The optical axis section is rotatably accommodated in the middle area of the first plate body. The threaded section is threadedly connected to the middle areas of the support plate and the second plate body respectively.

5. The laser precision adjustment device according to claim 4, characterized in that: The linkage module further includes a plurality of spacer rings, which are arranged between the middle area of the second plate body and the middle area of the first plate body and are sleeved on the threaded connector.

6. The laser precision adjustment device according to claim 3, characterized in that: The second plate body and the end portions of the first plate body are rotatably connected via bearings or pins.

7. The laser precision adjustment device according to claim 3, characterized in that: The linkage module also includes two third plates, the length of which is half the length of the second plate. One end of the two third plates is rotatably connected and fixedly connected to the output end of the first power source, and the other end is rotatably connected to the end of the second plate and the end of the first plate respectively.

8. The laser precision adjustment device according to claim 1, characterized in that: It also includes a base plate and multiple slide rails. The multiple slide rails are divided into two groups and arranged on both sides of the linkage module. The slide rails are installed on the base plate, and the extension direction of the base plate is parallel to the first direction. A slider protrudes from the side of the support plate away from the mirror module, and the slider slides in cooperation with the slide rails.

9. The laser precision adjustment device according to claim 1, characterized in that: The fixed end of the second power source is threadedly connected to the support plate.

10. The laser precision adjustment device according to claim 1, characterized in that: The output end of the second power source is threadedly connected to the galvanometer and the second reflecting mirror.

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