End face processing device

Abstract

Provided is an end face processing device that can reduce the load of ensuring the tensile strength of a linear abrasive brush or the like, while enabling the use of abrasive brushes of various materials or configurations. The solution of the present invention is an end face processing device 100 that includes: a workpiece holder 110 that detachably holds a workpiece 90 formed of a glass substrate; a second abrasive 130 that performs abrasive processing on a recess 92 of the workpiece 90; and a back surface support 140 that restricts displacement of the second abrasive 130. The second abrasive 130 is configured with a metal linear core 130a and an abrasive portion 130b formed of a resin abrasive brush around the core 130a. The back surface support 140 is formed with a support portion 142 in a block-shaped support body 141. The support portion 142 is configured as a curved surface with a cross section that can accommodate the abrasive portion 130b. The back surface support 140 is positioned so that the support portion 142 is on an extension line of an arc of curvature that forms the recess 92.

Description

TECHNICAL FIELD

[0001] The present application relates to an end surface processing device that performs grinding processing on an end surface of a workpiece. BACKGROUND

[0002] From the past, there has been an end surface processing device that performs grinding processing on an end surface of a workpiece. For example, Patent Literature 1 discloses an end surface processing device that performs grinding processing on a hole or a concave portion that is concavely recessed in a workpiece in which glass plates are stacked, by a linear abrasive brush that has an abrasive brush around a linear body that extends linearly.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT LITERATURE

[0005] Patent Literature 1: Japanese Patent Application Publication No. 2010-167518

[0006] However, in the end surface processing device described in Patent Literature 1, in order to prevent the linear abrasive brush from being deformed in flexure in grinding processing, it is necessary to impart a strong tension, and there is a problem that the load for securing the tensile strength of the linear abrasive brush is high, and the linear abrasive brush that can be used is limited. SUMMARY

[0007] The present application is achieved to address the above problems, and has an object to provide an end surface processing device that can reduce the load for securing the tensile strength of an abrasive tool such as a linear abrasive brush, and can use an abrasive tool of various materials or structures.

[0008] In order to achieve the above object, the present application is characterized by comprising: a workpiece holding tool that detachably holds a workpiece; an abrasive tool driving unit that links an abrasive tool that has an abrasive portion around an axis that is a rotation center, and rotates and drives the abrasive tool around the axis, the abrasive portion being to grind an end surface of the workpiece; and a back surface supporting tool that has a supporting portion that contacts the abrasive portion on the opposite side of the workpiece from the abrasive tool that is grinding the end surface of the workpiece, thereby restricting deformation of the abrasive tool toward the opposite side.

[0009] If the present application is configured as described above, the end surface processing device can reduce the load for securing the tensile strength of the abrasive tool, and can use an abrasive tool of various materials or structures, because the end surface processing device has a back surface supporting tool that contacts the abrasive portion on the opposite side of the workpiece from the abrasive tool that is grinding the end surface of the workpiece, thereby restricting deformation of the abrasive tool toward the opposite side. Incidentally, as the abrasive tool, in addition to a configuration in which an endless number of bristles or a porous elastic body is provided around a core body that extends linearly, a configuration in which only the elastic body is provided without the core body can be adopted.

[0010] Further, the present application is characterized in that, in the end surface processing device, the support portion in the back surface support member is formed to be concavely recessed with respect to the polishing portion.

[0011] According to the other feature of the present application configured as such, in the end surface processing device, since the support portion in the back surface support member is formed to be concavely recessed with respect to the polishing portion, the polishing portion can be accommodated and deformation of the polishing portion can be suppressed, and scattering of cutting powder and processing liquid generated at the time of polishing processing can be prevented. In this case, as the support portion in the back surface support member, in addition to the cross-sectional shape being configured by a curved surface in the shape of a circular arc (including an elliptical shape), the cross-sectional shape can also be configured by a combination of flat surfaces in the shape of a square or a triangle or a combination of flat surfaces and curved surfaces.

[0012] Further, the present application is characterized in that, in the end surface processing device, at least one of both end portions in the axis direction of the polishing member has an enlarged opening portion that expands toward the outside of the axis direction and is open in the support portion in the back surface support member.

[0013] According to the other feature of the present application configured as such, in the end surface processing device, since at least one of both end portions of the support portion in the back surface support member is formed with an enlarged opening portion that expands toward the outside of the axis direction and is open, the polishing portion can be easily inserted into the support portion, and damage to the support portion and scattering of cutting powder and processing liquid at the time of reciprocating movement of the polishing portion with respect to the support portion can be prevented.

[0014] Further, the present application is characterized in that, in the end surface processing device, a support member displacement unit that brings the back surface support member closer to or further away from the polishing member is further provided.

[0015] According to the other feature of the present application configured as such, in the end surface processing device, since the support member displacement unit that brings the back surface support member closer to or further away from the polishing member is further provided, the back surface support member can be brought further away from the polishing member without the back surface support member, and the degree (strength) of restriction of deformation of the polishing portion can be adjusted by appropriately setting the position of the back surface support member with respect to the polishing member.

[0016] Further, the present application is characterized in that, in the end surface processing device, a processing liquid supply unit that supplies processing liquid to the back surface support member is further provided, and a discharge hole that discharges the processing liquid supplied from the processing liquid supply unit is open in the support portion in the back surface support member.

[0017] If the other features of the present application are configured as such, the end surface processing device can efficiently and effectively supply the abrasive portion of the abrasive tool with the processing liquid supplied from the processing liquid supply unit while preventing scattering of the processing liquid, because the end surface processing device is further provided with a processing liquid supply unit that supplies the back surface support with a processing liquid such as an abrasive or a coolant, and the back surface support has a discharge hole that discharges the processing liquid supplied from the processing liquid supply unit, which is open in the support portion. Also, the end surface processing device can suppress deformation of the abrasive portion by spraying the processing liquid discharged from the discharge hole. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a diagram schematically showing the configuration of the main portion of the end surface processing device according to an embodiment of the present application.

[0019] Figure 2 is a diagram schematically showing the configuration of the main portion of the end surface processing device according to an embodiment of the present application. Figure 1

[0020] Figure 3 is a block diagram of a control system that controls the operation of the end surface processing device according to an embodiment of the present application. Figure 1

[0021] Figure 4 is a diagram schematically showing the appearance configuration of a processing target, i.e., a workpiece, of the end surface processing device according to an embodiment of the present application. Figure 1

[0022] Figure 5 is a cross-sectional view schematically showing a state in which the second abrasive tool of the end surface processing device according to an embodiment of the present application is performing abrasive processing on a recess of a workpiece. Figure 1

[0023] Figure 6 is a cross-sectional view schematically showing the internal configuration of the back surface support of the end surface processing device according to an embodiment of the present application. Figure 1

[0024] Figure 7 is a diagram showing a state in which the first abrasive portion of the end surface processing device according to an embodiment of the present application is performing abrasive processing on a workpiece. Figure 1

[0025] Figure 8 is a diagram showing a state in which the second abrasive portion of the end surface processing device according to an embodiment of the present application is performing abrasive processing on a workpiece. Figure 1

[0026] Figure 9 is a cross-sectional view schematically showing a state in which the second abrasive tool of a variation of the present application is performing abrasive processing on a recess of a workpiece.

[0027] Figure 10 ​​​​​​​This is a cross-sectional view schematically illustrating the state in which a second grinding tool, according to another variation of the present invention, performs grinding processing on the concave portion of the workpiece.

[0028] Figure 11 This is a cross-sectional view schematically illustrating the state in which a second grinding tool, according to another variation of the present invention, performs grinding processing on the concave portion of the workpiece.

[0029] Figure 12 This is an explanatory diagram schematically showing the configuration of the main parts of the end-face processing apparatus of other variations of the present invention from the front. Detailed Implementation

[0030] Hereinafter, one embodiment of the end face processing apparatus of the present invention will be described with reference to the accompanying drawings. Figure 1 Explanation is provided. Figure 1 This is an explanatory diagram schematically showing the configuration of the main parts of the end-face processing apparatus 100 of the present invention from the front. Furthermore, Figure 2 To illustrate from the side Figure 1 The diagram illustrates the structure of the main components of the end-face processing apparatus 100 shown. Furthermore, Figure 3 To control Figure 1 This is a block diagram of the control system for the operation of the end-face processing apparatus 100. Incidentally, for ease of understanding of the invention, the figures referenced in this specification are schematically shown with exaggerated representations of some components. Therefore, the dimensions or proportions of the various components may differ. This end-face processing apparatus 100 is a mechanical device that grinds the end face 91 of a glass substrate 90 used in semiconductor manufacturing processes as a workpiece.

[0031] First, before describing the end-face processing apparatus 100 of the present invention, the workpiece 90 to be processed by this end-face processing apparatus 100 will be described. This workpiece 90 is as follows... Figure 4 As shown, this is a component formed during semiconductor manufacturing to create fine electronic circuit patterns, functioning as a photomask, and is constructed by forming a circular plate of glass. In this case, the workpiece 90 has an outer diameter of approximately 100mm to 300mm and a thickness of approximately 0.5mm to 5mm when viewed from above. In this embodiment, the workpiece 90 is formed into a circle with an outer diameter of 300mm and a thickness of 1mm when viewed from above.

[0032] Furthermore, in the workpiece 90, a recess 92 is formed in a portion of the end face 91 that forms the outer edge. The recess 92 is a portion used to define the position of the workpiece 90 on the glass substrate during the semiconductor manufacturing process, and is formed to be recessed from the end face 91. In this embodiment, the recess 92 is formed by an arc of a semicircle forming a circle with a diameter of 3 mm.

[0033] End surface processing device 100

[0034] End surface processing device 100 is provided with a workpiece holder 110. The workpiece holder 110 is a mechanical device that detachably holds a plurality of workpieces 90 stacked, and is mainly configured to include a frame 111, a support table 112, a push body 113, and link bodies 115 and 117, respectively.

[0035] The frame 111 is a part that supports the support table 112 and the push body 113, and is configured in a frame shape in which a metal rod having a square cross-sectional shape is assembled in a square shape in a front view. The support table 112 is a part on which a plurality of workpieces 90 stacked are placed, and is configured in a plate shape by a metal material. This support table 112 is a foot portion 112a extending downward in the drawing is supported in a rotatable state in a lower edge in the drawing in the frame 111 via a bearing not shown.

[0036] The push body 113 is a part to push the workpieces 90 disposed on the support table 112 from above in the drawing to fix the workpieces on the support table 112, and is configured in a plate shape by a metal material. This push body 113 is supported in an upper edge in the drawing in the frame 111 in a rotatable state via a locking mechanism 114 and the link body 117, respectively. The locking mechanism 114 is a part to approach or move away the push body 113 with respect to the support table 112, and is configured to include a feed screw mechanism.

[0037] That is, an operator rotates a nut 114a in the locking mechanism 114 to advance or retract a feed screw 114b in the upward and downward direction in the drawing, whereby the push body 113 can approach or move away the support table 112. This locking mechanism 114 has one end (lower side in the drawing) linked to the push body 113, and the other end (upper side in the drawing) linked to a workpiece drive motor 118. Incidentally, in the Figure 1 In the drawing, the upward and downward direction in the drawing is the Z-axis direction, the left and right direction in the drawing perpendicular to the Z-axis direction is the X-axis direction, and the direction perpendicular to each of the Z-axis direction and the X-axis direction is the Y-axis direction.

[0038] The link body 115 is a part to link the workpiece holder 110 to the base 116, and is configured in a cylindrical shape that can be inserted into the upper surface of the base 116 by a metal material. The base 116 is a part to support the workpiece holder 110, and is configured in a plate shape by a metal. This base 116 is assembled in a housing not shown in the end surface processing device 100.

[0039] The coupling body 117 is a member for coupling the workpiece holder 110 to the motor support 118a, and is formed in a cylindrical shape by a metal material so as to be inserted into the lower surface of the motor support 118a. In this case, the lock mechanism 114 is coupled to the workpiece drive motor 118 in the cylindrical coupling body 117.

[0040] The workpiece drive motor 118 is an electric motor for rotating and displacing the lock mechanism 114, thereby rotating and displacing the workpiece 90 held by the support table 112 and the push body 113, and is actuated and controlled by the control device 150 described later. This workpiece drive motor 118 is supported by the motor support 118a. The motor support 118a is formed by a plate-shaped body made of a metal material provided above the workpiece holder 110, and is supported by a housing not shown in the end surface processing device 100. The first polishing tool 120 and the second polishing tool 130 are respectively provided on the left and right sides in the workpiece holder 110 shown in the drawing.

[0041] The first polishing tool 120 is a member for polishing the end surface 91 of the workpiece 90 held by the support table 112 and the push body 113, and is formed by forming a polishing portion 120b on the outer surface of a core 120a formed of a cylindrical body made of a metal material. The polishing portion 120b is a member for contacting the end surface 91 to perform polishing, and is formed by an infinite number of bristles made of a resin material.

[0042] That is, the polishing portion 120b is formed by a polishing brush extending outward in the radial direction from the outer surface of the core 120a formed of a cylindrical body. In the present embodiment, the first polishing tool 120 is formed to a length greater than the thickness of the workpiece 90 held by the support table 112 and the push body 113, but can also be formed to the same length as the thickness of the workpiece 90 or a length shorter than the thickness of the workpiece 90. Also, the first polishing tool 120 is formed to a larger diameter than the second polishing tool 130 in order to increase the contact area with the end surface 91.

[0043] The first polishing tool 120 is assembled in a detachable state to the first polishing tool drive motor 121. The first polishing tool drive motor 121 is an electric motor for rotating and driving the first polishing tool 120, and is actuated and controlled by the control device 150. The first polishing tool drive motor 121 is supported by the motor support 122. The motor support 122 is formed by a plate-shaped body made of a metal material provided above the first polishing tool 120, and is supported by the first X-axis direction displacement mechanism 123 and the first Z-axis direction displacement mechanism 124, respectively. That is, the first polishing tool 120 is provided in a state of hanging downward from the motor support 122. Incidentally, the first polishing tool 120, the first polishing tool drive motor 121, and the motor support 122 are omitted from the drawing in Figure 2 the first embodiment.

[0044] The first X-axis direction displacement mechanism 123 is a mechanical device that displaces the first abrasive tool driving motor 121 and the first abrasive tool 120 to and from the X-axis direction (the left-right direction in the drawing) in the drawing via the motor support body 122, and is configured to include an electric motor and a feed screw mechanism, etc. not shown. This first X-axis direction displacement mechanism 123 is supported by a housing not shown in the end surface processing device 100, and is actuated and controlled by the control device 150.

[0045] The first Z-axis direction displacement mechanism 124 is a mechanical device that displaces the first abrasive tool driving motor 121 and the first abrasive tool 120 to and from the Z-axis direction (the up-down direction in the drawing) in the drawing via the motor support body 122, and is configured to include an electric motor and a feed screw mechanism, etc. not shown. This first Z-axis direction displacement mechanism 124 is supported by the first X-axis direction displacement mechanism 123, and is actuated and controlled by the control device 150. That is, the first Z-axis direction displacement mechanism 124 is displaced to and from the X-axis direction in the drawing in common with the first abrasive tool driving motor 121 and the first abrasive tool 120 by the first X-axis direction displacement mechanism 123.

[0046] The second abrasive tool 130 is a member for performing abrasive processing on the recessed portion 92 in the workpiece 90 held by the support table 112 and the push body 113, and is configured by a plurality of bristles made of resin extending outward in the radial direction in a state of being provided on the outer surface of a rod body. Specifically, the second abrasive tool 130 is mainly configured by a core body 130a and an abrasive portion 130b. The core body 130a is a portion that supports the abrasive portion 130b, and is configured by a metal wire wound in an elongated manner and a clamping portion configured by a cylindrical body that holds the end portion of the metal wire on one side.

[0047] The abrasive portion 130b, as shown in Figure 5 , is a member that abrades the inner surface of the recessed portion 92, and is configured by a plurality of bristles made of resin extending outward in the radial direction from the outer surface of the core body 130a. That is, the abrasive portion 130b is configured by an abrasive brush extending outward in the radial direction from the outer surface of the core body 130a formed in a rod shape. In this case, the abrasive portion 130b is formed to have an outer diameter slightly larger than the inner diameter of the recessed portion 92, and is formed to have a length equal to or greater than the thickness of the workpiece 90 held by the support table 112 and the push body 113. Incidentally, the second abrasive tool 130 can also be formed to have a length equal to the thickness of the workpiece 90 or a length shorter than the thickness of the workpiece 90.

[0048] This second abrasive tool 130 is assembled in a detachable state to a second abrasive tool driving motor 131. The second abrasive tool driving motor 131 is an electric motor for rotationally driving the second abrasive tool 130, and is actuated and controlled by the control device 150. This second abrasive tool driving motor 131 is supported by a motor support body 132. Incidentally, this second abrasive tool driving motor 131 corresponds to the abrasive tool driving unit of the present application.

[0049] The motor support body 132 is a plate-shaped body made of metal provided above the second abrasive tool 130, and is supported by a second X-axis direction displacement mechanism 133 and a second Z-axis direction displacement mechanism 134, respectively. That is, the second abrasive tool 130 is disposed in a state of hanging down from the motor support body 132. Incidentally, in the Figure 2

[0050] The second X-axis direction displacement mechanism 133 is a mechanical device for reciprocally displacing the second abrasive tool driving motor 131 and the second abrasive tool 130 in the X-axis direction (the left-right direction in the drawing) shown in the drawing via the motor support body 132, and is configured to have an electric motor and a feed screw mechanism, etc. not shown. This second X-axis direction displacement mechanism 133 is supported by a housing not shown in the end surface processing device 100, and is actuated and controlled by the control device 150.

[0051] The second Z-axis direction displacement mechanism 134 is a mechanical device for reciprocally displacing the second abrasive tool driving motor 131 and the second abrasive tool 130 in the Z-axis direction (the up-down direction in the drawing) shown in the drawing via the motor support body 132, and is configured to have an electric motor and a feed screw mechanism, etc. not shown. This second Z-axis direction displacement mechanism 134 is supported by the second X-axis direction displacement mechanism 133, and is actuated and controlled by the control device 150. That is, the second Z-axis direction displacement mechanism 134 is reciprocally displaced in the X-axis direction shown in the drawing together with the second abrasive tool driving motor 131 and the second abrasive tool 130 by the second X-axis direction displacement mechanism 133.

[0052] A back surface support 140 is provided on the opposite side of the workpiece holder 110 with respect to the second abrasive tool 130. The back surface support 140 is provided to support the workpiece holder 110 from the back surface side, and is configured to have a plate-shaped body made of metal. The back surface support 140 is supported by the second X-axis direction displacement mechanism 133 and the second Z-axis direction displacement mechanism 134, respectively. Figure 5 Figure 6 ​​indicated by the arrow, and is a member that is deformed in a direction away from the recess 92 with respect to the second abrasive 130, and is formed of a resin material such as a polyacetal or a metal material in a block shape. More specifically, the back surface support 140 is formed so as to have a support portion 142 and a discharge hole 144 in a support body 141 in the present embodiment; wherein the support body is formed of a resin material in a block shape similar to an elongated rectangular parallelepiped extending in the Z-axis direction shown in the drawing.

[0053] The support portion 142 is a portion that contacts the abrasive portion 130b of the second abrasive 130 to thereby prevent the abrasive portion 130b from being deformed in the opposite side of the recess 92, and is formed so as to be recessed in a side surface of the support body 141 facing the second abrasive 130. More specifically, the support portion 142 is formed of a curved surface having a curvature identical to that of a circular arc of the recess 92. In this case, the support portion 142 is formed so as to have a depth shallower than that of the recess 92 in order to prevent the support body 141 from contacting the workpiece 90.

[0054] Further, the length of the support portion 142 in the Z-axis direction shown in the drawing is formed so as to be approximately identical to the length of the recess 92 in the Z-axis direction shown in the drawing. Incidentally, the length of the support portion 142 in the Z-axis direction shown in the drawing can also be formed so as to be shorter than the length of the recess 92 in the Z-axis direction shown in the drawing, or can also be formed so as to be longer than the length of the recess 92 in the Z-axis direction shown in the drawing. Further, both end portions in the Z-axis direction shown in the drawing in the support portion 142 are formed with enlarged opening portions 143a and 143b, respectively.

[0055] The enlarged opening portions 143a and 143b are portions that allow the abrasive portion 130b of the second abrasive 130 to be easily inserted into the support portion 142 and to be easily displaced to and from the Z-axis direction shown in the drawing, and are formed in a shape in which a recessed notch shape is expanded outward in the axial direction of the core 130a (the Z-axis direction shown in the drawing).

[0056] The discharge hole 144 is a passage that supplies the abrasive portion 130b with a processing liquid formed of an abrasive, and one end portion (the left end portion shown in the drawing) is opened in the support portion 142, while the other end portion (the right end portion shown in the drawing) is communicated with a distribution passage 145. This discharge hole 144 is formed with a plurality of holes along the length direction of the support portion 142 (the Z-axis direction shown in the drawing). In the present embodiment, the discharge hole 144 is formed with seven holes at equal intervals along the length direction of the support portion 142 (the Z-axis direction shown in the drawing). Incidentally, in the Figure 5 With Figure 6 the flow of the processing liquid is indicated by a dotted arrow (in Figures 9-11 , the same also applies).

[0057] The distribution passage 145 is a portion for distributing the processing liquid to the respective discharge holes 144, and is formed so as to extend in the Z-axis direction shown in the drawing in a manner of communicating with the respective discharge holes 144. In this case, the upper end portion shown in the drawing of the distribution passage 145 is opened at the upper end surface of the support body 141 shown in the drawing, and this opening portion is sealed by a plug 145a. Also, this distribution passage 145 is opened at the side surface on the right side shown in the drawing, and a processing liquid supply pipe 146 is connected to this opening portion.

[0058] The processing liquid supply pipe 146 is a pipe for supplying the processing liquid formed of a polishing agent to the back support 140, and is composed of a hose or a pipe made of resin or metal. In the present embodiment, the processing liquid is a polishing agent composed of a suspension in which cerium oxide is dispersed. This processing liquid supply pipe 146 has one end portion connected to the support body 141 of the back support 140, and the other end portion is connected to a processing liquid supply device 147. The processing liquid supply device 147 is a processing liquid tank (not shown) for storing the processing liquid, and is configured to have a pipe, a valve, a pump, and the like for circulating the processing liquid between the processing liquid tank and the polishing processing region of the workpiece 90. This processing liquid supply device 147 is actuated and controlled by the control device 150.

[0059] The back support 140 is supported by a support displacement mechanism 148. The support displacement mechanism 148 is a mechanical device for bringing the back support 140 closer to or farther from the second polishing tool 130, and is mainly configured to have a sliding table 148a and a table drive motor 148b. The sliding table 148a is a mechanical device for supporting the back support 140 and displacing it to and fro in the direction (X-axis direction shown in the drawing) of approach or departure with respect to the second polishing tool 130.

[0060] Specifically, the sliding table 148a is configured to have a table for placing the back support 140, a feed screw mechanism for displacing the table in the X-axis direction shown in the drawing, and a housing for covering the feed screw mechanism, and the like. The table drive motor 148b is a drive source for displacing the table in the sliding table 148a in the X-axis direction shown in the drawing via the feed screw mechanism, and is composed of an electric motor actuated and controlled by the control device 150. This support displacement mechanism 148 is supported by a housing (not shown) in the end surface processing device 100.

[0061] The control device 150 is a microcomputer composed of a CPU, a ROM, a RAM, and the like, and comprehensively controls the operations of the entire face processing device 100, and simultaneously performs polishing processing on the workpiece 90 by executing a face processing program not shown that is stored in advance in a storage device. Specifically, the control device 150 controls the operations of the workpiece driving motor 118, the first polishing tool driving motor 121, the first X-axis direction displacement mechanism 123, the first Z-axis direction displacement mechanism 124, the second polishing tool driving motor 131, the second X-axis direction displacement mechanism 133, the second Z-axis direction displacement mechanism 134, the processing liquid supply device 147, and the support tool displacement mechanism 148.

[0062] The control device 150 has an operation panel 151 that has an input device composed of a switch group that receives an instruction from an operator and inputs the instruction to the control device 150, a display lamp that displays the operation state of the control device 150, and a liquid crystal display device. Incidentally, the control device 150 also has a power supply portion and an outer cover that surrounds the entire face processing device 100, but these components are not directly related to the present application and thus the description thereof is omitted; the power supply portion receives external power or electricity and supplies the power to each of the workpiece driving motor 118, the first polishing tool driving motor 121, the first X-axis direction displacement mechanism 123, the first Z-axis direction displacement mechanism 124, the second polishing tool driving motor 131, the second X-axis direction displacement mechanism 133, the second Z-axis direction displacement mechanism 134, the processing liquid supply device 147, and the support tool displacement mechanism 148.

[0063] (Operation of the face processing device 100)

[0064] Next, the operation of the face processing device 100 thus configured will be described with reference to Figure 3 First, an operator who performs polishing processing on the workpiece 90 using the face processing device 100 turns on a power supply switch not shown in the face processing device 100 to activate the control device 150. Thereby, the control device 150 starts to operate by executing a control program stored in advance in a ROM or the like, and becomes a standby state in which it waits for an instruction from the operator.

[0065] Next, as a first process, the operator holds the workpiece 90 in the workpiece holding tool 110 in the processing region of the face processing device 100. Specifically, the operator places the workpiece 90 in which a plurality of glass substrates are stacked on the support table 112 in the workpiece holding tool 110, and then lowers the push body 113 by operating the nut 114a, thereby holding the workpiece 90 in a state of being sandwiched between the support table 112 and the push body 113 (see Figure 1 and Figure 2 ).

[0066] Next, as the second step, the operator grinds the end face 91 of the workpiece 90. Specifically, the operator instructs the control device 150 to begin grinding the end face 91 by operating the control panel 151 of the end face processing device 100. The control device 150, responding to this instruction, executes a grinding procedure (not shown) to begin grinding the end face 91 of the workpiece 90.

[0067] Specifically, the control device 150 controls the operation of the workpiece drive motor 118 to rotate the workpiece 90 held by the support table 112 and the pusher 113, and simultaneously controls the operation of the first grinding tool drive motor 121 to rotate the first grinding tool 120. In this case, the control device 150 causes the workpiece 90 to rotate at a slower speed than the first grinding tool 120 and in the opposite direction to the rotation direction of the first grinding tool 120.

[0068] Next, the control device 150 will... Figure 7 As shown, the operation of the first X-axis displacement mechanism 123 causes the first grinding tool 120 to approach the workpiece 90, thereby bringing the first grinding tool 120 into contact with the end face 91 of the workpiece 90. In this case, the control device 150 controls the operation of a machining fluid supply device (not shown) to supply machining fluid (not shown) to the contact portion between the end face 91 of the workpiece 90 and the first grinding tool 120. Then, the control device 150 controls the operation of the first Z-axis displacement mechanism 124 to move the first grinding tool 120 back and forth in the Z-axis direction (vertical direction shown in the figure). Thus, the end face processing apparatus 100 performs grinding processing on the end face 91 of the workpiece 90 using the first grinding tool 120.

[0069] Next, after the workpiece 90's end face 91 has been ground for a predetermined time using the first grinding tool 120, the control device 150 controls the operation of the first X-axis displacement mechanism 123 and the first Z-axis displacement mechanism 124 to move the first grinding tool 120 back to its original position. Furthermore, the control device 150 controls the operation of the workpiece drive motor 118 and the first grinding tool drive motor 121 to stop the rotational drive of the workpiece 90 and the first grinding tool 120, thereby ending the grinding of the end face 91. In this way, the workpiece 90's end face 91 is ground by the grinding unit 120b.

[0070] Next, as a third step, the operator performs polishing processing on the recess 92 of the workpiece 90. Specifically, the operator instructs the control device 150 to start the polishing processing on the recess 92 by operating the operation panel 151 of the end surface processing device 100. The control device 150 in response to this instruction executes a polishing processing program not shown to start the polishing processing on the recess 92 of the workpiece 90.

[0071] Specifically, the control device 150 controls the workpiece drive motor 118 to drive the workpiece 90 to rotate, thereby positioning the recess 92 at a position facing the second polishing tool 130. Next, the control device 150 controls the second Z-axis direction displacement mechanism 134 to raise the second polishing tool 130, and then controls the support tool displacement mechanism 148 to approach the back surface support tool 140 to the workpiece 90 and to position the back surface support tool 140 to face the end surface 91 of the workpiece 90.

[0072] In this case, the control device 150 positions the back surface support tool 140 so that the support portion 142 of the back surface support tool 140 is positioned on an extension line of an arc constituting the curvature of the recess 92, as shown in FIG. 6. That is, the support portion 142 is positioned on the circumference of the same circle as the recess 92. Next, the control device 150 controls the processing liquid supply device 147 to supply the processing liquid to the back surface support tool 140. By this, the processing liquid is supplied from the discharge hole 144 to the cylindrical region surrounded by the recess 92 and the support portion 142. Figure 5

[0073] Next, the control device 150 controls the second X-axis direction displacement mechanism 133 to move the second polishing tool 130 toward the workpiece 90, thereby positioning the second polishing tool 130 above the cylindrical region surrounded by the recess 92 and the support portion 142, and then controls the second polishing tool drive motor 131 to drive the second polishing tool 130 to rotate. Then, the control device 150 controls the second Z-axis direction displacement mechanism 134 to lower the second polishing tool 130, thereby inserting the polishing portion 130b into the cylindrical region surrounded by the recess 92 and the support portion 142, and then controls the second Z-axis direction displacement mechanism 134 to reciprocally displace the second polishing tool 130 in the Z-axis direction (the up-down direction in the drawing) shown in the drawing. Figure 8 By this, the end surface processing device 100 polishes the recess 92 of the workpiece 90 with the polishing portion 130b. In this case, the polishing portion 130b is prevented from being deflected toward the opposite side of the workpiece 90 (i.e., the support portion 142 side) by the support portion 142, so that the polishing portion 130b can maintain contact with the recess 92 and polish the recess 92 with high accuracy.

[0074]

[0075] ​​Incidentally, the control device 150 can also actuate the back surface support 140 to contact the second abrasive 130 in the state of contacting the recess 92 after the second abrasive 130 contacts the recess 92, instead of the above-mentioned procedure, that is, the procedure of facing the back surface support 140 to the recess 92 and then inserting the second abrasive 130 into the recess 92 and the support 142.

[0076] Next, the control device 150 controls the second Z-axis direction displacement mechanism 134 to raise the second abrasive 130 to withdraw the abrasive 130b from the cylindrical region surrounded by the recess 92 and the support 142, in the case where the second abrasive 130 has been used to grind the recess 92 of the workpiece 90 for a predetermined time. Next, the control device 150 controls the second abrasive drive motor 131 to stop the rotational drive of the second abrasive 130, and controls the machining liquid supply device 147 to stop the supply of the machining liquid to the second abrasive 130.

[0077] Next, the control device 150 controls the support displacement mechanism 148 to displace the back surface support 140 away from the workpiece 90 to the original position. Also, the control device 150 controls the second X-axis direction displacement mechanism 133 to move the second abrasive 130 away from the workpiece 90, and controls the second Z-axis direction displacement mechanism 134 to lower the second abrasive 130 to displace to the original position, thereby ending the grinding of the recess 92. Thus, the workpiece 90 is subjected to the grinding of the recess 92 by the abrasive 130b.

[0078] Next, as the fourth procedure, the operator removes the workpiece 90 from the workpiece holder 110. Specifically, the operator raises the push body 113 by operating the nut 114a to take out the workpiece 90 on the support table 112. Thus, the operator can perform the grinding of the end surface 91 and the recess 92 of the workpiece 90.

[0079] Then, the operator performs the grinding of the end surface 91 and the recess 92 of a new workpiece 90, that is, the grinding of the end surface 91 and the recess 92 of the workpiece 90 disposed on the support table 112 by the above-mentioned procedures. Also, the operator ends the grinding of the end surface 91 and the recess 92 of the workpiece 90, and then stops the operation of the control device 150 by turning off the not-shown power switch in the end surface grinder 100.

[0080] As is understood from the above description, according to the above embodiment, the end surface processing device 100 is provided with the back surface support 140 that contacts the grinding portion 130b on the opposite side of the workpiece 90 from the second grinding tool 130 that is grinding the recessed portion 92 of the workpiece 90, thereby restricting deformation of the second grinding tool 130 toward the opposite side, and thus it is possible to reduce the load of ensuring the tensile strength of the second grinding tool 130 and to use a variety of second grinding tools 130.

[0081] Further, the present application is not limited to the above embodiment, and various modifications can be made without departing from the object of the present application. Incidentally, in the following modified examples, the same components as those of the above embodiment are assigned the same reference numerals and the description thereof is omitted.

[0082] For example, in the above embodiment, the second grinding tool 130 is held by the core 130a composed of a metal wire that supports the grinding portion 130b composed of a grinding brush. However, the second grinding tool 130 can be provided with the grinding portion 130b that grinds the end surface 91 or the recessed portion 92 around the axis that is the center of rotation of the grinding portion 130b. Thus, the second grinding tool 130 can be configured to omit the core 130a. For example, the second grinding tool 130 can be configured by forming a porous body made of a resin having elasticity such as a sponge into a rod shape.

[0083] Further, in the above embodiment, the second grinding tool 130 is connected to the second grinding tool driving motor 131 at one end portion of the two end portions and the other end portion is provided as a free end that is not fixed in a state of hanging from the second grinding tool driving motor 131. However, the second grinding tool 130 can be provided so that one end portion of the two end portions is connected to the second grinding tool driving motor 131 and the other end portion is held in a rotatable state.

[0084] Further, in the above embodiment, the back surface support 140 is configured by a curved surface having a circular arc shape in cross section. In this case, the support portion 142 is configured by a curved surface having a circular arc shape having the same curvature as the recessed portion 92. However, the support portion 142 can be configured by a curved surface having a circular arc shape having a curvature that is larger or smaller than the curvature of the recessed portion 92.

[0085] Further, the support portion 142 can be configured by a shape other than a curved surface having a circular arc shape in cross section. For example, as shown in FIG. 16, the support portion 142 can be configured by a combination of flat surfaces having a triangular shape in cross section. Further, the support portion 142 can be configured by a combination of flat surfaces having a shape other than a triangular shape, such as a square shape or another polygonal shape. Figure 9

[0086] ​In this way, by being located on the opposite side of the recess 92 of the workpiece 90 and in a direction perpendicular to that opposite side (X-axis direction) (Y-axis direction), the support portion 142 can more stably support the grinding portion 130b. Furthermore, the support portion 142 can also be formed in a shape other than a recess. For example, the support portion 142 is as follows: Figure 10 As shown, it can be constructed in a planar shape on the side of the support body 141. Furthermore, the support portion 142 is as follows... Figure 11 As shown, it can also be configured to protrude convexly from the side of the support body 141. In this case, the back support 140 can also suppress the deformation of the grinding part 130b for the inner recess 92 with a deep inner depth.

[0087] Furthermore, in the above embodiment, the support portion 142 is configured to have enlarged openings 143a and 143b at both ends. However, the support portion 142 may also be configured to have only one of the enlarged openings 143a and 143b at both ends, or it may be configured to omit both.

[0088] Furthermore, in the above embodiment, the end-face processing apparatus 100 is configured to include a support displacement mechanism 148, making the back support 140 movable in the X-axis direction shown in the figure. However, the end-face processing apparatus 100 may also be configured to omit the support displacement mechanism 148 and make the back support 140 fixed. Alternatively, the support displacement mechanism 148 may be used to move the back support 140 in the Z-axis direction shown in the figure, or otherwise. In this case, the control device 150 can control the operation of the support displacement mechanism 148 to make the back support 140 move back and forth synchronously with the movement of the second grinding tool 130 in the Z-axis direction shown in the figure. Incidentally, this support displacement mechanism 148 is equivalent to the support displacement unit of the present invention.

[0089] Furthermore, in the above embodiment, the back support 140 is configured to be supported by the support displacement mechanism 148. However, the back support 140 is as follows: Figure 12 As shown, a component such as a motor support 132 can also be provided to support the second grinding tool 130. Based on this, the end-face processing apparatus 100 can omit the support displacement mechanism 148, thus simplifying the mechanical and control configuration.

[0090] Furthermore, in the above embodiment, the control device 150 positions the back support 140 such that the support portion 142 of the back support 140 is located on the extension line of the arc of curvature formed as the recess 92. However, the control device 150 may also position the back support 140 such that the support portion 142 of the back support 140 is located further inside or outside the extension line of curvature formed as the recess 92. In this way, the end-face processing apparatus 100 can strengthen or weaken the restraining force restricting the second grinding tool 130 toward the back support 140 side.

[0091] Also, in the above embodiment, the end surface processing apparatus 100 is configured to provide the back surface support 140 only to the second polishing tool 130. That is, the second polishing tool 130 corresponds to the polishing tool of the present application. However, the end surface processing apparatus 100 can be configured to provide the back surface support 140 to the first polishing tool 120 instead of or in addition to the second polishing tool 130. That is, the back surface support 140 can be provided to the polishing tool that polishes the flat or curved end surface 91 in addition to the recess 92.

[0092] Also, in the above embodiment, the processing liquid supply 147 is configured to supply the processing liquid to the back surface support 140. By this, the end surface processing apparatus 100 can supply the processing liquid to the polishing portion 130b of the second polishing tool 130 efficiently and with high efficiency while preventing scattering of the processing liquid, and can also suppress deformation of the polishing portion 130b by ejecting the processing liquid discharged from the discharge hole 144. However, the processing liquid supply 147 can be configured to supply the processing liquid to the workpiece 90 instead of or in addition to the back surface support 140. Also, the end surface processing apparatus 100 can be configured to omit the processing liquid supply 147. Incidentally, this processing liquid supply 147 corresponds to the processing liquid supply unit of the present application.

[0093] Also, in the above embodiment, the workpiece holder 110 holds a plurality of glass substrates as the workpiece 90. However, the workpiece holder 110 can hold at least one glass substrate as the workpiece 90.

[0094] Also, in the above embodiment, the end surface processing apparatus 100 polishes a glass substrate used in the manufacturing process of a semiconductor as the workpiece 90. However, the end surface processing apparatus 100 can polish a glass substrate used in the manufacturing process other than a semiconductor as the workpiece 90, and the glass substrate can be a glass substrate constituting a liquid crystal display, which includes, for example, a touch panel in a portable terminal device such as a mobile phone, a smartphone, a tablet terminal, a liquid crystal television, and an organic EL display device. Also, the end surface processing apparatus 100 can polish an article other than a glass substrate, such as an electronic circuit substrate or a ceramic plate, as the workpiece 90.

[0095] Explanation of Reference Numerals

[0096] 90 workpiece

[0097] 91 end surface

[0098] 92 recess

[0099] 100 end surface processing apparatus

[0100] 110 workpiece holder

[0101] 111 frame

[0102] 112 support table

[0103] 112a leg portion

[0104] 113 push body

[0105] 114 locking mechanism

[0106] 114a nut

[0107] 114b feed screw

[0108] 115 connecting body

[0109] 116 base

[0110] 117 connecting body

[0111] 118 workpiece drive motor

[0112] 118a motor support

[0113] 120 first polishing tool

[0114] 120a core

[0115] 120b polishing portion

[0116] 121 first polishing tool drive motor

[0117] 122 motor support

[0118] 123 first X-axis direction displacement mechanism

[0119] 124 first Z-axis direction displacement mechanism

[0120] 130 second polishing tool

[0121] 130a core

[0122] 130b polishing portion

[0123] 131 second polishing tool drive motor

[0124] 132 motor support

[0125] 133 second X-axis direction displacement mechanism

[0126] 134 second Z-axis direction displacement mechanism

[0127] 140 back support

[0128] 141 support body

[0129] 142 support portion

[0130] 143a, 143b enlarged opening portion

[0131] 144 discharge hole

[0132] 145 distribution passage

[0133] 145a peg

[0134] 146 processing liquid supply pipe

[0135] 147 processing liquid supply device

[0136] 148 support jig displacement mechanism

[0137] 148a sliding table

[0138] 148b table drive motor

[0139] 150 control device

[0140] 151 operation panel

Claims

1. An end-face processing device, characterized in that, have: A workpiece holder that can be easily loaded and unloaded to hold the workpiece being processed; A grinding wheel drive unit is connected to a grinding wheel having a grinding section around an axis that serves as a center of rotation, and drives the grinding wheel to rotate about the axis. The grinding section is used to grind the end face of the workpiece. A back support has a support portion that contacts the grinding tool on the opposite side of the workpiece, relative to the end face of the workpiece being ground, thereby limiting the deformation of the grinding tool towards the opposite side. The support portion in the back support is formed to be recessed relative to the grinding portion. In the support portion of the back support, at least one of the two ends of the grinding tool in the axial direction has an enlarged opening that extends outward in the axial direction.

2. The end face processing apparatus according to claim 1, characterized in that, It also has a support displacement mechanism that moves the back support closer to or further away from the grinding tool.

3. The end face processing apparatus according to claim 1, characterized in that, It also includes a processing fluid supply unit that supplies processing fluid to the rear support. The back support has an outlet hole for discharging the processing fluid supplied by the processing fluid supply unit.

4. An end-face processing apparatus, characterized in that, have: A workpiece holder that can be easily loaded and unloaded to hold the workpiece being processed; A grinding wheel drive unit is connected to a grinding wheel having a grinding part around an axis that serves as a center of rotation, and drives the grinding wheel to rotate around the axis. The grinding part is used to grind the end face of the workpiece. A back support has a support portion that contacts the grinding tool on the opposite side of the workpiece relative to the end face of the workpiece being ground, thereby limiting the deformation of the grinding tool to the opposite side; as well as A support displacement mechanism that moves the back support closer to or further away from the grinding tool without changing the positional relationship between the grinding tool and the workpiece. In the support portion of the back support, at least one of the two ends of the grinding tool in the axial direction has an enlarged opening that extends outward in the axial direction.

5. An end-face processing apparatus, characterized in that, have: A workpiece holder that can be easily loaded and unloaded to hold the workpiece being processed; A grinding wheel drive unit is connected to a grinding wheel having a grinding part around an axis that serves as a center of rotation, and drives the grinding wheel to rotate around the axis. The grinding part is used to grind the end face of the workpiece. A back support has a support portion that contacts the grinding tool on the opposite side of the workpiece relative to the end face of the workpiece being ground, thereby limiting the deformation of the grinding tool to the opposite side; as well as A displacement mechanism that brings the grinding tool and the back support together toward or away from the workpiece. In the support portion of the back support, at least one of the two ends of the grinding tool in the axial direction has an enlarged opening that extends outward in the axial direction.

Images