A method for connecting a pot-shaped target material and a flange

Abstract

The present invention relates to a method for connecting a pot-shaped target and a flange, the method comprising the following steps: (1) machining a circle of circular assembly grooves along the circumference of the pot body outer wall of the pot-shaped target; (2) machining the flange, and then dividing it evenly along the radial direction of the flange to obtain a first flange and a second flange with exactly the same shape; the first flange and the second flange are both semicircular in shape; (3) the first flange and the second flange obtained in step (2) are divided into left and right parts and inserted into the assembly groove obtained in step (1), and then first electron beam welding, second electron beam welding and third electron beam welding are sequentially performed to obtain a pot-shaped target with a flange connection. The connection method provided by the present invention is simple to operate, has a high welding bonding rate, and has a good weld morphology, which effectively solves the problem of poor welding caused by different melting points of dissimilar metals.

Description

Technical Field

[0001] This invention relates to the field of target materials, and more specifically to a method for connecting a pot-shaped target material and a flange. Background Technology

[0002] HCM series sputtering targets are pot-shaped irregular targets, with the pot body serving as the sputtering area. The material is typically copper, tantalum, etc. These targets are assembled to the machine via flanges during use. However, because the flange and the target material are often different, especially tantalum pot-shaped targets and titanium flanges, their melting points differ significantly. Tantalum has a melting point as high as 2995℃, while titanium's melting point is only 1660℃. Common welding methods typically include electron beam welding, hot isostatic pressing welding, and a combination of electron beam welding. It is difficult to join two materials in an irregularly shaped target, resulting in poor weld morphology and a low weld bonding rate.

[0003] CN114713960A discloses a welding method for a pot-shaped target. The welding method includes electron beam welding of a support and the pot-shaped target. The support comprises a first ring and a second ring from the outside to the inside. The second ring is made of the same material as the pot-shaped target. The pot-shaped target has an annular step. The inner diameter of the annular step is less than the inner diameter of the second ring. Although this method can connect the target and the support, it cannot fundamentally overcome the problem of different melting points of dissimilar metals, and therefore cannot further improve the welding bonding rate.

[0004] CN114603243A discloses a welding method for a pot-shaped target material. The welding method includes: welding the pot-shaped target material and a support component using an electron beam; the welding surface with a high melting point of the material has an inclined plane; the vertical length of the inclined plane is 4-7 mm; the height of the inclined plane is 0.2-0.5 mm; the electron beam welding includes a first welding, a second welding, a third welding, and a fourth welding; the first welding is welding the non-inclined welding surface; the second welding is welding the end face 0.4-0.8 mm away from the inclined plane; the third welding is welding the end face 0.6-1.2 mm away from the inclined plane; and the fourth welding is welding the gap between the pot-shaped target material and the support component. This method uses an inclined plane structure to promote efficient welding of tantalum target material and titanium support component; however, due to the large difference in melting points between tantalum and titanium, it is difficult to further improve the welding bonding rate.

[0005] Therefore, providing a method for connecting the pot-shaped target and the flange is of great significance. Summary of the Invention

[0006] To address the above problems, the present invention aims to provide a method for connecting a pot-shaped target and a flange. Compared with the prior art, the connection method provided by the present invention is simple to operate, has a high welding bonding rate, and produces a good weld morphology.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] This invention provides a method for connecting a pot-shaped target and a flange, the method comprising the following steps:

[0009] (1) A circular assembly groove is machined around the outer wall of the pot-shaped target material.

[0010] (2) The flange is machined and then divided equally along the radial direction of the flange to obtain a first flange and a second flange with the same shape; the first flange and the second flange are both semi-circular in shape.

[0011] (3) The first flange and the second flange obtained in step (2) are divided into left and right parts and inserted into the assembly groove obtained in step (1). Then, the first electron beam welding, the second electron beam welding and the third electron beam welding are performed in sequence to obtain the pot-shaped target material for connecting the flange.

[0012] The connection method provided by this invention involves inserting a first flange and a second flange into an assembly groove, followed by sequential electron beam welding, a second electron beam welding, and a third electron beam welding. The welding point is the connection between the first flange and the second flange. Thus, this invention, by designing the assembly groove, can transform the welding of the target material and the flange into welding between the first flange and the second flange. The flange and the target material are effectively connected by insertion, overcoming the problem of poor welding caused by the different melting points of the target material and the flange. In this invention, the welding bonding rate between the first flange and the second flange is much greater than the welding bonding rate between the target material and the flange.

[0013] Preferably, the material of the pot-shaped target in step (1) includes tantalum.

[0014] Preferably, the depth of the assembly groove in step (1) is 3.5-4.5 mm, for example, it can be 3.5 mm, 3.6 mm, 3.7 mm, 3.8 mm, 3.9 mm, 4 mm, 4.1 mm, 4.2 mm, 4.3 mm, 4.4 mm or 4.5 mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0015] Preferably, the diameter of the assembly groove in step (1) is 396-400mm, for example, it can be 396mm, 397mm, 398mm, 399mm or 400mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0016] Preferably, the flange in step (2) is made of titanium.

[0017] Preferably, in step (2), the outer diameter of the first flange and the second flange is 468-472mm, for example, it can be 468mm, 469mm, 470mm, 471mm or 472mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0018] Preferably, the height of both the first flange and the second flange is 28-32mm, for example, it can be 28mm, 29mm, 30mm, 31mm or 32mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0019] Preferably, step (3) the first electron beam welding includes: performing the first electron beam welding on the upper connection of the first flange and the second flange extending beyond the assembly groove.

[0020] Preferably, the beam current of the first electron beam welding is 70-80mA, for example, it can be 70mA, 72mA, 74mA, 76mA, 78mA or 80mA, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0021] The present invention preferably controls the beam current of the first electron beam welding within a specific range, which can further improve the welding bonding rate.

[0022] Preferably, the linear speed of the first electron beam welding is 15-20 mm / s, for example, it can be 15 mm / s, 16 mm / s, 17 mm / s, 18 mm / s, 19 mm / s or 20 mm / s, but is not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0023] The present invention preferably controls the linear speed of the first electron beam welding within a specific range, which can further improve the welding bonding rate.

[0024] Preferably, step (3) the second electron beam welding includes: performing a second electron beam welding on the lower end connection of the first flange and the second flange extending beyond the assembly groove.

[0025] Preferably, the beam current for the second electron beam welding is 70-80mA, for example, it can be 70mA, 72mA, 74mA, 76mA, 78mA or 80mA, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0026] The present invention preferably controls the beam current of the second electron beam welding within a specific range, which can further improve the welding bonding rate.

[0027] Preferably, the linear speed of the second electron beam welding is 15-20 mm / s, for example, it can be 15 mm / s, 16 mm / s, 17 mm / s, 18 mm / s, 19 mm / s or 20 mm / s, but is not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0028] The present invention preferably controls the linear speed of the second electron beam welding within a specific range, which can further improve the welding bonding rate.

[0029] Preferably, the third electron beam welding in step (3) includes: performing third electron beam welding on the connection between the sides of the first flange and the second flange.

[0030] Preferably, the beam current of the third electron beam welding is 70-80mA, for example, it can be 70mA, 72mA, 74mA, 76mA, 78mA or 80mA, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0031] The present invention preferably controls the beam current of the third electron beam welding within a specific range, which can further improve the welding bonding rate.

[0032] Preferably, the linear velocity of the third electron beam welding is 15-20 mm / s, for example, it can be 15 mm / s, 16 mm / s, 17 mm / s, 18 mm / s, 19 mm / s or 20 mm / s, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0033] The present invention preferably controls the linear speed of the third electron beam welding within a specific range, which can further improve the welding bonding rate.

[0034] As a preferred embodiment of the present invention, the connection method includes the following steps:

[0035] (1) A circular assembly groove is machined around the outer wall of the pot-shaped target material. The pot-shaped target material is made of tantalum. The depth of the assembly groove is 3.5-4.5 mm and the diameter is 396-400 mm.

[0036] (2) The flange is machined and then divided equally along the radial direction of the flange to obtain a first flange and a second flange with the same shape. The first flange and the second flange are both semi-circular in shape. The material of the flange includes titanium. The outer diameter of the first flange and the second flange is 468-472mm. The height of the first flange and the second flange is 28-32mm.

[0037] (3) The first flange and the second flange obtained in step (2) are divided into left and right parts and inserted into the assembly groove obtained in step (1). Then, under the conditions of a beam current of 70-80mA and a linear velocity of 15-20mm / s, the upper end connection of the first flange and the second flange that extends beyond the assembly groove is subjected to first electron beam welding. Then, under the conditions of a beam current of 70-80mA and a linear velocity of 15-20mm / s, the lower end connection of the first flange and the second flange that extends beyond the assembly groove is subjected to second electron beam welding. Then, under the conditions of a beam current of 70-80mA and a linear velocity of 15-20mm / s, the connection of the side of the first flange and the second flange is subjected to third electron beam welding to obtain the pot-shaped target material for connecting flanges.

[0038] Compared with the prior art, the present invention has the following beneficial effects:

[0039] The method for connecting the pot-shaped target and the flange provided by the present invention, by inserting the first flange and the second flange into the assembly groove, and then performing the first electron beam welding, the second electron beam welding and the third electron beam welding in sequence, can overcome the problem of the decrease in welding bonding rate caused by the different melting points of the target and the flange. Moreover, the weld morphology is good and the probability of defects is greatly reduced. The welding bonding rate of the first flange and the second flange can reach more than 86%, and under optimal conditions, it can reach 100%. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the connection between the pot-shaped target and the flange as described in Embodiment 1 of the present invention;

[0041] Figure 2 This is a schematic diagram of the pot-shaped target material containing the assembly groove described in Embodiment 1 of the present invention;

[0042] Figure 3 This is a schematic diagram of the structure of the first flange and the second flange in Embodiment 1 of the present invention;

[0043] Wherein: 1-pot-shaped target; 2-assembly groove; 3-first flange; 4-second flange. Detailed Implementation

[0044] The technical solution of the present invention is further described below by way of specific embodiments. It should be understood by those skilled in the art that the embodiments are merely to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0045] Example 1

[0046] This embodiment provides a method for connecting a pot-shaped target and a flange, the method comprising the following steps:

[0047] (1) A circular mounting groove 2 is machined around the circumference of the outer wall of the pot-shaped target 1. The pot-shaped target 1 is made of tantalum. A schematic diagram of the pot-shaped target 1 containing the mounting groove 2 is shown below. Figure 2 As shown, the depth of the assembly groove 2 is 4 mm and the diameter is 398.4 mm;

[0048] (2) The flange is machined and then divided radially to obtain a first flange 3 and a second flange 4 with identical shapes. The structural diagrams of the first flange 3 and the second flange 4 are shown below. Figure 3 As shown, the first flange 3 and the second flange 4 are both semi-circular in shape, the flanges are made of titanium, the outer diameter of the first flange 3 and the second flange 4 is 470mm, and the height of the first flange 3 and the second flange 4 is 30mm.

[0049] (3) The first flange 3 and the second flange 4 obtained in step (2) are divided into left and right parts and inserted into the assembly groove 2 obtained in step (1). The connection diagram of the pot-shaped target 1 and the flange is shown in the figure. Figure 1 As shown, a first electron beam weld is performed on the upper connection of the first flange 3 and the second flange 4 extending beyond the assembly groove 2 under the conditions of a beam current of 75mA and a linear velocity of 17mm / s. Then, a second electron beam weld is performed on the lower connection of the first flange 3 and the second flange 4 extending beyond the assembly groove 2 under the conditions of a beam current of 75mA and a linear velocity of 17mm / s. Finally, a third electron beam weld is performed on the connection of the sides of the first flange 3 and the second flange 4 under the conditions of a beam current of 75mA and a linear velocity of 17mm / s, to obtain the pot-shaped target 1 for connecting flanges.

[0050] Example 2

[0051] This embodiment provides a method for connecting a pot-shaped target and a flange, the method comprising the following steps:

[0052] (1) A circular assembly groove is machined around the outer wall of the pot-shaped target material. The pot-shaped target material is made of tantalum. The depth of the assembly groove is 3.5 mm and the diameter is 400 mm.

[0053] (2) The flange is machined and then divided equally along the radial direction of the flange to obtain a first flange and a second flange with the same shape. The first flange and the second flange are both semi-circular in shape. The flange is made of titanium. The outer diameter of the first flange and the second flange is 468mm. The height of the first flange and the second flange is 32mm.

[0054] (3) The first flange and the second flange obtained in step (2) are divided into left and right parts and inserted into the assembly groove obtained in step (1). Then, under the conditions of 70mA current and 20mm / s linear velocity, the upper end connection of the first flange and the second flange that extends beyond the assembly groove is subjected to first electron beam welding. Then, under the conditions of 70mA current and 20mm / s linear velocity, the lower end connection of the first flange and the second flange that extends beyond the assembly groove is subjected to second electron beam welding. Then, under the conditions of 70mA current and 20mm / s linear velocity, the connection of the side of the first flange and the second flange is subjected to third electron beam welding to obtain the pot-shaped target material for connecting flanges.

[0055] Example 3

[0056] This embodiment provides a method for connecting a pot-shaped target and a flange, the method comprising the following steps:

[0057] (1) A circular assembly groove is machined around the outer wall of the pot-shaped target material. The pot-shaped target material is made of tantalum. The depth of the assembly groove is 4.5 mm and the diameter is 396 mm.

[0058] (2) The flange is machined and then divided equally along the radial direction of the flange to obtain a first flange and a second flange with the same shape. The first flange and the second flange are both semi-circular in shape. The flange is made of titanium. The outer diameter of the first flange and the second flange is 472mm. The height of the first flange and the second flange is 28mm.

[0059] (3) The first flange and the second flange obtained in step (2) are divided into left and right parts and inserted into the assembly groove obtained in step (1). Then, under the conditions of 80mA current and 15mm / s linear velocity, the upper end connection of the first flange and the second flange that extends beyond the assembly groove is subjected to first electron beam welding. Then, under the conditions of 80mA current and 15mm / s linear velocity, the lower end connection of the first flange and the second flange that extends beyond the assembly groove is subjected to second electron beam welding. Then, under the conditions of 80mA current and 15mm / s linear velocity, the connection of the side of the first flange and the second flange is subjected to third electron beam welding to obtain the pot-shaped target material for connecting flanges.

[0060] Example 4

[0061] This embodiment provides a method for connecting a pot-shaped target and a flange. The only difference from Embodiment 1 is that the beam current of the first electron beam welding is 60mA.

[0062] Example 5

[0063] This embodiment provides a method for connecting a pot-shaped target and a flange. The only difference from Embodiment 1 is that the beam current of the first electron beam welding is 90mA.

[0064] Example 6

[0065] This embodiment provides a method for connecting a pot-shaped target and a flange. The only difference from Embodiment 1 is that the linear speed of the first electron beam welding is 10 mm / s.

[0066] Example 7

[0067] This embodiment provides a method for connecting a pot-shaped target and a flange. The only difference from Embodiment 1 is that the linear speed of the first electron beam welding is 25 mm / s.

[0068] Comparative Example 1

[0069] This comparative example provides a method for connecting a pot-shaped target and a flange. The only difference from Example 1 is that the flange and the target are directly electron-beam welded under the conditions of a beam current of 75mA and a linear velocity of 17mm / s to obtain a pot-shaped target connected to the flange.

[0070] The weld bonding rates in Examples 1-7 and Comparative Example 1 were measured using a C-type ultrasonic flaw detector, and the results are shown in Table 1.

[0071] Table 1

[0072] Welding bonding rate / % Example 1 100 Example 2 100 Example 3 100 Example 4 90 Example 5 91 Example 6 85 Example 7 86 Comparative Example 1 60

[0073] The following points can be observed from Table 1:

[0074] (1) As can be seen from the data of Examples 1-7, the welding connection rate of the first flange and the second flange in the connection method provided by the present invention can reach more than 86%, and under better conditions, it can reach 100%.

[0075] (2) A comprehensive comparison of the data from Examples 1 and 4-5 shows that the beam current of the first electron beam welding in Example 1 is 75mA, which is significantly higher than that in Examples 4-5, which are 60mA and 90mA respectively. This indicates that the present invention preferably controls the beam current of the first electron beam welding, which can further improve the welding bonding rate.

[0076] (3) A comprehensive comparison of the data from Example 1 and Examples 6-7 shows that the linear speed of the first electron beam welding in Example 1 is 17 mm / s, which is significantly higher than the welding bonding rate in Examples 6-7, which are 10 mm / s and 25 mm / s respectively. This indicates that the present invention preferably controls the linear speed of the first electron beam welding, which can further improve the welding bonding rate.

[0077] (4) By comparing the data of Example 1 and Comparative Example 1, it can be seen that the only difference between Comparative Example 1 and Example 1 is that the flange and the target are directly electron beam welded. The welding bonding rate in Example 1 is significantly higher than that in Comparative Example 1. This shows that the connection method provided by the present invention can avoid the problem of poor welding caused by different melting points of dissimilar metals and greatly improve the welding bonding rate.

[0078] In summary, the method for connecting the pot-shaped target and the flange provided by this invention is simple to operate and greatly improves the welding effect.

[0079] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A method for connecting a pot-shaped target and a flange, characterized in that: The connection method comprises the following steps: (1) A circular assembly groove is machined along the circumference of the outer wall of the pot body of the pot-shaped target material; (2) machining the flange and then dividing it evenly along the radial direction of the flange to obtain a first flange and a second flange having exactly the same shape; the first flange and the second flange are both semicircular in shape; (3) dividing the first flange and the second flange obtained in step (2) into two left and right parts and inserting them into the assembly groove obtained in step (1), and then sequentially performing first electron beam welding, second electron beam welding and third electron beam welding to obtain a pot-shaped target material connecting the flanges; The first electron beam welding comprises: performing first electron beam welding on the upper end connection of the first flange and the second flange that exceeds the assembly groove; The second electron beam welding comprises: performing second electron beam welding on the lower end connection of the first flange and the second flange that exceeds the assembly groove; The third electron beam welding comprises: performing a third electron beam welding on the connection between the first flange and the second flange side; The beam current of the first electron beam welding is 70-80 mA; the linear speed of the first electron beam welding is 15-20 mm / s.

2. The connection method according to claim 1, characterized in that: The material of the pot-shaped target in step (1) includes tantalum.

3. The connection method according to claim 1, characterized in that: The depth of the assembly groove in step (1) is 3.5-4.5 mm.

4. The connection method according to claim 1, characterized in that: The diameter of the assembly groove in step (1) is 396-400 mm.

5. The connection method according to claim 1, characterized in that: The material of the flange in step (2) includes titanium.

6. The connection method according to claim 1, characterized in that: Step (2) The outer diameters of the first flange and the second flange are both 468-472 mm.

7. The connection method according to claim 1, characterized in that: The heights of the first flange and the second flange are both 28-32 mm.

8. The connection method according to claim 1, characterized in that: The beam current of the second electron beam welding is 70-80 mA.

9. The connection method according to claim 1, characterized in that: The linear speed of the second electron beam welding is 15-20 mm / s.

10. The connection method according to claim 1, characterized in that: The beam current of the third electron beam welding is 70-80 mA.

11. The connection method according to claim 1, characterized in that: The linear speed of the third electron beam welding is 15-20 mm / s.

12. The connection method according to claim 1, characterized in that: The connection method comprises the following steps: (1) a circular assembly groove is processed along the circumference of the outer wall of the pot body of the pot-shaped target material, wherein the material of the pot-shaped target material includes tantalum, and the depth of the assembly groove is 3.5-4.5 mm and the diameter is 396-400 mm; (2) machining the flange, and then dividing it evenly along the radial direction of the flange to obtain a first flange and a second flange with completely identical shapes, wherein the shapes of the first flange and the second flange are both semicircular, the material of the flanges includes titanium, the outer diameters of the first flange and the second flange are both 468-472 mm, and the heights of the first flange and the second flange are both 28-32 mm; (3) Dividing the first flange and the second flange obtained in step (2) into two left and right parts and inserting them into the assembly groove obtained in step (1), and then performing a first electron beam welding on the upper end connection of the first flange and the second flange extending beyond the assembly groove under the conditions of a beam current of 70-80 mA and a linear speed of 15-20 mm / s, and then performing a second electron beam welding on the lower end connection of the first flange and the second flange extending beyond the assembly groove under the conditions of a beam current of 70-80 mA and a linear speed of 15-20 mm / s, and then performing a third electron beam welding on the connection of the side surfaces of the first flange and the second flange under the conditions of a beam current of 70-80 mA and a linear speed of 15-20 mm / s, to obtain a pot-shaped target material for connecting flanges.

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