Objective lens stabilizer and optical machine

Abstract

The present invention relates to the field of microscopic imaging technology, specifically disclosing an objective lens stabilizer and an optical machine, comprising an adjustment sleeve, a fixed bracket, and a vibration reduction module. The adjustment sleeve is provided with a through hole; the fixed bracket is provided with a mounting hole, the fixed bracket is used to fix the objective lens in the mounting hole, the fixed bracket is inserted into the through hole and spaced apart from the adjustment sleeve; the vibration reduction module comprises a radial vibration reduction portion and an axial vibration reduction portion. The radial vibration reduction portion is sleeved on the fixed bracket, fixedly connected to the adjustment sleeve and abutted against the fixed bracket, and has elasticity in the radial direction of the fixed bracket; the axial vibration reduction portion abuts against the fixed bracket at one end along the axial direction of the fixed bracket and abuts against the adjustment sleeve at the other end, and has elasticity in the axial direction of the fixed bracket. The objective lens stabilizer solves the problems of active vibration reduction, such as high cost, large size, difficulty in use in small gene sequencers, very limited application range, and relatively long response time.

Description

Technical Field

[0001] The present invention relates to the field of microscopic imaging technology, and in particular to an objective lens stabilizer and an optical machine. Background Art

[0002] Currently, the mainstream gene sequencing technology in the market obtains gene sequence information by detecting fluorescent markers. This detection process utilizes microscopy. Microscopy involves excitation light from an illumination system passing through filters and a dichroic mirror onto a biochip. The fluorescence generated by the laser irradiation of the biochip sample passes through an objective lens, a dichroic mirror, a tube lens, and filters, ultimately reaching a photoelectric sensor for imaging. As a crucial component, the position of the objective lens is crucial to image quality. When used in a gene sequencer with an autofocus system, the objective lens must constantly move up and down to find the focal point, generating vibration. Furthermore, the system also includes other vibrating devices, forcing the entire gene sequencer to sample biochip samples in a vibrating environment. To meet these requirements, the objective lens must be fast and stable, and its end face must be consistently positioned at the correct angle with other optical surfaces.

[0003] Most objective lens vibration reduction and adjustment devices on the market are active vibration reduction devices, that is, the sensor will monitor the deflection angle of the objective lens and feed it back to the control program. The control program outputs signals through a series of calculations, thereby controlling the internal driver to achieve the vibration reduction function of the objective lens. This active vibration reduction structure has the problems of high cost, complex structure, large size, and is difficult to use in small gene sequencers. The scope of application is very limited, and the response time is relatively long. Summary of the Invention

[0004] The purpose of the present invention is to provide an objective lens stabilizer and an optical machine to solve the problems of active vibration reduction in related technologies, such as high cost, large size, difficulty in use in small gene sequencers, very limited application range, and long response time.

[0005] In one aspect, the present invention provides an objective lens stabilizer, comprising:

[0006] an adjusting sleeve, wherein the adjusting sleeve is provided with a through hole;

[0007] A fixing bracket, wherein the fixing bracket is provided with a mounting hole, the fixing bracket is used to fix the objective lens in the mounting hole, the fixing bracket is passed through the through hole and is spaced apart from the adjusting sleeve;

[0008] The vibration damping module includes a radial vibration damping portion and an axial vibration damping portion. The radial vibration damping portion is sleeved on the fixed bracket, the radial vibration damping portion is fixedly connected to the adjustment sleeve and abuts against the fixed bracket, and the radial vibration damping portion is elastic along the radial direction of the fixed bracket; the axial vibration damping portion abuts against the fixed bracket at one end along the axial direction of the fixed bracket, and abuts against the adjustment sleeve at the other end, and the axial vibration damping portion is elastic along the axial direction of the fixed bracket.

[0009] As an optimal technical solution for the objective lens stabilizer, the radial vibration damping portion includes a vibration damping ring and multiple vibration damping components. The vibration damping rings are arranged on the fixed bracket at intervals and fixed to the adjustment sleeve. The multiple vibration damping components are arranged on the vibration damping ring at equal angles along the circumference of the vibration damping ring. The vibration damping components are elastic along the radial direction of the fixed bracket.

[0010] As a preferred technical solution for the objective lens stabilizer, the vibration-damping ring is provided with a plurality of threaded holes at equal angles along the circumference of the vibration-damping ring, and the axes of the threaded holes are consistent with the radial direction of the fixing bracket;

[0011] The plurality of vibration damping assemblies are arranged in a one-to-one correspondence in the plurality of threaded holes. The vibration damping assemblies include a steel ball, a radial spring and a fastening screw. The steel ball abuts against the fixing bracket, the fastening screw is screwed into the threaded hole, and the radial spring is arranged between the steel ball and the fastening screw.

[0012] As a preferred technical solution for the objective lens stabilizer, the inner wall of the vibration-damping ring is provided with a first clamp, and the fixing bracket is provided with a second clamp. When the fixing bracket is withdrawn from one side of the axial direction of the vibration-damping ring to the other side, the first clamp engages with the second clamp.

[0013] The axial vibration damping portion includes an axial spring, which is sleeved on the fixing bracket and located on the other side of the vibration damping ring. One end of the axial spring is fixedly connected to the fixing bracket, and the other end of the axial spring is fixedly connected to the adjusting sleeve.

[0014] As an optimal technical solution for the objective lens stabilizer, the axial vibration damping part also includes a spring sleeve and a nut. The spring sleeve is sleeved on the fixed bracket and abuts against one end of the axial spring. The nut is threadedly connected to the fixed bracket and abuts against the side of the spring sleeve away from the axial spring.

[0015] As a preferred technical solution of the objective lens stabilizer, it also includes an adjustment module, the adjustment module includes an adjustment seat and three radial adjustment bolts, the adjustment seats are sleeved on the adjustment sleeve and spaced apart from the adjustment sleeve;

[0016] The adjustment seat is provided with three radial adjustment threaded holes at equal angles along the circumference, the axes of the three radial adjustment threaded holes respectively point to the radial direction of the adjustment sleeve, the three radial adjustment bolts are screwed into the three radial adjustment threaded holes in a one-to-one correspondence, and the three radial adjustment bolts respectively pass through the corresponding radial adjustment threaded holes and abut against the adjustment sleeve.

[0017] As an optimal technical solution for the objective lens stabilizer, the adjustment module also includes three radial fastening bolts, the adjustment sleeve is provided with three connecting plates along its circumference, the connecting plates are provided with fixing holes, the three radial fastening bolts pass through the three fixing holes one by one and are respectively screwed to the adjustment seat, and the diameter of the fixing hole is larger than the diameter of the stud of the radial fastening bolt and smaller than the diameter of the screw head of the radial fastening bolt.

[0018] As an optimal technical solution for the objective lens stabilizer, the adjustment module also includes a base, a reference part, a limit screw, a limit spring and two axial adjustment bolts, the base is sleeved on the adjustment sleeve, the limit screw passes through the adjustment seat along the axial direction of the adjustment sleeve and is screwed to the base, the limit spring is sleeved on the limit screw and one end abuts against the screw head of the limit screw, and the other end abuts against the adjustment seat, the reference part includes a first reference and a second reference, the reference part is located between the base and the adjustment seat, the first reference and the second reference are respectively fixed to the base and the adjustment seat, the first reference and the second reference abut against each other and make the base and the adjustment seat spaced apart, the two axial adjustment bolts are screwed to the adjustment seat and both abut against the base, and the angles between the two axial adjustment bolts and the reference parts are equal.

[0019] As a preferred technical solution of the objective lens stabilizer, the surface where the first reference contacts the second reference is a spherical surface, and the surface where the second reference contacts the first reference is a plane.

[0020] As a preferred technical solution for the objective lens stabilizer, the end of the axial adjustment bolt abutting against the base is a spherical structure;

[0021] The base is respectively provided with a first support member and a second support member, the first support member is provided with a spherical groove, and the second support member is provided with a slide groove, the slide groove is arranged along the circumference of the base, and the spherical structures of the two axial adjustment bolts are respectively in contact with the groove wall of the spherical groove and the groove wall of the slide groove.

[0022] In another aspect, the present invention provides an optical machine, comprising the objective lens stabilizer of any of the above solutions, including:

[0023] A base and a carrier, wherein the carrier is arranged on the base and slides relative to the base, and the carrier is used to place the test piece;

[0024] a top plate, the top plate being spaced apart from the base, the carrier being located between the top plate and the base and spaced apart from the top plate;

[0025] The measuring assembly includes a driver, an optical element integrated device, an optical sleeve, an objective lens stabilizer and an objective lens. The optical element integrated device is arranged on the top plate and its optical axis is opposite to the measured object. An optical sleeve is fixedly provided on the side of the optical element integrated device opposite to the carrier. The optical sleeve is coaxial with the optical axis. The objective lens is slidably inserted into the optical sleeve. The objective lens stabilizer is sleeved on the objective lens and fixedly connected to the objective lens. The driver drives the objective lens stabilizer to move along the axial direction of the optical sleeve.

[0026] The beneficial effects of the present invention are:

[0027] The present invention provides an objective lens stabilizer, which includes an adjustment sleeve, a fixed bracket, and a vibration reduction module. The adjustment sleeve is provided with a through hole; the fixed bracket is provided with a mounting hole, the fixed bracket is used to fix the objective lens in the mounting hole, the fixed bracket is inserted into the through hole and is spaced apart from the adjustment sleeve; the vibration reduction module includes a radial vibration reduction portion and an axial vibration reduction portion. The radial vibration reduction portion is sleeved on the fixed bracket, the radial vibration reduction portion is fixedly connected to the adjustment sleeve and abuts against the fixed bracket, and the radial vibration reduction portion is elastic along the radial direction of the fixed bracket; the axial vibration reduction portion abuts against the fixed bracket at one end along the axial direction of the fixed bracket and abuts against the adjustment sleeve at the other end, and the axial vibration reduction portion is elastic along the axial direction of the fixed bracket. The objective lens stabilizer fixes the objective lens in the mounting hole of the fixed bracket. When the objective lens stabilizer moves, the axial vibration reduction portion is elastic in the axial direction, and the radial vibration reduction portion is elastic in the radial direction, so that the vibration reduction module can passively reduce the vibration of the objective lens in the axial and radial directions. This solves the problems of active vibration reduction, such as high cost, large size and difficulty in use in small gene sequencers, very limited scope of application, and long response time. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 Schematic diagram of the structure of the objective lens stabilizer in an embodiment of the present invention Figure 1 ;

[0029] Figure 2 Schematic diagram of the structure of the objective lens stabilizer in an embodiment of the present invention Figure 2 ;

[0030] Figure 3 for Figure 2 Cross-sectional view at the middle BB;

[0031] Figure 4Schematic diagram of the structure of the objective lens stabilizer in an embodiment of the present invention Figure 1 (excluding eyepiece and fixing bracket);

[0032] Figure 5 Schematic diagram of the structure of the objective lens stabilizer in an embodiment of the present invention Figure 2 (excluding eyepiece and fixing bracket);

[0033] Figure 6 Schematic diagram of the structure of the shock-absorbing ring in an embodiment of the present invention;

[0034] Figure 7 This is a structural diagram of the adjustment seat in an embodiment of the present invention;

[0035] Figure 8 Schematic diagram of the structure of the optical engine in an embodiment of the present invention.

[0036] In the picture:

[0037] 100, objective lens; 200, base; 300, stage; 400, top plate; 500, driver; 600, optical element integration device; 700, optical sleeve; 800, test piece;

[0038] 1. Adjusting sleeve; 11. Connecting plate; 111. Fixing hole;

[0039] 2. Fixing bracket; 21. Second clip; 211. Upper mounting bracket; 212. Lower mounting bracket; 22. Washer;

[0040] 31. Radial vibration damping part; 311. Vibration damping ring; 3111. Threaded hole; 3112. First clamp; 312. Vibration damping assembly; 3121. Steel ball; 3122. Radial spring; 3123. Fastening screw;

[0041] 321, axial spring; 322, spring sleeve; 323, nut;

[0042] 4. Adjustment module; 41. Adjustment seat; 411. Radial adjustment threaded hole; 412. Radial fastening bolt; 42. Radial adjustment bolt; 43. Base; 431. First support member; 432. Second support member; 44. Reference member; 441. First reference; 442. Second reference; 45. Limit screw; 46. Limit spring; 47. Axial adjustment bolt. DETAILED DESCRIPTION

[0043] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0044] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature being "above", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0045] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0046] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0047] like Figures 1 to 7As shown, this embodiment provides an objective lens stabilizer, which includes an adjusting sleeve 1, a fixing bracket 2 and a vibration damping module, the adjusting sleeve 1 is provided with a through hole; the fixing bracket 2 is provided with a mounting hole, the fixing bracket 2 is used to fix the objective lens 100 in the mounting hole, the fixing bracket 2 is passed through the through hole and is spaced apart from the adjusting sleeve 1; the vibration damping module includes a radial vibration damping portion and an axial vibration damping portion, the radial vibration damping portion is sleeved on the fixing bracket 2, the radial vibration damping portion is fixed to the adjusting sleeve 1 and abuts against the fixing bracket 2, and the radial vibration damping portion is elastic along the radial direction of the fixing bracket 2; the axial vibration damping portion abuts against the fixing bracket 2 at one end along the axial direction of the fixing bracket 2, and abuts against the adjusting sleeve 1 at the other end, and the axial vibration damping portion is elastic along the axial direction of the fixing bracket 2. This objective lens stabilizer secures the objective lens 100 within the mounting hole of the fixed bracket 2. When the bracket stabilizing the objective lens 100 moves, the axial damping portion and the radial damping portion exhibit elasticity in the axial direction, thereby passively mitigating axial and radial vibrations of the objective lens 100. This solves the problems of active vibration reduction, such as high cost, large size, and limited application in small gene sequencers, as well as long response times.

[0048] Regarding the specific structure of the fixing bracket 2, the fixing bracket 2 optionally includes a lower fixing bracket and an upper fixing bracket, the upper fixing bracket being provided with an upper mounting hole, and the lower fixing bracket being provided with a lower mounting hole. When the upper fixing bracket and the lower fixing bracket are screwed together, the upper mounting hole and the lower mounting hole are surrounded by each other to form a mounting hole. When the eyepiece is installed, one end of the objective lens 100 extends into the lower mounting hole, and the other end of the objective lens 100 extends into the upper mounting hole. When the upper mounting bracket 211 and the lower mounting bracket 212 are screwed together, the eyepiece is fixed in the mounting hole.

[0049] Specifically, the lower mounting hole is a truncated cone structure. After one end of the objective lens 100 abuts the lower mounting hole, the objective lens 100 cannot continue to extend into the lower mounting hole. The upper mounting hole is provided with a stepped surface. The other end of the objective lens 100 is clamped with a washer 22. When the other end of the objective lens 100 extends into the upper mounting hole, the washer 22 abuts against the stepped structure of the upper mounting hole, thereby limiting the other end of the objective lens 100 from further extending into the upper mounting hole. When the upper fixing frame and the lower fixing frame are screwed together, the objective lens 100 is fixed in the mounting hole. In other embodiments, the upper fixing frame and the lower fixing frame may also be connected to each other.

[0050] Regarding the specific structure of the radial vibration damping portion, the radial vibration damping portion optionally includes a vibration damping ring 311 and a plurality of vibration damping assemblies 312. The vibration damping rings 311 are spaced apart and sleeved on the fixed bracket 2 and fixedly connected to the adjustment sleeve 1. The plurality of vibration damping assemblies 312 are arranged on the vibration damping ring 311 at equal angles along the circumference of the vibration damping ring 311. The vibration damping assemblies 312 are elastic along the radial direction of the fixed bracket 2. In this embodiment, the end of the adjustment sleeve 1 away from the upper fixed bracket and the vibration damping ring are screwed together. In other embodiments, the end of the adjustment sleeve 1 away from the upper fixed bracket and the vibration damping ring can also be clamped together. Three vibration damping assemblies are provided and are respectively arranged on the vibration damping ring. The three vibration damping assemblies are arranged at an angle of 120 degrees to each other. This arrangement can achieve vibration damping of the objective lens 100 in any direction in the horizontal plane.

[0051] Regarding the specific structure of the shock-absorbing assembly, optionally, the vibration-absorbing ring 311 is provided with multiple threaded holes 3111 at equal angles along the circumference of the vibration-absorbing ring 311, with the axes of the threaded holes 3111 aligned with the radial direction of the fixing bracket 2; multiple vibration-absorbing assemblies 312 are disposed in a one-to-one correspondence within the multiple threaded holes 3111, and the vibration-absorbing assemblies 312 include steel balls 3121, radial springs 3122, and fastening screws 3123. The steel balls 3121 abut against the fixing bracket 2, the fastening screws 3123 are threadedly engaged with the threaded holes 3111, and the radial springs 3122 are disposed between the steel balls 3121 and the fastening screws 3123. In this embodiment, the steel balls 3121 and the fixing bracket 2 are in point-to-point contact, thereby preventing the steel balls 3121 from interfering with the movement of the fixing bracket 2. The spring is arranged between the steel ball 3121 and the fastening screw 3123. By adjusting the position of the fastening screw 3123 in the threaded hole 3111, the force of the radial spring 3122 acting on the steel ball can be adjusted.

[0052] Regarding the specific structure of the axial vibration damping part, optionally, a first clip 3112 is provided on the inner wall of the vibration damping ring 311, and a second clip 21 is provided on the fixed bracket 2. When the fixed bracket 2 is pulled out from one axial side of the vibration damping ring 311 to the other side, the first clip 3112 is engaged with the second clip 21; the axial vibration damping part includes an axial spring 321, which is sleeved on the fixed bracket 2 and located on the other side of the vibration damping ring 311. One end of the axial spring 321 is fixed to the fixed bracket 2, and the other end of the axial spring 321 is fixed to the adjusting sleeve 1. In this embodiment, to prevent the fixed bracket 2 from being withdrawn from one axial side of the shock-absorbing ring toward the other axial side, a first clip 3112 and a second clip 21 are provided on the shock-absorbing ring and the fixed bracket 2, respectively. When the fixed bracket 2 moves from the other axial side of the shock-absorbing ring toward one axial side, the first clip 3112 and the second clip 21 separate from each other. When the fixed bracket 2 moves from one axial side of the shock-absorbing ring toward the other axial side and is about to be released from the shock-absorbing ring, the first clip 3112 and the second clip 21 engage with each other. An axial damping portion is provided on the other axial side of the shock-absorbing ring. One end of the axial spring 321 is fixedly connected to the fixed bracket 2, and the other end of the axial spring 321 is fixedly connected to the adjustment sleeve 1. This arrangement allows the axial spring 321 to mitigate axial vibration of the objective lens 100 when the objective lens 100 is subjected to axial vibration.

[0053] Optionally, the axial vibration damping portion further includes a spring sleeve 322 and a nut 323. The spring sleeve 322 is sleeved on the fixed bracket 2 and abuts one end of the axial spring 321. The nut 323 is threadedly connected to the fixed bracket 2 and abuts a side of the spring sleeve 322 away from the axial spring 321. In this embodiment, the nut 323 is threadedly connected to the fixed bracket 2 along the axial direction of the fixed bracket 2. By screwing the nut 323, the relative position of the nut 323 and the fixed bracket 2 is adjusted, and the compression amount of the axial spring 321 can be adjusted.

[0054] Optionally, the objective lens stabilizer further includes an adjustment module, which includes an adjustment seat 41 and three radial adjustment bolts 42. The adjustment seats 41 are each sleeved on the adjustment sleeve 1 and spaced apart from the adjustment sleeve 1. The adjustment seat 41 is provided with three radial adjustment threaded holes 411 at equal angles along the circumference, with the axes of the three radial adjustment threaded holes 411 pointing radially to the adjustment sleeve 1. The three radial adjustment bolts 42 are threadedly engaged with the three radial adjustment threaded holes 411 in a one-to-one correspondence. The three radial adjustment bolts 42 respectively pass through the corresponding radial adjustment threaded holes 411 and abut against the adjustment sleeve 1. In this embodiment, by screwing the three radial adjustment screw plugs, the relative position of the adjustment sleeve 1 with respect to the adjustment seat 41 can be adjusted, and the horizontal position of the objective lens 100 can be fine-tuned.

[0055] Optionally, the adjustment module further includes three radial fastening bolts 412, and the adjustment sleeve 1 is provided with three connecting plates 11 along its circumference. The connecting plates 11 are provided with fixing holes 111. The three radial fastening bolts 412 pass through the three fixing holes 111 in a one-to-one correspondence and are respectively screwed to the adjustment seat 41. The diameter of the fixing holes 111 is larger than the diameter of the studs of the radial fastening bolts 412 and smaller than the diameter of the screw heads of the radial fastening bolts 412. In this embodiment, when the screw heads of the three radial fastening bolts 412 are spaced apart from the three corresponding connecting plates 11, since the diameter of the fixing holes 111 is larger than the diameter of the studs of the radial fastening bolts 412 and smaller than the diameter of the screw heads of the radial fastening bolts 412, the adjustment sleeve can move relative to the adjustment seat 41. When the screw heads of the three radial fastening bolts 412 are pressed against the three corresponding connecting plates 11 in a one-to-one correspondence, the adjustment sleeve is relatively fixed to the adjustment seat 41.

[0056] Optionally, the adjustment module also includes a base 43, a reference part 44, a limit screw 45, a limit spring 46 and two axial adjustment bolts 47. The base 43 is sleeved on the adjustment sleeve 1, the limit screw 45 passes through the adjustment seat 41 along the axial direction of the adjustment sleeve 1 and is screwed to the base 43, the limit spring 46 is sleeved on the limit screw 45 and one end abuts the screw head of the limit screw 45, and the other end abuts the adjustment seat 41, the reference part 44 includes a first reference 441 and a second reference 442, the reference part 44 is located between the base 43 and the adjustment seat 41, the first reference 441 and the second reference 442 are respectively fixed to the base 43 and the adjustment seat 41, the first reference 441 and the second reference 442 abut each other and make the base 43 and the adjustment seat 41 spaced apart, the two axial adjustment bolts 47 are screwed to the adjustment seat 41 and both abut against the base 43, and the angles between the two axial adjustment bolts 47 and the reference part 44 are equal. In this embodiment, when leveling the objective lens 100, the reference member 44 is first used as a reference. Since the first reference 441 and the second reference 442 abut against each other, the angle between the first reference 441 and the second reference 442 can be changed. The two axial adjustment bolts 47 are then screwed to horizontally level the objective lens 100. The limit spring 46 applies pressure to the adjustment seat 41 in the direction of the base 43, ensuring that the circumferential adjustment bolts are always in contact with the base 43, and the first reference 441 and the second reference 442 are always in contact.

[0057] Optionally, an axial fastening bolt is also included, and the adjustment seat 41 is provided with an axial fastening threaded hole, the axial fastening threaded hole is opposite to the axial adjustment bolt 47, the axial fastening bolt is threadedly connected to the axial fastening threaded hole and has two states: tightening the axial adjustment bolt 47 and being spaced apart from the tightening axial adjustment bolt 47.

[0058] Optionally, the surface where the first datum 441 and the second datum 442 abut is a spherical surface, and the surface where the second datum 442 abuts the first datum 441 is a planar surface. In this embodiment, this arrangement allows the first datum 441 and the second datum 442 to abut at a point and a plane, so that when the angle between the first datum 441 and the second datum 442 is changed, no motion interference occurs between the first datum 441 and the second datum 442.

[0059] Optionally, one end of the axial adjustment bolt 47 that abuts the base 43 is a spherical structure. The base 43 is provided with a first support member 431 and a second support member 432. The first support member 431 is provided with a spherical groove, and the second support member 432 is provided with a sliding groove. The sliding groove is arranged along the circumference of the base 43. The spherical structures of the two axial adjustment bolts 47 abut against the groove walls of the spherical groove and the groove walls respectively. In this embodiment, when the axial adjustment bolt 47 corresponding to the first support member 431 is adjusted, the adjustment seat 41 drives the other axial adjustment bolt 47 opposite the second support member 432 to slide relative to the base 43, thereby positioning the second support member 432 in the sliding groove, allowing the other axial adjustment bolt 47 to slide within the sliding groove.

[0060] like Figure 8 As shown, this embodiment also provides an optical machine, including the objective lens stabilizer in the above-mentioned solution, the optical machine includes a base 200, a stage 300, a top plate 400 and a measuring assembly, the stage 300 is set on the base 200 and slides relative to the base 200, and the stage 300 is used to place the measured object 800; the top plate 400 is spaced apart from the base 200, and the stage 300 is located between the top plate 400 and the base 200 and spaced apart from the top plate 400; the measuring assembly includes a driver 500, an optical element integration device 600 , an optical sleeve 700, an objective lens stabilizer and an objective lens 100, the optical element integration device 600 is arranged on the top plate 400 and its optical axis is opposite to the test piece 800, an optical sleeve 700 is fixedly provided on the side of the optical element integration device 600 opposite to the carrier 300, the optical sleeve 700 is coaxial with the optical axis, the objective lens 100 is slidably inserted into the optical sleeve 700, the objective lens stabilizer is sleeved on the objective lens 100 and fixed to the objective lens 100, and the driver 500 drives the objective lens stabilizer to move along the axial direction of the optical sleeve 700. In this embodiment, by adjusting the objective lens stabilizer, the optical axes of the objective lens 100 and the optical element integrated device 600 can be coaxial. Simultaneously, the focal length between the objective lens 100 and the device under test 800 can be adjusted by the actuator 500. By adjusting the relative position of the stage 300 and the base 200, the stage 300 and the objective lens 100 can be positioned away from each other, allowing for replacement and installation of the device under test 800. Furthermore, by adjusting the relative position of the stage 300 and the base 200, the relative position of the objective lens 100 and the device under test 800 can be adjusted. Specifically, the top plate 400 and the base 200 are supported by a plurality of columns.

[0061] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. Objective lens stabilizer, characterized in that include: An adjusting sleeve (1), wherein the adjusting sleeve (1) is provided with a through hole; A fixing bracket (2), the fixing bracket (2) being provided with a mounting hole, the fixing bracket (2) being used to fix the objective lens (100) in the mounting hole, the fixing bracket (2) being passed through the through hole and spaced apart from the adjusting sleeve (1); A vibration damping module comprises a radial vibration damping portion and an axial vibration damping portion, wherein the radial vibration damping portion is sleeved on the fixing bracket (2), the radial vibration damping portion is fixedly connected to the adjustment sleeve (1) and abuts against the fixing bracket (2), and the radial vibration damping portion is elastic along the radial direction of the fixing bracket (2); one end of the axial vibration damping portion abuts against the fixing bracket (2) along the axial direction of the fixing bracket (2), and the other end abuts against the adjustment sleeve (1), and the axial vibration damping portion is elastic along the axial direction of the fixing bracket (2); It also includes an adjustment module, the adjustment module including an adjustment seat (41) and three radial adjustment bolts (42), the adjustment seats (41) are sleeved on the adjustment sleeve (1) and spaced apart from the adjustment sleeve (1); The adjustment seat (41) is provided with three radial adjustment threaded holes (411) at equal angles along the circumferential direction, the axes of the three radial adjustment threaded holes (411) respectively point to the radial direction of the adjustment sleeve (1), the three radial adjustment bolts (42) are screwed to the three radial adjustment threaded holes (411) in a one-to-one correspondence, and the three radial adjustment bolts (42) respectively pass through the corresponding radial adjustment threaded holes (411) and abut against the adjustment sleeve (1); The adjustment module further includes three radial fastening bolts (412), the adjustment sleeve (1) is provided with three connecting plates (11) along its circumference, the connecting plates (11) are provided with fixing holes (111), the three radial fastening bolts (412) pass through the three fixing holes (111) in a one-to-one correspondence and are respectively screwed to the adjustment seat (41), and the diameter of the fixing hole (111) is larger than the diameter of the stud of the radial fastening bolt (412) and smaller than the diameter of the screw head of the radial fastening bolt (412).

2. The objective lens stabilizer according to claim 1, wherein: The radial vibration damping portion comprises a vibration damping ring (311) and a plurality of vibration damping assemblies (312); the vibration damping ring (311) is sleeved on the fixed bracket (2) at intervals and fixedly connected to the adjustment sleeve (1); the plurality of vibration damping assemblies (312) are arranged on the vibration damping ring (311) at equal angles along the circumference of the vibration damping ring (311); and the vibration damping assemblies (312) are elastic along the radial direction of the fixed bracket (2).

3. The objective lens stabilizer according to claim 2, wherein: The vibration damping ring (311) is provided with a plurality of threaded holes (3111) at equal angles along the circumference of the vibration damping ring (311), and the axes of the threaded holes (3111) are consistent with the radial direction of the fixing bracket (2); The plurality of vibration damping assemblies (312) are arranged in a one-to-one correspondence in the plurality of threaded holes (3111), and the vibration damping assemblies (312) include a steel ball (3121), a radial spring (3122) and a fastening screw (3123), the steel ball (3121) abuts against the fixing bracket (2), the fastening screw (3123) is screwed to the threaded hole (3111), and the radial spring (3122) is arranged between the steel ball (3121) and the fastening screw (3123).

4. The objective lens stabilizer according to claim 2, wherein: The inner wall of the vibration damping ring (311) is provided with a first clip (3112), and the fixing bracket (2) is provided with a second clip (21); when the fixing bracket (2) is pulled out from one axial side of the vibration damping ring (311) to the other axial side, the first clip (3112) is engaged with the second clip (21); The axial vibration damping portion comprises an axial spring (321), the axial spring (321) being sleeved on the fixing bracket (2) and located on the other side of the vibration damping ring (311), one end of the axial spring (321) being fixedly connected to the fixing bracket (2), and the other end of the axial spring (321) being fixedly connected to the adjusting sleeve (1).

5. The objective lens stabilizer according to claim 4, characterized in that The axial vibration damping portion further comprises a spring sleeve (322) and a nut (323), wherein the spring sleeve (322) is sleeved on the fixing bracket (2) and abuts against one end of the axial spring (321), and the nut (323) is threadedly connected to the fixing bracket (2) and abuts against a side of the spring sleeve (322) away from the axial spring (321).

6. The objective lens stabilizer according to claim 1, wherein: The adjustment module further includes a base (43), a reference member (44), a limit screw (45), a limit spring (46) and two axial adjustment bolts (47), wherein the base (43) is sleeved on the adjustment sleeve (1), the limit screw (45) passes through the adjustment seat (41) along the axial direction of the adjustment sleeve (1) and is screwed to the base (43), the limit spring (46) is sleeved on the limit screw (45) and one end abuts against the screw head of the limit screw (45) and the other end abuts against the adjustment seat (41), the reference member (44) includes a first reference (441) and a second reference (442). 42), the reference member (44) is located between the base (43) and the adjustment seat (41), the first reference (441) and the second reference (442) are fixed to the base (43) and the adjustment seat (41) respectively, the first reference (441) and the second reference (442) abut against each other and make the base (43) and the adjustment seat (41) spaced apart, the two axial adjustment bolts (47) are screwed to the adjustment seat (41) and both abut against the base (43), and the angles between the two axial adjustment bolts (47) and the reference member (44) are equal.

7. The objective lens stabilizer according to claim 6, wherein: The surface where the first datum (441) contacts the second datum (442) is a spherical surface, and the surface where the second datum (442) contacts the first datum (441) is a plane.

8. The objective lens stabilizer according to claim 6, wherein: One end of the axial adjustment bolt (47) that abuts against the base (43) is a spherical structure; The base (43) is provided with a first support member (431) and a second support member (432), respectively. The first support member (431) is provided with a spherical groove, and the second support member (432) is provided with a slide groove. The slide groove is arranged along the circumference of the base (43). The spherical structures of the two axial adjustment bolts (47) are respectively in contact with the groove wall of the spherical groove and the groove wall of the slide groove.

9. Optical machine, characterized in that, The objective lens stabilizer according to any one of claims 1 to 8, comprising: A base (200) and a carrier (300), wherein the carrier (300) is arranged on the base (200) and is slidably engaged with the base (200), and the carrier (300) is used to place a test piece (800); A top plate (400), the top plate (400) and the base (200) are spaced apart, and the carrier (300) is located between the top plate (400) and the base (200) and spaced apart from the top plate (400); A measuring assembly comprises a driver (500), an optical element integration device (600), an optical sleeve (700), an objective lens stabilizer and an objective lens (100), wherein the optical element integration device (600) is arranged on the top plate (400) and its optical axis is opposite to the measured object (800), an optical sleeve (700) is fixedly provided on a side of the optical element integration device (600) opposite to the carrier (300), the optical sleeve (700) is coaxial with the optical axis, the objective lens (100) is slidably inserted into the optical sleeve (700), the objective lens stabilizer is sleeved on the objective lens (100) and fixedly connected to the objective lens (100), and the driver (500) drives the objective lens stabilizer to move along the axial direction of the optical sleeve (700).

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