A vacuum pressure measurement device, method and system

Abstract

The present invention discloses a vacuum pressure measuring device, method and system. The vacuum pressure measuring device includes: a cavity for simulating the air pressure environment of an application scenario, a vacuum pressure sensor disposed in the cavity, and an electrical signal measuring instrument connected to the vacuum pressure sensor; the vacuum pressure sensor includes: a substrate connected to the electrical signal measuring instrument; a light emitting element connected to the substrate for generating light; a light receiving element connected to the substrate for receiving the light emitted by the light emitting element and generating an electrical signal; a bubble film covering the light emitting element and the light receiving element for reflecting the light emitted by the light emitting element; the electrical signal measuring instrument is used to detect the electrical signal generated by the light receiving element; the air pressure intensity in the cavity can be calculated according to the change amount of the electrical signal measured by the electrical signal measuring instrument. The present invention can directly read the change of pressure from the change amount of the electrical signal without the process of data analysis and processing, which not only makes the measurement method simpler, but also has a fast response.

Description

Technical Field

[0001] The present invention relates to the technical field of air pressure measurement, and particularly to a vacuum pressure measurement device, method and system. Background Art

[0002] At present, with the development of science and technology, more and more instruments and devices need to work in low-pressure or high-pressure environments. Therefore, a vacuum pressure sensor with high precision, high resolution, small volume and low power consumption is required to monitor the pressure change of the working environment in real time.

[0003] Optical sensors commonly used to measure air pressure include graphene sensors, zinc oxide nanostructure sensors, capacitive sensors, etc. However, the existing vacuum pressure sensors generally have the following problems: the measurement method is complex, and auxiliary equipment is required to analyze and process the measured data to obtain the corresponding pressure value; the response is slow, and some devices require a preparation time of several seconds to dozens of seconds before measurement, and some devices require a recovery time of several seconds after measurement, resulting in a relatively high overall hysteresis rate.

[0004] Therefore, the existing technology still needs to be improved and developed. Summary of the Invention

[0005] In view of the above deficiencies of the existing technology, the purpose of the present invention is to provide a vacuum pressure measurement device, method and system to solve the problems of complex measurement method and slow response of the existing optical sensors for measuring air pressure.

[0006] The technical solution of the present invention is as follows:

[0007] A vacuum pressure measurement device, comprising: a cavity for simulating the air pressure environment of the application scenario, a vacuum pressure sensor disposed in the cavity, and an electrical signal measuring instrument connected to the vacuum pressure sensor; wherein, the vacuum pressure sensor includes:

[0008] A substrate, connected to the electrical signal measuring instrument;

[0009] A light-emitting element, connected to the substrate, for generating light;

[0010] A light-receiving element, connected to the substrate, for receiving the light emitted by the light-emitting element and generating an electrical signal;

[0011] A bubble film, covering the light-emitting element and the light-receiving element, for reflecting the light emitted by the light-emitting element;

[0012] The electrical signal measuring instrument is used for detecting the electrical signal generated by the light-receiving element;

[0013] Among them, the change amount of the electrical signal measured by the electrical signal measuring instrument can be used to calculate the air pressure intensity in the cavity.

[0014] A further setting of the present invention is that the vacuum pressure measuring device further includes: a power supply; the power supply is connected to the substrate and is used to supply power to the vacuum pressure sensor.

[0015] A further setting of the present invention is that the vacuum pressure measuring device further includes: an optical coupling layer; the optical coupling layer is connected between the bubble film, the light emitting element, and the light receiving element; wherein, the bubble film covers the outside of the optical coupling layer.

[0016] A further setting of the present invention is that a sealed space is provided inside the bubble film, and a number of bubbles are provided inside the sealed space, and the volume of the bubbles changes with the magnitude of the air pressure intensity in the cavity.

[0017] A further setting of the present invention is that the bubble film is made of a flexible material.

[0018] A further setting of the present invention is that the flexible material is polydimethylsiloxane.

[0019] A further setting of the present invention is that the vacuum pressure measuring device further includes: a base; the cavity and the vacuum pressure sensor are arranged on the base.

[0020] Based on the same inventive concept, the present invention also provides a vacuum pressure measurement method applied to the above-mentioned vacuum pressure measuring device, which includes:

[0021] Adjusting the magnitude of the air pressure intensity in the cavity to simulate the air pressure change to be monitored in the application scenario air pressure environment;

[0022] The bubble film causes the refraction angle of part of the light emitted by the light emitting element to change under the action of the air pressure change;

[0023] The light intensity of the light reflected by the bubble film received by the light receiving element changes accordingly, causing the electrical signal generated by the light receiving element to change accordingly;

[0024] The electrical signal measuring instrument detects the change amount of the electrical signal according to the electrical signal generated by the light receiving element;

[0025] Calculating the magnitude of the air pressure intensity in the cavity according to the change amount of the electrical signal.

[0026] A further setting of the present invention is that before the step of adjusting the magnitude of the air pressure intensity in the cavity to simulate the air pressure change to be monitored in the application scenario air pressure environment includes:

[0027] Turn on the electrical signal measuring instrument and power on the vacuum pressure sensor;

[0028] Measure the electrical signal generated by the light-receiving element.

[0029] Based on the same inventive concept, the present invention also provides a vacuum pressure measurement system, which includes a processor and the vacuum pressure measurement device as described above; the processor is connected to the electrical signal measuring instrument and is used to calculate the air pressure intensity in the cavity according to the change amount of the electrical signal measured by the electrical signal measuring instrument.

[0030] A vacuum pressure measurement device, method and system provided by the present invention, the vacuum pressure measurement device includes: a cavity for simulating the air pressure environment of the application scenario, a vacuum pressure sensor arranged in the cavity, and an electrical signal measuring instrument connected to the vacuum pressure sensor; wherein, the vacuum pressure sensor includes: a substrate connected to the electrical signal measuring instrument; a light-emitting element connected to the substrate for generating light; a light-receiving element connected to the substrate for receiving the light emitted by the light-emitting element and generating an electrical signal; a bubble film covering the light-emitting element and the light-receiving element for reflecting the light emitted by the light-emitting element; the electrical signal measuring instrument is used to detect the electrical signal generated by the light-receiving element; wherein, the air pressure intensity in the cavity can be calculated according to the change amount of the electrical signal measured by the electrical signal measuring instrument. The present invention adjusts the magnitude of the air pressure intensity in the cavity to simulate the air pressure change to be monitored in the application scenario air pressure environment. When the air pressure in the cavity changes, the light intensity of the light received by the light-receiving element from the reflection of the bubble film changes, so that the magnitude of the electrical signal generated by the light-receiving element changes accordingly. Then, the electrical signal measuring instrument detects the change amount of the electrical signal according to the electrical signal generated by the light-receiving element, and calculates the magnitude of the air pressure intensity in the cavity according to the change amount of the electrical signal. It can be seen that the present invention can directly read the change of the pressure from the change amount of the electrical signal, eliminating the complex data analysis and processing process, and not only the measurement method is simpler, but also the response is fast. Description of the Drawings

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on the structures shown in these drawings without creative efforts.

[0032] Figure 1 It is a schematic diagram of the overall structure of the vacuum pressure measurement device in the present invention.

[0033] Figure 2 It is a schematic diagram of the structure of the vacuum pressure sensor in the present invention.

[0034] Figure 3This is the schematic diagram of the vacuum pressure sensor in the present invention.

[0035] Figure 4 This is the principle block diagram of the vacuum pressure measurement system in the present invention.

[0036] Figure 5 This is the schematic flow diagram of the vacuum pressure measurement method in the present invention.

[0037] Each label in the attached drawings: 100, vacuum pressure measurement device; 110, cavity; 120, vacuum pressure sensor; 121, substrate; 122, light-emitting element; 123, light-receiving element; 124, bubble film; 1241, bubble; 125, optical coupling layer; 130, electrical signal measuring instrument; 140, power supply; 150, base; 200, processor. Detailed implementation manners

[0038] The present invention provides a vacuum pressure measurement device, method and system. Whether in spaceships and various outer space detectors that require high precision for various equipment, or in the medical and health-related fields that require good stability and response speed, the present invention can greatly save the required space and energy. To make the objectives, technical solutions and effects of the present invention clearer and more definite, the following further describes the present invention in detail with reference to the attached drawings and by way of examples. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0039] In the embodiments and the scope of the patent application, unless otherwise specifically defined in the text for articles, the words "a", "an", "the" and "said" may also include the plural form. If there are descriptions involving "first", "second", etc. in the embodiments of the present invention, such descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second" may explicitly or implicitly include at least one of such features.

[0040] It should be further understood that the term "comprising" used in the description of the present invention means that there are the described features, integers, steps, operations, elements and / or components, but does not exclude the existence or addition of one or more other features, integers, steps, operations, elements, components and / or their groups. It should be understood that when we say an element is "connected" or "coupled" to another element, it can be directly connected or coupled to other elements, or there may also be intermediate elements. In addition, the "connection" or "coupling" used here may include wireless connection or wireless coupling. The phrase "and / or" used here includes all or any unit and all combinations of one or more related listed items.

[0041] Those skilled in the art can understand that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as the general understanding of those of ordinary skill in the technical field to which the present invention belongs. It should also be understood that terms such as those defined in a general dictionary should be understood to have a meaning consistent with the meaning in the context of the prior art, and will not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0042] In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0043] Through research by the inventor, it is found that existing optical sensors commonly used to measure air pressure include graphene sensors, zinc oxide nanostructure sensors, capacitive sensors, etc. The common problems of existing vacuum pressure sensors are: complex manufacturing, requiring chemical vapor deposition or other deposition and etching methods; high cost, with relatively high prices for the materials used; complex measurement methods, requiring auxiliary equipment to analyze and process the measured data to obtain the corresponding pressure value; slow response, some devices require a preparation time of several seconds to dozens of seconds before measurement, and some devices require a recovery time of several seconds after measurement, with a relatively high overall hysteresis rate.

[0044] In view of the above technical problems, the present invention provides a vacuum pressure measurement device, method and system. The vacuum pressure measurement device includes: a cavity for simulating the air pressure environment of an application scenario, a vacuum pressure sensor disposed in the cavity, and an electrical signal measuring instrument connected to the vacuum pressure sensor. Wherein, the vacuum pressure sensor includes: a substrate connected to the electrical signal measuring instrument; a light emitting element connected to the substrate for generating light; a light receiving element connected to the substrate for receiving the light emitted by the light emitting element and generating an electrical signal; a bubble film covering the light emitting element and the light receiving element for reflecting the light emitted by the light emitting element; the electrical signal measuring instrument is used to detect the electrical signal generated by the light receiving element. The present invention adjusts the magnitude of the air pressure intensity in the cavity to simulate the air pressure change to be monitored in the air pressure environment of the application scenario. When the air pressure in the cavity changes, the light intensity of the light received by the light receiving element from the reflection of the bubble film changes, so that the magnitude of the electrical signal generated by the light receiving element changes accordingly. Subsequently, the electrical signal measuring instrument detects the change amount of the electrical signal according to the electrical signal generated by the light receiving element, and calculates the magnitude of the air pressure intensity in the cavity according to the change amount of the electrical signal. It can be seen that the present invention can directly read the change of the pressure from the change amount of the electrical signal, omitting the complex data analysis and processing process. Not only is the measurement method simpler and the response faster, but also the production is simple and the cost is lower.

[0045] Please also refer to Figures 1 to 3 , the present invention provides a preferred embodiment of a vacuum pressure measurement device.

[0046] Please refer to Figures 1 to 3 , a vacuum pressure measurement device 100 provided by the present invention includes: a cavity 110 for simulating the air pressure environment of an application scenario, a vacuum pressure sensor 120 disposed in the cavity 110, and an electrical signal measuring instrument 130 connected to the vacuum pressure sensor 120. Wherein, the vacuum pressure sensor 120 includes: a substrate 121 connected to the electrical signal measuring instrument 130; a light emitting element 122 connected to the substrate 121 for generating light; a light receiving element 123 connected to the substrate 121 for receiving the light emitted by the light emitting element 122 and generating an electrical signal; a bubble film 124 covering the light emitting element 122 and the light receiving element 123 for reflecting the light emitted by the light emitting element 122; the electrical signal measuring instrument 130 is used to detect the electrical signal generated by the light receiving element 123; wherein, the air pressure intensity in the cavity 110 can be calculated according to the change amount of the electrical signal measured by the electrical signal measuring instrument 130.

[0047] Specifically, the light-emitting element 122 is a light source, and the light-receiving element 123 is a photodetector. The photodetector can receive the optical signal emitted by the light source and convert it into an electrical signal, such as a photocurrent signal (induced current). The electrical signal generated by the photodetector can be transmitted to the electrical signal measuring instrument 130 through the substrate 121. The cavity 110 has a certain accommodation space, and the vacuum pressure sensor 120 can be accommodated in the cavity 110. The principle of the cavity 110 to simulate the air pressure environment of the application scenario is to pump out the air in the cavity 110 by using a vacuum pump or open the air valve to put gas into the cavity 110, so that the air pressure in the cavity 110 becomes smaller or larger, thereby simulating the air pressure change to be monitored in the application environment. The bubble film 124 can reflect the light emitted by the light source to the photodetector. When the air pressure in the cavity 110 changes, the light intensity that the bubble film 124 can reflect also changes accordingly, so that the light intensity received by the photodetector changes correspondingly.

[0048] In specific implementation, the air pressure intensity in the cavity 110 is adjusted by a vacuum pump to simulate the air pressure change to be monitored in the application scenario air pressure environment. When the air pressure in the cavity 110 changes, the light intensity of the light reflected by the bubble film 124 received by the light-receiving element 123 changes, so that the magnitude of the electrical signal generated by the light-receiving element 123 changes accordingly. Subsequently, the electrical signal measuring instrument 130 detects the change amount of the electrical signal according to the electrical signal generated by the light-receiving element 123, and calculates the magnitude of the air pressure intensity in the cavity 110 according to the change amount of the electrical signal. Specifically, the magnitude of the air pressure intensity can be obtained through the linear negative correlation relationship established previously between the pressure and the change amount of the corresponding electrical signal. It can be seen that the present invention can directly read the change in pressure from the change amount of the electrical signal, eliminating the complex data analysis and processing process. Not only is the measurement method simpler, but also the response is fast, the sensitivity is good, and the repeatability is good. In addition, when manufacturing the vacuum pressure measuring device 100 provided by the present invention, there is no need to use chemical vapor deposition or other deposition and etching methods, and the materials used are relatively simple. Therefore, the manufacturing process and cost are relatively low. After completion, the overall volume is small, the structure is simple, and the light-emitting element 122 and the light-receiving element 123 have the advantages of long life, low power consumption, and stable light emission, making the durability of the vacuum pressure measuring device 100 also better.

[0049] Please refer to Figure 1 , in a further implementation manner of an embodiment, the vacuum pressure measuring device 100 further includes: a power supply 140; the power supply 140 is connected to the substrate 121 and is used to supply power to the vacuum pressure sensor 120.

[0050] Specifically, the power supply 140 is connected to the substrate 121 of the vacuum pressure sensor 120 to supply power to the light-emitting element 122 and the light-receiving element 123 through the substrate 121. In some embodiments, the light source can also supply power to the electrical signal measuring instrument 130.

[0051] Please refer to Figure 2 , in a further implementation manner of an embodiment, the vacuum pressure measuring device 100 further includes: an optical coupling layer 125; the optical coupling layer 125 is connected between the bubble film 124 and the light-emitting element 122 and the light-receiving element 123; wherein, the bubble film 124 covers the outside of the optical coupling layer 125.

[0052] Specifically, the optical coupling layer 125 serves as the substrate of the light-emitting element 122 and the light-receiving element 123. The light-emitting element 122 and the light-receiving element 123 are integrated on the optical coupling layer 125 to form a light-emitting and receiving chip, and then coupled to the substrate 121, so as to facilitate the installation of the light-emitting element 122 and the light-receiving element 123. After the light-emitting element 122 and the light-receiving element 123 are coupled to the substrate 121, the bubble film 124 is then covered on the optical coupling layer 125.

[0053] Please refer to Figure 2 and Figure 3 , in a further implementation manner of an embodiment, a sealed space is provided in the bubble film 124, and a number of bubbles 1241 are provided in the sealed space. The volume of the bubbles 1241 changes with the magnitude of the air pressure intensity in the cavity 110.

[0054] Specifically, the bubble film 124 has a sealed space for adapting to air pressure changes. A number of bubbles 1241 are made in the sealed space of the bubble film 124 by means of stirring and injection. The size of the bubbles 1241 is in the micron range. The bubble film 124 is made of a flexible material. When the pressure outside the bubble film 124 changes, the volume of the bubbles 1241 in the bubble film 124 will change, that is, the volume of the bubbles 1241 will become larger or smaller, so that the refraction angle of some of the light reflected by the bubble film 124 changes, thereby causing the light intensity of the light reflected by the bubble film 124 collected by the light-receiving element 123 to become less or more, and further causing the electrical signal generated by the light-receiving element 123 to become smaller or larger.

[0055] In one implementation, the flexible material can be, but is not limited to, a polydimethylsiloxane (PDMS) material.

[0056] Please refer to Figure 1, in a further implementation of an embodiment, the vacuum pressure measuring device 100 further includes: a base 150; the cavity 110 and the vacuum pressure sensor 120 are disposed on the base 150.

[0057] Specifically, the surface of the base 150 is a plane. The vacuum pressure sensor 120 can be placed on the base 150, and the cavity 110 is mounted on the base 150 and covers the vacuum pressure sensor 120.

[0058] Please refer to Figure 4 , in some embodiments, the present invention further provides a vacuum pressure measurement system, which includes a processor 200 and the vacuum pressure measuring device 100 as described above; the processor 200 is connected to the electrical signal measuring instrument 130 and is used to calculate the air pressure intensity in the cavity 110 according to the change amount of the electrical signal measured by the electrical signal measuring instrument 130.

[0059] Specifically, the vacuum pressure measuring device 100 measures the change amount of the electrical signal in the pressure change range to be monitored, obtains the magnitude of the change amount of the electrical signal corresponding to the pressure magnitude, and establishes a linear negative correlation relationship between the pressure and the change amount of the corresponding electrical signal through the processor 200. When measuring the pressure in the working environment, after the vacuum pressure measuring device 100 obtains an electrical signal (such as a photocurrent signal), it transmits the electrical signal to the processor 200. The processor 200 can obtain the magnitude of the pressure by comparing the established pressure-current change relationship. The vacuum pressure measuring device 100 is specifically as described in the embodiment of a vacuum pressure measuring device 100 above and will not be elaborated here.

[0060] Please refer to Figure 5 , in some embodiments, the present invention further provides a vacuum pressure measurement method applied to the vacuum pressure measuring device as described above, which includes the steps:

[0061] S100. Simulate the air pressure change to be monitored in the air pressure environment of the application scenario by adjusting the magnitude of the air pressure intensity in the cavity;

[0062] S200. The bubble film causes the refraction angle of some of the light emitted by the light-emitting element to change under the action of the air pressure change;

[0063] S300. The light intensity of the light reflected by the bubble film received by the light-receiving element changes accordingly, causing the electrical signal generated by the light-receiving element to change accordingly;

[0064] S400. The electrical signal measuring instrument detects the change amount of the electrical signal according to the electrical signal generated by the light-receiving element;

[0065] S500. Measure the air pressure intensity in the cavity according to the change amount of the electrical signal.

[0066] Specifically, first, adjust the air pressure intensity in the cavity through a vacuum pump to simulate the air pressure change to be monitored in the application scenario air pressure environment. When the air pressure in the cavity changes, the light intensity of the light received by the light-receiving element from the bubble film changes, causing the magnitude of the electrical signal generated by the light-receiving element to change accordingly. Subsequently, the electrical signal measuring instrument detects the change amount of the electrical signal according to the electrical signal generated by the light-receiving element, and measures the air pressure intensity in the cavity according to the change amount of the electrical signal. Specifically, the magnitude of the air pressure intensity can be obtained through the previously established linear negative correlation relationship between the pressure and the change amount of the corresponding electrical signal. It can be seen that the present invention can directly read the change in pressure from the change amount of the electrical signal, eliminating the complex data analysis and processing process. Not only is the measurement method simpler, but the response is also fast. In addition, when manufacturing the vacuum pressure measurement device provided by the present invention, there is no need to use chemical vapor deposition or other deposition and etching methods, and the materials used are relatively simple, so the manufacturing process and cost are also relatively low.

[0067] In some embodiments, before step S100, the following steps are further included:

[0068] S110. Turn on the electrical signal measuring instrument and power on the vacuum pressure sensor;

[0069] S120. Measure the electrical signal generated by the light-receiving element.

[0070] Specifically, when monitoring the working air pressure environment, first turn on the electrical signal measuring instrument and supply power to the vacuum pressure sensor through a power source, that is, supply power to the light-emitting element and the light-receiving element. Subsequently, the electrical signal measuring instrument starts to detect the electrical signal generated by the light-receiving element. When the pressure in the cavity changes, the light intensity of the light received by the light-receiving element from the bubble film also changes accordingly, causing the induced electrical signal generated by the light-receiving element to change. The change amount of the electrical signal can be detected through the electrical signal measuring instrument.

[0071] In summary, a vacuum pressure measurement device, method, and system provided by the present invention have the following beneficial effects:

[0072] Based on the light reflection principle, the change in pressure can be directly read from the change amount of the electrical signal, eliminating the complex data analysis and processing process. Not only is the measurement method simpler, but the response is fast, the sensitivity is good, and the repeatability is excellent;

[0073] When manufacturing the vacuum pressure measurement device provided by the present invention, there is no need to use chemical vapor deposition or other deposition and etching methods, and the materials used are relatively simple, so the manufacturing process and cost are also relatively low;

[0074] The structure of the present invention is simple, the materials are easily obtainable, the overall volume after completion is relatively small, and the measurement steps are also relatively easy, thereby reducing the overall cost;

[0075] The light-emitting element and the light-receiving element have the advantages of long service life, low power consumption, and stable light emission, making the vacuum pressure measuring device have better durability.

[0076] It should be understood that the application of the present invention is not limited to the above examples. For those of ordinary skill in the art, improvements or transformations can be made according to the above description, and all such improvements and transformations should fall within the protection scope of the appended claims of the present invention.

Claims

1. A vacuum pressure measuring device, characterized in that, Comprising: A cavity for simulating the air pressure environment of an application scenario, a vacuum pressure sensor disposed in the cavity, and an electrical signal measuring instrument connected to the vacuum pressure sensor; wherein, the vacuum pressure sensor comprises: A substrate connected to the electrical signal measuring instrument; A light-emitting element connected to the substrate for generating light; A light-receiving element connected to the substrate for receiving the light emitted by the light-emitting element and generating an electrical signal; A bubble film covering the light-emitting element and the light-receiving element for reflecting the light emitted by the light-emitting element; The electrical signal measuring instrument is used to detect the electrical signal generated by the light-receiving element; Wherein, the air pressure intensity in the cavity can be calculated according to the change amount of the electrical signal measured by the electrical signal measuring instrument.

2. The vacuum pressure measuring device according to claim 1, characterized in that, Further comprising: A power supply; the power supply is connected to the substrate for supplying power to the vacuum pressure sensor.

3. The vacuum pressure measuring device according to claim 1, characterized in that, Further comprising: An optical coupling layer; The optical coupling layer is connected between the bubble film and the light-emitting element and the light-receiving element; wherein, the bubble film covers the outside of the optical coupling layer.

4. The vacuum pressure measuring device according to claim 1 or 3, characterized in that, A sealed space is provided in the bubble film, and a plurality of bubbles are provided in the sealed space, and the volume of the bubbles changes with the magnitude of the air pressure intensity in the cavity.

5. The vacuum pressure measuring device according to claim 4, characterized in that, The bubble film is made of a flexible material.

6. The vacuum pressure measuring device according to claim 5, characterized in that, The flexible material is polydimethylsiloxane.

7. The vacuum pressure measuring device according to claim 1, characterized in that, Further comprising: A base; the cavity and the vacuum pressure sensor are disposed on the base.

8. A vacuum pressure measuring method applied to the vacuum pressure measuring device according to any one of claims 1 - 7, characterized in that, Comprising: Adjusting the magnitude of the air pressure intensity in the cavity to simulate the air pressure change to be monitored in the application scenario air pressure environment; The bubble film causes the refraction angle of a part of the light emitted by the light-emitting element to change under the action of the air pressure change; The light intensity of the light reflected by the bubble film received by the light-receiving element changes correspondingly, so that the electrical signal generated by the light-receiving element changes correspondingly; The electrical signal measuring instrument detects the change amount of the electrical signal according to the electrical signal generated by the light-receiving element; Calculating the magnitude of the air pressure intensity in the cavity according to the change amount of the electrical signal.

9. The vacuum pressure measuring method according to claim 8, characterized in that, Before the step of adjusting the magnitude of the air pressure intensity in the cavity to simulate the air pressure change to be monitored in the application scenario air pressure environment, it includes: Turning on the electrical signal measuring instrument and powering on the vacuum pressure sensor; Measuring the electrical signal generated by the light-receiving element.

10. A vacuum pressure measuring system, characterized in that, Comprising a processor and a vacuum pressure measuring device according to any one of claims 1-7; the processor is connected to the electrical signal measuring instrument for calculating the air pressure intensity in the cavity according to the change amount of the electrical signal measured by the electrical signal measuring instrument.

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