An OLED and substrate laser peeling pre-cleaning machine and cleaning process thereof

Abstract

The present invention discloses a cleaning machine and a cleaning process before laser stripping of OLED and substrate, including a material receiving mechanism, a transfer platform, a transfer arm, a grinding platform, a grinding mechanism, a two-fluid and air-drying mechanism and a material unloading mechanism. The material receiving mechanism is arranged at the front end of the machine, and the transfer platform is arranged at intervals on the side of the material receiving mechanism; the grinding platform is arranged horizontally on the machine; the grinding mechanism is arranged above the grinding platform, and the grinding mechanism is respectively provided with a grinding disc assembly corresponding to the double grinding channels; the transfer arm is arranged between the material receiving mechanism and the transfer platform; the two-fluid and air-drying mechanism includes two groups, which are respectively arranged on the sides of the two grinding channels of the grinding platform; the material unloading mechanism is arranged at the rear end of the machine. The present invention improves the grinding efficiency by 12-16 times, and the line change is flexible to adapt to different production capacity requirements. The protection and isolation of FPC during grinding are effectively realized through the flip covering protection and double-layer wind curtain blocking function. At the same time, the two-fluid mixed spraying and air-drying technology are adopted to further improve the grinding cleanliness.

Description

Technical Field

[0001] The present invention relates to the field of automation equipment, and in particular to an OLED and substrate pre-laser peeling cleaning machine and a cleaning process thereof. Background Art

[0002] In the field of flat panel display device production equipment, the components involved include glass substrates, cover plates, FPCs and various optical film materials. When assembling and bonding the components of flat panel display devices, pre-processing procedures are required. For example, the cleaning process is an essential front-end process when assembling and bonding flat panel display devices, and its function is to clean the screen surface.

[0003] In the production process of OLED screens, there is an intermediate layer of glue between the OLED and the upper substrate. The intermediate layer of glue needs to be removed by laser stripping. The laser is irradiated on the surface of the substrate, passes through the substrate and shoots onto the intermediate glue layer to achieve the function of stripping the glue layer. In order to ensure that the laser effectively penetrates the substrate and reduce the obstruction caused by debris on the substrate surface, the substrate surface needs to be cleaned before laser stripping. Since the sticky debris on the substrate surface is difficult to remove, the generally used process is grinding and cleaning, that is, the grinding disc is pressed against the substrate surface, and the substrate surface is ground by the rotation of the grinding disc, and the debris is separated from the substrate surface and removed. The traditional single-machine grinding and cleaning process adopts a single-chip grinding method, which has low grinding efficiency and cannot meet the online grinding requirements of the high-speed automated production line of OLED. In addition, since the side of the OLED is connected to the FPC, the traditional grinding and cleaning process is used. During the grinding and cleaning process, water vapor and other substances during grinding are sputtered and fall onto the FPC, which will corrode the internal circuit of the FPC. Therefore, the FPC needs to be isolated and protected during the grinding process. In addition, after grinding, the sticky materials on the screen surface will be attached to the surface of the substrate after being detached, so further cleaning or flushing is required to meet the cleanliness requirements; at the same time, the liquid accumulated on the screen during the cleaning process needs to be air-dried before it can flow into the next process. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a dual-channel and multi-piece synchronous grinding method to improve the grinding efficiency by 12-16 times, and the line change can flexibly adapt to different production capacity requirements. The protection and isolation of FPC during grinding are effectively achieved through the flip covering protection and double-layer wind curtain blocking function. At the same time, the two-fluid mixed spray and air drying technology are adopted to further improve the grinding cleanliness of OLED and substrate laser peeling before cleaning machine and cleaning process.

[0005] The technical solution adopted by the present invention is as follows: an OLED and substrate laser peeling pre-cleaning machine, including a material receiving mechanism, a transfer platform, a transfer arm, a grinding platform, a grinding mechanism, a second fluid and air drying mechanism and a material unloading mechanism, wherein the material receiving mechanism is arranged at the front end of the machine platform, the OLED substrate to be cleaned is moved into the material receiving mechanism, and the transfer platform is arranged at intervals on the side of the material receiving mechanism; the grinding platform is horizontally arranged on the machine platform and located at the rear side of the material receiving mechanism, the grinding platform includes two grinding channels arranged in parallel and at intervals, and a single grinding channel is provided with a grinding carrier and an FPC waterproof component; the grinding mechanism is arranged across the grinding platform, and the grinding mechanism is provided with grinding disc components corresponding to the two grinding channels respectively; the transfer arm is arranged across between the material receiving mechanism and the transfer platform The transfer arm transfers at least two OLED substrates on the receiving mechanism to the transfer platform synchronously respectively, and the loading arm arranged at the rear side of the transfer arm transports at least two OLED substrates on the transfer platform to the grinding carriers of the two grinding channels of the grinding platform. The FPC connected to one side of the OLED substrate is blocked and sealed by the FPC waterproof component to prevent moisture from entering when the grinding disc component grinds the OLED substrate; the above-mentioned two-fluid and air-drying mechanism includes two groups, which are respectively arranged at the sides of the two grinding channels of the grinding platform. The OLED substrates that have been ground and cleaned in the grinding channels are rinsed and air-dried by the two-fluid and air-drying mechanism; the above-mentioned unloading mechanism is arranged at the rear end of the machine, and the unloading mechanism sucks the OLED substrates from the grinding channels and transfers them to the next workstation.

[0006] Preferably, the material receiving mechanism includes a material receiving lifting arm and a material receiving platform, wherein the material receiving lifting arm and the material receiving platform are arranged on the machine platform at intervals, and the material receiving lifting arm absorbs the OLED substrate outside the machine platform and then rotates 180° to above the material receiving platform, and places the OLED substrate on the material receiving platform.

[0007] Preferably, the transfer moving arm includes a transfer support, a transfer horizontal module, a transfer lifting module, a transfer lifting seat, a transfer rotating motor, a transfer rotating seat and a transfer suction nozzle, wherein the above-mentioned transfer support is a U-shaped bracket structure, and the transfer support is mounted above the material receiving platform and the transfer platform; the above-mentioned transfer horizontal module is horizontally arranged on the transfer support along a straight line direction; the above-mentioned transfer lifting module is slidably connected to the transfer horizontal module, and is driven by the transfer horizontal module to move linearly; the above-mentioned transfer lifting seat is slidably connected to the transfer lifting module along a vertical direction, and is driven by the transfer lifting module to move up and down; the above-mentioned transfer rotating motor is arranged on the transfer lifting seat, and the output end extends downward through the transfer lifting seat; the above-mentioned transfer rotating seat is horizontally connected to the output end of the transfer rotating motor; the above-mentioned transfer suction nozzle includes at least two, and the transfer suction nozzle is vertically arranged on the transfer lifting seat to adsorb the OLED substrate by vacuum negative pressure.

[0008] Preferably, the grinding platform and the FPC waterproof component are slidably arranged on a grinding linear module, and the grinding linear module is horizontally arranged along the front-rear direction of the machine, and drives the grinding platform and the FPC waterproof component to move linearly synchronously.

[0009] Preferably, the grinding platform includes a platform bracket, a platform suction plate and a platform suction hole, wherein the above-mentioned platform bracket is horizontally arranged, the platform suction plate includes at least two pieces, and the platform suction plate is horizontally arranged on the carrier bracket; the above-mentioned platform suction holes include at least two, and the platform suction holes are arranged on the platform suction plate, and the platform suction holes form a vacuum negative pressure adsorption area in the horizontal plane where the platform suction plate is located according to the OLED substrate, and the vacuum negative pressure adsorption area is compatible with adsorbing horizontal or vertical screens by controlling the operation of the platform suction holes at different positions.

[0010] Preferably, the FPC waterproof assembly includes an FPC bracket, a flip protection component, an FPC support and a blocking component, wherein the FPC bracket is horizontally arranged close to the outer side of the carrier bracket; the FPC support is horizontally arranged in the middle of the FPC bracket, and the FPC connected to the side of the OLED substrate is horizontally supported by the FPC support; the flip protection component is arranged on the outer side of the FPC support, and flips over the FPC support to cover and protect the FPC; the blocking component is arranged on the inner side of the FPC support, and the blocking component blocks the FPC support and the carrier suction plate through the step difference surface and the wind curtain, thereby preventing water vapor from splashing onto the FPC support when the OLED substrate on the carrier suction plate is ground.

[0011] Preferably, the flip protection component includes a flip motor, a rotating shaft, a connecting seat and a cover plate, wherein the flip motor is arranged on the outside of the FPC bracket, and the output end is arranged toward the side direction of the FPC bracket; the rotating shaft is arranged on the outside of the FPC bracket along the side direction of the FPC bracket, and is connected to the output end of the flip motor, and the flip motor drives the rotating shaft to rotate; the connecting seat includes at least two, and the connecting seat is detachably mounted and fixed on the rotating shaft; one side of the cover plate is fixed on the connecting seat, and the bottom surface of the cover plate is provided with a surrounding strip extending along the side direction, and the surrounding strip is open at the inner side of the corresponding cover plate; the flip motor drives the cover plate to rotate by driving the rotating shaft.

[0012] Preferably, the blocking component includes a blocking support, a blocking slope, a blocking air hole and an air hole, wherein the blocking support is arranged on the inner side of the FPC support in parallel and at intervals, and the height of the blocking support is higher than that of the FPC support; the blocking slope is arranged on the inner side of the blocking support, and the blocking slope extends downward from the outside to the inside; the blocking air holes include at least two, and the blocking air holes are evenly spaced on the blocking slope, and each blocking air hole blows out high-pressure gas in a direction perpendicular to the blocking slope to form an oblique wind curtain so as to block water vapor splashed from the carrier suction plate; a strip groove is formed between the blocking support and the FPC support; the air holes include at least two, and the air holes are evenly spaced in the strip groove, and the air holes form a straight wind curtain in the vertical direction.

[0013] Preferably, the grinding disc assembly comprises a grinding disc bracket, a grinding disc linear module, a grinding disc slide, a grinding disc lifting motor, a first lifting seat, a grinding lifting cylinder, a second lifting seat, a grinding motor and a grinding disc, wherein the grinding disc bracket is arranged across the grinding channel of the grinding platform; the grinding disc linear module is arranged on the grinding disc bracket in a direction perpendicular to the grinding channel; the grinding disc slide is horizontally slidably connected to the grinding linear module and is driven by the grinding linear module to move linearly; the grinding disc lifting motor is arranged on the grinding disc slide, and the output end is arranged downward; the first lifting seat is slidably connected to the grinding disc slide in the vertical direction; It is connected to one side wall of the grinding disc slide, and is connected to the output end of the grinding disc lifting motor through a screw rod and a screw rod seat, and the grinding disc lifting motor drives the first lifting seat to move up and down; the above-mentioned grinding lifting cylinder is arranged on the first lifting seat, and the output end is arranged downward; the above-mentioned second lifting seat is slidably connected to the first lifting seat in the vertical direction, and is connected to the output end of the grinding lifting cylinder, and the lower part of the second lifting seat is rotatably connected to a grinding shaft; the above-mentioned grinding motor is arranged on the second lifting seat, and the output end is connected to the grinding shaft; the above-mentioned grinding disc is horizontally connected to the lower end of the grinding shaft, and the grinding motor drives the grinding disc to rotate by driving the grinding shaft to rotate.

[0014] Preferably, the two-fluid and air-drying mechanism comprises a two-fluid component and an air-drying component, which are sequentially arranged on one side of the grinding channel along the flow direction of the OLED substrate; the OLED substrate after grinding and cleaning is sprayed with two fluids by the two-fluid component, and the surface is air-dried by the air-drying component; the two-fluid component comprises a two-fluid bracket, a support rod, a liquid spray component and an air-jet component, wherein the two-fluid bracket is horizontally arranged above the grinding channel; the support rod is connected to the lower part of the two-fluid bracket, the support rod comprises a vertical support rod and a horizontal support rod, the vertical support rod is slidably hung on the two-fluid bracket and extends vertically downward, and the horizontal support rod is connected to the vertical support rod through a connecting seat; the air-jet component comprises an air knife, the air knife comprises at least two, the air knife is detachably connected to the horizontal support rod through a connecting seat, an air outlet is arranged at the bottom of the air knife, the air outlet is a linear gap structure, and the air outlet blows out high-pressure gas; the air knife is inclined in the vertical direction , so that the air outlet is set in the opposite direction of the flow of the OLED substrate; the above-mentioned liquid spraying component includes a spray seat, which is detachably connected to the horizontal support rod through a connecting seat, and at least two nozzles are provided at the bottom of the spray seat, which spray high-pressure liquid, and mix with the gas blown out by the wind knife to form a gas-liquid two-fluid mixture and then spray the OLED substrate; the above-mentioned air-drying component includes at least two groups, and the air-drying components are arranged at intervals along the flow direction of the OLED substrate. The air-drying component includes an air-drying bracket, an air-drying adjustment seat, an air-drying support rod and an air cavity; wherein the above-mentioned air-drying bracket is arranged vertically; the above-mentioned air-drying adjustment seat is detachably mounted on the air-drying bracket and moves vertically along the air-drying bracket to adjust the installation height; the above-mentioned air-drying support rod is horizontally connected to the air-drying adjustment seat; the above-mentioned air cavity is connected to the air-drying support rod and extends horizontally to the top of the grinding channel, and a slit-shaped air outlet is opened at the bottom of the air cavity, and the slit-shaped air outlet blows out high-pressure gas to the surface of the OLED substrate for air drying.

[0015] Preferably, the unloading mechanism includes an unloading linear module, an unloading slide, an unloading lifting module, an unloading lifting seat, an unloading adjustment module, an unloading support plate and an unloading suction nozzle, wherein the unloading linear module is arranged on the rear end side of the grinding channel and extends outside the machine; the unloading slide is slidably connected to the unloading linear module and is driven by the unloading linear module to move linearly; the unloading lifting module is arranged on the unloading slide in a vertical direction; the unloading lifting seat is slidably connected to the unloading lifting module in a vertical direction and is driven to move up and down in the vertical direction by the unloading lifting module; the unloading adjustment module is horizontally arranged on the unloading lifting seat; the unloading support plate is horizontally arranged below the unloading adjustment module, and is connected to the output end of the unloading adjustment module through a connecting rod, and is driven to move in a linear direction by the unloading adjustment module; the unloading suction nozzle includes at least two, and the unloading suction nozzle is detachably connected to the unloading support plate so as to adsorb the OLED substrate.

[0016] A cleaning process of an OLED and substrate laser peeling cleaning machine comprises the following process steps: S1, receiving materials: a receiving arm of a receiving mechanism receives an OLED substrate to be ground and cleaned from a previous station, and then turns the arm 180 degrees and places the arm on a receiving platform;

[0017] S2, transfer loading: the transfer arm synchronously absorbs at least two OLED substrates on the receiving platform in step S1 and transfers them to the transfer platform, and the loading arm arranged at the rear side of the transfer arm moves the OLED substrates on the transfer platform to the grinding carriers of the two grinding channels of the grinding platform;

[0018] S3, FPC waterproof protection: After the OLED substrate is transferred to the grinding stage in step S2, the FPC on one side of the OLED substrate is supported by the FPC waterproof component arranged on one side of the grinding stage, and the FPC waterproof component cover is rotated inward by 180° to cover and protect the FPC, and a strong airflow is blown out through the oblique air holes and air holes arranged side by side to form an inner oblique wind curtain and an outer straight wind curtain, so as to block the space between the grinding stage and the FPC waterproof component, and prevent the substances generated during grinding on the grinding stage from entering the FPC;

[0019] S4, OLED substrate grinding: After the FPC waterproof component completes the waterproof protection for the FPC in step S3, the grinding stage drives the OLED substrate and its FPC to move under the grinding mechanism, and the grinding component grinds and cleans the multiple OLED substrates on the grinding stage;

[0020] S5, two-fluid spray rinsing and air drying: After the OLED substrate is polished and cleaned in step S4, the polishing stage moves forward to the two-fluid and air drying mechanism, and the two-fluid spray rinsing and air drying actions are sequentially completed on the polished OLED substrate through the two-fluid and air drying mechanism;

[0021] S6, FPC waterproof release protection: After the OLED substrate is sprayed with two fluids and air-dried in step S4, the grinding stage moves forward, and the cover of the FPC waterproof component is rotated outward by 90° to 100° to release the FPC, and the oblique air curtain and the straight air curtain stop outputting strong airflow;

[0022] S7, unloading: After the FPC waterproof component is released from protection in step S5, the grinding stage drives the OLED substrate to move backwards, and the unloading mechanism sucks and moves the OLED substrate on the grinding stage to be unloaded after the AOI inspection mechanism performs product defect inspection.

[0023] The beneficial effects of the present invention are:

[0024] The present invention innovates the shortcomings and defects of the prior art and designs a dual-channel and multi-piece synchronous grinding method to increase the grinding efficiency by 12-16 times, and the line change is flexible to adapt to different production capacity requirements. The protection and isolation of FPC during grinding are effectively achieved through the flip cover protection and double-layer wind curtain blocking function. At the same time, the two-fluid mixed spray and air drying technology are used to further improve the grinding cleanliness of the OLED and substrate laser peeling pre-cleaning machine and its cleaning process. The present invention belongs to online OLED substrate grinding equipment, which is suitable for high-speed automated production line requirements.

[0025] The present invention adopts a double grinding channel design, by setting two grinding platforms in parallel and at intervals along the flow direction of the sheet on the machine as the sheet grinding carrier and transportation carrier, and at the same time, a grinding mechanism is respectively arranged above the two grinding platforms; at the same time, two fluids and air-drying mechanisms and unloading mechanisms are respectively arranged behind the two grinding mechanisms, and a single grinding platform and its corresponding grinding mechanism, two fluids and air-drying mechanism, and unloading mechanism independently complete the grinding cleaning, two fluid spraying, air-drying and unloading actions. In addition, the grinding mechanism of the present invention adopts a multi-grinding disc design, preferably a four-grinding disc parallel design. After the grinding platform drives the OLED substrate to move to the bottom of the grinding mechanism, the four grinding discs are synchronously lifted and lowered close to the surface of the OLED substrate to complete the grinding action. Compared with the traditional single-piece grinding process, this kind of double-strip independently working grinding channel with a four-grinding disc design structure theoretically improves the grinding efficiency by 16 times, and its grinding efficiency is increased by about 12-16 times during the actual grinding process, which meets the production capacity requirements of high-speed automated grinding production lines. At the same time, the dual-channel independent grinding method can also select single-channel or dual-channel operation according to the actual production capacity requirements, with flexible line change and strong adaptability.

[0026] The present invention is aimed at the need for protection and isolation of the FPC of OLED when grinding the substrate, and innovatively designs a grinding platform. The grinding platform as a whole includes a grinding linear module, a grinding platform and an FPC waterproof component. The grinding platform is arranged on the grinding linear module, and is driven by the grinding linear module to move linearly. The platform suction plate of the grinding platform is evenly provided with platform suction holes, and the platform suction holes form a vacuum negative pressure adsorption area on the platform suction plate. By controlling the operation of the platform suction holes at different positions, the size and size of the vacuum negative pressure adsorption area can be adjusted in real time, so as to meet the adsorption requirements of vertically placed vertical screens or horizontally placed horizontal screens or screens of different sizes. An FPC waterproof component is arranged on the outer side of the platform suction plate, and the FPC waterproof component uses the FPC bracket as a bearing structure. An FPC support is arranged in the middle of the FPC bracket as an FPC support structure, and a flip protection component is arranged on the outer side of the FPC support, and a blocking component is arranged on the inner side of the FPC support. The flip protection component uses a flip motor arranged on the side of the FPC bracket as a power structure. The flip motor drives the cover plate connected to it through the connecting seat to rotate through the driving shaft, so that the cover plate rotates from the outside to the inside, and covers and protects the FPC on the FPC support from above. In order to improve the isolation and protection effect, a convex strip is provided on the side edge of the bottom surface of the cover plate of the present invention. After the cover plate covers the surface of the FPC, the strip protects the FPC from three directions. In order to prevent the FPC from being damaged by pressure, the strip is an open structure close to the grinding carrier to facilitate the passage of the FPC. The barrier component of the present invention is arranged on the inner side of the FPC support in parallel and at intervals, and the barrier support with a height higher than the FPC support serves as a structural support, and a physical barrier is formed by the step difference of the barrier support; at the same time, a barrier slope extending downward from the outside to the inside is also provided on the inner side of the barrier support, and a row of barrier air holes evenly spaced are provided on the barrier slope, and the barrier air holes form a layer of inclined wind curtain structure by spraying high-pressure gas in a direction perpendicular to the barrier slope, and the first layer of barrier to the space between the FPC support and the grinding platform is achieved by the inclined wind curtain; in addition, an inwardly concave strip groove is formed between the barrier step and the FPC support, and a row of evenly spaced air holes are provided in the strip groove, and the air holes blow high-pressure gas upward in a vertical direction to form a layer of straight wind curtain structure, and the second layer of barrier to the space between the FPC support and the grinding platform is achieved by the straight wind curtain. This double-layer wind curtain barrier method achieves double-layer barrier of space without interfering with the movement of FPC, and can effectively prevent water vapor or other substances generated during grinding on the grinding platform from splashing onto the FPC, thereby corroding the FPC.

[0027] In view of the cleanliness of the screen and the subsequent process requirements, the present invention also provides a two-fluid and air-drying mechanism in the post-grinding cleaning stage to spray and rinse and air-dry the ground OLED substrate. The two-fluid and air-drying mechanism of the present invention comprises a two-fluid component and an air-drying component arranged along the flow direction of the OLED substrate; the two-fluid component uses a two-fluid bracket suspended above the grinding platform as a supporting structure, and a plurality of vertical support rods are vertically hung at the bottom of the two-fluid bracket, and the top of the vertical support rod is inserted into a strip groove body provided on the two-fluid support plate, and can slide linearly along the strip groove body to adjust the installation position, and the lower part of the vertical support rod is detachably connected to a plurality of horizontal support rods through a connecting seat, and the installation position of the horizontal support rod in the vertical direction can be adjusted through the connecting seat; the horizontal support rod is connected to a wind knife and a spray seat through the connecting seat, and the wind knife comprises a plurality of wind knives, which are arranged obliquely in the vertical direction, and the air outlet at the bottom of the wind knife is a linear gap structure, and the air outlet blows out high-pressure gas in the opposite direction of the flow of the OLED substrate; a plurality of high-pressure nozzles are arranged at the bottom of the spray seat, and the nozzle mouth is arranged downward, and sprays high-pressure liquid downward and mixes with the gas blown by the wind knife to form a gas-liquid two-fluid mixture, and then sprays the OLED substrate. The two-fluid mixture of this gas-liquid mixed structure combines the advantages of gas and liquid, and has a better spray cleaning effect on the substrate surface than a single gas or liquid. After the two-fluid spray, the OLED substrate is dried by the air drying component through high-pressure gas to flow into the next workstation. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0029] Figure 2 This is one of the three-dimensional structural schematic diagrams of the present invention after the components are hidden.

[0030] Figure 3 This is the second schematic diagram of the three-dimensional structure after the hidden components of the present invention.

[0031] Figure 4 This is one of the three-dimensional structural schematic diagrams of the loading and lifting arm of the present invention.

[0032] Figure 5 This is the second schematic diagram of the three-dimensional structure of the loading and lifting arm of the present invention.

[0033] Figure 6 This is the third schematic diagram of the three-dimensional structure of the loading and lifting arm of the present invention.

[0034] Figure 7 This is one of the three-dimensional structural schematic diagrams of the grinding platform of the present invention.

[0035] Figure 8 This is the second schematic diagram of the three-dimensional structure of the grinding platform of the present invention.

[0036] Fig. 9This is one of the three-dimensional structural schematic diagrams of the grinding carrier of the present invention.

[0037] Fig.10 This is the second schematic diagram of the three-dimensional structure of the grinding carrier of the present invention.

[0038] Fig.11 This is the third schematic diagram of the three-dimensional structure of the grinding carrier of the present invention.

[0039] Fig.12 This is one of the three-dimensional structural schematic diagrams of the FPC waterproof component of the present invention.

[0040] Fig.13 This is the second schematic diagram of the three-dimensional structure of the FPC waterproof component of the present invention.

[0041] Fig.14 for Fig.12 The enlarged structural diagram at point I in the middle.

[0042] Fig.15 This is one of the three-dimensional structural schematic diagrams of the grinding mechanism of the present invention.

[0043] Fig.16 This is the second schematic diagram of the three-dimensional structure of the grinding mechanism of the present invention.

[0044] Fig.17 This is one of the three-dimensional structural schematic diagrams of the grinding disc assembly of the present invention.

[0045] Fig.18 This is the second schematic diagram of the three-dimensional structure of the grinding disc assembly of the present invention.

[0046] Fig.19 This is the third schematic diagram of the three-dimensional structure of the grinding disc assembly of the present invention.

[0047] Fig. 20 This is one of the three-dimensional structural schematic diagrams of the two fluids and air-drying mechanism of the present invention.

[0048] Fig.21 This is the second schematic diagram of the three-dimensional structure of the two fluids and air-drying mechanism of the present invention.

[0049] Fig. 22 This is the third schematic diagram of the three-dimensional structure of the two fluids and air-drying mechanism of the present invention.

[0050] Fig.23 This is one of the three-dimensional structural schematic diagrams of the material unloading and lifting arm of the present invention.

[0051] Fig.24 This is the second schematic diagram of the three-dimensional structure of the material unloading and lifting arm of the present invention.

[0052] Fig.25 This is the third schematic diagram of the three-dimensional structure of the material unloading and lifting arm of the present invention.

[0053] Fig.26 This is the fourth schematic diagram of the three-dimensional structure of the material unloading and lifting arm of the present invention. DETAILED DESCRIPTION

[0054] The present invention will be further described below in conjunction with the accompanying drawings:

[0055] like Figures 1 to 26 As shown, the technical solution adopted by the present invention is as follows: an OLED and substrate laser peeling cleaning machine, including a material receiving mechanism, a transfer platform 4, a transfer arm 6, a grinding platform 7, a grinding mechanism 8, a second fluid and air drying mechanism and a material unloading mechanism 11, wherein the material receiving mechanism is arranged at the front end of the machine 1, and the OLED substrate to be cleaned is moved into the material receiving mechanism, and the transfer platform 4 is arranged at intervals on the side of the material receiving mechanism; the grinding platform 7 is horizontally arranged on the machine 1 and is located at the rear side of the material receiving mechanism, and the grinding platform 7 includes two grinding channels arranged in parallel and at intervals, and a single grinding channel is provided with a grinding carrier 72 and an FPC waterproof component 73; the grinding mechanism 8 is arranged across the grinding platform 7, and the grinding mechanism 8 is respectively provided with grinding disc components corresponding to the two grinding channels; the transfer arm 6 is arranged across the material receiving mechanism and the transfer arm 6 Between the transfer platforms 4, the transfer arm 6 transfers at least two OLED substrates on the receiving mechanism to the transfer platform 4 synchronously, and the loading arm arranged at the rear side of the transfer arm 6 transports at least two OLED substrates on the transfer platform 4 to the grinding carriers of the two grinding channels of the grinding platform 7. The FPC connected to one side of the OLED substrate is blocked and sealed by the FPC waterproof component to prevent moisture from entering when the grinding disc component grinds the OLED substrate; the above-mentioned two-fluid and air-drying mechanism includes two groups, which are respectively arranged at the sides of the two grinding channels of the grinding platform 7. The OLED substrates that have been ground and cleaned in the grinding channels are rinsed and air-dried by the two-fluid and air-drying mechanism; the above-mentioned unloading mechanism 11 is arranged at the rear end of the machine 1, and the unloading mechanism 11 respectively absorbs the OLED substrates from the grinding channels and transfers them to the next workstation.

[0056] The material receiving mechanism includes a material receiving lifting arm 2 and a material receiving platform 3, wherein the material receiving lifting arm 2 and the material receiving platform 3 are arranged at intervals on the machine 1, and the material receiving lifting arm 2 absorbs the OLED substrate outside the machine 1 and rotates 180° to above the material receiving platform 3, and places the OLED substrate on the material receiving platform 3.

[0057] The transfer arm 6 includes a transfer support 61, a transfer horizontal module 62, a transfer lifting module 63, a transfer lifting seat 64, a transfer rotating motor 65, a transfer rotating seat 66 and a transfer suction nozzle 67, wherein the transfer support 61 is a U-shaped bracket structure, and the transfer support 61 is erected above the material receiving platform 3 and the transfer platform 4; the transfer horizontal module 62 is horizontally arranged on the transfer support 61 along a straight line direction; the transfer lifting module 63 can be slidably connected to the transfer horizontal module 62, and driven by the transfer horizontal module 62 The transfer lifting seat 64 is slidably connected to the transfer lifting module 63 along the vertical direction, and is driven by the transfer lifting module 63 to move up and down; the transfer rotating motor 65 is arranged on the transfer lifting seat 64, and the output end extends downward through the transfer lifting seat 64; the transfer rotating seat 66 is horizontally connected to the output end of the transfer rotating motor 65; the transfer suction nozzle 67 includes at least two, and the transfer suction nozzle 67 is vertically arranged on the transfer lifting seat 64 to adsorb the OLED substrate through vacuum negative pressure.

[0058] The grinding platform 72 and the FPC waterproof component 73 are slidably arranged on the grinding linear module 71. The grinding linear module 71 is arranged horizontally and linearly along the front-rear direction of the machine 1, and drives the grinding platform 72 and the FPC waterproof component 73 to move linearly synchronously.

[0059] The grinding platform 72 includes a platform bracket, a platform suction plate 721 and a platform suction hole 722, wherein the above-mentioned platform bracket is horizontally arranged, the platform suction plate 721 includes at least two pieces, and the platform suction plate 721 is horizontally arranged on the carrier bracket; the above-mentioned platform suction holes 722 include at least two, and the platform suction holes 722 are arranged on the platform suction plate 721. The platform suction holes 722 form a vacuum negative pressure adsorption area in the horizontal plane where the platform suction plate 721 is located according to the OLED substrate. By controlling the operation of the platform suction holes 722 at different positions, the vacuum negative pressure adsorption area is compatible with adsorbing horizontal or vertical screens.

[0060] The FPC waterproof component 73 includes an FPC bracket 730, a flip protection component, an FPC support 736 and a blocking component, wherein the FPC bracket 730 is horizontally arranged close to the outer side of the carrier bracket; the FPC support 736 is horizontally arranged in the middle of the FPC bracket 730, and the FPC connected to the side of the OLED substrate is horizontally supported by the FPC support 736; the flip protection component is arranged on the outer side of the FPC support 736, and flips over the FPC support 736 to cover and protect the FPC; the blocking component is arranged on the inner side of the FPC support 736, and the blocking component blocks the FPC support 736 and the carrier suction plate 721 through the step difference surface and the wind curtain, thereby preventing water vapor from splashing onto the FPC support 736 when the OLED substrate on the carrier suction plate 721 is ground.

[0061] The flip protection component includes a flip motor 731, a rotating shaft 732, a connecting seat 733 and a cover plate 734, wherein the flip motor 731 is arranged on the outside of the FPC bracket 730, and the output end is arranged toward the side direction of the FPC bracket 730; the rotating shaft 732 is arranged on the outside of the FPC bracket 730 along the side direction of the FPC bracket 730, and is connected to the output end of the flip motor 731, and the flip motor 731 drives the rotating shaft 732 to rotate; the connecting seat 733 includes at least two, and the connecting seat 733 is detachably mounted and fixed on the rotating shaft 732; one side of the cover plate 734 is fixed on the connecting seat 733, and the bottom surface of the cover plate 734 is provided with a surrounding strip extending along the side direction, and the surrounding strip is open at the inner side of the corresponding cover plate 734; the flip motor 731 drives the cover plate 734 to rotate by driving the rotating shaft 732.

[0062] The blocking component includes a blocking support 737, a blocking slope 738, a blocking air hole 739 and an air hole 7310, wherein the blocking support 737 is arranged in parallel and spaced apart on the inner side of the FPC support 736, and the height of the blocking support 737 is higher than that of the FPC support 736; the blocking slope 738 is arranged on the inner side of the blocking support 737, and the blocking slope 738 extends downward from the outside to the inside; the blocking air hole 739 includes at least two, ... The holes 739 are evenly spaced on the blocking slope 738, and each blocking air hole 739 blows out high-pressure gas in a direction perpendicular to the blocking slope 738 to form an oblique wind curtain so as to block the water vapor splashed from the carrier suction plate 721; a strip groove is formed between the blocking support 737 and the FPC support 736; the above-mentioned air holes 7310 include at least two, and the air holes 7310 are evenly spaced in the strip groove, and the air holes 7310 form a straight wind curtain along the vertical direction.

[0063] The grinding disc assembly includes a grinding disc bracket 81, a grinding disc linear module 82, a grinding disc slide 83, a grinding disc lifting motor 84, a first lifting seat 85, a grinding lifting cylinder 86, a second lifting seat 87, a grinding motor 88 and a grinding disc 89, wherein the grinding disc bracket 81 is arranged across the grinding channel of the grinding platform 7; the grinding disc linear module 82 is arranged on the grinding bracket 81 in a direction perpendicular to the grinding channel; the grinding disc slide 83 is horizontally slidably connected to the grinding linear module 82, and is driven by the grinding linear module 82 to move linearly; the grinding disc lifting motor 84 is arranged on the grinding disc slide 83, and the output end is arranged downward; the first lifting seat 85 is slidably connected to the grinding disc slide 83 in the vertical direction; It is connected to one side wall of the grinding disc slide 83, and is connected to the output end of the grinding disc lifting motor 84 through a screw rod and a screw rod seat. The grinding disc lifting motor 84 drives the first lifting seat 85 to move up and down; the above-mentioned grinding lifting cylinder 86 is arranged on the first lifting seat 85, and the output end is arranged downward; the above-mentioned second lifting seat 87 is slidably connected to the first lifting seat 85 in the vertical direction, and is connected to the output end of the grinding lifting cylinder 86, and the lower part of the second lifting seat 87 is rotatably connected to the grinding shaft; the above-mentioned grinding motor 88 is arranged on the second lifting seat 87, and the output end is connected to the grinding shaft; the above-mentioned grinding disc 89 is horizontally connected to the lower end of the grinding shaft, and the grinding motor 88 drives the grinding disc 89 to rotate by driving the grinding shaft to rotate.

[0064] The two-fluid and air-drying mechanism includes a two-fluid component 9 and an air-drying component 10, which are sequentially arranged on one side of the grinding channel along the flow direction of the OLED substrate; the OLED substrate after grinding and cleaning is sprayed with two fluids by the two-fluid component 9, and the surface is air-dried by the air-drying component 10; the two-fluid component 9 includes a two-fluid support 91, a support rod, a liquid spray component and an air-jet component, wherein the two-fluid support 91 is horizontally arranged above the grinding channel; the support rod is connected to the lower part of the two-fluid support 91, and the support rod includes a vertical support rod and a horizontal support rod, the vertical support rod can be slidably hung on the two-fluid support 91 and extends vertically downward, and the horizontal support rod is connected to the vertical support rod through a connecting seat; the air-jet component includes an air knife 92, the air knife 92 includes at least two, the air knife 92 is detachably connected to the horizontal support rod through a connecting seat, and an air outlet is provided at the bottom of the air knife 92, the air outlet is a linear gap structure, and the air outlet blows out high-pressure gas; the air knife 92 is arranged obliquely in the vertical direction so that the air outlet flows in the opposite direction to the OLED substrate The liquid spraying component includes a spray seat 93, which is detachably connected to the horizontal support rod through a connecting seat, and at least two nozzles are provided at the bottom of the spray seat 93, which spray high-pressure liquid and mix it with the gas blown by the wind knife 92 to form a gas-liquid two-fluid mixture and then spray it on the OLED substrate; the air-drying component 10 includes at least two groups, and the air-drying components are arranged at intervals along the flow direction of the OLED substrate. The air-drying component 10 includes an air-drying bracket 101, an air-drying adjustment seat 102, and an air-drying support rod 103. and an air cavity 104; wherein the air-drying bracket 101 is vertically arranged; the air-drying adjustment seat 102 is detachably mounted on the air-drying bracket 101 and vertically moves along the air-drying bracket 101 to adjust the installation height; the air-drying support rod 103 is horizontally connected to the air-drying adjustment seat 102; the air cavity 104 is connected to the air-drying support rod 103 and horizontally extends to the top of the grinding channel, and a slit-shaped air outlet is opened at the bottom of the air cavity 104, and the slit-shaped air outlet blows out high-pressure gas to the surface of the OLED substrate for air drying.

[0065] The material unloading mechanism 11 comprises a material unloading linear module 111, a material unloading slide 112, a material unloading lifting module 113, a material unloading lifting seat 114, a material unloading adjustment module 115, a material unloading support plate 116 and a material unloading suction nozzle 117, wherein the material unloading linear module 111 is arranged at the rear end side of the grinding channel and extends to the outside of the machine 1; the material unloading slide 112 is slidably connected to the material unloading linear module 111 and is driven by the material unloading linear module 111 to move linearly; the material unloading lifting module 113 is arranged on the material unloading slide 112 along the vertical direction; the material unloading lifting seat 114 is arranged along the vertical direction It is slidably connected to the material unloading lifting module 113 in the vertical direction, and is driven to move up and down in the vertical direction by the material unloading lifting module 113; the above-mentioned material unloading adjustment module 115 is horizontally arranged on the material unloading lifting seat 114; the above-mentioned material unloading support plate 116 is horizontally arranged below the material unloading adjustment module 115, and is connected to the output end of the material unloading adjustment module 115 through a connecting rod, and is driven to move in a straight line direction by the material unloading adjustment module 115; the above-mentioned material unloading suction nozzle 117 includes at least two, and the material unloading suction nozzle 117 is detachably connected to the material unloading support plate 116 so as to adsorb the OLED substrate.

[0066] A cleaning process of an OLED and substrate laser peeling cleaning machine comprises the following process steps: S1, receiving materials: a receiving arm of a receiving mechanism receives an OLED substrate to be ground and cleaned from a previous station, and then turns the arm 180 degrees and places the arm on a receiving platform;

[0067] S2, transfer loading: the transfer arm synchronously absorbs at least two OLED substrates on the receiving platform in step S1 and transfers them to the transfer platform, and the loading arm arranged at the rear side of the transfer arm moves the OLED substrates on the transfer platform to the grinding carriers of the two grinding channels of the grinding platform;

[0068] S3, FPC waterproof protection: After the OLED substrate is transferred to the grinding stage in step S2, the FPC on one side of the OLED substrate is supported by the FPC waterproof component arranged on one side of the grinding stage, and the FPC waterproof component cover is rotated inward by 180° to cover and protect the FPC, and a strong airflow is blown out through the oblique air holes and air holes arranged side by side to form an inner oblique wind curtain and an outer straight wind curtain, so as to block the space between the grinding stage and the FPC waterproof component, and prevent the substances generated during grinding on the grinding stage from entering the FPC;

[0069] S4, OLED substrate grinding: After the FPC waterproof component completes the waterproof protection for the FPC in step S3, the grinding stage drives the OLED substrate and its FPC to move under the grinding mechanism, and the grinding component grinds and cleans the multiple OLED substrates on the grinding stage;

[0070] S5, two-fluid spray rinsing and air drying: After the OLED substrate is polished and cleaned in step S4, the polishing stage moves forward to the two-fluid and air drying mechanism, and the two-fluid spray rinsing and air drying actions are sequentially completed on the polished OLED substrate through the two-fluid and air drying mechanism;

[0071] S6, FPC waterproof release protection: After the OLED substrate is sprayed with two fluids and air-dried in step S4, the grinding stage moves forward, and the cover of the FPC waterproof component is rotated outward by 90° to 100° to release the FPC, and the oblique air curtain and the straight air curtain stop outputting strong airflow;

[0072] S7, unloading: After the FPC waterproof component is released from protection in step S5, the grinding stage drives the OLED substrate to move backwards, and the unloading mechanism sucks and moves the OLED substrate on the grinding stage to be unloaded after the AOI inspection mechanism performs product defect inspection.

[0073] Furthermore, the present invention designs a dual-channel and multi-piece synchronous grinding method to improve the grinding efficiency by 12-16 times, and the line change is flexible to adapt to different production capacity requirements. The protection and isolation of FPC during grinding are effectively achieved through the flip cover protection and double-layer wind curtain blocking function. At the same time, the two-fluid mixed spray and air-drying technology are adopted to further improve the grinding cleanliness of the OLED and substrate laser peeling pre-cleaning machine and its cleaning process. The present invention belongs to online OLED substrate grinding equipment, which is suitable for the needs of high-speed automated production lines. The present invention adopts a dual-grinding channel design, by arranging two grinding platforms on the machine table in parallel and spaced intervals along the flow direction of the sheet as the sheet grinding carrier and transportation carrier, and at the same time, grinding mechanisms are respectively arranged above the two grinding platforms; at the same time, two fluids and air-drying mechanisms and unloading mechanisms are respectively arranged behind the two grinding mechanisms, and the single grinding platform and its corresponding grinding mechanism, two fluids and air-drying mechanism, and unloading mechanism independently complete the grinding cleaning, two-fluid spraying, air-drying and unloading actions. In addition, the grinding mechanism of the present invention adopts a multi-grinding disc design, preferably a four-grinding disc parallel design. After the grinding platform drives the OLED substrate to move to the bottom of the grinding mechanism, the four grinding discs are synchronously lifted and lowered close to the surface of the OLED substrate to complete the grinding action. Compared with the traditional single-chip grinding process, this kind of dual-strip independently working grinding channel with a four-grinding disc design structure theoretically improves the grinding efficiency by 16 times. In the actual grinding process, its grinding efficiency is improved by about 12-16 times, which meets the production capacity requirements of high-speed automated grinding production lines. At the same time, the dual-channel independent grinding method can also choose single-channel or dual-channel operation according to the actual production capacity requirements, with flexible line change and strong adaptability. The present invention is aimed at the need for protection and isolation of the FPC of OLED when grinding the substrate, and innovatively designs a grinding platform. The grinding platform as a whole includes a grinding linear module, a grinding platform and an FPC waterproof component. The grinding platform is arranged on the grinding linear module, and is driven by the grinding linear module to move linearly. The platform suction plate of the grinding platform is evenly provided with platform suction holes, and the platform suction holes form a vacuum negative pressure adsorption area on the platform suction plate. By controlling the operation of the platform suction holes at different positions, the size and size of the vacuum negative pressure adsorption area can be adjusted in real time, so as to meet the adsorption requirements of vertically placed vertical screens or horizontally placed horizontal screens or screens of different sizes. An FPC waterproof component is arranged on the outer side of the platform suction plate, and the FPC waterproof component uses the FPC bracket as a bearing structure. An FPC support is arranged in the middle of the FPC bracket as an FPC support structure, and a flip protection component is arranged on the outer side of the FPC support, and a blocking component is arranged on the inner side of the FPC support.The flip protection component uses a flip motor arranged on the side of the FPC bracket as a power structure. The flip motor drives the cover plate connected to it through the connecting seat to rotate through the driving shaft, so that the cover plate rotates from the outside to the inside, and covers and protects the FPC on the FPC support from above. In order to improve the isolation and protection effect, a convex strip is provided on the side edge of the bottom surface of the cover plate of the present invention. After the cover plate covers the surface of the FPC, the strip protects the FPC from three directions. In order to prevent the FPC from being damaged by pressure, the strip is an open structure close to the grinding carrier to facilitate the passage of the FPC. The barrier component of the present invention is arranged on the inner side of the FPC support in parallel and at intervals, and the barrier support with a height higher than the FPC support serves as a structural support, and a physical barrier is formed by the step difference of the barrier support; at the same time, a barrier slope extending downward from the outside to the inside is also provided on the inner side of the barrier support, and a row of barrier air holes evenly spaced are provided on the barrier slope, and the barrier air holes form a layer of inclined wind curtain structure by spraying high-pressure gas in a direction perpendicular to the barrier slope, and the first layer of barrier to the space between the FPC support and the grinding platform is achieved by the inclined wind curtain; in addition, an inwardly concave strip groove is formed between the barrier step and the FPC support, and a row of evenly spaced air holes are provided in the strip groove, and the air holes blow high-pressure gas upward in a vertical direction to form a layer of straight wind curtain structure, and the second layer of barrier to the space between the FPC support and the grinding platform is achieved by the straight wind curtain. This double-layer wind curtain barrier achieves double-layer barrier of space without interfering with the movement of FPC, and can effectively prevent water vapor or other substances generated during grinding from splashing onto the FPC, thereby corroding the FPC. In view of the cleanliness of the screen and the subsequent process requirements, the present invention also provides a second fluid and air drying mechanism in the post-grinding cleaning stage to spray and air dry the ground OLED substrate. The two-fluid and air-drying mechanism of the present invention comprises a two-fluid component and an air-drying component arranged along the flow direction of the OLED substrate; the two-fluid component uses a two-fluid bracket suspended above the grinding platform as a supporting structure, and a plurality of vertical support rods are vertically hung at the bottom of the two-fluid bracket, and the top of the vertical support rod is inserted into a strip groove body provided on the two-fluid support plate, and can slide linearly along the strip groove body to adjust the installation position, and the lower part of the vertical support rod is detachably connected to a plurality of horizontal support rods through a connecting seat, and the installation position of the horizontal support rod in the vertical direction can be adjusted through the connecting seat; the horizontal support rod is connected to a wind knife and a spray seat through the connecting seat, and the wind knife comprises a plurality of wind knives, which are arranged obliquely in the vertical direction, and the air outlet at the bottom of the wind knife is a linear gap structure, and the air outlet blows out high-pressure gas in the opposite direction of the flow of the OLED substrate; a plurality of high-pressure nozzles are arranged at the bottom of the spray seat, and the nozzle mouth is arranged downward, and sprays high-pressure liquid downward and mixes with the gas blown by the wind knife to form a gas-liquid two-fluid mixture, and then sprays the OLED substrate. The two-fluid mixture of this gas-liquid mixed structure combines the advantages of gas and liquid, and has a better spray cleaning effect on the substrate surface than single gas or liquid.After the two-fluid spraying, the OLED substrate is dried by high-pressure gas through the air-drying component so that it can flow into the next workstation.

[0074] The embodiments of the present invention are only to introduce its specific implementation methods and are not intended to limit its protection scope. The technicians in this industry can make some modifications inspired by this embodiment, so any equivalent changes or modifications made according to the scope of the patent of the present invention are within the scope of the patent claims of the present invention.

Claims

1. An OLED and substrate laser peeling cleaning machine, characterized by: The invention comprises a material receiving mechanism, a transfer platform (4), a transfer arm (6), a grinding platform (7), a grinding mechanism (8), a second fluid and air drying mechanism and a material unloading mechanism (11), wherein the material receiving mechanism is arranged at the front end of the machine (1), the OLED substrate to be cleaned is moved into the material receiving mechanism, and the transfer platform (4) is arranged at intervals on the side of the material receiving mechanism; the grinding platform (7) is arranged horizontally on the machine (1) and is located at the rear side of the material receiving mechanism, the grinding platform (7) comprises two grinding channels arranged in parallel and at intervals, and a single grinding channel is provided with a grinding carrier (72) and an FPC waterproof component (73); the grinding mechanism (8) is arranged across the grinding platform (7), and the grinding mechanism (8) is respectively provided with grinding disc components corresponding to the two grinding channels; the transfer arm (6) is arranged across between the material receiving mechanism and the transfer platform (4), and the transfer arm (6) is arranged between the material receiving mechanism and the transfer platform (4), and the transfer arm (6) is arranged between the material receiving mechanism and the transfer platform (4). The lifting arm (6) synchronously transfers at least two OLED substrates on the receiving mechanism to the transfer platform (4) respectively, and the loading lifting arm arranged at the rear side of the transfer lifting arm (6) moves at least two OLED substrates on the transfer platform (4) to the grinding carriers of the two grinding channels of the grinding platform (7). The FPC connected to one side of the OLED substrate is blocked and sealed by the FPC waterproof component to prevent moisture from entering when the grinding disc component grinds the OLED substrate; the two-fluid and air-drying mechanism includes two groups, which are respectively arranged at the sides of the two grinding channels of the grinding platform (7). The OLED substrates that have been ground and cleaned in the grinding channels are rinsed with two fluids and air-dried by the two-fluid and air-drying mechanism; the unloading mechanism (11) is arranged at the rear end of the machine (1), and the unloading mechanism (11) respectively absorbs the OLED substrates from the grinding channels and transfers them to the next workstation; The FPC waterproof component (73) comprises an FPC bracket (730), a flip protection component, an FPC support (736) and a blocking component, wherein the FPC bracket (730) is horizontally arranged close to the outer side of the carrier bracket; the FPC support (736) is horizontally arranged in the middle of the FPC bracket (730), and the FPC connected to the side of the OLED substrate is horizontally supported by the FPC support (736); the flip protection component is arranged on the outer side of the FPC support (736) and flips over the FPC support (736) to cover and protect the FPC; the blocking component is arranged on the inner side of the FPC support (736), and the blocking component blocks the FPC support (736) and the carrier suction plate (721) through a step difference surface and a wind curtain, thereby preventing water vapor from splashing onto the FPC support (736) when the OLED substrate on the carrier suction plate (721) is ground; The flip protection component comprises a flip motor (731), a rotating shaft (732), a connecting seat (733) and a cover plate (734), wherein the flip motor (731) is arranged on the outside of the FPC bracket (730), and the output end is arranged toward the side direction of the FPC bracket (730); the rotating shaft (732) is arranged on the outside of the FPC bracket (730) along the side direction of the FPC bracket (730) and is connected to the output end of the flip motor (731); the flip motor (731) drives the rotating shaft (732) to rotate; the above-mentioned connecting seat (733) includes at least two, and the connecting seat (733) is detachably mounted on the rotating shaft (732); one side of the above-mentioned cover plate (734) is fixed on the connecting seat (733), and the bottom surface of the cover plate (734) is provided with a surrounding strip extending along the side direction, and the surrounding strip is open at the inner side of the corresponding cover plate (734); the flip motor (731) drives the cover plate (734) to rotate by driving the rotating shaft (732); The blocking component includes a blocking support (737), a blocking slope (738), a blocking air hole (739) and an air hole (7310), wherein the blocking support (737) is arranged in parallel and spaced relation on the inner side of the FPC support (736), and the height of the blocking support (737) is higher than that of the FPC support (736); the blocking slope (738) is arranged on the inner side of the blocking support (737), and the blocking slope (738) extends downward from the outside to the inside; the blocking air hole (739) includes at least two, The blocking air holes (739) are evenly spaced on the blocking inclined surface (738), and each blocking air hole (739) blows out high-pressure gas in a direction perpendicular to the blocking inclined surface (738) to form an oblique wind curtain so as to block the water vapor splashed from the carrier suction plate (721); a strip groove is formed between the blocking support (737) and the FPC support (736); the above-mentioned air holes (7310) include at least two, and the air holes (7310) are evenly spaced in the strip groove, and the air holes (7310) form a straight wind curtain in the vertical direction.

2. The cleaning machine for OLED and substrate before laser peeling according to claim 1, characterized in that: The material receiving mechanism comprises a material receiving and lifting arm (2) and a material receiving and lifting platform (3), wherein the material receiving and lifting arm (2) and the material receiving and lifting platform (3) are arranged on the machine platform (1) at intervals, and the material receiving and lifting arm (2) absorbs the OLED substrate outside the machine platform (1) and then rotates 180 degrees to the top of the material receiving and lifting platform (3), and places the OLED substrate on the material receiving and lifting platform (3).

3. The cleaning machine for OLED and substrate before laser peeling according to claim 1, characterized in that: The transfer arm (6) comprises a transfer support (61), a transfer horizontal module (62), a transfer lifting module (63), a transfer lifting seat (64), a transfer rotating motor (65), a transfer rotating seat (66) and a transfer suction nozzle (67), wherein the transfer support (61) is a U-shaped bracket structure, and the transfer support (61) is erected above the material receiving platform (3) and the transfer platform (4); the transfer horizontal module (62) is horizontally arranged on the transfer support (61) along a straight line direction; the transfer lifting module (63) can be slidably connected to the transfer horizontal module (62), and is connected to the transfer horizontal module (63) through the transfer horizontal module (65). The module (62) is driven to move linearly; the transfer lifting seat (64) is slidably connected to the transfer lifting module (63) in the vertical direction, and is driven by the transfer lifting module (63) to move up and down; the transfer rotating motor (65) is arranged on the transfer lifting seat (64), and the output end passes through the transfer lifting seat (64) and extends downward; the transfer rotating seat (66) is horizontally connected to the output end of the transfer rotating motor (65); the transfer suction nozzle (67) includes at least two, and the transfer suction nozzle (67) is vertically arranged on the transfer lifting seat (64) to absorb the OLED substrate through vacuum negative pressure.

4. The cleaning machine for OLED and substrate before laser stripping according to claim 1, characterized in that: The grinding platform (72) and the FPC waterproof component (73) are slidably arranged on the grinding linear module (71). The grinding linear module (71) is arranged horizontally and linearly along the front-rear direction of the machine platform (1), and drives the grinding platform (72) and the FPC waterproof component (73) to move linearly synchronously.

5. The cleaning machine for OLED and substrate before laser stripping according to claim 4, characterized in that: The grinding platform (72) includes a platform bracket, a platform suction plate (721) and a platform suction hole (722), wherein the platform bracket is horizontally arranged, the platform suction plate (721) includes at least two pieces, and the platform suction plate (721) is horizontally arranged on the carrier bracket; the platform suction hole (722) includes at least two, and the platform suction hole (722) is arranged on the platform suction plate (721). The platform suction hole (722) forms a vacuum negative pressure adsorption area in the horizontal plane where the platform suction plate (721) is located according to the OLED substrate. By controlling the operation of the platform suction holes (722) at different positions, the vacuum negative pressure adsorption area is compatible with adsorbing horizontal or vertical screens.

6. The cleaning machine for OLED and substrate before laser stripping according to claim 1, characterized in that: The grinding disc assembly comprises a grinding disc support (81), a grinding disc linear module (82), a grinding disc slide (83), a grinding disc lifting motor (84), a first lifting seat (85), a grinding lifting cylinder (86), a second lifting seat (87), a grinding motor (88) and a grinding disc (89), wherein the grinding disc support (81) is arranged across the grinding channel of the grinding platform (7); the grinding disc linear module (82) is arranged on the grinding disc support (81) in a direction perpendicular to the grinding channel; the grinding disc slide (83) is horizontally slidably connected to the grinding linear module (82) and is driven by the grinding linear module (82) to move linearly; the grinding disc lifting motor (84) is arranged on the grinding disc slide (83) with the output end facing downward; the first lifting seat (85) is arranged in a vertical direction The grinding disc sliding seat (83) is slidably connected to a side wall of the grinding disc sliding seat (83), and is connected to the output end of the grinding disc lifting motor (84) through a screw rod and a screw rod seat, and the grinding disc lifting motor (84) drives the first lifting seat (85) to move up and down; the grinding lifting cylinder (86) is arranged on the first lifting seat (85), and the output end is arranged downward; the second lifting seat (87) is slidably connected to the first lifting seat (85) in a vertical direction, and is connected to the output end of the grinding lifting cylinder (86), and the lower part of the second lifting seat (87) is rotatably connected to a grinding shaft; the grinding motor (88) is arranged on the second lifting seat (87), and the output end is connected to the grinding shaft; the grinding disc (89) is horizontally connected to the lower end of the grinding shaft, and the grinding motor (88) drives the grinding disc (89) to rotate by driving the grinding shaft to rotate.

7. The cleaning machine for OLED and substrate before laser stripping according to claim 1, characterized in that: The two-fluid and air-drying mechanism comprises a two-fluid component (9) and an air-drying component (10), and the two-fluid component (9) and the air-drying component (10) are sequentially arranged on one side of the grinding channel along the flow direction of the OLED substrate; The OLED substrate after grinding and cleaning is sprayed with two fluids by a two-fluid component (9), and the surface is air-dried by an air-drying component (10); the two-fluid component (9) comprises a two-fluid support (91), a support rod, a liquid spray component and an air spray component, wherein the two-fluid support (91) is horizontally arranged above the grinding channel; the support rod is connected to the lower part of the two-fluid support (91), and the support rod comprises a vertical support rod and a horizontal support rod, and the vertical support rod can be slidably hung on the two-fluid support (91) and extends vertically downward. The horizontal support rod is connected to the vertical support rod through a connecting seat; the above-mentioned jet component includes an air knife (92), the air knife (92) includes at least two, the air knife (92) is detachably connected to the horizontal support rod through the connecting seat, and the bottom of the air knife (92) is provided with an air outlet, the air outlet is a linear gap structure, and the air outlet blows out high-pressure gas; the air knife (92) is arranged obliquely in the vertical direction, so that the air outlet is arranged in the opposite direction of the flow of the OLED substrate; the above-mentioned liquid spray component includes a spray seat (93), and the spray seat (93) is detachably connected to the horizontal support rod through the connecting seat. The spray seat (93) is connected to the horizontal support rod, and at least two nozzles are provided at the bottom thereof, and the nozzles spray high-pressure liquid, which is mixed with the gas blown out by the wind knife (92) to form a gas-liquid two-fluid mixture and then sprayed on the OLED substrate; the air-drying component (10) comprises at least two groups, and the air-drying components are arranged at intervals along the flow direction of the OLED substrate. The air-drying component (10) comprises an air-drying support (101), an air-drying adjustment seat (102), an air-drying support rod (103) and an air cavity (104); wherein the air-drying support (101) 01) is vertically arranged; the air-drying adjustment seat (102) is detachably mounted on the air-drying bracket (101) and vertically moves along the air-drying bracket (101) so as to adjust the installation height; the air-drying support rod (103) is horizontally connected to the air-drying adjustment seat (102); the air cavity (104) is connected to the air-drying support rod (103) and horizontally extends to the top of the grinding channel, and a slit-shaped air outlet is opened at the bottom of the air cavity (104), and the slit-shaped air outlet blows high-pressure gas to the surface of the OLED substrate for air drying.

8. The cleaning machine for OLED and substrate before laser stripping according to claim 1, characterized in that: The material unloading mechanism (11) comprises a material unloading linear module (111), a material unloading slide (112), a material unloading lifting module (113), a material unloading lifting seat (114), a material unloading adjustment module (115), a material unloading support plate (116) and a material unloading suction nozzle (117), wherein the material unloading linear module (111) is arranged on the rear end side of the grinding channel and extends to the outside of the machine (1); the material unloading slide (112) is slidably connected to the material unloading linear module (111) and moves linearly through the drive of the material unloading linear module (111); the material unloading lifting module (113) is arranged on the material unloading slide (112) in the vertical direction; the material unloading lifting module (113) is arranged on the material unloading slide (112) in the vertical direction; the material unloading lifting module (113) is arranged on the material unloading slide (112) in the vertical direction; the material unloading lifting module (114) is arranged on the material unloading support plate (116) and the material unloading suction nozzle (117) The seat (114) is slidably connected to the material unloading lifting module (113) in the vertical direction, and is driven by the material unloading lifting module (113) to move up and down in the vertical direction; the material unloading adjustment module (115) is horizontally arranged on the material unloading lifting seat (114); the material unloading support plate (116) is horizontally arranged below the material unloading adjustment module (115), and is connected to the output end of the material unloading adjustment module (115) through a connecting rod, and is driven by the material unloading adjustment module (115) to move in a linear direction; the material unloading suction nozzle (117) includes at least two, and the material unloading suction nozzle (117) is detachably connected to the material unloading support plate (116) so as to absorb the OLED substrate.

9. A cleaning process of the OLED and substrate laser stripping cleaning machine as claimed in claim 1, characterized in that: The process steps include: S1. Material receiving: The material receiving arm of the material receiving mechanism receives the OLED substrate to be ground and cleaned from the previous station and then turns it 180° and places it on the material receiving platform; S2, transfer loading: the transfer arm synchronously absorbs at least two OLED substrates on the receiving platform in step S1 and transfers them to the transfer platform, and the loading arm arranged at the rear side of the transfer arm moves the OLED substrates on the transfer platform to the grinding carriers of the two grinding channels of the grinding platform; S3, FPC waterproof protection: After the OLED substrate is transferred to the grinding stage in step S2, the FPC on one side of the OLED substrate is supported by the FPC waterproof component arranged on one side of the grinding stage, and the FPC waterproof component cover is rotated inward by 180° to cover and protect the FPC, and a strong airflow is blown out through the oblique air holes and air holes arranged side by side to form an inner oblique wind curtain and an outer straight wind curtain, so as to block the space between the grinding stage and the FPC waterproof component, and prevent the substances generated during grinding on the grinding stage from entering the FPC; S4, OLED substrate grinding: After the FPC waterproof component completes the waterproof protection for the FPC in step S3, the grinding stage drives the OLED substrate and its FPC to move under the grinding mechanism, and the grinding component grinds and cleans the multiple OLED substrates on the grinding stage; S5, two-fluid spray rinsing and air drying: After the OLED substrate is polished and cleaned in step S4, the polishing stage moves forward to the two-fluid and air drying mechanism, and the two-fluid spray rinsing and air drying actions are sequentially completed on the polished OLED substrate through the two-fluid and air drying mechanism; S6, FPC waterproof release protection: After the OLED substrate is sprayed with two fluids and air-dried in step S4, the grinding stage moves forward, and the cover of the FPC waterproof component is rotated outward by 90° to 100° to release the FPC, and the oblique air curtain and the straight air curtain stop outputting strong airflow; S7, unloading: After the FPC waterproof component is released from protection in step S5, the grinding stage drives the OLED substrate to move backwards, and the unloading mechanism sucks and moves the OLED substrate on the grinding stage to be unloaded after the AOI inspection mechanism performs product defect inspection.

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