A pre-alignment positioning device compatible with flat / notch wafers

Abstract

A pre-alignment positioning device compatible with flat / notch wafers, comprising a mounting base and an adjusting mechanism. The mounting base includes a top plate and a bottom plate. An installation table is provided between the top plate and the bottom plate. A notch pre-alignment block is provided on the installation table. Two swing arms symmetrically arranged along the installation table are provided on both sides of the installation table. The two swing arms are rotatably connected between the top plate and the bottom plate. A flat pre-alignment block is fixed at one end of the swing arm. The horizontal height of the flat pre-alignment block is greater than the horizontal height of the notch pre-alignment block. The adjusting mechanism is used to adjust the horizontal height of the flat pre-alignment block and make the horizontal height of the flat pre-alignment block less than the horizontal height of the notch pre-alignment block. In the present invention, both a notch pre-alignment block and a flat pre-alignment block are provided. In the conventional form, the notch wafer can be positioned by the notch pre-alignment block, and the flat wafer can also be positioned by adjusting the horizontal height of the flat pre-alignment block, so as to be compatible with the pre-alignment positioning of flat / notch wafers and facilitate use.

Description

Technical Field

[0001] The present invention relates to the field of wafer production, and particularly to a pre-aligning and positioning device compatible with flat / notch wafers. Background Art

[0002] In a conventional wafer transfer system, after pre-alignment, the eccentricity and deviation of the wafer are initially compensated, and then the wafer is sent into the lithography machine by a manipulator. However, due to the repeatability of the manipulator itself and the possible relative position offsets between various mechanisms, the wafer will generate a large position disturbance. In order to make up for these losses and improve the wafer loading accuracy, it is often necessary to perform another pre-aligning and positioning. In the actual production and manufacturing process of lithography equipment, there are two different types of wafers, namely flat (flat-edge type) and notch (notch type). The conventional pre-aligning mechanism only targets one type of wafer and cannot take into account the pre-aligning and positioning of the two different types of wafers. If different wafer pre-aligning mechanisms are replaced during the production process, it will undoubtedly affect the production efficiency and there is a possibility of generating assembly and disassembly errors. Summary of the Invention

[0003] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a pre-aligning and positioning device compatible with flat / notch wafers to solve the problems raised in the above technical background.

[0004] The purpose of the present invention is achieved through the following technical solutions:

[0005] A pre-aligning and positioning device compatible with flat / notch wafers includes a mounting base and an adjusting mechanism. The mounting base includes a top plate and a bottom plate. An installation table is provided between the top plate and the bottom plate. A notch pre-aligning block is provided on the installation table. Two swing arms symmetrically arranged along the installation table are provided on both sides of the installation table. The two swing arms are rotatably connected between the top plate and the bottom plate. A flat pre-aligning block is fixed at one end of the swing arm. The horizontal height of the flat pre-aligning block is greater than the horizontal height of the notch pre-aligning block. The adjusting mechanism is used to adjust the horizontal height of the flat pre-aligning block and make the horizontal height of the flat pre-aligning block less than the horizontal height of the notch pre-aligning block.

[0006] In the above summary of the invention, further, the adjusting mechanism includes a snap ring and an adjusting bolt installed on the top plate. The snap ring is sleeved on the outer surface of the installation table. The other end of the swing arm is clamped on the snap ring. An adjusting convex block is further provided at the other end of the swing arm. The adjusting convex blocks on the two swing arms are arranged oppositely and form an adjusting gap. The width of the adjusting gap is less than the diameter of the screw head of the adjusting bolt. The adjusting bolt controls the rotation of the two swing arms by increasing the adjusting gap by being embedded between the two adjusting convex blocks, thereby reducing the horizontal height of the flat pre-aligning block.

[0007] In the above-mentioned invention content, further, a conical progressive head is provided below the screw head of the adjusting bolt, and a conical surface cooperating with the conical progressive head is provided on the adjusting convex block.

[0008] In the above-mentioned invention content, further, a U-shaped groove is provided on the outer surface of the mounting table, the snap ring is sleeved on the mounting table through the U-shaped groove, a clamping groove is provided at the other end of the swing arm, and the other end of the swing arm is clamped on the snap ring through the clamping groove.

[0009] In the above-mentioned invention content, further, a mounting groove is provided on the mounting table, and the notch pre-alignment block is fixedly installed in the mounting groove.

[0010] In the above-mentioned invention content, further, a first fixing bolt is provided on the top plate, and the swing arm is rotatably connected between the top plate and the bottom plate through the first fixing bolt.

[0011] In the above-mentioned invention content, further, ear plates are provided on both sides of the bottom plate, and second fixing bolts are provided on the ear plates.

[0012] The beneficial effects of the present invention are:

[0013] The present invention is provided with a notch pre-alignment block and a flat pre-alignment block at the same time. In the normal state, the notch wafer can be positioned through the notch pre-alignment block, and the flat wafer can also be positioned by adjusting the horizontal height of the flat pre-alignment block, so as to be compatible with the pre-alignment positioning of flat / notch wafers, which is convenient to use and improves the wafer production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic structural diagram of the present invention;

[0015] Figure 2 is another schematic structural diagram of the present invention;

[0016] Figure 3 is an exploded view of the structure of the present invention;

[0017] Figure 4 is a schematic structural diagram of the connection between the mounting seat and the snap ring of the present invention;

[0018] Figure 5 is a schematic structural diagram of the adjusting bolt of the present invention;

[0019] Figure 6 is a schematic structural diagram of the connection between the adjusting bolt and the swing arm of the present invention;

[0020] Figure 7 is another schematic structural diagram of the connection between the adjusting bolt and the swing arm of the present invention;

[0021] Figure 8 Schematic diagram of the connection structure between the present invention and the notch wafer;

[0022] Figure 9 Schematic diagram of the connection structure between the present invention and the flat wafer.

[0023] In the figure, 1 - mounting base, 1.1 - top plate, 1.2 - bottom plate, 1.3 - mounting table, 1.4 - U-shaped groove, 1.5 - ear plate, 2 - notch pre-aligning block, 3 - flat pre-aligning block, 4 - swing arm, 4.1 - adjusting boss, 4.2 - adjusting gap, 4.3 - tapered surface, 4.4 - clamping groove, 5 - snap ring, 6 - adjusting bolt, 6.1 - tapered progressive head, 7 - first fixing bolt, 8 - second fixing bolt. Specific embodiments

[0024] The following specific examples illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0025] It should be noted that the drawings provided in the following embodiments only illustrate the basic concept of the present invention in a schematic manner. Therefore, only the components related to the present invention are shown in the drawings, rather than being drawn according to the number, shape, and size of the components in actual implementation. The types, quantities, and ratios of the components in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0026] Embodiment:

[0027] A pre-aligning and positioning device compatible with flat / notch wafers, please refer to the attached Figure 1 - attached Figure 7As shown in the figure, it includes a mounting base 1 and an adjusting mechanism. The mounting base 1 includes a top plate 1.1 and a bottom plate 1.2. There is a mounting table 1.3 between the top plate 1.1 and the bottom plate 1.2. There are ear plates 1.5 on both sides of the bottom plate 1.2. There is a second fixing bolt 8 on the ear plate 1.5. There is a mounting groove (not shown in the figure) on the mounting table 1.3. A notch pre-alignment block 2 is fixedly installed in the mounting groove. There are two swing arms 4 symmetrically arranged along the mounting table on both sides of the mounting table 1.3. The two swing arms 4 are rotatably connected between the top plate 1.1 and the bottom plate 1.2 through a first fixing bolt 7 provided on the top plate. One end of the swing arm 4 is fixed with a flat pre-alignment block 3. The horizontal height of the flat pre-alignment block 3 is greater than the horizontal height of the notch pre-alignment block 2. The adjusting mechanism is used to adjust the horizontal height of the flat pre-alignment block 3 and make the horizontal height of the flat pre-alignment block 3 less than the horizontal height of the notch pre-alignment block 2.

[0028] The adjusting mechanism includes a snap ring 5 and an adjusting bolt 6 installed on the top plate 1.1. The snap ring 5 is sleeved on the outer surface of the mounting table 1.3. Specifically, there is a U-shaped groove 1.4 on the outer surface of the mounting table 1.3. The snap ring 5 is sleeved on the mounting table 1.3 through the U-shaped groove 1.4. There is a clamping groove 4.4 at the other end of the swing arm 4. The other end of the swing arm 4 is clamped on the snap ring 5 through the clamping groove 4.4. There is also an adjusting convex block 4.1 at the other end of the swing arm 4. The adjusting convex blocks 4.1 on the two swing arms 4 are arranged opposite to each other and form an adjusting gap 4.2. The width of the adjusting gap 4.2 is less than the diameter of the screw head of the adjusting bolt 6. The adjusting bolt 6 controls the rotation of the two swing arms by increasing the adjusting gap 4.2 by being embedded between the two adjusting convex blocks 4.1, thereby reducing the horizontal height of the flat pre-alignment block 3.

[0029] During the use of the present invention, the positioning device is installed on the wafer positioning device through the second fixing bolt 8 on the ear plate 1.5. In the conventional state of the present invention, the snap ring 5 is in a free state. The two swing arms 4 are in a freely open state along the mounting base 1 under the action of the snap ring 5. At this time, the horizontal height of the flat pre-alignment block 3 fixed on the swing arm 4 is greater than the horizontal height of the notch pre-alignment block 2 provided on the mounting table 1.3. Please refer to the attached Figure 8 As shown in the figure, during the positioning process, the notch pre-alignment block 2 cooperates with the notch of the notch wafer, so as to achieve the effect of positioning and fixing the notch wafer.

[0030] When it is necessary to position and fix the flat wafer, rotate the adjusting bolt 6 to make the adjusting bolt 6 move downward. During the opposite movement, please continue to refer to the attached Figure 6 and the attached Figure 7As shown, the screw head of the adjusting bolt 6 is embedded in the adjusting gap 4.2 between the adjusting bumps 4.1 to make the adjusting gap 4.2 larger. During the process of the adjusting gap 4.2 becoming larger, the swing arm 4 begins to squeeze the retaining ring 5. The left swing arm 4 begins to rotate counterclockwise along the first fixing bolt 7, and at the same time, the right swing arm 4 rotates clockwise synchronously. During the rotation of the two swing arms 4, the horizontal height of the flat pre-aligning block 3 decreases and is less than the horizontal height of the notch pre-aligning block 2. Please refer to the appendix Figure 9 As shown, at this time, the flat wafer can be positioned and fixed by the plane fit of the flat pre-aligning block 3 and the flat wafer. When it is necessary to convert to a notch wafer, turn the adjusting bolt 6 to make the adjusting bolt 6 move upward. The screw head of the adjusting bolt 6 disengages from the adjusting gap 4.2, and the retaining ring 5 resumes its deformation, causing the two swing arms 4 to rotate back to the freely open state. At this time, the horizontal height of the flat pre-aligning block 3 rises and is higher than the height of the notch pre-aligning block 2, and this positioning device resumes the state of positioning and fixing the notch wafer.

[0031] In the above embodiment, as a preferred embodiment, a tapered progressive head 6.1 is provided below the screw head of the adjusting bolt 6, and a tapered surface 4.3 matching the tapered progressive head 6.1 is provided on the adjusting bump 4.1. By providing the tapered progressive head 6.1 and the tapered surface 4.3, the adjusting bolt 6 can be more smoothly embedded in the adjusting gap 4.2.

[0032] The above embodiments only represent the specific implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention.

Claims

1. A pre-alignment positioning device compatible with flat / notch wafers, Characterized in that, It includes a mounting base and an adjusting mechanism. The mounting base includes a top plate and a bottom plate. An installation table is provided between the top plate and the bottom plate. A notch pre-alignment block is provided on the installation table. Two swing arms symmetrically arranged along the installation table are provided on both sides of the installation table. The two swing arms are rotatably connected between the top plate and the bottom plate. A flat pre-alignment block is fixed at one end of the swing arm. The horizontal height of the flat pre-alignment block is greater than the horizontal height of the notch pre-alignment block. The adjusting mechanism is used to adjust the horizontal height of the flat pre-alignment block and make the horizontal height of the flat pre-alignment block less than the horizontal height of the notch pre-alignment block; The adjusting mechanism includes a snap ring and an adjusting bolt installed on the top plate. The snap ring is sleeved on the outer surface of the installation table. The other end of the swing arm is clamped on the snap ring. An adjusting convex block is also provided at the other end of the swing arm. The adjusting convex blocks on the two swing arms are arranged oppositely and form an adjusting gap. The width of the adjusting gap is less than the diameter of the screw head of the adjusting bolt. The adjusting bolt controls the rotation of the two swing arms by increasing the adjusting gap by being embedded between the two adjusting convex blocks, thereby reducing the horizontal height of the flat pre-alignment block.

2. The pre-alignment positioning device compatible with flat / notch wafers according to claim 1, Characterized in that, A conical progressive head is provided below the screw head of the adjusting bolt, and a conical surface matching the conical progressive head is provided on the adjusting convex block.

3. The pre-alignment positioning device compatible with flat / notch wafers according to claim 2, Characterized in that, A U-shaped groove is provided on the outer surface of the installation table. The snap ring is sleeved on the installation table through the U-shaped groove. A clamping groove is provided at the other end of the swing arm. The other end of the swing arm is clamped on the snap ring through the clamping groove.

4. The pre-alignment positioning device compatible with flat / notch wafers according to claim 1, Characterized in that, An installation groove is provided on the installation table, and the notch pre-alignment block is fixedly installed in the installation groove.

5. The pre-alignment positioning device compatible with flat / notch wafers according to claim 1, Characterized in that, A first fixing bolt is provided on the top plate, and the swing arm is rotatably connected between the top plate and the bottom plate through the first fixing bolt.

6. The pre-alignment positioning device compatible with flat / notch wafers according to claim 1, Characterized in that, Lug plates are provided on both sides of the bottom plate, and second fixing bolts are provided on the lug plates.

Images