A groove valve device

Abstract

The present invention relates to a groove valve device used in chip manufacturing, which includes a cavity enclosed by a top plate, a bottom plate, side plates on both sides, and end plates at both ends. On both sides of the cavity, there are a first channel and a second channel penetrating the cavity. Inside the cavity, there is a liftable support frame. On the side of the support frame facing the second channel, there is a valve plate. A sealing ring is provided on the surface of the valve plate. Between the valve plate and the support frame, there is a sealing cylinder for driving the valve plate to seal the second channel. At the bottom of the cavity, there is a lifting cylinder for driving the support frame to lift. The top plate is installed on the top of the cavity. On the side of the valve plate facing the sealing cylinder, there is a notch. The protruding end of the piston rod of the sealing cylinder is provided with a cylinder joint, and the cylinder joint is inserted into the notch. A connecting screw passes through the valve plate and is threadedly connected to the cylinder joint. At the upper corner of the side of the support frame away from the valve plate, there is an inclined plane, and on the corresponding side plate, there is a guide block matching the inclined plane. This device is applied to wafer processing, with convenient replacement of the sealing ring. At the same time, it has good sealing and reliable use.

Description

Technical Field

[0001] The invention relates to a device used in a chip manufacturing process, in particular to a slot valve device arranged between a transmission device and a process device. Background Art

[0002] With the miniaturization of semiconductors, various issues that affect wafer production capacity, especially suppressing the generation of pollutants (particles) and replacing them in the shortest possible time after generation to remove the pollution source, have become important factors in improving productivity. For this reason, when the wafer is processed in the process device, the process device needs to be evacuated to avoid the influence of pollutants. For this purpose, a slot valve device is used, which is used between the transmission device and the process device. Its function is to provide a transfer channel between the wafer from the transmission device to the process device. After the wafer is transferred, the channel is closed. It has good sealing performance to ensure that a high vacuum environment can be formed in the process device.

[0003] The slot valve device in the prior art mainly includes a cavity with a rectangular cross section, which is surrounded by a top plate, a bottom plate, side plates on both sides and end plates at both ends. Channels 1 and 2 are provided on both sides of the cavity to penetrate the cavity. A lifting support frame is provided in the cavity. A valve plate is provided on the side of the support frame facing channel 1 and channel 2. An O-ring is provided on the surface of the valve plate. A sealing cylinder for driving the valve plate to seal channel 1 or channel 2 is provided between the valve plate and the support frame. A lifting cylinder for driving the support frame to lift is provided at the bottom of the cavity. The lifting cylinder pushes the valve plate to rise, and at the same time, the sealing cylinder pushes the valve plate to move, so that the sealing ring seals channel 1 and channel 2, thereby achieving sealing.

[0004] The disadvantage is that the sealing ring is prone to failure during frequent use and needs to be replaced regularly. The sealing ring in the existing slot valve device is difficult to install and disassemble. In order to replace the sealing ring, the slot valve device needs to be disassembled as a whole for maintenance. The total maintenance time required is long, which affects the efficiency of equipment use. Summary of the invention

[0005] The object of the present invention is to provide a slot valve device, which makes it easy to replace the sealing ring and has good sealing and reliable use.

[0006] The object of the present invention is achieved as follows: A groove valve device includes a cavity with a rectangular cross-section, which is enclosed by a top plate, a bottom plate, side plates on both sides, and end plates at both ends. There are a first channel and a second channel passing through the cavity on both sides of the cavity. A liftable support frame is provided in the cavity. A valve plate is provided on the side of the support frame facing the second channel. A sealing ring is provided on the surface of the valve plate. A sealing cylinder for driving the valve plate to seal the second channel is provided between the valve plate and the support frame. A lifting cylinder for driving the support frame to lift is provided at the bottom of the cavity. The axis of the sealing cylinder is perpendicular to the axis of the lifting cylinder. The top plate is detachably installed on the top of the cavity. A notch is provided on the side of the valve plate facing the sealing cylinder. A cylinder joint is provided at the extending end of the piston rod of the sealing cylinder. The cylinder joint is inserted into the notch, and a connecting screw passes through the valve plate from above and is threadedly connected to the cylinder joint. An inclined surface is provided at the upper corner of the side of the support frame away from the valve plate, and a wedge-shaped guide block is provided on the corresponding side plate. When the lifting cylinder lifts the support frame upward to the sealing position, the inclined surface just contacts the guide block.

[0007] The groove valve device of the present invention is installed between a transfer device and a process device. The outer port of the second channel is hermetically connected to the process device. During operation, the lifting cylinder can push the support frame to move up and down, and the support frame drives the valve plate to move up and down simultaneously. When the valve plate descends, the first channel and the second channel passing through the cavity can be vacated, enabling the manipulator of the transfer device to pass through the first channel and the second channel and extend into the interior of the process device to take out the wafer or place the wafer in the process device. After the manipulator leaves, the lifting cylinder rises, pushing the valve plate to the height position where the first channel and the second channel are located. At this time, the sealing cylinder acts, pushing the valve plate towards the second channel, and the sealing ring seals the outer peripheral edge of the second channel. When the lifting cylinder lifts the support frame upward to the sealing position, the inclined surface just contacts the guide block, so that the sealing ring can be fully pressed against the edge of the second channel to achieve good sealing. The upward thrust of the lifting cylinder can be converted into the pressing force for sealing. After sealing, the process device can be evacuated, and the wafer can be processed under a vacuum state. Since the piston rod of the cylinder usually cannot bear lateral thrust, when the sealing cylinder acts, the reaction force will laterally push the extending end of the piston rod of the lifting cylinder, and the cooperation of the inclined surface and the guide block can just offset this lateral thrust, ensuring that the lifting cylinder can work reliably for a long time. When disassembling and replacing the sealing ring, the top cover can be removed. After loosening the connecting screw, the valve plate can be directly withdrawn from the upper part. After replacing the sealing ring, it can be reset, and its disassembly and assembly are very convenient. This device can be used in wafer processing.

[0008] As a further improvement of the present invention, the notch is in an inverted trapezoid shape with a larger bottom and a smaller top, and the cylinder joint is in a T shape, and the upper part of the notch matches the T-shaped notch. The inverted trapezoid-shaped notch makes it easy for the valve plate to disengage from the cylinder joint, so as to more conveniently take out the valve plate. The T-shaped cylinder joint can be conveniently positioned and installed.

[0009] As a further improvement of the present invention, a handle screw is provided on the upper side of the valve plate. The handle screw further facilitates the removal of the valve plate.

[0010] As a further improvement of the present invention, two corresponding lifting cylinders are provided, and three sealing cylinders are arranged at intervals in the length direction of the valve plate.

[0011] As a further improvement of the present invention, notches are provided on the support frame corresponding to the sealing cylinders, and the sealing cylinders are embedded and installed in the notches. This structure can greatly reduce the thickness of the device and make its structure more compact. Description of the Drawings

[0012] Figure 1 It is a three-dimensional structure schematic diagram of the present invention.

[0013] Figure 2 It is a front view of the present invention.

[0014] Figure 3 It is Figure 2 a view taken along the A-A direction of

[0015] Figure 4 It is a three-dimensional structure schematic diagram of the interior of the present invention Figure 1 .

[0016] Figure 5 It is a three-dimensional structure schematic diagram of the interior of the present invention Figure 2 .

[0017] Figure 6 It is an assembly drawing of the support frame, lifting cylinder, and sealing cylinder.

[0018] Figure 7 It is Figure 6 a corresponding plan view of the assembly of the support frame, lifting cylinder, and sealing cylinder.

[0019] Figure 8 It is an installation structure diagram of the sealing oil cylinder and the valve plate.

[0020] In the figure, 1 is the bottom plate, 2 is the end plate, 3 is the top plate, 4 is the side plate, 5 is the first channel, 6 is the lifting cylinder, 7 is the connecting screw, 8 is the support frame, 9 is the sealing cylinder, 10 is the second channel, 11 is the sealing ring, 12 is the valve plate, 13 is the cavity, 14 is the guide block, 15 is the inclined plane, 16 is the handle screw, 17 is the cylinder joint, 18 is the notch, and 19 is the mounting hole. Detailed Embodiments

[0021] As Figure 1-8As shown in the figure, it is a groove valve device, including a cavity 13 with a rectangular cross-section. The cavity 13 is enclosed by a top plate 3, a bottom plate 1, side plates 4 on both sides, and end plates 2 at both ends. There are a first channel 5 and a second channel 10 passing through the cavity 13 on both sides of the cavity 13. A liftable support frame 8 is provided in the cavity 13. A valve plate 12 is provided on one side of the support frame 8 facing the second channel 10. A sealing ring 11 is provided on the surface of the valve plate 12. A sealing cylinder 9 for driving the valve plate 12 to seal the second channel 10 is provided between the valve plate 12 and the support frame 8. A lifting cylinder 6 for driving the support frame 8 to lift is provided at the bottom of the cavity 13. The axis of the sealing cylinder 9 is perpendicular to the axis of the lifting cylinder 6. The top plate 3 is detachably installed on the top of the cavity 13. A notch 18 is provided on one side of the valve plate 12 facing the sealing cylinder 9. A cylinder joint 17 is provided at the protruding end of the piston rod of the sealing cylinder 9. The cylinder joint 17 is inserted into the notch 18. A connecting screw 7 passes through the mounting hole 19 on the valve plate 12 from above and is threadedly connected to the cylinder joint 17. An inclined surface 15 is provided at the upper corner of the side of the support frame 8 away from the valve plate 12. A wedge-shaped guide block 14 is provided on the corresponding side plate 4. When the lifting cylinder lifts the support frame 8 upward to the sealing position, the inclined surface 15 just contacts the guide block 14.

[0022] The notch 18 is in the shape of an inverted trapezoid with a larger bottom and a smaller top. The cylinder joint 17 is in the shape of a T, and the upper part of the notch 18 matches the T-shaped notch 18.

[0023] A handle screw 16 is provided on the upper side of the valve plate 12.

[0024] There are two corresponding lifting cylinders 6, and three sealing cylinders 9 are arranged at intervals in the length direction of the valve plate 12.

[0025] Notches are provided on the support frame 8 corresponding to the sealing cylinders 9, and the sealing cylinders 9 are embedded and installed in the notches.

[0026] The groove valve device of the present invention is installed between a transfer device and a process device. The outer port of the second channel 10 is hermetically connected to the process device. During operation, the lifting cylinder 6 can push the support frame 8 to move up and down, and the support frame 8 drives the valve plate 12 to move up and down simultaneously. When the valve plate 12 descends, the first channel 5 and the second channel 10 passing through the cavity 13 can be vacated, enabling the manipulator of the transfer device to pass through the first channel 5 and the second channel 10 and extend into the interior of the process device to take out the wafer or place the wafer in the process device. After the manipulator leaves, the lifting cylinder 6 rises, pushing the valve plate 12 to the height position where the first channel 5 and the second channel 10 are located. At this time, the sealing cylinder 9 acts, pushing the valve plate 12 towards the second channel 10, and the sealing ring 11 seals on the outer peripheral edge of the second channel 10. When the lifting oil cylinder lifts the support frame 8 to the sealing position, the inclined plane 15 just contacts the guide block 14, so that the sealing ring 11 can be fully pressed against the edge of the second channel 10 to achieve good sealing. The upward thrust of the lifting cylinder 6 can be converted into the pressing force for sealing. After sealing, the process device can be evacuated, and the wafer can be processed under a vacuum state. Since the piston rod of the cylinder usually cannot bear lateral thrust, when the sealing cylinder 9 acts, the reaction force will laterally push the extended end of the piston rod of the lifting cylinder 6, and the cooperation between the inclined plane 15 and the guide block 14 can just offset this lateral thrust, ensuring that the lifting cylinder 6 can work reliably for a long time. When disassembling and replacing the sealing ring 11, the top cover can be removed. After loosening the connecting screw 7, the valve plate 12 can be directly pulled out from the upper part. After replacing the sealing ring 11, it can be reset, and its disassembly and assembly are very convenient. This device can be used in wafer processing.

[0027] The present invention is not limited to the above embodiments. Based on the technical solutions disclosed in the present invention, those skilled in the art can make some substitutions and deformations to some technical features without creative labor according to the disclosed technical content, and these substitutions and deformations are all within the protection scope of the present invention.

Claims

1. A groove valve device, comprising a cavity with a rectangular cross-section, the cavity being enclosed by a top plate, a bottom plate, side plates on both sides and end plates at both ends. There are a first channel and a second channel passing through the cavity on both sides of the cavity. A liftable support frame is provided in the cavity. A valve plate is provided on one side of the support frame facing the second channel. A sealing ring is provided on the surface of the valve plate. A sealing cylinder for driving the valve plate to seal the second channel is provided between the valve plate and the support frame. A lifting cylinder for driving the support frame to lift is provided at the bottom of the cavity. It is characterized in that: The axis of the sealing cylinder is perpendicular to the axis of the lifting cylinder. The top plate is detachably installed on the top of the cavity. A notch is provided on one side of the valve plate facing the sealing cylinder. A cylinder joint is provided at the protruding end of the piston rod of the sealing cylinder. The cylinder joint is inserted into the notch, and a connecting screw passes through the valve plate from above and is threadedly connected to the cylinder joint; an inclined plane is provided at the upper corner of the side of the support frame away from the valve plate, and a wedge-shaped guide block is provided on the corresponding side plate. When the lifting oil cylinder lifts the support frame upward to the sealing position, the inclined plane just contacts the guide block; the notch is in an inverted V shape with a larger lower part and a smaller upper part, the cylinder joint is in a T shape, and the upper part of the notch matches the T-shaped notch; a handle screw is provided on the upper side of the valve plate; a notch corresponding to the sealing cylinder is provided on the support frame, and the sealing cylinder is embedded and installed in the notch.

2. A groove valve device according to claim 1, It is characterized in that: Two lifting cylinders are correspondingly provided, and three sealing cylinders are arranged at intervals in the length direction of the valve plate.

Images