Carbon dioxide filling device and carbon dioxide filling method

Abstract

The application provides a carbon dioxide filling device, which comprises a storage tank, a low-temperature liquid pump, a first pipeline, a second pipeline, a third pipeline, a first vacuum pipeline, a second vacuum pipeline and a purification vacuum pump; the first vacuum pipeline is communicated with the first pipeline, and a third control valve for controlling the opening and closing of the first vacuum pipeline is arranged on the first vacuum pipeline; the second vacuum pipeline is communicated with the third pipeline, and a fourth control valve for controlling the opening and closing of the second vacuum pipeline is arranged on the second vacuum pipeline; the suction port of the purification vacuum pump is communicated with the first vacuum pipeline and the second vacuum pipeline. Meanwhile, the application also provides a carbon dioxide filling method. Compared with the prior art, the carbon dioxide filling device and the carbon dioxide filling method provided by the application can better guarantee the purity of the filled carbon dioxide and meet the high-purity carbon dioxide filling demand.

Description

Technical Field

[0001] The present invention relates to the technical field of carbon dioxide filling, and in particular to a carbon dioxide filling device and a carbon dioxide filling method. Background Art

[0002] High-purity carbon dioxide is usually stored in liquid form. In the prior art, liquid carbon dioxide is usually stored in a large storage tank. When filling carbon dioxide, the liquid carbon dioxide is filled into small gas cylinders through a filling pump through a pipeline.

[0003] However, in existing technologies, residual gas is easily present in the pipeline. During filling, the filling pump drives the liquid carbon dioxide in the storage tank and the residual gas in the pipeline to be filled into the gas cylinder, thereby affecting the purity of the carbon dioxide in the gas cylinder, resulting in the carbon dioxide purity in the gas cylinder not meeting the requirements. Summary of the Invention

[0004] In response to the technical problem in the prior art that, during carbon dioxide filling, residual gas in the pipeline is also filled into the cylinder, thereby affecting the purity of the carbon dioxide, the present invention provides a carbon dioxide filling device equipped with a vacuum structure. This device can discharge the residual gas in the pipeline in the early stage of filling preparation, more effectively purifying the pipeline environment, thereby better ensuring the purity of the carbon dioxide after filling and meeting the demand for high-purity carbon dioxide filling.

[0005] A carbon dioxide filling device comprises a storage tank, a cryogenic liquid pump, a first pipeline, a second pipeline, a third pipeline, a first vacuuming pipeline, a second vacuuming pipeline and a purification vacuum pump;

[0006] One end of the first pipeline is connected to the liquid phase port of the storage tank, and the other end is connected to the liquid inlet of the cryogenic liquid pump, and a first control valve for controlling the on-off of the first pipeline is provided on the first pipeline;

[0007] One end of the second pipe is connected to the liquid outlet of the cryogenic liquid pump; and a first pressure gauge for detecting the internal pressure of the second pipe is provided on the second pipe;

[0008] One end of the third pipe is connected to the other end of the second pipe, and the other end is used to connect to the liquid phase inlet of the gas cylinder; the third pipe is provided with a second control valve for controlling its on-off control, and the third pipe is also provided with a second pressure gauge for detecting its internal pressure, and the second pressure gauge is located at the end of the second control valve away from the second pipe;

[0009] The first vacuum pumping pipe is connected to the first pipe, and a third control valve for controlling the opening and closing of the first vacuum pumping pipe is provided on the first vacuum pumping pipe;

[0010] The second vacuum pumping pipe is connected to the third pipe, and a fourth control valve for controlling the on-off of the second vacuum pumping pipe is provided on the second vacuum pumping pipe;

[0011] The air intake of the purification vacuum pump is communicated with the first vacuum pumping pipe and the second vacuum pumping pipe.

[0012] Preferably, a helium detection pipeline is further included, and the helium detection pipeline is connected with the first vacuum pipeline and the second vacuum pipeline for filling helium to perform helium detection.

[0013] Preferably, it further comprises an exhaust pipe, wherein the exhaust pipe is used to connect to the gas phase outlet of the gas cylinder; and a fifth control valve for controlling the on-off of the exhaust pipe is provided on the exhaust pipe.

[0014] Preferably, it further comprises a pressure relief pipeline, the pressure relief pipeline being connected to the other end of the second pipeline; and the pressure relief pipeline is provided with a sixth control valve for controlling its on-off;

[0015] The exhaust pipe is communicated with the pressure relief pipe.

[0016] Preferably, it also includes a gas phase pipeline, one end of which is connected to the gas phase port of the storage tank, and the other end is connected to the third pipeline; and the gas phase pipeline is provided with a seventh control valve and an eighth control valve for controlling its on and off, the seventh control valve is located at one end close to the storage tank, and the eighth control valve is located at one end close to the third pipeline.

[0017] Preferably, it further comprises a first analysis pipeline, which is connected to the storage tank and is used to analyze the raw materials in the storage tank; and a ninth control valve for controlling the on-off of the first analysis pipeline is provided on the first analysis pipeline.

[0018] Preferably, it further includes a second analysis pipeline, which is connected to the third pipeline and is used to analyze the raw materials filled in the gas cylinder; and the second analysis pipeline is provided with a tenth control valve for controlling its on and off.

[0019] Preferably, it further comprises a weighing instrument for weighing the gas cylinder, wherein the weighing instrument is electrically connected to the second control valve for controlling the second control valve.

[0020] A carbon dioxide filling method comprising the following steps:

[0021] Providing a carbon dioxide filling device as described in any one of the above;

[0022] Gas cylinder installation: connecting the third pipe to the liquid phase inlet of the gas cylinder;

[0023] Airtightness check: open the purification vacuum pump, and open the third control valve and the fourth control valve, and evacuate the filling pipe and the cryogenic liquid pump until the vacuum degree is qualified, and then close the purification vacuum pump, the third control valve, and the fourth control valve;

[0024] Filling the gas cylinder: opening the first control valve, opening the cryogenic liquid pump, opening the second control valve and the liquid phase valve of the gas cylinder, so that the liquid carbon dioxide in the storage tank is filled into the gas cylinder.

[0025] Preferably, the following steps are further included between the air tightness test and the gas cylinder filling:

[0026] Treatment of residues in the cylinder: Open the gas phase valve of the gas cylinder and open the control valve on the exhaust pipe connected to the gas phase outlet of the gas cylinder in the carbon dioxide filling device to discharge the residues in the gas cylinder; and fill the gas cylinder with carbon dioxide gas through the gas phase pipe in the carbon dioxide filling device to perform displacement discharge. After the displacement discharge is completed, close all valves;

[0027] Vacuuming and purifying the gas cylinder: opening the liquid phase valve of the gas cylinder, opening the purification vacuum pump, and opening the fourth control valve to vacuum the gas cylinder until the vacuum degree is qualified, and then closing the purification vacuum pump, the fourth control valve, and the liquid phase valve of the gas cylinder;

[0028] Analysis: Analyze the raw gas in the storage tank and analyze the raw gas filled in the gas cylinder;

[0029] After the gas cylinder is filled, the following steps are also included:

[0030] Post-filling analysis: metal ion detection is performed on the carbon dioxide filled in the gas cylinder;

[0031] Inspection after filling: reweigh the gas cylinder and test the sealing of the gas cylinder.

[0032] Compared with the prior art, the carbon dioxide filling device provided by the application comprises a storage tank, a low-temperature liquid pump, a first pipeline, a second pipeline, a third pipeline, a first vacuum pipeline, a second vacuum pipeline and a purification vacuum pump; one end of the first pipeline is in communication with a liquid phase port of the storage tank, the other end is in communication with a liquid inlet of the low-temperature liquid pump, and a first control valve for controlling the opening and closing of the first pipeline is arranged on the first pipeline; one end of the second pipeline is in communication with a liquid outlet of the low-temperature liquid pump; a first pressure gauge for detecting the internal pressure of the second pipeline is arranged on the second pipeline; one end of the third pipeline is in communication with the other end of the second pipeline, and the other end is used to communicate with a liquid phase inlet of a gas cylinder; a second control valve for controlling the opening and closing of the third pipeline is arranged on the third pipeline, and a second pressure gauge for detecting the internal pressure of the third pipeline is arranged on the third pipeline, and the second pressure gauge is located at the end of the second control valve away from the second pipeline; the first vacuum pipeline is in communication with the first pipeline, and a third control valve for controlling the opening and closing of the first vacuum pipeline is arranged on the first vacuum pipeline; the second vacuum pipeline is in communication with the third pipeline, and a fourth control valve for controlling the opening and closing of the second vacuum pipeline is arranged on the second vacuum pipeline; the gas suction port of the purification vacuum pump is in communication with the first vacuum pipeline and the second vacuum pipeline. The first vacuum pipeline, the second vacuum pipeline and the purification vacuum pump are arranged in the carbon dioxide filling device, so that before the carbon dioxide is filled, the residual gas in the pipeline can be pumped out through the first vacuum pipeline, the second vacuum pipeline and the purification vacuum pump, the carbon dioxide filling device can be subjected to vacuum treatment, the pipeline environment can be more effectively purified, and the purity of the filled carbon dioxide can be better guaranteed, thereby meeting the high-purity carbon dioxide filling demand. BRIEF DESCRIPTION OF DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0034] Figure 1 Structure schematic diagram of the carbon dioxide filling device provided by an embodiment DETAILED DESCRIPTION

[0035] In order to make those skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0036] It should be noted that when a component is referred to as being “fixed on”, “mounted on” or “set on” another component, it can be directly on the other component or indirectly set on the other component; when a component is “connected” to another component, or a component is referred to as being “connected to” another component, it can be directly connected to the other component or indirectly connected to the other component.

[0037] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. Throughout the description of this application, "plurality" or "several" means two or more, unless otherwise specifically defined.

[0039] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the conditions under which this application can be implemented. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the efficacy and purpose that can be achieved by this application.

[0040] The present invention provides a carbon dioxide filling device, which includes a storage tank, a cryogenic liquid pump, a first pipeline, a second pipeline, a third pipeline, a first vacuum pipeline, a second vacuum pipeline and a purification vacuum pump; one end of the first pipeline is connected to the liquid phase port of the storage tank, and the other end is connected to the liquid inlet of the cryogenic liquid pump, and the first pipeline is provided with a first control valve for controlling the on-off thereof; one end of the second pipeline is connected to the liquid outlet of the cryogenic liquid pump; and the second pipeline is provided with a first pressure gauge for detecting the internal pressure thereof; one end of the third pipeline is connected to the other end of the second pipeline, and the other end is used to connect to the The third pipeline is provided with a second control valve for controlling its on-off operation, and a second pressure gauge for detecting its internal pressure is provided on the third pipeline. The second pressure gauge is located at the end of the second pipeline away from the second control valve. The first vacuum pipeline is connected to the first pipeline, and the first vacuum pipeline is provided with a third control valve for controlling its on-off operation. The second vacuum pipeline is connected to the third pipeline, and the second vacuum pipeline is provided with a fourth control valve for controlling its on-off operation. The air intake of the purification vacuum pump is connected to the first and second vacuum pipelines. The carbon dioxide filling device is provided with the first and second vacuum pipelines, and the purification vacuum pump is used to extract residual gas in the pipeline through the first and second vacuum pipelines before carbon dioxide filling. This allows the carbon dioxide filling device to be vacuumed, more effectively purifying the pipeline environment, thereby better ensuring the purity of the carbon dioxide after filling and meeting the requirements for high-purity carbon dioxide filling.

[0041] Please refer to Figure 1 . This embodiment provides a carbon dioxide filling device 100, which is used to fill liquid 99.999% carbon dioxide into a Y-TANK tank. Specifically, the carbon dioxide filling device 100 provided in this embodiment is used for carbon dioxide storage tanks to fill industrial high-purity (metal ion detection limit requirements) carbon dioxide Y-TANK tanks, and the fully filled product Y-TANK tanks are used in high-tech fields such as chip pipeline environmental purging. In this embodiment, the Y-TANK tank is specifically of 440L specification. Of course, in other embodiments, the Y-TANK tank can also have other specifications.

[0042] The carbon dioxide filling device 100 includes a storage tank 1, a cryogenic liquid pump 2, a first pipeline 3, a second pipeline 4, a third pipeline 5, a first vacuum pipeline 6, a second vacuum pipeline 7 and a purification vacuum pump.

[0043] One end of the first pipe 3 is connected to the liquid phase port of the storage tank 1 , and the other end is connected to the liquid inlet of the cryogenic liquid pump 2 . A first control valve 301 for controlling the on-off of the first pipe 3 is provided.

[0044] One end of the second pipe 4 is connected to the liquid outlet of the cryogenic liquid pump 2 , and a first pressure gauge 401 for detecting the internal pressure of the second pipe 4 is provided on the second pipe 4 .

[0045] One end of the third pipe 5 is connected to the other end of the second pipe 4. The other end of the third pipe 5 is connected to the liquid phase inlet of the gas cylinder 200. In this embodiment, the gas cylinder 200 is specifically a Y-TANK. The third pipe 5 is provided with a second control valve 501 for controlling its on-off function. The third pipe 5 is also provided with a second pressure gauge 502 for detecting its internal pressure. The second pressure gauge 502 is located at the end of the second control valve 501 that is away from the second pipe 4.

[0046] The first vacuuming pipe 6 is connected to the first pipe 3 , and a third control valve 601 is provided on the first vacuuming pipe 6 to control the on-off thereof.

[0047] The second vacuuming pipe 7 is connected to the third pipe 5 , and a fourth control valve 701 is provided on the second vacuuming pipe 7 to control the on-off thereof.

[0048] The air intake of the purification vacuum pump is communicated with the first vacuum pumping pipe 6 and the second vacuum pumping pipe 7 .

[0049] By providing the first vacuuming pipe 6 and the second vacuuming pipe 7, the purification vacuum pump can provide adsorption force to extract the residual gas in the pipes before filling the carbon dioxide. This ensures that when filling the carbon dioxide, there will be no residual gas in the pipes that affects the purity of the carbon dioxide filled into the gas cylinder 200.

[0050] Understandably, most current gas production and filling companies operate on a simple "production + storage + tank transport + cylinder" filling model, failing to capitalize on the more flexible new developments of ISO-TANK (tank container) and Y-TANK filling. With the advancement of the times, my country's industrial gas market continues to expand, and major global gas companies have designated my country as a key development region, establishing joint ventures or wholly owned operations. In contrast, Chinese gas filling companies, constrained by scale, equipment, technology, and talent, are unable to adequately meet the demand for Y-TANK filling.

[0051] The carbon dioxide filling device 100 provided in this embodiment can empty the pipeline before filling, thereby better ensuring the purity of the carbon dioxide filled into the gas cylinder 200, and can better meet the filling requirements of high-purity carbon dioxide in Y-TANK tanks.

[0052] Preferably, the carbon dioxide filling device 100 further includes a helium inspection pipe 8, which is connected to the first vacuum pipe 6 and the second vacuum pipe 7 for filling with helium for helium inspection. Specifically, when the first pressure gauge 401 indicates that the vacuum degree is unqualified, the control valve on the helium inspection pipe 8 can be opened to conduct the helium inspection pipe 8, so that helium can be passed through the helium inspection pipe 8 for helium inspection, thereby better performing an airtightness inspection.

[0053] Preferably, the carbon dioxide filling device 100 further includes an exhaust pipe 9, which is connected to the gas phase outlet of the gas cylinder 200 and is provided with a fifth control valve 901 for controlling its on / off operation. Therefore, before filling with carbon dioxide, residues (residual liquid and residual gas) in the gas cylinder 200 can be discharged through the exhaust pipe 9, further ensuring the purity of the carbon dioxide filled in the gas cylinder 200.

[0054] Preferably, the carbon dioxide filling device 100 further includes a pressure relief pipe 10, which is connected to the other end of the second pipe 4. A sixth control valve 1001 is provided on the pressure relief pipe 10, which is controlled by a controller. The exhaust pipe 9 is connected to the pressure relief pipe 10. Therefore, before carbon dioxide filling, the pressure in the pipe can be relieved through the pressure relief pipe 10, thereby better ensuring safety.

[0055] Preferably, the carbon dioxide filling device 100 further includes a gas phase conduit 11, one end of which is connected to the gas phase port of the storage tank 1, and the other end of which is connected to the third conduit 5. A seventh control valve 1101 and an eighth control valve 1102 are provided on the gas phase conduit 11 to control its on / off function. The seventh control valve 1101 is located at one end near the storage tank 1, and the eighth control valve 1102 is located at one end near the third conduit 5. Thus, the gas phase conduit 11 can displace the residue in the gas cylinder 200, effectively discharging the residue from the gas cylinder 200.

[0056] Preferably, the carbon dioxide filling device 100 further includes a first analysis line 12, which is connected to the storage tank 1 for analyzing the raw materials in the storage tank 1, and a ninth control valve 1201 is provided on the first analysis line 12 to control its on-off function. Specifically, one end of the first analysis line 12 is connected to the storage tank 1, and the other end is connected to the analysis chamber, thereby enabling online analysis of the raw materials in the storage tank 1. By providing the first analysis line 12, the carbon dioxide in the storage tank 1 can be analyzed before carbon dioxide filling, thereby ensuring the quality of the carbon dioxide filled into the gas cylinder 200.

[0057] Preferably, the carbon dioxide filling device 100 further includes a second analysis line 13, which is connected to the third line 5 and is used to analyze the raw material filled in the gas cylinder 200, and a tenth control valve 1301 is provided on the second analysis line 13 to control its on-off function. Specifically, one end of the second analysis line 13 is connected to the third line 5, and the other end is connected to the analysis chamber, thereby enabling online analysis of the raw material filled in the gas cylinder 200. By providing the second analysis line 13, a certain amount of carbon dioxide gas can be pre-filled into the gas cylinder 200 for online analysis, which can further ensure the quality of the carbon dioxide filled in the gas cylinder 200.

[0058] Preferably, the carbon dioxide filling device 100 further includes a scale 14 for weighing the gas cylinder 200. The scale 14 is electrically connected to the second control valve 501 and is used to control the second control valve 501. Thus, during carbon dioxide filling, the scale 14 can control the second control valve 501 based on the weight of the gas cylinder 200, further preventing overfilling. Specifically, the scale 14 is a Y-CYLINDER (horizontal gas cylinder) scale.

[0059] Preferably, the carbon dioxide filling device 100 further includes a return air pipe 15, one end of which is connected to the storage tank 1 and the other end is connected to the exhaust pipe 9. An eleventh control valve 1501 is provided on the return air pipe 15 to control its on-off function. Therefore, during the filling process, if the pressure in the gas cylinder 200 is too high, the carbon dioxide gas can flow back into the storage tank 1 through the return air pipe 15.

[0060] This embodiment also provides a carbon dioxide filling method, which includes the following steps:

[0061] Providing the carbon dioxide filling device 100;

[0062] Gas cylinder installation: connect the third pipe 5 to the liquid phase inlet of the gas cylinder 200.

[0063] In this embodiment, the gas cylinder 200 is a Y-TANK tank having a liquid phase inlet and a gas phase outlet. In this step, the gas phase outlet of the gas cylinder 200 needs to be connected to the exhaust pipe 9.

[0064] Specifically, in this embodiment, the gas cylinder 200 is first placed on the weighing instrument 14, and then the liquid phase filling pigtail pipe and the gas phase pigtail pipe are connected to connect the third pipe 5 and the exhaust pipe 9 with the gas cylinder 200, and then confirm that the liquid phase valve and the gas phase valve of the gas cylinder 200 are closed.

[0065] Air tightness check: open the purification vacuum pump, and open the third control valve 601 and the fourth control valve 701, and evacuate the filling pipe and the cryogenic liquid pump 2 until the vacuum degree is qualified, and then close the purification vacuum pump, the third control valve 601, and the fourth control valve 701.

[0066] Preferably, before the purification vacuum pump is used for suction, the filling line pressure can be observed by the first pressure gauge 401 and the second pressure gauge 502. If there is pressure, the air flow control valve 1001 is opened to release the pressure until the pressure is reduced to ≤ 2 PSI.

[0067] In this embodiment, the purification vacuum pump is used to pump until the first pressure gauge 401 displays -14 PSI, which indicates that the vacuum level is acceptable. If the vacuum level is unacceptable, the control valve on the helium detection pipeline 8 can be opened to fill the pipeline with helium for helium testing until the system is found to be airtight.

[0068] Gas cylinder filling: open the first control valve 301 , open the cryogenic liquid pump 2 , open the second control valve 501 and the liquid phase valve of the gas cylinder 200 , so that the liquid carbon dioxide in the storage tank 1 is filled into the gas cylinder 200 .

[0069] In this embodiment, the gas cylinder filling steps specifically include: checking the equipment status, including the pressure gauge, instrument air source, sensitivity of the weighing scale, and safety valve, to ensure they are functioning properly. If any malfunction is detected, repair or replace it immediately. The weighing scale 14 is reset to zero. The weight, volume, and other data of the gas cylinder 200 are confirmed. The filling volume is then calculated based on the carbon dioxide filling coefficient, and the gas cylinder is weighed and filled.

[0070] Open the first control valve 301 to introduce liquid carbon dioxide. Start the cryogenic liquid pump 2 and observe the operation of the cryogenic liquid pump 2. Open the second control valve 501 and open the liquid phase valve and gas phase valve of the gas cylinder 200. The gas cylinder 200 begins to be filled with liquid carbon dioxide. Observe the filling pressure of the second pressure gauge 502. When the filling pressure is greater than the pressure of the storage tank 1, open the eleventh control valve 1501 to allow the carbon dioxide gas to flow back to the storage tank 1 through the return gas pipe 15.

[0071] During the filling process, closely monitor the second pressure gauge 502 and control the filling pressure within the range of 2.2-4MPa. The filling coefficient of the gas cylinder 200 does not exceed 0.6kg / L. When the filling weight reaches the set value, the weighing instrument 14 will control the second control valve 501 to interlock and close. The on-site operator quickly closes the gas phase valve and liquid phase valve of the gas cylinder 200. The screen operator shuts down the cryogenic liquid pump 2 and opens the second control valve 501. The on-site operator closes the first control valve 301, opens the drain valve of the drain pipe connected to the second pipeline 4, and discharges the remaining liquid in the filling pipe. Observe the pressure of the second pressure gauge 502. After it is less than 30PSI, close the drain valve and remove the liquid filling pipe.

[0072] Close the eleventh control valve 1501 and open the fifth control valve 901 to release the excess pressure in the gas phase pipe. After the release is completed, remove the gas phase pipe of the gas cylinder 200. At this point, the filling of the gas cylinder 200 is complete.

[0073] It should be noted that in other embodiments, when the gas cylinder 200 has only a liquid phase inlet and no gas phase outlet, 1.2-1.8 MPA of carbon dioxide gas is first charged in the early stages of filling. The cryogenic liquid pump 2 is then activated to introduce cryogenic liquid carbon dioxide into the filling pipe, and the filling valve is opened to begin filling. Pay attention to filling pressure control. If the filling pressure is too high, open the liquid phase reflux valve to control the filling pressure to no more than 4 MPA.

[0074] Preferably, the following steps are further included between the air tightness test and the gas cylinder filling:

[0075] Treatment of residues in the cylinder: Open the gas phase valve of the gas cylinder 200 and open the control valve on the exhaust pipe connected to the gas phase outlet of the gas cylinder 200 in the carbon dioxide filling device 100 to discharge the residual gas in the gas cylinder 200; and fill the gas cylinder 200 with carbon dioxide gas through the gas phase pipe in the carbon dioxide filling device 100 to perform displacement discharge. After the displacement discharge is completed, close all valves;

[0076] In this embodiment, the treatment of residual gas in the cylinder is specifically as follows: open the gas phase valve of the gas cylinder 200, open the fifth control valve 901, and discharge the residual gas in the cylinder. After observing the pressure of the second pressure gauge 502 to 2 PSI, close the fifth control valve 901. Then, open the gas phase manual valve of the storage tank 1 (in this embodiment, the seventh control valve 1101) and the eighth control valve 1102, open the liquid phase valve of the gas cylinder 200, and fill the gas cylinder 200 with carbon dioxide gas for displacement and discharge. Finally, close all valves.

[0077] Of course, in other embodiments, the fifth control valve 901 may be closed, the gas cylinder 200 may be pressurized to about 2 MPA, the gas phase hand valve of the storage tank 1 may be closed, and then the fifth control valve 901 may be opened for staged pressurization and discharge, which may be repeated multiple times.

[0078] The gas cylinder is vacuumed and purified. The liquid phase valve of the gas cylinder 200 is opened, the purification vacuum pump is opened, and the fourth control valve 701 is opened. The gas cylinder 200 is vacuumed until the vacuum degree is qualified. Then, the purification vacuum pump, the fourth control valve 701, and the liquid phase valve of the gas cylinder 200 are closed.

[0079] In this embodiment, the vacuuming and purification process for the gas cylinder is specifically as follows: opening the liquid-phase valve of the gas cylinder 200 and observing the pressure on the second pressure gauge 502. If the pressure is greater than 2 PSI, opening the fifth control valve 901 and the gas-phase valve of the gas cylinder 200 to reduce the pressure to ≤ 2 PSI, and then closing the fifth control valve 901 and the gas-phase valve of the gas cylinder 200. Confirming that the purification vacuum pump is turned on, opening the fourth control valve 701 and performing vacuuming until the second pressure gauge 502 reads -14 PSI. Closing the fourth control valve 701 and the liquid-phase valve of the gas cylinder 200, the vacuuming and purification process for the gas cylinder 200 is now complete.

[0080] Therefore, through the above steps, the purity of the carbon dioxide finally filled into the gas cylinder 200 can be better guaranteed.

[0081] Analysis: Analyze the raw gas in the storage tank 1 and analyze the raw gas filled in the gas cylinder 200;

[0082] In this embodiment, the analysis is specifically as follows: open the analysis manual valve of the storage tank 1 (in this embodiment, the ninth control valve 1201), and contact the quality control to conduct an online analysis of the raw gas. After the analysis is qualified, open the seventh control valve 1101 and the eighth control valve 1102, open the liquid phase valve of the gas cylinder 200, and fill the gas cylinder 200 with carbon dioxide gas. Observe the pressure of the second pressure gauge 502 to about 1.8MPA, and close the eighth control valve 1102. Then open the tenth control valve 1301, and contact the quality control to conduct an online analysis of the carbon dioxide gas in the gas cylinder 200. After the analysis is qualified, prepare to enter the filling process. Through this step, it is better guaranteed that the carbon dioxide finally filled into the gas cylinder 200 meets the required requirements.

[0083] Preferably, after the gas cylinder is filled, the following steps are further included:

[0084] Post-filling analysis: metal ion detection is performed on the carbon dioxide filled in the gas cylinder 200;

[0085] By performing metal ion detection on the gas cylinder 200 after filling, it can be ensured that the trace metal ion content of the gas in the gas cylinder 200 meets the required requirements.

[0086] Inspection after filling: reweigh the gas cylinder 200 and check the sealing of the gas cylinder 200.

[0087] It is understandable that the filling process is carried out on the Y bottle filling scale. To ensure the accuracy of the filling amount, after the filling is completed, the gas cylinder 200 is sent to the carbon dioxide TANK tank electronic scale for re-weighing.

[0088] Under normal circumstances, if carbon dioxide leaks, it will form a mist in the air. Visually inspect the valve and its connection to the bottle neck to ensure they are properly sealed. After filling, perform a leak check using a dedicated leak detection fluid at the valve connection. Check the bottle for signs of abnormally high temperature and any serious defects such as bulging, deformation, or leaks. If overfilling is detected, address it immediately and properly drain the excess liquid.

[0089] The carbon dioxide filling device 100 provided in this embodiment is equipped with a vacuum mechanism, which effectively purifies the pipeline environment during the initial filling preparation phase, enabling higher-purity gas filling. It is also designed with a metal ion detector capable of detecting trace amounts of metal ions such as Br, Cl, NO2, NO3, SO4, Al, and Ca in the gas within the Y-TANK, meeting the needs of high-end semiconductor companies for shielding gas purging of chips and integrated circuits.

[0090] The above description is only an embodiment of the present invention. It should be pointed out that those skilled in the art can make improvements without departing from the creative concept of the present invention, but these improvements all fall within the scope of protection of the present invention.

Claims

1. A carbon dioxide filling device, characterized in that: It includes a storage tank, a cryogenic liquid pump, a first pipeline, a second pipeline, a third pipeline, a first vacuum pipeline, a second vacuum pipeline and a purification vacuum pump; One end of the first pipeline is connected to the liquid phase port of the storage tank, and the other end is connected to the liquid inlet of the cryogenic liquid pump, and a first control valve for controlling the on-off of the first pipeline is provided on the first pipeline; One end of the second pipe is connected to the liquid outlet of the cryogenic liquid pump; and a first pressure gauge for detecting the internal pressure of the second pipe is provided on the second pipe; One end of the third pipe is connected to the other end of the second pipe, and the other end is used to connect to the liquid phase inlet of the gas cylinder; the third pipe is provided with a second control valve for controlling its on-off control, and the third pipe is also provided with a second pressure gauge for detecting its internal pressure, and the second pressure gauge is located at the end of the second control valve away from the second pipe; The first vacuum pumping pipe is connected to the first pipe, and a third control valve for controlling the opening and closing of the first vacuum pumping pipe is provided on the first vacuum pumping pipe; The second vacuum pumping pipe is connected to the third pipe, and a fourth control valve for controlling the on-off of the second vacuum pumping pipe is provided on the second vacuum pumping pipe; The air suction port of the purification vacuum pump is connected to the first vacuum pumping pipe and the second vacuum pumping pipe; It also includes a helium detection pipeline, which is connected to the first vacuum pipeline and the second vacuum pipeline and is used to be filled with helium for helium detection; It also includes an exhaust pipe, the exhaust pipe is used to communicate with the gas phase outlet of the gas cylinder; and the exhaust pipe is provided with a fifth control valve for controlling its on and off; The system further comprises a gas phase pipeline, one end of which is connected to the gas phase port of the storage tank, and the other end of which is connected to the third pipeline; and a seventh control valve and an eighth control valve are provided on the gas phase pipeline to control the on-off operation thereof, the seventh control valve being located at an end close to the storage tank, and the eighth control valve being located at an end close to the third pipeline; The system further comprises a first analysis pipeline, the first analysis pipeline being in communication with the storage tank and being used to analyze the raw materials in the storage tank; and a ninth control valve for controlling the on-off of the first analysis pipeline is provided on the first analysis pipeline; It also includes a second analysis pipeline, which is connected to the third pipeline and is used to analyze the raw materials filled in the gas cylinder; and a tenth control valve is provided on the second analysis pipeline to control its on and off.

2. The carbon dioxide filling device according to claim 1, characterized in that: The pressure relief pipe is connected to the other end of the second pipe, and a sixth control valve for controlling the on-off of the pressure relief pipe is provided on the pressure relief pipe. The exhaust pipe is communicated with the pressure relief pipe.

3. The carbon dioxide filling device according to claim 1, characterized in that: It also includes a weighing instrument for weighing the gas cylinder, and the weighing instrument is electrically connected to the second control valve for controlling the second control valve.

4. A carbon dioxide filling method, characterized in that: The steps include: Providing a carbon dioxide filling device according to any one of claims 1 to 3; Gas cylinder installation: connect the third pipe to the liquid phase inlet of the gas cylinder; Air tightness check: Open the purification vacuum pump, and open the third control valve and the fourth control valve, and vacuum the filling pipe and the cryogenic liquid pump until the vacuum degree is qualified, then close the purification vacuum pump, the third control valve, and the fourth control valve; Filling the gas cylinder: Open the first control valve, start the cryogenic liquid pump, open the second control valve and the liquid phase valve of the gas cylinder to allow the liquid carbon dioxide in the storage tank to be filled into the gas cylinder.

5. The carbon dioxide filling method according to claim 4, characterized in that: The following steps are included between air tightness testing and cylinder filling: Treatment of residues in the cylinder: Open the gas phase valve of the gas cylinder and the fifth control valve on the exhaust pipe connected to the gas phase outlet of the gas cylinder in the carbon dioxide filling device to discharge the residue in the gas cylinder; then fill the gas cylinder with carbon dioxide gas through the gas phase pipe in the carbon dioxide filling device to perform displacement discharge. After the displacement discharge is completed, close all valves; Vacuuming and purifying the gas cylinder: Open the liquid phase valve of the gas cylinder, start the purification vacuum pump, and open the fourth control valve to vacuum the gas cylinder until the vacuum degree is qualified, then close the purification vacuum pump, the fourth control valve, and the liquid phase valve of the gas cylinder; Analysis: Analyze the raw gas in the storage tank and analyze the raw gas filled in the gas cylinder; After the gas cylinder is filled, the following steps are also included: Post-filling analysis: metal ion detection of carbon dioxide filled in gas cylinders; Inspection after filling: Reweigh the gas cylinder and test the sealing of the gas cylinder.

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