A receiving collimator for a diffraction measurement device

Abstract

This invention discloses a receiving collimator for a diffraction measurement device, comprising a collimator body and a light-transmitting aperture and a positioning aperture disposed on the collimator body. The light-transmitting aperture has an inner contour and an outer contour arranged obliquely relative to the axis of the collimator body, which together form a frustum-shaped diffraction photon channel or diffraction line channel. The positioning aperture contains X-rays and an X-ray absorber, serving as an incident photon channel or incident line channel. Using a diffraction device equipped with the receiving collimator of this invention enables simultaneous multi-directional imaging of diffraction in a single part of a sample, achieving simultaneous imaging of Debye rings or diffraction patterns in a single part of the sample. Based on the simultaneously imaged Debye rings or diffraction patterns, rapid non-destructive testing and analysis of the phase, texture, stress, etc., of a single part of the sample can be performed.

Description

Technical Field

[0001] This invention relates to a diffraction measurement apparatus, and more particularly to a receiving collimator for a diffraction measurement apparatus. Background Technology

[0002] Existing document CN111380880A discloses a diffraction device, including an X-ray irradiation system that irradiates the measurement area of ​​the sample under test with X-rays; an X-ray detection system that simultaneously detects multiple diffracted X-rays formed by X-rays diffracted from multiple parts of the sample under test, so as to simultaneously measure the X-ray diffraction intensity distribution of multiple parts of the sample under test; wherein, the detected X-rays are short-wavelength characteristic X-rays; the X-ray detection system is a parallel light array detection system, which includes a receiving array collimator and an array detector matched with the receiving array collimator, each detection unit having single-photon measurement. This device uses a conventional receiving collimator (similar to a Sola slit). Although it can quickly detect the uniformity of crystal orientation inside the workpiece, it only simultaneously images the diffraction of multiple parts of the sample in one direction. It cannot achieve simultaneous multi-directional imaging of diffraction of a single part of the sample, nor can it simultaneously image the Debye rings or diffraction patterns of a single part of the sample. Furthermore, it is impossible to perform rapid non-destructive testing and analysis of the phase, texture, stress, etc. of a single part of the sample based on simultaneously imaged Debye rings or diffraction patterns. Summary of the Invention

[0003] The purpose of this invention is to provide a receiving collimator for a diffraction measurement device, which at least solves the technical problem that existing collimators for diffraction devices cannot achieve simultaneous imaging of a part of a sample from multiple directions.

[0004] The objective of this invention is achieved using the technical solution described below.

[0005] A receiving collimator for a diffraction measurement device includes a collimator body and a light-transmitting aperture disposed on the collimator body, characterized in that: the light-transmitting aperture has an inner contour and an outer contour arranged obliquely relative to the axis of the collimator body, and the inner contour and the outer contour together form a frustum-shaped diffraction photon channel or diffraction line channel.

[0006] Furthermore, the extension line of the inner contour intersects the extension line of the outer contour at the center line of the incident beam of the diffraction measuring device, and the intersection point is the center of the diffractometer circle of the diffraction measuring device; the center line of the incident beam coincides with the axis of the collimator body.

[0007] As a preferred embodiment of the present invention, the angle between the extended inner contour line of the light-transmitting hole and the axis of the collimator body is γ, and the value of γ ranges from 2° to 10°.

[0008] As a preferred embodiment of the present invention, the angle between the inner contour and the outer contour of the light-transmitting hole is δ, and the value of δ ranges from 0.5° to 6°.

[0009] As a more preferred embodiment of the present invention, γ+δ is not greater than 12°.

[0010] To facilitate operation and improve the accuracy of test results, a positioning hole is provided in the middle of the collimator body, and the axis of the positioning hole coincides with the axis of the collimator body.

[0011] To facilitate operation and further improve the accuracy of the test results, an X-ray absorber is also installed inside the positioning hole.

[0012] As a preferred embodiment of the present invention, the frustum-shaped structure is a circular frustum-shaped structure or a square frustum-shaped structure.

[0013] For ease of use, the bottom end of the collimator body has an outwardly protruding edge, the plane of which is used to fit tightly against the array detector or X-ray imaging plate of the diffraction measurement device or its shielding box. The collimator is made of tungsten, lead, iron or other suitable materials, so that X-rays can only reach the detection area of ​​the array detector or X-ray imaging plate through the light-transmitting hole, shielding X-rays from other directions.

[0014] Beneficial effects: The diffraction device with the receiving collimator of this invention can realize multi-directional simultaneous imaging of the diffraction of a part of the sample, and realize simultaneous imaging of the Debye ring or diffraction pattern of the material in a part of the sample. Based on the simultaneously imaged Debye ring or diffraction pattern, it is possible to perform rapid non-destructive detection and analysis of the phase, texture, stress, etc. of the material in a part of the sample. Attached Figure Description

[0015] Figure 1 This is a cross-sectional schematic diagram of the receiving collimator in Embodiment 1;

[0016] Figure 2 This is a top-down schematic diagram of the receiving collimator in Embodiment 1;

[0017] Figure 3 This is a schematic diagram of a diffraction device using the receiving collimator in Example 1;

[0018] Figure 4 This is a cross-sectional schematic diagram of the receiving collimator in Embodiment 2;

[0019] Figure 5 This is a top-down schematic diagram of the receiving collimator in Embodiment 2;

[0020] In the figure: 1-X-ray tube, 2-incident collimator, 21-aperture of the incident collimator, 3-sample, 31-translation stage, 32-Φ-angle turntable, 33-Ψ-angle turntable, 4-receiving collimator body, 5-array detector, 51-shielding box of array detector, 6-aperture of the receiving collimator, 61-inner contour of the aperture, 62-outer contour of the aperture, 63-outward protrusion at the bottom of the collimator body, 7-incident X-rays passing through the incident collimator, 8-diffraction lines passing through the receiving collimator, 9-center of the diffractometer circle, 10-positioning hole on the receiving collimator, 11-X-ray absorber, 12-transmission lines passing through the X-ray absorber. Detailed Implementation

[0021] The present invention will be further described below with reference to specific embodiments. It should be noted that the following embodiments should not be construed as limiting the scope of protection of the present invention. Any non-essential improvements and adjustments made by those skilled in the art based on the content of the present invention are within the scope of protection of the present invention.

[0022] Example 1

[0023] A receiving collimator for a diffraction measurement device, such as Figure 1 and Figure 2 As shown, the device includes a collimator body 4 and a light-transmitting aperture 6 disposed on the collimator body 4. The light-transmitting aperture 6 has an inner contour 61 and an outer contour 62 arranged obliquely relative to the axis of the collimator body 4. The inner contour 61 and the outer contour 62 together form a frustum-shaped diffraction photon channel or diffraction line channel. The extension line of the inner contour 61 intersects the extension line of the outer contour 62 at the center line of the incident beam 7 of the diffraction measurement device, and the intersection point is the center of the diffractometer circle of the diffraction measurement device. The center line of the incident beam 7 coincides with the axis of the collimator body 4. The angle between the extension line of the inner contour 61 of the light-transmitting aperture 6 and the axis of the collimator body 4 is γ, and the value of γ ranges from 2° to 10°. The angle between the inner contour 61 and the outer contour 62 of the light-transmitting aperture 6 is δ, and the value of δ ranges from 0.5° to 6°. γ + δ is not greater than 12°. The collimator body 4 has a positioning hole 10 in the middle, the axis of the positioning hole 10 coincides with the axis of the collimator body 4, and an X-ray absorber 11 is also provided in the positioning hole 10; the bottom end of the collimator body 4 has an outwardly protruding edge 63, the plane of which is used to closely abut against the array detector or its supporting components.

[0024] The short-wavelength characteristic X-ray diffraction measurement device for receiving collimators in this embodiment, such as... Figure 3As shown, the system includes an X-ray irradiation system, a sample stage, and an X-ray detection system. X-rays emitted from the irradiation system pass through an incident collimator 2 to form incident X-ray 7, which irradiates the measured portion of the sample 3 fixed on the sample stage. The X-ray detection system is used to measure the intensity and distribution of short-wavelength characteristic X-rays diffracted from the measured portion inside the sample at a specific point. The X-ray irradiation system includes a radiation source and an incident collimator 2. The incident collimator 2 defines the divergence, cross-sectional shape, and size of the X-ray beam incident on the sample 3. The radiation source includes a heavy metal target X-ray tube 1 with an atomic number greater than 55, and a high-voltage power supply with a voltage level of 160 kV or higher and its controller. The X-ray detection system includes a collimator body 4 and an array detector 5 matched to the collimator body 4. The X-ray beam 7 is perpendicularly incident on the X-ray detection system. The X-ray irradiation system, sample stage, and X-ray detection system are fixed on the same platform or a support.

[0025] The array detector 5 detects and receives diffracted lines 8 originating from the material diffracted from the sample being measured and passing through the light-transmitting aperture 6 of the collimator body 4, as well as other stray lines passing through the light-transmitting aperture 6 of the collimator body 4. The X-ray detection system is characterized in that the center line of the incident X-ray beam 7 is the central axis of the light-transmitting aperture 6, and the extension lines of the inner contour 61 and the outer contour 62 of the light-transmitting aperture 6 intersect at a point on the center line of the incident X-ray beam 7. This point is the center 9 of the diffractometer circle of the device, and the sample being measured is located at the center 9 of the diffractometer circle of the device.

[0026] The X-ray irradiation system is an X-ray machine. The anode target of its X-ray tube is made of heavy metal materials such as tungsten, gold, and uranium with atomic numbers greater than 46. It emits short-wavelength X-rays at a voltage of 120kV-600kV.

[0027] In this array detector 5, each detection pixel performs single-photon measurements. It is a multi-energy array detector with two or more energy thresholds. By setting the energy thresholds, each pixel can measure a short-wavelength characteristic X-ray. Alternatively, the array detector 5 can also be an energy-dispersive array detector, meaning each pixel can measure multiple energy channels. The pixel size of the array detector 5 ranges from 0.02 mm to 0.2 mm. The array detector 5 is a cadmium telluride array detector, a cadmium zinc telluride array detector, or a gallium arsenide array detector.

[0028] The distance t between the center 9 of the diffractometer circle and the array detector 5 is 150mm to 1500mm.

[0029] A positioning hole 10 is provided in the middle of the collimator body 4. The axis of the positioning hole 10 coincides with the center line of the incident collimator 2. An X-ray absorber 11 is also provided inside the positioning hole 10. The X-ray absorber 11 can prevent the array detector 5 from being damaged by the high-flux incident X-ray beam 7. At the same time, it can determine the position of the maximum intensity of the transmitted X-ray 12 by detecting the intensity distribution of the incident X-ray 12 that has passed through the X-ray absorber 9, that is, determine the center position of the Debye ring when diffraction occurs.

[0030] The incident collimator 2, the receiving collimator 4, and the shielding box 51 of the array detector 5 are all made of sufficiently thick heavy metal materials such as tungsten, lead, and gold with large atomic numbers. They only allow X-rays to pass through the light-transmitting hole 21 of the incident collimator 2, the light-transmitting hole 6 of the receiving collimator 4, and the positioning hole 10, and enter the detection area of ​​the array detector 5 through the receiving window of the shielding box 51 of the array detector 5, while shielding X-rays from other directions.

[0031] The sample 3 is fixed to the translation stage 31 of the sample stage, which is fixed to the Φ-angle turntable 32. The Φ-angle turntable 32 is fixed to the Ψ-angle turntable 33, and the rotation axes of the Φ-angle turntable 32 and the Ψ-angle turntable 33 are perpendicular to each other and intersect at the center 9 of the diffractometer circle. This ensures that regardless of whether the Φ-angle or Ψ-angle rotates, the measured part of the sample 3 is always located at the center 9 of the diffractometer circle. The centerline of the positioning hole 10 and the centerline of the incident collimator 2 are on a straight line and are parallel to the Z-axis of the translation stage 31 when Ψ = 0°.

[0032] In specific applications, the corresponding parameters are selected within the following ranges: the light-transmitting aperture 21 of the incident collimator 2 is a single circular or rectangular aperture; the length of the incident collimator 2 is 20mm to 200mm; and the divergence of the incident collimator 2 is 0.02° to 0.5°. The length of the collimator body 4 is 100mm to 1200mm; the angle between the inner contour 61 of its light-transmitting aperture 6 and the incident X-ray beam 7 is γ, and the value of γ ranges from 2° to 10°. The angle between the inner contour 61 and the outer contour 62 of the light-transmitting aperture 6 is δ, and the value of δ ranges from 0.5° to 6°, and γ+δ is not greater than 12°.

[0033] Using this short-wavelength characteristic X-ray diffraction measurement device, the Debye rings of the diffraction at the measured part can be directly measured, and a diffraction pattern similar to that of an X-ray diffraction flat panel camera can be obtained.

[0034] Example 2

[0035] A receiving collimator for a diffraction measurement device, such as Figure 4 and Figure 5As shown, the device includes a collimator body 4 and a light-transmitting aperture 6 disposed on the collimator body 4. The light-transmitting aperture 6 has an inner contour 61 and an outer contour 62 arranged obliquely relative to the axis of the collimator body 4. The inner contour 61 and the outer contour 62 together form a frustum-shaped photon diffraction channel or ray diffraction channel. The extension line of the inner contour 61 intersects the extension line of the outer contour 62 at the center line of the incident beam 7 of the diffraction measurement device, and the intersection point is the center of the diffractometer circle of the diffraction measurement device; the center line of the incident beam 7 coincides with the axis of the collimator body 4; the angle between the extension line of the inner contour 61 of the light-transmitting aperture 6 and the axis of the collimator body 4 is γ, and the value of γ ranges from 2° to 10°; the angle between the inner contour 61 and the outer contour 62 of the light-transmitting aperture 6 is δ, and the value of δ ranges from 0.5° to 6°, and γ + δ is not greater than 12°. The collimator body 4 has a positioning hole 10 in the middle, the axis of the positioning hole 10 coincides with the axis of the collimator body 4, and an X-ray absorber 11 is also installed in the positioning hole 10.

[0036] In practical applications, the receiving collimator of the diffraction measurement device in this invention can also be formed into a square pyramidal structure by the inner contour 61 and the outer contour 62 together forming a circle.

[0037] The diffraction device equipped with the receiving collimator of this invention can achieve multi-directional simultaneous imaging of the diffraction of a part of the sample, and simultaneously image the Debye rings or diffraction patterns of the material in a part of the sample. Based on the simultaneously imaged Debye rings or diffraction patterns, it is possible to perform rapid non-destructive testing and analysis of the phase, texture, stress, etc. of the material in a part of the sample.

Claims

1. A receiving collimator for a diffractive measuring device, comprising a collimator body (4) and a light passage aperture (6) arranged on the collimator body (4), characterized in that: The light transmission hole (6) has an inner profile (61) and an outer profile (62) arranged obliquely relative to the axis of the collimator body (4), and the inner profile (61) and the outer profile (62) together enclose a diffractive photon channel or a diffractive line channel in a frustum structure; the extension line of the inner profile (61) intersects the extension line of the outer profile (62) on the center line of the incident beam (7) of the diffractive measurement device, and the intersection point is the center of the diffractometer of the diffractive measurement device; the center line of the incident beam (7) coincides with the axis of the collimator body (4); the included angle between the extension line of the inner profile (61) of the light transmission hole (6) and the axis of the collimator body (4) is γ, and γ is in the range of 2°-10°; the included angle between the inner profile (61) and the outer profile (62) of the light transmission hole (6) is δ, and δ is in the range of 0.5°-6°; γ+δ is not greater than 12°.

2. A receiving collimator for a diffractive measurement device according to claim 1, characterized in that: The middle part of the collimator body (4) is provided with a positioning hole (10), and the axis of the positioning hole (10) coincides with the axis of the collimator body (4).

3. A receiving collimator for a diffractive measurement device according to claim 2, characterized in that: An X-ray absorber (11) is further arranged in the positioning hole (10).

4. A receiving collimator for a diffractive measuring device according to any one of claims 1 to 3, characterized in that: The frustum structure is a circular conical frustum structure or a square conical frustum structure.

5. A receiving collimator for a diffractive measurement device according to claim 4, characterized in that: The receiving collimator is made of tungsten, lead, and iron materials, so that X-rays can only pass through the light transmission hole (6) to reach the array detector or the X-ray imaging plate detection area of the diffractive measurement device, and shield X-rays from other directions.

6. A receiving collimator for a diffractive measurement device according to claim 5, characterized in that: The bottom end of the collimator body (4) is provided with an outwardly protruding ridge (63), and the plane of the ridge (63) is used to closely abut against the array detector or the X-ray imaging plate or the shielding box (51) thereof.

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