Cantilever probe station

Abstract

The application discloses a cantilever type probe station, which comprises a cantilever assembly and a probe assembly connected with the cantilever assembly; the probe assembly comprises a connecting piece, a probe hanging arm, a plurality of probe clamps and probes arranged on each probe clamp; one end of the connecting piece is connected with the cantilever assembly, and the other end is connected with the probe hanging arm; the probe clamps are sequentially arranged along the extension direction of the probe hanging arm, and the probe clamps are fixedly connected with the probe hanging arm. The cantilever type probe station can hang a plurality of probes with one cantilever, and the plurality of probes are arranged in an array, so that the simultaneous testing of a plurality of nanometer devices is realized, the testing efficiency is high, and the space can be saved to the maximum because the plurality of probes share one probe seat and one cantilever. In the photoelectric coupling testing mode, the plurality of probes have the same incidence angle, which can ensure the consistency of optical power, the photoelectric coupling testing data avoids the fluctuation caused by the difference of optical power, and the obtained testing data has more experimental value.

Description

TECHNICAL FIELD

[0001] The application discloses a cantilever probe station and belongs to the technical field of micro-nano electronic device testing. BACKGROUND

[0002] In the prior art, electrical measurement technology is usually used for testing micro-nano electronic devices. With the progress of silicon photonics integration technology, photoelectric coupling technology has been rapidly developed. Therefore, a testing method based on photoelectric coupling signals is proposed.

[0003] The testing method based on photoelectric coupling information needs to use optical signals to stimulate the to-be-tested part of the to-be-tested nano device, and the process needs to use a probe station to realize accurate positioning of the optical fiber output optical signal. The probe station in the prior art can only position a single optical fiber and can only irradiate a single device, so it is difficult to realize simultaneous testing of multiple nano devices, resulting in low testing efficiency. In the photoelectric coupling testing mode, it is difficult to ensure that multiple probes have the same incident angle and it is difficult to ensure the consistency of the optical power on the sample surface, which causes disturbance or large error in the measurement of electrical signals. SUMMARY

[0004] The application aims to provide a cantilever probe station to solve the technical problem that the probe station in the prior art can only position a single optical fiber and can only irradiate a single device, resulting in low testing efficiency. In the photoelectric coupling testing mode, multiple probes have the same incident angle, which can ensure the consistency of the optical power on the sample surface, avoid the fluctuation of electrical signals caused by the difference in optical power, and make the obtained data more valuable for experiments.

[0005] The application provides a cantilever probe station, which comprises a cantilever assembly and a probe assembly connected with the cantilever assembly.

[0006] The probe assembly comprises a connecting piece, a probe hanging arm, multiple probe clamps and probes arranged on each probe clamp.

[0007] One end of the connecting piece is connected with the cantilever assembly, and the other end is connected with the probe hanging arm.

[0008] The probe clamps are arranged in sequence along the extension direction of the probe hanging arm, and the probe clamps are fixedly connected with the probe hanging arm.

[0009] Preferably, the cantilever assembly comprises a base, a vertical arm, a cantilever and a sliding block.

[0010] The vertical arm is vertically arranged on the base.

[0011] One end of the cantilever is fixedly connected with the vertical arm, and the cantilever is perpendicular to the vertical arm.

[0012] The cantilever is provided with a horizontal sliding slot matched with the sliding block.

[0013] The sliding block is arranged in the horizontal sliding slot and rotationally connected with the connecting piece.

[0014] Preferably, the cantilever assembly further comprises a first locking screw.

[0015] The first locking screw is arranged on the sliding block and used for locking the sliding block and the connecting piece.

[0016] Preferably, the connecting piece comprises a middle shaft and a cylindrical sleeve arm.

[0017] One end of the middle shaft extends into the sliding block and is rotationally connected with the sliding block, and the other end is sleeved with the cylindrical sleeve arm.

[0018] Correspondingly, the first locking screw is used for locking the sliding block and the middle shaft.

[0019] The cylindrical sleeve arm is further connected with the probe hanging arm.

[0020] Preferably, the connecting piece further comprises a second locking screw.

[0021] The second locking screw is connected with the middle shaft and the cylindrical sleeve arm and used for fixing the relative position of the middle shaft and the cylindrical sleeve arm.

[0022] Preferably, the connecting piece further comprises a third locking screw.

[0023] The third locking screw is connected with the cylindrical sleeve arm and the probe hanging arm and used for fixing the relative position of the cylindrical sleeve arm and the probe hanging arm.

[0024] Preferably, the probe assembly further comprises a plurality of fourth locking screws.

[0025] The fourth locking screws are connected with the probe clamp and the probe hanging arm and used for fixing the probe clamp on the probe hanging arm.

[0026] The cantilever type probe station of the present application has the following beneficial effects compared with the prior art:

[0027] The cantilever type probe station of the present application can hang multiple probes with one cantilever, so that the multiple probes are arranged in an array, thereby realizing the simultaneous testing of multiple nanometer devices and improving the testing efficiency. Moreover, since the multiple probes share one cantilever, the space can be saved to the maximum extent.

[0028] The slider of this invention allows the central axis to slide and translate on the cantilever above it, thereby adjusting the position of the probe array relative to the microscope. Furthermore, the central axis can rotate 360°, enabling the output of light signals at different angles without changing the position of the probe stage. Further, the cylindrical arm can move up and down along the central axis, thus changing the light power density irradiated onto the sample surface. The tester can adjust the height according to the light power density requirements of the test sample. Even further, the relative position of the cylindrical arm and the probe hanger is adjustable, and the probe clamp can swing at a small angle relative to the probe hanger, thereby adjusting the irradiation position and light power density. This invention is a 4-DOF probe stage, with a wide range of applications, ease of use, and high testing efficiency. Attached Figure Description

[0029] Figure 1 This is a front view of the cantilever probe stage in an embodiment of the present invention;

[0030] Figure 2 This is a perspective view of the cantilever probe station in an embodiment of the present invention.

[0031] In the figure, 1 is the cantilever assembly; 11 is the base; 12 is the vertical arm; 13 is the cantilever; 14 is the slider; 15 is the horizontal slide; 16 is the first locking screw; 21 is the connector; 211 is the central shaft; 212 is the cylindrical sleeve arm; 213 is the second locking screw; 214 is the third locking screw; 22 is the probe hanging arm; 23 is the probe clamp; and 24 is the probe. Detailed Implementation

[0032] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of the invention. However, those skilled in the art will understand that the invention can be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, apparatuses, circuits, and methods are omitted so as not to obscure the description of the invention with unnecessary detail.

[0033] This invention provides a cantilever probe station, such as Figure 1 and Figure 2 As shown, it includes a cantilever assembly 1 and a probe assembly connected to the cantilever assembly 1;

[0034] The probe assembly includes a connector 21, a probe arm 22, multiple probe clamps 23, and a probe 24 disposed on each probe clamp 23.

[0035] One end of the connector 21 is connected to the cantilever assembly 1, and the other end is connected to the probe hanging arm 22;

[0036] The probe clamps 23 are arranged sequentially along the extension direction of the probe hanging arm 22, and the probe clamps 23 are fixedly connected to the probe hanging arm 22.

[0037] The existing probe base in the prior art can only realize single optical fiber irradiation, and one device is irradiated at a time. However, the current development needs to simultaneously irradiate one row or one column of a two-dimensional array for optical pulse excitation. Researchers have tried to use multiple clamps to clamp multiple optical fibers respectively in order to realize simultaneous irradiation of one row or one column of a two-dimensional array. However, due to the space occupied by the objective lens, it is difficult to place multiple probe bases and probe arms, so it is difficult to realize array irradiation by using multiple clamps to clamp multiple optical fibers respectively, and the cost is high.

[0038] Further, due to the blocking of the lens, the optical fiber needs to have an inclined angle, and the area irradiated on the device will increase, thereby reducing the optical power density and affecting the photoelectric coupling effect.

[0039] The cantilever type probe station of the present application can suspend multiple probes by using one cantilever, so that the multiple probes are arranged in an array, thereby realizing simultaneous testing of multiple nanometer devices with high testing efficiency. Moreover, since the multiple probes share one probe base and one cantilever, the cost is low, and the space can be saved to the maximum extent.

[0040] The probe hanging arm of the present application can be positioned closest to the lens, and the rotation of the sleeve arm drives the rotation of the hanging arm, so that the probe array is more easily irradiated at an approximately vertical angle to the sample, and the maximum optical power can be obtained. The precision of the electrical signal obtained by experimental testing is in the order of pA-fA, which requires that the optical power of multiple optical signals irradiated on the device surface be equal. The optical fiber array structure of the present application is easy to realize this point, so that the photoelectric coupling test has more experimental value.

[0041] The present application is applied to electrical testing without optical signals: according to the size and spacing of the electrodes of the sample to be tested, the number of probes clamped by the clamp is reduced, so that it corresponds to the spacing of the sample electrodes, facilitating the measurement of the electrical properties of the sample array.

[0042] The probe clamp of the present application can swing at a small angle, for example, swing at

-60°, 60°

[0043] Further, the cantilever assembly 1 of the present application comprises a base 11, a vertical arm 12, a cantilever 13 and a sliding block 14.

[0044] The vertical arm 12 is vertically arranged on the base 11, and the vertical arm 12 and the base 11 can be integrally connected, inserted, bolted or rotationally connected. The specific implementation form of the rotational connection can be that a rotary bearing is arranged on the base 11, the vertical arm 12 is fixedly connected with the inner ring of the rotary bearing, and a fixing mechanism is arranged on the rotary bearing to fix the relative position of the vertical arm and the base. In the embodiment of the present application, the shape of the vertical arm 12 can be a cylindrical body.

[0045] The one end of the cantilever 13 is fixedly connected with the vertical arm 12, and the cantilever 13 and the vertical arm 12 can be vertically connected, so that the extension direction of the cantilever 13 is horizontal extension.

[0046] The horizontal sliding groove 15 matched with the sliding block 14 is arranged on the cantilever 14, the sliding block 14 is arranged in the horizontal sliding groove 15 and is rotationally connected with the connecting piece 21.

[0047] Further, the cantilever assembly in the embodiment of the application further comprises a first locking screw 16, the first locking screw 16 is arranged on the sliding block 14 and is used for locking the sliding block 14 and the connecting piece 21, so as to fix the relative position of the sliding block 14 and the connecting piece 21.

[0048] Further, the connecting piece 21 of the application comprises a middle shaft 211 and a cylindrical sleeve arm 212.

[0049] One end of the middle shaft 211 extends into the sliding block 14 and is rotationally connected with the sliding block 14, and the other end of the middle shaft 211 is sleeved with the cylindrical sleeve arm 212; correspondingly, the first locking screw 16 is used for locking the sliding block 14 and the middle shaft 211.

[0050] The cylindrical sleeve arm 212 is further connected with the probe hanging arm 22.

[0051] The cylindrical sleeve arm 212 in the embodiment of the application is sleeved on the middle shaft 211, and the relative position between the two can be changed, so that the height of the array composed of the probe can be adjusted, the irradiation position and the optical power density are facilitated to be adjusted, and since it is a mechanical structure, the structure is stable and the adjustment precision is high.

[0052] The middle shaft 211 in the embodiment of the application can drive the probe hanging arm 22 below to rotate by 360°, and in use, the middle shaft 211 can be rotated according to needs.

[0053] Further, since the cylindrical sleeve arm 212 is sleeved with the middle shaft 211, the up-down movement of the cylindrical sleeve arm 212 relative to the middle shaft 211 can be realized, and the probe hanging arm 22 is further driven to move up and down, so as to adjust the irradiation position and the optical power of the optical signal.

[0054] The second locking screw 213 is connected with the middle shaft 211 and the cylindrical sleeve arm 212 and is used for fixing the relative position of the middle shaft 211 and the cylindrical sleeve arm 212.

[0055] In order to enable the probe arm 22 to move horizontally relative to the cylindrical sleeve arm 212, thereby adjusting the straight distance between the probe array and the device to be irradiated, the connector 21 in this embodiment of the invention also includes a third locking screw 214.

[0056] The third locking screw 214 is connected to the cylindrical sleeve arm 212 and the probe hanging arm 22 to fix the relative position of the cylindrical sleeve arm 212 and the probe hanging arm 22. In use, the cylindrical sleeve arm 212 and the probe hanging arm 22 can be connected at any position, such as the middle or both ends.

[0057] To enable fine-tuning of the probe, the probe assembly in this embodiment of the invention further includes a plurality of fourth locking screws;

[0058] The fourth locking screw is connected to the probe clamp 23 and the probe hanging arm 22, and is used to fix the probe clamp 23 on the probe hanging arm 22. The angle of the probe clamp 23 can be adjusted as needed.

[0059] The slider 14 of this invention allows the central axis 211 to slide and translate on the cantilever 13 above it, thereby adjusting the position of the probe array relative to the microscope. Furthermore, the central axis 211 can rotate 360°, enabling the output of light signals at different angles without changing the position of the probe stage. Further, the cylindrical arm 212 can move up and down along the central axis 211, thereby changing the light power density irradiated onto the sample surface. The tester can adjust the height according to the light power density requirements of the test sample. Even further, the horizontal relative position of the cylindrical arm 212 and the probe hanging arm 22 is adjustable, and the probe clamp 23 can swing at a small angle relative to the probe hanging arm 22, thereby adjusting the irradiation position and light power density. This invention is a 4-DOF probe stage, with a wide range of applications, ease of use, and high testing efficiency.

[0060] This invention employs a cantilever design, suspending the probe in mid-air. Only one probe holder is needed, and multiple probes can be placed. Currently, the commonly used fiber diameter is 120μm. Assuming the probe holder 23 has a diameter of 200μm, 100 fiber probes can be placed within a 2cm length. Considering the oscillation in opposite directions, it can accommodate up to 50 probes. This invention occupies little space, has low cost, can hold multiple fibers, has adjustable fiber angles, and can test sample arrays. The probe positioning in this invention can be controlled manually or automatically via a stepper motor.

[0061] The stepper motor control specifically includes: controlling the slider 14 to drive the central shaft 211 to slide on the cantilever assembly 1, controlling the rotation of the central shaft 211, controlling the cylindrical sleeve arm 212 to move up and down along the central shaft 211, controlling the movement or swing of the probe hanging arm 22 and the probe clamp 23, as well as software-controlled automatic movement and screen display, etc.

[0062] In addition, the probe clamp 23 can also be designed to swing in other directions other than along the track, increasing the freedom of movement. The front end of the probe fiber can also be equipped with a converging lens to adjust the size of the light spot.

[0063] To further verify the use effect of the cantilever probe station, a Crossbar structure of Au / semiconductor thin film / Au was prepared on a Si circle, and the width of the Au electrode line was about 500 nm, so that the cross point of the horizontal and vertical lines was 500 nm x 500 nm. A metallographic microscope was used for magnification, and the optical magnification was 500 times. The diameter of the optical fiber was about 125 μm.

[0064] In use, the height of the fiber irradiation is adjusted according to the required optical power density. The height of the cylindrical sleeve arm 212 is adjusted to meet the demand for optical power. The microscope is aligned with the sample to be measured, the middle shaft 211 is moved to the vicinity of the sample by the slider 14 on the track, the sample is irradiated with the laser fiber, and then the position of the probe hanging arm 22 is fine-tuned. The light spot is irradiated on or near the sample by rotating the middle shaft 211, and then the position of the probe clamp 23 is fine-tuned so that the light spot of the optical fiber can be observed in the ocular lens, and the light spot is accurately aligned with the sample.

[0065] The above is only a few embodiments of the present application, and does not limit the present application in any form. Although the preferred embodiments are disclosed as above, they are not intended to limit the present application. Any skilled person in the art can make some changes or modifications to the above disclosed technical content without departing from the scope of the technical solution of the present application, and such changes or modifications are equivalent to equivalent embodiments, which are within the scope of the technical solution.

Claims

1. A cantilever probe station, characterized by, The probe assembly comprises a connecting piece, a probe hanger, a plurality of probe clamps and probes arranged on each of the probe clamps. One end of the connecting piece is connected with the cantilever assembly, and the other end is connected with the probe hanger. The probe clamps are arranged in sequence along the extension direction of the probe hanger, and the probe clamps are fixedly connected with the probe hanger. The cantilever assembly comprises a base, a vertical arm, a cantilever, a sliding block and a first locking screw. The vertical arm is arranged vertically on the base. One end of the cantilever is fixedly connected with the vertical arm, and the cantilever is perpendicular to the vertical arm. A horizontal sliding groove is formed in the cantilever and matched with the sliding block. The sliding block is arranged in the horizontal sliding groove and rotationally connected with the connecting piece. The first locking screw is arranged on the sliding block and used for locking the sliding block and the connecting piece. The connecting piece comprises a middle shaft and a cylindrical sleeve arm. One end of the middle shaft extends into the sliding block and is rotationally connected with the sliding block, and the other end is sleeved with the cylindrical sleeve arm. Correspondingly, the first locking screw is used for locking the sliding block and the middle shaft. The cylindrical sleeve arm is also connected with the probe hanger, the horizontal relative position of the cylindrical sleeve arm and the probe hanger is adjustable, the probe clamps can swing at a small angle compared with the probe hanger, so as to adjust the irradiation position and the optical power density. The connecting piece further comprises a second locking screw.

2. The cantilever probe station of claim 1, wherein, The second locking screw is connected with the middle shaft and the cylindrical sleeve arm and used for fixing the relative position of the middle shaft and the cylindrical sleeve arm. The connecting piece further comprises a third locking screw.

3. The cantilever probe station of claim 1, wherein, The third locking screw is connected with the cylindrical sleeve arm and the probe hanger and used for fixing the relative position of the cylindrical sleeve arm and the probe hanger. The probe assembly further comprises a plurality of fourth locking screws.

4. The cantilever probe station of claim 1, wherein, The fourth locking screws are connected with the probe clamps and the probe hanger and used for fixing the probe clamps on the probe hanger. ​

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