Dual-mode composite ultra-precision temperature control device

Abstract

The dual-mode composite ultra-precision temperature control device belongs to the technical field of micro-environment temperature control equipment, including a sealed box and a core heating component arranged inside the sealed box; multiple groups of radiation convection dual-mode composite temperature control mechanisms are arranged on the inner wall of the sealed box, and the radiation convection dual-mode composite temperature control mechanism regulates the temperature inside the sealed box; a monitoring component for monitoring the environment inside the sealed box is arranged inside the sealed box; a controller is arranged outside the sealed box, and the controller obtains the measurement result of the monitoring component, and controls the radiation convection dual-mode composite temperature control mechanism to adjust the temperature inside the sealed box based on the measurement result. The composite control of the ambient temperature inside the sealed box is achieved through the radiation convection dual-mode composite temperature control mechanism.

Description

Technical Field

[0001] The invention belongs to the technical field of micro-environment temperature control equipment, and in particular relates to a dual-mode composite ultra-precision temperature control device. Background Art

[0002] With the continuous improvement of ultra-precision machining and measurement, disturbances in environmental parameters such as temperature, humidity, pressure and cleanliness have become key factors restricting the improvement of the accuracy and performance of ultra-precision machining equipment and measuring instruments. Ultra-precision instruments such as micro-nano coordinate machines and ultra-precision manufacturing equipment such as photolithography machines have extremely high technology density and complexity. All key indicators have reached the limit of existing technical capabilities, representing the highest level of current measurement and machining manufacturing. Ultra-precision environmental control has become the core key technology of such equipment.

[0003] In the prior art, the patent document with application number 201810171584.7 discloses a temperature control method of thermal radiation at normal pressure: the coarse temperature control clamp controls the temperature of the precision inner temperature control cylinder by thermal radiation coupling, and the precision inner temperature control cylinder controls its internal temperature by thermal radiation. This method can theoretically achieve high-precision temperature control through thermal radiation temperature control, but the thermal convection effect of air under normal pressure cannot be ignored. In the temperature control scheme of this patent, the coupling of thermal convection makes the high precision of thermal radiation temperature control not be brought into play, and the temperature control speed does not change much. The vacuum radiation temperature control scheme used in the molecular measuring machine developed by NIST has an internal pressure of 10 -5 Pa, the heat convection effect of the air can be completely ignored. The copper shell covered with the resistance heating wire wraps the measuring core. By adjusting the current, the heat load can be adjusted. The surface of the shell and the measuring core are plated with matte gold to maintain the stability of the radiation coupling between the two (1. Kramar J, Jun J, Penzes W, et al. THEMOLECULAR MEASURING MACHINE. 2008; 2. USDepartment of Commerce, NIST. Nanometer Resolution Metrology with the NIST Molecular Measuring Machine. Measurement Science & Technology.). This solution can achieve a temperature control accuracy better than ±0.001℃, but the response time of this solution is as long as several days or even months, which is difficult to meet the efficiency requirements of ultra-precision machining.

[0004] In addition, the patent document with application number 202110647092.2 discloses a high-precision temperature control device for cross-radiation convection, which adopts the temperature control method of cross-radiation convection. The liquid from the chiller is sent to the water distributor after passing through the first fine-tuning heating device and the second fine-tuning heating device. The water distributor evenly sends the liquid to the cross-radiation convection device. The flow rate of the cross-radiation convection device is adjusted by the frequency conversion of the water pump to automatically adapt to the changes in the heat source on the measuring platform, improve the heat exchange efficiency, and accurately control the temperature of the water collector through the fine-tuning heating device to achieve the purpose of controllable and adjustable temperature of the measuring platform. However, this scheme does not provide enough details of radiation convection temperature control. According to the description of the invention, it is impossible to completely decouple the convection and radiation power of the device, and it is impossible to give full play to the advantages of high-precision temperature control of thermal radiation and rapid temperature control of thermal convection.

[0005] In summary, in the face of the increasingly high requirements for micro-environment parameter control of ultra-precision instruments and large-scale ultra-precision manufacturing equipment, the traditional single temperature control method has low accuracy and long adjustment time; the composite temperature control method does not decouple the temperature control power, and cannot give full play to the advantages of temperature control accuracy and efficiency of the composite temperature control method. The above technologies cannot meet the requirements of accuracy and efficiency of ultra-precision processing equipment and measuring instruments. Summary of the invention

[0006] 1. Technical issues to be solved

[0007] In view of the deficiencies in the prior art, the present invention provides a dual-mode composite ultra-precision temperature control device, which realizes composite control of the ambient temperature inside a sealed box through a radiation convection dual-mode composite temperature control mechanism.

[0008] (II) Technical solution

[0009] To achieve the above-mentioned purpose, an embodiment of the present application provides a dual-mode composite ultra-precision temperature control device, including a sealed box and a core heating component arranged on the inner side of the sealed box; a plurality of radiation convection dual-mode composite temperature control mechanisms for regulating the temperature inside the sealed box are arranged on the inner wall of the sealed box, and the radiation convection dual-mode composite temperature control mechanism includes an insulation frame, and a plurality of mounting ports are formed in an array on the inner side of the insulation frame; radiation plates and convection components are respectively arranged in different mounting ports, and the convection component includes a convection heat exchanger detachably connected to the mounting port and a convection fan installed on one side of the convection heat exchanger; the convection heat exchanger includes a convection heat exchanger detachably connected to the mounting port. A mounting frame at the mounting port; a plurality of water-cooling pipes are formed at intervals on the inner side of the mounting frame, a convection medium outflow pipe is arranged at the upper end of the mounting frame, and a convection medium inflow pipe is arranged at the lower end of the mounting frame; the convection medium inflow pipe and the convection medium outflow pipe are respectively connected with the water-cooling pipe; the radiation plate and the convection component are arranged alternately at intervals; a monitoring component for monitoring the environment inside the sealed box is arranged on the inner side of the sealed box; a controller is arranged on the outer side of the sealed box, the controller is connected with the monitoring component, and based on the measurement result of the monitoring component, the radiation convection dual-mode composite temperature control mechanism is controlled to adjust the temperature inside the sealed box.

[0010] A dehumidification mechanism and a filtering and purifying mechanism are arranged on the inner side of the sealed box; the dehumidification mechanism includes a dehumidifier and a dehumidification drainage pipe arranged on the inner side of the sealed box, one end of the dehumidification drainage pipe is connected to the dehumidifier, and the other end is connected to the outside of the sealed box; the filtering and purifying mechanism includes a filtering and purifying host and a dust exhaust pipe arranged on the inner side of the sealed box, one end of the dust exhaust pipe is connected to the filtering and purifying host, and the other end is connected to the outside of the sealed box.

[0011] The monitoring component includes a temperature sensor, a humidity sensor, a pressure sensor and an environmental cleanliness sensor.

[0012] The outer side of the sealed box is wrapped with a heat-insulating layer.

[0013] (III) Beneficial effects

[0014] The invention provides a dual-mode composite ultra-precision temperature control device. When in use, the radiation convection dual-mode composite temperature control mechanism inside the sealed box realizes composite control of the ambient temperature inside the sealed box.

[0015] The present invention adopts a temperature control method that combines two heat transfer modes to improve temperature control accuracy and efficiency. A radiation convection dual-mode composite temperature control mechanism is installed in the sealed box of the device to perform multi-modal temperature control. When in use, the convection heat exchanger controls the temperature of the air flowing through it, and the convection fan causes the air to flow through the convection heat exchanger and delivers the temperature-controlled air to the temperature-controlled area. The radiation plate controls its own temperature by means of electrical temperature control, thereby controlling its own radiation temperature control power. The radiation convection dual-mode composite temperature control mechanism is arranged in an alternating and repetitive form, which can ensure the uniformity of the temperature field in the controlled area, thereby improving the composite temperature control effect. It solves the problem that the single temperature control method of existing instruments and equipment is difficult to take into account both temperature control accuracy and efficiency.

[0016] The present invention adopts reasonable measures to decouple the temperature control power to ensure the temperature control accuracy and efficiency of the composite temperature control method. The radiation power on the radiation plate in the sealed box of the device is controlled by the radiation plate, and the convection power in the convection component is controlled by the convection component, and the temperature control of the radiation plate and the convection component are independent of each other. There is an insulation frame between the radiation plate and the convection component to isolate the radiation plate from the convection component, which can avoid the temperature crosstalk between the radiation plate and the convection component on the radiation-convection dual-mode composite temperature control mechanism, thereby solving the problem that the radiation and convection composite temperature control power is difficult to decouple, thereby achieving the good effect of complementing the advantages of different temperature control methods in the core temperature control area, and solving the problem that the temperature control power of different temperature control methods in the composite temperature control method of existing instruments and equipment is difficult to decouple and interfere with each other, resulting in the temperature control accuracy and efficiency of the composite temperature control method being difficult to be effectively exerted. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of a dual-mode composite ultra-precision temperature control device of the present invention;

[0018] Figure 2 It is a schematic diagram of a dual-mode composite temperature control mechanism of radiation and convection in a dual-mode composite ultra-precision temperature control device of the present invention;

[0019] Figure 3 It is a front view of a protruding convection component in a protruding radiation convection dual-mode composite temperature control mechanism in a dual-mode composite ultra-precision temperature control device of the present invention;

[0020] Figure 4 It is a side view of a protruding convection component in a protruding radiation convection dual-mode composite temperature control mechanism in a dual-mode composite ultra-precision temperature control device of the present invention;

[0021] Description of the part numbers in the figure: 100 sealed box, 110 controller, 120 insulation layer, 200 core heating component, 300 radiation convection dual-mode composite temperature control mechanism, 310 insulation frame, 320 radiation plate, 330 convection component, 331 convection heat exchanger, 331a mounting frame, 331b water cooling pipe, 331c convection medium outflow pipe, 331d convection medium inflow pipe, 332 convection fan, 400 monitoring component, 500 dehumidification mechanism, 600 filtering and purification mechanism. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0023] Example

[0024] The present invention provides a dual-mode composite ultra-precision temperature control device, see Figure 1-Figure 4 , including a sealed box 100 and a core heating component 200 disposed inside the sealed box 100. The core heating component 200 is an area and component in the sealed box 100 that has high requirements on environmental parameters in ultra-precision measurement and processing and manufacturing equipment. The heat generation seriously affects the operation of the instrument and equipment. This solution can stably control the temperature of the core heating component 200. It can be understood that the sealed box 100 is relatively sealed, and there will be wiring holes or other mounting holes for connecting the equipment to the core heating component 200, and a sealing structure is provided at the wiring hole or mounting hole.

[0025] Specifically, a plurality of groups of radiation convection dual-mode composite temperature control mechanisms 300 are arranged on the inner wall of the sealed box 100, and the radiation convection dual-mode composite temperature control mechanisms 300 include an insulation frame 310, and a plurality of mounting ports are formed in an array on the inner side of the insulation frame 310; radiation plates 320 and convection components 330 are respectively arranged in different mounting ports, and the convection component 330 includes a convection heat exchanger 331 detachably connected to the mounting port and a convection fan 332 installed on one side of the convection heat exchanger 331; the convection heat exchanger 331 includes a mounting frame 331a detachably connected to the mounting port; a plurality of water-cooling pipes 331b are formed at intervals on the inner side of the mounting frame 331a, a convection medium outflow pipe 331c is arranged at the upper end of the mounting frame 331a, and a convection medium inflow pipe 331d is arranged at the lower end of the mounting frame 331a; the convection medium inflow pipe 331d and the convection medium outflow pipe 331c are respectively connected to the water-cooling pipe 331b. It can be understood that a circulating cooling medium temperature control device connected to the convection medium inlet pipe 331d and the convection medium outlet pipe 331c is provided on the outside of the sealed box 100, and the circulating cooling medium temperature control device and the convection heat exchanger 331 form a stable closed-loop reflux structure; the radiation plate 320 and the convection component 330 are arranged alternately at intervals, and the two are insulated by the insulation frame 310 to avoid temperature crosstalk between the radiation plate 320 and the convection component 330, maintain the independence of the temperature control of the radiation plate 320 and the convection component 330 on the radiation convection dual-mode composite temperature control mechanism 300, and the radiation convection dual-mode composite temperature control mechanism 300 regulates the temperature inside the sealed box 100. A monitoring component 400 is provided on the inside of the sealed box 100 for monitoring the environment inside the sealed box 100; a controller 110 is provided on the outside of the sealed box 100, and the controller 110 obtains the measurement result of the monitoring component 400, and controls the radiation convection dual-mode composite temperature control mechanism 300 to adjust the temperature inside the sealed box 100 based on the measurement result.

[0026] Among them, the radiation plate 320 controls its own temperature by means of electric temperature control, and participates in the control of the microenvironment in the sealed box 100 in the form of heat radiation. The convection heat exchanger 331 uses a circulating cooling medium to control the temperature, and the temperature-adjustable circulating cooling medium enters the water-cooling pipe 331b from the convection medium inlet pipe 331d, and finally flows out from the convection medium outlet pipe 331c. In this process, the convection fan 332 works, and the air passes through the convection heat exchanger 331 and is temperature-controlled, and participates in the control of the microenvironment in the sealed box 100 by means of convection. The two are divided by the heat insulation frame 310, which can solve the problem of mutual coupling between the radiation temperature control power and the convection temperature control power on the radiation convection dual-mode composite temperature control mechanism 300, so that the advantages of different temperature control methods can be complementary in the temperature control of the area where the core component 200 is located, and the problem that different temperature control powers are difficult to decouple and interfere with each other in the composite temperature control method of existing instruments and equipment is solved, and the temperature control accuracy and efficiency of the composite temperature control method are guaranteed.

[0027] The inner side of the sealed box 100 is provided with a dehumidification mechanism 500 and a filtering and purifying mechanism 600; the air inside the box can be further filtered and purified by the dehumidification mechanism 500 and the filtering and purifying mechanism 600. In ultra-precision environmental control, temperature and humidity are coupled to each other, and the fluctuation of humidity directly affects the stability of temperature.

[0028] The dehumidification mechanism 500 includes a dehumidification main unit and a dehumidification drainage pipe. The dehumidification main unit is located inside the sealed box 100. One end of the dehumidification drainage pipe is connected to the dehumidification main unit, and the other end is connected to the dehumidification main unit and the outside of the sealed box 100. The dehumidification mechanism 500 adopts a semiconductor refrigeration dehumidification method. The air in the sealed box 100 is sucked into the dehumidification main unit by the fan, and the water vapor in the air is condensed into water, which is then discharged through the dehumidification drainage pipe. The dehumidified air is then sent back to the sealed box 100 after being electrically heated and temperature controlled.

[0029] The filter purification mechanism 600 includes a filter purification host and a dust discharge pipe, the filter purification host is located inside the sealed box 100, one end of the dust discharge pipe is connected to the filter purification host, and the other end is connected to the outside of the sealed box 100. The filter purification host adopts an active and passive composite dust removal method, and the collected dust can be discharged to the outside of the sealed box 100 through the dust discharge pipe.

[0030] The monitoring component 400 includes a temperature sensor, a humidity sensor, a pressure sensor, and an environmental cleanliness sensor. The monitoring component 400 sends the measurement results of the environmental parameters and the circulating cooling medium parameters to the controller 110, and the controller 110 controls the radiation plate 320, the convection component 330, the dehumidification mechanism 500, and the filtering and purification mechanism 600 to achieve efficient control of the internal environmental temperature of the sealed box 100 and the temperature of the core heating component 200.

[0031] The outer side of the sealed box 100 is wrapped with a heat-insulating layer 120 . The heat-insulating layer 120 can attenuate the interference of the temperature fluctuation outside the sealed box 100 on the internal microenvironment of the sealed box 100 , thereby further improving the temperature stability inside the sealed box 100 .

[0032] The present invention provides a dual-mode composite ultra-precision temperature control device, which includes a sealed box 100 and a radiation convection dual-mode composite temperature control mechanism 300 inside the sealed box 100. The radiation convection dual-mode composite temperature control mechanism 300 is used to achieve radiation convection dual-mode composite temperature control of the ambient temperature inside the sealed box 100.

[0033] Specifically, the radiation plate 320 is provided to control its own temperature by adopting an electric temperature control method, and to control the microenvironment inside the sealed box 100 by means of heat radiation. The convection component 330 is provided to transport the air at the convection heat exchanger 331 to the area where the core heating component 200 is located through the convection fan 332, so as to realize high-precision temperature control of the area where the core heating component 200 is located. This solves the problem that the single temperature control method of the existing instrument equipment is difficult to improve the temperature control accuracy and efficiency at the same time.

[0034] The present invention adopts reasonable measures to decouple the temperature control power to ensure the temperature control accuracy and efficiency of the composite temperature control method. The radiation power on the radiation plate 320 in the sealed box of the device is controlled by the radiation plate 320, and the convection power in the convection component 330 is controlled by the convection component 330. The temperature control of the radiation plate 320 and the convection component 330 is independent of each other, and there is a heat insulation frame 310 between the radiation plate 320 and the convection component 330 to isolate the radiation plate 320 from the convection component 330, which can avoid the temperature crosstalk between the radiation plate 320 and the convection component 330 on the radiation convection dual-mode composite temperature control mechanism 300, thereby solving the problem that the radiation and convection temperature control powers are difficult to decouple, and the advantages of different temperature control methods are complementary in the core temperature control area, solving the problem that the single temperature control power of the composite temperature control method of the existing instrument equipment is difficult to decouple and interfere with each other, affecting the temperature control accuracy and efficiency of the composite temperature control method.

[0035] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, or an indirect connection through an intermediate medium, or the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

Claims

1. A dual-mode composite ultra-precision temperature control device, Features: The invention comprises a sealed box (100) and a core heating component (200) arranged inside the sealed box (100); a plurality of radiation convection dual-mode composite temperature control mechanisms (300) for regulating the temperature inside the sealed box (100) are arranged on the inner wall of the sealed box (100); the radiation convection dual-mode composite temperature control mechanisms (300) comprise a heat insulation frame (310), and a plurality of mounting openings are formed in an array inside the heat insulation frame (310); radiation plates (320) and convection components (330) are respectively arranged in different mounting openings, and the convection components (330) comprise a convection heat exchanger (331) detachably connected to the mounting opening and a convection fan (332) installed on one side of the convection heat exchanger (331); the convection heat exchanger (331) comprises a mounting frame (331a) detachably connected to the mounting opening; and a plurality of mounting openings (331a) are formed at intervals inside the mounting frame (331a). A plurality of water cooling pipes (331b); a convection medium outflow pipe (331c) is arranged at the upper end of the mounting frame (331a); and a convection medium inflow pipe (331d) is arranged at the lower end of the mounting frame (331a); the convection medium inflow pipe (331d) and the convection medium outflow pipe (331c) are respectively connected to the water cooling pipe (331b); the radiation plate (320) and the convection assembly (330) are arranged alternately; a monitoring assembly (400) for monitoring the environment inside the sealed box (100) is arranged inside the sealed box (100); and a controller (110) is arranged outside the sealed box (100); the controller (110) is connected to the monitoring assembly (400), and controls the radiation convection dual-mode composite temperature control mechanism (300) to adjust the temperature inside the sealed box (100) based on the measurement result of the monitoring assembly (400).

2. The dual-mode composite ultra-precision temperature control device according to claim 1, Features: A dehumidification mechanism (500) and a filtering and purifying mechanism (600) are arranged inside the sealed box (100); the dehumidification mechanism (500) comprises a dehumidifier and a dehumidification drainage pipe arranged inside the sealed box (100), one end of the dehumidification drainage pipe is connected to the dehumidifier, and the other end is connected to the outside of the sealed box (100); the filtering and purifying mechanism (600) comprises a filtering and purifying main unit and a dust discharge pipe arranged inside the sealed box (100), one end of the dust discharge pipe is connected to the filtering and purifying main unit, and the other end is connected to the outside of the sealed box (100).

3. The dual-mode composite ultra-precision temperature control device according to claim 1, Features: The monitoring component (400) comprises a temperature sensor, a humidity sensor, a pressure sensor and an environmental cleanliness sensor.

4. The dual-mode composite ultra-precision temperature control device according to claim 1, Features: The outer side of the sealed box (100) is wrapped with a thermal insulation layer (120).

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