A double crystal bar swing mechanism based on multi-wire cutting

Abstract

The present invention relates to the technical field of multi-wire cutting. Specifically, it relates to a double crystal bar swing mechanism based on multi-wire cutting, which includes two rotating shafts arranged parallel to each other on a horizontal plane. The axial directions of the two rotating shafts are both in the front-rear direction. The side view reference plane is perpendicular to the horizontal plane. It also includes a swing rod unit that drives the two rotating shafts to rotate towards each other. The swing rod unit includes a three-stage connecting rod unit and a driving motor. The driving motor is connected to the three-stage connecting rod unit, and the three-stage connecting rod unit is connected to the two rotating shafts. Crystal bar units are arranged on both rotating shafts; through the continuous rotation of one driving motor, and then through the transmission of power by the three-stage connecting rod unit, the two rotating shafts are driven to reciprocate and swing within a limited angle towards each other, so that the two sets of crystal bar units fixed on the two rotating shafts swing accordingly, realizing a feeding method for double crystal bars in a feeding system. By using one driving motor to simultaneously cut the double crystal bars, the cutting efficiency can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of multi-wire cutting, and more particularly, to a double crystal bar swing mechanism based on multi-wire cutting. Background Art

[0002] A wafer is the basic raw material required for semiconductor components. Wafer production includes two major steps: crystal bar manufacturing and wafer manufacturing. A crystal bar is the raw material for making chips and comes in three sizes: 4 inches (diameter 10 cm), 8 inches (diameter 20 cm), and 12 inches (diameter 30 cm). A crystal bar is a cylinder, and inside this cylinder is pure silicon, which is the main raw material for semiconductor integrated circuits.

[0003] In the prior art, the way of swinging the crystal bar in the feeding system is to drive a single crystal bar to swing by a single motor, resulting in low cutting efficiency of the crystal bar. Summary of the Invention

[0004] An object of the present invention is to provide a double crystal bar swing mechanism based on multi-wire cutting, which can realize simultaneous cutting of two crystal bars through a driving motor, thereby improving the cutting efficiency of the crystal bars.

[0005] The technical solution of the present invention is realized as follows:

[0006] A double crystal bar swing mechanism based on multi-wire cutting includes two rotating shafts arranged in parallel on a horizontal plane, the axis directions of the two rotating shafts are both in the front-rear direction, the two rotating shafts are symmetrically arranged on the left and right sides of a side view reference plane, the side view reference plane is perpendicular to the horizontal plane, and further includes a swing rod unit for driving the two rotating shafts to rotate towards each other. The swing rod unit includes a three-stage link unit and a driving motor. The driving motor is connected to the three-stage link unit, the three-stage link unit is connected to the two rotating shafts, and crystal bar units are respectively installed on the two rotating shafts. The driving motor can drive the three-stage link unit to drive the two rotating shafts to rotate towards each other, and further drive the relative swing of the two crystal bar units.

[0007] Further, the three-stage link unit includes a guide rod, a second transmission rod, a first transmission rod, and a driving rod arranged in sequence in the front-rear direction. A first chute is provided on the rear side surface of the first transmission rod, a second chute is provided on the front side surface of the first transmission rod, a third chute penetrating in the front-rear direction is provided on the second transmission rod, and a guide groove penetrating in the front-rear direction is provided on the guide rod;

[0008] The three-stage link unit further includes a driving shaft and a transmission shaft. The output shaft of the driving motor is connected to the left end of the driving rod. The driving motor is used to drive the movement of the three-stage link unit and the two rotating shafts to drive the relative swing of the two crystal bar units;

[0009] The right end of the driving rod is fixedly connected to one end of the driving shaft, the other end of the driving shaft is slidably connected to the first chute, the left end of the first transmission rod is fixedly connected to the left-side rotating shaft, the transmission shaft sequentially passes through the second chute, the third chute and the guiding chute and is slidably connected thereto, and the axial directions of the driving shaft and the transmission shaft are always in the front-rear direction.

[0010] Furthermore, it further includes a mounting frame, and the three-stage link unit and the driving motor are mounted on the mounting frame.

[0011] Furthermore, the mounting frame includes a rectangular frame, and the rectangular frame includes a front side plate, a rear side plate, a left side plate and a right side plate. A first mounting plate is arranged at the top of the front side plate, a second mounting plate is arranged at the top of the rear side plate, an upper connecting shaft is fixedly arranged between the first mounting plate and the second mounting plate, a third mounting plate is arranged at the bottom of the rear side plate, a lower connecting shaft is fixedly arranged on the third mounting plate, two rotating shafts are arranged between the front side plate and the rear side plate, one end of the rotating shaft is rotatably connected to the front side plate and the other end is rotatably connected to the rear side plate, and the upper connecting shaft, the lower connecting shaft and the rotating shaft are arranged in parallel;

[0012] The three-stage link unit is arranged in the inner space of the rectangular frame, and the top end of the guiding rod is fixedly connected to the upper connecting shaft and the bottom end is fixedly connected to the lower connecting shaft. The driving motor is mounted on the outer side surface of the rear side plate and the output shaft of the driving motor penetrates through the rear side plate.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] In each action of cutting the ingot in this application, by setting a driving motor to rotate continuously, and then transmitting the power through the three-stage link unit to drive two rotating shafts to swing reciprocally within a limited angle in opposite directions, and further enabling two sets of ingot units fixed on the two rotating shafts to swing accordingly, a method of swinging two ingots in a feeding system is realized. By using one driving motor to cut two ingots simultaneously, the cutting efficiency can be improved. Description of the Drawings

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0016] Figure 1 It is the front view axonometric drawing of the double-ingot swinging mechanism of the present invention;

[0017] Figure 2 This is the rear axonometric view of the double crystal rod swing mechanism of the present invention;

[0018] Figure 3 This is the axonometric view of the swing rod unit of the present invention;

[0019] Figure 4 This is the cross-sectional view of the driving part of the present invention;

[0020] Figure 5 This is the cross-sectional view of the transmission part of the present invention;

[0021] Figure 6 This is the cross-sectional view of the rotating shaft part of the present invention;

[0022] Figure 7 This is the front axonometric view of the mounting bracket of the present invention;

[0023] Figure 8 This is the rear axonometric view of the mounting bracket of the present invention;

[0024] Figure 9 This is the front axonometric view of the guide rod of the present invention;

[0025] Figure 10 This is the rear axonometric view of the guide rod of the present invention;

[0026] Figure 11 This is the axonometric view of the driving rod of the present invention;

[0027] Figure 12 This is the axonometric view of the second transmission rod of the present invention;

[0028] Figure 13 This is the rear axonometric view of the first transmission rod of the present invention;

[0029] Figure 14 This is the front axonometric view of the first transmission rod of the present invention;

[0030] Figure 15 This is the axonometric view of the drive shaft of the present invention;

[0031] Figure 16 This is the axonometric view of the transmission shaft of the present invention;

[0032] Figure 17 This is a schematic diagram of the driving rod of the three-stage link unit of the present invention at the positive left end;

[0033] Figure 18 This is a schematic diagram of the driving rod of the three-stage link unit of the present invention at the positive upper end;

[0034] Figure 19 This is a schematic diagram of the driving rod of the three-stage link unit of the present invention at the positive right end;

[0035] Figure 20Schematic diagram when the driving rod of the three - link unit of the present invention is at the exact lower end;

[0036] Figure 21 Schematic diagram of the structure where the double crystal rods of the present invention swing inward at a limited angle;

[0037] Figure 22 Schematic diagram of the structure where the double crystal rods of the present invention swing outward at a limited angle;

[0038] Figure 23 Axonometric view of the crystal rod unit of the present invention.

[0039] In the figure: (Explanation of reference numerals in the drawings)

[0040] 1 - Swing rod unit; 101 - Mounting frame; 1011 - Rotating shaft mounting hole; 1012 - Upper end mounting hole; 1013 - Lower end mounting hole;

[0041] 102 - Upper connecting shaft; 103 - Guide rod; 1031 - Guide groove; 1032 - Upper perforation; 1033 - Lower perforation; 1034 - Limit groove;

[0042] 104 - Lower connecting shaft; 105 - Driving motor; 106 - Driving rod; 1061 - First shaft hole; 1062 - Second shaft hole; 107 - First transmission rod; 1071 - First chute; 1072 - Second chute; 1073 - Third shaft hole; 108 - Second transmission rod; 1081 - Third chute; 1082 - Fourth shaft hole; 109 - Transmission shaft; 1091 - Fourth bearing; 1092 - Third bearing; 1093 - Second bearing; 1094 - Ring groove; 110 - Spacer; 111 - First retaining ring; 112 - Driving shaft; 1121 - First bearing; 1122 - Shaft part; 113 - Rotating shaft; 114 - Gland;

[0043] 121 - Front side plate; 122 - Right side plate; 123 - Rear side plate; 124 - Left side plate; 125 - First mounting plate; 126 - Second mounting plate; 127 - Third mounting plate;

[0044] 2 - Crystal rod unit; 201 - Slide rail; 202 - Slide block; 203 - Liner; 204 - Crystal rod; 3 - Side view reference plane. Detailed implementation manners

[0045] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some but not all of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated in the drawings here can be arranged and designed in various different configurations.

[0046] Accordingly, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0047] It should be noted that like reference numerals and letters denote like items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0048] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and should not be construed as indicating or implying relative importance.

[0049] In addition, the terms "horizontal", "vertical", "overhanging", etc. do not mean that the components are required to be absolutely horizontal or overhanging, but may be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but may be slightly inclined.

[0050] In the description of the present invention, it should also be noted that unless otherwise clearly specified and defined, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] The following will describe in detail some embodiments of the present invention with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0052] Embodiment

[0053] Referring to Figures 1 - 23 , this embodiment provides a technical solution to solve the defects in the prior art as follows:

[0054] A double crystal bar swing mechanism based on multi-wire cutting, comprising two rotating shafts 113 arranged in parallel on a horizontal plane, the axial directions of the two rotating shafts 113 are both in the front-back direction, the two rotating shafts 113 are symmetrically arranged on the left and right sides of the side view reference plane 3, and the side view reference plane 3 is perpendicular to the horizontal plane.

[0055] The double crystal bar swing mechanism further includes a swing rod unit 1 for driving the two rotating shafts 113 to rotate towards each other. The swing rod unit 1 includes a three-stage connecting rod unit and a driving motor 105. The driving motor 105 is connected to the three-stage connecting rod unit, and the three-stage connecting rod unit is connected to the two rotating shafts 113. Crystal bar units 2 are both arranged on the two rotating shafts 113. The driving motor 105 can drive the three-stage connecting rod unit to drive the two rotating shafts 113 to rotate towards each other, thereby driving the relative swing of the two crystal bar units 2.

[0056] Specifically, as Figure 3 shown, the three-stage connecting rod unit includes a guide rod 103, a second transmission rod 108, a first transmission rod 107, and a driving rod 106 arranged in sequence in the front-back direction. A first chute 1071 is provided on the rear side of the first transmission rod 107, and a second chute 1072 is provided on the front side of the first transmission rod 107. The second transmission rod 108 is provided with a through third chute 1081 in the front-back direction, and the guide rod 103 is provided with a through guide groove 1031 in the front-back direction.

[0057] In a preferred implementation manner of this embodiment: the first chute is a waist-shaped groove, the second chute is a waist-shaped groove, and the third chute is a waist-shaped hole.

[0058] The three-stage connecting rod unit further includes a driving shaft 112 and a transmission shaft 109. The output shaft of the driving motor 105 is connected to the left end of the driving rod 106. The driving motor 105 is used to drive the movement of the three-stage connecting rod unit and the two rotating shafts 113 to drive the relative swing of the two crystal bar units 2;

[0059] The right end of the driving rod 106 is fixedly connected to one end of the driving shaft 112. The other end of the driving shaft 112 is slidably connected to the first chute 1071. The left end of the first transmission rod 107 is fixedly connected to the rotating shaft 113 on the left side. The transmission shaft 109 passes through the second chute 1072, the third chute 1081, and the guide groove 1031 in sequence and is slidably connected thereto. Whether the driving shaft 112 and the transmission shaft 109 are in a static or moving state, their axial directions are always in the front-back direction.

[0060] The driving motor 105 can drive the rotation of the driving rod 106 and cause the driving shaft 112 to move along the first sliding groove 1071, so that the first transmission rod 107 and the left rotating shaft 113 rotate synchronously. At the same time, the rotation of the first transmission rod 107 drives the transmission shaft 109 to move along the guiding groove 1031 and the second sliding groove 1072, so that the second transmission rod 108 and the right rotating shaft 113 rotate synchronously. The two rotating shafts 113 rotate towards each other, thereby driving the relative swing of the ingot unit 2.

[0061] The double ingot swing mechanism further includes a mounting frame 101, and the three-stage link unit and the driving motor 105 are mounted on the mounting frame 101.

[0062] The mounting frame 101 includes a rectangular frame, and the rectangular frame includes a front side plate 121, a rear side plate 123, a left side plate 124 and a right side plate 122. A first mounting plate 125 is provided at the top of the front side plate 121, a second mounting plate 126 is provided at the top of the rear side plate 123, an upper connecting shaft 102 is fixedly arranged between the first mounting plate 125 and the second mounting plate 126, a third mounting plate 127 is provided at the bottom of the rear side plate 123, a lower connecting shaft 104 is fixedly arranged on the third mounting plate 127, two rotating shafts 113 are arranged between the front side plate 121 and the rear side plate 123, one end of the rotating shaft 113 is rotatably connected to the front side plate 121 and the other end is rotatably connected to the rear side plate 123, and the upper connecting shaft 102, the lower connecting shaft 104 and the rotating shaft 113 are arranged in parallel with each other;

[0063] The three-stage link unit is arranged in the inner space of the rectangular frame, and the top end of the guiding rod 103 is fixedly connected to the upper connecting shaft 102 and the bottom end is fixedly connected to the lower connecting shaft 104. The driving motor 105 is mounted on the outer side surface of the rear side plate 123 and the output shaft of the driving motor 105 penetrates through the rear side plate 123. It should be noted that a spacer 110 is sleeved on the output shaft of the driving motor 105, and the two side surfaces of the spacer 110 are respectively in contact with the inner side surface of the rear side plate 123 and the rear side surface of the driving rod 106.

[0064] Specifically, as Figure 7 and Figure 8 shown, two rotating shaft mounting holes 1011 are provided on both the left and right sides of the front side plate 121 and both the left and right sides of the rear side plate 123. The rotating shaft mounting holes 1011 on the left and right sides of the front side plate 121 are correspondingly arranged with the rotating shaft mounting holes 1011 on the left and right sides of the rear side plate 123. The four rotating shaft mounting holes 1011 are used to mount two rotating shafts 113, and both ends of the rotating shaft 113 are rotatably connected to the rotating shaft mounting holes 1011 through bearings. After the rotating shafts 113 are installed, gland plates 114 are provided at both ends of the rotating shafts 113 and locked by the gland plates 114.

[0065] Specifically, as Figure 7 and Figure 8 shown, upper positioning holes 1012 are provided on both the first mounting plate 125 and the second mounting plate 126. Both ends of the upper connecting shaft 102 are fixedly installed in the two upper positioning holes 1012, and the axis of the installed upper connecting shaft 102 is located on the side view reference plane 3.

[0066] Specifically, as Figures 7 - 10 shown, an upper through hole 1032 is provided at the top end of the guide rod 103, and a lower through hole 1033 is provided at the bottom end. A lower mounting hole 1013 is provided on the third mounting plate 127. One end of the lower connecting shaft 104 is fixedly installed in the lower mounting hole 1013, and the other end is fixedly installed in the lower through hole 1033 of the guide rod 103. The upper connecting shaft 102 passes through the upper through hole 1032 and is fixedly connected to the guide rod 103.

[0067] It should be noted that a limiting groove 1034 is provided on the rear side of the guide rod 103 in the left - right direction. The limiting groove 1034 has a certain height and includes an inner bottom surface, an upper limiting wall, and a lower limiting wall. The front side of the second transmission rod 108 is in contact with the inner bottom surface of the limiting groove 1034. Since the second transmission rod 108 moves along with the up - and - down movement of the transmission shaft 109 during the movement process, the upper limiting wall is used to block and limit the upward movement of the second transmission rod 108, and the lower limiting wall is used to block and limit the downward movement of the second transmission rod 108.

[0068] Specifically, as Figure 11 and Figure 15 shown, first shaft holes 1061 and second shaft holes 1062 are respectively provided at the left and right ends of the driving rod. The output shaft of the driving motor 105 is fixedly installed in the first shaft hole 1061. One end of the driving shaft 112 is a shaft portion 1122, and the other end is provided with a first bearing 1121. The shaft portion 1122 of the driving shaft 112 is fixedly installed in the second shaft hole 1062, and the first bearing 1121 on the driving shaft 112 is installed in the first sliding groove 1071 of the first transmission rod 107. A third shaft hole 1073 is provided at the left end of the first transmission rod 107. The left - hand rotating shaft 113 passes through the third shaft hole 1073 and is fixedly connected to the first transmission rod 107. A fourth shaft hole 1082 is provided at the right end of the second transmission rod 108. The right - hand rotating shaft 113 passes through the fourth shaft hole 1082 and is fixedly connected to the second transmission rod 108.

[0069] Specifically, as Figure 16As shown in the figure, a baffle is provided at one end of the transmission shaft 109. The baffle abuts against the front side of the guide rod 103 to prevent the transmission shaft 109 from falling off the guide groove 1031. A second bearing 1093, a third bearing 1092, and a fourth bearing 1091 are provided on the transmission shaft 109. The transmission shaft 109 is slidably connected to the second chute 1072 through the second bearing 1093, slidably connected to the third chute 1081 through the third bearing 1092, and slidably connected to the guide groove 1031 through the fourth bearing 1091. A first retaining ring 111 is provided between the second bearing 1093 and the third bearing 1092 to space the first transmission rod 107 and the second transmission rod 108. The front side of the second transmission rod 108 is in contact with the inner bottom surface of the limit groove 1034 through the first retaining ring 111. A second retaining ring is provided between the third bearing 1092 and the fourth bearing 1091 to space the second transmission rod 108 and the guide rod 103. More specifically, annular grooves 1094 are provided between the second bearing 1093 and the third bearing 1092, and between the third bearing 1092 and the fourth bearing 1091 on the transmission shaft 109. The first retaining ring 111 and the second retaining ring are respectively arranged in the two annular grooves 1094.

[0070] As Figure 23 shown in the figure, the ingot unit 2 includes a slide rail 201, a slide seat 202, a lining plate 203, and an ingot 204. The slide rail 201 is connected to the rotating shaft 113. At the same time, a chute is provided on the slide rail 201. The slide seat 202 is clamped in the chute so that the slide rail 201 is slidably connected to the slide seat 202. The slide seat 202 is connected to the ingot 204, and the lining plate 203 is provided between the slide seat 202 and the ingot 204. Specifically, one side surface of the lining plate 203 is adhesively fixed to the slide seat 202, and the other side is adhesively fixed to the ingot 204. The ingot unit 2 is arranged at the bottom of the rotating shaft 113 and swings with its rotation. Specifically, the slide rail 201 and the rotating shaft 113 are fixedly connected by bolts.

[0071] Figures 17 - 20 Shown as: When the driving rod 106 rotates counterclockwise for one week, the trajectory lines of each transmission rod and the transmission bearing pin 109 are shown;

[0072] The relative swing of the double ingots 204 is divided into a swing towards each other (inward swing) and a reverse swing (outward swing) Figure 21 Shown as the limit position where the double ingots 204 swing inward at a limited angle; Figure 22 Shown as the limit position where the double ingots 204 swing outward at a limited angle. During the relative swing of the double ingots 204, they reciprocate between their inward swing and outward swing.

[0073] The present invention discloses a double crystal bar swinging mechanism based on multi-wire cutting, and provides a material swinging method for a double crystal bar in a feeding system of a multi-wire cutting device. The double crystal bar 204 can reciprocate between swinging in opposite directions and swinging in the same direction. During its reciprocating motion, through the cutting action of the cutting wire, the double crystal bar 204 can be cut simultaneously, improving the cutting efficiency. The present invention provides a double crystal bar swinging mechanism: a driving motor 105 is provided to rotate continuously, and the power is transmitted through a three-stage connecting rod unit to drive two rotating shafts 113 to swing reciprocally within a limited angle in opposite directions, and then two sets of crystal bar units 2 fixed on the two rotating shafts 113 swing accordingly, realizing a material swinging method for the double crystal bar in a feeding system. At the same time, the cutting effect formed by the double crystal bar 204 swinging in opposite directions and the cutting wire reciprocatingly feeding is more prominent. Relying on the continuous rotation of a single driving motor 105 and transmitting the power through a three-stage connecting rod unit, the material swinging method for the double crystal bar 204 in the feeding system is realized, improving the cutting efficiency of the crystal bar 204, simplifying the control and effectively enhancing the stability.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

[0075] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A double crystal bar swinging mechanism based on multi-wire cutting, comprising two rotating shafts (113) arranged in parallel on a horizontal plane, the axial directions of the two rotating shafts (113) are both in the front-back direction, the two rotating shafts (113) are symmetrically arranged on the left and right sides of a side view reference plane (3), the side view reference plane (3) is perpendicular to the horizontal plane, and is characterized in that, It further includes a swing rod unit (1) for driving the two rotating shafts (113) to rotate towards each other. The swing rod unit (1) includes a three-stage link unit and a driving motor (105). The driving motor (105) is connected to the three-stage link unit, and the three-stage link unit is connected to the two rotating shafts (113). The two rotating shafts (113) are each used for mounting a crystal bar unit (2). The driving motor (105) can drive the three-stage link unit to drive the two rotating shafts (113) to rotate towards each other, thereby driving the relative swinging of the two crystal bar units (2). The three-stage link unit includes a guide rod (103), a second transmission rod (108), a first transmission rod (107), and a driving rod (106) arranged in sequence in the front-rear direction. A first sliding groove (1071) is formed on the rear side surface of the first transmission rod (107), and a second sliding groove (1072) is formed on the front side surface of the first transmission rod (107). The second transmission rod (108) is provided with a third sliding groove (1081) penetrating in the front-rear direction, and the guide rod (103) is provided with a guide groove (1031) penetrating in the front-rear direction. The three-stage link unit further includes a driving shaft (112) and a transmission shaft (109). The output shaft of the driving motor (105) is connected to the left end of the driving rod (106). The driving motor (105) is used to drive the movement of the three-stage link unit and the two rotating shafts (113) to drive the relative swinging of the two crystal bar units (2). The right end of the driving rod (106) is fixedly connected to one end of the driving shaft (112). The other end of the driving shaft (112) is slidably connected to the first sliding groove (1071). The left end of the first transmission rod (107) is fixedly connected to the left rotating shaft (113). The transmission shaft (109) sequentially passes through the second sliding groove (1072), the third sliding groove (1081), and the guide groove (1031) and is slidably connected thereto. The axial directions of the driving shaft (112) and the transmission shaft (109) are always in the front-rear direction.

2. The swing mechanism of a double crystal bar based on multi-wire cutting according to claim 1, wherein It further includes a mounting frame (101). The three-stage link unit and the driving motor (105) are mounted on the mounting frame (101).

3. The double crystal bar swing mechanism based on multi-wire cutting according to claim 2, characterized in that, The mounting bracket (101) includes a rectangular frame, the rectangular frame includes a front side plate (121), a right side plate (122), a rear side plate (123) and a left side plate (124) that are sequentially connected end to end. A first mounting plate (125) is provided at the top of the front side plate (121), a second mounting plate (126) is provided at the top of the rear side plate (123), an upper connecting shaft (102) is fixedly arranged between the first mounting plate (125) and the second mounting plate (126), a third mounting plate (127) is provided at the bottom of the rear side plate (123), a lower connecting shaft (104) is fixedly arranged on the third mounting plate (127), two rotating shafts (113) are arranged between the front side plate (121) and the rear side plate (123), one end of the rotating shaft (113) is rotatably connected to the front side plate (121) and the other end is rotatably connected to the rear side plate (123), and the upper connecting shaft (102), the lower connecting shaft (104) and the rotating shaft (113) are arranged in parallel with each other; The three-stage link unit is arranged in the internal space of the rectangular frame, and the top end of the guide rod (103) is fixedly connected to the upper connecting shaft (102), and the bottom end is fixedly connected to the lower connecting shaft (104). The driving motor (105) is installed on the outer side surface of the rear side plate (123), and the output shaft of the driving motor (105) penetrates the rear side plate (123).

4. The double crystal bar swinging mechanism based on multi-wire cutting according to claim 3, characterized in that, The left side plate (124) and the right side plate (122) are symmetrically arranged with respect to the side view reference plane (3), and the axes of the output shaft of the driving motor (105) and the transmission shaft (109) are both located on the side view reference plane (3).

5. The dual crystal bar swinging mechanism based on multi-wire cutting according to claim 1, characterized in that, The ingot unit (2) includes a slide rail (201), a slide seat (202) and an ingot (204). The slide rail (201) is connected to the rotating shaft (113), and at the same time, the slide rail (201) is slidably connected to the slide seat (202), and the slide seat (202) is connected to the ingot (204).

6. The dual crystal bar swing mechanism based on multi-wire cutting according to claim 1, characterized in that A first bearing (1121) is arranged on the driving shaft (112), and the driving shaft (112) is slidably connected to the first chute (1071) through the first bearing (1121).

7. The swing mechanism of a double crystal bar based on multi-wire cutting according to claim 1, characterized in that, A baffle is arranged at one end of the transmission shaft (109) to prevent the transmission shaft (109) from falling off the guide groove (1031).

8. The swing mechanism of the double crystal bars based on multi-wire cutting according to claim 1, characterized in that, A second bearing (1093), a third bearing (1092) and a fourth bearing (1091) are arranged on the transmission shaft (109). The transmission shaft (109) is slidably connected to the second chute (1072) through the second bearing (1093), slidably connected to the third chute (1081) through the third bearing (1092), and slidably connected to the guide groove (1031) through the fourth bearing (1091); A first retaining ring (111) is arranged between the second bearing (1093) and the third bearing (1092) for spacing the first transmission rod (107) and the second transmission rod (108); A second retaining ring is provided between the third bearing (1092) and the fourth bearing (1091) for spacing the second transmission rod (108) and the guide rod (103).

9. The swing mechanism of the double crystal bars based on multi-wire cutting according to claim 1, wherein, A first mounting hole (1073) is provided at the left end of the first transmission rod (107), and the left shaft (113) is mounted in the first mounting hole (1073) and fixedly connected to the first transmission rod (107); A second mounting hole (1082) is provided at the right end of the second transmission rod (108), and the right shaft (113) is mounted in the second mounting hole (1082) and fixedly connected to the second transmission rod (108).

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