End cap gripper for gas cylinders

Abstract

An end cap holder can include a base block and a holding block. The base block can be configured to provide a torque to an end cap that can be located at a nozzle of a gas cylinder for connecting the end cap with the nozzle / detaching the end cap from the nozzle. An angle correction groove can be formed in a first surface of the base block oriented toward the end cap. The holding block can be rotatably accommodated in the angle correction groove to hold the end cap. The holding block can selectively form a point contact with the base block to transmit the torque of the base block to the end cap. Accordingly, the holding block can accurately hold the end cap obliquely with respect to a vertical axis or a horizontal axis.

Description

[0001] Cross-references to related applications

[0002] This application claims priority to Korean Patent Application No. 10-2021-0089550, filed on July 8, 2021, with the Korean Intellectual Property Office (KIPO), the contents of which are incorporated herein by reference in their entirety. Technical Field

[0003] The example embodiment relates to an end cap holder for a gas cylinder. More specifically, the example embodiment relates to an end cap holder configured to connect an end cap to a nozzle of a gas cylinder / detach an end cap from a nozzle of a gas cylinder. Background Technology

[0004] Various gases are typically used to manufacture semiconductor devices. These gases can be stored in gas cylinders. The gas cylinders may include nozzles configured to inject gas and valves configured to open and close the nozzles. The nozzles can be sealed with end caps. The end caps can be automatically connected to / disconnected from the nozzles via torque supplied from a changer. The torque can be transmitted to the end caps via a clamp configured to hold them in place.

[0005] According to relevant technology, when the valve can be tilted relative to the vertical axis, the end cap can also be tilted relative to the vertical axis. Therefore, the end cap holder may not be able to accurately hold the end cap. Summary of the Invention

[0006] An example embodiment provides an end cap holder for gas cylinders that can accurately hold tilted end caps.

[0007] According to an example embodiment, an end cap holder for a gas cylinder can be provided. The end cap holder may include a base block and a retaining block. The base block may provide torque, configured to attach / detach the end cap from a nozzle located at a nozzle on the gas cylinder, to an end cap. An angle correction groove may be located on a first surface of the base block oriented toward the end cap. The retaining block may be rotatably received in the angle correction groove to hold the end cap. The retaining block may selectively form point contact with the base block to transmit torque from the base block to the end cap.

[0008] According to an example embodiment, the retaining block can be rotatably accommodated in an angle correction slot, thereby allowing the retaining block to accurately hold the end cap at an angle relative to either a vertical or horizontal axis. Therefore, the time required for assembling / removing the end cap can be reduced. Attached Figure Description

[0009] The exemplary embodiments will be understood more clearly from the following detailed description taken in conjunction with the accompanying drawings. Figures 1 to 8 The examples are non-limiting, as described herein.

[0010] Figure 1This is an exploded perspective view showing a gas cylinder having an end cap holder according to an example embodiment;

[0011] Figure 2 This is a perspective view showing an end cap holder according to an example embodiment;

[0012] Figure 3 It is shown by Figure 2 A three-dimensional view of the end cap held by the end cap holder in the middle;

[0013] Figure 4 It is shown Figure 2 Side view of the end cap holder in the middle;

[0014] Figure 5 It is shown Figure 4 A cross-sectional view of the end cap holder in the middle;

[0015] Figure 6 It is along Figure 4 A sectional view taken by line A-A' in the middle;

[0016] Figure 7 It is shown by Figure 6 A cross-sectional view of the end cap held by the end cap holder; and

[0017] Figure 8 yes Figure 7 An enlarged sectional view of part "B" in the diagram. Detailed Implementation

[0018] The exemplary embodiments will be explained in detail below with reference to the accompanying drawings.

[0019] Figure 1 This is an exploded perspective view showing a gas cylinder having an end cap holder according to an example embodiment. Figure 2 This is a perspective view showing an end cap holder according to an example embodiment. Figure 3 It is shown by Figure 2 A three-dimensional view of the end cap held by the end cap holder.

[0020] Reference Figures 1 to 3 Valve 20 can be installed at the upper end of gas cylinder 10. Nozzle 30 can be installed horizontally at valve 20. End cap 40 can be installed at nozzle 30. End cap holder 100 can be configured to selectively hold end cap 40.

[0021] In the example embodiment, the axial direction of valve 20 may be a vertical direction V. The axial direction of end cap 40, which is substantially perpendicular to the valve 20, may be a first horizontal direction H1. A second horizontal direction H2 may be substantially perpendicular to the first horizontal direction H1. Furthermore, the first surface may be oriented toward end cap 40. The second surface may be opposite to the first surface.

[0022] When the gas cylinder 10 is replaceable, the end cap 40 can be separated from the nozzle 30 using the end cap holder 100 of the replacement device. A gas supply line can be connected to the nozzle 30 to supply gas to the gas cylinder 10. After gas supply, the end cap 40 can be connected to the nozzle 30 using the end cap holder 100. The end cap holder 100 can be configured to transmit the torque of the replacement device to the end cap 40.

[0023] During the connection and disconnection of the end cap 40, the valve 20 may tilt relative to the vertical direction V and / or the second horizontal direction H2. Therefore, the end cap 40 may also tilt relative to the vertical direction V and / or the second horizontal direction H2. Conventional end cap holders may not be able to accurately hold the tilted end cap 40. However, the end cap holder 100 of the example embodiment may have the function of correcting the tilt angle of the end cap 40 to accurately hold the tilted end cap 40.

[0024] Figure 4 It is shown Figure 2 Side view of the end cap holder in the middle. Figure 5 It is shown Figure 4 A cross-sectional view of the end cap holder in the middle. Figure 6 It is along Figure 4 The sectional view taken by line A-A' in the middle. Figure 7 It is shown by Figure 6 A cross-sectional view of the end cap held by the end cap holder. Figure 8 yes Figure 7 An enlarged sectional view of part "B" in the diagram.

[0025] Reference Figures 4 to 8 The end cap holder 100 may include a base block 110, a retaining block 120 and / or a stop block 130.

[0026] The base block 110 may be cylindrical. Therefore, the base block 110 may have an axial direction corresponding to the first horizontal direction H1. The base block 110 may be configured to provide torque to the end cap 40 for the changer.

[0027] The base block 110 may include an angle correction groove 118. The angle correction groove 118 may be formed on a first surface of the base block 110 oriented toward the end cap 40. In an example embodiment, the angle correction groove 118 may be cylindrical, but is not limited thereto.

[0028] In an example embodiment, base block 110 may include a first block 112, a second block 114, and / or a disc coupling 116. An angle correction groove 118 may be formed at the second block 114. The disc coupling 116 may be arranged between the first block 112 and the second block 114 to connect the first block 112 and the second block 114 to each other to allow relative movement. The disc coupling 116 may include a plurality of discs overlapping each other. The disc coupling 116 may have functions for correcting misalignment between the end cap 40 and the end cap holder 100 and for transmitting torque. Alternatively, base block 110 may include a single block.

[0029] The retaining block 120 may be configured to retain the end cap 40. When the end cap 40 may have a hexagonal bolt shape, the retaining block 120 may include a hexagonal retaining nut 122 configured to retain the end cap 40. The retaining nut 122 may be formed on a first surface of the retaining block 120 oriented toward the end cap 40.

[0030] The retaining block 120 can be partially accommodated in the angle correction groove 118 of the base block 110. That is, the second surface of the retaining block 120 can enter the angle correction groove 118. Conversely, the first surface of the retaining block 120 can protrude from the angle correction groove 118 toward the end cap 40 in the first horizontal direction H1. Therefore, the retaining nut 122 on the first surface of the retaining block 120 can also protrude from the angle correction groove 118 toward the end cap 40 in the first horizontal direction H1. Therefore, the diameter of the retaining block 120 can be slightly smaller than the diameter of the angle correction groove 118.

[0031] In the example embodiment, the retaining block 120 can be rotatably accommodated in the angle correction groove 118. For example, the retaining block 120 can be rotatably accommodated in the angle correction groove 118 with a first horizontal direction H1 as the center. Furthermore, the retaining block 120 can be rotatably accommodated in the angle correction groove 118 with a vertical direction V and / or a second horizontal direction H2 as the center. That is, the outer peripheral surface of the retaining block 120 may not contact the inner peripheral surface of the angle correction groove 118, allowing the retaining block 120 to be slightly tilted in the angle correction groove 118 with the vertical direction V and / or the second horizontal direction H2 as the center. By tilting the retaining block 120 in the angle correction groove 118 with the vertical direction V and / or the second horizontal direction H2 as the center, the retaining block 120 can approach the end cap 40 to accurately align the retaining block 120 with the end cap 40, which is tilted relative to the vertical direction V and / or the second horizontal direction H2. As a result, the retaining nut 122 of the retaining block 120 can be inserted into the inclined end cap 40, so that the retaining block 120 can accurately retain the end cap 40.

[0032] Furthermore, the retaining block 120 can be movably accommodated in the angle correction groove 118 relative to the center of the angle correction groove 118. Therefore, although the center of the retaining block 120 may not be aligned with the center of the end cap 40, the center of the retaining block 120 can be aligned with the center of the end cap 40 during the process of the retaining block 120 approaching the end cap 40, so that the retaining block 120 can accurately retain the end cap 40.

[0033] To connect / disconnect the end cap 40 to the gas cylinder 10, the retaining block 120 may have the function of transmitting the torque of the base block 110 to the end cap 40. The retaining block 120 may be configured to selectively form point contact with the base block 110.

[0034] For example, a plurality of flat direct contact surfaces 117 may be formed on the inner peripheral surface of the base block 110. The contact surfaces 117 may be spaced apart from each other with uniform gaps. The retaining block 120 may include a plurality of corner contact portions 124. Each of the contact portions 124 may correspond to both ends of a linear surface formed on the inner peripheral surface of the retaining block 120. That is, when the linear surface may be partially formed on the inner peripheral surface of the retaining block 120, the corner portions located at both ends of the linear surface may be formed by the contact portions 124. The contact portions 124 may be spaced apart from each other with uniform gaps.

[0035] As described above, because the retaining block 120 can be rotatably accommodated in the angle correction groove 118, the outer peripheral surface of the retaining block 120 may not contact the inner peripheral surface of the base block 110. That is, because the contact portion 124 may be located in the angle correction groove 118, the contact portion 124 may also not contact the contact surface 117.

[0036] When the base block 110 is rotatable after the end cap 40 is held in place by the retaining block 120, at least one of the contact portions 124 may form point contact with the contact surface 117. The contact portion 124 may have a radius longer than the radius of the contact surface 117. Therefore, after the contact portion 124 forms point contact with the contact surface 117, the retaining block 120 may not rotate about the first horizontal direction H1. Thus, the torque of the base block 110 can be applied to the end cap 40 through the retaining block 120.

[0037] The stop block 130 may be disposed on the first surface of the base block 110. The stop block 130 may be annular. Therefore, the stop block 130 may rotate together with the base block 110. The inner diameter of the stop block 130 may be slightly longer than the outer diameter of the retaining block 120. Therefore, the retaining block 120 may pass through the annular stop block 130.

[0038] The stop block 130 may be configured to mitigate or prevent the retaining block 120 in the angle correction groove 118 from loosening toward the end cap 40 in a first horizontal direction H1. The stop block 130 may include a stop member 132 formed from the inner peripheral surface of the stop block 130 toward the center of the angle correction groove 118. The stop member 132 may block a step formed on the outer peripheral surface of the retaining block 120 to mitigate or prevent the retaining block 120 from loosening from the angle correction groove 118.

[0039] Additionally, a plurality of elastic members 140 may be arranged in the angle correction groove 118. The elastic members 140 may be configured to elastically support the retaining block towards the center of the base block 110, such that the retaining block 120 is located at the center of the base block 110. Each of the elastic members 140 may be fixed to the inner surface of the angle correction groove 118 to elastically support the retaining block towards the center of the base block 110. To apply a uniform elastic force to the retaining block 120, the elastic members 140 may be evenly spaced apart from each other. In an example embodiment, the elastic members 140 may include leaf springs, but are not limited thereto. For example, the elastic members 140 may include rubber.

[0040] In an example embodiment, each of the elastic members 140 may be located between adjacent contact portions 124 of the retaining block 120, but is not limited thereto. Furthermore, each of the elastic members 140 may be arranged in a receiving groove 119 formed on the outer peripheral surface of the retaining block 120.

[0041] According to an example embodiment, the retaining block can be rotatably accommodated in an angle correction groove, allowing the retaining block to accurately hold the end cap at an angle relative to the vertical or horizontal axis. Therefore, the time required to assemble / remove the end cap can be reduced.

[0042] The foregoing is illustrative of exemplary embodiments and should not be construed as limiting thereto. While some exemplary embodiments have been described, those skilled in the art will readily understand that many modifications can be made to the exemplary embodiments without substantially departing from the novel teachings and advantages of the inventive concept. Therefore, all such modifications are intended to be included within the scope of the inventive concept as defined in the claims. In the claims, the term "means plus function" is intended to cover structures described herein as performing said functions, and includes not only structural equivalents but also equivalent structures. Therefore, it should be understood that the foregoing is illustrative of the various exemplary embodiments and should not be construed as limiting to the specific exemplary embodiments disclosed, and modifications to the disclosed exemplary embodiments and other exemplary embodiments are intended to be included within the scope of the appended claims.

Claims

1. An end cap holder for a gas cylinder, the end cap holder comprising: A base block configured to apply torque for connecting / disconnecting the end cap at the nozzle of the gas cylinder to the end cap, the base block including an angle correction groove on a first surface of the base block oriented toward the end cap; as well as A retaining block, rotatably accommodated within the angle correction groove, includes a retaining nut configured to hold the end cap, and is configured to selectively form point contact with the base block to transmit the torque of the base block to the end cap. The retaining block is rotatably accommodated in the angle correction groove, centered on a second horizontal direction substantially perpendicular to a first horizontal direction corresponding to the axial direction of the end cap.

2. The end cap holder according to claim 1, wherein, The retaining block is rotatably accommodated in the angle correction slot with a vertical direction substantially perpendicular to the first horizontal direction as its center.

3. The end cap holder according to claim 2, wherein, The retaining block can be accommodated in the angle correction groove in a movable manner relative to the center of the angle correction groove.

4. The end cap holder according to claim 1, wherein, Multiple flat direct contact surfaces are formed on the inner peripheral surface of the base block, and multiple angular contact portions configured to selectively make point contact with the multiple flat direct contact surfaces are formed on the outer peripheral surface of the retaining block.

5. The end cap holder according to claim 4, wherein, Each of the plurality of corner contact portions corresponds to both ends of a linear surface formed on the outer peripheral surface of the retaining block.

6. The end cap holder according to claim 1, wherein, The basic block includes: The first piece; The second part includes the angle correction groove; and A disc coupling is arranged between the first and second blocks to connect the first and second blocks to each other, thereby allowing relative movement.

7. The end cap holder of claim 1, further comprising a stop block at the first surface of the base block, the stop block being configured to prevent the retaining block from disengaging from the angle correction groove toward the end cap.

8. The end cap holder according to claim 7, wherein, The stop block includes a stop member that protrudes from the inner surface of the stop block toward the retaining block to prevent the retaining block from becoming loose.

9. The end cap holder of claim 1 further comprises a plurality of elastic members that elastically support the retaining block toward the center of the base block on the inner surface of the angle correction groove.

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