Static Calibration Device for Micro-Nano Thin Film Thermal Sensors and Its Usage Method

Abstract

The present invention belongs to the technical field of sensor calibration, and relates to a static calibration device for a micro-nano thin film thermal sensor and a method for using the same. The static calibration device includes a fixed pipe sleeve, a rotating positioning chuck, and a sensor test tube for placing the sensor. The rotating positioning chuck is provided with an opening penetrating through its interior, and the sensor test tube is arranged in the opening and extends through the opening into the fixed pipe sleeve. A handle is provided on the outer positioning scale disc for rotating and adjusting the position of the sensor test tube. The static calibration device for the micro-nano thin film thermal sensor in the present invention is not only applicable to the static calibration of non-standard and standard temperature sensors, but also can be used as a fixture for testing and verification in a dry calibration furnace, and can obtain the axial and radial temperature uniformity in the effective temperature field of the dry furnace or the constant temperature bath, which is beneficial to evaluating the temperature field stability of the dry furnace or the constant temperature bath, so as to improve the accuracy of the sensor test calibration by the constant temperature equipment and enhance the convenience of the test.

Description

Technical Field

[0001] The present invention belongs to the technical field of sensor calibration, and relates to a static calibration device for a micro-nano thin film thermal sensor and a method for using the same. Background Art

[0002] Micro-nano thin film thermal sensors have the characteristics of small designable size, small heat capacity, and fast thermal response, and are increasingly widely used in the field of transient temperature measurement. Micro-nano thin film thermal sensors can not only replace traditional thermal sensors, but are also more suitable for measuring transient change thermal parameters on the surface of an object and in a small-size space. With the increasing demand for rapid temperature measurement in the industrial and military fields, the preparation and performance research of micro-nano thin film thermal sensors have received more attention from scholars.

[0003] With the improvement of the requirement for rapid temperature measurement in the temperature measurement field, micro-nano thin film temperature sensors are increasingly widely used, and higher requirements are put forward for the accuracy and accuracy of the static characteristic calibration of micro-nano thin film sensors. How to accurately calibrate the static characteristics of micro-nano thin film temperature sensors has become an urgent problem to be solved.

[0004] At present, the encapsulation size and encapsulation sleeve of armored thermocouples are designed and manufactured in accordance with relevant specifications. However, the structure and encapsulation of micro-nano thin film temperature sensors are mainly designed according to the application scenario, and the shell is a customized size, which is different from standard parts. In order to accurately calibrate micro-nano thin film temperature sensors and improve the test compatibility of dry calibration furnaces, it is urgent to design a calibration fixture that not only meets the working specifications of the calibration furnace but also can be adapted to and compatible with the test calibration of non-standard sensors. Summary of the Invention

[0005] In view of this, the purpose of the present invention is to solve the above problems and provide a static calibration device for a micro-nano thin film thermal sensor and a method for using the same.

[0006] To achieve the above purpose, the present invention provides the following technical solutions:

[0007] A static calibration device for a micro-nano thin film thermal sensor includes a fixed sleeve, a rotating positioning chuck, and a sensor test tube for placing the sensor;

[0008] The fixed sleeve is used to be placed in a dry furnace or a constant temperature bath during calibration; a high-temperature resistant non-rigid heat preservation layer is provided inside the fixed sleeve;

[0009] The rotating positioning chuck includes a positioning scale disk, a heat preservation disk, and a connecting pipe. There are two positioning scale disks, namely an outer positioning scale disk and an inner positioning scale disk. The heat preservation disk is arranged between the outer positioning scale disk and the inner positioning scale disk; the inner positioning scale disk is arranged at one end of the connecting pipe and is rotatably connected thereto; the connecting pipe is arranged inside the fixed sleeve and is fixedly connected to the heat preservation layer;

[0010] The rotating positioning chuck is provided with an opening penetrating through its interior, and the sensor test tube is arranged in the opening and extends through the opening into the fixed sleeve;

[0011] A handle is provided on the outer positioning scale disk for rotating and adjusting the position of the sensor test tube.

[0012] Furthermore, there are multiple openings, which are radially distributed on different-diameter pitch circles along the radial direction of the rotating positioning chuck for positioning the position in the dry furnace during sensor calibration.

[0013] Furthermore, the openings distributed on the same pitch circle have the same diameter, and as the diameter of the pitch circle increases, the diameter of the openings on the pitch circle also increases; the diameter of the sensor test tube corresponds to the diameter of the opening.

[0014] Furthermore, the included angle between two adjacent openings on each pitch circle is 30°.

[0015] Furthermore, the material of the heat insulation layer and the heat insulation disk is any one of high-temperature fiber board, aerogel felt, high-temperature cotton, and alumina ceramics. The heat insulation layer and the heat insulation disk are non-rigid structures, with good size compatibility and good material recovery, and can achieve good sealing and heat insulation effects.

[0016] Furthermore, the diameter of the sensor test tube is 5 - 20 mm to adapt to sensors of different sizes.

[0017] Furthermore, the material of the sensor test tube is high-temperature resistant corundum or quartz glass, and the length of the sensor test tube is 150 - 360 mm.

[0018] Furthermore, a scale is engraved on the outer surface of the sensor test tube for assisting in positioning the depth of the sensor immersed in the constant temperature bath or the dry furnace.

[0019] Furthermore, the fixed sleeve is made of high-temperature resistant corundum material, and its outer surface is coated with high-temperature aerogel felt for heat insulation treatment.

[0020] A usage method of a static calibration device for a micro-nano thin film sensor, using the above-mentioned static calibration device for a micro-nano thin film sensor to conduct verification in a dry furnace or a constant temperature bath, includes the following steps:

[0021] S1. Place the fixed sleeve in the dry furnace or the constant temperature bath, and select a suitable sensor test tube according to the size and quantity of the standard sensor;

[0022] S2. Place the sensor at the bottom of the sensor test tube. Align the connecting tube of the rotating positioning chuck with the fixed sleeve and install it in the dry furnace or constant temperature bath. Place the sleeve with the standard sensor in an opening of appropriate size. Determine the depth or radial position of the sensor immersed in the dry furnace or constant temperature bath according to the scale on the outer wall of the sensor test tube.

[0023] S3. Connect the standard sensor to the corresponding electrical measuring instrument. Control the temperature increase of the dry furnace and the constant temperature bath. After the temperature field is stable, record the temperature distribution of the temperature field at the initial placement position of the standard sensor.

[0024] S4. Conduct a radial temperature field stability test: Adjust the depth of the standard sensor test tube entering the constant temperature bath or dry furnace. After the temperature field is stable, record the temperature value of the temperature field at this immersion depth. Adjust the depth of the standard sensor and record the temperature distribution of the temperature field at different immersion depths in turn.

[0025] S5. Conduct an axial temperature field stability test: According to the insertion hole position of the standard sensor on the rotating positioning chuck, rotate the rotating positioning chuck by a set angle. After the temperature field is stable, record the temperature value. Adjust the angle of the rotating positioning chuck in turn to change the distribution angle of the standard sensor in the dry furnace or constant temperature bath, and record the temperature values of the temperature field at different angles.

[0026] The beneficial effects of the present invention are as follows:

[0027] 1) The static calibration device for the micro-nano thin film thermal sensor in the present invention is not only applicable to the static calibration of non-standard and standard temperature sensors, but can also be used as a fixture for testing and verification in a dry calibration furnace, and can obtain the axial and radial temperature uniformity in the effective temperature field of the dry furnace or constant temperature bath, which is beneficial to evaluating the temperature field stability of the dry furnace or constant temperature bath, so as to improve the accuracy of the temperature sensor test calibration by the constant temperature equipment and enhance the convenience of the test.

[0028] 2) The calibration device in the present invention can make the operation of the sensor more convenient and the test more accurate during the test calibration. It can adapt to the comparative tests of sensors with different sizes and different insertion depths and the standard device. When this device is used for small-batch test calibration operations in experiments, it has the characteristics of simple structure and convenient operation.

[0029] Other advantages, objectives and features of the present invention will be described to some extent in the subsequent description, and to some extent, will be obvious to those skilled in the art based on the study of the following text, or can be taught from the practice of the present invention. The objectives and other advantages of the present invention can be realized and obtained through the following description. Description of the Drawings

[0030] To make the objectives, technical solutions, and advantages of the present invention more clear, the following will provide a preferred and detailed description of the present invention in conjunction with the accompanying drawings, where:

[0031] Figure 1 It is a schematic diagram of the static calibration device in the present invention;

[0032] Figure 2 It is a schematic diagram of the distribution state of the sensor test tubes in the present invention;

[0033] Figure 3 It is a schematic diagram of the rotating positioning chuck;

[0034] Figure 4 It is a schematic diagram of the heat preservation ring;

[0035] Figure 5 It is a schematic diagram of the sensor test tube.

[0036] Reference numerals: 101 - handle; 102 - outer positioning scale disk; 103 - heat preservation disk; 104 - connecting pipe; 105 - fixed sleeve; 201 - sensor test tube; 301 - opening. Specific embodiments

[0037] The following uses specific specific examples to illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the diagrams provided in the following embodiments only schematically illustrate the basic concept of the present invention. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0038] Among them, the accompanying drawings are only for illustrative purposes, showing only schematic diagrams, rather than physical diagrams, and should not be construed as a limitation to the present invention; for better illustrating the embodiments of the present invention, some components in the accompanying drawings will be omitted, enlarged, or reduced, which does not represent the dimensions of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the accompanying drawings may be omitted.

[0039] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components; in the description of the present invention, it should be understood that if there are terms such as "upper", "lower", "left", "right", "front", "rear", etc. indicating the orientation or positional relationship, they are based on the orientation or positional relationship shown in the accompanying drawings. This is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the accompanying drawings are only for illustrative purposes and cannot be understood as a limitation of the present invention. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0040] Please refer to Figures 1 to 5 , which is a static calibration device for a micro-nano thin film thermal sensor, including a fixed pipe sleeve, a rotating positioning chuck, and a sensor test tube 201 for placing the sensor; the fixed pipe sleeve is used to be placed in a dry furnace or a constant temperature bath during calibration; a high-temperature resistant non-rigid thermal insulation layer is arranged inside the fixed pipe sleeve;

[0041] Among them, the rotating positioning chuck includes a positioning scale disk, a thermal insulation disk 103, and a connecting pipe 104. There are two positioning scale disks, namely an outer positioning scale disk 102 and an inner positioning scale disk. The thermal insulation disk 103 is arranged between the outer positioning scale disk 102 and the inner positioning scale disk; the inner positioning scale disk is arranged at one end of the connecting pipe 104 and is rotatably connected thereto; the connecting pipe 104 is installed inside the fixed pipe sleeve and is fixedly connected to the thermal insulation layer through a high-temperature structural adhesive;

[0042] An opening 301 penetrating through its interior is arranged on the rotating positioning chuck. The sensor test tube 201 is arranged in the opening 301 and extends through the opening 301 into the fixed pipe sleeve; a handle 101 is installed on the outer positioning scale disk 102 for rotating and adjusting the position of the sensor test tube 201.

[0043] Among them, there are multiple openings 301, which are radially distributed along the radial direction of the rotating positioning chuck on different diameter pitch circles for different position positioning of the sensor during calibration in the dry furnace. The diameters of the openings 301 distributed on the same pitch circle are the same, and as the diameter of the pitch circle increases, the diameter of the openings 301 on the pitch circle also increases; the diameter of the sensor test tube 201 corresponds to the diameter of the opening 301. The angle between two adjacent openings 301 on each pitch circle is 30°.

[0044] In this embodiment, the materials of the thermal insulation layer and the thermal insulation disk 103 can be selected from any one of high-temperature fiber board, aerogel felt, high-temperature cotton, and alumina ceramics. The thermal insulation layer and the thermal insulation disk 103 are non-rigid structures, with good size compatibility and good material recovery, and can achieve good sealing and heat preservation effects.

[0045] The material of the sensor test tube 201 is high-temperature resistant corundum or quartz glass. The diameter of the sensor test tube 201 is 5 - 20 mm, and the length is 150 - 360 mm to adapt to sensors of different sizes. A scale is engraved on the outer surface of the sensor test tube 201 for auxiliary positioning of the depth of the sensor immersed in the constant temperature bath or dry furnace.

[0046] Among them, the fixed tube sleeve is made of high-temperature resistant corundum, and its outer surface is coated with high-temperature aerogel felt for heat insulation treatment.

[0047] In this embodiment, the static calibration device can calibrate at least 6 sensors of the same size simultaneously, and the test points are axially symmetrically distributed.

[0048] A method for using a static calibration device for a micro-nano thin film sensor. When using the static calibration device for a micro-nano thin film sensor in this embodiment to conduct dry furnace or constant temperature bath verification, it includes the following steps:

[0049] S1. Place the fixed tube sleeve in the dry furnace or constant temperature bath, and select a suitable sensor test tube 201 according to the size and quantity of the standard sensor.

[0050] S2. Place the sensor at the bottom of the sensor test tube 201. Align the connecting tube 104 of the rotating positioning chuck with the fixed sleeve 105 and install and fix it in the dry furnace or constant temperature bath. Place the sleeve with the standard sensor in the opening 301 of the appropriate size, and determine the depth or radial position of the sensor immersed in the dry furnace or constant temperature bath according to the scale on the outer wall of the sensor test tube 201.

[0051] S3. Connect the standard sensor to the corresponding electrical measuring instrument, control the temperature rise of the dry furnace and constant temperature bath, and record the temperature distribution of the temperature field at the initial placement position of the standard sensor after the temperature field is stable.

[0052] S4. Conduct a radial temperature field stability test: Adjust the depth of the sensor test tube 201 entering the constant temperature bath or dry furnace. After the temperature field is stable, record the temperature value of the temperature field at this immersion depth, adjust the depth of the standard sensor, and record the temperature distribution of the temperature field at different immersion depths in turn.

[0053] S5. Conduct an axial temperature field stability test: According to the insertion hole position of the standard sensor on the rotating positioning chuck, rotate the rotating positioning chuck by a certain angle. After the temperature field is stable, record the temperature value. Adjust the angle of the rotating positioning chuck in turn to change the distribution angle of the standard sensor in the dry furnace or constant temperature bath, and record the temperature values of the temperature field at different angles.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the purpose and scope of the present technical solution, and they should all be covered within the scope of the claims of the present invention.

Claims

1. A static calibration device for a micro-nano thin film thermal sensor, characterized in that: It includes a fixed tube sleeve, a rotating positioning chuck, and a sensor test tube for placing sensors. The fixed tube sleeve is used to be placed in a dry furnace or a constant temperature bath during calibration; a heat-resistant non-rigid thermal insulation layer is provided inside the fixed tube sleeve. The rotating positioning chuck includes a positioning scale disk, a thermal insulation disk, and a connecting tube. There are two positioning scale disks, namely an outer positioning scale disk and an inner positioning scale disk. The thermal insulation disk is arranged between the outer positioning scale disk and the inner positioning scale disk; the inner positioning scale disk is arranged at one end of the connecting tube and is rotatably connected thereto; the connecting tube is arranged inside the fixed tube sleeve and is fixedly connected to the thermal insulation layer. The rotating positioning chuck is provided with an opening penetrating through its interior. The sensor test tube is arranged in the opening and extends through the opening into the fixed tube sleeve. A handle is provided on the outer positioning scale disk for rotating and adjusting the position of the sensor test tube. There are multiple openings, which are radially distributed on different diameter pitch circles in a radial pattern of the rotating positioning chuck for positioning the position of the sensor in the dry furnace during calibration; a scale is engraved on the outer surface of the sensor test tube for auxiliary positioning of the depth of the sensor immersed in the constant temperature bath or the dry furnace.

2. The static calibration device for the micro-nano thin film thermal sensor according to claim 1, characterized in that: The diameters of the openings distributed on the same pitch circle are the same, and as the diameter of the pitch circle increases, the diameters of the openings on the pitch circle also increase accordingly. The diameter of the sensor test tube corresponds to the diameter of the opening.

3. The static calibration device for the micro-nano thin film thermal sensor according to claim 2, characterized in that: The angle between two adjacent openings on each pitch circle is 30°.

4. The static calibration device for the micro-nano thin film thermal sensor according to claim 1, characterized in that: The materials of the thermal insulation layer and the thermal insulation disk are any one of high-temperature fiber board, aerogel felt, high-temperature cotton, and alumina ceramics.

5. The static calibration device for the micro-nano thin film thermal sensor according to claim 1, characterized in that: The diameter of the sensor test tube is 5 - 20 mm.

6. The static calibration device for the micro-nano thin film thermal sensor according to claim 1, characterized in that: The material of the sensor test tube is heat-resistant corundum or quartz glass, and the length of the sensor test tube is 150 - 360 mm.

7. The static calibration device for the micro-nano thin film thermal sensor according to claim 1, characterized in that: The fixed tube sleeve is made of heat-resistant corundum material, and its outer surface is coated with high-temperature aerogel felt for heat insulation treatment.

8. A method for using a static calibration device of a micro-nano thin film thermal sensor according to any one of claims 1 to 7, characterized in that: Using the static calibration device for the micro-nano film thermal sensor for calibration in a dry furnace or a constant temperature bath includes the following steps: S1. Place the fixed tube sleeve in the dry furnace or the constant temperature bath, and select a suitable sensor test tube according to the size and quantity of the standard sensor. S2. Place the sensor at the bottom of the sensor test tube, align the connecting tube of the rotating positioning chuck with the fixed sleeve and install it and fix it in the dry furnace or the constant temperature bath. Place the sleeve with the standard sensor in the suitable-sized opening, and determine the depth or radial position of the sensor immersed in the dry furnace or the constant temperature bath according to the scale on the outer wall of the sensor test tube. S3. Connect the standard sensor to the corresponding electrical measuring instrument, control the temperature rise of the dry furnace and the constant temperature bath, and record the temperature distribution of the temperature field at the initial placement position of the standard sensor after the temperature field is stable. S4. Conduct a radial temperature field stability test: Adjust the depth of the standard sensor test tube immersed in the constant temperature bath or the dry furnace. After the temperature field is stable, record the temperature value of the temperature field at this immersion depth, and adjust the depth of the standard sensor to record the temperature distribution of the temperature field at different immersion depths in turn. S5. Conduct axial temperature field stability test: According to the insertion hole positions of the standard sensors on the rotating positioning chuck, rotate the rotating positioning chuck by a set angle. After the temperature field stabilizes, record the temperature values. Then, sequentially adjust the angle of the rotating positioning chuck to change the distribution angle of the standard sensors in the dry furnace or constant temperature bath, and record the temperature values of the temperature field at different angles.

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