A sample rotation system and method

Abstract

The present disclosure provides a sample rotation system and method. The sample rotation system includes a rotation device, and the rotation device includes: a first carrier connected to the sample; a driving part connected to the first carrier, the driving part being configured to drive the first carrier to rotate, and the first carrier driving the sample to rotate from an initial position to a target position; a collection device configured to collect the rotation state of the sample; and a control unit electrically connected to the driving part, the control unit being configured to control the operation of the driving part. In the present disclosure, the driving part drives the first carrier to rotate, and the first carrier drives the sample to rotate to the target position, completing the rapid flipping of the sample and saving time. Moreover, rotating the sample to the target position facilitates the reverse cutting process, effectively improving the success rate and efficiency of reverse cutting.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor technology, and in particular, to a sample rotation system and method. Background Art

[0002] Currently, in the field of semiconductor manufacturing technology, when analyzing the inside of a semiconductor device, a sample needs to be prepared and a transmission electron microscope (TEM) needs to be configured to observe the internal microstructure of the sample and achieve the testing and analysis of the sample.

[0003] When observing and testing a sample slice, the TEM uses a dual beam focused ion beam (Dual beamFIB). If there are significant differences in height or atomic sequence size of species on the same surface of the sample, it will cause the curtaining effect, which will in turn affect the accuracy of the test results. Summary of the Invention

[0004] The following is an overview of the subject matter described in detail in the present disclosure. This overview is not intended to limit the scope of protection of the claims.

[0005] The present disclosure provides a sample rotation system and method.

[0006] A first aspect of the present disclosure provides a sample rotation system, which includes:

[0007] A rotating device, the rotating device includes:

[0008] A first carrier, connected to the sample;

[0009] A driving part, connected to the first carrier, the driving part is configured to drive the first carrier to rotate, and the first carrier drives the sample to rotate from an initial position to a target position;

[0010] An acquisition device, the acquisition device is configured to acquire the rotation state of the sample;

[0011] A control unit, the control unit is electrically connected to the driving part, and the control unit is configured to control the operation of the driving part.

[0012] A second aspect of the present disclosure provides a sample rotation method, the method includes:

[0013] Controlling the first carrier to receive the sample;

[0014] Driving the first carrier to rotate, so that the first carrier drives the sample to rotate from an initial position to a target position;

[0015] Collect the rotational state of the sample;

[0016] Based on the rotational state of the sample, determine whether the sample has rotated to the target position.

[0017] In the sample rotation system and method provided by the embodiments of the present disclosure, within the sample rotation system, the driving part drives the first carrier to rotate, and the first carrier drives the sample to rotate to the target position, completing the rapid flipping of the sample and saving time. And rotating the sample to the target position facilitates the reverse cutting process, effectively improving the reverse cutting success rate and reverse cutting efficiency.

[0018] Other aspects will be apparent after reading and understanding the drawings and the detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings incorporated in and constituting a part of this specification illustrate embodiments of the present disclosure and, together with the description, are used to explain the principles of the embodiments of the present disclosure. In these drawings, like reference numerals are used to represent like elements. The drawings in the following description are some embodiments of the present disclosure, not all embodiments. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0020] Figure 1 is a schematic structural diagram of a rotating device shown according to an exemplary embodiment.

[0021] Figure 2 is a schematic structural diagram of a limiting part shown according to an exemplary embodiment.

[0022] Figure 3 is a schematic structural diagram of a reference body shown according to an exemplary embodiment.

[0023] Figure 4 is a schematic structural diagram of a reference unit shown according to an exemplary embodiment.

[0024] Figure 5 is a schematic structural diagram of a sample rotation system shown according to an exemplary embodiment.

[0025] Figure 6 is a flowchart of a sample rotation method shown according to an exemplary embodiment.

[0026] Figure 7 is a flowchart of a sample rotation method shown according to an exemplary embodiment.

[0027] Figure 8 is a flowchart of a sample rotation method shown according to an exemplary embodiment.

[0028] Figure 9 is a flowchart of a sample rotation method shown according to an exemplary embodiment.

[0029] Figure 10 is a flowchart of a sample rotation method shown according to an exemplary embodiment.

[0030] Figure 11 is a block diagram of a computer device shown according to an exemplary embodiment.

[0031] Reference numerals:

[0032] 1. Rotating device;

[0033] 11. First carrier; 12. Driving part; 13. Acquisition device; 14. Control unit; 15. Stage;

[0034] 16. Limiting part; 161. First side; 162. Second side; 163. Through hole;

[0035] 2. Reference body; 3. Reference unit;

[0036] 4. Transfer mechanism; 5. Second carrier; 6. Machine table. Detailed implementation manners

[0037] To make the objectives, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present disclosure. Apparently, the described embodiments are some, but not all, of the embodiments of the present disclosure. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present disclosure without creative efforts shall fall within the protection scope of the present disclosure. It should be noted that, without conflict, the embodiments in the present disclosure and the features in the embodiments may be combined with each other arbitrarily.

[0038] In the prior art, the thickness of a sample affects the imaging quality of the sample test under TEM. With a suitable sample thickness, a satisfactory TEM observation effect can be obtained.

[0039] Exemplarily, the sample is bonded to a substrate, and after the substrate is ground and removed, sample preparation is performed. This method is time-consuming and cannot perform fixed-point cutting.

[0040] Exemplarily, in another method, a tangent method is used to process the sample to obtain an observation area with a larger area. However, this method is time-consuming and has a low success rate. After the tangent processing, due to the existence of the curtain effect, the structure below the sample still cannot be effectively observed, and accurate observation results cannot be obtained.

[0041] The present disclosure provides a sample rotation system, which includes a rotation device. The rotation device includes a first carrier, a driving part, a collection device, and a control unit. The first carrier is connected to the sample, the driving part is connected to the first carrier, the driving part is configured to drive the first carrier to rotate, the first carrier drives the sample to rotate from an initial position to a target position, and the collection device is configured to collect the rotation state of the sample. The control unit is electrically connected to the driving part, and the control unit is configured to control the operation of the driving part. In the present disclosure, the driving part drives the first carrier to rotate, and the first carrier drives the sample to rotate to the target position, completing the rapid flipping of the sample and saving time. And rotating the sample to the target position facilitates the reverse cutting process, effectively improving the success rate and efficiency of reverse cutting.

[0042] As Figure 1 shown, Figure 1 FIG. shows a schematic diagram of a rotation device provided according to an exemplary embodiment of the present disclosure.

[0043] A sample rotation system includes a rotation device 1. The rotation device 1 includes a first carrier 11, a driving part 12, a collection device 13, and a control unit 14 (refer to Figure 5 shown).

[0044] The first carrier 11 is connected to the sample. The sample can be a silicon substrate. In the installed state, taking the side of the sample to be observed facing down as an example. The first carrier 11 can be a first probe, and the first probe can be made of tungsten material, so that the first carrier 11 has characteristics such as high hardness, wear resistance, good strength and toughness, heat resistance, and corrosion resistance.

[0045] The free end of the first carrier 11 is adhesively connected to the sample. The free end is in a tip shape. The first carrier 11 can adopt deposition process means to achieve adhesion to the sample.

[0046] The driving part 12 is connected to the first carrier 11. The fixed end of the first carrier 11 is installed on the driving part 12. The driving part 12 is configured to drive the first carrier 11 to rotate. The first carrier 11 drives the sample to rotate from an initial position to a target position, so that the side of the sample to be observed faces up, facilitating reverse cutting of the sample. The reverse-cut sample has a larger observation area, meeting the basic requirements of observation and testing, and facilitating local observation of the sample.

[0047] The collection device 13 is configured to collect the rotation state of the sample, determine whether the current position of the sample is the target position, avoid deviation in the rotation of the sample, and affect the accuracy during reverse cutting. If the sample is not rotated to the target position, it can be adjusted in time to ensure the smooth progress of reverse cutting.

[0048] The control unit 14 is electrically connected to the driving unit 12. The control unit 14 is configured to control the operation of the driving unit 12. The first carrier 11 rotates synchronously with the driving unit 12 and drives the sample to rotate accordingly, realizing the rotation of the sample. The control unit 14 controls the operation of the driving unit 12 to automate the sample rotation system and ensure precise rotation.

[0049] The driving unit 12 drives the first carrier 11 to rotate. The first carrier 11 drives the sample to rotate, rotating the sample to the target position, saving the time of the back-cutting process, ensuring the accuracy of the back-cutting process, and improving the efficiency and success rate of the back-cutting process. The sample after back-cutting is observed locally to realize the testing and analysis of the sample.

[0050] Here, it should be noted that for the above-mentioned orientation terms such as up and down, etc., the description of this embodiment is based on the orientation in the figure and does not constitute a limitation to this application.

[0051] As Figure 1 shown, a sample rotation system includes a rotating device 1. The rotating device 1 includes a first carrier 11, a driving unit 12, a collection device 13, and a control unit 14 (refer to Figure 5 shown). Regarding the above connection methods and functions, they have all been described in detail in the above embodiments and will not be repeated here.

[0052] The first carrier 11 drives the sample to rotate from the initial position to the target position. There is a preset angle between the initial position and the target position, and the preset angle is any angle from 0° to 180°.

[0053] When performing the back-cutting process on the sample, a focused ion beam is used. The focused ion beam can be widely applied to small-size structure analysis, cross-section cutting, transmission electron microscope sample preparation, etc. The focused ion beam is an ion beam generated by a liquid metal Ga+ (gallium) ion source. After being accelerated and focused by an ion gun, it irradiates the surface of the sample, and the surface atoms are stripped by a strong current ion beam to complete micro- and nano-scale surface topography processing.

[0054] Among them, the focused ion beam includes a single-beam type and a dual-beam type. The single-beam type is a focused ion beam with only an ion beam, and the ion beam is mainly applied to sample cross-section processing. The dual-beam type includes an ion beam and an electron beam. There is an angle of 52° between the electron beam and the ion beam. When the ion beam performs cross-section processing, the electron beam can observe its topography and perform fine analysis.

[0055] In one example, the sample is in the shape of a plate. The sample is along the horizontal direction (refer to Figure 1It is placed along the Y-axis shown, and when the side with the curtain effect is horizontally downward. The first carrier 11 drives the sample to rotate 180° relative to the initial position to the target position, exposing the side of the sample with the curtain effect, so as to facilitate the focused ion beam to perform cross-section processing on the sample and ensure the accuracy during the reverse cutting process of the sample.

[0056] In another example, the sample has an irregular shape. The plane where the processing cross-section of the sample is located has a 10° angle with the horizontal direction (refer to Figure 1 the Y-axis shown), then the first carrier 11 drives the sample to rotate 170° relative to the initial position to complete the flipping of the sample, so as to facilitate the focused ion beam to perform cross-section processing on the sample and ensure the accuracy during the reverse cutting process of the sample.

[0057] As Figure 1 、 Figure 2 shown, Figure 2 shows a schematic structural diagram of the limiting part provided according to an exemplary embodiment.

[0058] A sample rotation system includes a rotation device 1, and the rotation device 1 includes a first carrier 11, a driving part 12, a collection device 13, and a control unit 14 (refer to Figure 5 shown). Regarding the above connection methods and functions, they have all been described in detail in the above embodiments, and will not be repeated here.

[0059] The rotation device 1 further includes a stage 15, the driving part 12 is installed on the stage 15, the first carrier 11 is installed on the stage 15, and the fixed end of the first carrier 11 is connected to the driving part 12. The driving part 12 and the first carrier 11 are respectively installed on the stage 15 to improve the stability of the rotation device 1, so as to ensure the rotation state of the sample and avoid rotation errors.

[0060] The rotation device 1 further includes a limiting part 16, and the limiting part 16 can be a limiting block, and the limiting block is fixedly arranged on the upper surface of the stage 15. The driving part 12 is installed on the stage 15 through the limiting part 16, and the fixed end of the first carrier 11 passes through the limiting part 16 and is connected to the driving part 12.

[0061] Wherein, the limiting part 16 includes a first side surface 161 and a second side surface 162, and the limiting part 16 is provided with a through hole 163 penetrating the first side surface 161 and the second side surface 162. The driving part 12 is fixedly installed on the second side surface 162, and the fixed end of the first carrier 11 rotatably passes through the through hole 163 from the first side surface 161 and is fixedly connected to the driving part 12.

[0062] The fixed end of the first carrier 11 is fixedly connected to the driving part 12, improving the reliability of the connection between the first carrier 11 and the driving part 12, and ensuring that the driving part 12 can drive the first carrier 11 to rotate.

[0063] As Figure 1 shown, a sample rotation system includes a rotation device 1, and the rotation device 1 includes a first carrier 11, a driving part 12, a collection device 13, and a control unit 14 (refer to Figure 5 shown). Regarding the above connection methods and functions, they have all been described in detail in the above embodiments, and will not be repeated here.

[0064] The sample rotation system further includes a processing device (not shown in the figure). The processing device is electrically connected to the control unit 14 and the collection device 13 respectively. The processing device is set to communicate with the collection device 13 so as to receive the graphic information of the collection device 13 and make corresponding processing based on the graphic information.

[0065] The collection device 13 includes an image collection unit. The image collection unit is electrically connected to the processing device. The image collection unit is set to collect the graphic information of the position where the sample is located. The image collection unit may include a camera module. The camera module takes pictures of the sample, obtains the graphic information of the position where the sample is located, determines the current position of the sample, and transmits the graphic information to the processing device. The processing device analyzes it to determine whether the position where the sample is located has rotated to the target position. If it is determined that the sample has rotated to the target position, the rotation action ends. If it is determined that the sample has not rotated to the target position, the processing device may send a corresponding instruction to the control unit 14, and the control unit 14 drives the driving part 12 based on this instruction to timely adjust the position where the sample is located to ensure that the sample reaches the target position.

[0066] The processing device can also determine the difference between the current position of the sample and the target position of the sample, directly transmit the difference to the control unit 14, and the control unit 14 drives the driving part 12 based on this difference, and the driving part 12 drives the first carrier 11 to rotate, so that the sample rotates to the target position along with the first carrier 11.

[0067] As Figure 1 , Figure 3 shown, Figure 3 shows a structural schematic diagram of a reference body provided by an embodiment shown according to an exemplary embodiment.

[0068] A sample rotation system includes a rotation device 1, and the rotation device 1 includes a first carrier 11, a driving part 12, a collection device 13, and a control unit 14 (refer to Figure 5 shown). Regarding the above connection methods and functions, they have all been described in detail in the above embodiments, and will not be repeated here.

[0069] The sample rotation system further includes a reference body 2, which is a static reference object. The reference body 2 is set at the target position, and the first carrier 11 is set to move relative to the reference body 2. The sample can be in the shape of a regular plate and is compared with the reference body 2 to facilitate determining whether the sample has rotated to the target position. Among them, the image acquisition unit acquires the graphic information of the relative position between the sample and the reference body 2. This graphic information contains the current position of the sample and the current position of the reference body 2, and the relative position between the sample and the reference body 2 is compared. If the graphic information indicates that the sample and the reference body 2 coincide with each other, it is determined that the sample has rotated to the target position. If the graphic information indicates that the sample and the reference body 2 are in a staggered state, it is determined that the sample has not rotated to the target position and needs to be adjusted.

[0070] By setting the reference body 2, the image acquisition unit acquires the graphic information of the relative position between the sample and the reference body 2. Based on the graphic information and taking the reference body 2 as the reference, the current position of the sample in the shape of a regular shape is directly judged. The judgment method is relatively simple and intuitive, and the processing device can quickly judge it and draw a conclusion, saving judgment time and improving efficiency.

[0071] Such as Figure 1 、 Figure 4 shown, Figure 4 The figure shows a schematic structural diagram of a reference unit provided according to an exemplary embodiment.

[0072] A sample rotation system includes a rotation device 1, and the rotation device 1 includes a first carrier 11, a driving part 12, an acquisition device 13 and a control unit 14 (refer to Figure 5 shown). Regarding the above connection methods and functions, they have all been described in detail in the above embodiments, and will not be repeated here.

[0073] The sample rotation system further includes a reference unit 3, and the reference unit 3 is communicatively connected to the processing device. The reference unit 3 includes a plurality of reference representation points. Among them, each reference point corresponds to a reference value. The reference value is pre-stored in the reference unit, and there is a mapping relationship between the reference point and the reference value.

[0074] The sample can be irregular. After the sample rotates, the acquisition device 13 acquires the current position of the sample to determine the reference point corresponding to the current position of the sample, and determines the corresponding reference value according to the reference point. The processing device compares the corresponding reference value with the reference value of the target position to determine the existing deviation. If the deviation is within the preset range, it is determined that the sample has rotated to the target position. If the deviation exceeds the preset range, it is determined that the sample has not rotated to the target position and needs to be adjusted. Based on the deviation exceeding the range, the distance of the sample from the target position is determined.

[0075] A reference unit 3 is set, with multiple reference points as the reference benchmarks, and the reference points have matching reference values, accurately positioning the current position of the sample, determining the deviation between the current position of the sample and the target position, and automatically adjusting to achieve the automation of the sample rotation system.

[0076] As Figure 5 shown, Figure 5 Fig. shows a schematic diagram of a sample rotation system provided according to an exemplary embodiment of the present disclosure.

[0077] A sample rotation system includes a rotating device 1, a machine table 6, and a transfer mechanism 4. The machine table 6 is a dual-beam focused ion beam machine table, enabling the focused ion beam and the electron beam to irradiate the sample.

[0078] The transfer mechanism 4 is installed on the machine table 6 and is electrically connected to the control unit 14. The control unit 14 is configured to drive the transfer mechanism 4, and the transfer mechanism 4 drives the rotating device 1 to move to a predetermined position on the machine table 6. The sample is set on the machine table 6, and the rotating device 1 moves to the predetermined position on the machine table 6 through the transfer mechanism 4. The machine table 6 transfers the sample to the rotating device 1, and the rotating device 1 rotates the sample. The specific content of the rotating device 1 rotating the sample has been described in detail in the above embodiments and will not be repeated here.

[0079] Among them, the sample rotation system further includes a second carrier 5. The second carrier 5 is installed on the machine table 6 and is configured to connect the sample. The second carrier 5 can be a second probe, and the second probe is made of tungsten material, so that the second carrier 5 has characteristics such as high hardness, wear resistance, good strength and toughness, heat resistance, and corrosion resistance.

[0080] The free end of the second carrier 5 is adhesively connected to the sample, and the free end is in a tip shape. The second carrier 5 can adopt deposition process means to achieve bonding with the sample. The second carrier 5 carries the sample to the first carrier 11, connects the sample to the first carrier 11, and separates the sample from the second carrier 5, realizing the transfer of the sample. During the reverse cutting process, the finally presented reverse cutting section is an inclined section or a flat section. The focused ion beam has an incident angle relative to the sample, so that there is a preset angle between the beam axis of the focused ion beam and the sample. In order to avoid deviation of the incident angle of the focused ion beam, the extending direction of the central axis of the second carrier 5 is parallel to the beam axis of the focused ion beam, so that the same preset angle is also formed between the second carrier 5 and the sample.

[0081] The transfer mechanism 4 moves the rotating device 1 to a predetermined position on the machine table 6, and the predetermined position can be near the free end of the second carrier 5 to facilitate the exchange of the sample between the second carrier 5 and the first carrier 11. When the sample is rotated by the rotating device 1, the first carrier 11 moves the sample back to the second carrier 5 to facilitate its processing to obtain a reverse cutting section.

[0082] The sample rotation system further includes a positioning unit (not shown in the figure), and the positioning unit can be a sensor or the like. The positioning unit is electrically connected to the processing device, and the positioning unit is configured to position the free end of the second carrier 5, so that the rotating device 1 can be accurately moved to a predetermined position, and the first carrier 11 and the second carrier 5 are correspondingly arranged to complete the transfer of the sample.

[0083] In the sample rotation system of the present disclosure, the second carrier is connected to the sample, and the second carrier transfers the sample to the first carrier, and the rotation of the sample is completed by the rotating device, so that the side of the sample to be observed faces upward. The first carrier moves the sample back to the second carrier, and the focused ion beam on the machine platform performs cross-section processing to obtain an inverted cross-section. The inverted cross-section has a large observation area, meets the basic requirements of observation and testing, and is convenient for local observation of the sample.

[0084] In an exemplary embodiment of the present disclosure, a sample rotation method is provided. This method can be applied to a sample rotation system, and the sample rotation system includes a rotating device. As Figure 6 shown, Figure 6 FIG. shows a flowchart of a sample rotation method provided according to an exemplary embodiment of the present disclosure.

[0085] S11. Drive the first carrier to receive the sample.

[0086] In this step, drive the first carrier 11 to receive the sample, so that the first carrier 11 forms a connection with the sample. The first carrier 11 and the sample can be adhesively connected. The first carrier 11 can adopt a deposition process to achieve the adhesive connection with the sample, making the connection between the first carrier 11 and the sample more reliable.

[0087] S12. Drive the first carrier to rotate, so that the first carrier drives the sample to rotate from the initial position to the target position.

[0088] In this step, after the first carrier 11 is stably connected to the sample, the driving unit 12 drives the first carrier 11 to rotate, and the first carrier 11 drives the sample to rotate from the initial position to the target position. The driving unit 12 drives the first carrier 11 to rotate, realizing a quick flip, saving the rotation time of the sample, improving the accuracy of sample rotation, and improving the efficiency.

[0089] There is a preset angle between the initial position and the target position, and the preset angle is any angle from 0° to 180°.

[0090] S13. Determine whether the sample rotates to the target position according to the rotation state of the sample.

[0091] In this step, according to the rotation state of the sample, it is determined whether the sample rotates to the target position. The acquisition device 13 of the rotation device 1 acquires the current position of the sample and transmits the acquisition result to the processing device. The processing device makes a judgment and analysis on it to determine whether the current position of the sample is the target position. If it is determined that the sample rotates to the target position, the rotation action ends. If it is determined that the sample does not rotate to the target position, the processing device can issue a corresponding instruction to the control unit 14, and the control unit 14 drives the driving part 12 based on this instruction to timely adjust the position of the sample to ensure that the sample reaches the target position.

[0092] In the sample rotation method of this embodiment, by driving the first carrier to rotate, the first carrier drives the sample to rotate, and the side of the sample to be observed is turned upwards, so as to facilitate cross-section processing and realize reverse cutting. The driving part drives the first carrier, which improves the accuracy of sample rotation, saves the rotation time of the sample, and the rotation time can be shortened to less than 30 min / EA, improves the efficiency and reduces the test cost.

[0093] In an exemplary embodiment of the present disclosure, a sample rotation method is provided. This method can be applied to a sample rotation system, and the sample rotation system includes a rotation device. As Figure 7 shown, Figure 7 shows a flowchart of the sample rotation method provided according to an exemplary embodiment of the present disclosure.

[0094] S21. The driving first carrier receives the sample.

[0095] S22. Drive the first carrier to rotate so that the first carrier drives the sample to rotate from the initial position to the target position.

[0096] Steps S21 - S22 are the same as steps S11 - S12 in the above embodiment, and detailed descriptions have been made in the above embodiment, so they will not be repeated here.

[0097] S23. Obtain the graphic information of the position of the reference body.

[0098] In this step, the acquisition device 13 can acquire the graphic information of the position of the reference body 2. The acquisition device 13 can include a graphic acquisition unit, and the graphic acquisition unit can be a camera module. The camera module takes a picture of the current stage 15 to obtain the graphic information of the current position of the reference body 2.

[0099] S24. Acquire the graphic information of the position of the sample.

[0100] In this step, when the acquisition device 13 takes a picture of the current stage 15, the sample and the reference body 2 are in the same frame, and the acquisition device 13 can also capture the graphic information of the current position of the sample.

[0101] S25. Determine whether the sample has been rotated to the target position based on the deviation information between the graphic information of the reference body's position and the graphic information of the sample's position.

[0102] In this step, the processing device receives the graphic information of the sample's position and the graphic information of the reference body 2's position obtained by the acquisition device 13. Taking the reference body 2 as a reference object, the graphic information of the sample's position is compared with the graphic information of the reference body 2's position to determine the existing deviation information therebetween. Based on this deviation information, it is finally determined whether the sample has been rotated to the target position.

[0103] When the deviation information is less than or equal to the preset threshold, the sample has been rotated to the target position and the rotation action ends. When the deviation information is greater than the preset threshold, the sample has not been rotated to the target position.

[0104] When the sample has not been rotated to the target position, the processing device issues a corresponding instruction to the control unit 14. The control unit 14 executes this instruction to control the operation of the driving unit 12. The driving unit 12 drives the first carrier 11 to continue rotating. When the first carrier 11 drives the sample to rotate to the target position, the rotation action ends.

[0105] In the method of this embodiment, a reference body is set. Taking the reference body as a reference object, the current position of the sample is directly judged. The judgment method is relatively simple and intuitive. The processing device can quickly judge it and draw a conclusion, saving the judgment time and improving the efficiency.

[0106] In an exemplary embodiment of the present disclosure, a sample rotation method is provided. This method can be applied to a sample rotation system, and the sample rotation system includes a rotation device. As Figure 8 shown, Figure 8 shows a flowchart of a sample rotation method provided according to an exemplary embodiment of the present disclosure.

[0107] S31. Drive the first carrier to receive the sample.

[0108] S32. Drive the first carrier to rotate so that the first carrier drives the sample to rotate from the initial position to the target position.

[0109] S33. Collect the graphic information of the sample's position.

[0110] Steps S31 - S33 are the same as steps S21, S22, and S24 in the above embodiment. The above embodiment has been described in detail and will not be repeated here.

[0111] S34. Obtain configuration information, where the configuration information is used to represent the correspondence between the reference identification points of the reference unit and the target position.

[0112] In this step, configuration information is pre-stored in the reference unit, and the configuration information is used to characterize the correspondence between the reference identification points of the reference unit 3 and the target position. Each reference point corresponds to a reference value, and the target position has a target reference value.

[0113] S35. Determine whether the sample rotates to the target position according to the graphic information of the position where the sample is located and the configuration information.

[0114] In this step, the acquisition device 13 acquires the current position of the sample to determine the reference point corresponding to the current position where the sample is located, and determines the corresponding reference value according to the reference point. The processing device compares the corresponding reference value with the reference value of the target position to determine the existing deviation. If the deviation is within the preset range, it is determined that the sample rotates to the target position. If the deviation exceeds the preset range, it is determined that the sample does not rotate to the target position.

[0115] In the method of this embodiment, a reference unit is set, multiple reference points are used as reference benchmarks, and the reference points have matching reference values, accurately positioning the current position where the sample is located, determining the deviation between the current position where the sample is located and the target position, and automatically adjusting to realize the automation of the sample rotation system.

[0116] In an exemplary embodiment of the present disclosure, a sample rotation method is provided. This method can be applied to a sample rotation system, and the sample rotation system includes a rotation device, a second carrier, and a machine table. As Figure 9 shown, Figure 9 shows a flowchart of a sample rotation method provided according to an exemplary embodiment of the present disclosure.

[0117] S41. Control the second carrier to connect to the sample.

[0118] In this step, the processing device issues an instruction to the control unit 14, and the control unit 14 controls the second carrier 5 to connect to the sample. The second carrier 5 and the sample can be adhesively connected, and the second carrier 5 can adopt the deposition process to realize the adhesive connection with the sample, making the connection between the second carrier 5 and the sample more reliable.

[0119] S42. Carry the sample from the second carrier to the first carrier, and the first carrier carries the sample.

[0120] In this step, the processing device issues an instruction to the control unit 14, and the control unit 14 controls the first carrier 11 to receive the sample, carries the sample from the second carrier 5 to the first carrier 11, and the first carrier 11 carries the sample.

[0121] In an exemplary embodiment of the present disclosure, a sample rotation method is provided. This method can be applied to a sample rotation system, and the sample rotation system includes a rotation device, a second carrier, and a machine table. As Figure 10 shown,Figure 10 The figure shows a flowchart of a sample rotation method provided according to an exemplary embodiment of the present disclosure.

[0122] S51. Control the second carrier to connect to the sample.

[0123] Step S51 is the same as step S41 in the above embodiment, and detailed descriptions have been made in the above embodiment, so no further repetition will be made here.

[0124] S52. Obtain the predetermined position of the sample rotation system in the machine.

[0125] In this step, the positioning unit positions the free end of the second carrier 5, and the predetermined position is at the free end of the second carrier 5, so that the processing device determines the predetermined position.

[0126] S53. Transfer the rotating device of the sample rotation system to the predetermined position, and the sample can be transferred from the second carrier to the first carrier, and the first carrier carries the sample.

[0127] In this step, the processing device issues an instruction to the control unit 14, and the control unit 14 controls the transfer mechanism 4 to operate. The transfer mechanism 4 transfers the rotating device 1 to the predetermined position, and the free end of the first carrier 11 approaches the free end of the second carrier 5, so that the sample can be transferred from the second carrier 5 to the first carrier 11, and the first carrier 11 carries the sample, completing the sample transfer.

[0128] Figure 11 It is a block diagram of a computer device 900 for a sample rotation system shown according to an exemplary embodiment. For example, the computer device 900 can be provided as a sample rotation system. Refer to Figure 9 , the computer device 900 includes a processor 901, and the number of processors can be set to one or more according to needs. The computer device 900 further includes a memory 902 for storing instructions executable by the processor 901, such as application programs. The number of memories can be set to one or more according to needs. The application programs stored therein can be one or more. The processor 901 is configured to execute instructions to perform the above method.

[0129] Those skilled in the art should understand that the embodiments of the present disclosure may be provided as a method, an apparatus (device), or a computer program product. Therefore, the present disclosure may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present disclosure may take the form of a computer program product implemented on one or more computer-usable storage media that contain computer-usable program code. Computer storage media include volatile and non-volatile, removable and non-removable media implemented in any method or technology for storing information, such as computer-readable instructions, data structures, program modules, or other data, including but not limited to RAM, ROM, EEPROM, flash memory or other memory technologies, CD-ROM, digital versatile disk (DVD) or other optical disk storage, magnetic cartridges, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other medium that can be used to store the desired information and can be accessed by a computer. In addition, it is well known to those skilled in the art that communication media typically contain computer-readable instructions, data structures, program modules, or other data in a modulated data signal such as a carrier wave or other transmission mechanism, and may include any information delivery medium.

[0130] In an exemplary embodiment, a non-transitory computer-readable storage medium including instructions is provided, such as a memory 902 including instructions, and the above instructions can be executed by a processor 901 of a device 900 to complete the above method. For example, the non-transitory computer-readable storage medium may be a ROM, a random access memory (RAM), a CD-ROM, a magnetic tape, a floppy disk, and an optical data storage device, etc.

[0131] A non-transitory computer-readable storage medium, when the instructions in the storage medium are executed by a processor of a sample rotation system, enables the sample rotation system to perform:

[0132] Controlling a first carrier to receive a sample; driving the first carrier to rotate so that the first carrier drives the sample to rotate from an initial position to a target position; collecting the rotation state of the sample; and determining whether the sample rotates to the target position according to the rotation state of the sample.

[0133] The present disclosure is described with reference to the flowcharts and / or block diagrams of methods, apparatuses (devices), and computer program products according to the embodiments of the present disclosure. It should be understood that each flow and / or block in the flowcharts and / or block diagrams, and the combination of flows and / or blocks in the flowcharts and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to the processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing devices to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing devices generate for implementing in the process Figure 1 one process or multiple processes and / or blocksFigure 1 means for the functions specified in one or more boxes.

[0134] These computer program instructions can also be stored in a computer-readable memory that can direct a computer or other programmable data processing device to work in a specific manner, such that the instructions stored in the computer-readable memory produce a manufacture including an instruction means that implements the functions specified in one Figure 1 process or more processes and / or boxes Figure 1 means for the functions specified in one or more boxes.

[0135] These computer program instructions can also be loaded onto a computer or other programmable data processing device, such that a series of operation steps are executed on the computer or other programmable device to produce a computer-implemented process, and thus the instructions executed on the computer or other programmable device provide steps for implementing the functions specified in one Figure 1 process or more processes and / or boxes Figure 1 means for the functions specified in one or more boxes.

[0136] In this disclosure, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, such that an article or device including a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such article or device. Without further limitation, an element defined by the statement "comprising..." does not exclude the presence of additional identical elements in the article or device including said element.

[0137] Although the preferred embodiments of this disclosure have been described, those skilled in the art can make additional changes and modifications once they learn the basic creative concept. Therefore, the appended claims are intended to be construed to include the preferred embodiments as well as all changes and modifications falling within the scope of this disclosure.

[0138] Obviously, those skilled in the art can make various changes and modifications to this disclosure without departing from the spirit and scope of this disclosure. Thus, if these modifications and variations of this disclosure fall within the scope of the claims of this disclosure and their equivalent technologies, the intention of this disclosure also includes these modifications and variations.

[0139] The embodiments or implementation manners in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts among the embodiments can be referred to each other.

[0140] In the description of this specification, the descriptions with reference to the terms "embodiment", "exemplary embodiment", "some embodiments", "schematic embodiments", "examples", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present disclosure.

[0141] In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiments or examples. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0142] In the description of the present disclosure, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present disclosure.

[0143] It can be understood that the terms "first", "second", etc. used in the present disclosure can be used in the present disclosure to describe various structures, but these structures are not limited by these terms. These terms are only used to distinguish one structure from another.

[0144] In one or more of the drawings, the same elements are denoted by like reference numerals. For the sake of clarity, the multiple parts in the drawings are not drawn to scale. In addition, some well-known parts may not be shown. For the sake of brevity, the structure obtained after several steps can be described in one drawing. Many specific details of the present disclosure are described hereinafter, such as the structure, materials, dimensions, processing techniques and technologies of the device, in order to understand the present disclosure more clearly. However, as those skilled in the art can understand, the present disclosure can be implemented without these specific details.

[0145] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them; although the present disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A sample rotation system, characterized in that, The sample rotation system includes a rotating device, and the rotating device includes: A first carrier, which consists of a free end and a fixed end. The free end is in a tip shape and is adhesively connected to the sample; A driving part, the fixed end of the first carrier is installed on the driving part. The driving part is configured to drive the first carrier to rotate, and the first carrier drives the sample to rotate from an initial position to a target position; A collecting device, which is configured to collect the rotation state of the sample; A control unit, the control unit is electrically connected to the driving part, and the control unit is configured to control the operation of the driving part; and a limiting part, the limiting part includes a first side surface and a second side surface and a through hole penetrating the first side surface and the second side surface. The driving part is fixedly installed on the second side surface, and the fixed end of the first carrier rotatably passes through the through hole from the first side surface and is fixedly connected to the driving part.

2. The sample rotation system according to claim 1, characterized in that, There is a preset angle between the initial position and the target position, and the preset angle is any angle from 0° to 180°.

3. The sample rotation system according to claim 1, characterized in that The rotating device further includes a stage, the driving part is installed on the stage, the first carrier is installed on the stage, and the first carrier is a probe.

4. The sample rotation system according to claim 3, wherein The limiting part is fixedly connected to the stage, and the driving part is installed on the stage through the limiting part.

5. The sample rotation system according to claim 1, characterized in that The sample rotation system further includes a processing device, the processing device is electrically connected to the control unit and the collecting device respectively, and the processing device is configured to communicate with the collecting device.

6. The sample rotation system according to claim 5, wherein, The collecting device includes an image collecting unit, the image collecting unit is electrically connected to the processing device, and the image collecting unit is configured to collect the graphic information of the position where the sample is located.

7. The sample rotation system according to claim 6, characterized in that, The image collecting unit includes a camera module.

8. The sample rotation system according to claim 6, wherein The sample rotation system further includes a reference body, the reference body is arranged at the target position, and the first carrier is arranged to move relative to the reference body; Wherein, the image collecting unit collects the graphic information of the relative position between the sample and the reference body.

9. The sample rotation system according to claim 6, characterized in that, The sample rotation system further includes a reference unit, the reference unit communicates with the processing device, and the reference unit includes a plurality of reference marking points.

10. The sample rotation system according to claim 5, characterized in that, The sample rotation system further includes a machine table and a conveying mechanism, the conveying mechanism is installed on the machine table, and the conveying mechanism is electrically connected to the control unit; The control unit is configured to drive the conveying mechanism, and the conveying mechanism drives the rotating device to move to a predetermined position on the machine table.

11. The sample rotation system according to claim 10, characterized in that, The sample rotation system further includes a second carrier, and the second carrier is installed on the machine table; The second carrier is configured to connect the sample and carry the sample to the first carrier, so that the sample is connected to the first carrier and the sample is separated from the second carrier.

12. The sample rotation system according to claim 11, wherein The sample rotation system further includes a positioning unit, the positioning unit is electrically connected to the processing device, and the positioning unit is configured to position the free end of the second carrier.

13. A method for rotating a sample, characterized in that, The sample rotation method includes: Control the first carrier to receive the sample. The first carrier consists of a free end and a fixed end. The free end is in a tip shape and is adhesively connected to the sample. The fixed end of the first carrier rotatably passes through the through-hole of the limiting part from the first side of the limiting part and is fixedly connected to the driving part. Drive the first carrier to rotate so that the first carrier drives the sample to rotate from the initial position to the target position. Collect the rotation state of the sample. Based on the rotation state of the sample, determine whether the sample has rotated to the target position.

14. The sample rotation method according to claim 13, wherein, The determining whether the sample has rotated to the target position based on the rotation state of the sample includes: Obtain the graphic information of the position where the reference body is located. Collect the graphic information of the position where the sample is located. Based on the deviation information between the graphic information of the position where the reference body is located and the graphic information of the position where the sample is located, determine whether the sample has rotated to the target position.

15. The sample rotation method according to claim 14, wherein The determining whether the sample has rotated to the target position based on the deviation information between the graphic information of the position where the reference body is located and the graphic information of the position where the sample is located includes: When the deviation information is less than or equal to the preset threshold, the sample has rotated to the target position. When the deviation information is greater than the preset threshold, the sample has not rotated to the target position.

16. The sample rotation method according to claim 15, wherein The sample rotation method further includes: When the sample has not rotated to the target position, control the driving part to operate. The driving part drives the first carrier to rotate, and the first carrier drives the sample to rotate to the target position.

17. The sample rotation method according to claim 14, characterized in that, The determining whether the sample has rotated to the target position based on the rotation state of the sample includes: Collect the graphic information of the position where the sample is located. Obtain the configuration information, which is used to characterize the correspondence between the reference identification point of the reference unit and the target position. Based on the graphic information of the position where the sample is located and the configuration information, determine whether the sample has rotated to the target position.

18. The sample rotation method according to claim 13, characterized in that, The controlling the first carrier to receive the sample includes: Control the second carrier to connect to the sample. Carry the sample from the second carrier to the first carrier, and the first carrier carries the sample.

19. The sample rotation method according to claim 18, wherein The carrying the sample to the first carrier and the first carrier receiving the sample includes: Obtain the predetermined position of the sample rotation system in the machine platform. Transfer the rotating device of the sample rotation system to the predetermined position, and the sample can be transferred from the second carrier to the first carrier, and the first carrier carries the sample.

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