Coupled double vacuum pumping device and vacuum pumping method

Abstract

The present invention discloses a coupled dual-stage vacuum pumping device and a vacuum pumping method. The coupled dual-stage vacuum pumping device pumps a container to be evacuated. The coupled dual-stage vacuum pumping device includes a high-pressure gas source, a first transfer module, a second transfer module, a first pump body, and a second pump body. The coupled dual-stage vacuum pumping device has a central plane, and the first pump body and the second pump body are symmetrically arranged with respect to the central plane. A first piston assembly is provided in the first pump body, and a second piston assembly is provided in the second pump body. During operation, the first piston assembly and the second piston assembly move in a mirror-image opposite direction or a mirror-image same direction with respect to the central plane. The invention adopts the first pump body and the second pump body that are symmetrically arranged with respect to the central plane, so that the acting forces and vibrations of the first pump body and the second pump body are mutually counteracted, achieving a coupling effect, with good balance and high stability, which can meet the usage requirements of high-precision equipment and improve the production precision and quality of products.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum pumping, and particularly relates to a coupled dual vacuum pumping device and a vacuum pumping method. Background Art

[0002] A vacuum pumping device is a device that uses a vacuum pump to evacuate a container to be evacuated by mechanical and physical methods to obtain a vacuum. As shown in the attached Figure 1 figure, the existing electric vacuum pump mainly includes a pump body, a piston head, a crank and a motor. A piston chamber is provided inside the pump body. The crank is driven by the motor to drive the piston head to reciprocate in the piston chamber, thereby achieving the purpose of pumping air.

[0003] Since mechanical motion continuously occurs inside the electric vacuum pump, the electric vacuum pump has large vibrations, poor balance and instability during operation. When the vacuum pumping device is installed on high-precision equipment such as semiconductor chips and integrated circuits, the vibrations will be transmitted to the entire equipment, resulting in poor production precision and low quality of the products. Summary of the Invention

[0004] In view of the deficiencies of the prior art, the present invention provides a coupled dual vacuum pumping device and a vacuum pumping method. The device uses two symmetrically arranged pump bodies, so that the acting forces and vibrations generated by the two pump bodies counteract each other, achieving a coupling effect, with good balance and high stability.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A coupled dual vacuum pumping device is used to evacuate a container to be evacuated. The coupled dual vacuum pumping device includes a high-pressure gas source, a first transfer module, a second transfer module, a first pump body and a second pump body;

[0007] The coupled dual vacuum pumping device has a central plane, and the first pump body and the second pump body are symmetrically arranged with respect to the central plane;

[0008] A first piston assembly is provided inside the first pump body, and a second piston assembly is provided inside the second pump body. During operation, the first piston assembly and the second piston assembly move in a mirror image towards each other or in a mirror image in opposite directions with respect to the central plane. By using the first pump body and the second pump body that are symmetrically arranged with respect to the central plane, the first piston assembly is arranged inside the first pump body, and the second piston assembly is arranged inside the second pump body. During operation, the first piston assembly and the second piston assembly move in a mirror image towards each other or in a mirror image in opposite directions with respect to the central plane, so that the acting forces and vibrations generated by the first pump body and the second pump body counteract each other, achieving a coupling effect, with good balance and high stability, which can meet the use requirements of high-precision equipment and improve the production precision and quality of products.

[0009] As a preferred solution, the first transfer module is connected to a high-pressure gas source through a first air inlet passage. The first transfer module has a first gas path and a second gas path. A first pre-vacuum chamber and a second pre-vacuum chamber are formed in the first pump body, and both the first pre-vacuum chamber and the second pre-vacuum chamber are connected to the container to be evacuated.

[0010] As a preferred solution, the first pump body has a first cavity and a second cavity separated from each other. A first driving chamber and a first pre-vacuum chamber are formed in the first cavity, and a second driving chamber and a second pre-vacuum chamber are formed in the second cavity. The first driving chamber is connected to the first gas path, and the second driving chamber is connected to the second gas path.

[0011] As a preferred solution, the first piston assembly includes a first piston head and a second piston head. The first piston head is disposed in the first cavity, and the second piston head is disposed in the second cavity. The first piston head and the second piston head are connected by a connecting member so that the first piston head and the second piston head move synchronously and in the same direction. The first piston head divides the first cavity into the first driving chamber and the first pre-vacuum chamber, and the second piston head divides the second cavity into the second driving chamber and the second pre-vacuum chamber.

[0012] As a preferred solution, a partition plate for separating the first cavity and the second cavity is provided in the first pump body. The first driving chamber is formed between the first piston head and the partition plate, the first pre-vacuum chamber is formed between the first piston head and the side of the first cavity away from the partition plate, the second driving chamber is formed between the second piston head and the partition plate, and the second pre-vacuum chamber is formed between the second piston head and the side of the second cavity away from the partition plate.

[0013] As a preferred solution, the first transfer module has a first working port, a second working port, and the first air inlet passage. The first air inlet passage and the first working port communicate to form the first gas path, and the first air inlet passage and the second working port communicate to form the second gas path.

[0014] As a preferred solution, the first transfer module further has a first air outlet and a second air outlet. A muffler is provided on the first pump body. A muffling chamber is provided in the muffler. Both the first air outlet and the second air outlet communicate with the muffling chamber. A plurality of muffling outlets communicating with the muffling chamber are provided at the bottom of the muffler, and the gas output from the muffling outlets blows against the outer surface of the first pump body.

[0015] As a preferred solution, the silencer includes a plate body and two block bodies. The two block bodies are respectively arranged at two ends of the lower side of the plate body, and the silencing cavities are arranged in both of the two block bodies. A first silencing inlet communicated with the first air outlet and a second silencing inlet communicated with the second air outlet are arranged on the plate body. The first silencing inlet is communicated with the silencing cavity, and the second silencing inlet is communicated with the silencing cavity.

[0016] As a preferred solution, the first pump body and the second pump body are connected by a connecting component, and the central plane is located at the center of the connecting component.

[0017] A vacuum pumping method, the vacuum pumping method uses the coupled double-stage vacuum pumping device, and the vacuum pumping method adopts the following steps:

[0018] Step 1: Use an air pipe and a first one-way valve to connect the container to be vacuum pumped to the first pre-vacuum cavity and the second pre-vacuum cavity in the first pump body;

[0019] Step 2: Use an air pipe and a third one-way valve to connect the container to be vacuum pumped to the third pre-vacuum cavity and the fourth pre-vacuum cavity in the second pump body;

[0020] Step 3: Connect the first air inlet channel of the first transfer module to a high-pressure gas source, and connect the second air inlet channel of the second transfer module to the high-pressure gas source;

[0021] Step 4: Simultaneously open the first air path and the fourth air path, and simultaneously close the second air path and the third air path. The high-pressure gas output by the high-pressure gas source enters the first air path and the fourth air path simultaneously, so as to vacuum pump the container to be vacuum pumped;

[0022] Step 5: Simultaneously close the first air path and the fourth air path, and simultaneously open the second air path and the third air path. The high-pressure gas output by the high-pressure gas source enters the second air path and the third air path simultaneously, so as to vacuum pump the container to be vacuum pumped;

[0023] Step 6: Repeat Step 4 to Step 5 to gradually approach a vacuum environment in the first pre-vacuum cavity, the second pre-vacuum cavity, the third pre-vacuum cavity and the fourth pre-vacuum cavity, and finally form a vacuum environment for the container to be vacuum pumped.

[0024] Compared with the prior art, the present invention has obvious advantages and beneficial effects. Specifically, by adopting a first pump body and a second pump body symmetrically arranged with respect to the central plane, a first piston assembly is arranged in the first pump body, and a second piston assembly is arranged in the second pump body. During operation, the first piston assembly and the second piston assembly move mirror-symmetrically towards each other or mirror-symmetrically in the opposite direction with respect to the central plane, so that the acting forces and vibrations generated by the first pump body and the second pump body counteract each other, achieving a coupling effect, with good balance and high stability, which can meet the use requirements of high-precision equipment and improve the production precision and quality of products.

[0025] In order to more clearly explain the structural features, technical means and specific purposes and functions achieved by the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments: BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the assembly structure of an existing electric vacuum pump;

[0027] Figure 2 It is a schematic diagram of the assembly structure of an embodiment of the present invention;

[0028] Figure 3 It is an exploded schematic diagram of an embodiment of the present invention;

[0029] Figure 4 is a cross-sectional schematic diagram of a first adapter module according to an embodiment of the present invention;

[0030] Figure 5 is a cross-sectional schematic diagram of a first pump body and a second pump body according to an embodiment of the present invention;

[0031] Figure 6 It is a schematic diagram of the working state of an embodiment of the present invention;

[0032] Figure 7 Schematic diagram of the internal structure of a muffler according to an embodiment of the present invention;

[0033] Figure 8 Schematic diagram of the structure of a muffler according to an embodiment of the present invention;

[0034] Figure 9 It is a schematic diagram of the connection between the coupled double vacuum pumping device and the container to be vacuum pumped according to an embodiment of the present invention.

[0035] Description of the accompanying drawings:

[0036] 10-first pump body 11-first one-way valve 12-second one-way valve

[0037] 13- partition 131- guide hole 14- connector

[0038] 141- axial connection hole 15- connection component 151- second air intake port

[0039] 152- second exhaust port 153- third air intake port 154- third exhaust port

[0040] 20-first cylinder 21-first cavity 211-first drive cavity

[0041] 212-first pre-vacuum chamber 22-first air hole 23-first piston assembly

[0042] 231-first piston head 232-second piston head 233-axial mounting hole

[0043] 24-first installation port 25-first end cover 251-first air intake port

[0044] 252 - first exhaust port 30 - second cylinder 131 - second cavity

[0045] 311- second driving chamber 312- second pre-vacuum chamber 32- second air hole

[0046] 33-second installation port 40-vacuum container 41-trachea

[0047] 50- high pressure gas source 60- first adapter module 61- first air inlet channel

[0048] 62-first working port 63-second working port 64-first air outlet

[0049] 65-second air outlet 66-active chamber 661-first air cavity

[0050] 662 - second air cavity 67 - movable rod 671 - first protrusion

[0051] 672- second protrusion 673- third protrusion 70- first muffler

[0052] 71- plate 711- first muffler entrance 712- second muffler entrance

[0053] 713-first silencer airway 714-second silencer airway 715-avoidance slot

[0054] 72-block 721-silence chamber 722-upper silence chamber

[0055] 723-lower muffler cavity 724-muffler outlet 725-through hole

[0056] 726- port 73- avoidance space 74- baffle

[0057] 80- second pump body 81- third cavity 811- third drive cavity

[0058] 812-third pre-vacuum chamber 82-fourth chamber 821-fourth driving chamber

[0059] 822- fourth pre-vacuum chamber 84- second piston assembly 841- third piston head

[0060] 842- fourth piston head 85- third air hole 86- fourth air hole

[0061] 87- second end cover 871- fourth air intake port 872- fourth air exhaust port

[0062] 88-third one-way valve 89-fourth one-way valve 90-second transfer module

[0063] 91 - second air inlet channel 92 - third working port 93 - fourth working port

[0064] 94-third air outlet 95-fourth air outlet 96-third air cavity

[0065] 97- fourth air cavity 100- second muffler DETAILED DESCRIPTION

[0066] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside" and "outside" etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the positions or elements referred to must have specific directions, be constructed and operated in specific directions. Therefore, they should not be understood as limitations on the present invention.

[0067] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0068] like Figure 2-9As shown in the figure, the present invention discloses a coupled dual-stage vacuum pumping device. The coupled dual-stage vacuum pumping device evacuates a container 40 to be evacuated. The coupled dual-stage vacuum pumping device includes a high-pressure gas source 50, a first transfer module 60, a second transfer module 90, a first pump body 10, and a second pump body 80. The coupled dual-stage vacuum pumping device has a central plane N. The first pump body 10 and the second pump body 80 are symmetrically arranged with respect to the central plane N. A first piston assembly 23 is provided in the first pump body 10, and a second piston assembly 84 is provided in the second pump body 80. The central axes C of the first piston assembly 23 and the second piston assembly 84 along the axial direction X are coaxially arranged. During operation, the first piston assembly 23 and the second piston assembly 84 perform mirror-image approaching motions or mirror-image reverse motions with respect to the central plane N. It should be noted that the approaching motion in the present invention means that two objects move towards each other's directions; the reverse motion means that two objects move away from each other's directions. It can be understood that when the first piston assembly 23 and the second piston assembly 84 perform mirror-image approaching motions with respect to the central plane N, the first piston assembly 23 and the second piston assembly 84 approach each other, and the distance gradually decreases; when the first piston assembly 23 and the second piston assembly 84 perform mirror-image reverse motions with respect to the central plane N, the first piston assembly 23 and the second piston assembly 84 move away from each other, and the distance gradually increases.

[0069] The first pump body 10 and the second pump body 80 are connected. Specifically, the first pump body 10 and the second pump body 80 are connected by a connecting member 15. The central plane N is located at the center of the connecting member 15. By setting the connecting member 15 to connect the first pump body 10 and the second pump body 80, the acting forces and vibrations generated between the first pump body 10 and the second pump body 80 can be transmitted to the center of the connecting member 15 to cancel each other out. In the present invention, the connecting member 15 is a connecting plate. The first pump body 10 and the second pump body 80 are both screwed to the connecting plate by bolts, and the end faces of the first pump body 10 and the second pump body 80 are closely attached to the connecting plate. By using the connecting plate as the connecting member 15, when installing, the end faces of the first pump body 10 and the second pump body 80 are closely attached to the connecting plate. The transmission distance of the acting forces and vibrations generated between the first pump body 10 and the second pump body 80 is short, and the contact area between the first pump body 10 and the second pump body 80 and the connecting plate is large. Therefore, the cancellation speed of the acting forces and vibrations per unit time is faster and the effect is better. It can be understood that the connecting member 15 in the present invention can also be a plurality of connecting rods arranged at intervals. The axial two ends of the connecting rods are respectively connected to the first pump body 10 and the second pump body 80.

[0070] The following is a description of the first pump body 10, the first transfer module 60, and the first silencer:

[0071] A first cavity 21 and a second cavity 31 are formed in the first pump body 10 and are separated from each other. The first piston assembly 23 includes a first piston head 231 and a second piston head 232. The first piston head 231 is disposed in the first cavity 21, and the second piston head 232 is disposed in the second cavity 31. The first piston head 231 and the second piston head 232 are connected by a connecting member 14 so that the first piston head 231 and the second piston head 232 move linearly synchronously and in the same direction. The central axes C of the first piston head 231, the second piston head 232, and the connecting member 14 are coaxially arranged. The first piston head 231 divides the first cavity 21 into a first driving chamber 211 and a first pre-vacuum chamber 212. The second piston head 232 divides the second cavity 31 into a second driving chamber 311 and a second pre-vacuum chamber 312. The first driving chamber 211 is connected to the first gas path, and the second driving chamber 311 is connected to the second gas path. Both the first pre-vacuum chamber 212 and the second pre-vacuum chamber 312 are connected to the container 40 to be evacuated.

[0072] Specifically, both the first pre-vacuum chamber 212 and the second pre-vacuum chamber 312 are connected to the container 40 to be evacuated through a first one-way valve 11. In the present invention, two first one-way valves 11 are provided. The first pre-vacuum chamber 212 and the second pre-vacuum chamber 312 are respectively connected to the container 40 to be evacuated through corresponding first one-way valves 11. The first one-way valve 11 is communicated with the container 40 to be evacuated through an air pipe 41. The first pre-vacuum chamber 212 and the second pre-vacuum chamber 312 are respectively connected to the atmosphere through a second one-way valve 12. When the first pre-vacuum chamber 212 is evacuated, the gas in the container 40 to be evacuated is pumped out and enters the first pre-vacuum chamber 212 through the first one-way valve 11. At this time, the second pre-vacuum chamber 312 discharges the gas in the second pre-vacuum chamber 312 to the atmosphere through the second one-way valve 12. Similarly, when the second pre-vacuum chamber 312 is evacuated, the gas in the container 40 to be evacuated is pumped out and enters the second pre-vacuum chamber 312 through the first one-way valve 11. At this time, the first pre-vacuum chamber 212 discharges the gas in the first pre-vacuum chamber 212 to the atmosphere through the second one-way valve 12.

[0073] The first transfer module 60 is connected to the high-pressure gas source 50 through the first intake passage 61. The first transfer module 60 has a first gas path and a second gas path. The first transfer module 60 has a first working port 62, a second working port 63, a first outlet port 64, a second outlet port 65, and the first intake passage 61. Specifically, the first working port 62 and the second working port 63 are both provided at the lower end of the first transfer module 60. The first outlet port 64, the second outlet port 65, and the first intake passage 61 are all provided at the upper end of the five-port two-position solenoid valve. The first intake passage 61 is located between the first outlet port 64 and the second outlet port 65. An active chamber 66, an active rod 67, and a driving member (not shown) for driving the active rod 67 to axially reciprocate in the active chamber 66 are further provided in the first transfer module 60. The first intake passage 61, the first working port 62, the second working port 63, the first outlet port 64, and the second outlet port 65 are all in communication with the active chamber 66. First bumps 671, second bumps 672, and third bumps 673 are radially outwardly protruded from the circumferential surface of the active rod 67. A first gas chamber 661 is formed between the first bump 671 and the second bump 672. The first gas chamber 661 is always in communication with the first working port 62. A second gas chamber 662 is formed between the second bump 672 and the third bump 673. The second gas chamber 662 is always in communication with the second working port 63. During operation, the active rod 67 is driven by the driving member to axially reciprocate, so that the first gas chamber 661 is alternately in communication between the first intake passage 61 and the first outlet port 64, and the second gas chamber 662 is alternately in communication between the first intake passage 61 and the second outlet port 65, so that the first working port 62 and the second working port 63 alternately switch between intake and outlet. The first intake passage 61, the first gas chamber 661, and the first working port 62 are sequentially in communication to form the first gas path. The first intake passage 61, the second gas chamber 662, and the second working port 63 are sequentially in communication to form the second gas path.

[0074] A first air hole 22 and a second air hole 32 are provided on the first pump body 10. The first driving chamber 211 is in communication with the first working port 62 through the first air hole 22. The second driving chamber 311 is in communication with the second working port 63 through the second air hole 32.

[0075] The first transfer module 60 is installed at the upper end of the first pump body 10. The first air hole 22 and the first working port 62 are arranged opposite to each other. The second air hole 32 and the second working port 63 are arranged opposite to each other. A first sealing ring (not shown) is provided between the first air hole 22 and the first working port 62. The second air hole 32 and the second working port 63 are arranged opposite to each other, and a second sealing ring (not shown) is provided between the second air hole 32 and the second working port 63. By providing the first sealing ring and the second sealing ring, airtightness is ensured between the first air hole 22 and the first working port 62, and airtightness is ensured between the second air hole 32 and the second working port 63. By adopting the oppositely arranged first air hole 22 and first working port 62, and the oppositely arranged second air hole 32 and second working port 63, the connection distance between the first air path and the first driving cavity 211 is minimized, and the connection distance between the second air path and the second driving cavity 311 is minimized. Thus, the installation between the first transfer module 60 and the first pump body 10 is more compact, the occupied space is reduced, which is beneficial to the miniaturization development of the vacuum pumping device.

[0076] When the high-pressure gas output by the high-pressure gas source 50 enters the first driving cavity 211 through the first air path, the first piston head 231 drives the second piston head 232 to move in the first direction P1. The first piston head 231 moves from the first position to the second position, and the second piston head 232 moves from the third position to the fourth position to evacuate the container 40 to be evacuated by the second pre-vacuum cavity 312, and the gas in the first pre-vacuum cavity 212 is discharged to the atmosphere through the second one-way valve 12.

[0077] When the high-pressure gas output by the high-pressure gas source 50 enters the second driving cavity 311 through the second air path, the second piston head 232 drives the first piston head 231 to move in the second direction P2. The second piston head 232 moves from the fourth position to the third position, and the first piston head 231 moves from the second position to the first position to evacuate the container 40 to be evacuated by the first pre-vacuum cavity 212, and the gas in the second pre-vacuum cavity 312 is discharged to the atmosphere through the second one-way valve 12.

[0078] The pump body includes a partition plate 13, and a first cylinder 20 and a second cylinder 30 which are oppositely arranged. The first cylinder 20 and the second cylinder 30 are integrally connected by the partition plate 13. The first cavity 21 is arranged in the first cylinder 20, and the second cavity 31 is arranged in the second cylinder 30. The partition plate 13 separates the first cavity 21 and the second cavity 31. A first driving cavity 211 is formed between the first piston head 231 and the partition plate 13, and a first pre-vacuum cavity 212 is formed between the first piston head 231 and the side of the first cavity 21 away from the partition plate 13. A second driving cavity 311 is formed between the second piston head 232 and the partition plate 13, and a second pre-vacuum cavity 312 is formed between the second piston head 232 and the side of the second cavity 31 away from the partition plate 13. By adopting the integrally connected first cylinder 20, second cylinder 30 and partition plate 13, the sealing performance between the first cylinder 20, second cylinder 30 and partition plate 13 can be ensured, and no additional sealing structure needs to be set, which simplifies the pump body structure, is easy to process, has a low processing cost, and the integrally connected structure makes the pump body have high strength, good earthquake resistance and fatigue resistance, and can meet the continuous and stable operation of the pump body under high frequency and high pressure for a long time.

[0079] A first installation port 24 communicating with the first cavity 21 is formed at one end of the first cylinder 20 away from the partition plate 13. The first piston head 231 is inserted into the first cavity 21 from the outside to the inside through the first installation port 24. A first end cover 25 is arranged at the first installation port 24, and the first end cover 25 is fixedly connected to the pump body by screws. A second installation port 33 communicating with the second cavity 31 is formed at one end of the second cylinder 30 away from the partition plate 13. The second piston head 232 is inserted into the second cavity 31 from the outside to the inside through the second installation port 33. The connecting component 15 is arranged at the second installation port 33. By providing the first installation port 24 and the second installation port 33, it is convenient to install the connecting piece 14, the first piston head 231 and the second piston head 232 into the pump body, and the assembly is convenient. A first suction port 251 and a first exhaust port 252 communicating with the first pre-vacuum cavity 212 are arranged on the first end cover 25. The first one-way valve 11 is arranged at the first suction port 251, and the second one-way valve 12 is arranged at the first exhaust port 252. A second suction port 151 and a second exhaust port 152 communicating with the second pre-vacuum cavity 312 are arranged on the connecting component 15. The first one-way valve 11 is arranged at the second suction port 151, and the second one-way valve 12 is arranged at the second exhaust port 152.

[0080] The connecting member 14 is a connecting guide rod, which is movably installed on the partition 13 along the axial direction X. Both ends of the connecting guide rod extend into the first driving cavity 211 and the second driving cavity 311 respectively. Axial connecting holes 141 are provided at both axial ends of the connecting guide rod. Axial mounting holes 231 are provided on both the first piston head 231 and the second piston head 232. The mounting member passes through the axial mounting hole 231 and the axial connecting hole 141, so that both the first piston head 231 and the first piston head 231 are connected to the connecting guide rod. Specifically, the mounting member is a bolt. By providing the axial mounting hole 231 and the axial connecting hole 141, the mounting structure of the first piston head 231 and the second piston head 232 with the connecting member 14 is simple and convenient for installation.

[0081] It should be noted that in the present invention, to ensure the sealing performance, sealing rings are provided between the circumferential side wall of the first piston head 231 and the inner side wall of the first cavity 21, between the second piston head 232 and the inner side wall of the second cavity 31, at the connection between the first piston head 231 and the connecting member 14, at the connection between the second piston head 232 and the connecting member 14, and between the connecting member 14 and the guiding hole 131.

[0082] The first pump body 10 is further provided with a first silencer 70. The first silencer 70 is provided with a silencing cavity 721. The silencing cavity 721 is filled with sound-absorbing cotton. The air outlet is communicated with the silencing cavity 721. The bottom of the first silencer 70 is provided with a plurality of sound-absorbing outlets 724 communicated with the silencing cavity 721. The gas output from the sound-absorbing outlets 724 blows towards the outer surface of the pump body. The first silencer 70 includes a plate body 71 and two block bodies 72. The two block bodies 72 are respectively arranged at both ends of the lower side of the plate body 71 along the transverse direction Y, and the silencing cavity 721 is provided in both of the two block bodies 72. The plate body 71 is provided with a first sound-absorbing inlet 711 communicated with the first air outlet 64 and a second sound-absorbing inlet 712 communicated with the second air outlet 65. The first sound-absorbing inlet 711 is communicated with the silencing cavity 721 through a first sound-absorbing air passage 713, and the second sound-absorbing inlet 712 is communicated with the silencing cavity 721 through a second sound-absorbing air passage 714. The first sound-absorbing air passage 713 and the second sound-absorbing air passage 714 are both located in the plate body 71, and both the first sound-absorbing air passage 713 and the second sound-absorbing air passage 714 extend along the transverse direction Y to the corresponding two silencing cavities 721. By providing the silencing cavity 721 to connect the first air outlet 64 and the second air outlet 65 of the first adapter module 60, the gas discharged from the first adapter module 60 can be noise-reduced, thereby reducing the working noise of the first pump body 10. By providing the sound-absorbing outlets 724 at the lower end of the first silencer 70, the gas output from the sound-absorbing outlets 724 blows towards the outer surface of the first pump body 10, thereby reducing the temperature of the first pump body 10.

[0083] Specifically, the silencing cavity 721 includes an upper silencing cavity 722 and a lower silencing cavity 723 arranged vertically. The upper silencing cavity 722 is communicated with the air duct. A plurality of axially arranged through holes 725 are provided between the upper silencing cavity 722 and the lower silencing cavity 723. The upper and lower ends of the through holes 725 are respectively communicated with the upper silencing cavity 722 and the lower silencing cavity 723. The upper silencing cavity 722 and the lower silencing cavity 723 axially extend and penetrate through the surface of one side of the block 72 to form a port 726. The port 726 can be used to load the sponge into the silencing cavity 721. A baffle 74 is provided on one side of the port 726. A sealing ring (not shown) is provided between the baffle 74 and the opening edge of the port 726. The baffle 74 is connected to the block 72 by screws. An avoidance space 73 corresponding to the first adapter module 60 is formed between the two blocks 72. The avoidance space 73 has a downward opening, and both axial sides of the avoidance space 73 have side openings. By providing the side openings, when the first silencer 70 is installed, it is beneficial to observe the docking situation between the first silencing inlet 711 and the first air outlet 64, and the docking situation between the second silencing inlet 712 and the second air outlet 65, which is convenient for installation. At the same time, the side openings can allow the structure of the first adapter module 60 and the wires to pass outwards. The structure is compact and the space layout is reasonable. An avoidance through groove 715 corresponding to the first air inlet channel 61 is provided in the middle of the plate body 71. The lower end of the avoidance through groove 715 is communicated with the avoidance space 73, and the upper end of the avoidance through groove 715 penetrates through the upper surface of the plate body 71.

[0084] The working principle of the first silencer 70: The gas discharged from the first air outlet 64 on the first adapter module 60 passes through the first silencing inlet 711, the first silencing air duct 713, the upper silencing cavity 722, the through hole 725, and the lower silencing cavity 723 in sequence, and then blows out from the lower end of the silencing outlet 724 to the outer surface of the first pump body 10. Similarly, the air discharged from the second air outlet 65 on the first adapter module 60 passes through the second silencing inlet 712, the second silencing air duct 714, the upper silencing cavity 722, the through hole 725, and the lower silencing cavity 723 in sequence, and then blows out from the lower end of the silencing outlet 724 to the outer surface of the first pump body 10.

[0085] The following is a description of the second pump body 80 and the second adapter module 90:

[0086] The second adapter module 90 is the same as the first adapter module 60. The second adapter module 90 is connected to the high-pressure air source 50 through the second air inlet channel 91. The second air inlet channel 91, the third air cavity 96, and the third working port 92 on the second adapter module 90 are sequentially communicated to form a third air path; the second air inlet channel 91, the fourth air cavity 97, and the fourth working port 93 on the second adapter module 90 are sequentially communicated to form a fourth air path;

[0087] A third cavity 81 and a fourth cavity 82 which are separated from each other are formed in the second pump body 80. The second piston assembly 84 includes a third piston head 841 and a fourth piston head 842. The third piston head 841 divides the third cavity 81 into a third driving cavity 811 and a third pre-vacuum cavity 812. The fourth piston head 842 divides the fourth cavity 82 into a fourth driving cavity 821 and a fourth pre-vacuum cavity 822. The third pre-vacuum cavity 812 and the fourth pre-vacuum cavity 822 are respectively connected to a container 40 to be evacuated through a third one-way valve 88. The third pre-vacuum cavity 812 and the fourth pre-vacuum cavity 822 are respectively connected to the atmosphere through a fourth one-way valve 89.

[0088] The third driving cavity 811 communicates with a third working port 92 through a third air hole 85 on the second pump body 80. The fourth driving cavity 821 communicates with a fourth working port 93 through a fourth air hole 86 on the second pump body 80.

[0089] A second silencer 100 is provided on the second pump body 80. A silencing cavity 721 on the second silencer 100 communicates with a third air outlet 94 and a fourth air outlet 95 on the second adapter module 90.

[0090] A third suction port 153 and a third exhaust port 154 which communicate with the third pre-vacuum cavity 812 are further provided on the connecting member 15. The third one-way valve 88 is provided at the third suction port 153. The fourth one-way valve 89 is provided at the third exhaust port 154.

[0091] A second end cap 87 is provided at one end of the second pump body 80 away from the first pump body 10. A fourth suction port 871 and a fourth exhaust port 872 which communicate with the fourth pre-vacuum cavity 822 are provided on the second end cap 87. The third one-way valve 88 is provided at the fourth suction port 871. The fourth one-way valve 89 is provided at the fourth exhaust port 872.

[0092] It can be understood that the second pump body 80 in the present invention has the same structure as the first pump body 10, and the second silencer 100 has the same structure as the first silencer 70, so no further description will be given.

[0093] The working principle of the present invention:

[0094] 1. Refer to Figure 3 、 Figure 4 and Figure 5 , the high-pressure gas output by the high-pressure gas source 50 simultaneously enters the first intake passage 61 and the second intake passage 91;

[0095] The first piston head 231 and the second piston head 232 move in the first direction P1: The high-pressure gas in the first intake passage 61 sequentially passes through the first air chamber 661, the first working port 62, and the first air hole 22 and then enters the first driving chamber 211. The high-pressure gas in the first driving chamber 211 pushes the first piston head 231 to move in the first direction P1. The first piston head 231 drives the second piston head 232 to move in the first direction P1, causing a negative pressure to be formed in the second pre-vacuum chamber 312. The gas in the container 40 to be evacuated is extracted and sequentially passes through the first one-way valve 11 and the second suction port 151 and enters the second pre-vacuum chamber 312. At the same time, the first piston head 231 squeezes the first pre-vacuum chamber 212 in the first direction P1, causing the gas in the first pre-vacuum chamber 212 to be discharged to the atmosphere sequentially through the first exhaust port 252 and the second one-way valve 12; The second piston head 232 squeezes the gas in the second driving chamber 311 in the first direction P1, causing the gas in the second driving chamber 311 to be discharged to the first muffler 70 sequentially through the second air hole 32, the second working port 63, the second air chamber 662, and the second air outlet 65, forming a vacuum pumping action;

[0096] While the first piston head 231 and the second piston head 232 are moving in the first direction P1, the third piston head 841 and the fourth piston head 842 move in the second direction P2: The high-pressure gas in the second intake passage 91 sequentially passes through the fourth air chamber 97, the fourth working port 93, and the fourth air hole 86 and then enters the fourth driving chamber 821. The high-pressure gas in the fourth driving chamber 821 pushes the fourth piston head 842 to move in the second direction P2. The fourth piston head 842 drives the third piston head 841 to move in the second direction P2, causing a negative pressure to be formed in the third pre-vacuum chamber 812. The gas in the container 40 to be evacuated is extracted and sequentially passes through the third one-way valve 88 and the third suction port 153 and enters the third pre-vacuum chamber 812. At the same time, the fourth piston head 842 squeezes the fourth pre-vacuum chamber 822 in the second direction P2, causing the gas in the fourth pre-vacuum chamber 822 to be discharged to the atmosphere sequentially through the fourth exhaust port 872 and the fourth one-way valve 89; The third piston head 841 squeezes the gas in the third driving chamber 811 in the second direction P2, causing the gas in the third driving chamber 811 to be discharged to the second muffler 100 sequentially through the third air hole 85, the third working port 92, the third air chamber 96, and the third air outlet 94, forming a vacuum pumping action;

[0097] The above is that the first pump body 10 and the first pump body 80 simultaneously complete a vacuum pumping action. It can be understood that in the next vacuum pumping action, the first piston head 231 and the second piston head 232 in the first pump body 10 move in the second direction P2, and the third piston head 841 and the fourth piston head 842 in the second pump body 80 move in the first direction P1, and so on in a cycle.

[0098] The present invention also discloses a vacuum pumping method, which uses the coupled double-stage vacuum pumping device, and the vacuum pumping method comprises the following steps:

[0099] Step 1: Connect the container 40 to be evacuated to the first pre-vacuum chamber 212 and the second pre-vacuum chamber 312 in the first pump body 10 through the air pipe 41 and the first one-way valve 11.

[0100] Step 2: Connect the container 40 to be evacuated to the third pre-vacuum chamber 812 and the fourth pre-vacuum chamber 822 in the second pump body 80 through the air pipe 41 and the third one-way valve 88.

[0101] Step 3: Connect the first air inlet channel 61 of the first transfer module 60 to the high-pressure gas source 50, and connect the second air inlet channel 91 of the second transfer module 90 to the high-pressure gas source 50.

[0102] Step 4: Simultaneously open the first air path and the fourth air path, and simultaneously close the second air path and the third air path. The high-pressure gas output by the high-pressure gas source 50 enters the first air path and the fourth air path simultaneously.

[0103] The high-pressure gas enters the first driving chamber 211 through the first air path. The first piston head 231 drives the second piston head 232 to move in the first direction P1. The first piston head 231 moves from the first position to the second position, and the second piston head 232 moves from the third position to the fourth position, so that the second pre-vacuum chamber 312 evacuates the container 40 to be evacuated, and the gas in the first pre-vacuum chamber 212 is discharged to the atmosphere through the second one-way valve 12.

[0104] The high-pressure gas enters the fourth driving chamber 821 through the fourth air path. The fourth piston head 842 drives the third piston head 841 to move in the second direction P2. The fourth piston head 842 moves from the seventh position to the eighth position, and the third piston head 841 moves from the fifth position to the sixth position, so that the third pre-vacuum chamber 812 evacuates the container 40 to be evacuated, and the gas in the fourth pre-vacuum chamber 822 is discharged to the atmosphere through the fourth one-way valve 89.

[0105] Step 5: Simultaneously close the first air path and the fourth air path, and simultaneously open the second air path and the third air path. The high-pressure gas output by the high-pressure gas source 50 enters the second air path and the third air path simultaneously.

[0106] The high-pressure gas enters the second driving chamber 311 through the second air path. The second piston head 232 drives the first piston head 231 to move in the second direction P2. The second piston head 232 moves from the fourth position to the third position, and the first piston head 231 moves from the second position to the first position, so that the first pre-vacuum chamber 212 evacuates the container 40 to be evacuated, and the gas in the second pre-vacuum chamber 312 is discharged to the atmosphere through the second one-way valve 12.

[0107] The high-pressure gas enters the third driving chamber 811 through the third gas path. The third piston head 841 drives the fourth piston head 842 to move in the first direction P1. The third piston head 841 moves from the sixth position to the fifth position, and the fourth piston head 842 moves from the eighth position to the seventh position, so that the fourth pre-vacuum chamber 822 evacuates the container 40 to be evacuated, and the gas in the third pre-vacuum chamber 812 is discharged to the atmosphere through the fourth one-way valve 89;

[0108] Step Six: Repeat Step Four to Step Five, so that the first pre-vacuum chamber 212, the second pre-vacuum chamber 312, the third pre-vacuum chamber 812, and the fourth pre-vacuum chamber 822 are gradually close to the vacuum environment, and finally the container 40 to be evacuated forms a vacuum environment.

[0109] In summary, the present invention adopts the first pump body 10 and the second pump body 80 symmetrically arranged with respect to the central plane N. The first piston assembly 23 is arranged in the first pump body 10, and the second piston assembly 84 is arranged in the second pump body 80. During operation, the first piston assembly 23 and the second piston assembly 84 move in a mirror-image opposite or mirror-image opposite manner with respect to the central plane N, so that the acting forces and vibrations generated by the first pump body 10 and the second pump body 80 counteract each other, achieving a coupling effect, with good balance and high stability, which can meet the use requirements of high-precision equipment and improve the production precision and quality of products.

[0110] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Therefore, any modifications, equivalent replacements, improvements, etc. made to the above embodiments according to the technical reality of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A coupled double-stage vacuum pumping device, which pumps a container to be evacuated, characterized in that The coupled dual-stage vacuum pumping device includes a high-pressure gas source, a first transfer module, a second transfer module, a first pump body, and a second pump body; The coupled dual-stage vacuum pumping device has a central plane N, and the first pump body and the second pump body are symmetrically arranged with respect to the central plane N; A first piston assembly is provided in the first pump body, and a second piston assembly is provided in the second pump body. During operation, the first piston assembly and the second piston assembly move in a mirror-image and opposite direction or in a mirror-image and opposite direction with respect to the central plane N; The first transfer module is connected to the high-pressure gas source through a first air inlet passage. The first transfer module has a first gas path and a second gas path. A first pre-vacuum chamber and a second pre-vacuum chamber are formed in the first pump body, and both the first pre-vacuum chamber and the second pre-vacuum chamber are connected to the container to be evacuated; The first pump body has a first cavity and a second cavity separated from each other. A first driving chamber and a first pre-vacuum chamber are formed in the first cavity, and a second driving chamber and a second pre-vacuum chamber are formed in the second cavity. The first driving chamber is connected to the first gas path, and the second driving chamber is connected to the second gas path; The first piston assembly includes a first piston head and a second piston head. The first piston head is provided in the first cavity, and the second piston head is provided in the second cavity. The first piston head and the second piston head are connected by a connecting member so that the first piston head and the second piston head move synchronously and in the same direction. The first piston head divides the first cavity into the first driving chamber and the first pre-vacuum chamber, and the second piston head divides the second cavity into the second driving chamber and the second pre-vacuum chamber; A partition plate is provided in the first pump body to separate the first cavity and the second cavity. The first driving chamber is formed between the first piston head and the partition plate, the first pre-vacuum chamber is formed between the first piston head and the side of the first cavity away from the partition plate, the second driving chamber is formed between the second piston head and the partition plate, and the second pre-vacuum chamber is formed between the second piston head and the side of the second cavity away from the partition plate.

2. The coupled double-stage vacuum pumping device according to claim 1, wherein The first transfer module has a first working port, a second working port, and the first air inlet passage. The first air inlet passage and the first working port are connected to form the first gas path, and the first air inlet passage and the second working port are connected to form the second gas path.

3. The coupled double-stage vacuum pumping device according to claim 1, characterized in that, The first transfer module further has a first air outlet and a second air outlet. A muffler is provided on the first pump body. A muffler chamber is provided in the muffler. Both the first air outlet and the second air outlet are connected to the muffler chamber. A plurality of muffler outlets communicating with the muffler chamber are provided at the bottom of the muffler, and the gas output from the muffler outlets blows towards the outer surface of the first pump body.

4. The coupled double-stage vacuum pumping device according to claim 3, wherein, The muffler includes a plate body and two blocks. The two blocks are respectively provided at both ends of the lower side of the plate body, and the muffler chambers are provided in both of the two blocks. The plate body is provided with a first muffler inlet communicating with the first air outlet and a second muffler inlet communicating with the second air outlet. The first muffler inlet is connected to the muffler chamber, and the second muffler inlet is connected to the muffler chamber.

5. The coupled double-stage vacuum pumping device according to any one of claims 1-4, characterized in that, The first pump body and the second pump body are connected via a connecting component, and the center plane N is located at the center of the connecting component.

6. A vacuuming method, the vacuuming method adopts the coupled double vacuuming device according to claim 1, and the vacuuming method adopts the following steps: Step 1: Use an air pipe and a first one-way valve to connect the container to be evacuated with the first pre-vacuum chamber and the second pre-vacuum chamber in the first pump body; Step 2: Use the air pipe and the third one-way valve to connect the container to be evacuated with the third pre-vacuum chamber and the fourth pre-vacuum chamber in the second pump body; Step 3: Connect the first air inlet channel of the first adapter module to the high-pressure air source, and connect the second air inlet channel of the second adapter module to the high-pressure air source; Step 4: The first gas path and the fourth gas path are opened at the same time, and the second gas path and the third gas path are closed at the same time, and the high-pressure gas output by the high-pressure gas source enters the first gas path and the fourth gas path at the same time, thereby evacuating the vacuum container; Step 5: The first gas path and the fourth gas path are closed at the same time, and the second gas path and the third gas path are opened at the same time, and the high-pressure gas output by the high-pressure gas source enters the second gas path and the third gas path at the same time, thereby evacuating the vacuum container; Step 6: Repeat steps 4 to 5 to gradually bring the first pre-vacuum chamber, the second pre-vacuum chamber, the third pre-vacuum chamber and the fourth pre-vacuum chamber close to a vacuum environment, and finally form a vacuum environment in the container to be evacuated.

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