A method for processing aluminum-scandium target blank

Abstract

The invention relates to the technical field of aluminum-scandium processing, and discloses a processing method of an aluminum-scandium target blank, comprising the following steps: preparing a cylindrical aluminum-scandium target blank, wherein the aluminum-scandium target blank has a first end face, a second end face and an outer cylindrical surface; turning the first end face until the surface of the first end face is a plane; turning the outer cylindrical surface; turning the outer second end face; the cutting depth of the lathe tool is 0.50 mm-1.0 mm, and the feed speed of the lathe tool is 0.30-0.40 mm / r; the cutting depth of the lathe tool is 0.50 mm-1.0 mm, and the feed speed of the lathe tool is 0.30-0.40 mm / r; turning the end face and the outer cylindrical surface until the length of the aluminum-scandium target blank reaches a predetermined value. The cutting depth of the turning tool of the lathe is 0.50 mm-1.0 mm, and the feed speed of the turning tool is 0.30-0.40 mm / r; this method improves the quality of the product.

Description

Technical Field

[0001] The invention relates to the technical field of aluminum-scandium processing, and in particular to a processing method of an aluminum-scandium target blank. Background Art

[0002] At present, aluminum-scandium alloys are mainly used as sputtering targets in special fields such as MEMS and 5G filters. Generally, an aluminum-scandium alloy target is used as a sputtering source to sputter and form an aluminum-scandium alloy film. The main phase of aluminum-scandium is Al+Al3Sc. Due to the different densities and melting points of Al and Al3Sc, the smelting process and cooling process are prone to cause serious segregation, which seriously affects the quality of the film layer. Therefore, after the smelting is completed, a rapid casting method will be used to cast the aluminum-scandium into the mold. Due to the certain thickness of the cast target blank and the limitations of the casting mold, during the rapid cooling of the mold, there are certain grain sizes and components around and inside the aluminum-scandium target blank, and there are differences in appearance on the top and bottom. If it is not processed, it will affect the quality of the target material and cause sputtering effects on the customer's back end. Therefore, it is necessary to select a suitable processing method for the cast target blank to improve the quality of the product. Summary of the invention

[0003] The purpose of the present invention is to provide a method for processing the surface of a cast aluminum-scandium target blank to solve the problem of uneven quality of the target material after cooling, thereby improving the quality of the target material and the back-end sputtering product.

[0004] In order to achieve the above object, the present invention provides a method for processing an aluminum-scandium target blank, comprising the following steps:

[0005] Prepare a cylindrical aluminum-scandium target blank, wherein the aluminum-scandium target blank has a first end face, a second end face and an outer cylindrical surface;

[0006] The aluminum-scandium target blank is clamped and fixed by the claws of a lathe;

[0007] First turning process: turning the first end surface;

[0008] Second turning process: turning the outer cylindrical surface along the axial direction of the aluminum-scandium target blank;

[0009] The third turning process: turning the second end face; measuring the diameter size and axial thickness of the aluminum-scandium target blank;

[0010] Fourth turning process: repeatedly performing the first turning process to the third turning process steps for multiple times, turning the first end face until the first end face forms a plane, turning the outer cylindrical surface and the second end face until the diameter and thickness of the aluminum-scandium target blank reach a first predetermined value;

[0011] In the first turning process and the third turning process, the feed speed of the lathe tool moving along the radial direction of the aluminum-scandium target blank is 0.30-0.40 mm / r; in the second turning process, the cutting depth of the lathe tool is 0.50 mm-1.0 mm; the feed speed of the lathe tool moving along the axial direction of the aluminum-scandium target blank is 0.30-0.40 mm / r;

[0012] The fifth turning process: repeat the first turning process to the third turning process steps for multiple times, turning the outer cylindrical surface and the second end face until the diameter and thickness of the aluminum-scandium target blank reach the second predetermined value; in the first turning process and the third turning process, the feed speed of the turning tool along the radial movement of the aluminum-scandium target blank is 0.10-0.20mm / r; in the second turning process, the cutting depth of the turning tool is 0.20-0.50mm; the feed speed of the turning tool along the axial movement of the aluminum-scandium target blank is 0.10-0.20mm / r.

[0013] The cooling method in the casting mold is cooling from the second end surface of the aluminum-scandium target blank to the first end surface, so the cooling time of the first end surface of the aluminum-scandium target blank is later than the cooling time of the second end surface.

[0014] Cutting depth: the cutting amount of the turning tool in the radial direction of the aluminum-scandium target blank.

[0015] Feed speed: the distance the turning tool moves along the axis of the aluminum-scandium target blank or along the radial direction of the aluminum-scandium target blank when the aluminum-scandium target blank rotates one circle.

[0016] Compared with the prior art, the processing method of an aluminum-scandium target blank in an embodiment of the present invention has the following beneficial effects: by using a lathe, the first turning process and the fourth turning process steps are performed to process the first end face and the second end face respectively, so that the quality uniformity of the first end face and the second end face of the aluminum-scandium target blank can be improved, and the subsequent sputtering production requirements of customers can be met; since the second end face of the aluminum-scandium target blank is rapidly cooled from the second end face of the aluminum-scandium target blank upward during the casting process of the aluminum-scandium target blank, the aluminum-scandium percentage of the second end face of the aluminum-scandium target blank is lower than The first end face, so the staff can flexibly turn the second end face to make the aluminum-scandium percentage at the second end face closer to the aluminum-scandium percentage at the first end face as needed while ensuring the thickness of the aluminum-scandium target blank, thereby improving the quality of the product; the fourth turning process and the fifth turning process have different cutting depths and feed speeds to perform rough machining and fine machining on the aluminum-scandium target blank. Rough machining can quickly remove burrs on the surface of the aluminum-scandium target blank, and fine machining can improve the smoothness of the surface of the aluminum-scandium target blank, meet customer requirements for the aluminum-scandium target blank, and improve product quality. By stopping after turning the first end face into a plane, not only can the customer's requirements be met, but also the cutting amount of the first end face can be reduced, thereby reducing the generation of waste targets. In the fourth turning process step, when turning the outer cylindrical surface, the cutting depth is limited to 0.50mm-1.0mm, and the feed speed of the turning tool is 0.30-0.40mm / r; this can improve the rapid cutting of burrs while reducing the generation of waste targets as much as possible; in the fifth turning process, the cutting depth is limited to 0.20mm-0.50mm, and the feed speed of the turning tool is 0.10-0.20mm / r; this can improve the smoothness of the outer cylindrical surface while reducing the generation of waste targets as much as possible.

[0017] Furthermore, in the fourth turning process step, the spindle speed of the lathe is 200r / min-300r / min; in the fifth turning process step, the spindle speed of the lathe is 400r / min-500r / min. In the fourth turning process step, due to the large cutting amount, the speed within this range can ensure that the turning tool can quickly cut the burrs without causing excessive temperature in a short time to affect the quality of the aluminum scandium target blank and the turning tool. In the fifth turning process step, the feed speed setting value can be guaranteed within this speed range, ensuring that the smoothness of the outer cylindrical surface is within the customer's requirements.

[0018] Furthermore, in the fourth turning process step, the total thickness of the aluminum-scandium target blank cut by the turning tool on the first end face is 5.5 mm-11 mm, and the total thickness of the aluminum-scandium target blank cut by the turning tool on the second end face is 2 mm-3 mm.

[0019] During the casting process of the aluminum-scandium target blank, the first end face is a convex surface with a height of 5mm-10mm. After cutting the convex surface, it is sufficient to continue cutting 0.5mm-1mm. The thickness cut on the second end face is 2mm-3mm. The main purpose is to make the thickness of the aluminum-scandium target blank reach the first predetermined value, and to make the aluminum-scandium percentage at the second end face closer to the aluminum-scandium percentage at the first end face.

[0020] Furthermore, in the fifth turning process step, the total thickness of the aluminum-scandium target blank cut by the turning tool on the first end face and the second end face is 0.5 mm-1 mm. The cutting amount of 0.5 mm-1 mm is mainly to make the surface of the first end face and the second end face smoother and reduce the generation of waste targets.

[0021] Furthermore, in the fourth turning process step, the first turning process to the third turning process step are repeated 5-10 times; in the fifth turning process step, the first turning process to the third turning process step are repeated 3-5 times. Turning in multiple cycles can effectively avoid the burden of the turning tool during turning, improve the quality of turning, and improve the quality of the product.

[0022] Furthermore, after the first turning step is performed, the edge of the first end face is chamfered; after the fourth turning step is performed, the edge of the second end face is chamfered; the chamfering angle of the first end face edge and the second end face edge is 30-45°, and the chamfering width is 3mm-5mm. Such angle value and width value can effectively prevent the edge of the first end face and the second end face from collapsing, and can also reduce the generation of waste targets.

[0023] Furthermore, the outer cylindrical surface is composed of a first outer cylindrical surface and a second outer cylindrical surface, the first outer cylindrical surface is close to the first end surface, and the second outer cylindrical surface is close to the second end surface; in the second turning process step, the following steps are also included: Step 1: the turning tool is clamped on the first outer cylindrical surface, and the second outer cylindrical surface is turned; Step 2: the clamping claw is released, the aluminum-scandium target blank is taken out, the clamping claw is clamped on the second outer cylindrical surface, and the first outer cylindrical surface is turned. The outer cylindrical surface is divided into the first outer cylindrical surface and the second outer cylindrical surface, so that the clamping claw clamps one side surface, the turning tool turns the other side surface, and then the aluminum-scandium target blank is turned over, so that the clamping claw clamps the processed side surface, and the turning tool cuts the remaining unprocessed side surface. The design is reasonable and easy to operate.

[0024] Specifically, in the second turning process step, the clamping jaws may first clamp the second outer cylindrical surface, and allow the turning tool to cut the first outer cylindrical surface. The operation is flexible and can be convenient for operators to operate on site.

[0025] Furthermore, after executing step 1, the first turning step is performed. Since the clamping jaws are clamped on the first outer cylindrical surface, the second end surface is located outside the clamping jaws. After turning the second outer cylindrical surface, the second end surface is turned at the same time, which can reduce the number of operation steps and simplify the operation steps.

[0026] Furthermore, after executing step 2, the second turning step is performed. Since the clamping jaws are clamped on the second outer cylindrical surface, the first end surface is located outside the clamping jaws. After turning the first outer cylindrical surface, the first end surface is turned at the same time, which can reduce the number of operation steps and simplify the operation steps.

[0027] Furthermore, a first turning tool is used for turning the first end face and the second end face, and a second turning tool is used for turning the outer cylindrical surface. Using different turning tools to turn the end face and the outer cylindrical surface of the aluminum-scandium target blank respectively can ensure the turning quality of the outer cylindrical surface, the first end face, and the second end face. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 1 is a schematic diagram of the structure of an aluminum-scandium target blank according to an embodiment of the present invention;

[0029] Figure 2 This is a flow chart of the first processing method according to an embodiment of the present invention;

[0030] Figure 3 is a flow chart of a second processing method according to an embodiment of the present invention;

[0031] 1. Aluminum-scandium target blank; 2. First end surface; 3. Second end surface; 4. Outer cylindrical surface; 41. First outer cylindrical surface; 42. Second outer cylindrical surface. DETAILED DESCRIPTION

[0032] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0033] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, "plurality" means two or more, unless otherwise clearly and specifically defined.

[0034] like Figure 1-3 As shown, a method for processing an aluminum-scandium target blank according to a preferred embodiment of the present invention comprises the following steps:

[0035] S1, preparing a cylindrical aluminum-scandium target blank 1, wherein the aluminum-scandium target blank 1 has a first end face 2, a second end face 3 and an outer cylindrical surface 4;

[0036] S2, clamping and fixing the aluminum-scandium target blank 1 by the claws of a lathe;

[0037] S3, first turning process: turning the first end face 2;

[0038] S4, second turning process: turning the outer cylindrical surface 4 of the aluminum-scandium target blank 1 along the axial direction;

[0039] S5, third turning process: turning the second end face 3; measuring the diameter size and axial thickness of the aluminum-scandium target blank 1;

[0040] S6, fourth turning process: repeat the first turning process to the third turning process steps for multiple times, turn the first end face 2 until the first end face 2 forms a plane, turn the outer cylindrical surface 4 and the second end face 3, until the diameter and thickness of the aluminum-scandium target blank 1 reach the first predetermined value;

[0041] In the first turning process and the third turning process, the feed speed of the lathe tool moving radially along the aluminum-scandium target blank 1 is 0.30-0.40 mm / r; in the second turning process, the cutting depth of the lathe tool is 0.50 mm-1.0 mm; the feed speed of the lathe tool moving axially along the aluminum-scandium target blank 1 is 0.30-0.40 mm / r;

[0042] S7, the fifth turning process: repeat the first turning process to the third turning process steps for multiple times, turning the outer cylindrical surface 4 and the second end surface 3, until the diameter and thickness of the aluminum-scandium target blank 1 reach the second predetermined value; in the first turning process and the third turning process, the feed speed of the turning tool along the radial movement of the aluminum-scandium target blank 1 is 0.10-0.20mm / r; in the second turning process, the cutting depth of the turning tool is 0.20-0.50mm; the feed speed of the turning tool along the axial movement of the aluminum-scandium target blank 1 is 0.10-0.20mm / r.

[0043] The cooling method in the casting mold is cooling from bottom to top, so the cooling time of the first end face 2 of the aluminum-scandium target blank is later than the cooling time of the second end face 3 .

[0044] The second predetermined value of the thickness of the aluminum-scandium target blank 1 is in the range of 24.5 mm to 25.0 mm. The second end face 3 after the third turning process is a plane, and the first end face 2 and the second end face 3 are parallel. This meets the needs of customers.

[0045] Compared with the prior art, the processing method of the aluminum-scandium target blank 1 of the embodiment of the present invention has the following beneficial effects: the first turning process and the third turning process are performed by a lathe, and the first end face 2 and the second end face 3 are processed respectively. The first end face 2 is turned into a plane to meet the customer's subsequent requirements for sputtering production, and the second end face 3 is turned to a second predetermined value to meet the customer's requirements for product size. At the same time, since the second end is the second end face 3 of the aluminum-scandium target blank 1, during the casting process of the aluminum-scandium target blank 1, the rapid cooling from the first end face of the aluminum-scandium target blank 1 is The second end face 3 begins to cool upward, causing the aluminum-scandium percentage of the second end face 3 of the aluminum-scandium target blank 1 to decrease, and there is a deviation from the percentage of the upper aluminum-scandium target blank 1, so turning the second end face 3 to the second predetermined value can reduce the deviation of the aluminum-scandium percentage in the aluminum-scandium target blank 1, thereby improving the quality of the product; the fourth turning process and the fifth turning process are respectively used for rough machining and fine machining of the outer cylindrical surface 4, and the rough machining can quickly remove burrs on the outer cylindrical surface 4, and the fine machining can improve the smoothness of the surface of the outer cylindrical surface 4, thereby meeting customer requirements for the aluminum-scandium target blank 1 and improving the quality of the product. By stopping after turning the first end face 2 into a plane, not only can the customer's requirements be met, but also the turning amount can be reduced, and the generation of waste targets is reduced. When turning the outer cylindrical surface 4, in the second turning process, the cutting depth is limited to 0.50mm-1.0mm, and the feed speed of the turning tool is 0.30-0.40mm / r; it can improve the rapid cutting of burrs while reducing the generation of waste targets as much as possible; in the fifth turning process, the cutting depth is limited to 0.20mm-0.50mm, and the feed speed of the turning tool is 0.10-0.20mm / r; it can improve the smoothness of the first end face 2, the second end face 3 and the outer cylindrical surface 4, while reducing the generation of waste targets as much as possible.

[0046] In one embodiment, in step S6, the spindle speed is 200r / min-300r / min. Since the cutting amount is large, selecting a speed within this range can ensure that the turning tool can quickly cut burrs without causing excessive temperature in a short time to affect the quality of the aluminum-scandium target blank 1 and the turning tool.

[0047] In step S7, the spindle speed is 400r / min-500r / min. Within this speed range, the set value of the feed speed can be guaranteed, and the smoothness of the outer cylindrical surface 4 can be within the range required by the customer.

[0048] In one embodiment, in step S6, the total thickness of the aluminum-scandium target blank 1 cut by the turning tool on the first end face 2 is 5.5 mm-11 mm, and the total thickness of the aluminum-scandium target blank cut by the turning tool on the second end face 3 is 2 mm-3 mm.

[0049] During the casting process of the aluminum-scandium target blank, the first end face 2 is a convex surface with a height of 5mm-10mm. After cutting the convex surface, it is sufficient to continue cutting by 0.5mm-1mm. The thickness cut on the second end face 3 is 2mm-3mm. The main purpose is to make the thickness of the aluminum-scandium target blank 1 reach the first predetermined value, and to make the aluminum-scandium percentage at the second end face 3 closer to the aluminum-scandium percentage at the first end face 1.

[0050] In one embodiment, in step S7, the total thickness of the aluminum-scandium target blank cut by the turning tool on the first end face and the second end face is 0.5 mm-1 mm. The cutting amount of 0.5 mm-1 mm is mainly to make the surface of the first end face and the second end face smoother and reduce the generation of waste targets.

[0051] In one embodiment, after executing step S3, the edge of the first end face 2 is chamfered; after executing step S6, the edge of the second end face 3 is chamfered. By chamfering both the first end face 2 and the second end face 3, the edges of the first end face 2 and the second end face 3 can be effectively prevented from collapsing and affecting product quality.

[0052] The chamfer angle of the edge of the first end face 2 and the edge of the second end face 3 is 30-45°, and the chamfer width is 3mm-5mm. Such angle and width values ​​can effectively prevent the edge of the first end face 2 and the second end face 3 from collapsing, and can also reduce the generation of waste targets.

[0053] In one embodiment, the outer cylindrical surface 4 is composed of a first outer cylindrical surface 41 and a second outer cylindrical surface 42, wherein the first outer cylindrical surface 41 is close to the first end surface 2, and the second outer cylindrical surface 42 is close to the second end surface 3; in step S4, the following steps are also included: step 1: the turning tool is clamped on the first outer cylindrical surface 41, and the second outer cylindrical surface 42 is turned; step 2: the clamping jaws are released, the aluminum-scandium target blank 1 is taken out, the clamping jaws are clamped on the second outer cylindrical surface 42, and the first outer cylindrical surface 41 is turned. The outer cylindrical surface 4 is divided into the first outer cylindrical surface 41 and the second outer cylindrical surface 42, so that the clamping jaws clamp one side surface, the turning tool turns the other side surface, and then the aluminum-scandium target blank 1 is turned over, so that the clamping jaws clamp the processed side surface, and the turning tool cuts the remaining unprocessed side surface. The design is reasonable and easy to operate.

[0054] Specifically, in step S4, the clamping jaws may first clamp the second outer cylindrical surface 42, and allow the turning tool to cut the first outer cylindrical surface 41. The operation is flexible and can be convenient for operators to operate on site.

[0055] In one embodiment, after executing step 1, step S5 is executed. Since the clamping jaws are clamped on the first outer cylindrical surface 41, the second end surface 3 is located outside the clamping jaws. After turning the second outer cylindrical surface 42, the second end surface 3 is turned at the same time, which can reduce the number of operation steps and simplify the operation steps.

[0056] In one embodiment, step S3 is performed after step 2. Since the clamp is clamped on the second outer cylindrical surface 42, the first end surface 2 is located outside the clamp, and after turning the first outer cylindrical surface 41, the first end surface 2 is turned at the same time, which can reduce the number of operation steps and simplify the operation steps.

[0057] In one embodiment, a first turning tool is used for turning the first end face 2 and the second end face 3, and a second turning tool is used for turning the outer cylindrical surface 4. Using different turning tools to turn the end face and the outer cylindrical surface 4 of the aluminum scandium target blank respectively can ensure the turning quality of the outer cylindrical surface, the first end face 2, and the second end face 3.

[0058] The working process of the present invention is:

[0059] S11, clamping the clamping jaws on the second outer cylindrical surface 42 of the aluminum-scandium target blank 1, and turning the first end surface 2 with a turning tool until the surface of the first end surface 2 is a plane;

[0060] S12, turning the first outer cylindrical surface 41, wherein the cutting depth of the turning tool is 0.50 mm-1.0 mm, and the feed speed of the turning tool is 0.30-0.40 mm / r;

[0061] S13, loosen the clamping jaws, take out the aluminum-scandium target blank 1, and clamp the clamping jaws on the first outer cylindrical surface 41, and use the turning tool to turn the second end surface 3;

[0062] S14, turning the second outer cylindrical surface 42, wherein the cutting depth of the turning tool is 0.50 mm-1.0 mm, and the feed speed of the turning tool is 0.30-0.40 mm / r;

[0063] S15, repeating steps S11 to S14 until the diameter and thickness of the aluminum-scandium target blank 1 reach a first predetermined value;

[0064] S16, repeating steps S11 to S14 until the diameter and thickness of the aluminum-scandium target blank 1 reach a second predetermined value; wherein, when turning the first end face 2 and the second end face 3, the radial feed speed of the aluminum-scandium target blank 1 of the turning tool is 0.10-0.20 mm / r; when turning the outer cylindrical surface 4, the axial feed speed of the aluminum-scandium target blank 1 of the turning tool is 0.10-0.20 mm / r, and the cutting depth of the turning tool is 0.20-0.50 mm;

[0065] S17, completing the turning process.

[0066] In summary, the embodiment of the present invention provides a method for processing an aluminum-scandium target blank 1, which uses a lathe to perform a first turning process and a third turning process step, and processes the first end face 2 and the second end face 3 respectively. Turning the first end face 2 into a plane can meet the customer's subsequent requirements for sputtering production, and turning the second end face 3 to a predetermined value can meet the customer's requirements for product size. At the same time, since the second end is the second end face 3 of the aluminum-scandium target blank 1, during the casting process of the aluminum-scandium target blank 1, the second end face 3 of the aluminum-scandium target blank 1 is rapidly cooled and the second end face 3 of the aluminum-scandium target blank 1 is formed. The upward cooling begins, resulting in a decrease in the aluminum-scandium percentage of the second end face 3 of the aluminum-scandium target blank 1, which deviates from the percentage of the upper aluminum-scandium target blank 1. Therefore, turning the second end face 3 to a predetermined value can reduce the deviation of the aluminum-scandium percentage in the aluminum-scandium target blank 1, thereby improving the quality of the product. The fourth turning process and the fifth turning process are respectively used for rough machining and fine machining of the outer cylindrical surface 4. The rough machining can quickly remove burrs on the outer cylindrical surface 4, and the fine machining can improve the smoothness of the surface of the outer cylindrical surface 4, thereby meeting customer requirements for the aluminum-scandium target blank 1 and improving the quality of the product. By stopping after turning the first end face 2 into a plane, not only can the customer's requirements be met, but also the turning amount can be reduced, and the generation of waste targets is reduced. When turning the outer cylindrical surface 4, in the fourth turning process, the cutting depth is limited to 0.50mm-1.0mm, and the feed speed of the turning tool is 0.30-0.40mm / r; it can improve the realization of fast cutting burrs while reducing the generation of waste targets as much as possible; in the fifth turning process, 0.50mm-1.0mm, and the feed speed of the turning tool is 0.30-0.40mm / r; it can improve the smoothness of the surface of the outer cylindrical surface 4 while reducing the generation of waste targets as much as possible.

[0067] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A method for processing an aluminum-scandium target blank, characterized in that: The steps include: Prepare a cylindrical aluminum-scandium target blank, wherein the aluminum-scandium target blank has a first end face, a second end face and an outer cylindrical surface; The aluminum-scandium target blank is clamped and fixed by the claws of a lathe; First turning process: turning the first end surface; Second turning process: turning the outer cylindrical surface along the axial direction of the aluminum-scandium target blank; The third turning process: turning the second end face; measuring the diameter size and axial thickness of the aluminum-scandium target blank; Fourth turning process: repeatedly performing the first turning process to the third turning process steps for multiple times, turning the first end face until the first end face forms a plane, turning the outer cylindrical surface and the second end face until the diameter and thickness of the aluminum-scandium target blank reach a first predetermined value; The diameter size and axial thickness of the aluminum-scandium target blank reach a first predetermined value; in the first turning process and the third turning process, the feed speed of the turning tool of the lathe along the radial movement of the aluminum-scandium target blank is 0.30-0.40 mm / r; in the second turning process, the cutting depth of the turning tool is 0.50 mm-1.0 mm; the feed speed of the turning tool along the axial movement of the aluminum-scandium target blank is 0.30-0.40 mm / r; Fifth turning process: repeatedly performing the first turning process to the third turning process steps for multiple times, turning the outer cylindrical surface and the second end surface, until the diameter size and thickness of the aluminum-scandium target blank reach a second predetermined value; In the first turning process and the third turning process, the feed speed of the turning tool along the radial movement of the aluminum-scandium target blank is 0.10-0.20mm / r; in the second turning process, the cutting depth of the turning tool is 0.20-0.50mm; the feed speed of the turning tool along the axial movement of the aluminum-scandium target blank is 0.10-0.20mm / r.

2. The processing method according to claim 1, characterized in that: In the fourth turning process step, the spindle speed of the lathe is 200r / min-300r / min; in the fifth turning process step, the spindle speed of the lathe is 400r / min-500r / min.

3. The processing method according to claim 2, characterized in that: In the fourth turning process step, the total thickness of the aluminum-scandium target blank cut by the turning tool on the first end face is 5.5 mm-11 mm, and the total thickness of the aluminum-scandium target blank cut by the turning tool on the second end face is 2 mm-3 mm.

4. The processing method according to claim 3, characterized in that: In the fifth turning process step, the total thickness of the aluminum-scandium target blank cut by the turning tool on the first end face and the second end face is 0.5 mm-1 mm.

5. The processing method according to claim 1, characterized in that: In the fourth turning process step, the first turning process to the third turning process step are repeated 5-10 times; in the fifth turning process step, the first turning process to the third turning process step are repeated 3-5 times.

6. The processing method according to claim 1, characterized in that: After executing the first turning process step, the first end face edge is chamfered; after executing the third turning process step, the second end face edge is chamfered; the chamfering angles of the first end face edge and the second end face edge are 30-45°, and the chamfering width is 3mm-5mm.

7. The processing method according to claim 1, characterized in that: The outer cylindrical surface is composed of a first outer cylindrical surface and a second outer cylindrical surface, the first outer cylindrical surface is close to the first end surface, and the second outer cylindrical surface is close to the second end surface; in the second turning step, the following steps are also included: Step 1: The clamping jaws are clamped on the second outer cylindrical surface, and the first outer cylindrical surface is turned; Step 2: Loosen the clamping claws, take out the aluminum-scandium target blank, turn the target blank over, clamp the clamping claws on the first outer cylindrical surface, and turn the second outer cylindrical surface.

8. The processing method according to claim 7, characterized in that: After executing step 1, the first turning step is performed.

9. The processing method according to claim 7, characterized in that: After executing step 2, the third turning step is performed.

10. The processing method according to claim 1, characterized in that: The first turning tool is used for turning the first end face and the second end face, and the second turning tool is used for turning the outer cylindrical surface.

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