A semiconductor rapid modular surface mount terminal valve

Abstract

The invention discloses a semiconductor rapid modular surface mounted terminal valve, comprising: a pressure regulating cover, an upper valve body, a lower valve body, and a foot seat, wherein the foot seat is integrally designed with the lower valve body, the upper valve body is threadedly connected to the lower valve body, an open inner cavity, an air inlet cavity and an air outlet cavity are provided in the lower valve body, the air inlet cavity and the air outlet cavity are both communicated with the open inner cavity, an ejector assembly is provided in the air outlet cavity, and the air inlet cavity and the air outlet cavity pass through the foot seat; the ejector assembly comprises an ejector and a sealing cone, the middle surface of the ejector is threaded, the ejector slides and sets a sealing cone, the sealing cone fits with the bottleneck of the air outlet cavity, a diaphragm assembly is provided in the open inner cavity of the upper valve body, an elastic pressure regulating assembly is provided above the diaphragm assembly, and the diaphragm assembly is abutted against the elastic pressure regulating assembly. The invention reduces the gas flow stroke, the airway is designed without springs and threads, the possibility of dust pollution is minimized, and the requirements for high cleanliness and high sensitivity of valves for semiconductor equipment are met.

Description

Technical Field

[0001] The invention relates to the technical field of valves, in particular to a semiconductor rapid modular surface mounted terminal valve. Background Art

[0002] A pressure reducing valve is a regulating device that reduces high-pressure gas to low-pressure gas and keeps the pressure and flow of the output gas stable. Since the gas source pressure is high, and the pressure required at the point of use is low and must be supplied to the equipment stably, a precise pressure reducer is needed to reduce the high-pressure gas of the gas source to low-pressure and stable gas, and it should be ensured that the required working pressure remains constant from beginning to end.

[0003] In the field of semiconductor production, due to the high precision and high cleanliness involved, higher requirements are placed on pressure reducing valves. For the sake of ease of operation, gas pressure reducing valves used in existing semiconductor process equipment are generally designed to be larger in size, with many welding points and accessories. The accessories and welding points of the pressure reducing valves are prone to generate dust that will mix with the gas, causing gas pollution. The gas travels a long distance in the pressure reducing valve, which will increase pollution and affect the yield rate of semiconductor products.

[0004] Therefore, in order to meet the increasing demands for cleanliness and precision of increasingly sophisticated semiconductor process equipment, we propose a semiconductor fast modular surface mounted terminal valve to solve the above-mentioned problems. Summary of the invention

[0005] The object of the present invention is to provide a semiconductor rapid modular surface mounted terminal valve to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solutions: A semiconductor rapid modular surface mounted terminal valve, comprising: a pressure regulating cover, an upper valve body, a lower valve body, and a foot seat, wherein the foot seat is integrally designed with the lower valve body, the upper valve body is threadedly connected with the lower valve body, and the upper valve body is rotatably connected with the pressure regulating cover;

[0007] An open inner cavity, an air inlet cavity and an air outlet cavity are provided in the lower valve body. The air inlet cavity and the air outlet cavity are both connected to the open inner cavity. The air outlet cavity is located on the central axis of the lower valve body. The connection between the air outlet cavity and the open inner cavity is designed in a bottleneck shape. A ejector assembly is provided in the air outlet cavity. The air inlet cavity and the air outlet cavity pass through the foot seat.

[0008] The ejector assembly includes an ejector and a sealing cone. The middle surface of the ejector is provided with a thread. The ejector slides over the sealing cone. The sealing cone is located below the thread of the ejector. The sealing cone fits with the bottleneck of the air outlet cavity. The maximum diameter of the sealing cone is smaller than the inner diameter of the air outlet cavity.

[0009] A diaphragm assembly is arranged in the open inner cavity of the upper valve body, an elastic pressure regulating assembly is arranged above the diaphragm assembly, the ejector assembly is fixedly connected to the diaphragm assembly, and the diaphragm assembly is butted against the elastic pressure regulating assembly.

[0010] Preferably, the diaphragm assembly includes a diaphragm assembly fixing rod, a diaphragm assembly base, a diaphragm assembly mounting seat and a diaphragm fixing piece. The diaphragm assembly mounting seat is fixedly arranged in the open inner cavity of the lower valve body. The lower surface of the diaphragm assembly mounting seat is concavely designed so that a part of the space in the open inner cavity is retained to communicate with the air outlet cavity and the air inlet cavity. The middle of the diaphragm assembly mounting seat is slidably connected to the diaphragm assembly base in a through-type manner. A card edge is provided at the lower end edge of the diaphragm assembly base, which is buckled with the diaphragm assembly mounting seat to limit the sliding distance of the diaphragm assembly base. A diaphragm assembly fixing rod is integrally provided at the upper end of the diaphragm assembly base. The diaphragm assembly base is fixedly threadedly mounted with a diaphragm fixing piece on the lower surface of the diaphragm assembly base, and a diaphragm is sandwiched between the diaphragm fixing piece and the diaphragm assembly base.

[0011] Preferably, the ejector pin is threadedly connected to the diaphragm fixing piece, and the relative position of the ejector pin and the diaphragm fixing piece is adjusted. The surfaces of the diaphragm assembly, the ejector pin assembly, the open inner cavity, the air inlet cavity and the air outlet cavity are electropolished.

[0012] Preferably, the elastic pressure regulating assembly comprises a pressure regulating cover, a pressure regulating rod, a pressure transmission sheet, a spring, a pressure ring, a wave spring sheet, a gasket and a spring seat. The spring seat is slidably arranged up and down in the upper valve body, and a wave spring sheet is sleeved on the outside of the spring seat. The lower end of the wave spring sheet abuts against the diaphragm assembly mounting seat, and the upper end of the wave spring sheet abuts against the spring seat. The middle thread of the spring seat is connected to the diaphragm assembly fixing rod, and the diaphragm assembly fixing rod passes through the upper and lower surfaces of the spring seat for adjusting the relative position of the diaphragm assembly fixing rod and the spring seat. The upper end of the spring seat abuts against the pressure ring, and the pressure ring is sleeved on the upper end of the diaphragm assembly fixing rod. A gasket is provided on the upper surface of the pressure ring, and the upper surface of the gasket abuts against the spring. The upper end of the spring is plugged into the pressure transmission sheet, and the upper surface of the pressure transmission sheet abuts against the pressure regulating rod. The upper end of the pressure regulating rod is fixedly connected to the pressure regulating cover, and a circular pressure head is integrally provided at the connection between the lower end of the pressure regulating rod and the pressure transmission sheet, and a groove is provided on the upper surface of the pressure transmission sheet.

[0013] Preferably, the pressure regulating rod passes through the upper end surface of the upper valve body, and a thread is provided on the surface of the pressure regulating rod, and the pressure regulating rod is threadedly connected to the upper end surface of the upper valve body.

[0014] Preferably, a sealing ring is sleeved on the upper side surface of the upper valve body.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. High-pressure gas enters from the air inlet cavity, passes through the open inner cavity of the lower valve body and enters the air outlet cavity. The elastic pressure regulating component generates elastic pressure on the diaphragm component, which offsets part of the pressure with the gas pressure to reduce the gas pressure. The diaphragm component presses the ejector assembly downward to separate the ejector assembly from the bottleneck of the air outlet cavity, so that the air outlet cavity is connected from top to bottom. The gas is discharged from the air outlet cavity to achieve stable discharge of gas pressure. Not only does it adopt a polished surface without dead angles on all airways, but it also greatly reduces the gas flow stroke. The airway is designed without springs and threads to minimize the possibility of dust pollution.

[0017] 2. Rotate the pressure regulating cover to drive the pressure regulating rod to rotate, so that the pressure regulating rod moves up and down in the upper valve body, driving the pressure transmission plate to move up and down, compressing the spring, adjusting the elastic force of the spring on the gasket and the pressure ring, and the pressure ring transmits the elastic force to the spring seat. The spring seat applies a buffering elastic force through the wave spring sheet, thereby controlling the up and down movement of the diaphragm assembly fixing rod. The diaphragm assembly fixing rod applies elastic force to the ejector pin through the diaphragm. High-pressure gas enters from the air inlet cavity and enters the air outlet cavity through the open inner cavity of the lower valve body. The diaphragm assembly offsets part of the gas pressure to achieve decompression of the gas pressure, thereby meeting the requirements of high-cleanliness and high-sensitivity valves for semiconductor equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention;

[0019] Figure 2 is a cross-sectional view of the present invention;

[0020] Figure 3 It is an exploded view of the parts of the present invention;

[0021] Figure 4 It is a schematic diagram of the structure of the diaphragm in the present invention.

[0022] In the figure: 1. pressure regulating cover; 2. upper valve body; 3. lower valve body; 4. foot seat; 5. pressure regulating rod; 6. sealing ring; 7. pressure transmission plate; 8. round pressure head; 9. spring; 10. pressure ring; 11. diaphragm assembly fixing rod; 12. wave spring; 13. diaphragm assembly base; 14. diaphragm assembly mounting seat; 15. diaphragm fixing part; 16. ejector pin; 17. air inlet cavity; 18. air outlet cavity; 19. sealing cone; 20. gasket; 21. spring seat; 22. diaphragm. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] See also Figure 1-4 The present invention provides a technical solution: a semiconductor rapid modular surface mounted terminal valve, comprising: a pressure regulating cover 1, an upper valve body 2, a lower valve body 3, and a foot seat 4, wherein the foot seat 4 is integrally designed with the lower valve body 3, the upper valve body 2 is threadedly connected with the lower valve body 3, and the upper valve body 2 is rotatably connected with the pressure regulating cover 1;

[0025] An open inner cavity, an air inlet cavity 17 and an air outlet cavity 18 are provided in the lower valve body 3. The air inlet cavity 17 and the air outlet cavity 18 are both connected to the open inner cavity. The air outlet cavity 18 is located on the central axis of the lower valve body 3. The connection between the air outlet cavity 18 and the open inner cavity is designed in a bottleneck shape. A ejector assembly is provided in the air outlet cavity 18. The air inlet cavity 17 and the air outlet cavity 18 pass through the foot seat 4.

[0026] The ejector assembly includes an ejector 16 and a sealing cone 19. The middle surface of the ejector 16 is provided with a thread. The ejector 16 is slidably sleeved with the sealing cone 19. The sealing cone 19 is located below the thread of the ejector 16. The sealing cone 19 fits with the bottleneck of the air outlet channel 18. The maximum diameter of the sealing cone 19 is smaller than the inner diameter of the air outlet channel 18.

[0027] A diaphragm assembly is provided in the open inner cavity of the upper valve body 2, an elastic pressure regulating assembly is provided above the diaphragm assembly, a ejector assembly is fixedly connected to the diaphragm assembly, and the diaphragm assembly is abutted against the elastic pressure regulating assembly. High-pressure gas enters from the air inlet cavity 17 and enters the air outlet cavity 18 through the open inner cavity of the lower valve body 3. The elastic pressure regulating assembly generates elastic pressure on the diaphragm assembly, which offsets a part of the pressure with the gas pressure to achieve decompression of the gas pressure. The diaphragm assembly presses the ejector assembly downward to separate the ejector assembly from the bottleneck of the air outlet cavity 18, so that the air outlet cavity 18 is connected from top to bottom, and the gas is discharged from the air outlet cavity 18;

[0028] The diaphragm assembly comprises a diaphragm assembly fixing rod 11, a diaphragm assembly base 13, a diaphragm assembly mounting seat 14 and a diaphragm fixing member 15. The diaphragm assembly mounting seat 14 is fixedly arranged in the open inner cavity of the lower valve body 3. The lower surface of the diaphragm assembly mounting seat 14 is concavely designed so that a part of the open inner cavity is reserved to communicate with the air outlet cavity 18 and the air inlet cavity 17. The diaphragm assembly mounting seat 14 is slidably connected to the diaphragm assembly base 13 in the middle through the diaphragm assembly mounting seat 14. A card edge is provided at the lower edge of the diaphragm assembly base 13, which is buckled with the diaphragm assembly mounting seat 14 to limit the sliding distance of the diaphragm assembly base 13. The diaphragm assembly fixing rod 11 is integrally provided at the upper end of the diaphragm assembly base 13. The diaphragm assembly fixing member 15 is fixedly threadedly installed on the lower surface of the diaphragm assembly base 13. A diaphragm 22 is sandwiched between the diaphragm fixing member 15 and the diaphragm assembly base 13.

[0029] The ejector pin 16 is threadedly connected to the diaphragm fixing member 15, and is used to adjust the relative position of the ejector pin 16 and the diaphragm fixing member 15;

[0030] The surfaces of the diaphragm assembly, the ejector assembly, the open inner cavity, the air inlet channel 17 and the air outlet channel 18 are electro-polished;

[0031] The elastic pressure regulating assembly comprises a pressure regulating cover 1, a pressure regulating pressure rod 5, a pressure transmission sheet 7, a spring 9, a pressure ring 10, a wave spring sheet 12, a gasket 20 and a spring seat 21. The spring seat 21 is slidably arranged up and down in the upper valve body 2. The wave spring sheet 12 is sleeved on the outside of the spring seat 21. The lower end of the wave spring sheet 12 abuts against the diaphragm assembly mounting seat 14. The upper end of the wave spring sheet 12 abuts against the spring seat 21. The middle of the spring seat 21 is threadedly connected to the diaphragm assembly fixing rod 11. The diaphragm assembly fixing rod 11 passes through the upper and lower surfaces of the spring seat 21, and is used to adjust the diaphragm assembly fixing rod 11 and the spring seat 21. Relative position, the upper end of the spring seat 21 is against the pressure ring 10, the pressure ring 10 is sleeved on the upper end of the diaphragm assembly fixed rod 11, the upper surface of the pressure ring 10 is provided with a gasket 20, the upper surface of the gasket 20 is against the spring 9, the upper end of the spring 9 is plugged with the pressure transmission sheet 7, the upper surface of the pressure transmission sheet 7 is against the pressure regulating rod 5, the upper end of the pressure regulating rod 5 is fixedly connected to the pressure regulating cover 1, the lower end of the pressure regulating rod 5 and the connection between the pressure transmission sheet 7 are integrally provided with a circular pressure head 8, the upper surface of the pressure transmission sheet 7 is provided with a groove for limiting the circular pressure head 8 to prevent the circular pressure head 8 from deviating from the pressure transmission sheet 7 when the circular pressure head 8 moves downward;

[0032] The pressure regulating rod 5 passes through the upper end surface of the upper valve body 2, and a thread is provided on the surface of the pressure regulating rod 5, and the pressure regulating rod 5 is threadedly connected to the upper end surface of the upper valve body 2;

[0033] A sealing ring 6 is sleeved on the upper side surface of the upper valve body 2 for sliding sealing between the upper valve body 2 and the pressure regulating cover 1;

[0034] The pressure regulating cover 1 is rotated to drive the pressure regulating rod 5 to rotate, so that the pressure regulating rod 5 moves up and down in the upper valve body 2, driving the pressure transmission plate 7 to move up and down, compressing the spring 9, and adjusting the elastic force of the spring 9 on the gasket 20 and the pressure ring 10. The pressure ring 10 transmits the elastic force to the spring seat 21. The spring seat 21 applies a buffering elastic force through the wave spring sheet 12, thereby controlling the diaphragm assembly fixing rod 11 to move up and down. The diaphragm assembly fixing rod 11 applies an elastic force to the ejector pin 16 through the diaphragm fixing piece 15. The high-pressure gas enters from the air inlet cavity 17 and enters the air outlet cavity 18 through the open inner cavity of the lower valve body 3. The diaphragm assembly offsets part of the gas pressure to reduce the gas pressure. At the same time, the diaphragm fixing piece 15 presses the ejector pin 16 downward to separate the sealing cone 19 from the bottleneck of the air outlet cavity 18, so that the air outlet cavity 18 is connected up and down, and the gas is discharged from the air outlet cavity 18, so that the gas pressure is discharged smoothly and the gas flow stroke is reduced.

[0035] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0036] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor rapid modular surface mount terminal valve, include: A pressure regulating cover (1), an upper valve body (2), a lower valve body (3), and a foot seat (4), wherein the foot seat (4) and the lower valve body (3) are integrally designed, the upper valve body (2) and the lower valve body (3) are threadedly connected, and the upper valve body (2) and the pressure regulating cover (1) are rotatably connected; The invention is characterized in that: an open inner cavity, an air inlet cavity (17) and an air outlet cavity (18) are provided in the lower valve body (3); the air inlet cavity (17) and the air outlet cavity (18) are both connected to the open inner cavity; the air outlet cavity (18) is located on the central axis of the lower valve body (3); a bottleneck-shaped design is provided at the connection point between the air outlet cavity (18) and the open inner cavity; a pin assembly is provided in the air outlet cavity (18); and the air inlet cavity (17) and the air outlet cavity (18) penetrate the foot seat (4); The ejector pin assembly comprises an ejector pin (16) and a sealing cone (19). The ejector pin (16) is provided with a thread on its middle surface. The ejector pin (16) is slidably sleeved with the sealing cone (19). The sealing cone (19) is located below the thread of the ejector pin (16). The sealing cone (19) fits into the bottleneck of the air outlet cavity (18). The maximum diameter of the sealing cone (19) is smaller than the inner diameter of the air outlet cavity (18). A diaphragm assembly is provided in the open inner cavity of the upper valve body (2), an elastic pressure regulating assembly is provided above the diaphragm assembly, the ejector assembly is fixedly connected to the diaphragm assembly, and the diaphragm assembly is abutted against the elastic pressure regulating assembly; The diaphragm assembly comprises a diaphragm assembly fixing rod (11), a diaphragm assembly base (13), a diaphragm assembly mounting seat (14) and a diaphragm fixing piece (15). The diaphragm assembly mounting seat (14) is fixedly arranged in the open inner cavity of the lower valve body (3). The lower surface of the diaphragm assembly mounting seat (14) is designed to be concave, so that a part of the open inner cavity is reserved to communicate with the air outlet cavity (18) and the air inlet cavity (17). The middle of the diaphragm assembly mounting seat (14) is slidably connected to the diaphragm assembly base (13) in a through-type manner. A clamping edge is provided at the lower edge of the diaphragm assembly base (13) and is clamped with the diaphragm assembly mounting seat (14) to limit the sliding distance of the diaphragm assembly base (13). The upper end of the diaphragm assembly base (13) is integrally provided with a diaphragm assembly fixing rod (11). The lower surface of the diaphragm assembly base (13) is fixed with a threaded diaphragm fixing piece (15). A diaphragm (22) is sandwiched between the diaphragm fixing piece (15) and the diaphragm assembly base (13). The ejector pin (16) is threadedly connected to the diaphragm fixing member (15), and the relative position of the ejector pin (16) and the diaphragm fixing member (15) is adjusted. The surfaces of the diaphragm assembly, the ejector pin assembly, the open inner cavity, the air inlet channel (17) and the air outlet channel (18) are electro-polished; The elastic pressure regulating assembly comprises a pressure regulating cover (1), a pressure regulating rod (5), a pressure transmission sheet (7), a spring (9), a pressure ring (10), a wave spring sheet (12), a gasket (20) and a spring seat (21). The spring seat (21) is slidably arranged up and down in the upper valve body (2). The wave spring sheet (12) is sleeved on the outside of the spring seat (21). The lower end of the wave spring sheet (12) abuts against the diaphragm assembly mounting seat (14). The upper end of the wave spring sheet (12) abuts against the spring seat (21). The middle of the spring seat (21) is threadedly connected to the diaphragm assembly fixing rod (11). The diaphragm assembly fixing rod (11) passes through the upper and lower surfaces of the spring seat (21) for regulating the pressure. The diaphragm assembly fixing rod (11) and the spring seat (21) are in relative positions, the upper end of the spring seat (21) is abutted against the pressure ring (10), the pressure ring (10) is sleeved on the upper end of the diaphragm assembly fixing rod (11), a gasket (20) is provided on the upper surface of the pressure ring (10), the upper surface of the gasket (20) is abutted against the spring (9), the upper end of the spring (9) is plugged into the pressure transmission sheet (7), the upper surface of the pressure transmission sheet (7) is abutted against the pressure regulating rod (5), the upper end of the pressure regulating rod (5) is fixedly connected to the pressure regulating cover (1), a circular pressure head (8) is integrally provided at the connection between the lower end of the pressure regulating rod (5) and the pressure transmission sheet (7), and a groove is provided on the upper surface of the pressure transmission sheet (7).

2. A semiconductor rapid modular surface mount terminal valve according to claim 1, It is characterized in that The pressure regulating rod (5) passes through the upper end surface of the upper valve body (2), and a thread is provided on the surface of the pressure regulating rod (5). The pressure regulating rod (5) is threadedly connected to the upper end surface of the upper valve body (2).

3. A semiconductor rapid modular surface mount terminal valve according to claim 1, It is characterized in that A sealing ring (6) is sleeved on the upper side surface of the upper valve body (2).

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