Mask Cassette and Semiconductor Equipment

Abstract

The present invention relates to the field of semiconductor technology, and provides a photomask cassette and a semiconductor device. The photomask cassette includes: a body having an accommodation space for accommodating a photomask, the accommodation space having a first opening located on the circumferential side of the body; a shielding member disposed on the body and movably disposed relative to the body to shield or release the first opening. Since the first opening is located on the circumferential side of the body, when the shielding member for shielding or releasing the first opening releases the first opening, the photomask cassette is in a separated front and rear manner, effectively avoiding the occurrence of air flow disturbance phenomenon, reducing the phenomenon of dust contaminating the photomask, and effectively improving the yield of semiconductor structures.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and particularly to a photomask cassette and a semiconductor device. Background Art

[0002] A photomask cassette is used to store photomasks. During the use of a photomask, the photomask cassette needs to be placed on a corresponding machine table, and the photomask cassette is opened to take out the photomask.

[0003] In related technologies, when the photomask cassette is opened, the lid and the main body are separated up and down, and after separation, the photomask is clamped into the interior of the machine table. During the up-and-down opening and closing process of the lid, air flow disturbance will occur, so dust inside the machine table will fall onto the photomask, thereby affecting the yield of semiconductor structures. Summary of the Invention

[0004] The present invention provides a photomask cassette and a semiconductor device to improve the performance of the photomask cassette.

[0005] According to a first aspect of the present invention, a photomask cassette is provided, including:

[0006] A main body having a receiving space for receiving a photomask, the receiving space having a first opening located at a circumferential side portion of the main body;

[0007] A shielding member disposed on the main body and movably disposed relative to the main body to shield or release the first opening.

[0008] In an embodiment of the present invention, the shielding member is detachably connected to the main body.

[0009] In an embodiment of the present invention, the shielding member is snap-fitted to the main body.

[0010] In an embodiment of the present invention, the shielding member includes:

[0011] A lid portion that shields or releases the first opening;

[0012] A snap-fitting portion connected to the lid portion and movably disposed relative to the lid portion so that the snap-fitting portion has a first position where it is snap-fitted to the main body and a second position where it is separated from the main body;

[0013] Wherein, when the snap-fitting portion is in the second position, the shielding member can be removed from the main body.

[0014] In an embodiment of the present invention, the snap-fitting portion is rotatably disposed relative to the lid portion.

[0015] In an embodiment of the present invention, a card slot is provided on the main body. When the snap-fitting portion is in the first position, the snap-fitting portion is inserted into the card slot, and when the snap-fitting portion is in the second position, the snap-fitting portion is disengaged from the card slot.

[0016] In an embodiment of the present invention, a rotation slot is provided on the clamping portion, and / or a rotation buckle is provided on the clamping portion.

[0017] In an embodiment of the present invention, the accommodating space has a second opening located on the circumferential side portion of the body, and the shielding member is inserted into the accommodating space through the second opening.

[0018] In an embodiment of the present invention, the body is a rectangular body, which includes two opposite first surfaces, two opposite second surfaces, and two opposite third surfaces, and the second surface and the third surface surround the first surface;

[0019] Wherein, the first opening and the second opening are respectively located on adjacent second surfaces and third surfaces.

[0020] In an embodiment of the present invention, the height of the first opening is less than the height of the second opening;

[0021] Wherein, when the clamping portion is in the first position, along the height direction of the second opening, the size of the clamping portion is greater than the height of the second opening, and when the clamping portion is in the second position, along the height direction of the second opening, the size of the clamping portion is less than the height of the second opening.

[0022] In an embodiment of the present invention, a sealing member is provided between the cover portion and the body.

[0023] In an embodiment of the present invention, the shielding member further includes:

[0024] A connecting portion, the clamping portion is located between the connecting portion and the cover portion, and the connecting portion is connected to the cover portion;

[0025] Wherein, the clamping portion is movably arranged relative to the connecting portion.

[0026] According to the second aspect of the present invention, a semiconductor device is provided, which includes the above-mentioned photomask box.

[0027] In an embodiment of the present invention, the semiconductor device further includes:

[0028] A carrying structure, on which the photomask box is arranged;

[0029] A driving mechanism, which drives the shielding member to move relative to the body so that the shielding member shields or releases the first opening, and after the shielding member releases the first opening, the driving mechanism takes out the photomask through the first opening.

[0030] In an embodiment of the present invention, the driving mechanism includes:

[0031] A robot, which drives the clamping portion of the shielding member to switch between the first position and the second position;

[0032] The opening and closing member drives the shielding member to be pulled out from the second opening.

[0033] In an embodiment of the present invention, the opening and closing member includes:

[0034] A slide rail;

[0035] A slider, which is arranged on the slide rail and is movably arranged along the slide rail;

[0036] A driving part, which is drivingly connected to the slider to drive the slider to move along the slide rail;

[0037] An opening and closing part, which is arranged on the driving part and is used for connecting with the shielding member to drive the shielding member to move relative to the body.

[0038] The photomask cassette of the embodiment of the present invention includes a body and a shielding member. The photomask is stored in the accommodation space of the body, and the photomask can be taken out from the accommodation space through the first opening. Since the first opening is located on the circumferential side of the body, when the shielding member for shielding or releasing the first opening releases the first opening, the photomask cassette belongs to a front-back separated manner, effectively avoiding the occurrence of air flow disturbance phenomenon, reducing the phenomenon of dust contaminating the photomask, and effectively improving the yield rate of semiconductor structures. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] By considering the following detailed description of the preferred embodiments of the present invention in conjunction with the drawings, various objects, features and advantages of the present invention will become more obvious. The drawings are only illustrative diagrams of the present invention and are not necessarily drawn to scale. In the drawings, the same reference numerals always represent the same or similar components. Among them:

[0040] Figure 1 is an exploded structural schematic diagram of a photomask cassette shown according to an exemplary embodiment;

[0041] Figure 2 is a structural schematic diagram of a photomask cassette from a first perspective shown according to an exemplary embodiment;

[0042] Figure 3 is a structural schematic diagram of a photomask cassette from a second perspective shown according to an exemplary embodiment;

[0043] Figure 4 is a structural schematic diagram of a body and a seal of a photomask cassette shown according to an exemplary embodiment;

[0044] Figure 5 is a structural schematic diagram of a photomask cassette when the clamping part of the shielding member is in the first position shown according to an exemplary embodiment;

[0045] Figure 6Schematic structural diagram when the clamping portion of the shielding member of a photomask cassette is in the second position, shown according to an exemplary embodiment;

[0046] Figure 7 Schematic application structural diagram of a photomask cassette, shown according to an exemplary embodiment;

[0047] Figure 8 Schematic combined structural diagram of a photomask cassette and a carrier structure of a semiconductor device, shown according to an exemplary embodiment;

[0048] Figure 9 Schematic structural diagram of a state of a semiconductor device, shown according to an exemplary embodiment;

[0049] Figure 10 Schematic structural diagram of another state of a semiconductor device, shown according to an exemplary embodiment.

[0050] Explanation of reference numerals is as follows:

[0051] 1. Photomask; 2. Photomask cassette;

[0052] 10. Body; 11. Accommodating space; 111. First opening; 112. Second opening; 13. First surface; 14. Second surface; 15. Third surface; 20. Shielding member; 21. Cover portion; 22. Clamping portion; 221. Rotating slot; 222. Rotating buckle; 23. Connecting portion; 231. Avoidance hole; 24. Fastening member; 30. Sealing member; 40. Carrier structure; 50. Driving mechanism; 51. Robot; 52. Opening and closing member; 521. Slide rail; 522. Slide block; 523. Driving portion; 524. Opening and closing portion. Detailed implementation manners

[0053] Typical embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can have various variations in different embodiments, all of which do not depart from the scope of the present invention, and the descriptions and drawings therein are for illustrative purposes in essence and are not used to limit the present invention.

[0054] In the following description of different exemplary embodiments of the present disclosure, reference is made to the accompanying drawings, which form a part of the present disclosure and in which different exemplary structures, systems, and steps for implementing various aspects of the present disclosure are shown by way of example. It should be understood that other specific solutions of components, structures, exemplary devices, systems, and steps may be used, and structural and functional modifications may be made without departing from the scope of the present disclosure. Moreover, although terms such as "above", "between", "inside", etc. may be used in this specification to describe different exemplary features and elements of the present disclosure, these terms are used herein only for convenience, for example, according to the orientation of the examples in the drawings. Nothing in this specification should be construed as requiring a specific three-dimensional orientation of the structure to fall within the scope of the present disclosure.

[0055] One embodiment of the present invention provides a photomask cassette. Please refer to Figures 1 to 5 , the photomask cassette includes: a body 10 having a receiving space 11 for receiving a photomask 1, the receiving space 11 having a first opening 111 located at a circumferential side portion of the body 10; and a shielding member 20 disposed on the body 10 and movably disposed relative to the body 10 to shield or release the first opening 111.

[0056] The photomask cassette according to an embodiment of the present invention includes a body 10 and a shielding member 20. The photomask 1 is stored in the receiving space 11 of the body 10, and the photomask 1 can be taken out from the receiving space 11 through the first opening 111. Since the first opening 111 is located at a circumferential side portion of the body 10, when the shielding member 20 for shielding or releasing the first opening 111 releases the first opening 111, the photomask cassette is in a front-back separated manner, effectively avoiding the occurrence of air flow disturbance phenomena and reducing the phenomenon of dust contaminating the photomask 1, effectively improving the yield rate of semiconductor structures.

[0057] It should be noted that in the related art, the first opening is located on the upper surface or the lower surface of the body. When the photomask 1 needs to be taken out, the photomask cassette is in an up-down separated manner, so dynamic air flow will be caused, resulting in dust falling on the photomask 1 and affecting exposure. However, in the photomask cassette of this embodiment, since the first opening 111 is located at a circumferential side portion of the body 10, when the photomask 1 needs to be taken out, the photomask cassette is in a front-back separated manner, effectively avoiding the occurrence of air flow disturbance phenomena and reducing the phenomenon of dust contaminating the photomask 1.

[0058] The shielding member 20 is movably disposed relative to the body 10, that is, by changing the position of the shielding member 20, the shielding member 20 shields the first opening 111. At this time, the photomask 1 is sealed within the body 10, and when the shielding member 20 releases the first opening 111, the photomask 1 is exposed through the first opening 111. At this time, the photomask 1 can be taken out from the body 10 through the first opening 111.

[0059] In some embodiments, the shielding member 20 can move relative to the body 10, but when the shielding member 20 releases the first opening 111, the shielding member 20 may not be removed from the body 10, and at this time, a portion of the shielding member 20 may be connected to the body 10 in a limiting manner. For example, one end of the shielding member 20 may be hinged to the body 10, and the shielding member 20 may be rotated so that the shielding member 20 blocks or releases the first opening 111. Alternatively, the shielding member 20 may be set on the body 10 in a pull-out manner, and after the body 10 is pulled into place, one end of the shielding member 20 may be in limiting contact with the body 10, thereby preventing the shielding member 20 from being separated from the body 10. At this time, the matching mode of the shielding member 20 and the body 10 is similar to a drawer structure, except that when the shielding member 20 is pulled out, the first opening 111 of the body 10 needs to be released.

[0060] In one embodiment, the shielding member 20 is detachably connected to the body 10, that is, when the light mask 1 needs to be taken out of the body 10, the shielding member 20 is removed to completely release the first opening 111. The shielding member 20 can be removed in a direction away from the first opening 111, that is, the shielding member 20 is removed in a direction perpendicular to the first opening 111. Alternatively, the shielding member 20 can be removed in a direction parallel to the first opening 111, which is not limited here, as long as the shielding member 20 is removable.

[0061] Optionally, the shielding member 20 and the body 10 may be connected via fasteners, that is, when the shielding member 20 needs to be removed from the body 10 , the fasteners release the connection between the shielding member 20 and the body 10 , thereby removing the shielding member 20 from the body 10 .

[0062] Optionally, the shielding member 20 is snap-connected with the body 10. When the shielding member 20 needs to be removed from the body 10, the snap-connected relationship between the shielding member 20 and the body 10 can be released first, and then the shielding member 20 can be removed from the body 10. Alternatively, an external force is applied to the shielding member 20, so that during the process of removing the shielding member 20 from the body 10, the snap-connected relationship between the shielding member 20 and the body 10 is also released. For example, the shielding member 20 is provided with a deformable buckle, and the body 10 is provided with a slot. The buckle enters the slot by deformation, and when removed, the buckle is separated from the slot by deformation.

[0063] In one embodiment, Figures 2 to 6As shown in the figure, the shielding member 20 includes: a cover portion 21 that shields or releases the first opening 111; a clamping portion 22 that is connected to the cover portion 21 and is movably provided relative to the cover portion 21, so that the clamping portion 22 has a first position where it is clamped to the body 10 and a second position where it is separated from the body 10; wherein, when the clamping portion 22 is in the second position, the shielding member 20 can be removed from the body 10. The cover portion 21 may not have a fixed connection relationship with the body 10, but relies on the clamping portion 22 to be clamped to the body 10. Therefore, by adjusting the position of the clamping portion 22, the shielding member 20 can be connected to or separated from the body 10.

[0064] Optionally, the clamping portion 22 can be a plug, and a jack is provided on the body 10. By sliding the plug, the plug is inserted into the jack, or the plug is pulled out of the jack, so that the shielding member 20 is connected to the body 10, or the shielding member 20 is separated from the body 10.

[0065] Optionally, the clamping portion 22 is rotatably provided relative to the cover portion 21, that is, by rotating the clamping portion 22, the clamping portion 22 is switched between the first position and the second position, so as to facilitate the connection and separation of the shielding member 20 and the body 10.

[0066] Furthermore, a card slot is provided on the body 10. When the clamping portion 22 is in the first position, the clamping portion 22 is inserted into the card slot. When the clamping portion 22 is in the second position, the clamping portion 22 is separated from the card slot. By rotating the clamping portion 22, the clamping portion 22 enters or exits the card slot, so as to facilitate the connection and separation of the shielding member 20 and the body 10. This is not only convenient to operate, but also has good connection stability.

[0067] In one embodiment, as Figure 2 shown, a rotating slot 221 is provided on the clamping portion 22, and / or a rotating buckle 222 is provided on the clamping portion 22. The rotating slot 221 and the rotating buckle 222 are used to connect to an external component, so that the external component drives the clamping portion 22 to rotate relative to the cover portion 21. The external component can be a robot 51, and the robot 51 here includes a robotic arm and a control portion.

[0068] Optionally, both the rotating slot 221 and the rotating buckle 222 can be multiple. The rotating buckle 222 can be a convex structure, and the specific form of the convex structure is not limited here and can be selected according to actual needs. Correspondingly, the specific form of the rotating slot 221 is not limited here and can be selected according to actual needs.

[0069] In one embodiment, as Figure 3 and Figure 4As shown, the accommodation space 11 has a second opening 112. The second opening 112 is located at the circumferential side of the main body 10. The shielding member 20 is inserted into the accommodation space 11 through the second opening 112, or the shielding member 20 is taken out of the accommodation space 11 through the second opening 112. The installation and disassembly of the shielding member 20 relative to the main body 10 are both carried out by moving in a direction parallel to the second opening 112, that is, the shielding member 20 moves relative to the main body 10 in a pulling and pushing manner, so as to maximize the avoidance of air flow disturbance between the shielding member 20 and the main body 10, thus ensuring that dust will not be raised, and ensuring the cleanliness when taking out the photomask 1.

[0070] It should be noted that both the first opening 111 and the second opening 112 are located at the circumferential side of the main body 10, but the first opening 111 and the second opening 112 are in different directions. That is, the photomask 1 can move relative to the main body 10 in the first direction and be taken out from the accommodation space 11, while the shielding member 20 can move relative to the main body 10 in the second direction and be taken out from the accommodation space 11. The first direction is perpendicular to the first opening 111, the second direction is perpendicular to the second opening 112, the first direction can be perpendicular to the second direction, or the included angle between the first direction and the second direction can be not equal to 90 degrees, which is not limited here.

[0071] Furthermore, the cross-sectional areas of the accommodation space 11 can be all the same, that is, the cross-sectional area of the first cavity of the accommodation space 11 for accommodating the shielding member 20 can be equal to the cross-sectional area of the second cavity of the accommodation space 11 for accommodating the photomask 1. Or, the cross-sectional area of the first cavity of the accommodation space 11 for accommodating the shielding member 20 can be larger than the cross-sectional area of the second cavity of the accommodation space 11 for accommodating the photomask 1, so as to facilitate the photomask 1 to enter the first cavity from the second cavity. There is no limitation on the internal structure of the accommodation space 11, as long as it can ensure the accommodation of the photomask 1 and the shielding member 20. And a clamping groove for clamping with the clamping portion 22 is provided in the first cavity of the accommodation space 11 for accommodating the shielding member 20.

[0072] In one embodiment, as Figure 1 and Figure 4 shown, the main body 10 is a rectangular body. The main body 10 includes two opposite first surfaces 13, two opposite second surfaces 14, and two opposite third surfaces 15. The second surface 14 and the third surface 15 surround the first surface 13; wherein, the first opening 111 and the second opening 112 are respectively located on the adjacent second surface 14 and third surface 15. At this time, the first opening 111 and the second opening 112 are in a perpendicular relationship, that is, the moving direction of the photomask 1 away from the main body 10 is perpendicular to the moving direction of the shielding member 20 away from the main body 10.

[0073] Optionally, the height of the first opening 111 is smaller than the height of the second opening 112; wherein, when the clamping portion 22 is located at the first position, along the height direction of the second opening 112, the size of the clamping portion 22 is larger than the height of the second opening 112, and when the clamping portion 22 is located at the second position, along the height direction of the second opening 112, the size of the clamping portion 22 is smaller than the height of the second opening 112.

[0074] Combination Figure 2 and Figure 5 As shown, when the snap-fitting portion 22 is located at the first position, the snap-fitting portion 22 needs to be snap-fitted with the slot of the main body 10. At this time, the shielding member 20 is connected to the main body 10. Therefore, the dimension of the shielding member 20 along the height direction of the second opening 112 needs to be greater than the height of the second opening 112, so as to ensure that the shielding member 20 will not separate from the second opening 112. At this time, the dimension of the snap-fitting portion 22 along the height direction of the second opening 112 is also greater than the dimension of the cover body 21 along the height direction of the second opening 112.

[0075] like Figure 6 As shown, when the clamping portion 22 is in the second position, the clamping portion 22 needs to be disengaged from the clamping slot of the body 10. At this time, the shielding member 20 is separated from the body 10. Therefore, the dimension of the shielding member 20 along the height direction of the second opening 112 needs to be smaller than the height of the second opening 112, so as to ensure that the shielding member 20 can be disengaged from the second opening 112. At this time, the dimension of the clamping portion 22 along the height direction of the second opening 112 is not greater than the dimension of the cover body 21 along the height direction of the second opening 112. The rotation angle of the clamping portion 22 from the first position to the second position is not limited here, and can be 90 degrees, or greater or less than 90 degrees.

[0076] It should be noted that, since at least part of the shielding member 20 is installed in the accommodating space 11 to achieve sealing of the light mask 1 , the shielding member 20 for the first opening 111 is actually internal shielding, that is, the shielding member 20 is located on the side of the first opening 111 close to the light mask 1 .

[0077] In one embodiment, Figure 3 and Figure 4 As shown, a seal 30 is provided between the cover 21 and the body 10, so as to effectively seal the photomask 1 and prevent external contamination of the photomask 1. The seal 30 can be a seal in the related art, such as a rubber sealing ring structure, which is not limited here, and the focus is on reflecting that the seal 30 can seal the cover 21 and the body 10.

[0078] In one embodiment, Figure 2 and Figure 3As shown in the figure, the shielding member 20 further includes: a connecting portion 23, a clamping portion 22 is located between the connecting portion 23 and the cover portion 21, and the connecting portion 23 is connected to the cover portion 21; wherein, the clamping portion 22 is movably arranged relative to the connecting portion 23. The connecting portion 23 and the cover portion 21 cooperate to realize reliable clamping of the clamping portion 22, prevent the clamping portion 22 from detaching, and ensure that the clamping portion 22 can rotate reliably.

[0079] The connecting portion 23 and the cover portion 21 can be connected by a fastener 24. The fastener 24 can be multiple. The fastener 24 can be a structure such as a bolt in the related art, and the fastener 24 can also be a spring nail in the related art.

[0080] Optionally, at least one of the cover portion 21 and the connecting portion 23 is provided with a limiting groove, and the clamping portion 22 is located in the limiting groove, so as to ensure that the clamping portion 22 can only rotate relative to the cover portion 21 and the connecting portion 23. Alternatively, the clamping portion 22 can also be rotatably arranged on at least one of the cover portion 21 and the connecting portion 23.

[0081] Furthermore, as Figure 2 shown, when a rotating slot 221 and a rotating buckle 222 are provided on the clamping portion 22, an avoidance hole 231 is provided on the connecting portion 23, that is, the avoidance hole 231 realizes avoidance of the rotating slot 221 and the rotating buckle 222, so as to ensure that an external structure can be connected to the clamping portion 22 through the rotating slot 221, or when the external structure is connected to the rotating buckle 222, the avoidance hole 231 ensures that the rotating buckle 222 does not interfere with the connecting portion 23.

[0082] An embodiment of the present invention further provides a semiconductor device. Please refer to Figures 1 to 10 , the semiconductor device includes the above-mentioned photomask box 2.

[0083] In one embodiment, as Figures 7 to 10 shown, the semiconductor device further includes: a carrying structure 40, the photomask box is arranged on the carrying structure 40; a driving mechanism 50, the driving mechanism 50 drives the shielding member 20 to move relative to the body 10, so that the shielding member 20 shields or releases the first opening 111, and after the shielding member 20 releases the first opening 111, the driving mechanism 50 takes out the photomask 1 through the first opening 111.

[0084] Optionally, the carrying structure 40 realizes fixation of the photomask box 2. To ensure that during the use of the photomask 1, the photomask box 2 is placed on the carrying structure 40 by equipment such as an overhead crane, and then the shielding member 20 can be opened by an external structure, and the photomask 1 can be taken out of the body 10 by an external structure. At this time, the external structure can be a robot 51, as Figure 7As shown, at this time, the robot 51 can be a robot structure in the related art. The robot 51 opens the shielding member 20 through the robotic arm and takes out the photomask 1 from the main body 10. At this time, the driving mechanism 50 can include only the robot 51. The robot 51 completes the movement of releasing the first opening 111 of the shielding member 20 and the movement of taking out the photomask 1 from the main body 10.

[0085] Combined with Figure 8 As shown, the photomask cassette 2 is placed on the bearing structure 40. The photomask 1 is located in the accommodation space 11, and the shielding member 20 shields the first opening 111, that is, the shielding member 20 is connected to the main body 10.

[0086] Furthermore, the driving mechanism 50 includes: a robot 51, the robot 51 drives the engaging portion 22 of the shielding member 20 to switch between a first position and a second position; an opening and closing member 52, the opening and closing member 52 drives the shielding member 20 to be pulled out from the second opening 112.

[0087] Combined with Figure 9 As shown, the robot 51 can separate the engaging portion 22 from the main body 10. At this time, the opening and closing member 52 separates the shielding member 20 from the main body 10, and the robot 51 can extend into the accommodation space 11 through the first opening 111 to take out the photomask 1. After the robot 51 takes out the photomask 1, the opening and closing member 52 places the shielding member 20 into the main body 10 through the second opening 112, as Figure 10 shown. Finally, the robot 51 can place the photomask 1 at the working station to be used and connect the engaging portion 22 to the main body 10, thus completing the overall process of taking out the photomask 1. If the photomask 1 needs to be put back into the main body 10 after use, reverse operations can be performed to seal the main body 10 in the photomask cassette 2, which will not be elaborated here.

[0088] Optionally, combined with Figure 9 and Figure 10 shown, the opening and closing member 52 includes: a slide rail 521; a slider 522, the slider 522 is arranged on the slide rail 521 and is movably arranged along the slide rail 521; a driving portion 523, the driving portion 523 is drivingly connected to the slider 522 to drive the slider 522 to move along the slide rail 521; an opening and closing portion 524, the opening and closing portion 524 is arranged on the driving portion 523 and is used to be connected to the shielding member 20 to drive the shielding member 20 to move relative to the main body 10. After the robot 51 separates the engaging portion 22 from the main body 10, the opening and closing portion 524 is connected to the shielding member 20, the driving portion 523 is activated, and the driving portion 523, the slider 522 and the opening and closing portion 524 as a whole move, so that the shielding member 20 moves. The moving direction of the slider 522 is determined by the slide rail 521, as Figure 9 and Figure 10 shown, the slide rail 521 can be arranged in the vertical direction.

[0089] It should be noted that after the photomask box 2 is placed on the bearing structure 40, the opening and closing part 524 can be connected to the shielding part 20 first. For example, the opening and closing part 524 is connected to the cover part 21, or the opening and closing part 524 is connected to the connecting part 23. Of course, the connection time between the opening and closing part 524 and the shielding part 20 is not limited. As long as it is ensured that after the clamping part 22 is separated from the main body 10 by the robot 51, the opening and closing part 52 can make the shielding part 20 disengage from the main body 10, that is, release the first opening 111, and the robot 51 can take out the photomask 1 from the photomask box 2.

[0090] Optionally, the opening and closing part 52 can drive the shielding part 20 to completely disengage from the main body 10, that is, the opening and closing part 52 makes the shielding part 20 completely pulled out from the main body 10.

[0091] Or, the opening and closing part 52 can drive the shielding part 20 to partially disengage from the main body 10, that is, to effectively release the first opening 111. When the shielding part 20 is not completely disengaged from the main body 10, it is also convenient for operation when the opening and closing part 52 drives the shielding part 20 to return to the original position subsequently.

[0092] It should be noted that the driving part 523 can move as a whole. For example, the driving part 523 can include a gear and a motor. When the motor drives the gear to rotate, the gear can move relative to an external rack, so as to realize the overall movement of the driving part 523. The forward and reverse rotations of the motor realize the up and down movement of the shielding part 20. Or, the driving part 523 can be partially moved. The driving part 523 can include an oil cylinder and a piston rod. The two ends of the piston rod can be connected to the slider 522 and the opening and closing part 524 respectively, so as to realize the up and down movement of the shielding part 20 through the movement of the piston rod.

[0093] Optionally, the opening and closing part 52 can include a driving part 523 and an opening and closing part 524. The driving part 523 is connected to the opening and closing part 524, so as to drive the opening and closing part 524 to move up and down. The driving part 523 can be a driving mechanism such as a telescopic motor, a cylinder, or an oil cylinder.

[0094] Those skilled in the art will readily conceive of other embodiments of the present invention after considering the specification and practicing the invention disclosed herein. The present invention is intended to cover any variations, uses, or adaptations of the present invention, which follow the general principles of the present invention and include known common knowledge or conventional technical means in the technical field not disclosed in the present invention. The specification and the example embodiments are only regarded as exemplary, and the true scope and spirit of the present invention are pointed out by the appended claims.

[0095] It should be understood that the present invention is not limited to the exact structures that have been described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present invention is only limited by the appended claims.

Claims

1. A photomask cassette, characterized in that, comprising: A body, the body includes two opposite first surfaces, two opposite second surfaces and two opposite third surfaces, the second surface and the third surface surround the first surface; the body has a receiving space for receiving a photomask, the receiving space has a first opening and a second opening, and the first opening and the second opening are respectively located on the adjacent second surface and third surface; A shielding member, the shielding member is disposed on the body and is movably disposed relative to the body to shield or release the first opening, and the shielding member is inserted into the receiving space through the second opening.

2. The photomask cassette according to claim 1, characterized in that, The shielding member is detachably connected to the body.

3. The photomask cassette according to claim 2, characterized in that, The shielding member is snap-connected to the body.

4. The photomask cassette according to claim 3, characterized in that, The shielding member includes: A cover body portion, the cover body portion shields or releases the first opening; A snap connection portion, the snap connection portion is connected to the cover body portion and is movably disposed relative to the cover body portion so that the snap connection portion has a first position for snap connection with the body and a second position for separation from the body; Wherein, when the snap connection portion is in the second position, the shielding member can be removed from the body.

5. The photomask cassette according to claim 4, characterized in that, The snap connection portion is rotatably disposed relative to the cover body portion.

6. The photomask cassette according to claim 5, characterized in that, A slot is provided on the body. When the snap connection portion is in the first position, the snap connection portion is inserted into the slot. When the snap connection portion is in the second position, the snap connection portion is disengaged from the slot.

7. The photomask cassette according to claim 6, characterized in that, A rotary slot is provided on the snap connection portion, and / or a rotary snap is provided on the snap connection portion.

8. The photomask cassette according to claim 1, characterized in that, The height of the first opening is less than the height of the second opening; Wherein, when the snap connection portion is in the first position, along the height direction of the second opening, the size of the snap connection portion is greater than the height of the second opening. When the snap connection portion is in the second position, along the height direction of the second opening, the size of the snap connection portion is less than the height of the second opening.

9. The photomask cassette according to any one of claims 4 to 7, characterized in that, A sealing member is provided between the cover body portion and the body.

10. The photomask cassette according to any one of claims 4 to 7, characterized in that, The shielding member further includes: A connecting portion, the snap connection portion is located between the connecting portion and the cover body portion, and the connecting portion is connected to the cover body portion; Wherein, the snap connection portion is movably disposed relative to the connecting portion.

11. A semiconductor device, characterized in that, comprising the photomask cassette according to any one of claims 1 to 10.

12. The semiconductor device according to claim 11, characterized in that, The semiconductor device further includes: a carrier structure, on which the mask cassette is disposed; a driving mechanism, which drives the shielding member to move relative to the body so that the shielding member shields or releases the first opening, and after the shielding member releases the first opening, the driving mechanism takes out the mask through the first opening.

13. The semiconductor device according to claim 12, wherein, the mask cassette is the mask cassette according to claim 9, and the driving mechanism includes: a robot, which drives the clamping portion of the shielding member to switch between a first position and a second position; an opening / closing member, which drives the shielding member to be pulled out from the second opening.

14. The semiconductor device according to claim 13, wherein, the opening / closing member includes: a slide rail; a slider, which is disposed on the slide rail and is movably disposed along the slide rail; a driving portion, which is drivingly connected to the slider to drive the slider to move along the slide rail; an opening / closing portion, which is disposed on the driving portion and is used to connect with the shielding member to drive the shielding member to move relative to the body.

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