Graphite boat for carrying silicon wafers and method of using the same

Abstract

The present invention discloses a graphite boat for carrying silicon wafers and a method for using the same. The boat comprises a graphite boat and a clamping mechanism for clamping the silicon wafers. Symmetrically arranged rocker arms are rotatably connected at both ends of the graphite boat. A stopper is connected to one end of the rocker arm, and a slide arm is movably connected to the other end. The stopper arm is fixedly connected to a pusher block, and the slide arm is slidably connected to the graphite boat. Fixed seats are also fixedly connected to both ends of the graphite boat, and the fixed seats are connected to the stopper via a spring. One of the rocker arms is also fixedly connected to a pressing block. This device can effectively clamp the silicon wafer, ensuring a tight fit between the silicon wafer and the graphite boat, thereby facilitating subsequent processing of the silicon wafer.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer production, and in particular to a graphite boat for carrying silicon wafers and a method for using the same. Background Art

[0002] As sunlight shines on the silicon wafer of the solar cell, part of the sunlight will be reflected. Even if the silicon surface is designed to be velvet, although the incident light will produce multiple reflections to increase the light absorption rate, some of the sunlight will still be reflected. In order to reduce the reflection loss of sunlight, the usual method is to cover the surface of the silicon wafer of the solar cell with an anti-reflection film. This film can reduce the reflectivity of sunlight and increase the photoelectric conversion efficiency. In the technology of depositing anti-reflection film on the surface of crystalline silicon, silicon nitride film has the characteristics of high insulation, good chemical stability, good density, high hardness, etc., and it also has a good ability to mask the deposition of metal and water ions, and is therefore widely used.

[0003] Currently, in the manufacturing process of crystalline silicon solar cells, the device used to prepare silicon nitride films mainly includes a vacuum deposition chamber equipped with a furnace door. A graphite boat is installed in the vacuum deposition chamber, and silicon wafers are placed on the graphite boat. Existing graphite boats are usually unable to clamp the silicon wafers well, so that when preparing the silicon nitride film, the silicon wafers are easily separated from the graphite boat, or the silicon wafers and the graphite boat are not tightly fitted, resulting in preparation failure and a high defective rate. Summary of the Invention

[0004] In order to solve the above problems in the prior art, a graphite boat for carrying silicon wafers and a method for using the same are provided.

[0005] The technical solution adopted by the present invention to solve its technical problem is:

[0006] The present invention proposes a graphite boat for carrying silicon wafers, comprising a graphite boat and a clamping mechanism for clamping the silicon wafers, wherein the two ends of the graphite boat are rotatably connected to symmetrically arranged rocking rods, one end of the rocking rods is connected to a stopper, and the other end of the rocking rods is movably connected to a sliding rod; the stopper is fixedly connected to a push block, and the sliding rod is slidably connected to the graphite boat, and the two ends of the graphite boat are also fixedly connected to fixing seats, and the fixing seats are connected to the stopper via a spring; one of the rocking rods is also fixedly connected to a pressing block.

[0007] Preferably, in the initial state, the push block and the spring are both arranged in an inclined direction, the push block and the spring have the same inclined direction, and the connection point between the spring and the fixing seat is lower than the connection point between the spring and the stop block.

[0008] Preferably, the graphite boat is provided with a movable groove, the push block is movably arranged in the movable groove, and in an initial state, the upper surface of the push block is higher than the upper surface of the graphite boat.

[0009] Preferably, vertical sliding holes are provided at both ends of the graphite boat, the sliding rods are slidably connected to the sliding holes, and the lower ends of the two sliding rods are hinged to a first connecting rod and a second connecting rod respectively.

[0010] Preferably, a fixing rod is fixedly connected to the bottom end of the graphite boat, and two fixing rods are symmetrically provided. The first connecting rod and the second connecting rod are rotatably connected to the two fixing rods respectively.

[0011] Preferably, a first sliding groove is provided at the other end of the first connecting rod, and a second sliding groove is provided at the other end of the second connecting rod, and a sliding shaft is movably connected within the first sliding groove and the second sliding groove.

[0012] Preferably, both ends of the graphite boat are fixedly connected to support seats, and the rocker arm is rotatably connected to the support seats.

[0013] Preferably, the fixing seat is arranged between two supporting seats, the fixing seat is fixedly connected to a first guide block, the stop block is fixedly connected to a second guide block, and the spring is sleeved on the first guide block and the second guide block.

[0014] Preferably, the rocker arm is provided with a slide rail, a slider is slidably connected in the slide rail, and the upper end of the slide rod is rotatably connected to the slider.

[0015] The present invention also provides a method for using a graphite boat for carrying silicon wafers, which uses the above-mentioned graphite boat for carrying silicon wafers, comprising the following steps:

[0016] S1: The clamping mechanism clamps the silicon wafer and places it between two blocks. The clamping mechanism drives the silicon wafer downward, and the silicon wafer drives the push block to rotate. The push block then drives the pendulum to rotate through the blocks.

[0017] S2: The rocker arm drives the slide rod to move upward, and the two slide rods drive the first connecting rod and the second connecting rod to rotate respectively. At this time, the slide shaft slides in the first and second sliding grooves, and the first and second connecting rods both rotate around the fixed rod;

[0018] S3: As the silicon wafer continues to descend, the stopper drives the spring to rotate. As the spring rotates, when the connection point between the spring and the fixed seat is higher than the connection point between the spring and the stopper, the spring pushes the stopper to continue rotating, so that the upper surface of the pusher is lower than the upper surface of the graphite boat. Under the action of the stopper, the silicon wafer is clamped;

[0019] S4: When picking up the silicon wafer, the clamping mechanism presses the pressing block, driving the rocker arm to rotate, and the stop block drives the spring to rotate. When the connection point between the spring and the fixed seat is lower than the connection point between the spring and the stop block, the spring pushes the stop block to continue rotating, so that the upper surface of the push block is higher than the upper surface of the graphite boat, leaving a gap between the silicon wafer and the graphite boat, which is convenient for the clamping mechanism to clamp the silicon wafer.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The present invention is provided with a rotatable rocker arm. When the silicon wafer presses the push block, the stop block can drive the spring to rotate. When the spring jumps over the horizontal state, the spring can push the stop block to continue to rotate, so that the upper surface of the push block is lower than the upper surface of the graphite boat, which is convenient for the silicon wafer and the graphite boat to fit each other. At the same time, the stop block can better clamp the silicon wafer, reducing the shaking of the silicon wafer, thereby facilitating subsequent silicon wafer processing. When the pressing block is pressed, the stop block drives the spring to rotate. When the spring jumps over the horizontal state, the spring can push the stop block to continue to rotate, so that the upper surface of the push block is higher than the upper surface of the graphite boat. The push block can lift the silicon wafer, leaving a gap between the silicon wafer and the graphite boat, which is convenient for the clamping mechanism to clamp the silicon wafer, and can effectively improve the efficiency of silicon wafer production.

[0022] 2. The present invention is provided with a first connecting rod and a second connecting rod. When one of the pendulum rods rotates, it can drive the other pendulum rod to rotate synchronously, so that the rotation amplitudes of the two pendulum rods are approximately the same, thereby better achieving the clamping of the silicon wafer. The two pendulum rods cooperate with each other to prevent the situation where the pendulum rods rotate asynchronously, so that the silicon wafer can fit tightly with the graphite boat, reducing the occurrence of one side of the silicon wafer tilting, etc. In addition, when taking the silicon wafer, only one pendulum rod needs to be pressed to drive the other pendulum rod to rotate at the same time, thereby simplifying the operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which:

[0024] Figure 1 This is the overall main view of the present invention (in working state 1);

[0025] Figure 2 This is the overall main view of the present invention (second in working state);

[0026] Figure 3 This is the overall main view of the present invention (three in working state);

[0027] Figure 4 It is an overall top view of the present invention.

[0028] Description of the accompanying drawings:

[0029] 1 graphite boat; 2 sliding rod; 3 rocker arm; 4 support seat; 5 spring; 6 stop block; 7 push block; 8 pressing block; 9 first connecting rod; 10 silicon wafer; 11 slide rail; 12 slider; 13 slide hole; 14 fixed rod; 15 second connecting rod; 16 first slide slot; 17 second slide slot; 18 slide shaft; 19 fixed seat. DETAILED DESCRIPTION

[0030] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0031] like Figure 1-4 As shown, this embodiment provides a graphite boat for carrying silicon wafers, comprising a graphite boat 1 and a clamping mechanism for clamping the silicon wafer 10, as well as a conveyor belt on which the graphite boat 1 can be placed. The conveyor belt is used to transport the graphite boat 1. The clamping mechanism can be a manipulator that can move within a space and can clamp the silicon wafer 10, thereby placing the silicon wafer 10 on the graphite boat 1. The conveyor belt then drives the graphite boat 1 to facilitate subsequent processing of the silicon wafer 10.

[0032] The two ends of the graphite boat 1 are rotatably connected to symmetrically arranged pendulum rods 3, one end of the pendulum rod 3 is connected to a stopper 6, and the other end of the pendulum rod 3 is movably connected to a slide rod 2; the stopper 6 is fixedly connected to a push block 7, the slide rod 2 is slidably connected to the graphite boat 1, and the two ends of the graphite boat 1 are also fixedly connected to fixed seats 19, and the fixed seats 19 are connected to the stopper 6 through a spring 5; one of the pendulum rods 3 is also fixedly connected to a pressing block 8.

[0033] The cross section of the stopper 6 is rectangular, and the stopper 6 is fixedly connected to the rocker arm 3 . Therefore, when the rocker arm 3 rotates, the rocker arm 3 can drive the push block 7 to rotate through the stopper 6 .

[0034] The graphite boat 1 is fixedly connected to support bases 4 at both ends, and the pendulum rod 3 is rotatably connected to the support bases 4. The pendulum rod 3 is hollow, with a through-hole in its center. The spring 5 and the fixed base 19 are both located within this through-hole. The support base 4 is rotatably connected to a rotating shaft, which is fixedly connected to the pendulum rod 3, allowing the pendulum rod 3 to rotate freely around the support base 4.

[0035] In the initial state, the push block 7 and the spring 5 are both set in an inclined direction, and the push block 7 and the spring 5 have the same inclined direction. The connection point between the spring 5 and the fixed seat 19 is lower than the connection point between the spring 5 and the stop block 6. Therefore, at this time, under the action of the spring 5, the spring 5 can drive the pendulum 3 to rotate, so that the upper surface of the push block 7 is higher than the upper surface of the graphite boat 1. At this time, the other end of the pendulum 3 is in contact with the graphite boat 1, and the pendulum 3 cannot continue to rotate.

[0036] The graphite boat 1 is provided with a movable groove, in which the push block 7 is movably arranged. In the initial state, the upper surface of the push block 7 is higher than the upper surface of the graphite boat 1. The push block 7 can drive the silicon wafer 10 to lift upward, leaving a sufficient gap between the silicon wafer 10 and the graphite boat 1. The gap can facilitate the clamping mechanism to clamp the silicon wafer 10.

[0037] Both ends of the graphite boat 1 are provided with vertical sliding holes 13 , the sliding rods 2 are slidably connected to the sliding holes 13 , and the lower ends of the two sliding rods 2 are hinged to the first connecting rod 9 and the second connecting rod 15 respectively.

[0038] The slide rod 2 is always slidably disposed in the slide hole 13 , and the slide rod 2 can only move in the vertical direction. The slide hole 13 serves to limit and guide the movement of the slide rod 2 .

[0039] The rocker arm 3 is provided with a slide rail 11, and a slider 12 is slidably connected inside the slide rail 11. The upper end of the slide rod 2 is rotatably connected to the slider 12. When the rocker arm 3 rotates, it can drive the slide rod 2 to slide in the slide hole 13, and the slide rod 2 slides in the vertical direction. At this time, the slide hole 12 can move along the slide rail 11.

[0040] A fixing rod 14 is fixedly connected to the bottom end of the graphite boat 1 . Two fixing rods 14 are symmetrically provided. The first connecting rod 9 and the second connecting rod 15 are rotatably connected to the two fixing rods 14 respectively.

[0041] A first sliding groove 16 is defined at the other end of the first connecting rod 9 , and a second sliding groove 17 is defined at the other end of the second connecting rod 15 . A sliding shaft 18 is movably connected within the first sliding groove 16 and the second sliding groove 17 .

[0042] The sliding shaft 18 is set to slide and / or rotate in the first sliding groove 16 and the second sliding groove 17. The two sliding grooves provide sufficient space for the sliding of the sliding shaft 18, and the sizes of the two sliding grooves are adapted to the sliding shaft 18. Therefore, when the first connecting rod 9 or the second connecting rod 15 rotates, it can drive the other connecting rod to rotate at the same time, so that the movement of the two connecting rods is synchronized.

[0043] The fixing seat 19 is arranged between the two supporting seats 4, the fixing seat 19 is fixedly connected to the first guide block, the stop block 6 is fixedly connected to the second guide block, and the spring 5 is sleeved on the first guide block and the second guide block.

[0044] One end of the spring 5 is connected to the fixed seat 19, and the other end of the spring is connected to the stop block 6. The first guide block and the second guide block can make the spring 5 always maintain good linearity, prevent the spring 5 from bending, etc., and facilitate the spring 5 to drive the stop block 6 to rotate or the stop block 6 to drive the spring 5 to rotate.

[0045] The present invention also provides a method for using a graphite boat for carrying silicon wafers, which includes the above-mentioned graphite boat for carrying silicon wafers, comprising the following steps:

[0046] S1: The clamping mechanism clamps the silicon wafer 10 and places it between the two stoppers 6. The clamping mechanism drives the silicon wafer 10 downward, and the silicon wafer 10 drives the push block 7 to rotate. The push block 7 then drives the swing arm 3 to rotate through the stoppers 6.

[0047] S2: The rocker arm 3 drives the slide bar 2 to move upward, and the two slide bars 2 respectively drive the first connecting rod 9 and the second connecting rod 15 to rotate. At this time, the sliding shaft 18 slides in the first sliding groove 16 and the second sliding groove 17, and the first connecting rod 9 and the second connecting rod 15 both rotate around the fixed rod 14;

[0048] S3: As the silicon wafer 7 continues to descend, the stopper 6 drives the spring 5 to rotate. As the spring 5 rotates, when the connection point between the spring 5 and the fixing seat 19 is higher than the connection point between the spring 5 and the stopper 6, the spring 5 pushes the stopper 6 to continue rotating, so that the upper surface of the push block 7 is lower than the upper surface of the graphite boat 1. Under the action of the stopper 6, the silicon wafer 10 is clamped;

[0049] S4: When taking the silicon wafer 10, the clamping mechanism presses the pressing block 8, driving the rocker arm 3 to rotate, and the stop block 6 drives the spring 5 to rotate. When the connection point between the spring 5 and the fixed seat 19 is lower than the connection point between the spring 5 and the stop block 6, the spring 5 pushes the stop block 6 to continue rotating, so that the upper surface of the push block 7 is higher than the upper surface of the graphite boat 1, leaving a gap between the silicon wafer 10 and the graphite boat 1, which is convenient for the clamping mechanism to clamp the silicon wafer 10.

[0050] It should be noted that when the silicon wafer 10 presses the push block 7, the stop block 6 can drive the spring 5 to rotate. When the spring 5 jumps over the horizontal state, the spring 5 can push the stop block 6 to continue rotating, so that the upper surface of the push block 7 is lower than the upper surface of the graphite boat 1, which is convenient for the silicon wafer 10 and the graphite boat 1 to fit each other. At the same time, the stop block 6 can better clamp the silicon wafer 10, reduce the shaking of the silicon wafer 10, and thus facilitate the subsequent processing of the silicon wafer 10.

[0051] When the clamping mechanism presses the pressing block 8, the stopper 6 drives the spring 5 to rotate. When the spring 5 jumps over the horizontal state, the spring 5 can push the stopper 6 to continue to rotate, so that the upper surface of the push block 7 is higher than the upper surface of the graphite boat 1. The push block 7 can lift the silicon wafer 10, leaving a gap between the silicon wafer 10 and the graphite boat 1, which is convenient for the clamping mechanism to clamp the silicon wafer 10, and can effectively improve the efficiency of the silicon wafer 10 production.

[0052] Since the silicon wafer 10 may not be able to drive the push block 7 to descend a sufficient distance relying solely on its own gravity, when the clamping mechanism places the silicon wafer 10 on the push block 7, the clamping mechanism can drive the silicon wafer 10 to descend. When the upper surface of the push block 7 and the upper surface of the graphite boat 1 form a plane, the connection point between the spring 5 and the fixed seat 19 is higher than the connection point between the spring 5 and the stop block 6. Therefore, the spring 5 can push the push block 7 to rotate, so that the upper surface of the push block 7 is lower than the upper surface of the graphite boat 1, preventing the push block 7 from affecting the placement of the silicon wafer 10.

[0053] In addition, due to the mutual restraint between the first connecting rod 9 and the second connecting rod 15, when the first connecting rod 9 or the second connecting rod 15 rotates, the second connecting rod 15 or the first connecting rod 9 can be driven to rotate. Therefore, when one of the pendulum rods 3 rotates, it can drive the other pendulum rod 3 to rotate synchronously, so that the rotation amplitudes of the two pendulum rods 3 are approximately the same, thereby better achieving the clamping of the silicon wafer 10. The two pendulum rods 3 cooperate with each other to prevent the pendulum rods 3 from rotating asynchronously, so that the silicon wafer 10 can fit tightly with the graphite boat 1, reducing the occurrence of one side of the silicon wafer 10 tilting up, etc. In addition, when taking the silicon wafer 10, you only need to press one of the pendulum rods 3 to drive the other pendulum rod 3 to rotate at the same time, thereby simplifying the operation.

[0054] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A graphite boat for carrying silicon wafers, comprising a graphite boat (1) and a clamping mechanism for clamping the silicon wafer (10), characterized in that: The two ends of the graphite boat (1) are rotatably connected to symmetrically arranged pendulum rods (3), one end of the pendulum rod (3) is connected to a stopper (6), and the other end of the pendulum rod (3) is movably connected to a slide rod (2); the stopper (6) is fixedly connected to a push block (7), the slide rod (2) is slidably connected to the graphite boat (1), and the two ends of the graphite boat (1) are also fixedly connected to fixed seats (19), and the fixed seats (19) are connected to the stopper (6) through a spring (5); one of the pendulum rods (3) is also fixedly connected to a pressing block (8); In the initial state, the push block (7) and the spring (5) are both arranged in an inclined direction, the push block (7) and the spring (5) have the same inclined direction, and the connection point between the spring (5) and the fixing seat (19) is lower than the connection point between the spring (5) and the stop block (6); The graphite boat (1) is provided with a movable groove, and the push block (7) is movably arranged in the movable groove. In an initial state, the upper surface of the push block (7) is higher than the upper surface of the graphite boat (1); The graphite boat (1) has sliding holes (13) arranged in a vertical direction at both ends, the sliding rods (2) are slidably connected to the sliding holes (13), and the lower ends of the two sliding rods (2) are hinged to a first connecting rod (9) and a second connecting rod (15), respectively; The bottom end of the graphite boat (1) is fixedly connected to a fixed rod (14), and two fixed rods (14) are symmetrically arranged. The first connecting rod (9) and the second connecting rod (15) are rotatably connected to the two fixed rods (14) respectively; A first sliding groove (16) is provided at the other end of the first connecting rod (9), a second sliding groove (17) is provided at the other end of the second connecting rod (15), and a sliding shaft (18) is movably connected in the first sliding groove (16) and the second sliding groove (17).

2. The graphite boat for carrying silicon wafers according to claim 1, characterized in that: The two ends of the graphite boat (1) are fixedly connected to support seats (4), and the rocker (3) and the support seat (4) are rotatably connected.

3. The graphite boat for carrying silicon wafers according to claim 2, characterized in that: The fixing seat (19) is arranged between the two supporting seats (4), the fixing seat (19) is fixedly connected to a first guide block, the stop block (6) is fixedly connected to a second guide block, and the spring (5) is sleeved on the first guide block and the second guide block.

4. The graphite boat for carrying silicon wafers according to claim 1, characterized in that: The swing rod (3) is provided with a slide rail (11), a slider (12) is slidably connected in the slide rail (11), and the upper end of the slide rod (2) is rotatably connected to the slider (12).

5. A method for using a graphite boat for carrying silicon wafers, characterized in that: The graphite boat for carrying silicon wafers according to any one of claims 3 to 4 comprises the following steps: S1: The clamping mechanism clamps the silicon wafer (10) and places it between the two stoppers (6). The clamping mechanism drives the silicon wafer (10) to move downward, and the silicon wafer (10) drives the push block (7) to rotate. The push block (7) then drives the swing rod (3) to rotate through the stoppers (6); S2: The rocker (3) drives the slide bar (2) to move upward, and the two slide bars (2) respectively drive the first connecting rod (9) and the second connecting rod (15) to rotate. At this time, the slide shaft (18) slides in the first sliding groove (16) and the second sliding groove (17), and the first connecting rod (9) and the second connecting rod (15) both rotate around the fixed rod (14); S3: As the silicon wafer (10) continues to descend, the stopper (6) drives the spring (5) to rotate. As the spring (5) rotates, when the connection point between the spring (5) and the fixed seat (19) is higher than the connection point between the spring (5) and the stopper (6), the spring (5) pushes the stopper (6) to continue rotating, so that the upper surface of the push block (7) is lower than the upper surface of the graphite boat (1). Under the action of the stopper (6), the silicon wafer (10) is clamped; S4: When taking the silicon wafer (10), the clamping mechanism presses the pressing block (8), driving the rocker (3) to rotate, and the stopper (6) drives the spring (5) to rotate. When the connection point between the spring (5) and the fixed seat (19) is lower than the connection point between the spring (5) and the stopper (6), the spring (5) pushes the stopper (6) to continue rotating, so that the upper surface of the push block (7) is higher than the upper surface of the graphite boat (1), leaving a gap between the silicon wafer (10) and the graphite boat (1), making it easier for the clamping mechanism to clamp the silicon wafer (10).

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