A rotary scanning electron microscope sputter coater

Abstract

The application discloses a rotary scanning electron microscope gold spraying device with uniform spraying, which comprises a gold spraying instrument main body, a base is fixedly installed on the top of the gold spraying instrument main body, a gold spraying bin is fixedly installed on the top of the base, a rotating disc is rotatably installed in the base, a connecting seat is fixedly installed on the top of the rotating disc, a supporting frame is slidably installed on the top of the connecting seat, and a mounting box is fixedly installed on the outer wall of the supporting frame. By starting the first servo motor, the first servo motor drives the rotating disc to rotate through the transmission wheel and the transmission belt, the supporting frame is driven to rotate through the rotation of the rotating disc, the second servo motor is started, the second servo motor drives the mounting plate to rotate through the second rotating rod when the second servo motor operates, the limiting plate is driven to rotate through the rotation of the mounting plate, the limiting plate and the rotating disc are longitudinally and transversely rotated, and the sample is driven to longitudinally and transversely rotate, so that the gold spraying head can comprehensively and efficiently spray the sample.

Description

Technical Field

[0001] The invention relates to the technical field of gold spraying devices, in particular to a rotary scanning electron microscope gold spraying device with uniform spraying. Background Art

[0002] A scanning electron microscope (SEM) is an electron microscope that produces an image of a sample by scanning a surface with a focused electron beam. The electrons interact with the atoms in the sample, generating various signals containing information about the sample's surface morphology and composition. The electron beam's scanning path is shaped like a raster, and the image is generated by combining the position of the electron beam with the intensity of the detected signal. In the most common SEM mode, the Everhart-Thorneley detector detects secondary electrons excited by the electron beam bombarding atoms. Regardless of other factors, the number of secondary electrons detected and the signal intensity depend on the sample's morphology.

[0003] Before a sample is observed under a scanning electron microscope, it is usually necessary to coat its surface with a metal film to reduce the charge generated during observation and enhance the secondary electron or backscattered electron signal to obtain a better signal-to-noise ratio. A gold spraying device is required when spraying gold on the sample, but the existing gold spraying device still has certain defects when used.

[0004] The defects of the gold spraying device in the prior art are:

[0005] 1. When the existing gold spraying device is gold spraying the sample, since the sample is directly placed in the gold spraying chamber of the gold spraying device, the sample cannot be turned or rotated, and the sample cannot be fully gold sprayed, which reduces the efficiency of the gold spraying of the sample, resulting in certain defects in the subsequent scanning of the sample, and inconvenience for the staff to use;

[0006] 2. When the existing gold spraying device is spraying gold on the sample, due to the different specifications of the inspection samples, the gold spraying device does not have the corresponding clamp and cannot clamp samples of different specifications. It is troublesome for the staff to clamp the sample and spray gold, which is inconvenient for the staff to use;

[0007] 3. When the existing gold spraying device is spraying gold on the sample, the sealing of the gold spraying chamber of the gold spraying device is poor. The staff needs to press the sealing cover above the gold spraying chamber to ensure the sealing of the gold spraying chamber during use. However, this will increase the workload of the staff, and the gold spraying chamber may not be completely sealed due to the negligence of the staff, thereby reducing the quality of the gold spraying device on the sample, causing certain defects in the sample during subsequent scanning. Summary of the Invention

[0008] The object of the present invention is to provide a rotary scanning electron microscope gold spraying device with uniform spraying to solve the problems raised in the above background technology.

[0009] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a rotary scanning electron microscope gold spraying device with uniform spraying, comprising a gold spraying instrument body, a base fixedly installed on the top of the gold spraying instrument body, a gold spraying chamber fixedly installed on the top of the base, a turntable rotatably installed inside the base, a connecting seat fixedly installed on the top of the turntable, a support frame slidably installed on the top of the connecting seat, a mounting box fixedly installed on the outer wall of the support frame, a linear motor fixedly installed on the main body of the gold spraying instrument, a connecting plate installed on the output end of the linear motor, a mounting stand fixedly installed on the outer wall of the connecting plate, a cylinder fixedly installed on the top of the mounting stand, and the bottom end of the cylinder passes through the bottom of the mounting stand, and a sealing cover fixedly installed on the bottom end of the cylinder.

[0010] Preferably, a first sealing strip is fixedly installed on the inner wall of the gold spraying chamber, a first connecting plate is fixedly installed on the outer wall of the gold spraying chamber, and a second sealing strip is fixedly installed on the top of the first connecting plate.

[0011] Preferably, a gold spraying head is installed on the top of the gold spraying instrument body, the top of the gold spraying head passes through the interior of the gold spraying bin, and the gold spraying head is located on the inner side of the turntable, a first servo motor is fixedly installed inside the base, a first rotating rod is installed at the output end of the first servo motor, transmission wheels are installed on the outer wall of the turntable and the outer wall of the first rotating rod, transmission belts are connected to the outer walls of the two groups of transmission wheels, a limiting sleeve is fixedly installed on the inner bottom wall of the base, and the bottom end of the first rotating rod is rotatably connected to the inner side of the limiting sleeve.

[0012] Preferably, a connecting groove is provided on the top of the connecting seat, and the bottom end of the support frame is embedded in the inner side of the connecting groove. A limiting groove is provided on the outer wall of the bottom end of the support frame, and the limiting groove is embedded and connected with the inner side wall of the connecting groove.

[0013] Preferably, a Bluetooth controller is fixedly installed on the top of the installation box, a second servo motor is fixedly installed inside the installation box, a battery is installed inside the installation box, and the battery is electrically connected to the second servo motor and the Bluetooth controller, a second rotating rod is installed at the output end of the second servo motor, and the top end of the second rotating rod passes through the outside of the installation box.

[0014] Preferably, the top end of the second rotating rod is fixedly connected to a mounting plate, the outer wall of the mounting plate is provided with two groups of sliding grooves, sliders are slidably installed inside the two groups of sliding grooves, one side outer wall of the slider is threadedly connected to a first fastening bolt, the other side outer wall of the slider is fixedly installed with a support plate, the outer wall of the support plate is threadedly connected to a second fastening bolt, a limit plate is slidably installed on the inner side of the support plate, and an anti-slip pad is fixedly installed on the inner wall of the limit plate.

[0015] Preferably, the top of the mounting rack is fixedly provided with a fixed plate, the top of the fixed plate is fixedly provided with an air pump, and the suction end of the air pump is fixedly connected with a suction pipe.

[0016] Preferably, the top of the sealing cover is provided with a fixed seat, the fixed seat is fixedly connected with the bottom end of the suction pipe, the inner top wall of the sealing cover is fixedly provided with a connecting sleeve, the bottom end of the sealing cover is fixedly provided with a second connecting disc, and the bottom of the second connecting disc is fixedly provided with a third sealing strip.

[0017] Preferably, the use method of the scanning electron microscope gold spraying device is as follows:

[0018] S1, when the scanning electron microscope gold spraying device is used, the support frame is taken out from the inside of the gold spraying bin, the two groups of sliding blocks are slid in the two groups of sliding grooves on the outer wall of the mounting plate, the distance between the two groups of support plates is adjusted, the limiting plate is slid on the inner side of the support plate, the length of the limiting plate is adjusted, after the adjustment, the limiting plate is fixed by rotating the second fastening bolt, the sample is clamped by the limiting plate, the sliding block is fixed by rotating the first fastening bolt, the stability of the two groups of limiting plates is ensured, the stability of the sample is ensured, and then the support frame is placed in the inside of the gold spraying bin;

[0019] S2, after the sample is placed in the inside of the gold spraying bin, the linear motor is started, the linear motor runs to drive the mounting rack to move up and down, the mounting rack moves downward, the cylinder and the sealing cover are driven to move downward, the cylinder runs, the sealing cover is pressed downward when the cylinder runs, the sealing cover is connected with the gold spraying bin, the first connecting disc is connected with the second connecting disc, and the second sealing strip is connected with the third sealing strip, so that the sealing property of the connection between the sealing cover and the gold spraying bin is ensured;

[0020] S3, when the sample in the gold spraying bin is sprayed, the air pump is started, the inside of the gold spraying bin is pumped to vacuum through the suction pipe when the air pump runs, and the gold spraying instrument main body is started, the sample in the gold spraying bin is sprayed through the gold spraying head when the gold spraying instrument main body runs;

[0021] S4, when the sample is sprayed, the first servo motor is started, the first servo motor runs to drive the rotating disc to rotate through the transmission wheel and the transmission belt, the support frame is driven to rotate through the rotation of the rotating disc, the second servo motor is started, the mounting plate is driven to rotate through the second rotating rod when the second servo motor runs, the limiting plate is driven to rotate through the rotation of the mounting plate, the limiting plate and the rotating disc are longitudinally and transversely rotated, the sample is longitudinally and transversely rotated, and the gold spraying head can more comprehensively and efficiently spray the sample.

[0022] Compared with the prior art, the beneficial effects of the present application are as follows:

[0023] 1. The present invention starts the first servo motor, and the first servo motor drives the turntable to rotate through the transmission wheel and the transmission belt, and the support frame can be rotated by the rotation of the turntable. Then the second servo motor is started. When the second servo motor is running, it drives the mounting plate to rotate through the second rotating rod, and the mounting plate can be driven to rotate by the rotation of the limit plate. The limit plate and the turntable rotate longitudinally and transversely, thereby driving the sample to rotate longitudinally and transversely, so that the gold spraying head can spray gold on the sample more comprehensively and efficiently.

[0024] 2. The present invention ensures the stability of the connection between the support frame and the connecting seat by embedding the bottom end of the support frame in the inner side of the connecting groove, and then embeds the limiting groove on the outer wall of the bottom end of the support frame with the inner side wall of the connecting groove, so as to facilitate the workers to take out the support frame from the inside of the gold spraying warehouse, and facilitate the workers to clamp the samples. By sliding the two sets of sliders inside the two sets of slide grooves on the outer wall of the mounting plate, the distance between the two sets of support plates can be adjusted, and the sample can be clamped by the limiting plate. By sliding the limiting plate on the inner side of the support plate, the length of the limiting plate can be adjusted, so that the limiting plate can clamp samples of different sizes, which is convenient for the workers to use.

[0025] 3. The present invention is connected to the second connecting plate through the first connecting plate, and then to the third sealing strip through the second sealing strip, so as to ensure the sealing of the connection between the sealing cover and the gold spraying warehouse. The connecting sleeve is embedded in the inner side of the gold spraying warehouse, and the connection between the connecting sleeve and the gold spraying warehouse can be sealed by the first sealing strip. The sealing cover is driven downward by the cylinder to make the sealing cover tightly connected to the gold spraying warehouse, thereby further ensuring the sealing of the connection between the sealing cover and the gold spraying warehouse, thereby avoiding air leakage inside the gold spraying warehouse when the gold spraying warehouse is spraying gold on the sample, thereby reducing the quality of the sample gold spraying. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram of the overall structure of the gold spraying device of the present invention;

[0027] Figure 2 This is a schematic diagram of the gold spraying warehouse structure of the present invention;

[0028] Figure 3 This is a schematic diagram of the main structure of the base of the present invention;

[0029] Figure 4 This is a schematic cross-sectional structural diagram of the base of the present invention;

[0030] Figure 5 This is a schematic diagram of the support structure of the present invention;

[0031] Figure 6 This is a schematic cross-sectional view of the limiting frame of the present invention;

[0032] Figure 7 It is a schematic structural diagram of the transmission mechanism of the present invention;

[0033] Figure 8 It is a schematic diagram of the bottom structure of the sealing cover of the present invention.

[0034] Figure: 1. Metal spraying instrument body; 2. Base; 3. Metal spraying chamber; 4. First sealing strip; 5. First connecting plate; 6. Second sealing strip; 7. Metal spraying head; 8. Turntable; 9. Drive wheel; 10. First servo motor; 11. First rotating rod; 12. Limit sleeve; 13. Drive belt; 14. Connecting seat; 15. Connecting slot; 16. Support frame; 17. Limit slot; 18. Installation box; 19. Bluetooth controller; 20. Second servo motor; 21. Second rotating rod Rod; 22. Mounting plate; 23. Slide groove; 24. Slider; 25. First fastening bolt; 26. Support plate; 27. Second fastening bolt; 28. Limiting plate; 29. ​​Anti-slip pad; 30. Linear motor; 31. Connecting plate; 32. Mounting stand; 33. Fixing plate; 34. Air pump; 35. Exhaust pipe; 36. Cylinder; 37. Sealing cover; 38. Fixing seat; 39. Second connecting plate; 40. Third sealing strip; 41. Connecting sleeve; 42. Battery. DETAILED DESCRIPTION

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0036] See also Figures 1 to 8 , a rotary scanning electron microscope gold spraying device with uniform spraying;

[0037] It includes a gold spraying instrument body 1, a base 2 is fixedly installed on the top of the gold spraying instrument body 1, a gold spraying warehouse 3 is fixedly installed on the top of the base 2, a gold spraying head 7 is installed on the top of the gold spraying instrument body 1, the top of the gold spraying head 7 passes through the interior of the gold spraying warehouse 3, and the gold spraying head 7 is located on the inner side of the turntable 8, a first servo motor 10 is fixedly installed inside the base 2, a first rotating rod 11 is installed at the output end of the first servo motor 10, a transmission wheel 9 is installed on the outer wall of the turntable 8 and the outer wall of the first rotating rod 11, and the outer walls of the two sets of transmission wheels 9 are connected with a transmission belt 13, a limit sleeve 12 is fixedly installed on the inner bottom wall of the base 2, and the bottom end of the first rotating rod 11 is rotatably connected to the inner side of the limit sleeve 12;

[0038] The base 2 can provide an installation position for the gold spraying bin 3, and the gold spraying instrument body 1 and the gold spraying head 7 can be used to spray gold on the sample inside the gold spraying bin 3. When the sample is sprayed with gold, the first servo motor 10 is started, and the first servo motor 10 drives the turntable 8 to rotate through the transmission wheel 9 and the transmission belt 13. The rotation of the turntable 8 can drive the support frame 16 to rotate, and the first rotating rod 11 can be limited by the limiting sleeve 12, so that the first rotating rod 11 can rotate stably.

[0039] A connecting seat 14 is fixedly installed on the top of the turntable 8. A connecting groove 15 is opened on the top of the connecting seat 14, and the bottom end of the support frame 16 is embedded in the inner side of the connecting groove 15. A limiting groove 17 is opened on the outer wall of the bottom end of the support frame 16, and the limiting groove 17 is embedded and connected with the inner side wall of the connecting groove 15. The support frame 16 is slidably installed on the top of the connecting seat 14;

[0040] The connecting seat 14 can provide an installation position for the support frame 16. The bottom end of the support frame 16 is embedded in the inner side of the connecting groove 15, and then the limiting groove 17 on the outer wall of the bottom end of the support frame 16 is embedded and connected with the inner side wall of the connecting groove 15, thereby ensuring the stability of the connection between the support frame 16 and the connecting seat 14, and making it convenient for workers to remove the support frame 16 from the inside of the gold spraying chamber 3, so that the staff can clamp the sample.

[0041] The outer wall of the support frame 16 is fixedly mounted with a mounting box 18, the top of the mounting box 18 is fixedly mounted with a Bluetooth controller 19, the interior of the mounting box 18 is fixedly mounted with a second servo motor 20, the interior of the mounting box 18 is mounted with a battery 42, and the battery 42 is electrically connected to the second servo motor 20 and the Bluetooth controller 19, the output end of the second servo motor 20 is mounted with a second rotating rod 21, and the top of the second rotating rod 21 passes through the outside of the mounting box 18, the top of the second rotating rod 21 is fixedly connected with a mounting plate 22, the outer wall of the mounting plate 22 is provided with two groups of slide grooves 23, the inner parts of the two groups of slide grooves 23 are slidably mounted with sliders 24, the outer wall of one side of the slider 24 is threadedly connected with a first fastening bolt 25, the outer wall of the other side of the slider 24 is fixedly mounted with a support plate 26, the outer wall of the support plate 26 is threadedly connected with a second fastening bolt 27, the inner side of the support plate 26 is slidably mounted with a limit plate 28, and the inner side wall of the limit plate 28 is fixedly mounted with an anti-slip pad 29;

[0042] By sliding the two sets of sliders 24 inside the two sets of slide grooves 23 on the outer wall of the mounting plate 22, the distance between the two sets of support plates 26 can be adjusted, and the sample can be clamped by the limit plate 28. The limit plate 28 is slid on the inner side of the support plate 26 by the limit plate 28, so that the length of the limit plate 28 can be adjusted, so that the limit plate 28 can clamp samples of different sizes, which is convenient for the staff to use. After adjustment, the limit plate 28 is fixed by rotating the second fastening bolt 27. The stability of the limit plate 28 in clamping the sample can be improved by the anti-slip pad 29. The slider 24 is fixed by rotating the first fastening bolt 25 to ensure that the two sets of limit plates 28 are in a stable state. Stability, thereby ensuring the stability of the sample, the installation box 18 can provide an installation position for the second servo motor 20 and the battery 42, and the battery 42 can power the Bluetooth controller 19 and the second servo motor 20, so that the Bluetooth controller 19 and the second servo motor 20 can operate normally, and the Bluetooth controller 19 can make the gold spraying instrument body 1 wirelessly control the operation of the second servo motor 20, and the second servo motor 20 can be operated. When the second servo motor 20 is running, the second rotating rod 21 drives the mounting plate 22 to rotate, and the rotation of the mounting plate 22 can drive the limit plate 28 to rotate, and the rotation of the limit plate 28 can drive the sample to rotate.

[0043] The main body 1 of the metal spraying instrument is fixedly installed with a linear motor 30, the output end of the linear motor 30 is installed with a connecting plate 31, the outer wall of the connecting plate 31 is fixedly installed with a mounting stand 32, the top of the mounting stand 32 is fixedly installed with a fixing plate 33, the top of the fixing plate 33 is fixedly installed with an air pump 34, the suction end of the air pump 34 is fixedly connected with an exhaust pipe 35, the top of the mounting stand 32 is fixedly installed with a cylinder 36, and the bottom end of the cylinder 36 passes through the bottom of the mounting stand 32, and the bottom end of the cylinder 36 is fixedly installed with a sealing cover 37, which is sealed. A fixing seat 38 is installed on the top of the sealing cover 37, and the fixing seat 38 is fixedly connected to the bottom end of the exhaust pipe 35. A connecting sleeve 41 is fixedly installed on the inner top wall of the sealing cover 37, a second connecting disc 39 is fixedly installed on the bottom end of the sealing cover 37, and a third sealing strip 40 is fixedly installed on the bottom of the second connecting disc 39. A first sealing strip 4 is fixedly installed on the inner side wall of the gold spraying chamber 3, a first connecting disc 5 is fixedly installed on the outer wall of the gold spraying chamber 3, and a second sealing strip 6 is fixedly installed on the top of the first connecting disc 5. A turntable 8 is rotatably installed inside the base 2;

[0044] The connecting plate 31 can provide an installation position for the installation stand 32, the installation stand 32 can provide an installation position for the fixing plate 33 and the cylinder 36, and the installation stand 32 can provide an installation position for the air pump 34. By starting the air pump 34, the interior of the gold spraying warehouse 3 is evacuated to a vacuum through the exhaust pipe 35 when the air pump 34 is running. By starting the linear motor 30, the linear motor 30 drives the installation stand 32 to move up and down, and the installation stand 32 moves downward, thereby driving the cylinder 36 and the sealing cover 37 to move downward, and then the cylinder 36 is operated, and the cylinder 36 can be operated. The sealing cover 37 is driven to be pressed down, so that the connection between the sealing cover 37 and the gold spraying warehouse 3 is connected through the first connecting plate 5 and the second connecting plate 39, and then connected through the second sealing strip 6 and the third sealing strip 40. The connecting sleeve 41 is embedded in the inner side of the gold spraying warehouse 3, and the connection between the connecting sleeve 41 and the gold spraying warehouse 3 can be sealed by the first sealing strip 4, thereby ensuring the sealing of the connection between the sealing cover 37 and the gold spraying warehouse 3. The sealing cover 37 is driven to be pressed down by the cylinder 36, so that the sealing cover 37 can be tightly connected to the gold spraying warehouse 3, thereby further ensuring the sealing of the connection between the sealing cover 37 and the gold spraying warehouse 3.

[0045] The method of using the scanning electron microscope gold spraying device is as follows:

[0046] S1. When the scanning electron microscope gold spraying device is in use, the support frame 16 is taken out from the inside of the gold spraying chamber 3, and the two sets of sliders 24 are slid inside the two sets of slide grooves 23 on the outer wall of the mounting plate 22 to adjust the distance between the two sets of support plates 26. The limit plate 28 is slid on the inner side of the support plate 26 to adjust the length of the limit plate 28. After the adjustment, the limit plate 28 is fixed by rotating the second fastening bolt 27, and the sample is clamped by the limit plate 28. The slider 24 is then fixed by rotating the first fastening bolt 25 to ensure the stability of the two sets of limit plates 28, thereby ensuring the stability of the sample, and then the support frame 16 is placed inside the gold spraying chamber 3;

[0047] S2. After the sample is placed inside the gold spraying chamber 3, the linear motor 30 is started. The linear motor 30 drives the mounting platform 32 to move up and down. The mounting platform 32 moves downward, thereby driving the cylinder 36 and the sealing cover 37 to move downward. Then, the cylinder 36 is operated. When the cylinder 36 is operated, it can drive the sealing cover 37 to be pressed down, so that the connection between the sealing cover 37 and the gold spraying chamber 3 is connected through the first connecting plate 5 and the second connecting plate 39, and then connected through the second sealing strip 6 and the third sealing strip 40, thereby ensuring the sealing of the connection between the sealing cover 37 and the gold spraying chamber 3;

[0048] S3, when the sample in the spray gold bin 3 is sprayed, the air pump 34 is started, the air pump 34 runs through the air exhaust pipe 35 to exhaust the inside of the spray gold bin 3 to vacuum, the spray gold instrument main body 1 is started, and the spray gold instrument main body 1 runs through the spray gold head 7 to spray the sample in the spray gold bin 3;

[0049] S4, when the sample is sprayed, the first servo motor 10 is started, the first servo motor 10 runs through the transmission wheel 9 and the transmission belt 13 to drive the rotating disc 8 to rotate, the rotating disc 8 rotates to drive the support frame 16 to rotate, the second servo motor 20 is started, the second servo motor 20 runs through the second rotating rod 21 to drive the mounting plate 22 to rotate, the mounting plate 22 rotates to drive the limiting plate 28 to rotate, the limiting plate 28 and the rotating disc 8 rotate longitudinally and transversely, so that the sample is driven to rotate longitudinally and transversely, so that the spray gold head 7 can more comprehensively and efficiently spray the sample.

[0050] The working principle is that the connecting seat 14 can provide an installation position for the support frame 16, and the bottom end of the support frame 16 is embedded in the inner side of the connecting groove 15, and then the limiting groove 17 on the outer wall of the bottom end of the support frame 16 is embedded and connected with the inner side wall of the connecting groove 15, thereby ensuring the stability of the connection between the support frame 16 and the connecting seat 14, and making it convenient for workers to take out the support frame 16 from the inside of the gold spraying warehouse 3, and convenient for workers to clamp the sample. By sliding the two sets of sliders 24 inside the two sets of slide grooves 23 on the outer wall of the mounting plate 22, the distance between the two sets of support plates 26 can be adjusted, and the sample can be clamped by the limiting plate 28. The positioning plate 28 slides on the inner side of the support plate 26, thereby adjusting the length of the limiting plate 28 so that the limiting plate 28 can clamp samples of different sizes. By starting the air pump 34, the air pump 34 is running to evacuate the interior of the gold spraying chamber 3 to a vacuum through the exhaust pipe 35. By starting the linear motor 30, the linear motor 30 drives the mounting platform 32 to move up and down, and the mounting platform 32 moves downward, thereby driving the cylinder 36 and the sealing cover 37 to move downward. Then, the cylinder 36 is running, and the cylinder 36 can drive the sealing cover 37 to be pressed down when it is running, so that the sealing cover 37 is connected to the gold spraying chamber 3 through the first connecting plate 5. It is connected to the second connecting disk 39, and then connected to the third sealing strip 40 through the second sealing strip 6, so as to ensure the sealing connection between the sealing cover 37 and the gold spraying warehouse 3. The base 2 can provide an installation position for the gold spraying warehouse 3, and the gold spraying instrument body 1 and the gold spraying head 7 can spray gold on the sample inside the gold spraying warehouse 3. When the sample is sprayed with gold, the first servo motor 10 is started, and the first servo motor 10 drives the turntable 8 to rotate through the transmission wheel 9 and the transmission belt 13. The rotation of the turntable 8 can drive the support frame 16 to rotate, and the first rotating rod 11 can be limited by the limiting sleeve 12, so that the first rotating rod 11 can be stably The second servo motor 20 and the battery 42 can be rotated, and the installation box 18 can provide an installation position for the second servo motor 20 and the battery 42. The Bluetooth controller 19 and the second servo motor 20 can be powered by the battery 42, so that the Bluetooth controller 19 and the second servo motor 20 can operate normally. The Bluetooth controller 19 can make the gold spraying instrument body 1 wirelessly control the operation of the second servo motor 20. When the second servo motor 20 is running, the second rotating rod 21 drives the mounting plate 22 to rotate. The rotation of the mounting plate 22 can drive the limit plate 28 to rotate, and the rotation of the limit plate 28 can drive the sample to rotate.

[0051] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A rotary scanning electron microscope gold spraying device with uniform spraying, comprising a gold spraying instrument body (1), characterized in that: The top of the metal spraying instrument body (1) is fixedly mounted with a base (2), the top of the base (2) is fixedly mounted with a metal spraying chamber (3), the inside of the base (2) is rotatably mounted with a turntable (8), the top of the turntable (8) is fixedly mounted with a connecting seat (14), the top of the connecting seat (14) is slidably mounted with a support frame (16), the outer wall of the support frame (16) is fixedly mounted with a mounting box (18), the metal spraying instrument body (1) is fixedly mounted with a linear motor (30), the output end of the linear motor (30) is mounted with a connecting plate (31), the outer wall of the connecting plate (31) is fixedly mounted with a mounting stand (32), the top of the mounting stand (32) is fixedly mounted with a cylinder (36), and the bottom end of the cylinder (36) passes through the bottom of the mounting stand (32), and the bottom end of the cylinder (36) is fixedly mounted with a sealing cover (37); A first sealing strip (4) is fixedly mounted on the inner wall of the gold spraying chamber (3), a first connecting plate (5) is fixedly mounted on the outer wall of the gold spraying chamber (3), and a second sealing strip (6) is fixedly mounted on the top of the first connecting plate (5); A gold spraying head (7) is installed on the top of the gold spraying instrument body (1), the top end of the gold spraying head (7) passes through the interior of the gold spraying chamber (3), and the gold spraying head (7) is located on the inner side of the turntable (8); a first servo motor (10) is fixedly installed inside the base (2), and a first rotating rod (11) is installed at the output end of the first servo motor (10); a transmission wheel (9) is installed on the outer wall of the turntable (8) and the outer wall of the first rotating rod (11); the outer walls of the two groups of the transmission wheels (9) are connected to a transmission belt (13); a limit sleeve (12) is fixedly installed on the inner bottom wall of the base (2), and the bottom end of the first rotating rod (11) is rotatably connected to the inner side of the limit sleeve (12); The top of the connecting seat (14) is provided with a connecting groove (15), and the bottom end of the support frame (16) is embedded in the inner side of the connecting groove (15). The outer wall of the bottom end of the support frame (16) is provided with a limiting groove (17), and the limiting groove (17) is embedded and connected with the inner side wall of the connecting groove (15); A Bluetooth controller (19) is fixedly mounted on the top of the installation box (18), a second servo motor (20) is fixedly mounted inside the installation box (18), a battery (42) is mounted inside the installation box (18), and the battery (42) is electrically connected to the second servo motor (20) and the Bluetooth controller (19), a second rotating rod (21) is mounted on the output end of the second servo motor (20), and the top end of the second rotating rod (21) passes through the outside of the installation box (18); The top end of the second rotating rod (21) is fixedly connected to a mounting plate (22), the outer wall of the mounting plate (22) is provided with two groups of sliding grooves (23), the inner parts of the two groups of sliding grooves (23) are slidably mounted with sliders (24), the outer wall of one side of the slider (24) is threadedly connected to a first fastening bolt (25), the outer wall of the other side of the slider (24) is fixedly mounted with a support plate (26), the outer wall of the support plate (26) is threadedly connected to a second fastening bolt (27), the inner side of the support plate (26) is slidably mounted with a limit plate (28), and the inner side wall of the limit plate (28) is fixedly mounted with an anti-slip pad (29); A fixing plate (33) is fixedly mounted on the top of the mounting stand (32), an air pump (34) is fixedly mounted on the top of the fixing plate (33), and an air suction end of the air pump (34) is fixedly connected to an air extraction pipe (35); A fixing seat (38) is installed on the top of the sealing cover (37), and the fixing seat (38) is fixedly connected to the bottom end of the exhaust pipe (35). A connecting sleeve (41) is fixedly installed on the inner top wall of the sealing cover (37). A second connecting plate (39) is fixedly installed on the bottom end of the sealing cover (37), and a third sealing strip (40) is fixedly installed on the bottom of the second connecting plate (39).

2. The rotary scanning electron microscope gold spraying device with uniform spraying according to claim 1, characterized in that: The method of using the scanning electron microscope gold spraying device is as follows: S1. When the scanning electron microscope gold spraying device is in use, the support frame (16) is taken out from the inside of the gold spraying chamber (3), and the distance between the two groups of support plates (26) is adjusted by sliding the two groups of sliders (24) inside the two groups of slide grooves (23) on the outer wall of the mounting plate (22). The length of the limit plate (28) is adjusted by sliding the limit plate (28) on the inner side of the support plate (26). After the adjustment, the limit plate (28) is fixed by rotating the second fastening bolt (27), and the sample is clamped by the limit plate (28). The slider (24) is fixed by rotating the first fastening bolt (25) to ensure the stability of the two groups of limit plates (28), thereby ensuring the stability of the sample, and then the support frame (16) is placed inside the gold spraying chamber (3); S2. After the sample is placed inside the gold spraying chamber (3), the linear motor (30) is started, and the linear motor (30) drives the mounting frame (32) to move up and down, and the mounting frame (32) moves downward, thereby driving the cylinder (36) and the sealing cover (37) to move downward, and then the cylinder (36) is operated. When the cylinder (36) is in operation, it can drive the sealing cover (37) to be pressed down, so that the connection between the sealing cover (37) and the gold spraying chamber (3) is connected through the first connecting plate (5) and the second connecting plate (39), and then connected through the second sealing strip (6) and the third sealing strip (40), thereby ensuring the sealing of the connection between the sealing cover (37) and the gold spraying chamber (3); S3, when spraying gold on the sample inside the gold spraying chamber (3), the air pump (34) is started. When the air pump (34) is running, the inside of the gold spraying chamber (3) is evacuated to a vacuum through the exhaust pipe (35), and then the gold spraying instrument body (1) is started. When the gold spraying instrument body (1) is running, the sample inside the gold spraying chamber (3) is sprayed with gold through the gold spraying head (7); S4. When spraying gold on the sample, the first servo motor (10) is started, and the first servo motor (10) drives the turntable (8) to rotate through the transmission wheel (9) and the transmission belt (13), and the support frame (16) is driven to rotate by the rotation of the turntable (8). Then, the second servo motor (20) is started, and the second servo motor (20) drives the mounting plate (22) to rotate through the second rotating rod (21) when the second servo motor (20) is running, and the limiting plate (28) is driven to rotate by the rotation of the mounting plate (22). The limiting plate (28) and the turntable (8) are rotated longitudinally and transversely, thereby driving the sample to rotate longitudinally and transversely, so that the gold spraying head (7) can spray gold on the sample more comprehensively and efficiently.

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