A self-opening and closing vacuum transfer device suitable for scanning electron microscope

Abstract

This invention relates to the field of materials observation technology and discloses a self-opening and closing vacuum transfer device suitable for scanning electron microscopes. A main spring is installed on the inner wall of the sealed chamber near the bottom. A main spring locking mechanism is fixedly connected to the end of the main spring away from the sealed chamber. A secondary vacuum chamber is located at one end of the main spring locking mechanism. A main shaft sleeve is fixedly connected to the outer wall of the secondary vacuum chamber. A differential pressure actuating piston is located at one end of the main spring locking mechanism and is situated inside the main shaft sleeve. A piston return spring is located inside the main shaft sleeve. A one-way air valve is fixedly connected to the outer wall of the secondary vacuum chamber. This self-opening and closing vacuum transfer device for scanning electron microscopes significantly improves the reusability and safe preservation of air-sensitive samples by sealing the transfer chamber throughout the entire process.

Description

Technical Field

[0001] This invention relates to the field of materials observation technology, specifically to a self-opening and closing vacuum transfer device suitable for scanning electron microscopes. Background Technology

[0002] The microstructure of a material determines its macroscopic properties, and scanning electron microscopy (SEM), as one of the important tools for observing the microstructure of materials, plays a significant role in the field of materials research. However, in actual testing, we often encounter air-sensitive samples with exceptionally reactive properties, which readily undergo irreversible chemical reactions with oxygen or water vapor in the air, leading to changes in the surface morphology and elemental composition of the samples. Therefore, without air-protective measures, it is impossible to observe and analyze the true morphology and elemental composition of such samples. Vacuum transfer devices designed for such samples are undoubtedly an effective means.

[0003] Currently, most vacuum transfer devices designed for sensitive samples in scanning electron microscopy (SEM) are motor-driven. Furthermore, the SEM requires an electrical control interface, which raises compatibility issues between different instrument models and specifications. This undoubtedly increases the cost and complexity of instrument modification, and to some extent limits its applicability.

[0004] While vacuum transfer sample stages that do not require electricity exist, they are relatively rare. Publication number CN212387290U discloses a self-driven sample transfer device that does not require electricity, but it can only be opened in one direction and cannot be closed after testing. This means the tested sample is exposed to air again, making sample recovery or subsequent experiments impossible. Another patent (CN107768221A) also uses pressure difference to open the cover in one direction, but its flip-top vacuum sealing structure poses a risk of impact to the scanning electron microscope probe during opening.

[0005] To address the aforementioned issues, we designed a self-opening and closing vacuum transfer device suitable for scanning electron microscopes, which solves the problems mentioned in the background. Summary of the Invention

[0006] The purpose of this invention is to provide a self-opening and closing vacuum transfer device suitable for scanning electron microscopes, so as to solve the problems mentioned in the background art.

[0007] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a self-opening and closing vacuum transfer device suitable for scanning electron microscope, comprising a transfer chamber, a sealed chamber door provided at one end of the transfer chamber, a detachable sealed chamber door bolted to the other end of the transfer chamber, and a needle valve fixedly connected to the outer side wall of the detachable sealed chamber door near the bottom position.

[0008] Two sample holder guide rails are fixedly connected to the inner side wall of the sealed chamber door, and sample holders are slidably connected to the outer side walls of the two sample holder guide rails.

[0009] A main spring is provided on the inner wall of the sealed chamber near the bottom. A main spring latching mechanism is fixedly connected to the end of the main spring away from the sealed chamber. A secondary vacuum chamber is provided at one end of the main spring latching mechanism. A main shaft sleeve is fixedly connected to the outer wall of the secondary vacuum chamber. A differential pressure actuating piston is provided at one end of the main spring latching mechanism. The differential pressure actuating piston is located inside the main shaft sleeve. A piston return spring is provided inside the main shaft sleeve. A one-way air valve is fixedly connected to the outer wall of the secondary vacuum chamber.

[0010] Both sides of the outer wall of the sealed compartment door are fixedly connected to door side lugs, and both sides of the outer wall of the transfer compartment are fixedly connected to compartment side lugs. The door side lugs and compartment side lugs are arranged correspondingly. Both inner walls of the two door side lugs are fixedly connected to compartment door guide rods. The two compartment door guide rods pass through the two compartment side lugs respectively. A secondary spring is sleeved on the outer wall of the two compartment door guide rods at the other side of the two compartment side lugs.

[0011] Preferably, a sealing ring is fixedly connected to the inner side wall of the sealed chamber door around the outside of the two sample holder guide rails, and the sealing ring is in contact with the outer side wall of one end of the transfer chamber.

[0012] Preferably, a fixed bracket is provided at the bottom of the secondary vacuum chamber, and the fixed bracket is fixedly connected to the bottom of the inner side wall of the transfer chamber.

[0013] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0014] First, this invention greatly improves the reusability and safe preservation of air-sensitive samples by sealing and preserving them throughout the entire transfer process using a transfer chamber.

[0015] Secondly, because the structure of this invention is simple and practical, it occupies a smaller volume, thus making it more versatile and not limited by the type of electron microscope. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the external structure of the present invention;

[0017] Figure 2 This is a schematic diagram of the internal cross-sectional structure of the present invention;

[0018] Figure 3 This is a top view of the structure of the present invention.

[0019] The components include: 1. Transfer chamber; 2. Sealed chamber door; 3. Removable sealed chamber door; 4. Sample holder; 5. Sample holder guide rail; 6. Sealing ring; 7. Main spring; 8. Main spring latching mechanism; 9. Secondary vacuum chamber; 10. Needle valve; 11. Main shaft sleeve; 12. Differential pressure actuating piston; 13. Piston return spring; 14. Fixed bracket; 15. Door side lug; 16. Chamber side lug; 17. Chamber door guide rod; 18. Auxiliary spring; 19. One-way air valve. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Please see Figure 1-3

[0022] Example 1

[0023] This embodiment is a specific implementation of a self-opening and closing vacuum transfer device suitable for scanning electron microscopes.

[0024] A self-opening and closing vacuum transfer device suitable for scanning electron microscope includes a transfer chamber 1, a sealed chamber door 2 is provided at one end of the transfer chamber 1, and a detachable sealed chamber door 3 is bolted to the other end of the transfer chamber 1. A needle valve 10 is fixedly connected to the outer side wall of the detachable sealed chamber door 3 near the bottom.

[0025] Two sample holder guide rails 5 are fixedly connected to the inner side wall of the sealed chamber door 2, and sample holders 4 are slidably connected to the outer side wall of the two sample holder guide rails 5.

[0026] A main spring 7 is provided on the inner wall of the sealed chamber door 2 near the bottom. A main spring latching mechanism 8 is fixedly connected to the end of the main spring 7 away from the sealed chamber door 2. A secondary vacuum chamber 9 is provided at one end of the main spring latching mechanism 8. A main shaft sleeve 11 is fixedly connected to the outer wall of the secondary vacuum chamber 9. A differential pressure actuating piston 12 is provided at one end of the main spring latching mechanism 8. The differential pressure actuating piston 12 is located inside the main shaft sleeve 11. A piston return spring 13 is provided inside the main shaft sleeve 11. A one-way air valve 19 is fixedly connected to the outer wall of the secondary vacuum chamber 9.

[0027] Door side lugs 15 are fixedly connected to both sides of the outer side wall of the sealed door 2, and compartment side lugs 16 are fixedly connected to both sides of the outer side wall of the transfer compartment 1. The door side lugs 15 and the compartment side lugs 16 are respectively arranged. A compartment door guide rod 17 is fixedly connected to the inner side wall of the two door side lugs 15. The two compartment door guide rods 17 pass through the two compartment side lugs 16 respectively. A secondary spring 18 is sleeved on the outer side wall of the two compartment door guide rods 17 at the other side of the two compartment side lugs 16.

[0028] The position of the sample holder 4 can be adjusted according to the sample size by sliding the sample holder 4 up and down on the sample holder guide rail 5, thereby improving the adaptability of the device.

[0029] Specifically, the inner wall of the sealed chamber door 2 is fixedly connected with a sealing ring 6 around the outside of the two sample tray guide rails 5, and the sealing ring 6 is in contact with the outer wall of one end of the transfer chamber body 1.

[0030] By using the sealing ring 6 to seal the sealing chamber door 2 and the transfer chamber 1, the connection between the sealing ring 6 and the transfer chamber 1 can be made tighter, and it also plays a certain role in buffering.

[0031] Specifically, a fixed bracket 14 is provided at the bottom of the secondary vacuum chamber 9, and the fixed bracket 14 is fixedly connected to the bottom of the inner side wall of the transfer chamber 1.

[0032] Example 2

[0033] This embodiment is a specific implementation of the main spring and its auxiliary components of a self-opening and closing vacuum transfer device suitable for scanning electron microscopes.

[0034] A main spring 7 is installed on the inner wall of the sealed chamber door 2 near the bottom. A main spring latching mechanism 8 is fixedly connected to the end of the main spring 7 away from the sealed chamber door 2. A secondary vacuum chamber 9 is installed at one end of the main spring latching mechanism 8. A main shaft sleeve 11 is fixedly connected to the outer wall of the secondary vacuum chamber 9. A differential pressure actuating piston 12 is installed at one end of the main spring latching mechanism 8. The differential pressure actuating piston 12 is located inside the main shaft sleeve 11. A piston return spring 13 is installed inside the main shaft sleeve 11. A one-way air valve 19 is fixedly connected to the outer wall of the secondary vacuum chamber 9.

[0035] Example 3

[0036] This embodiment is a specific implementation of a secondary spring and its auxiliary components for a self-opening and closing vacuum transfer device suitable for scanning electron microscopes.

[0037] Door side lugs 15 are fixedly connected to both sides of the outer side wall of the sealed door 2, and compartment side lugs 16 are fixedly connected to both sides of the outer side wall of the transfer compartment 1. The door side lugs 15 and the compartment side lugs 16 are respectively arranged. A compartment door guide rod 17 is fixedly connected to the inner side wall of the two door side lugs 15. The two compartment door guide rods 17 pass through the two compartment side lugs 16 respectively. A secondary spring 18 is sleeved on the outer side wall of the two compartment door guide rods 17 at the other side of the two compartment side lugs 16.

[0038] Example 4

[0039] This embodiment is a specific implementation of the working principle of a self-opening and closing vacuum transfer device suitable for scanning electron microscopes.

[0040] The working principle of a self-opening and closing vacuum transfer device suitable for scanning electron microscopes includes the following steps:

[0041] S1. Place the transfer chamber 1 in the glove box while it is in the open state. At this time, the main spring latching mechanism 8 of the transfer chamber 1 is in the slot of the main shaft sleeve 11, ensuring that the main spring 7 can keep the sealing door 2 in the open state (similar to the working principle of the sliding claw sleeve of a ballpoint pen).

[0042] S2. Then fix the sample on the sample holder 4, and then manually close the sealing chamber door 2.

[0043] S3. Open the needle valve 10 switch, connect the vacuum pump suction pipe to the needle valve 10 and perform vacuum treatment on the transfer chamber 1. After the operation is completed, close the needle valve 10 switch and remove the vacuum pump suction pipe. At this time, the internal pressure of the transfer chamber 1 is consistent with the vacuum degree of the secondary vacuum chamber 9, and the pressure difference actuating piston 12 remains stationary.

[0044] S4. Then, take the transfer chamber 1 out of the glove box and place it in the scanning electron microscope sample chamber for vacuuming. When the pressure in the sample chamber is consistent with the internal pressure of the transfer chamber 1, the sealing door 2 is opened by the combined action of the main spring 7 and the auxiliary spring 18. As the pressure further increases, the vacuum degree of the secondary vacuum chamber 9 also increases, always keeping consistent with the pressure in the sample chamber.

[0045] S5. When the required vacuum level is reached, electron microscopy testing can be performed. After the test is completed, the sample chamber is evacuated. As the pressure in the sample chamber gradually increases, the vacuum level of the secondary vacuum chamber 9 remains unchanged under the action of the one-way air valve 19, and is always lower than the external pressure. Due to the pressure difference between the inside and outside, the pressure difference actuating piston 12 moves to the right, causing the main spring latching mechanism 8 to be lifted to the right along the main shaft sleeve 11 of the secondary vacuum chamber 9, causing the main spring 7 to fail and no longer function. The sealing chamber door 2 is closed under the action of the auxiliary spring 18.

[0046] S6. Remove the transfer chamber 1 from the sample chamber and place it in the glove box. Open the needle valve 10 to release the gas and take out the sample. In this way, the sample is always in an inert gas atmosphere, which provides good protection for air-sensitive samples.

[0047] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0048] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A self-opening and closing vacuum transfer device suitable for scanning electron microscopes, comprising a transfer chamber (1), characterized in that: One end of the transfer chamber (1) is provided with a sealed chamber door (2), and the other end of the transfer chamber (1) is bolted to a detachable sealed chamber door (3). A needle valve (10) is fixedly connected to the outer side wall of the detachable sealed chamber door (3) near the bottom. The inner wall of the sealed chamber door (2) is fixedly connected to two sample holder guide rails (5), and sample holders (4) are slidably connected to the outer walls of the two sample holder guide rails (5). A main spring (7) is provided on the inner side wall of the sealed chamber door (2) near the bottom. A main spring latching mechanism (8) is fixedly connected to the end of the main spring (7) away from the sealed chamber door (2). A secondary vacuum chamber (9) is provided at one end of the main spring latching mechanism (8). A main shaft sleeve (11) is fixedly connected to the outer side wall of the secondary vacuum chamber (9). A differential pressure actuating piston (12) is provided at one end of the main spring latching mechanism (8). The differential pressure actuating piston (12) is located inside the main shaft sleeve (11). A piston return spring (13) is provided inside the main shaft sleeve (11). A one-way air valve (19) is fixedly connected to the outer side wall of the secondary vacuum chamber (9). Door side lugs (15) are fixedly connected to both sides of the outer side wall of the sealed door (2), and compartment side lugs (16) are fixedly connected to both sides of the outer side wall of the transfer compartment (1). The door side lugs (15) and the compartment side lugs (16) are arranged correspondingly. A compartment door guide rod (17) is fixedly connected to the inner side wall of each of the two door side lugs (15). The two compartment door guide rods (17) pass through the two compartment side lugs (16) respectively. A secondary spring (18) is sleeved on the outer side wall of each of the two compartment door guide rods (17) at the other side of the two compartment side lugs (16).

2. The self-opening and closing vacuum transfer device suitable for scanning electron microscopes according to claim 1, characterized in that: The inner wall of the sealed chamber door (2) is fixedly connected with a sealing ring (6) around the outside of the two sample holder guide rails (5), and the sealing ring (6) is in contact with the outer wall of one end of the transfer chamber (1).

3. The self-opening and closing vacuum transfer device suitable for scanning electron microscopes according to claim 1, characterized in that: The bottom of the secondary vacuum chamber (9) is provided with a fixed bracket (14), which is fixedly connected to the bottom of the inner wall of the transfer chamber (1).

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