filter

Abstract

The filter of the present invention comprises: a filter base having a first main surface and a second main surface opposite to the first main surface, and having formed a plurality of through holes communicating with the first main surface and the second main surface; and a support portion having a plurality of protrusions located in the plurality of through holes and disposed on the second main surface of the filter base, the filter base having an inner wall extending from the second main surface toward the first main surface and defining the plurality of through holes, the plurality of protrusions having an outer wall contacting the inner wall of the filter base, and in the plurality of through holes where the plurality of protrusions are located, a first opening on the first main surface side of the filter base is larger than a second opening on the second main surface side of the filter base, and a gap is formed between the filter base and the support portion.

Description

Technical Field

[0001] This invention relates to filters. Background Technology

[0002] Patent Document 1 discloses a screen component comprising a screen and an outer frame, wherein the screen has recesses for capturing particles and holes formed in the recesses, and the outer frame fixes the outer periphery of the screen. The screen component of Patent Document 1 has a strip-shaped support frame disposed across the opposing frame edge of the outer frame, the support frame being embedded across the recesses and holes connected to the recesses.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2019-181352

[0004] However, in the screen component of Patent Document 1, there is still room for improvement in terms of increasing strength. Summary of the Invention

[0005] The purpose of this invention is to provide a filter that can improve strength.

[0006] One aspect of the filter of the present invention comprises:

[0007] The filter substrate has a first main surface and a second main surface opposite to the first main surface, and has formed a plurality of through holes communicating with the first main surface and the second main surface; and

[0008] The support portion has multiple protrusions located at the aforementioned multiple through holes and is disposed on the aforementioned second main surface of the aforementioned filter base portion.

[0009] The filter substrate has an inner wall that extends from the second main surface toward the first main surface and defines the plurality of through holes.

[0010] The aforementioned protrusions have outer walls that contact the inner wall of the aforementioned filter base portion.

[0011] In the plurality of through holes where the aforementioned protrusions are located, the first opening on the first main surface side of the filter base is larger than the second opening on the second main surface side of the filter base.

[0012] A gap is formed between the filter substrate and the support.

[0013] According to the present invention, a filter capable of improving strength can be provided. Attached Figure Description

[0014] Figure 1 This is a schematic diagram showing an example of the filter of Embodiment 1 of the present invention viewed from the first main surface side.

[0015] Figure 2This is a schematic diagram of an example of the filter of Embodiment 1 of the present invention, viewed from the second main side.

[0016] Figure 3 This is an enlarged perspective view of a part of the filter section.

[0017] Figure 4 It is cut along the Y direction. Figure 3 An enlarged sectional view of the filter section.

[0018] Figure 5 This is an enlarged sectional view of an example of a support.

[0019] Figure 6 This is a partially enlarged sectional view of the filter section with the support section configured therein.

[0020] Figure 7 It is Figure 6 An enlarged view of the Z1 section of the filter unit.

[0021] Figure 8A This is a schematic diagram illustrating an example of the manufacturing process of the filter according to Embodiment 1 of the present invention.

[0022] Figure 8B This is a schematic diagram illustrating an example of the manufacturing process of the filter according to Embodiment 1 of the present invention.

[0023] Figure 8C This is a schematic diagram illustrating an example of the manufacturing process of the filter according to Embodiment 1 of the present invention.

[0024] Figure 8D This is a schematic diagram illustrating an example of the manufacturing process of the filter according to Embodiment 1 of the present invention.

[0025] Figure 8E This is a schematic diagram illustrating an example of the manufacturing process of the filter according to Embodiment 1 of the present invention.

[0026] Figure 8F This is a schematic diagram illustrating an example of the manufacturing process of the filter according to Embodiment 1 of the present invention.

[0027] Figure 8G This is a schematic diagram illustrating an example of the manufacturing process of the filter according to Embodiment 1 of the present invention.

[0028] Figure 8H This is a schematic diagram illustrating an example of the manufacturing process of the filter according to Embodiment 1 of the present invention.

[0029] Figure 9 This is a schematic diagram illustrating an example of a filter device equipped with the filter of Embodiment 1 of the present invention.

[0030] Figure 10A This is a schematic diagram illustrating an example of a variation of the filter according to Embodiment 1 of the present invention.

[0031] Figure 10B This is a schematic diagram illustrating an example of a variation of the filter according to Embodiment 1 of the present invention.

[0032] Figure 11 This is a photograph showing a cross-section of the filter according to Embodiment 1 of the present invention.

[0033] Figure 12A This is a photograph showing a cross-section of the filter according to Embodiment 1 of the present invention.

[0034] Figure 12B This is a photograph taken from the first main surface of the filter according to Embodiment 1 of the present invention.

[0035] Figure 13A This is an enlarged cross-sectional view of a filter according to a modified embodiment 1 of the present invention.

[0036] Figure 13B This is an enlarged cross-sectional view of a filter according to a modified embodiment 1 of the present invention.

[0037] Figure 13C This is an enlarged cross-sectional view of a filter according to a modified embodiment 1 of the present invention.

[0038] Figure 14A This is an enlarged cross-sectional view of a filter according to a modified embodiment 1 of the present invention.

[0039] Figure 14B This is an enlarged cross-sectional view of a filter according to a modified embodiment 1 of the present invention.

[0040] Figure 15A This is a schematic diagram illustrating an example of a modification of the filter according to Embodiment 1 of the present invention.

[0041] Figure 15B This is a schematic diagram illustrating an example of a modification of the filter according to Embodiment 1 of the present invention. Detailed Implementation

[0042] (The process of completing this invention)

[0043] As with the screen component described in Patent Document 1, it is known that filters can improve their strength by providing a support portion in the filter section having multiple through holes.

[0044] However, there is room for improvement in terms of strength in such filters. For example, it is difficult to improve the strength against bending in sections of the filter where supports are provided.

[0045] For example, in filtering a liquid containing the object to be filtered, stress applied to the filter is released by flexing the filter in the thickness direction. That is, if an external force is applied to the filter, the filter deforms, easing the stress applied to the filter. However, the parts of the filter with supports are difficult to deform when external forces are applied. Therefore, it is difficult to ease the stress applied to the filter in the parts with supports.

[0046] Therefore, in order to solve the above-mentioned problems, the inventors discovered a filter in which a gap is provided between the filter base portion having multiple through holes and the support portion, thus completing the present invention. As a result, when an external force is applied, the filter deforms within the gap, thereby mitigating the stress applied to the filter.

[0047] One aspect of the filter of the present invention comprises:

[0048] The filter substrate has a first main surface and a second main surface opposite to the first main surface, and a plurality of through holes are formed connecting the first main surface and the second main surface; and

[0049] The support portion has multiple protrusions located in the aforementioned multiple through holes and is disposed on the aforementioned second main surface of the aforementioned filter base portion.

[0050] The filter substrate has an inner wall that extends from the second main surface toward the first main surface and defines the plurality of through holes.

[0051] The aforementioned protrusions have outer walls that contact the inner wall of the aforementioned filter base portion.

[0052] In the plurality of through holes where the aforementioned protrusions are located, the first opening on the first main surface side of the filter base is larger than the second opening on the second main surface side of the filter base.

[0053] A gap is formed between the filter substrate and the support.

[0054] This structure can improve the strength of the filter.

[0055] Alternatively, the aforementioned gap may be formed between the inner wall of the filter substrate and the outer wall of the plurality of protrusions.

[0056] This structure allows for further improvement in the strength of the filter.

[0057] Alternatively, the aforementioned gap may be located at least on the first main surface of the filter substrate.

[0058] This structure allows for further improvement in the strength of the filter.

[0059] Alternatively, the inner wall may be formed from a flat surface that extends obliquely from the second main surface of the filter substrate toward the first main surface.

[0060] The outer wall is formed by a flat surface that extends obliquely from the second main surface of the filter substrate toward the first main surface.

[0061] This structure allows for further improvement in the strength of the filter.

[0062] Alternatively, each of the aforementioned protrusions may have a protruding surface located on the aforementioned first main surface.

[0063] When the filter substrate is viewed from the first main surface, the external dimensions of the protruding surface are more than 0.5 times and less than 1.0 times the size of the first opening.

[0064] This structure allows for further improvement in the strength of the filter.

[0065] Alternatively, the aforementioned support portion may have a plurality of first support members and a plurality of second support members, wherein the plurality of first support members extend along a first direction and the plurality of second support members extend along a second direction intersecting the first direction.

[0066] This structure allows for further improvement in the strength of the filter.

[0067] Alternatively, the coefficient of thermal expansion of the filter substrate can be approximately equal to that of the support portion.

[0068] This structure can suppress filter damage caused by temperature changes and further improve the filter's strength.

[0069] Alternatively, the filter substrate and the support portion may be made primarily of at least one material selected from metals and metal oxides.

[0070] This structure allows for further improvement in the strength of the filter.

[0071] Hereinafter, Embodiment 1 of the present invention will be described with reference to the accompanying drawings. Furthermore, in order to simplify the explanation, the various elements are exaggerated in the drawings.

[0072] (Implementation Method 1)

[0073] [Overall Structure]

[0074] Figure 1 This is a schematic diagram of an example of the filter 1 of Embodiment 1 of the present invention, viewed from the first main surface PS1 side. Figure 2 This is a schematic diagram of an example of the filter 1 according to Embodiment 1 of the present invention, viewed from the second main surface PS2 side. In the figure, the X, Y, and Z directions represent the longitudinal, transverse, and thickness directions of the filter 1, respectively.

[0075] For example, filter 1 is a filter that filters the fluid containing the object to be filtered.

[0076] In this specification, the term "filterable material" refers to the material to be filtered from the fluid's contents. For example, the filterable material can also be biologically derived substances contained in the fluid. "Biologically derived substances" refers to substances derived from living organisms, such as cells (eukaryotes), bacteria (eubacteria), and viruses. Examples of cells (eukaryotes) include, for example, induced pluripotent stem cells (iPS cells), ES cells, stem cells, mesenchymal stem cells, monocytes, single cells, cell clumps, planktonic cells, adhesive cells, nerve cells, white blood cells, cells for regenerative medicine, autologous cells, cancer cells, circulating cancer cells (CTCs), HL-60, HELA, and bacteria. Examples of bacteria (eubacteria) include, for example, Escherichia coli and Mycobacterium tuberculosis.

[0077] As a fluid, examples include liquids or gases. As a liquid, examples include cell suspensions.

[0078] Filter 1 is a metal filter. The material constituting filter 1 is primarily composed of at least one of metals and metal oxides. For example, the material constituting filter 1 may also be gold, silver, copper, platinum, nickel, palladium, titanium, alloys of these materials, and oxides of these materials. In particular, by using titanium or nickel-palladium alloys, less metal leaching occurs, thus reducing the impact on the filtered material.

[0079] like Figure 1 and Figure 2 As shown, the filter 1 has a filter portion 10 and a frame portion 20 disposed on the outer periphery of the filter portion 10. Furthermore, the filter 1 has a first main surface PS1 and a second main surface PS2 opposite to the first main surface PS1. In Embodiment 1, the filter portion 10 and the frame portion 20 are integrally formed.

[0080] <Filter Department>

[0081] The filter section 10 is a part that filters fluid containing the object to be filtered. The filter section 10 is composed of a filter base section 12 having a plurality of through holes 11, wherein the plurality of through holes 11 connect a first main surface PS1 and a second main surface PS2. In addition, in the filter section 10, a plurality of support portions 13 are arranged on the second main surface PS2 of the filter base section 12.

[0082] Viewed from the thickness direction (Z direction) of filter 1, the shape of filter section 10 is, for example, circular, polygonal, or elliptical. In Embodiment 1, the shape of filter section 10 is approximately circular. Furthermore, in this specification, "approximately circular" means that the ratio of the length of the major axis to the length of the minor axis is 1.0 or more and 1.2 or less.

[0083] <Frame>

[0084] The frame portion 20 is provided on the outer periphery of the filter portion 10, and the number of through holes 11 per unit area is less than that of the filter portion 10. The number of through holes 11 in the frame portion 20 is less than 1% of the number of through holes 11 in the filter portion 10. The thickness of the frame portion 20 may also be greater than the thickness of the filter portion 10. With this structure, the mechanical strength of the filter 1 can be improved.

[0085] When the filter 1 is connected to the device for use, the frame portion 20 can also function as a connection part for connecting the filter 1 to the device. In addition, information about the filter 1 (such as the size of the through hole 11) can be displayed on the frame portion 20.

[0086] Viewed from the first main surface PS1 side of the filter section 10, the frame section 20 is formed in a ring shape. Viewed from the first main surface PS1 side of the filter 1, the center of the frame section 20 coincides with the center of the filter section 10. That is, the frame section 20 and the filter 1 are formed on concentric circles.

[0087] The filter section 10 will now be described in detail.

[0088] Figure 3 This is an enlarged perspective view of a part of the filter section 10. Figure 3 A portion of the filter substrate 12 having a plurality of through holes 11 is shown magnified. Figure 4 It is cut along the Y direction. Figure 3 An enlarged cross-sectional view of the filter section 10.

[0089] like Figure 3 and Figure 4 As shown, a plurality of through holes 11 are periodically arranged on the first main surface PS1 and the second main surface PS2 of the filter section 10. Specifically, the plurality of through holes 11 are arranged in a matrix at equal intervals in the filter section 10.

[0090] In Embodiment 1, viewed from the first main surface PS1 side (Z direction) of the filter section 10, the plurality of through holes 11 are arranged along two directions parallel to the sides of the square, i.e. Figure 3 The X and Y directions are set in the filter section 10. Furthermore, multiple through holes 11 can be provided in the filter section 10, and their arrangement direction is not limited.

[0091] In the filter section 10, the portion where the through-hole 11 is not formed is formed by the filter base section 12. For example... Figure 3 As shown, the filter substrate 12 is formed in a lattice shape. Specifically, the filter substrate 12 has a plurality of first substrate members 12aa and a plurality of second substrate members 12ba in the filter section 10, wherein the plurality of first substrate members 12aa are arranged at equal intervals and extend along a first direction, and the plurality of second substrate members 12ba are arranged at equal intervals and extend along a direction intersecting the first direction.

[0092] Multiple first base components 12aa and multiple second base components 12ba are formed from plate-shaped components. Multiple through holes 11 are defined by the intersection of the multiple first base components 12aa and the multiple second base components 12ba. In Embodiment 1, the first direction in which the multiple first base components 12aa extend is the X direction, and the second direction in which the multiple second base components 12ba extend is the Y direction. That is, in Embodiment 1, the first direction and the second direction are orthogonal.

[0093] In embodiment 1, a plurality of first base components 12aa and a plurality of second base components 12ba are integrally formed.

[0094] The filter substrate 12 has an inner wall 12a that extends from the second main surface PS2 toward the first main surface PS1 and defines a plurality of through holes 11. In Embodiment 1, the inner wall 12a is formed by a flat surface that extends obliquely from the second main surface PS2 toward the first main surface PS1 of the filter substrate 12. Thus, as Figure 4 As shown, the filter base portion 12 has a trapezoidal cross-sectional shape. That is, the filter base portion 12 has a conical shape. Therefore, in the cross-section of the filter portion 10 cut along the Y direction, the through hole 11 has a trapezoidal shape.

[0095] The thickness T1 of the filter substrate 12 in the filter section 10 is 0.5 μm or more and 20 μm or less. This reduces pressure loss of the fluid passing through the filter while maintaining mechanical strength. Preferably, the thickness T1 of the filter substrate 12 in the filter section 10 is 1.0 μm or more and 3 μm or less. This further reduces pressure loss of the fluid passing through the filter.

[0096] A first opening 11a of the through hole 11 is formed on the first main surface PS1 side of the filter section 10. Additionally, a second opening 11b of the through hole 11 is formed on the second main surface PS2 side of the filter section 10. In Embodiment 1, when viewed from the first main surface PS1 side, the first opening 11a and the second opening 11b have a square shape.

[0097] When viewing the filter substrate 12 from the first main surface PS1, the first opening 11a is larger than the second opening 11b. In other words, the size C1 of the first opening 11a is larger than the size C2 of the second opening 11b. The size C1 of the first opening 11a and the size C2 of the second opening 11b are dimensions that determine the shape of the openings. In Embodiment 1, dimensions C1 and C2 may also be sides of a square. Alternatively, for example, if the shapes of the first opening 11a and the second opening 11b are circular, dimensions C1 and C2 may also be diameters.

[0098] For example, the size C1 of the first opening 11a is 0.5 μm or more and 400 μm or less. Preferably, the size C1 of the first opening 11a is 1 μm or more and 30 μm or less.

[0099] For example, the size C2 of the second opening 11b is 0.5 μm or more and 380 μm or less. Preferably, the size C2 of the second opening 11b is 0.8 μm or more and 29 μm or less.

[0100] When the filter substrate 12 is viewed from the first main surface PS1, the opening area of ​​the first opening 11a is larger than the opening area of ​​the second opening 11b. The opening area of ​​the first opening 11a is the area defined by the first opening 11a when viewed from the first main surface PS1 side of the filter 10. The opening area of ​​the second opening 11b is the area defined by the second opening 11b when viewed from the second main surface PS2 side of the filter 10.

[0101] Furthermore, the shapes of the first opening 11a and the second opening 11b are not limited to squares. For example, the shapes of the first opening 11a and the second opening 11b can also be circular, elliptical, rectangular, polygonal, etc.

[0102] In the filter section 10, it is preferable that the surface roughness of the first main surface PS1 and the second main surface PS2 is relatively small. Here, the so-called surface roughness refers to the average of the differences between the maximum and minimum values ​​measured by a probe profilometer at any five locations. In Embodiment 1, the surface roughness is preferably less than the size of the object to be filtered, and more preferably less than half the size of the object to be filtered. This is to reduce the adhesion of the object to be filtered, and to enable efficient recovery after the object to be filtered is captured by the filter.

[0103] Back Figure 2A support portion 13 is disposed on the second main surface PS2 of the filter portion 10. In other words, the support portion 13 is disposed on the second main surface PS2 of the filter base portion 12.

[0104] The support portion 13 is formed in a lattice shape. Specifically, the support portion 13 has a plurality of first support members 13a extending along a first direction and a plurality of second support members 13b extending along a second direction intersecting the first direction. In Embodiment 1, the first direction is the X direction and the second direction is the Y direction. That is, the plurality of first support members 13a and the plurality of second support members 13b are orthogonal.

[0105] Multiple first support members 13a and multiple second support members 13b are formed from plate-shaped components. The multiple first support members 13a and multiple second support members 13b are integrally formed.

[0106] Multiple first support members 13a and multiple second support members 13b are arranged at equal intervals. For example, the interval A1 between the multiple first support members 13a and multiple second support members 13b is 200 μm or more and 500 μm or less. Preferably, the interval A1 is 250 μm or more and 350 μm or less. This reduces the number of through holes 11 blocked by the support portions 13 and improves mechanical strength.

[0107] Viewed from the second main surface PS2 side of the filter section 10, the width B1 of the plurality of first support members 13a and the plurality of second support members 13b is greater than the width of the plurality of first plate-shaped members and the plurality of second plate-shaped members of the filter base section 12. For example, the width B1 of the plurality of first support members 13a and the plurality of second support members 13b is 5 μm or more to 40 μm. Preferably, the width B1 is 10 μm or more to 25 μm. This reduces the number of through holes 11 blocked by the support sections 13 and improves mechanical strength.

[0108] Figure 5 This is an enlarged sectional view of an example of support portion 13. (See example...) Figure 5 As shown, the support portion 13 has a plurality of protrusions 14.

[0109] Specifically, the support portion 13 is a plate-shaped component having a third main surface PS3 and a fourth main surface PS4 opposite to the third main surface PS3. The third main surface PS3 of the support portion 13 is in contact with the second main surface PS2 of the filter base portion 12.

[0110] Multiple protrusions 14 protrude from the third main surface PS3 of the support portion 13 in a direction from the fourth main surface PS4 toward the third main surface PS3. Each of the multiple protrusions 14 is formed in a convex shape, having a protruding surface 14aa and an outer wall 14a connecting the protruding surface 14aa to the third main surface PS3 of the support portion 13. In Embodiment 1, each of the multiple protrusions 14 has a frustum pyramid shape.

[0111] The protruding surface 14aa is a surface that protrudes from the third main surface PS3 of the support portion 13 and is formed to be flat.

[0112] The height T2 of the protrusion 14 is equal to the depth of the through hole 11. The height T2 of the protrusion 14 is the distance from the third main surface PS3 of the support portion 13 to the protruding surface 14aa. For example, the height T2 of the protrusion 14 is 0.5 μm or more and 20 μm or less. Preferably, the height T2 of the protrusion 14 is 1.0 μm or more and 3 μm or less.

[0113] Furthermore, the thickness T3 of the support portion 13 is, for example, 5 μm or more and 40 μm or less. Preferably, the thickness T3 of the support portion 13 is 10 μm or more and 25 μm or less.

[0114] The outer wall 14a contacts the inner wall 12a of the filter base portion 12. The outer wall 14a extends obliquely toward the protruding direction of the protrusion 14. The protruding direction of the protrusion 14 is the direction from the fourth main surface PS4 of the support portion 13 toward the third main surface PS3. The outer wall 14a is oblique so that the shape of the protrusion 14 increases as it moves toward the protruding direction. In Embodiment 1, the outer wall 14a is formed of a flat surface. That is, the protrusion 14 has an inverted conical shape.

[0115] The shape of the protrusion 14 increases in the direction of protrusion. Specifically, the outer dimension D1 of the protruding surface 14aa of the protrusion 14 is larger than the outer dimension D2 of the protrusion 14 located on the third main surface PS3. The outer dimensions D1 and D2 are the dimensions that determine the shape of the protrusion 14. In Embodiment 1, the outer dimensions D1 and D2 may also be one side of a square. Alternatively, if the protrusion 14 has a frustum-shaped cone, the outer dimensions D1 and D2 may also be diameters.

[0116] When the filter substrate 12 is viewed from the first main surface PS1, the external dimension D1 of the protruding surface 14aa of the protrusion 14 is smaller than the dimension C1 of the first opening 11a. For example, the external dimension D1 is more than 0.5 times and less than 1.0 times the dimension C1 of the first opening 11a.

[0117] When the filter substrate 12 is viewed from the first main surface PS1, the area of ​​the protruding surface 14aa of the protrusion 14 is smaller than the opening area of ​​the first opening 11a.

[0118] When the filter substrate 12 is viewed from the first main surface PS1, the external dimension D2 of the protrusion 14 on the third main surface PS3 located on the support 13 is approximately equal to the dimension C2 of the second opening 11b. The statement that the external dimension D2 is approximately equal to the dimension C2 of the second opening 11b means that the external dimension D2 is more than 0.9 times and less than 1.0 times the dimension C2.

[0119] When the filter substrate 12 is viewed from the first main surface PS1, the cross-sectional area of ​​the protrusion 14 on the third main surface PS3 located on the support 13, cut along the Y direction, is approximately equal to the opening area of ​​the second opening 11b.

[0120] Multiple protrusions 14 are provided corresponding to the positions of multiple through holes 11. Specifically, the multiple protrusions 14 are periodically arranged on the third main surface PS3 of the support portion 13. For example, the multiple protrusions 14 are arranged in a matrix at equal intervals on the third main surface PS3 of the support portion 13. That is, the multiple protrusions 14 are arranged along the X and Y directions.

[0121] Figure 6 This is an enlarged cross-sectional view of the portion of the filter section 10 where the support section 13 is located. Figure 7 It is magnification Figure 6 An enlarged view of the Z1 portion of the filter section 10. (See image below.) Figure 6 and Figure 7 As shown, the support portion 13 is disposed on the second main surface PS2 of the filter base portion 12. Multiple protrusions 14 of the support portion 13 are located in multiple through holes 11. The protruding surfaces 14aa of the protrusions 14 are at the same height as the first main surface PS1 of the filter base portion 12.

[0122] The inner wall 12a of the filter base portion 12 contacts the outer wall 14a of the plurality of protrusions 14. That is, the plurality of protrusions 14 contact the inner wall 12a of the filter base portion 12 within the through hole 11. In addition, the third main surface P3 of the support portion 13 contacts the second main surface PS2 of the filter base portion 12. As a result, it is possible to prevent the protrusions 14 from detaching from the filter base portion 12. Consequently, the support portion 13 is held on the second main surface PS2 side of the filter base portion 12.

[0123] like Figure 7 As shown, a gap 21 is formed between the filter base portion 12 and the support portion 13. In Embodiment 1, a gap 21 is formed between the inner wall 12a of the filter base portion 12 and the outer wall 14a of the plurality of protrusions 14. The gap 21 is located at least on the first main surface PS1 of the filter base portion 12. Specifically, the gap 21 opens toward the first main surface PS1 of the filter base portion 12. In other words, the gap 21 communicates with the space outside the first main surface PS1 of the filter base portion 12. For example, the size (length in the Y direction) of the gap 21 as viewed from the first main surface PS1 is 0.05 μm or more and 3.0 μm or less.

[0124] In Embodiment 1, when the filter base portion 12 is viewed from the first main surface PS1 side, the external dimension D1 of the protruding surface 14aa is formed to be smaller than the dimension C1 of the first opening 11a of the through hole 11. As a result, a gap 21 is formed between the outer wall 14a of the protruding portion 14 and the inner wall 12a of the filter base portion 12.

[0125] By forming a gap 21 between the filter base portion 12 and the support portion 13, for example, when the filter 1 is bent, the filter 1 can deform within the gap 21. In this way, space for the deformation of the filter 1 can be ensured through the gap 21.

[0126] Preferably, the coefficient of thermal expansion of the material forming the filter substrate 12 is approximately equal to the coefficient of thermal expansion of the material forming the support 13. Here, "approximately equal" includes an error of up to 15%.

[0127] For example, the filter substrate 12 and the support portion 13 may also be formed of Ni or PdNi (Pd ratio: 50% to 95%). For example, the filter substrate 12 may be formed of Ni and the support portion 13 may be formed of PdNi. Furthermore, the combination of materials for the filter substrate 12 and the support portion 13 is not limited to this.

[0128] [Filter Manufacturing Method]

[0129] use Figures 8A-8H An example of the manufacturing method of filter 1 will be described. Figures 8A-8H This is a schematic diagram illustrating an example of the manufacturing process of filter 1 according to Embodiment 1 of the present invention.

[0130] like Figure 8A As shown, a Cu film 31 is formed on the substrate 30. For example, the Cu film 31 can be formed by sputtering using a sputtering apparatus. Alternatively, the Cu film 31 can be formed by vapor deposition using a vapor deposition apparatus. In this case, a Ti film can also be formed between the substrate 30 and the Cu film 31 to improve the adhesion between them. For example, the Cu film 31 has a thickness of 500 nm, and the Ti film has a thickness of 50 nm.

[0131] like Figure 8BAs shown, a resist film 32 is formed by coating a Cu film 31 with a resist and allowing it to dry. For example, a photosensitive positive liquid resist (manufactured by Sumitomo Chemical Co., Ltd.: Pfi-3A) is coated onto the Cu film 31 using a spin coater. The spin coater conditions are, for example, 1140 rpm for 20 seconds. Next, the resist is heated and dried using a hot plate to form a resist film 32 with a thickness of 1.95 μm. The hot plate baking conditions (heating temperature – heating time) are, for example, 90°C – 60 seconds, 60°C – 60 seconds, and 23°C – 60 seconds.

[0132] like Figure 8C As shown, the resist film 32 is exposed and developed to remove the portion of the resist film 32 corresponding to the filter substrate 12. For example, an i-line stepper (Canon Pfi-37A) is used for exposure. By setting the focus point slightly above an appropriate value in the exposure conditions, the cross-sectional shape of the resist film 32 is trapezoidal. For example, the exposure conditions are: dose: 2800 mJ / cm². 2 Focal point: -0.2μm.

[0133] Development was performed using a puddle developing apparatus. The developer used was TMAH (Tetramethylammonium hydroxide). The development conditions were, for example, 2.38% TMAH, with a puddle development time of 43 seconds x 2 cycles.

[0134] After exposure and development, the product is washed and dried.

[0135] like Figure 8D As shown, electroplating is performed using an electroplating apparatus. Thus, a coating 33 is formed on the portion where the resist film 32 has been removed. For example, the electroplating conditions include a current density of 2.0 A / dm³. 2 The charge is 4.0 AM, the pH of the plating solution is 7.5, and the coating thickness is 1.6 μm.

[0136] like Figure 8E As shown, a resist stripping device capable of high-pressure jetting is used to strip the resist film 32 using a stripping solution NMP (N-methyl-2-pyrrolidone). Afterwards, the coating 33 is cleaned with IPA (isopropyl alcohol) and washed with water, and then dried. This forms a filter substrate 12, which has a plurality of through holes 11.

[0137] like Figure 8FAs shown, a resist film 34 is formed on the filter substrate 12, except for the portion corresponding to the support portion 13. For example, the resist film 34 is formed by coating the filter substrate 12 with resist and allowing it to dry. The resist film 34 is then exposed and developed to remove the resist film 34 from the portion corresponding to the support portion 13.

[0138] like Figure 8G As shown, electroplating is performed using an electroplating apparatus. As a result, a coating 35 is formed at the location corresponding to the support portion 13, i.e., the portion where the resist film 34 has not yet formed. For example, the electroplating conditions include a current density of 1.0 A / dm³. 2 The electroplating conditions are: 20 AM charge, pH of the plating solution, 7.5, and plating thickness of 18 μm. Based on these conditions, a gap 21 can be formed between the filter substrate 12 and the support 13.

[0139] like Figure 8H As shown, the resist film 34 is stripped off, and the Cu film 31 is etched away.

[0140] In this way, filter 1 can be manufactured.

[0141] [action]

[0142] use Figure 9 , Figure 10A as well as Figure 10B Here is an example illustrating the action of filter 1. Figure 9 This is a schematic diagram illustrating an example of a filter device 50 equipped with the filter 1 according to Embodiment 1 of the present invention. Figure 10A and Figure 10B This is a schematic diagram illustrating an example of a variation of filter 1 according to Embodiment 1 of the present invention. Furthermore, Figure 9 This represents the modified filter 1. Figure 10A This is an enlarged view of filter 1 before deformation. Figure 10B This is an enlarged view of the deformed filter 1.

[0143] like Figure 9 As shown, the filter device 50 includes a filter 1 and a housing 51 for holding the filter 1. The filter 1 is installed inside the housing 51. The housing 51 is cylindrical and holds the frame portion 20 of the filter 1.

[0144] In the filter device 50, a liquid containing the object to be filtered flows inside the housing 51. Filtration is thus achieved by the fluid containing the object to be filtered passing through the filter 1. At this time, the filter 1 is bent into a concave shape by the force exerted by the fluid in the direction of fluid flow.

[0145] like Figure 10AAs shown, in the filter 1 before deformation, a gap 21 is formed between the filter base portion 12 and the support portion 13. Specifically, a gap 21 is formed between the inner wall 12a of the filter base portion 12 and the outer wall 14a of the protrusion 14.

[0146] like Figure 10B As shown, when filter 1 flexes and deforms, filter 1 deforms within gap 21. Specifically, when filter 1 flexes in the direction from the first main surface PS1 toward the second main surface PS2, filter 1 deforms, causing filter base portion 12 to be compressed by the protrusion 14 of support portion 13. At this time, if gap 21 is formed between filter base portion 12 and protrusion 14, filter 1 deforms within gap 21, which can alleviate the stress applied to filter 1. Thus, damage caused by deformation of filter 1 can be suppressed.

[0147] Figure 11 and Figure 12A This is a photograph showing a cross-section of filter 1 according to Embodiment 1 of the present invention. Figure 12B This is a photograph of filter 1 taken from the first main surface PS1 side of filter 1 according to embodiment 1 of the present invention. Figure 11 as well as Figures 12A-12B These images were taken using a Hitachi High-Tech SU-8040 SEM (Scanning Electron Microscope). Furthermore, the images were taken after planar milling. Figure 11 as well as Figures 12A-12B As shown, it can be observed that the protrusion 14 of the support portion 13 is located in the through hole 11, and a gap 21 is formed between the filter base portion 12 and the protrusion 14.

[0148] [Effect]

[0149] According to Implementation Method 1, the filter 1 can achieve the following effects.

[0150] The filter 1 includes a filter base portion 12 and a support portion 13. The filter base portion 12 has a first main surface PS1 and a second main surface PS2 opposite to the first main surface PS1. A plurality of through holes 11 are formed in the filter base portion 12, communicating with the first main surface PS1 and the second main surface PS2. The support portion 13 has a plurality of protrusions 14 located in the plurality of through holes 11 and is disposed on the second main surface PS2 of the filter base portion 12. The filter base portion 12 has an inner wall 12a extending from the second main surface PS2 toward the first main surface PS1 and defining the plurality of through holes 11. The plurality of protrusions 14 have outer walls 14a that contact the inner wall 12a of the filter base portion 12. In the plurality of through holes 11 where the plurality of protrusions 14 are located, the first opening 11a on the first main surface PS1 side of the filter base portion 12 is larger than the second opening 11b on the second main surface PS2 side of the filter base portion 12. A gap 21 is formed between the filter base portion 12 and the support portion 13.

[0151] With this structure, the strength of filter 1 can be improved. For example, when an external force is applied to filter 1, filter 1 can deform within the gap 21. As a result, the stress applied to filter 1 can be mitigated, and damage to filter 1 can be prevented.

[0152] A gap 21 is formed between the inner wall 12a of the filter base portion 12 and the outer wall 14a of the plurality of protrusions 14. With this structure, space can be ensured by the gap 21 when the filter 1 deforms in the direction of compressing the filter base portion 12. This mitigates the stress applied to the filter 1 and prevents breakage of the filter 1.

[0153] The gap 21 opens toward the first main surface PS1 of the filter substrate 12. With this structure, when the filter 1 flexes into a concave shape in the direction from the first main surface PS1 toward the second main surface PS2, space for deformation is easily ensured through the gap 21. Therefore, the stress applied to the filter 1 can be mitigated, and damage to the filter 1 can be further suppressed.

[0154] The inner wall 12a is formed by a flat surface extending obliquely from the second main surface PS2 of the filter base portion 12 toward the first main surface PS1. The outer wall 14a is formed by a flat surface extending obliquely from the second main surface PS2 of the filter base portion 12 toward the first main surface PS1. With this structure, the support portion 13 is easily held in the filter base portion 12, and the support portion 13 is difficult to detach from the filter base portion 12.

[0155] Each of the plurality of protrusions 14 has a protruding surface 14aa located on the first main surface PS1. When the filter base portion 12 is viewed from the first main surface PS1 side, the external dimension D1 of the protruding surface 14aa is more than 0.5 times and less than 1.0 times the dimension C1 of the first opening 11a. With this structure, a gap 21 can be formed between the filter base portion 12 and the support portion 13. In addition, the gap 21 can provide space for the filter 1 to deform when the filter 1 is deformed. Furthermore, the gap 21 is a size that makes it difficult for the support portion 13 to detach from the filter base portion 12 when the filter 1 is not deformed.

[0156] The support portion 13 has a plurality of first support members 13a extending along a first direction (X direction) and a plurality of second support members 13b extending along a second direction (Y direction) intersecting the first direction. With this structure, the strength of the filter 1 can be further improved.

[0157] The coefficient of thermal expansion of the filter substrate 12 is approximately equal to that of the support 13. This structure helps to prevent the filter 1 from deforming and / or breaking due to temperature changes.

[0158] The filter substrate 12 and the support 13 are primarily composed of at least one material selected from metals and metal oxides. This structure further enhances the strength of the filter 1.

[0159] Furthermore, in Embodiment 1, an example was described where the cross-sectional shape of the plurality of through holes 11 when the filter 1 is cut along the Y direction is trapezoidal, but this is not a limitation. In other words, an example was described where the cross-sectional shape of the filter base portion 12 is trapezoidal (conical), but this is not a limitation. In the through holes 11, the first opening 11a on the first main surface PS1 side can be larger than the second opening 11b on the second main surface PS2 side.

[0160] In Embodiment 1, an example where the inner wall 12a of the filter base portion 12 is a flat surface was described, but this is not a limitation. Similarly, an example where the outer wall 14a of the protrusion 14 of the support portion 13 is a flat surface was described, but this is not a limitation.

[0161] Figures 13A-13C This is an enlarged cross-sectional view of a filter according to a modified embodiment 1 of the present invention. Figure 13AAs shown, the inner wall 12b of the filter base portion 12B can also be formed in a curved manner. For example, the inner wall 12b can also be curved into a U-shape. The outer wall 14b of the protrusion 14B of the support portion 13B can also be formed in a curved manner along the shape of the inner wall 12b. For example, the outer wall 14b can also be curved into a gently convex shape. In the through hole 11B, the size C11 of the first opening 11ab on the first main surface PS1 side is larger than the size C12 of the second opening 11bb on the second main surface PS2 side. A gap 21B is formed between the inner wall 12b of the filter base portion 12B and the protrusion 14B.

[0162] like Figure 13B As shown, the inner wall 12c of the filter base portion 12C can also be formed in a curved manner. For example, the inner wall 12c can also be formed such that the opening area of ​​the through hole 11C gradually increases from the second main surface PS2 toward the first main surface PS1. The outer wall 14c of the protrusion 14C of the support portion 13C can also be formed curved along the shape of the inner wall 12c. In the through hole 11C, the size C21 of the first opening 11ac on the first main surface PS1 side is larger than the size C22 of the second opening 11bc on the second main surface PS2 side. A gap 21C is formed between the inner wall 12c of the filter base portion 12C and the protrusion 14C.

[0163] like Figure 13C As shown, the inner wall 12d of the filter base portion 12D can also be formed by bending. For example, the inner wall 12d can also be formed as a gently convex shape. The outer wall 14d of the protrusion 14D of the support portion 13D can also be formed by bending along the shape of the inner wall 12d. For example, the outer wall 14d can also be bent into a U-shape. In the through hole 11D, the dimension C31 of the first opening 11ad on the first main surface PS1 side is larger than the dimension C32 of the second opening 11bd on the second main surface PS2 side. A gap 21D is formed between the inner wall 12d of the filter base portion 12D and the protrusion 14D.

[0164] exist Figures 13A-13C In the structure shown, the same as in Embodiment 1, it also has the effect of increasing the strength of filter 1.

[0165] In Embodiment 1, an example was described where the size C1 of the first opening 11a is larger than the size C2 of the second opening 11b in all through holes 11, but this is not a limitation. In the portion of the filter base 12 where the support portion 13 is disposed, the size C1 of the first opening 11a can be larger than the size C2 of the second opening 11b. In other words, in the multiple through holes 11 where the multiple protrusions 14 are located, the first opening 11a on the first main surface PS1 side of the filter base 12 can be larger than the second opening 11b on the second main surface PS2 side of the filter base 12. In the multiple through holes 11 where the multiple protrusions 14 are not located, the first opening 11a and the second opening 11b can be the same size. For example, in the multiple through holes 11 where the multiple protrusions 14 are not located, the through hole 11 can be formed by a flat inner wall 12a extending orthogonally to the first main surface PS1 and the second main surface PS2.

[0166] In Embodiment 1, an example of the support portion 13 being formed of a plate-shaped component was described, but it is not limited to this. The support portion 13 may have a shape that can support the filter base portion 12 from the second main surface PS2 side.

[0167] Figure 14A and Figure 14B This is an enlarged cross-sectional view of a filter according to a modified embodiment 1 of the present invention. Figure 14A As shown, the support portion 13E may also have a recess 15 provided on the fourth main surface PS4. With this structure, the support portion 13E can strengthen the filter base portion 12, and the amount of material used to form the support portion 13E can be reduced. Therefore, compared to the filter 1 of Embodiment 1, the cost can be reduced.

[0168] like Figure 14B As shown, the support portion 13F may also have a protrusion 16 on the fourth main surface PS4. The protrusion 16 has a hemispherical shape. In addition, a cutout 17 may be provided on the side wall of the support portion 13F. With this structure, the support portion 13F can strengthen the filter base portion 12, and the number of through holes 11 blocked by the protrusion 14 can be reduced.

[0169] In Embodiment 1, an example was described where the gap 21 is formed between the inner wall 12a of the filter base portion 12 and the outer wall 14a of the protrusion 14, but this is not a limitation. The gap 21 can be formed between the filter base portion 12 and the support portion 13. For example, the gap may also be formed between the second main surface PS2 of the filter base portion 12 and the third main surface PS3 of the support portion 13.

[0170] Figure 15A and Figure 15B This is a schematic diagram illustrating an example of a modification of the filter according to Embodiment 1 of the present invention. Figure 15AThis is an enlarged view of the filter before deformation. Figure 15B This is a magnified view of the modified filter. (Example) Figure 15A As shown, before deformation, a gap 22 is formed between the second main surface PS2 of the filter substrate 12 and the third main surface PS3 of the support 13. Figure 15B As shown, when the filter flexes and deforms, the filter deforms within the gap 22. Specifically, when the filter flexes along the direction from the first main surface PS1 toward the second main surface PS2, the filter 1 deforms, causing the filter base portion 12 to be compressed by the protrusion 14 of the support portion 13. At this time, the filter deforms within the gap 22, which can alleviate the stress applied to the filter. Thus, damage caused by the deformation of the filter can be suppressed.

[0171] The invention has been fully described with reference to the accompanying drawings and preferred embodiments, but various modifications and variations will be apparent to those skilled in the art. Such modifications and variations are to be understood as being included in the invention as defined by the appended claims, provided they do not depart from the scope of the invention.

[0172] The filter of the present invention is useful for filtering applications containing a material to be filtered because it can improve strength.

[0173] Explanation of reference numerals in the attached figures

[0174] 1…Filter; 10…Filter section; 11, 11B, 11C, 11D…Through holes; 11a, 11ab, 11ac, 11ad…First opening; 11b, 11bb, 11bc, 11bd…Second opening; 12, 12B, 12C, 12D…Filter base section; 12a, 12b, 12c, 12d…Inner wall; 12aa…First base component; 12ba…Second base component; 13, 13B, 13C, 13D, 13E, 13F…Support section; 13a…First support component; 13b…Second… Supporting components; 14, 14B, 14C, 14D…protrusions; 14a, 14b, 14c, 14d…outer walls; 14aa…protruding surfaces; 15…recesses; 16…convexities; 17…cutouts; 20…frames; 21, 21B, 21C, 21D, 22…gap; 30…substrate; 31…Cu film; 32…resist film; 33…coating; 34…resist film; 35…coating; 50…filter equipment; 51…housing; PS1…first main surface; PS2…second main surface; PS3…third main surface; PS4…fourth main surface.

Claims

1. A filter comprising: The filter substrate has a first main surface and a second main surface opposite to the first main surface, and has formed a plurality of through holes communicating with the first main surface and the second main surface; and The support portion has multiple protrusions located in the aforementioned multiple through holes and is disposed on the aforementioned second main surface of the aforementioned filter base portion. The filter substrate has an inner wall that extends from the second main surface toward the first main surface and defines the plurality of through holes. The aforementioned protrusions have outer walls that contact the inner wall of the aforementioned filter base portion. In the plurality of through holes where the aforementioned protrusions are located, the first opening on the first main surface side of the filter base is larger than the second opening on the second main surface side of the filter base. A gap is formed between the filter substrate and the support.

2. The filter according to claim 1, wherein, The aforementioned gap is formed between the inner wall of the filter base and the outer wall of the plurality of protrusions.

3. The filter according to claim 2, wherein, The aforementioned gap is located at least on the aforementioned first main surface of the aforementioned filter substrate.

4. The filter according to claim 2 or 3, wherein, The aforementioned inner wall is formed by a flat surface that extends obliquely from the second main surface of the aforementioned filter substrate toward the aforementioned first main surface. The outer wall is formed by a flat surface that extends obliquely from the second main surface of the filter substrate toward the first main surface.

5. The filter according to any one of claims 1 to 3, wherein, Each of the aforementioned protrusions has a protruding surface located on the aforementioned first main surface. When the filter substrate is viewed from the first main surface, the external dimensions of the protruding surface are more than 0.5 times and less than 1.0 times the size of the first opening.

6. The filter according to any one of claims 1 to 3, wherein, The aforementioned support portion has a plurality of first support members and a plurality of second support members, wherein the plurality of first support members extend along a first direction and the plurality of second support members extend along a second direction intersecting the first direction.

7. The filter according to any one of claims 1 to 3, wherein, The coefficient of thermal expansion of the filter substrate is approximately equal to that of the support portion.

8. The filter according to any one of claims 1 to 3, wherein, The filter substrate and the support are made of at least one material selected from metals and metal oxides.

Images