Air supply system and control method thereof

Abstract

The application provides an air supply system, which comprises an air supply assembly, a connecting and sealing assembly and an air box assembly. The air supply assembly comprises two air supply cavities arranged oppositely and air supply openings arranged oppositely on the side walls of each air supply cavity. The connecting and sealing assembly comprises two outer flow guide cavities arranged oppositely on the two air supply cavities and having both ends open. The air box assembly comprises a uniform air cavity having both ends open. One end of each outer flow guide cavity is fixedly connected to one air supply cavity through the air supply opening, and the other end is fixedly connected to one end of the uniform air cavity. An inner flow guide assembly is arranged in the uniform air cavity. The inner flow guide assembly is arranged obliquely to the extension direction of the uniform air cavity, so that the air flow entering from both ends of the uniform air cavity flows in a turning direction after being affected by the inner flow guide assembly, and air supply in a target area is realized.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing, and more particularly to an air supply system and its control method. Background Technology

[0002] The coating and developing process is an essential step in chip manufacturing, requiring precise execution of subsequent processes. The four most critical process parameters in coating and developing are film thickness, film thickness uniformity, linewidth, and linewidth uniformity. In addition, there are supporting parameters such as particle control, metal ion control, and defect control, all of which affect the yield of subsequent processes and, consequently, the overall product yield. Therefore, this places extremely high demands on the airflow control within the entire chip cavity.

[0003] The coating and developing unit is a core component of the coating and developing (Track) machine, directly affecting the thickness and uniformity of the film. Typically, to save space and cost, the coating unit in the front-end Track contains 2-3 coating process chambers, facilitating shared use of the coating arms and saving on the glue pump. The coating and developing process chambers generally utilize a constant temperature, humidity, and airflow system. During the coating process, a robotic arm delivers the wafer to the support platform within the coating and developing chamber. A uniform airflow continuously flows out through the exhaust surface above the wafer. The support platform, holding the wafer, rotates at a specific speed driven by a motor. Combined with the uniform airflow above the wafer, this achieves uniform coating and developing.

[0004] The air supply devices of commonly used coating and developing equipment in the present technology usually supply air to one side of the coating and developing process chamber. Since the target area that needs to be aired is large, it is difficult to ensure that the airflow velocity at different positions inside the chamber is consistent.

[0005] Therefore, it is necessary to develop a new type of air supply system and control method to avoid the aforementioned problems existing in the prior art. Summary of the Invention

[0006] The first objective of this invention is to provide an air supply system that enables air supply from opposite sides of the same process chamber.

[0007] To achieve the above objectives, the air supply system provided by the present invention includes an air supply assembly, a connecting sealing assembly, and an air box assembly. The air supply assembly includes two air supply chambers disposed opposite to each other and air supply openings disposed opposite to each sidewall of the air supply chambers, allowing gas to move along the extension direction of the air supply chambers and be output through the air supply openings. The connecting sealing assembly includes two external flow guiding cavities disposed opposite to the two air supply chambers, each open at both ends. The air box assembly includes a gas equalization cavity open at both ends, with one end of each external flow guiding cavity passing through... The air supply opening is fixedly connected to one of the air supply chambers, and the other end is fixedly connected to one end of the gas equalization chamber. The cavity structure with openings at both ends of the outer flow guide chamber is inclined to the extension direction of the air supply chamber, so that the gas entering the outer flow guide chamber is redirected and flows and enters the gas equalization chamber from both ends of the gas equalization chamber in opposite directions. An inner flow guide component is provided in the gas equalization chamber. The inner flow guide component is inclined to the extension direction of the gas equalization chamber, so that the gas entering from both ends of the gas equalization chamber is redirected and flows after being acted upon by the inner flow guide component.

[0008] The beneficial effects of the air supply system of the present invention are as follows: the air supply assembly includes two air supply cavities arranged opposite to each other and air supply openings arranged opposite to each air supply cavity sidewall; the connecting sealing assembly includes two external flow guiding cavities arranged opposite to the two air supply cavities and open at both ends; the air box assembly includes a gas equalization cavity open at both ends; one end of each external flow guiding cavity is fixedly connected to one of the air supply cavities through the air supply opening, and the other end is fixedly connected to one end of the gas equalization cavity; an internal flow guiding assembly is provided in the gas equalization cavity, and the internal flow guiding assembly is inclined to the extension direction of the gas equalization cavity, so that the gas entering from both ends of the gas equalization cavity is redirected and flows after being acted upon by the internal flow guiding assembly, thereby realizing air supply from opposite sides of the same process cavity.

[0009] Preferably, the air supply assembly further includes a fine-tuning device, the number of which is at least one, arranged opposite to at least one of the air supply openings, thereby adjusting the gas flow rate entering the air supply opening.

[0010] More preferably, the fine-tuning device includes an air delivery guide, a flow rate regulator, and a flow rate monitoring unit; the air delivery guide is disposed across the air delivery opening within the air delivery cavity, such that the structure formed by the air delivery guide and the sidewall of each air delivery cavity has a bottom opening to communicate with the outer guide cavity; the flow rate monitoring unit is connected to the flow rate regulator to obtain gas flow rate information entering the air delivery opening; the flow rate regulator is disposed on the air delivery guide and near the bottom opening to adjust the gas flow rate entering the air delivery opening according to the gas flow rate information entering the air delivery opening.

[0011] More preferably, the flow rate regulating component includes a rotating shaft and a baffle that are movably connected to each other, so as to control the flow rate of the gas entering the air supply opening by adjusting the position of the baffle by operating the rotating shaft.

[0012] More preferably, the air supply assembly further includes a movable window disposed on the side wall of the air supply cavity and opposite to the flow rate regulating component. Its advantage is that it facilitates the installation and control of the flow rate regulating component.

[0013] Preferably, the cross-sectional areas of the cavity structures within the external guide cavity, formed along the extension direction of the air supply cavity, continuously decrease along the extension direction of the uniform air distribution cavity.

[0014] More preferably, the external flow guiding cavity includes an external flow guiding top plate and an external flow guiding bottom plate disposed opposite to each other along the extension direction of the air supply cavity. The bottom surface of the external flow guiding top plate and the top surface of the external flow guiding bottom plate form the cavity structure. The bottom surface of the external flow guiding top plate is perpendicular to the extension direction of the air supply cavity, and the top surface of the external flow guiding bottom plate is inclined to the extension direction of the air supply cavity.

[0015] More preferably, the top surface of the outer guide plate is formed by at least two inclined surfaces connected sequentially in the direction toward the uniform air chamber, and the at least two inclined surfaces extend toward the extension direction of the air supply chamber and form at least two inclination angles with the extension direction of the air supply chamber in sequence.

[0016] Preferably, the internal flow guiding assembly includes two internal flow guiding perforated plates disposed opposite to each other in the gas equalization cavity to divide the gas equalization cavity into an intermediate inner cavity, and two internal flow guiding cavities located on both sides of the intermediate cavity. The two internal flow guiding cavities are respectively fixedly connected to the other ends of the two opposite external flow guiding cavities to achieve internal communication, so that the gas enters the two internal flow guiding cavities through the two opposite external flow guiding cavities, and then enters the intermediate inner cavity through the two internal flow guiding perforated plates.

[0017] More preferably, the two inner guide plates are inclined to the setting direction of the gas uniform cavity.

[0018] More preferably, the inner cavity structure of the gas equalization cavity is formed by opposite gas equalization top plates and gas equalization bottom plates. One end of either of the two inner guide plates is fixedly connected to the gas equalization bottom plate, and the other end is fixedly connected to the gas equalization top plate, so that the gas equalization top plate, the gas equalization bottom plate and the two inner guide plates form the intermediate inner cavity.

[0019] More preferably, the two inner guide cavities and the intermediate inner cavity are symmetrically arranged relative to the central axis of the uniform air cavity.

[0020] More preferably, the cross-sectional areas formed by either of the two inner guide cavities along the extension direction of the air supply cavity continuously decrease along their respective extension directions, and the extension direction of either of the two inner guide cavities points from one end of each inner guide cavity along the extension direction of the air distribution cavity to the other end.

[0021] More preferably, the inner guide plate has several through holes.

[0022] Preferably, the connecting sealing assembly includes 2N external flow guiding cavities, and the air box assembly includes N air distribution cavities, with one external flow guiding cavity fixedly connected to each end of each air distribution cavity, where N is a positive integer greater than 1. Its advantage is that the overall system can increase or decrease the number of target air supply areas according to actual needs.

[0023] Preferably, the N gas-uniform cavities are arranged in parallel to each other.

[0024] Preferably, both air supply chambers are perpendicular to the air distribution chamber.

[0025] The second objective of this invention is to provide a control method for an air supply system, enabling air supply from opposite sides of the same process chamber.

[0026] To achieve the above objectives, the control method of the air supply system provided by the present invention supplies air to the two air supply cavities through an air source, so that the gas enters the two external guide cavities through the corresponding air supply openings, enters the uniform air cavity from both ends of the uniform air cavity, and is redirected and flows after being acted upon by the internal guide assembly.

[0027] More preferably, the flow rate monitoring unit acquires gas flow rate information entering the air supply opening; the flow rate regulating component is operated according to the gas flow rate information entering the air supply opening to adjust the gas flow rate entering the air supply opening. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of an air supply system according to an embodiment of the present invention;

[0029] Figure 2 for Figure 1 The diagram shows the assembly structure of the air supply assembly, the connecting sealing assembly, and the air box assembly.

[0030] Figure 3 Figure 1 The diagram shows the structure of a single-sided air supply assembly.

[0031] Figure 4 for Figure 1 The diagram shows the structure of a single connecting sealing assembly;

[0032] Figure 5 for Figure 1 The diagram shows the assembly structure of a single air distribution chamber, a single external flow guiding chamber, and a single air supply chamber.

[0033] Figure 6 for Figure 5 A schematic diagram of the working state of the gas-uniform cavity is shown.

[0034] Figure 7 for Figure 6 A schematic diagram of part of the internal structure of the gas-uniform cavity is shown.

[0035] Figure 8 for Figure 1 The image shows a partial perspective view of the air supply assembly.

[0036] Figure 9 for Figure 1 The diagram shows the internal structure of the air supply component.

[0037] Figure 10 This is a schematic diagram of the assembly structure of the connecting sealing component and the air supply component according to an embodiment of the present invention. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0039] To address the problems existing in the prior art, embodiments of the present invention provide an air supply system.

[0040] Figure 1 This is a schematic diagram of the structure of an air supply system according to an embodiment of the present invention. Figure 2 for Figure 1 The diagram shows the assembly structure of the air supply assembly, the connecting sealing assembly, and the air box assembly. Figure 3 Figure 1 The diagram shows the structure of a single-sided air supply assembly.

[0041] In this embodiment of the invention, the air supply system includes an air supply component, a connecting sealing component, and an air box component. The air supply component includes two air supply chambers arranged opposite to each other and air supply openings arranged opposite to each sidewall of the air supply chambers, so that gas moves along the extension direction of the air supply chambers and is output through the air supply openings.

[0042] Specifically, refer to Figure 1 , Figure 1 The air supply system shown includes an air supply assembly 1, a connecting sealing assembly 2, and an air box assembly 3. For details, please refer to... Figure 2 and Figure 3 The air supply assembly 1 includes a left air supply assembly 11 and a right air supply assembly (not shown in the figure) arranged opposite to each other. The left air supply assembly 11 includes an air supply cavity 111 and a plurality of air supply openings 112 disposed on the side wall of the air supply cavity 111. After the air source supplies air, it extends along the extension direction of the air supply cavity, i.e. Figure 2 As shown in direction A, airflow is output through the air supply cavity 111 to a plurality of air supply openings 112. The right air supply assembly and the left air supply assembly 11 have the same structure, and each air supply opening 112 also has the same structure.

[0043] Figure 4 for Figure 1 The diagram shows the structure of a single connecting sealing assembly. Figure 5 for Figure 1 The diagram shows the assembly structure of a single uniform air chamber, a single external flow guiding chamber, and a single air supply chamber.

[0044] In this embodiment of the invention, the connecting sealing assembly includes two external flow guiding cavities disposed opposite to the two air supply cavities, each open at both ends. The air box assembly includes a gas equalization cavity open at both ends. One end of each external flow guiding cavity is fixedly connected to one of the air supply cavities through the air supply opening, and the other end is fixedly connected to one end of the gas equalization cavity. The cavity structure with open ends in the external flow guiding cavity is inclined to the extending direction of the air supply cavity, so that the gas entering the external flow guiding cavity is redirected and flows from both ends of the gas equalization cavity in opposite directions.

[0045] Specifically, refer to Figure 1 , Figure 4 and Figure 5The connecting sealing assembly 2 includes an outer flow guiding cavity 21, an outer flow guiding top plate 211, an outer flow guiding bottom plate 212, and a connecting fastener 22. The outer flow guiding cavity 21 has openings at both ends (not shown in the figure). The air box assembly 3 includes an air equalization cavity 31, which has openings at both ends (not shown in the figure). One end of the two oppositely arranged outer flow guiding cavities 21 is fixed to the two ends of the air equalization cavity 31 respectively by the connecting fastener 22. The other end of the two outer flow guiding cavities 21 is fixed to the air supply opening 112 of a set of oppositely arranged air supply assemblies 1. The outer guide top plate 211 and the outer guide bottom plate 212 form a cavity structure (not shown in the figure) within the outer guide cavity 21. The cavity structure (not shown in the figure) within the outer guide cavity 21 has a certain tilt angle with the extension direction of the air supply cavity 111, so that the gas entering the outer guide cavity 21 is redirected and flows and enters the uniform air cavity 31 from both ends along opposite directions.

[0046] In some embodiments, the two external flow guide cavities 21 and the two air supply cavities 111 are arranged axially symmetrically on both sides of the uniform air chamber 31 with respect to the axis of symmetry 37 of the uniform air chamber 31, and the two oppositely arranged air supply cavities 111 are supplied with air under the same conditions. At this time, the airflow velocities entering the uniform air chamber 31 at both ends are equal in magnitude and opposite in direction.

[0047] Figure 6 for Figure 5 The diagram shows the working state of the gas-equalizing chamber. Figure 7 for Figure 6 A schematic diagram of part of the internal structure of the gas-uniform cavity is shown.

[0048] In this embodiment of the invention, an internal flow guiding component is provided inside the gas equalization cavity. The internal flow guiding component is inclined to the extension direction of the gas equalization cavity, so that the gas entering from both ends of the gas equalization cavity is redirected and flows after being acted upon by the internal flow guiding component.

[0049] Specifically, refer to Figure 6 and Figure 7 The gas-uniform cavity 31 is provided with a left inner guide plate 321 and a right inner guide plate 322 as an inner guide assembly 32. The left inner guide plate 321 and the right inner guide plate 322 are inclined at the same degree of inclination to the extending direction of the gas-uniform cavity, that is... Figure 7 The directions C or E shown indicate that the airflow entering from the left and right sides of the uniform air chamber 31, after being adjusted by the left inner guide plate 321 and the right inner guide plate 322, changes the airflow direction from horizontal to vertically downward. Direction E is the opposite of direction C.

[0050] In this embodiment of the invention, the air supply assembly further includes a fine-tuning device, the number of which is at least one, arranged opposite to at least one of the air supply openings, thereby adjusting the gas flow rate entering the air supply opening.

[0051] In some specific embodiments, the number of the fine-tuning devices can be one, arranged opposite to one of the air supply openings 112, thereby adjusting the gas flow rate entering the air supply opening 112.

[0052] In some specific embodiments, the number of the fine-tuning devices can be two, arranged opposite to the two air supply openings 112, thereby adjusting the gas flow rate entering the air supply openings 112.

[0053] In this embodiment of the invention, the internal flow guiding assembly includes two internal flow guiding perforated plates disposed opposite to each other in the gas equalization cavity to divide the gas equalization cavity into an intermediate inner cavity, and two internal flow guiding cavities located on both sides of the intermediate cavity. The two internal flow guiding cavities are respectively fixedly connected to the other ends of the two opposite external flow guiding cavities to achieve internal communication, so that the gas enters the two internal flow guiding cavities through the two opposite external flow guiding cavities, and then enters the intermediate inner cavity through the two internal flow guiding perforated plates.

[0054] Specifically, refer to Figure 7 The left inner guide plate 321 and the right inner guide plate 322 are disposed in the gas equalization cavity 31, dividing the gas equalization cavity 31 into a middle inner cavity 33 and a left inner guide cavity 341 and a right inner guide cavity 342. The left inner guide cavity 341 and the right inner guide cavity 342 are respectively connected to the interior of the oppositely arranged outer guide cavity 21, so that the gas enters the left inner guide cavity 341 and the right inner guide cavity 342 through the oppositely arranged outer guide cavity 21, and then enters the middle inner cavity 33 after being guided by the left inner guide plate 321 and the right inner guide plate 322.

[0055] In this embodiment of the invention, the two inner guide plates are inclined to the setting direction of the gas uniform cavity.

[0056] Specifically, refer to Figure 7 The left inner guide plate 321 and the right inner guide plate 322 are arranged at an angle γ with the gas equalization cavity 31.

[0057] In some specific embodiments, the angle γ between the setting direction of the left inner guide plate 321 and the right inner guide plate 322 and the setting direction of the gas equalization cavity 31 is greater than or equal to 135° and less than 180°.

[0058] In some specific embodiments, the range of γ is greater than 90 degrees and less than 180 degrees.

[0059] In this embodiment of the invention, the inner cavity structure of the gas equalization cavity is formed by opposite gas equalization top plates and gas equalization bottom plates. One end of any one of the two inner guide plates is fixedly connected to the gas equalization bottom plate, and the other end is fixedly connected to the gas equalization top plate, so that the gas equalization top plate, the gas equalization bottom plate and the two inner guide plates form the intermediate inner cavity.

[0060] Specifically, refer to Figure 7 The gas equalization cavity 31 is formed by the gas equalization top plate 35 and the gas equalization bottom plate 36 arranged opposite to each other. One end of either the left inner guide plate 321 or the right inner guide plate 322 is fixed to the left and right ends of the gas equalization bottom plate 36, respectively, and the other end is fixed to the gas equalization top plate 35. The gas equalization top plate 35, the gas equalization bottom plate 36, the left inner guide plate 321 and the right inner guide plate 322 form the intermediate inner cavity 33.

[0061] In this embodiment of the invention, the two inner flow guiding cavities and the intermediate inner cavity are symmetrically arranged relative to the central axis of the uniform air cavity.

[0062] Specifically, refer to Figure 7 The left inner guide cavity 341 and the right inner guide cavity 342 are mirror images of each other with the central axis 37 of the uniform air cavity 31 as the axis of symmetry. Their internal spaces are equal in size and their shapes and positions are symmetrical.

[0063] In this embodiment of the invention, the cross-sectional areas of each of the two inner guide cavities formed along the extension direction of the air supply cavity continuously decrease along their respective extension directions, and the extension direction of each of the two inner guide cavities points from one end of each inner guide cavity along the extension direction of the air distribution cavity to the other end.

[0064] Specifically, refer to Figure 7 The cross-sectional areas formed by the left inner guide cavity 341 and the right inner guide cavity 342 along the extension direction of the air supply cavity 111, i.e., the vertical direction, decrease continuously along their respective extension directions, i.e., the C and E directions shown in the figure.

[0065] In some specific embodiments, both the left inner guide plate 321 and the right inner guide plate 322 are flat plates.

[0066] In some specific embodiments, both the left inner guide plate 321 and the right inner guide plate 322 are arc-shaped plates.

[0067] Figure 8 for Figure 1 A partial perspective view of the air supply assembly shown. Figure 9 for Figure 1 The diagram shows the internal structure of the air supply component.

[0068] In this embodiment of the invention, the fine-tuning device includes an air delivery guide, a flow rate regulating component, and a flow rate monitoring unit. The air delivery guide is disposed across the air delivery opening within the air delivery cavity, such that the structure formed by the air delivery guide and the sidewall of each air delivery cavity has a bottom opening for communication with the outer guide cavity. The flow rate monitoring unit is connected to the flow rate regulating component to obtain gas flow rate information entering the air delivery opening. The flow rate regulating component is disposed on the air delivery guide and near the bottom opening to adjust the gas flow rate entering the air delivery opening based on the gas flow rate information entering the air delivery opening.

[0069] Specifically, refer to Figure 5 , Figure 8 and Figure 9 The fine-tuning device (not shown in the figure) includes an air delivery guide 15, a flow rate regulating component 16, and a flow rate monitoring unit (not shown in the figure). The air delivery guide 15 is disposed within the air delivery cavity 111 across the air delivery opening 112, such that the structure formed by the air delivery guide 15 and the side wall of the air delivery cavity 111 has a bottom opening to communicate with the outer guide cavity 21 (not shown in the figure). The flow rate monitoring unit (not shown in the figure) is connected to the flow rate regulating component 16 to obtain gas flow rate information entering the air delivery opening 112. The flow rate regulating component 16 is disposed on the air delivery guide 15 and close to the bottom opening to adjust the gas flow rate entering the air delivery opening 112 according to the gas flow rate information entering the air delivery opening 112.

[0070] In this embodiment of the invention, the flow rate regulating component includes a rotating shaft and a baffle that are movably connected to each other, so as to control the flow rate of the gas entering the air supply opening by adjusting the position of the baffle by operating the rotating shaft.

[0071] Specifically, refer to Figure 5 , Figure 8 and Figure 9The flow rate regulating component 16 includes a rotary valve 19 and a baffle 18 that are movably connected to each other, so as to control the gas flow rate entering the air supply opening 112 by adjusting the position of the baffle 18 by operating the rotary valve 19; when the baffle is vertically downward, it is in normal air supply state; when the rotary valve 19 rotates clockwise, the baffle 18 moves toward the side wall of the air supply cavity 111 where the air supply opening 112 is located, so that the bottom opening of the structure formed by the air supply guide 15 and the side wall of the air supply cavity 111 contracts to reduce air supply; when the rotary valve 19 rotates counterclockwise, the baffle 18 moves away from the side wall of the air supply cavity 111 where the air supply opening 112 is located, so that the bottom opening of the structure formed by the air supply guide 15 and the side wall of the air supply cavity 111 expands to increase air supply.

[0072] In this embodiment of the invention, the air supply assembly further includes an active window disposed on the side wall of the air supply cavity and opposite to the flow rate regulating member.

[0073] Specifically, refer to Figure 1 and Figure 8 The air supply assembly 1 further includes a movable window 17, which is located on the side wall of the air supply cavity and is opposite to the flow rate regulating member 16, so as to facilitate the adjustment of the flow rate regulating member 16 through the movable window 17.

[0074] Figure 10 This is a schematic diagram of the assembly structure of the connecting sealing component and the air supply component according to an embodiment of the present invention.

[0075] In this embodiment of the invention, the cross-sectional areas of the cavity structures within the external flow guiding cavity, formed along the extension direction of the air supply cavity, continuously decrease along the extension direction of the uniform air distribution cavity.

[0076] Specifically, refer to Figure 10 The cavity structure of the external flow guide cavity 21 (not shown in the figure) extends along the extension direction of the air supply cavity 111, that is... Figure 10 The cross-sectional areas formed in direction A shown in the figure decrease continuously along the extension direction of the uniform air cavity, i.e., in the horizontal direction.

[0077] In some specific embodiments, the outer guide top plate 211 and the outer guide bottom plate 212 that form the cavity structure within the outer guide cavity 21 are planar in shape.

[0078] In some specific embodiments, the outer guide plate 211 is a flat plate, and the outer guide plate 212 is an arc-shaped plate or a zigzag plate.

[0079] In this embodiment of the invention, the external flow guiding cavity includes an external flow guiding top plate and an external flow guiding bottom plate disposed opposite to each other along the extension direction of the air supply cavity. The bottom surface of the external flow guiding top plate and the top surface of the external flow guiding bottom plate form the cavity structure. The bottom surface of the external flow guiding top plate is perpendicular to the extension direction of the air supply cavity, and the top surface of the external flow guiding bottom plate is inclined to the extension direction of the air supply cavity.

[0080] Specifically, refer to Figure 10 The bottom surface of the outer guide plate 211 is perpendicular to the extension direction of the air supply cavity 111, i.e., direction A, and the top surface of the outer guide plate 212 has a certain tilt angle with the extension direction of the air supply cavity 111, i.e., direction A.

[0081] In this embodiment of the invention, the top surface of the external guide plate is formed by at least two inclined surfaces connected sequentially in the direction toward the uniform air cavity, and the at least two inclined surfaces extend toward the extension direction of the air supply cavity and form at least two inclination angles with the extension direction of the air supply cavity that increase sequentially.

[0082] Specifically, refer to Figure 10 The top surface of the external guide plate 212 includes a first inclined surface 2121 and a second inclined surface 2122 that are sequentially connected in the direction of the uniform air chamber 31. The angle α between the first inclined surface 2121 and the extension direction of the air supply chamber 111 is smaller than the angle β between the second inclined surface 2122 and the extension direction of the air supply chamber 111.

[0083] In this embodiment of the invention, the inner guide plate has a plurality of through holes. Specifically, the plurality of through holes that allow airflow through the left inner guide plate 321 and the right inner guide plate 322 are evenly distributed on the surface of each plate in a rectangular array or a ring array.

[0084] In this embodiment of the invention, the air supply assembly and the connecting sealing assembly are arranged symmetrically with respect to the air box assembly.

[0085] Specifically, the two air supply components 1 and the connecting sealing component 2 are arranged symmetrically with respect to the air box component 3.

[0086] In this embodiment of the invention, the connecting sealing assembly includes 2N external flow guiding cavities, and the air box assembly includes N air equalization cavities. Each air equalization cavity is fixedly connected to one of the external flow guiding cavities at both ends, where N is a positive integer greater than 1.

[0087] In some specific embodiments, reference is made to Figure 1 The plurality of connecting sealing assemblies 2 include a total of 12 external flow guiding cavities 21, and the air box assembly 3 includes 6 air equalization cavities 31, with one external flow guiding cavity 21 fixedly connected to each end of each air equalization cavity 31.

[0088] In some specific embodiments, the connecting sealing assembly 2 includes two external flow guiding cavities 21, and the air box assembly 3 includes one air equalization cavity 31, with one external flow guiding cavity 21 fixedly connected to each end of the air equalization cavity 31.

[0089] In this embodiment of the invention, the N gas-uniform cavities are arranged in parallel to each other.

[0090] In some embodiments, there is a certain tilt angle between the arrangement directions of the N uniform air chambers 31. In this embodiment of the invention, the two air supply chambers are both perpendicular to the uniform air chamber.

[0091] In some embodiments, the angle formed by the extending direction of the air supply cavity 111 and the extending direction of the air distribution cavity 31 is greater than 0 degrees and less than 90 degrees.

[0092] This invention also provides a control method for the air supply system. This includes:

[0093] Air is supplied to the two air supply cavities through an air source, so that the gas enters the two external flow guiding cavities through the corresponding air supply openings, enters the uniform air cavity from both ends of the uniform air cavity, and is redirected and flows after being acted upon by the internal flow guiding assembly.

[0094] Specifically, air is supplied to the two air supply cavities 112 through the air source, so that the gas enters the two external flow guiding cavities 21 through the corresponding air supply openings 112, and then enters the uniform air cavity 31 from both ends. After being directed by the left inner flow guiding component 341 and the right inner flow guiding component 342, the gas flows in a different direction.

[0095] In this embodiment of the invention, the flow rate monitoring unit acquires gas flow rate information entering the air supply opening; the flow rate regulating component is operated according to the gas flow rate information entering the air supply opening to adjust the gas flow rate entering the air supply opening.

[0096] Specifically, the flow rate monitoring unit (not shown in the figure) acquires the gas flow rate information entering the air supply opening 112; the flow rate regulating component 16 is operated according to the gas flow rate information entering the air supply opening 112 to adjust the gas flow rate entering the air supply opening 112.

[0097] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. An air supply system, characterized in that, Includes air supply assembly, connection sealing assembly, and air box assembly: The air supply assembly includes two air supply chambers arranged opposite each other and air supply openings arranged opposite each other on the sidewall of the air supply chambers, so that the airflow moves along the extension direction of the air supply chambers and is output through the air supply openings; The connecting sealing assembly includes two external flow guiding cavities that are disposed opposite to the two air supply cavities and are open at both ends. The air box assembly includes a gas equalization cavity that is open at both ends. One end of each external flow guiding cavity is fixedly connected to one of the air supply cavities through the air supply opening, and the other end is fixedly connected to one end of the gas equalization cavity. The cavity structure with open ends in the external flow guiding cavity is inclined to the extension direction of the air supply cavity, so that the gas entering the external flow guiding cavity is turned and flows and enters the gas equalization cavity from both ends of the gas equalization cavity in opposite directions. An internal flow guiding component is provided in the gas uniform cavity. The internal flow guiding component is inclined to the extension direction of the gas uniform cavity, so that the gas entering from both ends of the gas uniform cavity is redirected and flows after being acted upon by the internal flow guiding component. The cross-sectional areas of the cavity structure within the external guide cavity, formed along the extension direction of the air supply cavity, continuously decrease along the extension direction of the uniform air cavity. The external flow guiding cavity includes an external flow guiding top plate and an external flow guiding bottom plate arranged opposite to each other along the extension direction of the air supply cavity. The bottom surface of the external flow guiding top plate and the top surface of the external flow guiding bottom plate form the cavity structure. The bottom surface of the external flow guiding top plate is perpendicular to the extension direction of the air supply cavity, and the top surface of the external flow guiding bottom plate is inclined to the extension direction of the air supply cavity. The top surface of the external guide plate is formed by at least two inclined surfaces connected sequentially in the direction toward the uniform air chamber, and the at least two inclined surfaces extend toward the extension direction of the air supply chamber and form at least two inclination angles with the extension direction of the air supply chamber in sequence.

2. The air supply system according to claim 1, characterized in that, The air supply assembly also includes a fine-tuning device, the number of which is at least one, arranged opposite to at least one of the air supply openings, thereby adjusting the gas flow rate entering the air supply opening.

3. The air supply system according to claim 2, characterized in that, The fine-tuning device includes an air supply guide, a flow rate regulating component, and a flow rate monitoring unit; The air delivery guide is disposed in the air delivery cavity across the air delivery opening, such that the structure formed by the air delivery guide and the side wall of each air delivery cavity has a bottom opening to communicate with the outer guide cavity; The flow rate monitoring unit is connected to the flow rate regulating component to obtain gas flow rate information entering the air supply opening; The flow rate regulating component is disposed on the air supply guide and near the bottom opening, so as to adjust the gas flow rate entering the air supply opening according to the gas flow rate information entering the air supply opening.

4. The air supply system according to claim 3, characterized in that, The flow rate regulating component includes a rotating shaft and a baffle that are movably connected to each other, so as to control the flow rate of the gas entering the air supply opening by adjusting the position of the baffle by operating the rotating shaft.

5. The air supply system according to claim 3, characterized in that, The air supply assembly also includes a movable window disposed on the side wall of the air supply cavity and opposite to the flow rate regulating member.

6. The air supply system according to claim 1, characterized in that, The internal flow guiding assembly includes two internal flow guiding perforated plates disposed opposite to each other in the gas equalization cavity to divide the gas equalization cavity into an intermediate inner cavity, and two internal flow guiding cavities located on both sides of the intermediate inner cavity. The two internal flow guiding cavities are respectively fixedly connected to the other ends of the two opposite external flow guiding cavities to achieve internal communication, so that the gas enters the two internal flow guiding cavities through the two opposite external flow guiding cavities, and then enters the intermediate inner cavity through the two internal flow guiding perforated plates.

7. The air supply system according to claim 6, characterized in that, The two inner guide plates are inclined to the direction in which the gas uniform cavity is set.

8. The air supply system according to claim 7, characterized in that, The cavity structure inside the gas equalization chamber is formed by opposite gas equalization top plates and gas equalization bottom plates. One end of either of the two inner guide plates is fixedly connected to the gas equalization bottom plate, and the other end is fixedly connected to the gas equalization top plate, so that the gas equalization top plate, the gas equalization bottom plate and the two inner guide plates form the intermediate inner cavity.

9. The air supply system according to claim 7, characterized in that, The two inner flow guiding cavities and the intermediate inner cavity are symmetrically arranged relative to the central axis of the uniform air distribution cavity.

10. The air supply system according to claim 6, characterized in that, The cross-sectional areas formed by either of the two inner guide cavities along the extension direction of the air supply cavity decrease continuously along their respective extension directions, and the extension direction of either of the two inner guide cavities points from one end of each inner guide cavity along the extension direction of the uniform air cavity to the other end.

11. The air supply system according to claim 6, characterized in that, The inner guide plate has several through holes.

12. The air supply system according to claim 1, characterized in that, The air supply assembly and the connecting sealing assembly are arranged symmetrically with respect to the air box assembly.

13. The air supply system according to claim 1, characterized in that, The connecting sealing assembly includes 2N external flow guiding cavities, and the air box assembly includes N air equalization cavities. Each air equalization cavity is fixedly connected to one of the external flow guiding cavities at both ends, where N is a positive integer greater than 1.

14. The air supply system according to claim 1, characterized in that, The N gas-uniform cavities are arranged in parallel to each other.

15. The air supply system according to claim 1, characterized in that, Both air supply chambers are perpendicular to the air distribution chamber.

16. A control method for an air supply system as described in any one of claims 1-15, characterized in that, Air is supplied to the two air supply cavities through an air source, so that the gas enters the two external flow guiding cavities through the corresponding air supply openings, enters the uniform air cavity from both ends of the uniform air cavity, and is redirected and flows after being acted upon by the internal flow guiding assembly.

17. The control method for the air supply system according to claim 16, characterized in that: The air supply assembly includes a fine-tuning device, which includes a flow rate regulating element and a flow rate monitoring unit. The flow rate monitoring unit acquires the gas flow rate information entering the air supply opening; The flow rate regulator is operated according to the gas flow rate information entering the air supply opening to adjust the gas flow rate entering the air supply opening.

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