A soft X-ray power sampling diagnostic device

Abstract

The present invention relates to the technical field of soft X-ray detection, and specifically discloses a soft X-ray power sampling diagnostic device, including a vacuum cavity, a coated reflector, a first connector and a microammeter, wherein the vacuum cavity is connected with a soft X-ray incident channel and a soft X-ray reflection channel, the coated reflector is connected in the vacuum cavity and is located between the soft X-ray incident channel and the soft X-ray reflection channel, the optical path incident direction of the coated reflector corresponds to the soft X-ray incident channel, the optical path emitting direction of the coated reflector corresponds to the soft X-ray reflection channel, and the measuring end of the microammeter is conductively connected to the coating of the coated reflector through the first connector. The diagnostic device can eliminate the influence of the instability of the light source on the sample measurement result, and can eliminate the influence of the change of the light intensity distribution of the light source on the sample measurement result, and the structural cost is low.

Description

Technical Field

[0001] The invention relates to the technical field of soft X-ray detection, in particular to a soft X-ray power sampling diagnostic device. Background Art

[0002] Soft X-rays can carry out high-resolution three-dimensional structure, element absorption edge and spectral imaging. Its spectroscopy and technology research and application are widely used in physics, chemistry, materials science, medicine, energy science, biology, environmental science and other fields, and make necessary basic research and applied research for major scientific and technological issues. In the "water window" band (284-530eV), high-contrast non-destructive three-dimensional imaging of water-containing biological samples (such as cells) can be directly achieved, and subcellular three-dimensional structure and drug / material interaction information are provided. It is an important tool for studying scientific issues at the intersection of matter and life; soft X-rays can also achieve absorption edge imaging of light elements and transition metal elements, obtain three-dimensional structure, element distribution and content information of materials, and guide the design and synthesis of key light materials in materials, energy, catalysis and other fields and industries.

[0003] In the process of using soft X-ray system experiments, the power of the light source and monochromatic light needs to be detected to determine the relative efficiency of the entire light source and monochromatic beam line, and to serve as the reference light for subsequent sample measurements; currently common X-ray power detectors are truncated detectors, such as X-ray cameras and X-ray photodiodes. After the X-rays hit the detector, they are absorbed by the detector and cannot propagate backwards, so the experiment cannot continue. In order to achieve the function of both using soft X-rays for experiments and measuring the power of soft X-rays, it is necessary to use a suitable soft X-ray power detection method. Currently, there are two main power detection methods, one is the time-sharing detection method, and the other is the spectroscopic detection method.

[0004] The time-sharing detection method is to switch the detector or reflector so that the light hits the detector or the sample at different time periods. For example, every 50 seconds, the detector is switched to the soft X-ray light path for 10 seconds, that is, within one minute, the soft X-ray hits the sample for 50 seconds for experiments, and the soft X-ray hits the detector for another 10 seconds to measure the power of the soft X-ray. However, since the time when the light hits the detector and the sample is different, the influence of the instability of the light source on the sample measurement results cannot be eliminated. For example, in an extreme case, every time the soft X-ray hits the detector, the light source power will increase, and when the soft X-ray hits the sample, the light source power will decrease, so such a measurement result is meaningless.

[0005] The spectroscopic detection method is to intercept a part of the light as the reference light by opening a hole in the detector or reflector, or making the detector or reflector cover only a part of the light spot, so as to realize the simultaneous operation of the sample experimental light and the reference light, and eliminate the influence of the instability of the light source on the sample measurement result; for example: the diameter of the soft X-ray spot is 10mm, and there is a through hole with a diameter of 6mm in the middle of the detector. Then, at this time, the light outside 6mm and within 10mm will hit the detector as the reference light, and the light in the 6mm through hole will hit the sample for experiment. By measuring the power of the reference light, the power of the experimental light hitting the sample can be calculated. Even if the light source is unstable, sometimes the power is high and sometimes the power is low, but because the reference light and the experimental light are working at the same time, the power change of the experimental light can still be inferred according to the power change of the reference light. This method also has a disadvantage, that is, when the light intensity distribution of the light source changes, the ratio of the sample experimental light and the reference light may change, but the system can only calculate according to the previously calibrated ratio, resulting in a large measurement error. For example, in an extreme case, during a certain period of time, the spot diameter of the soft X-ray changes from 10mm to 5mm. Then, from the measurement results of the detector, the light disappears, but in fact the experimental light hitting the sample is still working normally.

[0006] Therefore, the power detection methods in the existing related technologies either cannot eliminate the influence of the instability of the light source on the sample measurement results, or cannot eliminate the influence of the change of the light intensity distribution of the light source on the sample measurement results. Summary of the invention

[0007] The purpose of the present invention is to provide a soft X-ray power sampling diagnostic device, which can eliminate the influence of the instability of the light source on the sample measurement result, and can eliminate the influence of the change of the light intensity distribution of the light source on the sample measurement result, and has a low structural cost.

[0008] The purpose of the present invention can be achieved through the following technical solutions:

[0009] A soft X-ray power sampling diagnostic device comprises a vacuum cavity, a coated reflector, a first connecting piece and a microammeter, wherein the vacuum cavity is connected with a soft X-ray incident channel and a soft X-ray reflection channel, the coated reflector is connected in the vacuum cavity and is located between the soft X-ray incident channel and the soft X-ray reflection channel, the optical path incident direction of the coated reflector corresponds to the soft X-ray incident channel, the optical path emitting direction of the coated reflector corresponds to the soft X-ray reflection channel, and the measuring end of the microammeter is conductively connected to the coating of the coated reflector through the first connecting piece.

[0010] A further solution also includes a photomultiplier tube detector, a second connecting piece and a data acquisition card. The photomultiplier tube detector is connected in the vacuum chamber and is located below the coated reflector. The data acquisition card is conductively connected to the output terminal of the photomultiplier tube detector through the second connecting piece.

[0011] In a further solution, the photomultiplier tube detector is connected to the vacuum chamber via a vacuum linear displacement device.

[0012] In a further scheme, the vacuum linear displacement device includes a guide rod, a guide sleeve, a bellows and a linear displacement assembly, the guide sleeve is connected to the vacuum chamber, the linear sliding end of the linear displacement assembly is sealed and connected to the outer side surface of the guide sleeve through the bellows, one end of the guide rod passes through the guide sleeve and is connected to the housing of the photomultiplier tube detector, and the other end passes through the bellows and is connected to the linear sliding end of the linear displacement assembly.

[0013] In a further solution, the first connecting member includes a first wire, a first vacuum electrode flange, a second wire and a coating connection end, the coating connection end is connected to the coated reflector, the first vacuum electrode flange is connected to the vacuum chamber, the first wire is connected between the first vacuum electrode flange and the coating connection end, one end of the second wire is conductively connected to the microammeter, and the other end is conductively connected to the coating of the coated reflector through the electrode on the first vacuum electrode flange, the first wire, and the coating connection end in sequence.

[0014] In a further embodiment, the first conductive wire is a conductive wire for vacuum, and the second conductive wire is a conductive wire for non-vacuum.

[0015] In a further solution, the second connecting member includes a third wire, a second vacuum electrode flange and a fourth wire, the second vacuum electrode flange is connected to the shell of the vacuum chamber, the third wire is connected between the second vacuum electrode flange and the photomultiplier tube detector, one end of the fourth wire is conductively connected to the input terminal of the data acquisition card, and the other end is conductively connected to the output terminal of the photomultiplier tube detector through the electrode on the second vacuum electrode flange and the third wire in sequence.

[0016] In a further embodiment, the third wire is a wire for vacuum, and the fourth wire is a wire for non-vacuum.

[0017] In a further solution, the photomultiplier tube detector is arranged in the normal direction of the coated reflector.

[0018] In a further solution, the coating of the coated reflector is a gold film.

[0019] Beneficial effects of the present invention:

[0020] 1. Compared with the currently common time-sharing detection method and spectroscopic detection method, the soft X-ray power sampling diagnostic device of the present invention can measure the power of the entire soft X-ray spot in real time through a coated reflector, a first connecting piece and a microammeter without affecting the measurement of the experimental light, which can eliminate the influence of the instability of the light source on the sample measurement results, and can also eliminate the influence of the change of the light intensity distribution of the light source on the sample measurement results.

[0021] 2. The present invention can measure low-power soft X-rays through the electromultiplier tube detector, the second connecting piece and the data acquisition card.

[0022] 3. The present invention uses a reflector or a grating as the signal collection end of the soft X-ray power. In order to facilitate light collection, it can generally be made very large, so that more light signals can be collected, which is convenient for collecting more light for subsequent experiments.

[0023] 4. Conventional detectors have a range, and if the range is exceeded, the detector needs to be replaced. The present invention adopts two soft X-ray power measurement methods, which are respectively suitable for high-power and low-power soft X-rays and have strong adaptability.

[0024] 5. The overall structure of the present invention is reasonable, and in the existing soft X-ray system, there is no need to add too much equipment and it occupies less space. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 It is a schematic diagram of a soft X-ray power sampling diagnostic device according to an embodiment of the present invention.

[0027] In the figure: 1. vacuum chamber; 11. soft X-ray incident channel; 12. soft X-ray reflection channel; 2. coated reflector; 3. first connecting piece; 31. first wire; 32. first vacuum electrode flange; 33. second wire; 34. coated connecting end; 4. microammeter; 5. photomultiplier tube detector; 6. second connecting piece; 61. third wire; 62. second vacuum electrode flange; 63. fourth wire; 7. data acquisition card; 8. vacuum linear displacement device; 81. guide rod; 82. guide sleeve; 83. bellows; 84. linear displacement assembly. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] like Figure 1 As shown, the soft X-ray power sampling diagnostic device includes a vacuum chamber 1, a coated reflector 2, a first connecting member 3 and a microammeter 4. The vacuum chamber 1 is connected to a soft X-ray incident channel 11 and a soft X-ray reflection channel 12. The coated reflector 2 is connected in the vacuum chamber 1 and is located between the soft X-ray incident channel 11 and the soft X-ray reflection channel 12. The incident direction of the optical path of the coated reflector 2 corresponds to the soft X-ray incident channel 11, and the emitting direction of the optical path of the coated reflector 2 corresponds to the soft X-ray reflection channel 12. The measuring end of the microammeter 4 is conductively connected to the coating of the coated reflector 2 through the first connecting member 3.

[0030] Its working principle and usage method are as follows: the vacuum cavity 1 ensures that the entire signal acquisition system works in an ultra-high vacuum environment, and the soft X-rays are emitted from the soft X-ray incident channel 11 to the coated reflector 2. The soft X-ray incident direction is along the direction of the soft X-ray incident channel 11. After being reflected by the coated reflector 2, the soft X-ray emission direction is along the direction of the soft X-ray reflection channel 12, and is emitted into the sample cavity to achieve measurement of the sample. At the same time, when the soft X-rays are incident on the coated reflector 2, a photocurrent will be generated on the coating of the coated reflector 2 using the photoelectric effect principle of the coating. The photocurrent is conducted to the microammeter 4 through the first connecting piece 3, and the magnitude of the photocurrent is measured by the microammeter 4.

[0031] In this way, the power of the entire soft X-ray spot or beam can be measured in real time without affecting the measurement of the experimental light, without the need for time-sharing measurement, thereby eliminating the influence of the instability of the spot light source on the sample measurement results. Without the need for splitting, the influence of changes in the light intensity distribution of the light source on the sample measurement results can be eliminated.

[0032] According to the above working principle, some preferred implementation structures are as follows: Figure 1 As shown, the first connecting member 3 includes a first wire 31, a first vacuum electrode flange 32, a second wire 33 and a coating connection end 34, the coating connection end 34 is connected to the coating reflector 2, the first vacuum electrode flange 32 is connected to the vacuum chamber 1, the first wire 31 is connected between the first vacuum electrode flange 32 and the coating connection end 34, one end of the second wire 33 is conductively connected to the microammeter 4, and the other end is conductively connected to the coating of the coating reflector 2 through the electrode on the first vacuum electrode flange 32, the first wire 31, and the coating connection end 34 in sequence.

[0033] Here, the first wire 31 may be a wire for vacuum, which is a group of wires that can be used in a vacuum environment, and may be composed of one or more wires, or may be formed by a metal electrode;

[0034] The second conductor 33 can be a conductor for non-vacuum, a group of common conductors, consisting of one or more conductors, and can certainly be the above-mentioned conductor for vacuum.

[0035] The first vacuum electrode flange 32 is a flange used for electrical connection inside and outside the vacuum. Its structure can be a group of electrodes insulated from each other welded on the flange, and this group of electrodes is also insulated from the flange. The welding method adopted meets the ultra-high vacuum sealing requirements. It is used to connect the first wire 31 of the vacuum cavity 1 and the second wire 33 outside the vacuum cavity 1, to conduct the electrical signal from the vacuum inside the vacuum cavity 1 to the outside of the vacuum, and ensure that the vacuum degree of the system is maintained at an ultra-high vacuum.

[0036] The coating connection end 34 is placed on the edge of a corner of the coating reflector 2, and does not block the light, but contacts the coating, so as to ensure that the experimental light reflected by the law can be well projected onto the sample to complete the measurement.

[0037] The substrate of the coated reflector 2 can be an insulator such as glass or single crystal silicon, with a gold film coated on the surface; the gold film can be better stimulated to generate photocurrent and has good reflectivity. This is not limited to the use of gold film, and can also be silver film or aluminum film.

[0038] The microammeter 4 may be a commonly used picoammeter.

[0039] When the soft X-ray is incident on the coated reflector 2, a photocurrent will be generated on the coating of the coated reflector 2. The photocurrent will pass through the coating connection end 34, the first wire 31, the first vacuum electrode flange 32, and the second wire 33 in sequence, and enter the microammeter 4, and the photocurrent is measured by the microammeter 4. Since the photocurrent generated on the coating of the coated reflector 2 is proportional to the power of the incident soft X-ray, the ratio of the photocurrent to the power of the soft X-ray can be determined by power calibration, and then the power of the soft X-ray can be calculated by the photocurrent. Power calibration is to hit the soft X-ray of known power on the detection system, and measure the photocurrent at this time to obtain the ratio of the photocurrent to the power of the soft X-ray; in order to improve the accuracy of the system, multiple power measurements are generally used to obtain multiple ratios and perform data optimization. The power calibration method is a conventional technical means commonly used in the industry, so it is easy to obtain the theoretical ratio of the photocurrent to the power of the soft X-ray. The overall structure is simple, and it is easy to calculate the power of the soft X-ray.

[0040] But when the power of the incident light is less than 10nw, the current is in the pA level, and the picoammeter is no longer accurate in measuring current.

[0041] like Figure 1 As shown, based on the above-mentioned soft X-ray power sampling diagnostic device structure, some further preferred implementation structures also include a photomultiplier tube detector 5, a second connecting piece 6 and a data acquisition card 7. The photomultiplier tube detector 5 is connected in the vacuum chamber 1 and is located below the coated reflector 2. The data acquisition card 7 is conductively connected to the output terminal of the photomultiplier tube detector 5 through the second connecting piece 6.

[0042] The second connecting member 6 includes a third wire 61, a second vacuum electrode flange 62 and a fourth wire 63. The second vacuum electrode flange 62 is connected to the shell of the vacuum chamber 1. The third wire 61 is connected between the second vacuum electrode flange 62 and the photomultiplier tube detector 5. One end of the fourth wire 63 is conductively connected to the input terminal of the data acquisition card 7, and the other end is conductively connected to the output terminal of the photomultiplier tube detector 5 through the electrode on the second vacuum electrode flange 62 and the third wire 61 in sequence.

[0043] The third wire 61 is a wire for vacuum, and the fourth wire 63 is a wire for non-vacuum. The third wire 61 can be a set of wires of the same type as the first wire 31. The fourth wire 63 can be a set of wires of the same type as the second wire 33. The implementation structure can be various, and can refer to the implementation structure of the first wire 31 and the second wire 33.

[0044] The photomultiplier tube detector 5 is arranged in the normal direction of the coated reflector 2. This makes it easier for the photomultiplier tube detector 5 to receive photons, and the receiving range is large.

[0045] The photomultiplier tube detector 5 can be a detector made using a Channeltron single-photon photomultiplier tube, which can block electrons and ions from entering the Channeltron, ensuring that only photons enter the Channeltron.

[0046] After the photons enter the photomultiplier tube detector 5, they are converted and amplified and output as electronic signals. When the soft X-rays are incident on the coated reflector 2, in addition to generating photocurrent on the gold coating of the coated reflector 2, fluorescent photons are also generated. The photons enter the photomultiplier tube detector 5 and are output as electronic signals. The electronic signals pass through the third wire 61, the second vacuum electrode flange 62 and the fourth wire 63 in sequence, enter the data acquisition card 7, and measure the information of the electronic signals. Through power calibration, the power of the soft X-rays can be calculated based on the information of the electronic signals.

[0047] The photomultiplier tube detector 5 is connected to the vacuum chamber 1 via a vacuum linear displacement device 8 .

[0048] Since the aperture size of the photomultiplier tube detector 5 is fixed, if it is too close or too far from the coated reflector 2, the received photons will be reduced. In addition, since the soft X-rays hit the gas molecules, electrons, ions and fluorescent photons will be generated. The electrons and ions will affect the electrical signals, and the fluorescent photons will enter the photomultiplier tube detector 5 and affect the final signal. Therefore, the whole system works in an ultra-high vacuum environment to minimize the impact of gas molecules on signal stability. Therefore, the photomultiplier tube detector 5 is installed on the linear sliding end of the vacuum linear displacement device 8, and the distance between the photomultiplier tube detector 5 and the coated reflector 2 is adjusted by the vacuum linear displacement device 8. After the power calibration is completed, the relative position of the photomultiplier tube detector 5 and the coated reflector 2 should be fixed to ensure that the repeatability of the light intensity measurement is high enough.

[0049] The vacuum linear displacement device 8 includes a guide rod 81, a guide sleeve 82, a bellows 83 and a linear displacement assembly 84. The guide sleeve 82 is connected to the vacuum chamber 1. The linear sliding end of the linear displacement assembly 84 is sealed and connected to the outer side of the guide sleeve 82 through the bellows 83. One end of the guide rod 81 passes through the guide sleeve 82 and is connected to the shell of the photomultiplier tube detector 5, and the other end passes through the bellows 83 and is connected to the linear sliding end of the linear displacement assembly 84.

[0050] Here, the linear displacement component 84 can be an electric linear module or some small lifting platform mechanism.

[0051] The photomultiplier tube detector 5 is mounted on the guide rod 81, and the distance between the photomultiplier tube detector 5 and the coated reflector 2 is adjusted by the linear displacement assembly 84; the bellows 83 ensures that the vacuum degree of the vacuum chamber 1 is maintained at an ultra-high vacuum during the adjustment process. The entire vacuum linear displacement device 8 is simple in principle and easy to manufacture.

[0052] In specific use, the power of the incident soft X-ray can be measured by the added photomultiplier tube detector 5, the second connector 6 and the data acquisition card 7. The power of the incident soft X-ray can also be measured by the coated reflector 2, the first connector 3 and the microammeter 4. When the calibrated power of the incident soft X-ray intensity is greater than 10nw, the measurement of the microammeter 4 can be used as the standard. When the calibrated power of the incident soft X-ray intensity is less than 10nw, the data measured by the data acquisition card 7 shall prevail.

[0053] In addition, since both the coated reflector 2 and the grating can be gold-coated, the same measurement method as the transmitting mirror can be used on the grating. In some systems, when there is a coated grating, the grating can be used for measurement to improve the applicability of the measurement system. I will not go into details here.

[0054] Because increasing the size of the detector will significantly increase the production cost of the detector and make the detector inconvenient to use, conventional detectors are not made very large. The size of the reflector and grating in the soft X-ray transmission system can generally be made large enough to collect more light for subsequent experiments. Therefore, the present invention uses a reflector or a grating as the signal collection end of the soft X-ray power, which can collect more light signals.

[0055] In summary, the present invention adopts the reflector in the soft X-ray system as the signal collection end of the soft X-ray power. Compared with the existing detectors, there is no need to add additional detectors to complete the measurement of samples and the determination of soft X-ray light intensity. The overall structure is simple, does not add too much equipment, and occupies less space.

[0056] When measuring with existing conventional detectors, a part of the soft X-rays needs to be split to hit the detector. No matter which splitting method is used, the soft X-rays hitting the sample will be reduced to a certain extent. The present invention uses the reflector in the soft X-ray system as the signal collection end of the soft X-ray power, which can allow as many soft X-rays as possible to enter the sample cavity. When the intensity of the light source is low, the equipment can also be used normally, thereby improving the utilization rate of the light source and reducing the system's requirements on the light source.

[0057] Conventional detectors have a range, and if the range is exceeded, the detector needs to be replaced. The soft X-ray power sampling diagnostic device of the present invention adopts two soft X-ray power measurement methods, which are respectively applicable to high-power and low-power soft X-rays, and has strong adaptability. It can also be applied to hard X-ray and extreme ultraviolet ray power sampling.

[0058] It should be noted that those skilled in the art can imagine that the vacuum chamber 1 of the present application refers to a shell provided with a vacuum chamber. The terms "first", "second", etc. in the present application are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so as to describe the embodiments of the present application described here. In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc. indicate an orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings.

[0059] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0060] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A soft X-ray power sampling diagnostic device, It is characterized in that The invention comprises a vacuum chamber (1), a coated reflector (2), a first connecting member (3) and a microammeter (4); the vacuum chamber (1) is connected to a soft X-ray incident channel (11) and a soft X-ray reflection channel (12); the coated reflector (2) is connected in the vacuum chamber (1) and is located between the soft X-ray incident channel (11) and the soft X-ray reflection channel (12); the optical path incident direction of the coated reflector (2) corresponds to the soft X-ray incident channel (11); the optical path emission direction of the coated reflector (2) corresponds to the soft X-ray reflection channel (12); and the measuring end of the microammeter (4) is conductively connected to the coating of the coated reflector (2) via the first connecting member (3); It also comprises a photomultiplier tube detector (5), a second connecting member (6) and a data acquisition card (7), wherein the photomultiplier tube detector (5) is connected in the vacuum chamber (1) and is located below the coated reflector (2), and the data acquisition card (7) is conductively connected to the output terminal of the photomultiplier tube detector (5) via the second connecting member (6); The photomultiplier tube detector (5) is connected to the vacuum chamber (1) via a vacuum linear displacement device (8); The vacuum linear displacement device (8) comprises a guide rod (81), a guide sleeve (82), a bellows (83) and a linear displacement assembly (84); the guide sleeve (82) is connected to the vacuum chamber (1); the linear sliding end of the linear displacement assembly (84) is sealedly connected to the outer side surface of the guide sleeve (82) via the bellows (83); one end of the guide rod (81) passes through the guide sleeve (82) and is connected to the housing of the photomultiplier tube detector (5); the other end passes through the bellows (83) and is connected to the linear sliding end of the linear displacement assembly (84).

2. The soft X-ray power sampling diagnostic device according to claim 1, It is characterized in that The first connecting member (3) comprises a first wire (31), a first vacuum electrode flange (32), a second wire (33) and a coating connection end (34); the coating connection end (34) is connected to the coating reflector (2); the first vacuum electrode flange (32) is connected to the vacuum chamber (1); the first wire (31) is connected between the first vacuum electrode flange (32) and the coating connection end (34); one end of the second wire (33) is conductively connected to the microammeter (4); and the other end is conductively connected to the coating of the coating reflector (2) via the electrode on the first vacuum electrode flange (32), the first wire (31) and the coating connection end (34) in sequence.

3. The soft X-ray power sampling diagnostic device according to claim 2, It is characterized in that The first conducting wire (31) is a conducting wire for vacuum, and the second conducting wire (33) is a conducting wire for non-vacuum.

4. The soft X-ray power sampling diagnostic device according to claim 1, It is characterized in that The second connecting member (6) comprises a third wire (61), a second vacuum electrode flange (62) and a fourth wire (63); the second vacuum electrode flange (62) is connected to the shell of the vacuum chamber (1); the third wire (61) is connected between the second vacuum electrode flange (62) and the photomultiplier tube detector (5); one end of the fourth wire (63) is conductively connected to an input terminal of a data acquisition card (7); and the other end is conductively connected to an output terminal of the photomultiplier tube detector (5) via an electrode on the second vacuum electrode flange (62) and the third wire (61) in sequence.

5. The soft X-ray power sampling diagnostic device according to claim 4, It is characterized in that The third wire (61) is a wire for vacuum, and the fourth wire (63) is a wire for non-vacuum.

6. The soft X-ray power sampling diagnostic device according to claim 1, It is characterized in that The photomultiplier tube detector (5) is arranged in the normal direction of the coated reflector (2).

7. The soft X-ray power sampling diagnostic device according to claim 1, It is characterized in that The coating of the coated reflector (2) is a gold film.

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