A in-plane traveling wave type linear feeding device and its working method

Abstract

The present invention discloses an in-plane traveling wave type linear feeding device and its working method. The device includes a base, a first connecting piece, a second connecting piece, a front beam, a rear beam, a middle beam, a first to fourth piezoelectric unit, a first to second pre-tightening bolt, a piezoelectric bimorph, a first to third stopper, and M + N + P adjusting bolts; during operation, a sine signal U1 is applied to the first piezoelectric transducer, and a sine signal U2 is applied to the second piezoelectric transducer. The frequencies and voltages of U1 and U2 are the same and have a phase difference of π / 4. The longitudinal vibration modes of the first piezoelectric transducer and the second piezoelectric transducer are excited, and the longitudinal vibrations with a phase difference of π / 4 are superposed to induce a traveling wave mode of the middle beam; in the traveling wave mode, the vibration form of a single particle on the middle beam is elliptical motion, so that the material placed on the middle beam moves in the direction of the traveling wave propagation under the friction force of the elliptical motion of each particle; adjusting the phase difference between U1 and U2 to -π / 4 can realize the reverse transportation of the material. The structure of the present invention is simple and the transportation stability is high.

Description

Technical Field

[0001] The present invention relates to the fields of piezoelectric feeders, material transportation, and microparticle transportation, and particularly to a in-plane traveling wave type linear feeding device and its working method. Background Art

[0002] Vibratory feeding equipment is a commonly used equipment in automatic packaging. Its function is to form the alignment, sorting, and directional transportation of materials, and it has important application value in the production fields that require automated precision transportation such as the testing and packaging links of modern precision semiconductor devices and the transportation of micro machinery.

[0003] Vibratory material conveying devices can be divided into electromagnetic vibratory material conveying devices and piezoelectric vibratory material conveying devices according to the vibration excitation source. The feeding device using an electromagnet as the driving source has been widely used in production lines. However, this electromagnetic vibratory feeder has disadvantages such as high noise, low energy conversion rate, and being unsuitable for precision material transportation. With the development of piezoelectric technology, new drivers using piezoelectric materials as the driving source have attracted more and more attention from researchers.

[0004] In 1977, researchers from NGK Insulators, Ltd. in Japan first proposed a piezoelectric vibratory feeder using a rectangular piezoelectric ceramic sheet as the driving source. Its working principle is that when the piezoelectric vibrator is excited by an alternating excitation signal, due to the inverse piezoelectric effect, the spring plate generates reciprocating bending deformation under the excitation of the piezoelectric ceramic, inducing the top plate to perform an elliptical motion, thereby transporting materials.

[0005] The common linear piezoelectric feeder on the market at present is based on the above piezoelectric vibratory feeder with a mass added. By increasing the inertia of the mass added, the amplitude of the top plate is increased, thereby improving the conveying effect. When the inertial mass is not added, due to the low piezoelectric coefficient of the patch-type piezoelectric transducer, the amplitude is small. After adding the inertial mass, the amplitude is increased, but the instability of material transportation is also increased. At the same time, due to structural reasons, the above piezoelectric vibratory feeder can only achieve one-way transportation of materials. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to provide a in-plane traveling wave type linear feeding device and its working method for the defects involved in the background art.

[0007] The present invention adopts the following technical solutions to solve the above technical problems:

[0008] A in-plane traveling wave type linear feeding device includes a base, a first connecting piece, a second connecting piece, a front beam, a rear beam, a middle beam, first to fourth piezoelectric units, first to second pre-tightening bolts, a piezoelectric bimorph, first to third stoppers, and M + N + P adjusting bolts, where M, N, and P are natural numbers greater than or equal to 1;

[0009] The middle beam is a cuboid, and blind tapped holes for preloading are provided at the centers of both ends thereof.

[0010] The front beam and the rear beam have the same structure, both are cuboids with the same cross-section as that of the middle beam, and countersunk through holes are provided at the centers of one end face.

[0011] The first to fourth piezoelectric units have the same structure, each containing Q piezoelectric ceramic sheets, where Q is a natural number greater than or equal to 1; the cross-sectional shapes of the piezoelectric ceramic sheets and the middle beam are the same, and through holes are provided at the centers; the Q piezoelectric ceramic sheets are stacked in sequence, polarized along the thickness direction, and the polarization directions of adjacent piezoelectric ceramic sheets are opposite.

[0012] The first connecting piece and the second connecting piece have the same structure, both are rectangular thin sheet structures, are vertically arranged, are fixedly connected to the base at the lower ends, and through holes are provided at the upper ends.

[0013] The first preloading bolt sequentially passes through the countersunk through hole of the front beam, the front beam, the first piezoelectric unit, the through hole on the first connecting piece, the second piezoelectric unit, and then is threadedly connected to the threaded blind hole at one end of the middle beam, clamping the front beam, the first piezoelectric unit, the first connecting piece, the second piezoelectric unit, and the middle beam and making the front beam, the first piezoelectric unit, the second piezoelectric unit, and the middle beam coaxial; the second preloading bolt sequentially passes through the countersunk through hole of the rear beam, the rear beam, the third piezoelectric unit, the through hole on the second connecting piece, the fourth piezoelectric unit, and then is threadedly connected to the threaded blind hole at the other end of the middle beam, clamping the rear beam, the third piezoelectric unit, the second connecting piece, the fourth piezoelectric unit, and the middle beam and making the rear beam, the third piezoelectric unit, the fourth piezoelectric unit, and the middle beam coaxial.

[0014] The polarization direction of the Qth piezoelectric ceramic sheet in the first piezoelectric unit is opposite to the polarization direction of the first piezoelectric ceramic sheet in the second piezoelectric unit, and the polarization direction of the Qth piezoelectric ceramic sheet in the third piezoelectric unit is opposite to the polarization direction of the first piezoelectric ceramic sheet in the fourth piezoelectric unit.

[0015] The adjusting bolt includes a nut and a stud.

[0016] The upper surfaces of the first stopper, the second stopper, and the third stopper are respectively provided with M, N, and P adjusting grooves. The adjusting grooves are all strip-shaped grooves perpendicular to the middle beam, and the adjusting grooves are all provided with strip-shaped through grooves perpendicular to the middle beam. The width of the adjusting groove is greater than the diameter of the nut of the adjusting bolt, and the width of the strip-shaped through groove is less than the diameter of the nut of the adjusting bolt and greater than the diameter of the stud of the adjusting bolt.

[0017] The upper surface of the middle beam is provided with M + N + P positioning threaded blind holes corresponding one by one to the M adjusting grooves on the first stopper, the N adjusting grooves on the second stopper, and the P adjusting grooves on the third stopper.

[0018] The M+N+P adjusting bolts respectively pass through the M+N+P adjusting grooves and are threadedly connected to the M+N+P positioning threaded blind holes one by one, fixing the first stopper, the second stopper, and the third stopper on the middle beam, so that a feeding groove is formed between the first stopper and the second stopper, a discharging groove is formed between the first stopper and the third stopper, and a retracting groove is formed between the second stopper and the third stopper; the included angle between the retracting groove and the discharging groove is an acute angle;

[0019] One end of the piezoelectric bimorph is fixedly connected to the third stopper, and the other end abuts against the second stopper, which is used to block the feeding groove and the retracting groove in the non-driving state so that the feeding groove and the discharging groove are connected, and block the feeding groove and the discharging groove in the driving state so that the feeding groove and the retracting groove are connected.

[0020] As a further optimized scheme of the in-plane traveling wave type linear feeding device of the present invention, Q is taken as 2.

[0021] The present invention also discloses a working method of the in-plane traveling wave type linear feeding device, including the following steps:

[0022] The front beam, the first piezoelectric unit, the first connecting piece, the second piezoelectric unit, the middle beam, and the first pre-tightening bolt form a first piezoelectric transducer, and the rear beam, the third piezoelectric unit, the second connecting piece, the fourth piezoelectric unit, the middle beam, and the second pre-tightening bolt form a second piezoelectric transducer;

[0023] If it is necessary to transport the material from the first piezoelectric transducer to the second piezoelectric transducer, a sine signal U1 is applied to the first piezoelectric transducer, and a sine signal U2 is applied to the second piezoelectric transducer. The frequencies and voltages of U1 and U2 are the same and have a phase difference of π / 4, exciting the longitudinal vibration modes of the first piezoelectric transducer and the second piezoelectric transducer. The longitudinal vibrations with a phase difference of π / 4 are superimposed to induce the traveling wave mode of the middle beam; in the traveling wave mode, the vibration form of a single particle on the middle beam is elliptical motion, so that the material placed on the middle beam moves in the direction of the traveling wave propagation under the driving of the friction force of each particle's elliptical motion;

[0024] If it is necessary to transport the material in the reverse direction, just adjust the phase difference between U1 and U2 to -π / 4;

[0025] If it is necessary to block the feeding groove and the retracting groove and connect the feeding groove and the discharging groove, just do not drive the piezoelectric bimorph;

[0026] If it is necessary to block the feeding groove and the discharging groove and connect the feeding groove and the retracting groove, input a preset DC signal to the piezoelectric bimorph to make the piezoelectric bimorph bend.

[0027] The present invention also discloses a third in-plane traveling wave type linear feeding device, which includes a base, a first connecting piece, a second connecting piece, a front beam, a rear beam, a middle beam, first to fourth piezoelectric ceramic sheets, first to second pre-tightening bolts, piezoelectric bimorphs, first to third stoppers, and M + N + P adjusting bolts, where M, N, and P are all natural numbers greater than or equal to 1;

[0028] The middle beam is a cuboid, and blind threaded holes for pre-tightening are provided at the centers of both ends thereof;

[0029] The front beam and the rear beam have the same structure, and are both cuboids with the same cross-section as that of the middle beam, and countersunk through holes are provided at the centers of one end faces;

[0030] The first connecting piece and the second connecting piece have the same structure, and are both rectangular thin sheet structures, are both vertically arranged, are fixedly connected to the base at the lower ends, and through holes are provided at the upper ends;

[0031] The first pre-tightening bolt sequentially passes through the countersunk through hole of the front beam, the through hole on the first connecting piece, and then is threadedly connected to the threaded blind hole at one end of the middle beam, clamping the front beam, the first connecting piece, and the middle beam and making the front beam and the middle beam coaxial; the second pre-tightening bolt sequentially passes through the countersunk through hole of the rear beam, the through hole on the second connecting piece, and then is threadedly connected to the threaded blind hole at the other end of the middle beam, clamping the rear beam, the second connecting piece, and the middle beam and making the rear beam and the middle beam coaxial;

[0032] The first to fourth piezoelectric ceramic sheets have the same structure and are polarized along the thickness direction. Among them, the first and second piezoelectric ceramic sheets are symmetrically pasted on both sides of the front beam, the third and fourth piezoelectric ceramic sheets are symmetrically pasted on both sides of the rear beam, and the first and third piezoelectric ceramic sheets are on the same side;

[0033] The polarization directions of the first and second piezoelectric ceramic sheets are both inward or both outward, and the polarization directions of the third and fourth piezoelectric ceramic sheets are both inward or both outward;

[0034] The adjusting bolt includes a nut and a stud;

[0035] M adjusting grooves, N adjusting grooves, and P adjusting grooves are respectively provided on the upper surfaces of the first stopper, the second stopper, and the third stopper. The adjusting grooves are all strip-shaped grooves perpendicular to the middle beam, and the adjusting grooves are all provided with strip-shaped through grooves perpendicular to the middle beam. The width of the adjusting groove is greater than the diameter of the nut of the adjusting bolt, and the width of the strip-shaped through groove is less than the diameter of the nut of the adjusting bolt and greater than the diameter of the stud of the adjusting bolt;

[0036] M + N + P positioning threaded blind holes corresponding to the M adjusting grooves on the first stopper, the N adjusting grooves on the second stopper, and the P adjusting grooves on the third stopper are provided on the upper surface of the middle beam;

[0037] The M+N+P adjusting bolts respectively pass through the M+N+P adjusting grooves and are threadedly connected to the M+N+P positioning threaded blind holes one by one, fixing the first baffle, the second baffle and the third baffle on the middle beam, so that a feeding groove is formed between the first baffle and the second baffle, a discharging groove is formed between the first baffle and the third baffle, and a retracting groove is formed between the second baffle and the third baffle; the included angle between the retracting groove and the discharging groove is an acute angle;

[0038] One end of the piezoelectric bimorph is fixedly connected to the third baffle, and the other end abuts against the second baffle, which is used to isolate the feeding groove and the retracting groove in the non-driven state so that the feeding groove and the discharging groove are communicated, and to isolate the feeding groove and the discharging groove in the driven state so that the feeding groove and the retracting groove are communicated.

[0039] The present invention also discloses a working method of the second in-plane traveling wave type linear feeding device, including the following steps:

[0040] The front beam, the first connecting piece, the middle beam, the first pre-tightening bolt, the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet form a first piezoelectric transducer, and the rear beam, the second connecting piece, the middle beam, the second pre-tightening bolt, the third piezoelectric ceramic sheet and the fourth piezoelectric ceramic sheet form a second piezoelectric transducer;

[0041] If it is necessary to transport the material from the first piezoelectric transducer to the second piezoelectric transducer, a sine signal U1 is applied to the first piezoelectric transducer, and a sine signal U2 is applied to the second piezoelectric transducer. The frequencies and voltages of U1 and U2 are the same and have a phase difference of π / 4, exciting the longitudinal vibration modes of the first piezoelectric transducer and the second piezoelectric transducer. The superposition of the two longitudinal vibrations with a phase difference of π / 4 induces the traveling wave mode of the middle beam; in the traveling wave mode, the vibration form of a single particle on the middle beam is an elliptical motion, so that the material placed on the middle beam moves in the direction of the traveling wave propagation under the friction drive of the elliptical motion of each particle;

[0042] If it is necessary to transport the material in the reverse direction, just adjust the phase difference of U1 and U2 to -π / 4;

[0043] If it is necessary to isolate the feeding groove and the retracting groove and communicate the feeding groove and the discharging groove, just do not drive the piezoelectric bimorph;

[0044] If it is necessary to isolate the feeding groove and the discharging groove and communicate the feeding groove and the retracting groove, input a preset DC signal to the piezoelectric bimorph to make the piezoelectric bimorph bend.

[0045] The present invention also discloses a third in-plane traveling wave type linear feeding device, including a base, a first connecting piece, a second connecting piece, a front beam, a damping block, a middle beam, a first to second piezoelectric units, a first to second pre-tightening bolts, a piezoelectric bimorph, a first to third baffles, and M+N+P adjusting bolts, where M, N, and P are all natural numbers greater than or equal to 1;

[0046] The central beam is a cuboid, and blind pre-tightening threaded holes are provided at the centers of both ends thereof.

[0047] The front beam is a cuboid with the same cross-section as that of the central beam, and a countersunk through-hole is provided at the center of one end face; the damping block is made of a damping material, and a countersunk through-hole is provided thereon.

[0048] The first to second piezoelectric units have the same structure and each includes Q piezoelectric ceramic sheets, where Q is a natural number greater than or equal to 1; the cross-sectional shape of the piezoelectric ceramic sheet is the same as that of the central beam, and a through-hole is provided at the center; the Q piezoelectric ceramic sheets are stacked in sequence, polarized along the thickness direction, and the polarization directions of adjacent piezoelectric ceramic sheets are opposite.

[0049] The first connecting piece and the second connecting piece have the same structure, both are rectangular thin sheet structures, are vertically arranged, are fixedly connected to the base at the lower ends, and through-holes are provided at the upper ends.

[0050] The first pre-tightening bolt sequentially passes through the countersunk through-hole of the front beam, the front beam, the through-hole on the first piezoelectric unit, the through-hole on the first connecting piece, and the second piezoelectric unit, and then is threadedly connected to the threaded blind hole at one end of the central beam, clamping the front beam, the first piezoelectric unit, the first connecting piece, the second piezoelectric unit, and the central beam and making the front beam, the first piezoelectric unit, the second piezoelectric unit, and the central beam coaxial; the second pre-tightening bolt sequentially passes through the countersunk through-hole of the damping block, the through-hole on the second connecting piece, and then is threadedly connected to the threaded blind hole at the other end of the central beam, clamping the damping block, the second connecting piece, and the central beam.

[0051] The polarization direction of the Qth piezoelectric ceramic sheet in the first piezoelectric unit is opposite to the polarization direction of the first piezoelectric ceramic sheet in the second piezoelectric unit.

[0052] The adjusting bolt includes a nut and a stud.

[0053] The upper surfaces of the first stop member, the second stop member, and the third stop member are respectively provided with M, N, and P adjusting grooves. The adjusting grooves are all strip-shaped grooves perpendicular to the central beam, and the adjusting grooves are all provided with strip-shaped through-channels perpendicular to the central beam. The width of the adjusting groove is greater than the diameter of the nut of the adjusting bolt, and the width of the strip-shaped through-channel is less than the diameter of the nut of the adjusting bolt and greater than the diameter of the stud of the adjusting bolt.

[0054] M + N + P positioning threaded blind holes corresponding to the M adjusting grooves on the first stop member, the N adjusting grooves on the second stop member, and the P adjusting grooves on the third stop member are provided on the upper surface of the central beam.

[0055] The M+N+P adjusting bolts respectively pass through the M+N+P adjusting grooves and are threadedly connected to the M+N+P positioning threaded blind holes one by one, fixing the first stopper, the second stopper, and the third stopper on the middle beam, so that a feeding groove is formed between the first stopper and the second stopper, a discharging groove is formed between the first stopper and the third stopper, and a retracting groove is formed between the second stopper and the third stopper; the included angle between the retracting groove and the discharging groove is an acute angle; the feeding groove is located between the front beam and the discharging groove;

[0056] One end of the piezoelectric bimorph is fixedly connected to the third stopper, and the other end abuts against the second stopper, which is used to isolate the feeding groove and the retracting groove in the non-driving state so that the feeding groove and the discharging groove are connected, and isolate the feeding groove and the discharging groove in the driving state so that the feeding groove and the retracting groove are connected.

[0057] The present invention also discloses a working method of the third in-plane traveling wave type linear feeding device, including the following steps:

[0058] The front beam, the first connecting piece, the middle beam, the first pre-tightening screw, the first piezoelectric unit, and the second piezoelectric unit form a piezoelectric transducer; if it is necessary to transport materials from the feeding groove to the discharging groove or the retracting groove, a sine signal with a preset frequency is applied to the piezoelectric transducer to excite the longitudinal vibration mode of the piezoelectric transducer. The vibration propagates from the piezoelectric transducer to the damping material and is absorbed by the damping material, inducing the traveling wave mode of the middle beam; in the traveling wave mode, the vibration form of a single particle on the middle beam is an elliptical motion, so that the materials placed on the middle beam move in the direction of the traveling wave propagation under the driving of the friction force of each particle's elliptical motion;

[0059] If it is necessary to isolate the feeding groove and the retracting groove and connect the feeding groove and the discharging groove, it is only necessary not to drive the piezoelectric bimorph;

[0060] If it is necessary to isolate the feeding groove and the discharging groove and connect the feeding groove and the retracting groove, a preset DC signal is input to the piezoelectric bimorph to make the piezoelectric bimorph bend.

[0061] Compared with the prior art, the present invention adopts the above technical solutions and has the following technical effects:

[0062] 1. The in-plane traveling wave mode of the middle beam is excited by a piezoelectric transducer to drive the material transportation, which has the advantages of simple structure, easy control, and low cost;

[0063] 2. Adopting the in-plane traveling wave mode drive, compared with the out-of-plane vibration mode and the inertial drive mode, more stable material transportation can be achieved;

[0064] 3. By changing the phase difference of the two-phase excitation signals, the propagation direction of the traveling wave mode can be changed, so as to realize the reverse propagation of materials. Compared with the linear feeding device that realizes bidirectional movement by arranging multiple columns, the structure is simplified. Brief Description of the Drawings

[0065] Figure 1 is a schematic structural view of the first in-plane traveling-wave type linear feeding device in the present invention;

[0066] Figure 2 is a schematic diagram showing the polarization directions of the first piezoelectric unit and the second piezoelectric unit in the present invention;

[0067] Figure 3 is a schematic simulation view of the traveling-wave mode of the first in-plane traveling-wave type linear feeding device in the present invention;

[0068] Figure 4 is a schematic comparison view of the states of the piezoelectric bimorph of the first in-plane traveling-wave type linear feeding device in the present invention when it is not driven and when it is driven;

[0069] Figure 5 is a schematic structural view of the second in-plane traveling-wave type linear feeding device in the present invention;

[0070] Figure 6 is a schematic structural view of the third in-plane traveling-wave type linear feeding device in the present invention.

[0071] In the figures, 1 - base, 2 - first connecting piece, 3 - second connecting piece, 4 - pre-tightening bolt, 5 - front beam, 6 - rear beam, 7 - first piezoelectric unit, 8 - second piezoelectric unit, 9 - third piezoelectric unit, 10 - fourth piezoelectric unit, 11 - middle beam, 12 - first stop piece, 13 - second stop piece, 14 - third stop piece, 15 - adjusting bolt, 16 - piezoelectric bimorph. Detailed Description of the Invention

[0072] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings:

[0073] The present invention can be implemented in many different forms and should not be construed as limited to the embodiments described herein. On the contrary, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art. In the drawings, components are enlarged for clarity.

[0074] It should be understood that although the terms first, second, third, etc. may be used herein to describe various elements, components, and / or parts, these elements, components, and / or parts are not limited by these terms. These terms are only used to distinguish one element, component, and / or part from another. Thus, the first element, component, and / or part discussed below may become the second element, component, or part without departing from the teachings of the present invention.

[0075] In order to improve the conveying efficiency of a piezoelectric vibratory feeder, simplify the device structure, enhance the transportation stability, and achieve bidirectional transportation of materials, the present invention proposes a in-plane traveling wave type linear feeding device and its working method. This device is driven by an in-plane traveling wave mode. Compared with the out-of-plane vibration mode and the inertial driving method, it reduces the vibration in the vertical direction and improves the transportation stability. At the same time, by changing the phase difference, the propagation direction of the traveling wave can be changed, thereby realizing the reverse transportation of materials.

[0076] As Figure 1 shown, the present invention discloses an in-plane traveling wave type linear feeding device, which includes a base, a first connecting piece, a second connecting piece, a front beam, a rear beam, a middle beam, a first to fourth piezoelectric units, a first to second pre-tightening bolts, a piezoelectric bimorph, a first to third stoppers, and M + N + P adjusting bolts, where M, N, and P are natural numbers greater than or equal to 1;

[0077] The middle beam is a cuboid, and blind threaded holes for pre-tightening are provided at the centers of both ends;

[0078] The front beam and the rear beam have the same structure, both are cuboids with the same cross-section as the middle beam, and counterbored through holes are provided at the centers of one end face;

[0079] The first to fourth piezoelectric units have the same structure, each includes Q piezoelectric ceramic sheets, where Q is a natural number greater than or equal to 1; the cross-section shapes of the piezoelectric ceramic sheets and the middle beam are the same, and through holes are provided at the centers; the Q piezoelectric ceramic sheets are stacked in sequence, polarized along the thickness direction, and the polarization directions of adjacent piezoelectric ceramic sheets are opposite;

[0080] The first connecting piece and the second connecting piece have the same structure, both are rectangular thin sheet structures, are vertically arranged, and are fixedly connected to the base at the lower ends, and through holes are provided at the upper ends;

[0081] The first pre-tightening bolt passes through the counterbored through hole of the front beam, the front beam, the first piezoelectric unit, the through hole on the first connecting piece, the second piezoelectric unit in sequence, and is threadedly connected to the threaded blind hole at one end of the middle beam, clamping the front beam, the first piezoelectric unit, the first connecting piece, the second piezoelectric unit, and the middle beam and making the front beam, the first piezoelectric unit, the second piezoelectric unit, and the middle beam coaxial; the second pre-tightening bolt passes through the counterbored through hole of the rear beam, the rear beam, the third piezoelectric unit, the through hole on the second connecting piece, the fourth piezoelectric unit in sequence, and is threadedly connected to the threaded blind hole at the other end of the middle beam, clamping the rear beam, the third piezoelectric unit, the second connecting piece, the fourth piezoelectric unit, and the middle beam and making the rear beam, the third piezoelectric unit, the fourth piezoelectric unit, and the middle beam coaxial;

[0082] As Figure 2As shown, the polarization direction of the Qth piezoelectric ceramic sheet in the first piezoelectric unit is opposite to that of the first piezoelectric ceramic sheet in the second piezoelectric unit, and the polarization direction of the Qth piezoelectric ceramic sheet in the third piezoelectric unit is opposite to that of the first piezoelectric ceramic sheet in the fourth piezoelectric unit;

[0083] The adjusting bolt includes a nut and a stud;

[0084] The upper surfaces of the first stopper, the second stopper, and the third stopper are respectively provided with M, N, and P adjusting grooves. The adjusting grooves are all strip-shaped grooves perpendicular to the middle beam, and the adjusting grooves are all provided with strip-shaped through grooves perpendicular to the middle beam. The width of the adjusting groove is greater than the diameter of the nut of the adjusting bolt, and the width of the strip-shaped through groove is less than the diameter of the nut of the adjusting bolt and greater than the diameter of the stud of the adjusting bolt;

[0085] The upper surface of the middle beam is provided with M + N + P positioning threaded blind holes corresponding one by one to the M adjusting grooves on the first stopper, the N adjusting grooves on the second stopper, and the P adjusting grooves on the third stopper;

[0086] The M + N + P adjusting bolts respectively pass through the M + N + P adjusting grooves and are threadedly connected to the M + N + P positioning threaded blind holes one by one, fixing the first stopper, the second stopper, and the third stopper on the middle beam, so that a feeding groove is formed between the first stopper and the second stopper, a discharging groove is formed between the first stopper and the third stopper, and a retracting groove is formed between the second stopper and the third stopper; the included angle between the retracting groove and the discharging groove is an acute angle;

[0087] One end of the piezoelectric bimorph is fixedly connected to the third stopper, and the other end abuts against the second stopper, for isolating the feeding groove and the retracting groove in the non-driving state to connect the feeding groove and the discharging groove, and isolating the feeding groove and the discharging groove in the driving state to connect the feeding groove and the retracting groove.

[0088] As a further optimized solution of the in-plane traveling wave type linear feeding device of the present invention, Q is taken as 2.

[0089] The present invention also discloses a working method of the in-plane traveling wave type linear feeding device, including the following steps:

[0090] The front beam, the first piezoelectric unit, the first connecting piece, the second piezoelectric unit, the middle beam, and the first pre-tightening bolt form a first piezoelectric transducer, and the rear beam, the third piezoelectric unit, the second connecting piece, the fourth piezoelectric unit, the middle beam, and the second pre-tightening bolt form a second piezoelectric transducer;

[0091] If it is necessary to transport materials from the first piezoelectric transducer to the second piezoelectric transducer, a sinusoidal signal U1 is applied to the first piezoelectric transducer, and a sinusoidal signal U2 is applied to the second piezoelectric transducer. U1 and U2 have the same frequency and voltage and a phase difference of π / 4. The longitudinal vibration modes of the first piezoelectric transducer and the second piezoelectric transducer are excited. The superposition of two longitudinal vibrations with a phase difference of π / 4 induces a traveling wave mode of the middle beam. In the traveling wave mode, the vibration form of a single particle on the middle beam is an elliptical motion, causing the materials placed on the middle beam to move in the direction of the traveling wave propagation under the frictional force of the elliptical motion of each particle, as Figure 3 shown;

[0092] If it is necessary to transport materials in the reverse direction, just adjust the phase difference between U1 and U2 to -π / 4;

[0093] If it is necessary to isolate the feeding trough and the retracting trough and connect the feeding trough and the discharging trough, just do not drive the piezoelectric bimorph;

[0094] If it is necessary to isolate the feeding trough and the discharging trough and connect the feeding trough and the retracting trough, input a preset DC signal to the piezoelectric bimorph to make the piezoelectric bimorph bend, as Figure 4 shown.

[0095] As Figure 5 shown, the present invention also discloses a third in-plane traveling wave type linear feeding device, which includes a base, a first connecting piece, a second connecting piece, a front beam, a rear beam, a middle beam, first to fourth piezoelectric ceramic sheets, first to second pre-tightening bolts, a piezoelectric bimorph, first to third stoppers, and M + N + P adjusting bolts, where M, N, and P are all natural numbers greater than or equal to 1;

[0096] The middle beam is a cuboid, and pre-tightening threaded blind holes are provided at the centers of both ends;

[0097] The front beam and the rear beam have the same structure, both are cuboids with the same cross-section as the middle beam, and counterbore through holes are provided at the centers of one end face;

[0098] The first connecting piece and the second connecting piece have the same structure, both are rectangular thin sheet structures, are vertically arranged, and are fixedly connected to the base at the lower end, and through holes are provided at the upper end;

[0099] The first pre-tightening bolt passes through the counterbore through hole of the front beam, the through hole on the first connecting piece in sequence, and then is threadedly connected to the threaded blind hole at one end of the middle beam, clamping the front beam, the first connecting piece and the middle beam and making the front beam and the middle beam coaxial; the second pre-tightening bolt passes through the counterbore through hole of the rear beam, the through hole on the second connecting piece in sequence, and then is threadedly connected to the threaded blind hole at the other end of the middle beam, clamping the rear beam, the second connecting piece and the middle beam and making the rear beam and the middle beam coaxial;

[0100] The first to fourth piezoelectric ceramic sheets have the same structure and are polarized along the thickness direction. Among them, the first and second piezoelectric ceramic sheets are symmetrically pasted on both sides of the front beam, the third and fourth piezoelectric ceramic sheets are symmetrically pasted on both sides of the rear beam, and the first and third piezoelectric ceramic sheets are on the same side;

[0101] The polarization directions of the first and second piezoelectric ceramic sheets are both inward or both outward, and the polarization directions of the third and fourth piezoelectric ceramic sheets are both inward or both outward;

[0102] The adjusting bolt includes a nut and a stud;

[0103] The upper surfaces of the first stop, the second stop, and the third stop are respectively provided with M, N, and P adjusting grooves. The adjusting grooves are all strip-shaped grooves perpendicular to the middle beam, and the adjusting grooves are all provided with strip-shaped through grooves perpendicular to the middle beam. The width of the adjusting groove is greater than the diameter of the nut of the adjusting bolt, and the width of the strip-shaped through groove is less than the diameter of the nut of the adjusting bolt and greater than the diameter of the stud of the adjusting bolt;

[0104] The upper surface of the middle beam is provided with M + N + P positioning threaded blind holes corresponding one by one to the M adjusting grooves on the first stop, the N adjusting grooves on the second stop, and the P adjusting grooves on the third stop;

[0105] The M + N + P adjusting bolts pass through the M + N + P adjusting grooves one by one and are threadedly connected to the M + N + P positioning threaded blind holes one by one, fixing the first stop, the second stop, and the third stop on the middle beam, so that a feeding groove is formed between the first stop and the second stop, a discharging groove is formed between the first stop and the third stop, and a retracting groove is formed between the second stop and the third stop; the included angle between the retracting groove and the discharging groove is an acute angle;

[0106] One end of the piezoelectric bimorph is fixedly connected to the third stop, and the other end abuts against the second stop, which is used to block the feeding groove and the retracting groove in the non-driving state so that the feeding groove and the discharging groove are connected, and to block the feeding groove and the discharging groove in the driving state so that the feeding groove and the retracting groove are connected.

[0107] The present invention also discloses a working method of the second in-plane traveling wave type linear feeding device, including the following steps:

[0108] The front beam, the first connecting piece, the middle beam, the first pre-tightening screw, the first piezoelectric ceramic sheet, and the second piezoelectric ceramic sheet bolt form a first piezoelectric transducer, and the rear beam, the second connecting piece, the middle beam, the second pre-tightening bolt, the third piezoelectric ceramic sheet, and the fourth piezoelectric ceramic sheet form a second piezoelectric transducer;

[0109] If it is necessary to transport the material from the first piezoelectric transducer to the second piezoelectric transducer, a sinusoidal signal U1 is applied to the first piezoelectric transducer, and a sinusoidal signal U2 is applied to the second piezoelectric transducer. U1 and U2 have the same frequency and voltage and a phase difference of π / 4. The longitudinal vibration modes of the first piezoelectric transducer and the second piezoelectric transducer are excited. The superposition of the two longitudinal vibrations with a phase difference of π / 4 induces a traveling wave mode of the middle beam. In the traveling wave mode, the vibration form of a single particle on the middle beam is elliptical motion, causing the material placed on the middle beam to move in the direction of the traveling wave propagation under the frictional force of the elliptical motion of each particle.

[0110] If it is necessary to transport the material in the reverse direction, just adjust the phase difference between U1 and U2 to -π / 4.

[0111] If it is necessary to isolate the feeding trough and the retracting trough and connect the feeding trough and the discharging trough, just do not drive the piezoelectric bimorph.

[0112] If it is necessary to isolate the feeding trough and the discharging trough and connect the feeding trough and the retracting trough, input a preset DC signal to the piezoelectric bimorph to make the piezoelectric bimorph bend.

[0113] As Figure 6 shown, the present invention also discloses a third in-plane traveling wave type linear feeding device, which includes a base, a first connecting piece, a second connecting piece, a front beam, a damping block, a middle beam, first to second piezoelectric units, first to second pre-tightening bolts, a piezoelectric bimorph, first to third stoppers, and M + N + P adjusting bolts, where M, N, and P are all natural numbers greater than or equal to 1.

[0114] The middle beam is a cuboid, and blind pre-tightening threaded holes are provided at the centers of both ends.

[0115] The front beam is a cuboid with the same cross-section as the middle beam, and a countersunk through hole is provided at the center of one end face; the damping block is made of damping material and is provided with a countersunk through hole.

[0116] The first to second piezoelectric units have the same structure and each includes Q piezoelectric ceramic sheets, where Q is a natural number greater than or equal to 1; the piezoelectric ceramic sheets have the same cross-sectional shape as the middle beam and a through hole is provided at the center; the Q piezoelectric ceramic sheets are stacked in sequence, polarized along the thickness direction, and the polarization directions of adjacent piezoelectric ceramic sheets are opposite.

[0117] The first connecting piece and the second connecting piece have the same structure, both are rectangular thin sheet structures, are vertically arranged, are fixedly connected to the base at the lower end, and are provided with through holes at the upper end.

[0118] The first pre-tightening bolt sequentially passes through the countersunk through-hole of the front beam, the front beam, the first piezoelectric unit, the through-hole on the first connecting piece, the second piezoelectric unit, and then is threadedly connected to the threaded blind hole at one end of the middle beam, clamping the front beam, the first piezoelectric unit, the first connecting piece, the second piezoelectric unit, and the middle beam and making the front beam, the first piezoelectric unit, the second piezoelectric unit, and the middle beam coaxial; the second pre-tightening bolt sequentially passes through the countersunk through-hole of the damping block, the damping block, the through-hole on the second connecting piece, and then is threadedly connected to the threaded blind hole at the other end of the middle beam, clamping the damping block, the second connecting piece, and the middle beam;

[0119] The polarization direction of the Qth piezoelectric ceramic sheet in the first piezoelectric unit is opposite to the polarization direction of the first piezoelectric ceramic sheet in the second piezoelectric unit;

[0120] The adjusting bolt includes a nut and a stud;

[0121] The upper surfaces of the first stopper, the second stopper, and the third stopper are respectively provided with M, N, and P adjusting grooves. The adjusting grooves are all strip-shaped grooves perpendicular to the middle beam, and the adjusting grooves are all provided with strip-shaped through grooves perpendicular to the middle beam. The width of the adjusting groove is greater than the diameter of the nut of the adjusting bolt, and the width of the strip-shaped through groove is less than the diameter of the nut of the adjusting bolt and greater than the diameter of the stud of the adjusting bolt;

[0122] The upper surface of the middle beam is provided with M + N + P positioning threaded blind holes corresponding one by one to the M adjusting grooves on the first stopper, the N adjusting grooves on the second stopper, and the P adjusting grooves on the third stopper;

[0123] The M + N + P adjusting bolts respectively pass through the M + N + P adjusting grooves and are threadedly connected to the M + N + P positioning threaded blind holes one by one, fixing the first stopper, the second stopper, and the third stopper on the middle beam, so that a feeding groove is formed between the first stopper and the second stopper, a discharging groove is formed between the first stopper and the third stopper, and a retracting groove is formed between the second stopper and the third stopper; the included angle between the retracting groove and the discharging groove is an acute angle; the feeding groove is located between the front beam and the discharging groove;

[0124] One end of the piezoelectric bimorph is fixedly connected to the third stopper, and the other end abuts against the second stopper, and is used for isolating the feeding groove and the retracting groove to connect the feeding groove and the discharging groove in the non-driving state, and isolating the feeding groove and the discharging groove to connect the feeding groove and the retracting groove in the driving state.

[0125] The present invention also discloses a working method of the third in-plane traveling wave type linear feeding device, including the following steps:

[0126] The front beam, the first connecting piece, the middle beam, the first pre-tightening screw, the first piezoelectric unit, and the second piezoelectric unit form a piezoelectric transducer; if it is necessary to transport materials from the feeding trough to the discharging trough or the retracting trough, a sine signal with a preset frequency is applied to the piezoelectric transducer to excite the longitudinal vibration mode of the piezoelectric transducer. The vibration propagates from the piezoelectric transducer to the damping material and is absorbed by the damping material, inducing the traveling wave mode of the middle beam; in the traveling wave mode, the vibration form of a single particle on the middle beam is an elliptical motion, so that the materials placed on the middle beam move in the direction of the traveling wave propagation under the driving of the frictional force of each particle's elliptical motion.

[0127] If it is necessary to isolate the feeding trough and the retracting trough and connect the feeding trough and the discharging trough, it is not necessary to drive the piezoelectric bimorph.

[0128] If it is necessary to isolate the feeding trough and the discharging trough and connect the feeding trough and the retracting trough, a preset DC signal is input to the piezoelectric bimorph to bend the piezoelectric bimorph.

[0129] Those skilled in the art of this technology can understand that, unless otherwise defined, all terms (including technical terms and scientific terms) used here have the same meaning as the general understanding of those of ordinary skill in the art to which the present invention belongs. It should also be understood that terms defined in general dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless defined as here.

[0130] The specific embodiments described above further elaborate on the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above are only specific embodiments of the present invention and are not used to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A in-plane traveling wave type linear feeding device, characterized in that, it includes a base, a first connecting piece, a second connecting piece, a front beam, a rear beam, a middle beam, first to fourth piezoelectric units, first to second pre-tightening bolts, piezoelectric bimorphs, first to third stoppers, and M + N + P adjusting bolts, where M, N, and P are all natural numbers greater than or equal to 1; the middle beam is a cuboid, and blind pre-tightening threaded holes are provided at the centers of both ends; the front beam and the rear beam have the same structure, both are cuboids with the same cross-section as the middle beam, and countersunk through holes are provided at the centers of one end face; the first to fourth piezoelectric units have the same structure, each includes Q piezoelectric ceramic sheets, where Q is a natural number greater than or equal to 1; the cross-section shape of the piezoelectric ceramic sheets is the same as that of the middle beam, and through holes are provided at the centers; the Q piezoelectric ceramic sheets are stacked in sequence, polarized along the thickness direction, and the polarization directions of adjacent piezoelectric ceramic sheets are opposite; the first connecting piece and the second connecting piece have the same structure, both are rectangular thin sheet structures, are vertically arranged, are fixedly connected to the base at the lower ends, and through holes are provided at the upper ends; the first pre-tightening bolt passes through the countersunk through hole of the front beam, then passes through the front beam, the first piezoelectric unit, the through hole on the first connecting piece, the second piezoelectric unit, and is threadedly connected to the threaded blind hole at one end of the middle beam, clamping the front beam, the first piezoelectric unit, the first connecting piece, the second piezoelectric unit, and the middle beam and making the front beam, the first piezoelectric unit, the second piezoelectric unit, and the middle beam coaxial; the second pre-tightening bolt passes through the countersunk through hole of the rear beam, then passes through the rear beam, the third piezoelectric unit, the through hole on the second connecting piece, the fourth piezoelectric unit, and is threadedly connected to the threaded blind hole at the other end of the middle beam, clamping the rear beam, the third piezoelectric unit, the second connecting piece, the fourth piezoelectric unit, and the middle beam and making the rear beam, the third piezoelectric unit, the fourth piezoelectric unit, and the middle beam coaxial; the polarization direction of the Qth piezoelectric ceramic sheet in the first piezoelectric unit is opposite to the polarization direction of the first piezoelectric ceramic sheet in the second piezoelectric unit, and the polarization direction of the Qth piezoelectric ceramic sheet in the third piezoelectric unit is opposite to the polarization direction of the first piezoelectric ceramic sheet in the fourth piezoelectric unit; the adjusting bolt includes a nut and a stud; M, N, and P adjusting grooves are respectively provided on the upper surfaces of the first stopper, the second stopper, and the third stopper. The adjusting grooves are all strip-shaped grooves perpendicular to the middle beam, and strip-shaped through grooves perpendicular to the middle beam are provided in the adjusting grooves. The width of the adjusting grooves is greater than the diameter of the nut of the adjusting bolt, and the width of the strip-shaped through groove is less than the diameter of the nut of the adjusting bolt and greater than the diameter of the stud of the adjusting bolt; M + N + P positioning threaded blind holes corresponding to the M adjusting grooves on the first stopper, the N adjusting grooves on the second stopper, and the P adjusting grooves on the third stopper are provided on the upper surface of the middle beam; The M + N + P adjusting bolts respectively pass through the M + N + P adjusting grooves and are threadedly connected to the M + N + P positioning threaded blind holes one by one, fixing the first stop member, the second stop member, and the third stop member on the middle beam, so that a feeding groove is formed between the first stop member and the second stop member, a discharging groove is formed between the first stop member and the third stop member, and a retracting groove is formed between the second stop member and the third stop member; the included angle between the retracting groove and the discharging groove is an acute angle; One end of the piezoelectric bimorph is fixedly connected to the third stop member, and the other end abuts against the second stop member, which is used to isolate the feeding groove and the retracting groove in the non - driving state so that the feeding groove and the discharging groove are connected, and to isolate the feeding groove and the discharging groove in the driving state so that the feeding groove and the retracting groove are connected.

2. The in - plane traveling - wave type linear feeding device according to claim 1, characterized in that, Q is taken as 2.

3. The working method of the in - plane traveling - wave type linear feeding device according to claim 1, characterized in that, comprises the following steps: The front beam, the first piezoelectric unit, the first connecting piece, the second piezoelectric unit, the middle beam, and the first pre - tightening bolt form the first piezoelectric transducer, and the rear beam, the third piezoelectric unit, the second connecting piece, the fourth piezoelectric unit, the middle beam, and the second pre - tightening bolt form the second piezoelectric transducer; If it is necessary to transport materials from the first piezoelectric transducer to the second piezoelectric transducer, a sine signal U1 is applied to the first piezoelectric transducer, and a sine signal U2 is applied to the second piezoelectric transducer. The frequencies and voltages of U1 and U2 are the same and have a phase difference of π / 4. The longitudinal vibration modes of the first piezoelectric transducer and the second piezoelectric transducer are excited. The superposition of the two longitudinal vibrations with a phase difference of π / 4 induces a traveling - wave mode of the middle beam. In the traveling - wave mode, the vibration form of a single particle on the middle beam is an elliptical motion, so that the materials placed on the middle beam move in the direction of the traveling - wave propagation under the driving of the friction force of each particle's elliptical motion; If it is necessary to transport materials in the reverse direction, just adjust the phase difference between U1 and U2 to -π / 4; If it is necessary to isolate the feeding groove and the retracting groove and connect the feeding groove and the discharging groove, just do not drive the piezoelectric bimorph; If it is necessary to isolate the feeding groove and the discharging groove and connect the feeding groove and the retracting groove, input a preset DC signal to the piezoelectric bimorph to make the piezoelectric bimorph bend.

4. An in - plane traveling - wave type linear feeding device, characterized in that, comprises a base, a first connecting piece, a second connecting piece, a front beam, a rear beam, a middle beam, the first to fourth piezoelectric ceramic sheets, the first to second pre - tightening bolts, a piezoelectric bimorph, the first to third stop members, and M + N + P adjusting bolts, where M, N, and P are all natural numbers greater than or equal to 1; The middle beam is a cuboid, and pre - tightening threaded blind holes are provided at the centers of both ends; The front beam and the rear beam have the same structure, both are cuboids with the same cross - section as the middle beam, and a countersunk through - hole is provided at the center of one end face; The first connecting piece and the second connecting piece have the same structure, both are rectangular thin - sheet structures, are both vertically arranged, the lower ends are fixedly connected to the base, and through - holes are provided at the upper ends; The first pre-tightening bolt sequentially passes through the countersunk through-hole of the front beam, the front beam, the through-hole on the first connecting piece, and then is threadedly connected to the threaded blind hole at one end of the middle beam, clamping the front beam, the first connecting piece, and the middle beam and making the front beam and the middle beam coaxial; the second pre-tightening bolt sequentially passes through the countersunk through-hole of the rear beam, the rear beam, the through-hole on the second connecting piece, and then is threadedly connected to the threaded blind hole at the other end of the middle beam, clamping the rear beam, the second connecting piece, and the middle beam and making the rear beam and the middle beam coaxial; The first to fourth piezoelectric ceramic sheets have the same structure and are polarized along the thickness direction. Among them, the first and second piezoelectric ceramic sheets are symmetrically pasted on both sides of the front beam, the third and fourth piezoelectric ceramic sheets are symmetrically pasted on both sides of the rear beam, and the first and third piezoelectric ceramic sheets are on the same side; The polarization directions of the first and second piezoelectric ceramic sheets are both inward or both outward, and the polarization directions of the third and fourth piezoelectric ceramic sheets are both inward or both outward; The adjusting bolt includes a nut and a stud; The upper surfaces of the first stopper, the second stopper, and the third stopper are respectively provided with M, N, and P adjusting grooves. The adjusting grooves are all strip-shaped grooves perpendicular to the middle beam, and the adjusting grooves are all provided with strip-shaped through grooves perpendicular to the middle beam. The width of the adjusting groove is greater than the diameter of the nut of the adjusting bolt, and the width of the strip-shaped through groove is less than the diameter of the nut of the adjusting bolt and greater than the diameter of the stud of the adjusting bolt; There are M + N + P positioning threaded blind holes corresponding to the M adjusting grooves on the first stopper, the N adjusting grooves on the second stopper, and the P adjusting grooves on the third stopper on the upper surface of the middle beam; The M + N + P adjusting bolts pass through the M + N + P adjusting grooves one by one and are threadedly connected to the M + N + P positioning threaded blind holes one by one, fixing the first stopper, the second stopper, and the third stopper on the middle beam, so that a feeding groove is formed between the first stopper and the second stopper, a discharging groove is formed between the first stopper and the third stopper, and a retracting groove is formed between the second stopper and the third stopper; the included angle between the retracting groove and the discharging groove is an acute angle; One end of the piezoelectric bimorph is fixedly connected to the third stopper, and the other end abuts against the second stopper, which is used to block the feeding groove and the retracting groove to connect the feeding groove and the discharging groove in the non-driving state, and block the feeding groove and the discharging groove to connect the feeding groove and the retracting groove in the driving state.

5. The working method of the in-plane traveling wave type linear feeding device according to claim 4, characterized in that, including the following steps: The front beam, the first connecting piece, the middle beam, the first pre-tightening screw, the first piezoelectric ceramic sheet, and the second piezoelectric ceramic sheet form a first piezoelectric transducer, and the rear beam, the second connecting piece, the middle beam, the second pre-tightening bolt, the third piezoelectric ceramic sheet, and the fourth piezoelectric ceramic sheet form a second piezoelectric transducer; If it is necessary to transport the material from the first piezoelectric transducer towards the second piezoelectric transducer, a sinusoidal signal U1 is applied to the first piezoelectric transducer, and a sinusoidal signal U2 is applied to the second piezoelectric transducer. U1 and U2 have the same frequency and voltage and a phase difference of π / 4. The longitudinal vibration modes of the first piezoelectric transducer and the second piezoelectric transducer are excited. The superposition of two longitudinal vibrations with a phase difference of π / 4 induces a traveling wave mode of the middle beam. In the traveling wave mode, the vibration form of a single particle on the middle beam is an elliptical motion, causing the material placed on the middle beam to move in the direction of the traveling wave propagation under the friction force of each particle's elliptical motion. If it is necessary to transport the material in the reverse direction, just adjust the phase difference between U1 and U2 to -π / 4. If it is necessary to isolate the feeding trough and the retracting trough, and connect the feeding trough and the discharging trough, just do not drive the piezoelectric bimorph. If it is necessary to isolate the feeding trough and the discharging trough, and connect the feeding trough and the retracting trough, input a preset DC signal to the piezoelectric bimorph to make the piezoelectric bimorph bend.

6. An in-plane traveling wave type linear feeding device Characterized in that it includes a base, a first connecting piece, a second connecting piece, a front beam, a damping block, a middle beam, first to second piezoelectric units, first to second pre-tightening bolts, a piezoelectric bimorph, first to third stoppers, and M + N + P adjusting bolts, where M, N, and P are all natural numbers greater than or equal to 1; The middle beam is a cuboid, and blind threaded holes for pre-tightening are provided at the centers of both ends. The front beam is a cuboid with the same cross-section as the middle beam, and a countersunk through hole is provided at the center of one end face; the damping block is made of a damping material and has a countersunk through hole on it. The first to second piezoelectric units have the same structure, each including Q piezoelectric ceramic sheets, where Q is a natural number greater than or equal to 1; the cross-sectional shapes of the piezoelectric ceramic sheets and the middle beam are the same, and through holes are provided at the centers; the Q piezoelectric ceramic sheets are stacked in sequence, polarized along the thickness direction, and the polarization directions of adjacent piezoelectric ceramic sheets are opposite. The first connecting piece and the second connecting piece have the same structure, both are rectangular thin sheet structures, are both vertically arranged, are fixedly connected to the base at the lower ends, and have through holes at the upper ends. The first pre-tightening bolt passes through the countersunk through hole of the front beam, then passes through the front beam, the first piezoelectric unit, the through hole on the first connecting piece, the second piezoelectric unit in sequence, and is threadedly connected to the threaded blind hole at one end of the middle beam, clamping the front beam, the first piezoelectric unit, the first connecting piece, the second piezoelectric unit, and the middle beam and making the front beam, the first piezoelectric unit, the second piezoelectric unit, and the middle beam coaxial; the second pre-tightening bolt passes through the countersunk through hole of the damping block, then passes through the through hole on the second connecting piece in sequence, and is threadedly connected to the threaded blind hole at the other end of the middle beam, clamping the damping block, the second connecting piece, and the middle beam. The polarization direction of the Qth piezoelectric ceramic sheet in the first piezoelectric unit is opposite to the polarization direction of the first piezoelectric ceramic sheet in the second piezoelectric unit. The adjusting bolt includes a nut and a stud. The upper surfaces of the first stop member, the second stop member, and the third stop member are respectively provided with M, N, and P adjusting grooves. The adjusting grooves are all strip-shaped grooves perpendicular to the middle beam, and the adjusting grooves are all provided with strip-shaped through grooves perpendicular to the middle beam. The width of the adjusting groove is greater than the diameter of the nut of the adjusting bolt, and the width of the strip-shaped through groove is less than the diameter of the nut of the adjusting bolt and greater than the diameter of the stud of the adjusting bolt; On the upper surface of the middle beam, there are M+N+P positioning threaded blind holes corresponding one-to-one to the M adjusting grooves on the first stop member, the N adjusting grooves on the second stop member, and the P adjusting grooves on the third stop member; The M+N+P adjusting bolts respectively pass through the M+N+P adjusting grooves and are threadedly connected to the M+N+P positioning threaded blind holes one-to-one, fixing the first stop member, the second stop member, and the third stop member on the middle beam, so that a feeding groove is formed between the first stop member and the second stop member, a discharging groove is formed between the first stop member and the third stop member, and a retracting groove is formed between the second stop member and the third stop member; the included angle between the retracting groove and the discharging groove is an acute angle; the feeding groove is located between the front beam and the discharging groove; One end of the piezoelectric bimorph is fixedly connected to the third stop member, and the other end abuts against the second stop member, and is used for isolating the feeding groove and the retracting groove to connect the feeding groove and the discharging groove in the non-driven state, and isolating the feeding groove and the discharging groove to connect the feeding groove and the retracting groove in the driven state.

7. The working method of the in-plane traveling wave type linear feeding device according to claim 6, characterized in that, it includes the following steps: The front beam, the first connecting piece, the middle beam, the first pre-tightening screw, the first piezoelectric unit, and the second piezoelectric unit form a piezoelectric transducer; if it is necessary to transport materials from the feeding groove to the discharging groove or the retracting groove, a sine signal with a preset frequency is applied to the piezoelectric transducer to excite the longitudinal vibration mode of the piezoelectric transducer. The vibration propagates from the piezoelectric transducer to the damping material and is absorbed by the damping material, inducing the traveling wave mode of the middle beam; in the traveling wave mode, the vibration form of a single particle on the middle beam is an elliptical motion, so that the materials placed on the middle beam move in the direction of the traveling wave propagation under the friction drive of each particle's elliptical motion; If it is necessary to isolate the feeding groove and the retracting groove and connect the feeding groove and the discharging groove, it is not necessary to drive the piezoelectric bimorph; If it is necessary to isolate the feeding groove and the discharging groove and connect the feeding groove and the retracting groove, a preset DC signal is input to the piezoelectric bimorph to make the piezoelectric bimorph bend.

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