Precision linear vibration table device

Abstract

The present invention relates to the technical field of linear vibration tables, and specifically discloses a precision linear vibration table device, including a table, a bed, an X-axis linear guide, a Y-axis linear guide and a spindle, wherein the bed is arranged on the table, two X-axis linear guides are arranged in parallel on both sides of the top of the bed, a slide is slidably arranged on the X-axis linear guide, the two ends of the Y-axis linear guide are respectively connected to the slide on the X-axis linear guide, the spindle is rotatably arranged on the bed and located between the two X-axis linear guides, a turntable is arranged on the top of the spindle, a slave shaft rotor assembly is arranged on the periphery of the turntable, and the slave shaft rotor assembly is slidably connected to the Y-axis linear guide. The advantage of the present invention is that the linear vibration table can realize sinusoidal linear motion of the slide with high precision and repeatability, and achieve the purpose of accurate calibration of the accelerometer.

Description

Technical Field

[0001] The invention relates to the technical field of linear vibration tables, in particular to a precision linear vibration table device. Background Art

[0002] In order to accurately calibrate the high-order error terms of accelerometers and gyroscopes, a precision linear vibration table is used for testing, and its results have a higher degree of confidence than those of a precision centrifuge. Since the linear vibration table performs strict linear motion, the error introduced by the cross axis can be almost ignored for accelerometers and gyroscopes, so its test results are more reliable.

[0003] At present, most linear vibration tables used for accelerometer and gyroscope testing use permanent magnet linear motors as drivers, and the worktable moves back and forth on a linear guide rail for testing. Such a linear vibration table solution has a simple structure, but requires precise control of the linear motor. It is difficult to achieve accurate sinusoidal reciprocating linear motion, and its motion accuracy will be limited by both the control accuracy of the linear motor and the motion accuracy of the linear guide rail, making it difficult to meet high-precision testing requirements.

[0004] In addition to the linear motor drive solution, there is also a vertical arrangement, using a vertical motion linear vibration table similar to the crank slider principle. The principle is to convert the rotational motion of the spindle into the reciprocating linear motion of the slider with a sinusoidal law using linear guides, sliders, and rolling bearings. However, there are still some shortcomings in this solution: first, the platform is arranged vertically as a whole, and the influence of gravity cannot be eliminated; second, all the moving pairs of the platform use rolling bearings and ball linear guides, which makes it difficult to achieve sufficiently high motion accuracy; third, the spindle motion is not balanced in the platform. Since the reciprocating motion of the slide will inevitably bring a large inertial load, if the spindle is not dynamically balanced, the inertial load during the spindle rotation will inevitably lead to a reduction in rotation accuracy, and at the same time greatly limit the quality of the test piece; finally, the platform used for precision testing does not take effective vibration isolation measures, and the vibration of the external environment is easy to cause vibration noise interference to the test platform.

[0005] In summary, there is still room for improvement in the development of precision sinusoidal linear motion vibration tables for accelerometer and gyroscope testing. Summary of the invention

[0006] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a precision linear vibration table device.

[0007] The objective of the present invention is achieved through the following technical scheme: A precision linear vibration table device, comprising a table, a bed, an X-axis linear guide, a Y-axis linear guide and a spindle, wherein the bed is arranged on the table, the two X-axis linear guides are arranged in parallel on both sides of the top of the bed, a slide is slidably arranged on the X-axis linear guide, the two ends of the Y-axis linear guide are respectively connected to the slide on the X-axis linear guide, the spindle is rotatably arranged on the bed and is located between the two X-axis linear guides, a turntable is arranged on the top of the spindle, a slave shaft rotor assembly is arranged on the periphery of the turntable, and the slave shaft rotor assembly is slidably connected to the Y-axis linear guide.

[0008] Specifically, a support damper is provided at the bottom of the stand.

[0009] Specifically, a counterweight block is provided on the turntable, and the counterweight block is located on the opposite side of the slave shaft rotor assembly, and a line connecting the two passes through the center of the turntable.

[0010] Specifically, an encoder is arranged on the main shaft.

[0011] Specifically, one end of the main shaft is connected to the driving motor rotor, the driving motor stator is fixedly arranged at the bottom of the bed, and the driving motor rotor is arranged inside the driving motor stator.

[0012] Specifically, the slave shaft rotor assembly includes a slave shaft rotor and a slave shaft bearing. The slave shaft rotor is arranged on the turntable. The slave shaft bearing is sleeved on the slave shaft rotor. The slave shaft bearing is slidably connected to the Y-axis linear guide rail.

[0013] Specifically, the slave shaft bearing has a working inner hole of a slewing bearing, and an air pipe joint is provided on the slave shaft bearing, and the air pipe joint is connected to the working inner hole of the slewing bearing. The two opposite side surfaces on the outer side of the slave shaft bearing are working surfaces of the linear guide bearing, and the slave shaft bearing is slidably matched with the Y-axis linear guide through the working surfaces of the linear guide bearing.

[0014] Specifically, the slave shaft rotor assembly includes a slave shaft throttle, a slave shaft and a slave shaft rotary joint. The slave shaft rotary shaft includes a cylindrical section and a rectangular section. The slave shaft throttle is sleeved on the cylindrical section. The slave shaft rotary joint is arranged at one end of the cylindrical section. The slave shaft throttle is fixed on the turntable. The two opposite side walls on the rectangular section are ultra-precision planes, which slide in cooperation with the Y-axis linear guide rail.

[0015] The present invention has the following advantages:

[0016] By adopting the technical solution of the present invention, the uniform rotational motion of the main shaft can be directly converted into the sinusoidal reciprocating linear motion of the required frequency of the slide table through the mechanical structure. From the perspective of precision motion control, the control difficulty of uniform rotational motion is relatively low. By making full use of the role of the encoder, extremely high-precision uniform rotational motion can be achieved. On the other hand, when the aforementioned X-direction and Y-direction linear guides and the main shaft and the slave shaft all use guides and bearings based on the gas static pressure working principle, the motion straightness of the guide slider (slide table) and the rotational motion accuracy of the main and slave shafts can be made higher. Therefore, considering the kinematic pair accuracy and motion control accuracy of the linear vibration table, the linear vibration table can achieve sinusoidal linear motion with high accuracy and repeatability of the slide table, and achieve the purpose of accurate calibration of the accelerometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the linear vibration table of the present invention;

[0018] Figure 2 It is a schematic cross-sectional structure diagram of the linear vibration table of the present invention;

[0019] Figure 3 This is a schematic structural diagram of a slave shaft rotor assembly according to Embodiment 1 of the present invention;

[0020] Figure 4 This is a schematic diagram of the bearing structure of the slave shaft according to the first embodiment of the present invention;

[0021] Figure 5 This is a schematic structural diagram of a slave shaft rotor assembly according to a second embodiment of the present invention;

[0022] Figure 6 This is a schematic diagram of the structure of the slave shaft according to the second embodiment of the present invention;

[0023] In the figure: 1-bench, 2-bed, 3-X-axis linear guide, 4-Y-axis linear guide, 5-support damper, 6-turntable, 7-counterweight, 8-slave shaft rotor assembly, 81-slave shaft bearing, 811-air groove, 82-slave shaft rotor, 83-air pipe joint, 84-cylindrical section, 85-rectangular section, 86-slave shaft rotary joint, 87-slave shaft throttle, 9-encoder, 10-spindle, 11-drive motor rotor, 12-drive motor stator. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention, that is, the embodiments described are only part of the embodiments of the present invention, rather than all of the embodiments. The components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present invention.

[0026] It should be noted that relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "including a..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0027] The present invention is further described below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the following description.

[0028] Embodiment 1

[0029] like Figure 1-Figure 4As shown, a precision linear vibration table device includes a table 1, a bed 2, an X-axis linear guide 3, a Y-axis linear guide 4 and a spindle 10, the bed 2 is arranged on the table 1, the two X-axis linear guides 3 are arranged in parallel on both sides of the top of the bed 2, a slide 13 is slidably arranged on the X-axis linear guide 3, the two ends of the Y-axis linear guide 4 are respectively connected to the slide 13 on the X-axis linear guide 3, the spindle 10 is rotatably arranged on the bed 2 and is located between the two X-axis linear guides 3, a turntable 6 is arranged on the top of the spindle 10, and a slave shaft rotor assembly 8 is arranged on the periphery of the turntable 6, and the slave shaft rotor assembly 8 is slidably connected to the Y-axis linear guide 4. In this embodiment, the stand 1 is made of cast iron, the bed 2 is made of cast iron or marble, and its surface is precisely machined as the mounting surface of the X-axis linear guide 3. Two X-axis linear guides 3 are respectively installed on both sides of the bed 2, and the X-axis linear guide 3 is fixed on the bed 2. Slides 13 are slidably arranged on the two X-axis linear guides 3. The two ends of the Y-axis linear guide 4 are respectively connected to the slides 13 slidably arranged on the two X-axis linear guides 3, so that the Y-axis linear guide 4 can slide along the X-axis linear guide 3. A spindle 10 is arranged between the two X-axis linear guides 3, and a mounting hole is opened on the bed 2. The spindle 10 is rotatably arranged in the mounting hole. A turntable 6 is arranged on the top of the spindle 10, and a slave shaft rotor assembly 8 is eccentrically arranged on the turntable 6. The slave shaft rotor assembly 8 is slidably connected to the Y-axis linear guide 4, and the turntable 6 is driven to rotate by the spindle 10. The rotation of the turntable 6 drives the slave shaft rotor assembly 8 to rotate. At this time, the slave shaft rotor assembly 8 slides on the Y-direction linear guide 4, and at the same time, the slave shaft rotor assembly 8 drives the Y-direction linear guide 4 to slide along the two X-direction linear guides 3. During the rotation of the main shaft 10, the slave shaft rotor assembly 8 reciprocates along the Y-direction linear guide 4, and at the same time drives the Y-direction linear guide 4 to perform sinusoidal reciprocating linear motion along the two X-direction linear guides 3. By providing a mounting frame on the Y-direction linear guide 4 and installing a calibration accelerometer or gyroscope that needs to be calibrated on the mounting frame, the test can be performed. The uniform rotational motion of the main shaft 8 is directly converted into the sinusoidal reciprocating linear motion of the frequency required by the Y-direction linear guide 4 through a mechanical structure. From the perspective of precision motion control, the control difficulty of the uniform rotational motion is relatively low. By making full use of the role of the encoder 9, extremely high-precision uniform rotational motion can be achieved.

[0030] Furthermore, a support damper 5 is provided at the bottom of the platform 1. In this embodiment, support dampers 5 are provided at the four corners of the bottom of the platform 1 to support the platform 1, effectively isolating the disturbance caused by external environmental vibration to the platform test accuracy.

[0031] Furthermore, a counterweight block 7 is provided on the turntable 6, and the counterweight block 7 is located on the opposite side of the slave shaft rotor assembly 8, and the connecting line of the two passes through the center of the turntable 6. By arranging the counterweight block 7 on the opposite side of the slave shaft rotor assembly 8 to balance the weight, the rotation of the turntable 6 is made more stable.

[0032] Furthermore, the main shaft 10 is provided with an encoder 9. In this embodiment, the main shaft 10 is provided with an encoder 9 for accurately measuring and controlling the rotary motion of the main shaft 10.

[0033] Furthermore, one end of the spindle 10 is connected to a drive motor rotor 11, a drive motor stator 12 is fixedly disposed at the bottom of the bed 2, and the drive motor rotor 11 is disposed inside the drive motor stator 12. The drive motor stator 12 of the drive motor is fixed at the bottom of the bed 2, and when the drive motor is working, the drive motor rotor 11 drives the spindle 10 to rotate, and the spindle 10 drives the turntable 6 to rotate.

[0034] Further, the slave shaft rotor assembly 8 includes a slave shaft rotor 82 and a slave shaft bearing 81, wherein the slave shaft rotor 82 is disposed on the turntable 6, the slave shaft bearing 81 is sleeved on the slave shaft rotor 82, and the slave shaft bearing 81 is slidably connected to the Y-direction linear guide 4. In this embodiment, the slave shaft rotor 82 is fixed on the turntable 6, the slave shaft bearing 81 is sleeved on the slave shaft rotor 82, and the slave shaft bearing 81 is slidably connected to the Y-direction linear guide 4, so that when the turntable 6 drives the slave shaft rotor 82 to rotate, the slave shaft rotor 82 and the slave shaft bearing 81 generate relative rotation, and the slave shaft bearing 81 slides back and forth along the Y-direction linear guide 4.

[0035] Furthermore, the slave shaft bearing 81 has a slewing bearing working inner hole, and an air pipe joint 83 is provided on the slave shaft bearing 81, and the air pipe joint 83 is connected to the slewing bearing working inner hole, and the two opposite side surfaces on the outside of the slave shaft bearing 81 are linear guide bearing working surfaces, and the slave shaft bearing 81 is slidably matched with the Y-axis linear guide 4 through the linear guide bearing working surfaces. In this embodiment, an air pipe joint 83 is provided on the outside of the slave shaft bearing 81, and the slave shaft bearing 81 is provided with air holes in the radial direction, and the air pipe joint 83 is connected to the air holes, and the slave shaft rotor 82 is a cylindrical structure precisely manufactured on the outer cylindrical surface, and forms a gas static pressure bearing with the slewing bearing working inner hole of the slave shaft bearing 81, so as to realize the rotary motion of the slave shaft, and the two opposite side surfaces of the slave shaft bearing 81 are linear guide bearing working surfaces, which are continuously supplied with a working gas medium with a certain pressure, and between the linear guide bearing working surface and the Y-axis linear guide 4 working surface. An air film is formed between the shaft bearing 81 and the Y-axis linear guide 4, thereby forming a bearing capacity and greatly reducing the friction coefficient between the shaft bearing 81 and the Y-axis linear guide 4, realizing high-precision linear motion, the gas hydrostatic bearing can realize a rotary runout accuracy of not less than 0.1μm, and the gas hydrostatic linear guide motion accuracy can reach not less than 0.5μm. On the whole, under the premise of meeting the design requirements and ensuring the manufacturing accuracy requirements, taking into account factors such as structural deformation, the reciprocating linear motion of the slide 13 can be realized with a motion accuracy of not less than 1μm. This embodiment adopts a slave shaft design with a composite function, combining the slave shaft rotor 82 and the slider design of the Y-axis linear guide to form a slave shaft rotor assembly 8, realizing a combination of rotary motion and linear motion structures, and integrating the rotary bearing and the slider of the linear guide into a composite bearing structure. The composite structure of the bearing is smaller in size and reduces the overall weight; the force direction of the rotary bearing of the composite bearing structure is relatively fixed, which is conducive to optimizing the design of the rotary motion bearing, improving the bearing capacity, and can effectively increase the load capacity. At the same time, it also helps to improve the accuracy of the rotary motion; The air supply for the rotary bearing and the linear guide can adopt the same air supply route, and a rotary joint is not required, and an air supply hose can be used directly. When sharing the same air supply route, a through air vent is provided on the working surface of the slave shaft bearing 81 corresponding to the Y-direction linear guide 4, so that a gas static pressure is formed between the slave shaft bearing 81 and the Y-direction linear guide 4; in this embodiment, air grooves 811 are opened in a circumferential array on the inner wall of the working inner hole of the rotary bearing. The air grooves 811 serve as the bearing cavity of the slave shaft bearing 81, and the air grooves 811 provide the bearing capacity, thereby ensuring the bearing performance of the bearing.

[0036] Embodiment 2

[0037] like Figure 1 , Figure 2 , Figure 5 and Figure 6As shown, the slave shaft rotor assembly 8 includes a slave shaft throttle 87, a slave shaft and a slave shaft rotary joint 86. The slave shaft rotary shaft includes a cylindrical section 84 and a rectangular section 85. The slave shaft throttle 87 is sleeved on the cylindrical section 84. The slave shaft rotary joint 86 is arranged at one end of the cylindrical section 84. The slave shaft throttle 87 is fixed on the turntable 6. The two opposite side walls on the rectangular section 85 are ultra-precision planes, which slide in cooperation with the Y-axis linear guide 4. In this embodiment, the slave shaft throttle 87 is fixedly installed on the turntable 6, and the cylindrical section 84 of the slave shaft is sleeved on the slave shaft throttle 87. The slave shaft is supported by the slave shaft throttle 87. The cylindrical section 84 of the slave shaft cooperates with the inner cylindrical surface of the slave shaft throttle 87 to form a gas static pressure bearing with high precision. The two opposite side surfaces of the rectangular section 85 of the slave shaft are ultra-precision planes, which cooperate with the guide working surface of the Y-axis linear guide 4 to form a gas static pressure linear guide with high precision. Therefore, the lower half cylindrical section 84 in the slave shaft realizes precise (relative) rotational motion in the slave shaft throttle 87, and the rectangular section 85 realizes precise (relative) linear motion in the Y-axis linear guide 4, thereby realizing the structural combination of rotational motion and linear motion, transmitting and converting the rotational motion of the main shaft 10 into the sinusoidal reciprocating linear motion of the Y-axis linear guide 4, while ensuring sufficiently high rotational and linear motion accuracy; the slave shaft rotary joint 86 supplies air between the cylindrical section 84 and the inner cylindrical surface of the slave shaft throttle 87, and supplies air between the ultra-precision plane of the rectangular section 85 and the guide working surface in the Y-axis linear guide 4, forming an air film, thereby forming bearing capacity, and greatly reducing the friction coefficient between the rectangular section 85 and the guide working surface of the Y-axis linear guide 4, thereby realizing high-precision linear motion.

[0038] The above is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any technician familiar with the art can make many possible changes and modifications to the technical solution of the present invention by using the above-mentioned technical content without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any changes, modifications, equivalent changes and modifications made to the above embodiments based on the technology of the present invention without departing from the content of the technical solution of the present invention belong to the protection scope of the present technical solution.

Claims

1. A precision linear vibration table device, characterized in that: The machine comprises a platform (1), a bed (2), an X-direction linear guide rail (3), a Y-direction linear guide rail (4) and a spindle (10), wherein the bed (2) is arranged on the platform (1), the two X-direction linear guide rails (3) are arranged in parallel on both sides of the top of the bed (2), a slide table (13) is slidably arranged on the X-direction linear guide rail (3), the two ends of the Y-direction linear guide rail (4) are respectively connected to the slide table (13) on the X-direction linear guide rail (3), the spindle (10) is rotatably arranged on the bed (2) and is located between the two X-direction linear guide rails (3), a turntable (6) is arranged on the top of the spindle (10), a slave shaft rotor assembly (8) is arranged on the periphery of the turntable (6), and the slave shaft rotor assembly (8) is slidably connected to the Y-direction linear guide rail (4); The slave shaft rotor assembly (8) comprises a slave shaft throttle (87), a slave shaft and a slave shaft rotary joint (86); the slave shaft rotary shaft comprises a cylindrical section (84) and a rectangular section (85); the slave shaft throttle (87) is sleeved on the cylindrical section (84); the slave shaft rotary joint (86) is arranged at one end of the cylindrical section (84); the slave shaft throttle (87) is fixed on the turntable (6); and the two opposite side walls on the rectangular section (85) are ultra-precision planes, which are slidably matched with the Y-axis linear guide rail (4); The slave shaft throttle (87) is fixedly mounted on the turntable (6), and the cylindrical section (84) of the slave shaft rotating shaft is sleeved on the slave shaft throttle (87), and the slave shaft rotating shaft is supported by the slave shaft throttle (87), the cylindrical section (84) of the slave shaft rotating shaft cooperates with the inner cylindrical surface of the slave shaft throttle (87) to form a gas static pressure bearing, and the two opposite side surfaces of the rectangular section (85) of the slave shaft rotating shaft are ultra-precision planes, which cooperate with the guide rail working surface in the Y-axis linear guide rail (4) to form a gas static pressure linear guide rail; The lower cylindrical section (84) of the slave shaft realizes precise rotary motion in the slave shaft throttle (87), and the rectangular section (85) realizes precise linear motion in the Y-axis linear guide (4), thereby realizing a structural combination of rotary motion and linear motion, transmitting and converting the rotary motion of the main shaft (10) into the sinusoidal reciprocating linear motion of the Y-axis linear guide (4), while also ensuring the precision of rotary and linear motion; The shaft rotary joint (86) supplies air between the cylindrical section (84) and the inner cylindrical surface of the shaft throttle (87), and supplies air between the ultra-precision plane of the rectangular section (85) and the guide rail working surface in the Y-axis linear guide (4), thereby forming an air film, thereby forming a bearing capacity and reducing the friction coefficient between the rectangular section (85) and the guide rail working surface of the Y-axis linear guide (4), thereby achieving linear motion.

2. A precision linear vibration table device according to claim 1, characterized in that: A support damper (5) is provided at the bottom of the platform (1).

3. A precision linear vibration table device according to claim 1, characterized in that: A counterweight (7) is provided on the rotating disk (6), and the counterweight (7) is located on the opposite side of the slave shaft rotor assembly (8), and a line connecting the two passes through the center of the rotating disk (6).

4. A precision linear vibration table device according to claim 1, characterized in that: An encoder (9) is provided on the main shaft (10).

5. The precision linear vibration table device according to claim 1, characterized in that: One end of the main shaft (10) is connected to a drive motor rotor (11); a drive motor stator (12) is fixedly disposed at the bottom of the bed (2); and the drive motor rotor (11) is disposed inside the drive motor stator (12).

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