Wafer box unlocking system and lithography system

Abstract

The present invention provides a chip box unlocking system and a photolithography system. The chip box unlocking system includes a motion bearing device, a chip box, and an unlocking mechanism. In the motion bearing device, a bearing seat is fixedly connected to a mobile platform, and at least one bearing is embedded in a slot on the bearing seat. The inner ring of the bearing surrounds and supports a lead screw. A motor is connected to the lead screw to drive the lead screw to move along its length. The bearing and the mobile platform move under the drive of the lead screw, wherein each bearing has a first end face facing the unlocking mechanism and opposite to the inner wall of the slot. An elastic member is provided between the first end face of at least one bearing and the inner wall of the corresponding slot. In this way, the elastic member can alleviate the reaction force on the lead screw, prevent the lead screw from deforming or getting stuck, and help improve the reliability of the connection between the chip box and the unlocking mechanism. The photolithography system includes the above-mentioned chip box unlocking system.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment, and in particular to a wafer box unlocking system and a photolithography system. Background Art

[0002] As the core precision equipment for chip manufacturing, photolithography machines have numerous internal motion mechanisms. These motion mechanisms require high motion handover and / or motion alignment accuracy to ensure accurate exposure of wafers (such as silicon wafers) in the photolithography machine.

[0003] Among the numerous motion mechanisms within a lithography machine, the wafer transport mechanism is primarily responsible for wafer transfer and handover. This process requires highly precise coordination between the wafer transport mechanism (e.g., robotic arm) and the wafer storage mechanism (e.g., wafer library) to achieve high-precision wafer loading. As a crucial component of wafer transport, the wafer library is a key source of wafer loading for uploading wafers to the lithography machine, primarily used for human-machine interface interaction and loading and unloading cassettes.

[0004] To achieve automatic unlocking, a film cassette and an unlocking mechanism for unlocking the cassette door can be provided in the film library. During unlocking, at least one of the unlocking mechanism and the film cassette is moved toward each other. After reaching a certain distance, the two are relative and unlocked. Before unlocking, the key protruding from the unlocking mechanism's panel facing the front of the film cassette (hereinafter referred to as the unlocking panel) must match the shape of the keyhole provided on the front of the film cassette, thus placing high demands on the positional accuracy of the unlocking mechanism. During the unlocking process, the film cassette continues to move toward the unlocking mechanism, and the key on the unlocking panel is aligned with the keyhole and inserted to unlock the film cassette.

[0005] However, the existing unlocking mechanism is usually a rigid mechanical structure, and its own processing accuracy is difficult to achieve the required accuracy. Moreover, there are certain differences in the sizes of film cassettes from different batches, and the posture of the film cassette when facing the unlocking panel may change after multiple unlocking. In addition, there are also errors in the processing of the key on the unlocking panel and the key hole on the film cassette, as well as in the assembly of the key. Therefore, in the process of unlocking the film cassette door, it is easy to encounter the problem that the film cassette door and the unlocking panel cannot be in parallel contact (such as Figure 1 In addition, since the rigid unlocking panel and the cassette are in rigid contact when docked (as shown in FIG. Figure 2 As shown, this generates a mutually exerted opposing force, which can easily lead to excessive position errors in the motors driving the unlocking mechanism and the film cassette, unlocking failures due to incorrect key placement, and the axis of motion between the unlocking mechanism and the film cassette becoming stuck. These issues reduce the reliability of the connection between the two, which in turn affects the progress of the entire film loading process and reduces the reliability of unlocking the cassette door. Summary of the Invention

[0006] The present invention provides a wafer box unlocking system and a photolithography system, which can improve the reliability of the connection between the wafer box and the unlocking mechanism.

[0007] In order to achieve the above-mentioned objectives, the present invention provides a chip box unlocking system on one hand. The chip box unlocking system includes a motion supporting device, a chip box, and an unlocking mechanism. The motion supporting device supports the chip box to move toward the unlocking mechanism until the chip box and the unlocking mechanism dock. The motion supporting device includes a movable platform, a screw, an electrode, at least one bearing, and a bearing seat supporting the bearing. The bearing seat is fixedly connected to the movable platform, and the inner ring of the bearing surrounds and supports the screw; the motor is connected to the screw to drive the screw to move along the length direction, and the bearing and the movable platform move under the drive of the screw; wherein each bearing is embedded in a slot on the bearing seat and has a first end face facing the unlocking mechanism and opposite to the inner wall of the slot, and an elastic member is provided between the first end face of at least one bearing and the corresponding inner wall of the slot.

[0008] Optionally, the radial dimension of the slot is larger than the outer ring diameter of the bearing.

[0009] Optionally, the bearing seat has two slots, and each slot is embedded with a bearing.

[0010] Optionally, the motion bearing device further includes a nut matching the screw rod, and the nut is arranged on a fixed platform; the motor, the bearing seat, and the nut are arranged in sequence along the movement direction toward the unlocking mechanism.

[0011] Optionally, the motion bearing device further includes a motor base for supporting the motor, the motor base is fixedly connected to the moving platform, and the motor is connected to the screw rod via a coupling.

[0012] Optionally, the elastic member includes at least one of a butterfly spring and a corrugated spring.

[0013] Optionally, the wafer box has a wafer box door, and a keyhole is provided on the front of the wafer box door; the unlocking mechanism includes an unlocking panel and a key protruding from the unlocking panel. When the wafer box and the unlocking mechanism are docked, the unlocking panel is fitted with the wafer box door, and the key is inserted into the keyhole to achieve unlocking.

[0014] Optionally, the unlocking mechanism includes a support and a plurality of flexible members, the unlocking panel is connected to the support via the plurality of flexible members, and the plurality of flexible members are dispersedly arranged on the edge of the unlocking panel.

[0015] Optionally, a plurality of guide rails are provided on the support, one end of each flexible member is slidably provided on one of the guide rails, and the other end is connected to the unlocking panel, and the extension direction of the guide rail is parallel to the length direction of the screw rod.

[0016] Optionally, the support further includes a synchronous belt, which is connected to one of the flexible members and is used to drive the flexible member to slide along the guide rail.

[0017] The present invention also provides a photolithography system, comprising the wafer box unlocking system described above.

[0018] The wafer cassette unlocking system of the present invention includes a motion support device, a wafer cassette, and an unlocking mechanism. The motion support device supports the wafer cassette for movement toward the unlocking mechanism until the wafer cassette and the unlocking mechanism are docked. In the motion support device, a bearing seat is fixedly connected to a movable platform. At least one bearing is embedded in a slot in the bearing seat. The inner ring of the bearing surrounds and supports a lead screw. A motor is connected to the lead screw to drive the lead screw in a longitudinal direction. The bearing and the movable platform move under the influence of the lead screw. Each bearing is embedded in the slot in the bearing seat and has a first end face facing the unlocking mechanism and opposite to the inner wall of the slot. An elastic member is disposed between the first end face of at least one bearing and the inner wall of the corresponding slot. When the wafer cassette and the unlocking mechanism dock, the motion support device is subjected to a reverse force, which is easily transmitted to the lead screw through the bearing. The elastic member can alleviate the reverse force, thereby reducing the reverse force on the bearing and, in turn, on the lead screw. This prevents deformation or jamming of the lead screw, thereby improving the reliability of the docking between the wafer cassette and the unlocking mechanism, and thus improving the unlocking reliability of the wafer unlocking system.

[0019] The photolithography system of the present invention includes the wafer box unlocking system. Since the unlocking reliability of the wafer box unlocking system is high, it helps to improve the efficiency of wafer loading in the photolithography system. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Schematic diagram showing that the unlocking panel and the cassette door are not in parallel contact.

[0021] Figure 2 Schematic diagram of the rigid contact between the unlocking panel and the wafer box.

[0022] Figure 3 A schematic diagram of the structure of an existing wafer box unlocking system.

[0023] Figure 4 Schematic diagram of the unlocking process for an existing wafer box.

[0024] Figure 5 and Figure 6Schematic diagram of the structure of a wafer box unlocking system from different perspectives according to an embodiment of the present invention.

[0025] Figure 7 It is a three-dimensional schematic diagram of a motion carrying device according to an embodiment of the present invention.

[0026] Figure 8 for Figure 7 A schematic cross-sectional view of the motion bearing device shown.

[0027] Figure 9 Schematic diagram of the structure of the first flexible member in one embodiment of the present invention.

[0028] Figure 10 Schematic diagram of the structure of the second flexible member in one embodiment of the present invention. DETAILED DESCRIPTION

[0029] The following is a detailed description of the wafer cassette unlocking system and photolithography system proposed by the present invention, with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are highly simplified and not to exact scale, and are intended solely to facilitate and clarify the purpose of illustrating the embodiments of the present invention.

[0030] Figure 3 A schematic diagram of the structure of an existing wafer box unlocking system. Figure 4 Schematic diagram of the unlocking process for an existing wafer box. Figure 3 and Figure 4 The unlocking process of the existing wafer box unlocking system is as follows: the initial state of the wafer box unlocking system is to manually load the wafer box 201 onto the mobile platform 204 on the wafer library, and the mobile platform 204 is set on the wafer library frame; then, the mobile platform 204 carries the wafer box 201 and moves to the alignment position (i.e., the position where the key 102 is aligned with the key hole 203), and the unlocking panel 101 moves toward the wafer box 201 (i.e., along the x-direction) to the unlocking position, and the mobile platform 204 then moves with the wafer box 201 in the direction of the key 102 (i.e., along the negative x-direction) so that the unlocking panel 101 is in full contact with the wafer box door 202. At this time, the key 102 has entered the key hole 203 (for example, in a cross shape), and the vacuum suction cup on the unlocking panel 101 ( Figure 3 The key 102 is rotated 90 degrees to open the cassette door 202. Then, the unlocking panel 101 moves the cassette door 202 backward (i.e., in the negative x direction). Thus, the unlocking action of the cassette 201 is completed.

[0031] In the above wafer cassette unlocking process, the key step is the docking of the wafer cassette door 202 and the unlocking panel 101, which can be simply described as the docking of two motion axis systems. Figure 3All mechanisms associated with unlocking the wafer cassette are rigid mechanical structures. For example, rigid structures made of stainless steel or aluminum (e.g., the wafer cassette door 202 and unlocking panel 101) are limited by the parts processing process, with a maximum flatness accuracy of 6 microns (Level 3 accuracy, using the wafer cassette door 202 as an example). This 6-micron flatness can easily result in an angular error of approximately 10 urad. Furthermore, when combined with other installation and manufacturing errors (related to the axis system), the accuracy of the linear feed of the key 102 into the lock hole 203 can be significantly affected by this error. If this error is too large, the key 102 may become stuck in the lock hole 203, directly causing the entire wafer cassette unlocking system to stagnate, further impacting the wafer (e.g., silicon wafer) loading process and significantly reducing work efficiency. In other words, due to manufacturing and installation errors, the cassette door 202 is not parallel to the unlocking panel 101. When docking, the cassette door 202 and the unlocking panel 101 cannot be completely aligned, and a gap exists. There is an error between the key 102 and the keyhole 203, and the key 102 cannot enter the keyhole 203, resulting in a failure to unlock. Alternatively, there is severe friction between the key 102 and the keyhole 203, generating particles that pollute the environment of the lithography system. On the other hand, when the cassette door 202 contacts the unlocking panel 101, both shaft systems are in an output state. At this time, both shaft systems are subjected to a reverse force, which makes the screw in the shaft system easily deformed and / or stuck, reducing the life of the screw and the reliability of the docking of the two shaft systems.

[0032] To improve the reliability of the connection between the wafer cassette and the unlocking mechanism, this embodiment provides a wafer cassette unlocking system. The wafer cassette unlocking system includes a motion supporting device, a wafer cassette, and an unlocking mechanism. The motion supporting device supports the wafer cassette to move toward the unlocking mechanism until the wafer cassette and the unlocking mechanism connect.

[0033] Figure 5 and Figure 6 Schematic diagram of the structure of the chip box unlocking system according to one embodiment of the present invention from different perspectives. Figure 5 and Figure 6 As shown, the wafer cassette may have a cassette door 202, and a keyhole is provided on the front of the cassette door 202 ( Figure 5 and Figure 6 the unlocking mechanism includes an unlocking panel 101 and a key 102 protruding from the unlocking panel 101. When the wafer box and the unlocking mechanism are docked, the unlocking panel 101 fits with the wafer box door 202, and the key 102 can be inserted into the keyhole to unlock the wafer.

[0034] like Figure 6As shown, the key 102 is placed vertically (along the z-axis) to be ready for unlocking, and can be unlocked by rotating it 90 degrees clockwise (i.e., the key 102 is placed along the y-axis). To ensure unlocking accuracy, the gap between the key 102 and the keyhole is small, for example, its width is about 0.5 mm.

[0035] Figure 7 It is a three-dimensional schematic diagram of a motion carrying device according to an embodiment of the present invention. Figure 8 for Figure 7 The cross-sectional diagram of the motion bearing device is shown in FIG. Figure 7 and Figure 8 As shown, the motion bearing device includes a mobile platform 204, a screw 209, at least one bearing 206, a bearing seat 205, and a motor 214. The bearing seat 206 is fixedly connected to the mobile platform 204, and the inner ring of the bearing 206 surrounds and supports the screw 209. The motor 214 is connected to the screw 209 to drive the screw 209 to move along the length direction (of the screw), and the bearing 206 and the mobile platform 204 move under the drive of the screw 209. Each bearing 206 is embedded in a slot on the bearing seat 205 and has a first end face facing the unlocking mechanism and opposite to the inner wall of the slot. An elastic member 208 is provided between the first end face of at least one bearing 206 and the inner wall of the corresponding slot.

[0036] Specifically, the motion bearing device may further include a nut 210 matched with the screw rod 209. The nut 210 is fixed to a fixed platform 212. One end of the screw rod 209 is threadedly connected to the nut 210. When the screw rod 209 rotates, it can move in a direction close to or away from the nut 210. A nut fixing seat 211 may be fixed to the fixed platform 212, and the nut 210 may be fixed to the nut fixing seat 211.

[0037] In this embodiment, the motor 214, the bearing seat 205, and the nut 210 can move in the direction of movement toward the unlocking mechanism (eg Figure 8 In other words, the motor 214, the bearing seat 205, and the nut 210 are arranged in sequence in the length direction of the screw rod 209.

[0038] The motion bearing device may include a motor base 215 for supporting the motor 214 . The motor base 215 and the movable platform 204 may be fixedly connected. The motor 214 and the lead screw 209 may be connected via a coupling 216 .

[0039] In this embodiment, the inner ring of the bearing 206 can fit tightly with the side wall of the screw rod 209, so that when the screw rod 209 moves in the direction close to or away from the unlocking mechanism (or close to or away from the nut 210), it can drive the mobile platform 204 to move toward or away from the unlocking mechanism.

[0040] Optionally, the bearing seat 205 may have two slots, each of which is embedded with a bearing 206, that is, the motion bearing device may include two bearings 206 to enhance the support effect of the screw rod 209. Figure 8 The two bearings 206 can be separated by a spacer 207 to prevent collision between the two bearings 206. An elastic member 208 can be provided between the first end surface of each bearing 206 facing the unlocking mechanism and the inner wall of the corresponding slot to enhance the mitigation effect of the reverse force, further reduce the reverse force on the screw rod 209, and reduce the probability of deformation or jamming of the screw rod 209.

[0041] In this embodiment, the elastic member 208 may be a butterfly spring due to its characteristics of high load, short stroke, small space requirement, convenient assembly and use, easy maintenance and replacement, and high economic and safety. However, the elastic member 208 is not limited thereto and may include at least one of a butterfly spring and a corrugated spring.

[0042] In order to prevent the elastic member 208 from affecting the rotation of the bearing 206 , a spacer may be provided between the elastic member 208 and the first end surface of the bearing 206 .

[0043] In this embodiment, the radial dimension of the slot can be larger than the outer ring diameter of bearing 206, that is, a gap can exist between the outer ring of bearing 206 and the corresponding slot on bearing seat 205. During docking of the wafer cassette with the unlocking mechanism during the motion-carrying device, screw rod 209 is susceptible to compression. During this compression, bearing 206 can move within the gap, allowing screw rod 209 to undergo a certain degree of adaptive displacement, avoiding the impact force of rigid contact and helping to prevent deformation or jamming of screw rod 209. The size of the gap can be designed based on actual conditions and is not limited by the present invention.

[0044] like Figure 8 As shown, a locking nut 213 may be further provided on the mobile platform 204, and the locking nut 213 may be used to lock and fix the screw rod 209. It should be noted that the locking nut 213 does not lock the screw rod 209. The screw rod 209 can rotate under the drive of the motor 214. The locking nut 213 only limits the movable range of the screw rod 209 in the radial direction of the bearing 206, and the screw rod 209 can move along the bearing 206 in the gap between the outer periphery of the bearing 206 and the corresponding slot.

[0045] If the matching accuracy between the keyhole and the key 102 mainly depends on the dimensional chain between the keyhole and the key 102, it will be difficult to ensure the reliability of unlocking the film box door 202. In this embodiment, the unlocking panel 101 can be connected to the support 103 through multiple flexible parts, which can realize flexible docking of the unlocking panel 101 and the film box door 202, and can greatly alleviate the error influence caused by the cumulative transmission of the rigid dimensional chain, improve the unlocking efficiency, and avoid the influence of particles generated by mechanical interference caused by the interference between the keyhole and the key 102 on the cleanliness of the docking system.

[0046] Specifically, such as Figure 5 As shown, the unlocking mechanism may include a support 103 and multiple flexible members (e.g., a first flexible member 104 and a second flexible member 108). The unlocking panel 101 may be connected to the support 103 via the multiple flexible members, and the multiple flexible members are dispersedly arranged at the edges of the unlocking panel 101. The multiple flexible members allow the unlocking panel 101 to have multiple degrees of freedom in multiple directions. When the wafer cassette and the unlocking mechanism are docked, the cassette door 202 contacts and pushes the unlocking panel 101. The unlocking panel 101 adjusts its posture in the multiple directions to fit the cassette door 202. This allows for flexible docking of the unlocking panel 101 and the cassette door 202, helping to improve the reliability of the docking between the wafer cassette and the unlocking mechanism, thereby facilitating a smooth unlocking process of the cassette door and extending the life of the wafer cassette unlocking system.

[0047] In this embodiment, the unlocking mechanism may include four flexible members. The unlocking panel 101 may be a rectangular panel, and two opposite sides of the unlocking panel 101 are connected to the support 103 via two flexible members. The structures of the flexible members on the two opposite sides may be different, and the four flexible members are respectively arranged near the four corners of the unlocking panel 101. As an example, Figure 5 As shown, a first flexible member 104 is provided on one opposite side of the unlocking panel 101, and a second flexible member 105 is provided on another opposite side of the unlocking panel 101. However, the present invention is not limited thereto. In other embodiments, the number of the multiple flexible members can be adjusted as needed, and the structures of the multiple flexible members can also be the same.

[0048] Figure 9 The structure of the first flexible member 104 is shown. Figure 5 and Figure 9 The first flexible member 104 may be L-shaped and include an elastic hinge 104c and a first portion 104a and a second portion 104b located on both sides of the elastic hinge 104c. The first portion 104a of the first flexible member is connected to the support 103, and the second portion 104b of the first flexible member is fixed to the unlocking panel 101. Figure 9As shown, the slit of the elastic hinge 104c of the first flexible member extends in the z-direction and passes through an end surface of the first flexible member 104 parallel to the xy plane. The first flexible member 104 allows the unlocking panel 101 to have a displacement Δx on the x-axis, a displacement Δy on the y-axis, and a rotation Ry centered on the y-axis.

[0049] Figure 10 The structure of the second flexible member is shown, referring to Figure 5 and Figure 10 The second flexible member 105 may be L-shaped and include an elastic hinge 105c and a first portion 105a and a second portion 105b located on either side of the elastic hinge 105c. The first portion 105a of the second flexible member is connected to the support 103, and the second portion 105b of the second flexible member is fixed to the unlocking panel 101. The second flexible member 105 enables the unlocking panel 101 to have a displacement Δz along the z-axis.

[0050] In this embodiment, Figure 5 As shown, one opposite side of the unlocking panel 101 can be connected to the support 103 via a first flexible member 104, and the other opposite side of the unlocking panel 101 can be connected to the support 103 via a second flexible member 105. By utilizing the combination of the first flexible member 104 and the second flexible member 105, the unlocking panel 101 can have at least the degrees of freedom of movement along the x-axis, y-axis, and z-axis, as well as the degree of freedom of rotation centered on the y-axis (i.e., the unlocking panel 101 has degrees of freedom in multiple directions), so that the unlocking panel 101 can adjust its posture during docking to fully fit with the cassette door 202. However, this is not limiting. In other embodiments, the flexible member in the unlocking mechanism can be a flexible member of other structures (shapes) known in the art.

[0051] In this embodiment, the free displacement of the unlocking panel 101 on the x-axis and the y-axis is approximately ±0.3 mm, wherein the position of the unlocking panel 101 when it is not subjected to a thrust is set as the original position.

[0052] In this embodiment, Figure 5 As shown, a plurality of guide rails 106 can be provided on the support 103, one end of each flexible member is slidably provided on a guide rail 106, and the other end of the flexible member is connected to the unlocking panel 101. The extension direction of the guide rail 106 can be parallel to the length direction of the screw rod 209. For example, the guide rail 106 and the screw rod can both extend along the x-axis, so that under the guidance of the guide rail 106, the unlocking panel 101 can be docked with the film box door 202.

[0053] The support 103 may further include a synchronous belt 107 (or transmission belt), which may be connected to a flexible member to drive the flexible member to slide along the guide rail 106, thereby driving the unlocking panel 101 to slide along the guide rail 106. It should be noted that the synchronous belt 107 (e.g., a belt) is elastic and flexible, and can absorb vibrations and mitigate impacts during the movement of the unlocking panel 101, so that the transmission of the unlocking panel 101 is smooth and quiet. Figure 5 It can be seen that the synchronous belt 107, as a flexible pulling element, can enable the unlocking panel 101 to have a rotation amount Rx centered on the x-axis and a rotation amount Ry centered on the y-axis during the process of fitting the chip box door 202 (that is, the unlocking panel 101 has rotational freedom of Rx and Ry), which helps to improve the tightness of the fit between the unlocking panel 101 and the chip box door 202, thereby improving the unlocking efficiency of the chip box unlocking system.

[0054] The unlocking panel 101 may also be provided with a vacuum suction cup 108. When the cassette door 202 and the unlocking panel 101 are in contact, the vacuum suction cup 108 sucks the cassette door 202. After the cassette door 202 is unlocked, the unlocking panel 101 may drive the cassette door 202 to retreat, thereby completing the unlocking of the wafer cassette.

[0055] Since both the motion bearing device and the unlocking mechanism have a certain degree of flexibility and allow a certain degree of deformation and / or displacement, if a point-to-point position control method is adopted, there will be cumulative errors after long-term docking movement, resulting in the chip box and the unlocking mechanism not moving into place, thereby failing to achieve the fit between the chip box door 202 and the unlocking panel 101, and the key 102 will not be able to enter the keyhole, which will eventually lead to the failure of unlocking. Therefore, in this embodiment, the motion bearing device and the unlocking mechanism can both be controlled by current loop.

[0056] Specifically, during the unlocking process, the unlocking panel 101 first moves to the mechanical limit, and the current value is sent by the driver of the unlocking panel 101 to maintain the motor of the unlocking panel 101 at the mechanical limit position. Then, the mobile platform 204 carries the chip box and moves toward the unlocking mechanism. When the chip box door 202 contacts the unlocking panel 101, the output of the motor 214 on the mobile platform 204 is slightly greater than the output of the motor of the unlocking panel 101. The chip box door 202 pushes the unlocking panel 101. At the same time, the output of the motor of the unlocking panel 101 also increases to a certain value (or increases to a set threshold). When the output of the motor 214 on the mobile platform 204 and the motor of the unlocking panel 101 reaches a balance, the movement of the unlocking panel 101 pushed by the chip box door 202 stops, and the unlocking action can be performed at this time. Both the motion carrying device and the unlocking mechanism are controlled by a current loop, and both stop movement by mechanical limit, which can ensure the accuracy of each movement position and improve the reliability of docking.

[0057] The chip box unlocking system of this embodiment includes a motion carrying device, a chip box and an unlocking mechanism, wherein the motion carrying device carries the chip box to move toward the unlocking mechanism until the chip box and the unlocking mechanism are docked, and in the motion carrying device, the bearing seat 205 is fixedly connected to the movable platform 204, and at least one bearing 206 is embedded in the slot on the bearing seat 205, and the inner ring of the bearing 206 surrounds and supports the screw rod 209, and the motor 214 is connected to the screw rod 209 to drive the screw rod 209 to move along the length direction, and the bearing 206 and the movable platform 204 move under the drive of the screw rod 209, wherein each bearing 206 is embedded in the slot on the bearing seat 205 and has a first end face facing the unlocking mechanism (specifically the unlocking panel 101) and opposite to the inner wall of the slot, and an elastic member 208 is provided between the first end face of at least one bearing 206 and the corresponding inner wall of the slot. When the chip box and the unlocking mechanism are docked, the moving bearing device (specifically, the mobile platform 204) is subjected to a reverse force, and the reverse force is easily transmitted to the screw rod 209 through the bearing 206. The elastic member 208 can alleviate the reverse force, thereby reducing the reverse force on the bearing 206, and further reducing the reverse force on the screw rod 209. This can avoid deformation or jamming of the screw rod 209, and help improve the reliability of the docking between the chip box and the unlocking mechanism.

[0058] This embodiment further provides a photolithography system including the aforementioned wafer cassette unlocking system. Due to the flexible docking between the wafer cassette door 202 and the unlocking panel 101 of the aforementioned wafer cassette unlocking system, unlocking reliability can be improved, thereby facilitating improved wafer loading efficiency in the photolithography system and preventing particles generated by mechanical interference from affecting the cleanliness of the photolithography system.

[0059] In the description of this embodiment, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limiting the present invention.

[0060] It should be understood that although the terms "first," "second," "third," etc. may be used to describe various elements, components, regions, layers, and / or portions, these elements, components, regions, layers, and / or portions should not be limited by these terms. These terms are merely used to distinguish one element, component, region, layer, or portion from another element, component, region, layer, or portion. Thus, a first element, component, region, layer, or portion discussed above could be referred to as a second element, component, region, layer, or portion without departing from the teachings of the present invention.

[0061] The above description is only a description of the preferred embodiment of the present invention, and does not limit the scope of the rights of the present invention. Any person skilled in the art can make possible changes and modifications to the technical solution of the present invention by using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the scope of protection of the technical solution of the present invention.

Claims

1. A chip box unlocking system, characterized in that: The invention comprises a motion carrying device, a wafer box and an unlocking mechanism, wherein the motion carrying device carries the wafer box to move toward the unlocking mechanism until the wafer box and the unlocking mechanism are docked, and the motion carrying device comprises: Mobile platforms; Screw; at least one bearing and a bearing seat supporting the bearing, wherein the bearing seat is fixedly connected to the movable platform, and the inner ring of the bearing surrounds and supports the screw rod; and a motor connected to the screw rod to drive the screw rod to move along the length direction, and the bearing and the movable platform move under the drive of the screw rod; Among them, each of the bearings is embedded in the slot on the bearing seat and has a first end face facing the unlocking mechanism and opposite to the inner wall of the slot. An elastic member is provided between the first end face of at least one bearing and the corresponding inner wall of the slot.

2. The wafer box unlocking system according to claim 1, wherein: The radial dimension of the groove is larger than the outer ring diameter of the bearing.

3. The wafer box unlocking system according to claim 1, wherein: The bearing seat has two slots, and each slot is embedded with a bearing.

4. The wafer box unlocking system according to claim 1, wherein: The motion bearing device also includes a nut matched with the screw rod, and the nut is arranged on a fixed platform; the motor, the bearing seat, and the nut are arranged in sequence along the motion direction toward the unlocking mechanism.

5. The wafer box unlocking system according to claim 1, wherein: The motion bearing device further includes a motor base for supporting the motor, the motor base is fixedly connected to the moving platform, and the motor is connected to the lead screw via a coupling.

6. The wafer box unlocking system according to claim 1, wherein: The elastic member includes at least one of a butterfly spring and a wave spring.

7. The wafer box unlocking system according to claim 1, wherein: The wafer box has a wafer box door, and a keyhole is provided on the front of the wafer box door; the unlocking mechanism includes an unlocking panel and a key protruding from the unlocking panel. When the wafer box and the unlocking mechanism are docked, the unlocking panel is fitted with the wafer box door, and the key is inserted into the keyhole to achieve unlocking.

8. The wafer box unlocking system according to claim 1, wherein: The unlocking mechanism includes a support and a plurality of flexible members, the unlocking panel is connected to the support through the plurality of flexible members, and the plurality of flexible members are dispersedly arranged on the edge of the unlocking panel.

9. The wafer box unlocking system according to claim 8, wherein: A plurality of guide rails are provided on the support, one end of each flexible member is slidably provided on one of the guide rails, and the other end is connected to the unlocking panel, and the extension direction of the guide rail is parallel to the length direction of the screw rod.

10. The wafer box unlocking system according to claim 9, wherein: The support further comprises a synchronous belt, which is connected to one of the flexible members and is used to drive the flexible member to slide along the guide rail.

11. A photolithography system, characterized in that: A wafer box unlocking system comprising any one of claims 1 to 10.

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