Adjustment Method of Exchangeable Manipulator and Usage Method of Exchangeable Manipulator

Abstract

The present application relates to the field of semiconductor technology, and in particular to an adjustment method for an exchange board manipulator and a usage method for an exchange board manipulator. The adjustment method for the exchange board manipulator includes: adjusting the levelness of the suction part one by one; adjusting the relative positions between multiple suction parts; and adjusting the rotation assembly to the initial position. According to the adjustment method for the exchange board manipulator and the usage method for the exchange board manipulator provided by the present application, by adjusting the levelness of each suction part, adjusting the relative positions between multiple suction parts, and adjusting the rotation assembly to the initial position, the accuracy of the parameters of the initial position of the suction part before the exchange board manipulator is used is effectively improved, thereby avoiding the occurrence of the phenomenon that the exchange board manipulator damages the mask during the process of the exchange board manipulator picking up the mask and transferring it between workstations.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and more particularly to an adjustment method for an exchange plate manipulator and a use method for an exchange plate manipulator. Background Art

[0002] During the production process of a reticle, it is usually necessary to face the scenario of transferring the reticle between multiple workstations. Currently, an exchange plate manipulator is usually set between multiple workstations to realize the transfer of the reticle between multiple workstations.

[0003] The exchange plate manipulator usually includes a plurality of suction parts that can be independently lifted and lowered, and the plurality of suction parts can rotate around the same axis to realize the switching of the plurality of suction parts to pick up and place the reticle between multiple workstations.

[0004] However, the current adjustment accuracy of the initial position parameters of the suction part (such as the levelness of the suction part, the rotation zero position, etc.) before the use of the exchange plate manipulator is insufficient. This causes the exchange plate manipulator to often damage the reticle during the process of picking up the reticle and transferring it between workstations. For example, the insufficient accuracy of the rotation zero position greatly affects the rotation accuracy of the suction part in place, causing the suction part to perform the action of picking up / putting down the reticle before rotating to the specified workstation. If the picking action is performed, it is extremely easy to cause the position of the suction part to pick up the reticle to shift, and the reticle may fall off and be damaged during the suction process of the suction part. If the placing action is performed, it is extremely easy to cause the suction part to perform the action of releasing the reticle before rotating to the position of placing the reticle, resulting in the reticle falling off and being damaged. Also, for example, the insufficient accuracy of the levelness of the suction part extremely easily affects the stability of the suction part to pick up the reticle, making the reticle easy to slide off the suction part. Summary of the Invention

[0005] The purpose of the present application is to provide an adjustment method for an exchange plate manipulator and a use method for an exchange plate manipulator, so as to solve to a certain extent the technical problem in the prior art that the current adjustment accuracy of the initial position parameters of the suction part (such as the levelness of the suction part, the rotation zero position, etc.) before the use of the exchange plate manipulator is insufficient, which causes the exchange plate manipulator to often damage the reticle during the process of picking up the reticle and transferring it between workstations.

[0006] According to a first aspect of the present application, an adjustment method for an exchange plate manipulator is provided.

[0007] The exchange plate manipulator includes a rotating assembly, a placement part, and a plurality of suction parts. Each suction part includes a connecting plane and a plurality of suction cups, and the plurality of suction cups are all arranged on the connecting plane.

[0008] The placement part includes a placement hole that penetrates the placement part in the first direction. The rotating assembly penetrates the placement hole in the first direction, and a plurality of the suction parts are all arranged at one end of the rotating assembly;

[0009] The adjustment method of the exchange plate manipulator includes the following steps:

[0010] Adjust the levelness of each suction part one by one. Fit a leveling tool with a level to the connection plane, and adjust the levelness of the connection plane through the reading of the level, so that the levelness of the connection plane reaches a predetermined levelness range;

[0011] Adjust the relative positions between the plurality of suction parts. Set a central marking hole group on each connection plane, and connect the positioning tooling to the central marking hole groups of the plurality of suction parts respectively;

[0012] Adjust the rotating assembly to the initial position. Set a first initial positioning part on the end face of the rotating assembly where the suction part is located, and set a second initial positioning part on the side of the placement part where the suction part is located, so that the zeroing tooling is connected to the first initial positioning part and the second initial positioning part respectively.

[0013] Preferably, before the step of adjusting the levelness of each suction part one by one, it further includes leveling the placement part, grinding the exchange plate manipulator, so that the levelness of the placement part reaches the predetermined levelness range;

[0014] The predetermined levelness range is less than or equal to 100 μrad.

[0015] Preferably, the leveling tooling includes a fitting convex part, the fitting convex part includes a fitting surface, and the leveling tooling is fitted to the connection plane through the fitting surface; the level is arranged parallel to the fitting surface.

[0016] Preferably, the leveling tooling further includes:

[0017] A connecting part, arranged on the fitting surface, the connecting part is adapted to the central marking hole group and protrudes relative to the fitting surface;

[0018] A marking platform, arranged parallel to the fitting surface, and the fitting convex part and the level are both arranged on the marking platform.

[0019] Preferably, the suction part includes:

[0020] A leveling plate,

[0021] A connecting portion, oppositely arranged with the leveling plate in the first direction, and the connection plane is the side of the connecting portion facing away from the leveling plate;

[0022] The clamping cover covers the connection part. The rotating assembly penetrates through the clamping cover along the first direction and is connected to the leveling plate. The leveling plate is arranged between the clamping cover and the connection part;

[0023] A plurality of leveling studs are arranged at one end of the rotating assembly of the clamping cover. The leveling studs penetrate through the clamping cover along the first direction and abut against the leveling plate.

[0024] Preferably, the central marking hole group includes a plurality of positioning holes extending along the first direction. The plurality of positioning holes are arranged on the same positioning circle, and the center of the positioning circle is the center point of the connection plane.

[0025] Preferably, the positioning tooling includes a connecting plate part and a plurality of limiting parts. The number of the limiting parts is equal to the number of the suction parts. The plurality of limiting parts are distributed on the same side of the connecting plate part according to the preset relative positions of the plurality of suction parts;

[0026] Each of the limiting parts can cooperate with the central marking hole group. When the positioning tooling is used, the plurality of limiting parts respectively correspond to the central marking hole groups of the suction parts one by one.

[0027] Preferably, the connecting plate part includes a connecting rod and a connecting platform. The number of the connecting rods and the number of the connecting platforms are both equal to the number of the limiting parts. The first ends of the plurality of connecting rods are connected to the same place, and the second ends of the connecting rods are connected to the connecting platform;

[0028] The limiting parts are arranged on the same side of the connecting platform in one-to-one correspondence so that the plurality of limiting parts are coplanar.

[0029] Preferably, the number of the first initial positioning parts is multiple, and the multiple first initial positioning parts are arranged at intervals in the radial direction of the end face of the rotating assembly;

[0030] The zeroing tooling includes a diameter marking part and a clamping part connected to each other. The diameter marking part extends along a predetermined direction. A plurality of positioning protrusions are arranged on one side of the diameter marking part, and the positioning protrusions are arranged at intervals along the predetermined direction;

[0031] The clamping part is arranged at one end of the diameter marking part in the predetermined direction; when the zeroing tooling is used, the clamping part can clamp the second initial positioning part, and rotate the rotating assembly so that the positioning protrusions are connected with the first initial positioning parts in a matching manner, so that the first initial positioning part and the second initial positioning part are collinear.

[0032] According to a second aspect of the present application, a method for using an exchangeable manipulator is provided, including the adjustment method of the exchangeable manipulator described in any of the above technical solutions to adjust all of the plurality of suction parts to the initial working positions. Therefore, all the beneficial technical effects of the adjustment method of the exchangeable manipulator are achieved, and details are not described herein again.

[0033] Preferably, the rotating assembly includes a rotating part and a plurality of lifting parts extending along the first direction. The lifting parts penetrate through the rotating part along the first direction. The rotating part is disposed in the mounting hole, and the plurality of suction parts are respectively disposed on the plurality of lifting parts one by one, so that each suction part can move up and down relative to the mounting part under the drive of the corresponding lifting part.

[0034] The exchangeable manipulator further includes a control part, and the control part is respectively communicatively connected to the rotating part and each of the lifting parts.

[0035] The method for using the exchangeable manipulator further includes the steps of:

[0036] A calibration step of respectively marking a first deceleration working position and a second deceleration working position for the plurality of suction parts one by one;

[0037] A use step of adjusting the parameters of the control part so that when the suction part moves to the first deceleration working position, the falling speed of the suction part is the first operating speed, and when the suction part moves to the second detection working position, the falling speed of the suction part is the second operating speed.

[0038] Preferably, each suction part includes a plurality of force sensors, and the force sensors are used to detect the stress point conditions of the connection plane;

[0039] The control part is respectively communicatively connected to each of the force sensors;

[0040] For each suction part, the calibration step further includes:

[0041] Marking a predetermined handover working position, driving the suction part to fall at a first marking speed until one of the plurality of force sensors is triggered, and the control part controls the suction part to stop moving and marks the position of the suction part at this time as the predetermined handover working position;

[0042] Marking a handover working position, driving the suction part to rise from the predetermined handover working position to a first calibration position, and making the suction part fall from the first calibration position at a second marking speed until two of the plurality of force sensors are triggered, and the control part marks the position of the suction part at this time as the handover working position;

[0043] Mark the first deceleration station and the second deceleration station, take the handover station as a reference, mark the position above the handover station at a first deceleration distance from the handover station as the first deceleration station, and mark the position above the handover station at a second deceleration distance from the handover station as the second deceleration station.

[0044] Preferably, the maximum values ​​of the first marking speed, the second marking speed and the second running speed are all 0.1 mm / s, and the first running speed is greater than the second running speed;

[0045] The distance between the first calibration position and the predetermined handover position is 1 mm;

[0046] The first deceleration distance is 7 mm;

[0047] The second deceleration distance is 0-0.8 mm, or the second deceleration distance is 0.5 mm.

[0048] Compared with the prior art, the beneficial effects of this application are:

[0049] The adjustment method of the exchange plate robot provided in the present application effectively improves the accuracy of the parameters of the initial position of the suction part of the exchange plate robot before use by adjusting the horizontality of each suction part, adjusting the relative positions between multiple suction parts and adjusting the rotating component to the initial position, thereby avoiding the phenomenon of the exchange plate robot damaging the mask during the process of the exchange plate robot picking up the mask and transferring it between workstations.

[0050] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0052] Figure 1 A schematic diagram of the axonometric structure of the exchangeable version manipulator provided in an embodiment of the present application;

[0053] Figure 2 A schematic diagram of a cross-sectional structure obtained by cross-sectioning a switching plate manipulator provided in an embodiment of the present application along a plane determined by a first direction and a second direction;

[0054] Figure 3A schematic diagram of the structure of the exchange plate manipulator provided in an embodiment of the present application from a bottom view;

[0055] Figure 4 A schematic diagram of the axonometric structure of the suction portion provided in an embodiment of the present application;

[0056] Figure 5 A schematic diagram of the axonometric structure of the leveling tool provided in an embodiment of the present application;

[0057] Figure 6 A schematic diagram of a section structure obtained by sectioning the assembly structure of the suction part and the leveling tool provided in an embodiment of the present application along a plane determined along a first direction and a third direction;

[0058] Figure 7 A schematic diagram of the axonometric structure of the positioning tool provided in an embodiment of the present application;

[0059] Figure 8 A schematic diagram of the structure of the exchange plate manipulator provided in an embodiment of the present application before being adjusted by the adjustment tool;

[0060] Figure 9 A schematic diagram of the assembly structure of the exchangeable manipulator and the positioning tooling provided in the embodiment of the present application;

[0061] Figure 10 A schematic diagram of the isometric structure of the zeroing tool provided in an embodiment of the present application;

[0062] Figure 11 A schematic diagram of the assembly structure of the exchangeable manipulator and the zeroing tooling provided in the embodiment of the present application;

[0063] Figure 12 A schematic diagram of workstations marked for the calibration steps of the exchange plate manipulator provided in an embodiment of the present application;

[0064] Figure 13 A schematic flow chart of a method for adjusting a swap plate manipulator provided in an embodiment of the present application;

[0065] Figure 14 A flowchart of a method for using the exchangeable plate manipulator provided in an embodiment of the present application.

[0066] Reference numerals:

[0067] 110 - Placement Department; 111 - Placement Hole; 112 - Second Initial Positioning Department; 121 - Rotation Department; 1211 - Rotating Turntable; 1212 - Torque Motor; 122 - Lifting Department; 123 - First Initial Positioning Department; 130 - Suction Department; 131 - Connection Part; 1311 - Connection Plane; 132 - Central Marking Hole Group; 1321 - Positioning Threaded Hole; 1322 - Positioning Pin Hole; 133 - Suction Cup; 134 - Leveling Plate; 135 - Clamping Cover; 136 - Leveling Stud; 137 - Force Sensor;

[0068] 200 - Leveling Tooling; 210 - Fitting Convex Part; 220 - Marking Platform; 230 - Connection Part; 241 - Y - Direction Level; 242 - X - Direction Level;

[0069] 300 - Position Adjustment Tooling; 310 - Limiting Department; 321 - Connection Platform; 322 - Connecting Rod;

[0070] 400 - Zero - Adjustment Tooling; 410 - Diameter Marking Department; 411 - Positioning Projection; 420 - Clamping Department;

[0071] 01 - Initial Workstation; 02 - First Deceleration Workstation; 03 - Second Deceleration Workstation; 04 - Handover Workstation;

[0072] F1 - First Direction; F2 - Second Direction; F3 - Third Direction. Detailed Implementation Manner

[0073] The technical solutions of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application.

[0074] Generally, the components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the present application claimed, but merely represents the selected embodiments of the present application.

[0075] Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present application.

[0076] In the description of the present application, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0077] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0078] The following refers to Figures 1 to 14 Describe the adjustment method of the exchange version manipulator and the usage method of the exchange version manipulator according to some embodiments of the present application.

[0079] See Figures 1 to 13 As shown, the embodiment of the first aspect of the present application provides an adjustment method of an exchange version manipulator, and this adjustment method of the exchange version manipulator is used for the following exchange version manipulator. Specifically, the adjustment method of the exchange version manipulator includes the following steps:

[0080] S200 Adjust the levelness of the following suction parts 130 one by one. Fit the leveling tooling 200 with a level to the following connection plane 1311, and adjust the levelness of the connection plane 1311 through the reading of the level, so that the levelness of the connection plane 1311 reaches a predetermined levelness range.

[0081] S300 Adjust the relative positions between the following multiple suction parts 130. Set a central marking hole group 132 on each connection plane 1311, and connect the following positioning tooling 300 to the central marking hole groups 132 of multiple suction parts 130 respectively.

[0082] S400 Adjust the following rotating assembly to the initial position. Set a first initial positioning part 123 on the end face where the suction part 130 of the rotating assembly is located, and set a second initial positioning part 112 on the side of the suction part 130 of the following placement part 110, so that the zeroing tooling 400 is connected to the first initial positioning part 123 and the second initial positioning part 112 respectively.

[0083] According to the above technical features, the adjustment method of the exchange version manipulator effectively improves the accuracy of the parameters of the initial position of the suction part 130 before the exchange version manipulator is used by adjusting the levelness of each suction part 130, adjusting the relative positions between multiple suction parts 130, and adjusting the rotating assembly to the initial position. Furthermore, it avoids the occurrence of the phenomenon that the exchange version manipulator damages the reticle during the process of the exchange version manipulator picking up the reticle and transferring it between workstations.

[0084] Refer to Figures 1 to 12 , the direction shown by F1 in the figure can be an example of the first direction F1, the direction shown by F2 in the figure can be an example of the second direction F2, and the direction shown by F3 in the figure can be an example of the third direction F3. Preferably, any two of the first direction F1, the second direction F2, and the third direction F3 are perpendicular to each other, where the first direction F1 can be the direction of gravity, the second direction F2 can be the following Y direction, and the third direction F3 can be the following X direction.

[0085] Preferably, as Figure 13 shown. Before the step of adjusting the levelness of the suction part 130 one by one in the above S200 step, it may further include S100 leveling the placement part 110 and grinding the exchange version manipulator to make the levelness of the placement part 110 reach the predetermined levelness range. In this way, it provides a reference for adjusting the levelness of the suction part 130 in the S200 step.

[0086] Preferably, not shown in the figure, the above exchange version manipulator may include a support frame, and the above placement part 110 may be arranged on the support frame. The grinding of the exchange version manipulator in the S100 step may include grinding the connection between the placement part 110 and the support frame to ensure that the levelness of the above placement part 110 can be within the predetermined levelness range.

[0087] Optionally, the above exchange version manipulator may further include a gasket, and the gasket may be arranged between the above support frame and the placement part 110. The grinding of the exchange version manipulator in the above S100 step may further include grinding the gasket and adjusting the gasket to further ensure that the levelness of the above placement part 110 can be within the predetermined levelness range.

[0088] Preferably, the above predetermined levelness may be less than or equal to 100 μrad so that the exchange version manipulator can meet the levelness requirements for picking up the reticle.

[0089] Preferably, the above-mentioned predetermined levelness may include the X-direction levelness (i.e., the levelness in the third direction F3 detected by the following X-direction level 242) and the Y-direction levelness (i.e., the levelness in the second direction F2 detected by the following Y-direction level 241), wherein the X-direction levelness may be less than or equal to 100 μrad, and the Y-direction levelness may also be less than or equal to 100 μrad.

[0090] In the embodiment, referring to Figures 4 to 6 , the above-mentioned leveling tooling 200 may include a fitting convex portion 210, so that Figure 5 and Figure 6 taking the orientation shown as an example, the upper surface of the fitting convex portion 210 may be a fitting surface, and the leveling tooling 200 is attached to the above-mentioned connection plane 1311 through this fitting surface.

[0091] Preferably, as Figures 4 to 6 shown, the above-mentioned leveling tooling 200 may further include a connecting portion 230, which is arranged on the above-mentioned fitting surface, the connecting portion 230 is adapted to the above-mentioned central marking hole group 132 and protrudes relative to the fitting surface. When the leveling tooling 200 is used, the connecting portion 230 can extend into the above-mentioned central marking hole group 132 to realize the connection between the leveling tooling 200 and the suction portion 130, so as to ensure the fitting stability of the fitting surface and the above-mentioned connection surface, and further ensure the leveling reliability of the leveling tooling 200.

[0092] Preferably, as Figures 4 to 6 shown, the above-mentioned leveling tooling 200 may further include a marking platform 220, which is arranged parallel to the fitting surface, and the fitting convex portion 210 and the level are both arranged on the marking platform 220. In this way, when the leveling tooling 200 is used, the levelness of the marking platform 220 detected by the level can indirectly reflect the levelness of the above-mentioned connection plane 1311.

[0093] Preferably, as Figure 4 and Figure 6 shown, the number of the above-mentioned levels may be two. The first of the two levels may extend along the second direction F2, and the first is the Y-direction level 241. Similarly, the second of the two levels may extend along the third direction F3, and the second is the X-direction level 242. In this way, it is ensured that the leveling tooling 200 can simultaneously detect the levelness of the connection plane 1311 in two directions, namely the second direction F2 and the third direction F3, further ensuring the leveling reliability of the leveling tooling 200.

[0094] Preferably, the above-mentioned central marking hole group 132 may include a plurality of positioning holes extending along the first direction F1. The plurality of positioning holes are arranged on the same positioning circle, and the center of the positioning circle is the center point of the connection plane 1311, so as to facilitate positioning the center point of the connection plane 1311.

[0095] As Figure 3 and Figure 8 shows an example where the number of positioning holes in the central marking hole group 132 is 4. Preferably, as Figure 3 and Figure 8 shown, the positioning holes may include positioning threaded holes 1321 and positioning pin holes 1322. The positioning threaded holes 1321 and the positioning pin holes 1322 are arranged at intervals, so as to ensure the connection stability between the connection part 230 and the following limiting part 310 that cooperate with the central marking hole group 132 and the connection plane 1311, and facilitate the loading and unloading of the leveling tooling 200 and the positioning tooling 300.

[0096] Correspondingly, the connection part 230 on it may include two studs extending along the first direction F1 and two pin studs extending along the first direction F1. The stud can cooperate with the above-mentioned positioning threaded hole 1321; the pin stud can cooperate with the above-mentioned positioning pin hole 1322. The two studs and the two pin studs are arranged at intervals.

[0097] Similarly, the structure of the following limiting part 310 is similar to the structure of the connection part 230, and will not be described in detail.

[0098] In the embodiment, the positioning tooling 300 may include a connecting plate part and a plurality of limiting parts 310. The number of the limiting parts 310 is equal to the number of the following suction parts 130. The plurality of limiting parts 310 are distributed on the same side of the connecting plate part according to the preset relative positions of the plurality of suction parts 130. Thus, as Figure 8 and Figure 9 shows the comparison diagrams of the suction part 130 before and after passing through the positioning tooling 300. The limiting parts 310 are connected to the central marking hole group 132 of the suction part 130 one by one to adjust the orientation of each suction part 130 and the relative positions between the plurality of suction parts 130 to ensure the setting accuracy of the initial position of the suction part 130.

[0099] Preferably, as Figure 9 shown, each limiting part 310 can cooperate with the above-mentioned central marking hole group 132. When using the positioning tooling 300, the plurality of limiting parts 310 respectively correspond to the central marking hole group 132 of the suction part 130 one by one. The setting structure and method of the limiting part 310 are similar to those of the above-mentioned connection part 230, and will not be described in detail.

[0100] Preferably, as Figure 7As shown, the above-mentioned connecting plate portion may include a connecting rod 322 and a connecting platform 321. The number of the connecting rods 322 and the number of the connecting platforms 321 may both be equal to the number of the above-mentioned limiting portions 310. The first ends of the multiple connecting rods 322 are connected to the same place, and the second ends of the connecting rods 322 are connected to the connecting platform 321, so as to save the material cost of the positioning tool 300.

[0101] Preferably, the limiting portions 310 are arranged on the same side of the connecting platform 321 in a one-to-one correspondence, so that the multiple limiting portions 310 are coplanar. Thus, during the process of using the positioning tool 300 to adjust the relative positions between the multiple suction portions 130 in the above-mentioned step S300, the multiple suction portions 130 can be adjusted to the same height position.

[0102] As Figure 7 and Figure 9 shown, an example is shown in which the number of the suction portions 130 is two, and the preset relative positions of the two suction portions 130 are collinear. Correspondingly, the number of the above-mentioned connecting rods 322 is two, and the extending directions of the two connecting rods 322 are the same. For the convenience of distinguishing the number of the connecting rods 322, the connecting positions of the two connecting rods 322 are marked with dotted lines in Figure 7 .

[0103] In the embodiment, as Figure 3 , Figure 8 and Figure 9 shown, the above-mentioned first initial positioning portion 123 may be a plurality of pin holes, and the plurality of pin holes may be arranged at intervals in the radial direction of the end face of the rotating assembly. As Figure 3 , Figure 8 and Figure 9 shown, this radial direction may be perpendicular to the direction in which the following two rotating portions 121 are distributed.

[0104] Correspondingly, the above-mentioned second initial positioning portion 112 may be a pin post extending along the first direction F1.

[0105] Preferably, as Figure 10 and Figure 11 shown, the zeroing tool 400 may include a diameter marking portion 410 and a clamping portion 420 connected to each other. The diameter marking portion 410 extends along a predetermined direction, and a plurality of positioning protrusions 411 are arranged on one side of the diameter marking portion 410, and the positioning protrusions 411 are arranged at intervals along the predetermined direction. Thus, when the zeroing tool 400 is in a use state, the positioning protrusions 411 can be correspondingly inserted into the above-mentioned first initial positioning portion 123.

[0106] Preferably, as Figure 10 and Figure 11 ​As shown, the clamping portion 420 is provided at one end of the diameter marking portion 410 in the predetermined direction, such that the clamping center of the clamping portion 420 is collinear with the plurality of positioning protrusions 411. Thus, when the zeroing tooling 400 is used, the clamping portion 420 can clamp the second initial positioning portion 112, and the rotating assembly is rotated so that the positioning protrusions 411 are cooperatively connected with the first initial positioning portion 123, such that the first initial positioning portion 123 and the second initial positioning portion 112 are collinear, thereby realizing the adjustment of the rotating assembly to the initial position.

[0107] Specifically, in the embodiment, the above-mentioned exchange plate manipulator may include a rotating assembly, a placement portion 110, and a plurality of suction portions 130. Each suction portion 130 includes a connection plane 1311 and a plurality of suction cups 133, and the plurality of suction cups 133 are all provided on the connection plane 1311. The placement portion 110 includes a placement hole 111 that penetrates the placement portion 110 along the first direction F1. The rotating assembly penetrates the placement hole 111 along the first direction F1, and the plurality of suction portions 130 are all provided at one end of the rotating assembly. As Figures 1 to 3 , Figure 4 , Figure 6 shows an example of an exchange plate manipulator with two suction portions 130.

[0108] Preferably, as Figure 4 and Figure 6 , the suction portion 130 may include a leveling plate 134, a connection portion 131, a clamping cover 135, and a plurality of leveling studs 136. Specifically, the connection portion 131 and the leveling plate 134 are oppositely arranged in the first direction F1. The connection plane 1311 is the side of the connection portion 131 facing away from the leveling plate 134.

[0109] Preferably, as Figure 4 shown, the clamping cover 135 may cover the connection portion 131, such that an adjustment space is formed between the clamping cover 135 and the connection portion 131. The above-mentioned leveling plate 134 may be provided in this adjustment space, and the rotating assembly penetrates the clamping cover 135 along the first direction F1 and is connected to the leveling plate 134. Thus, when sucking and / or placing the reticle, the flexible connection between the suction portion 130 and the rotating assembly is effectively ensured. When the suction portion 130 sucks a reticle placed obliquely, the suction portion 130 can be relatively inclined with respect to the rotating assembly during the contact process with the reticle, such that the suction portion 130 can form good contact and fitting with the reticle in an inclined state.

[0110] Preferably, as Figure 4 and Figure 6As shown, the multiple leveling studs 136 can be arranged at one end of the rotating assembly of the clamping cover 135. The leveling studs 136 penetrate through the clamping cover 135 along the first direction F1 and abut against the leveling plate 134. In this way, the levelness of the connection plane 1311 can be adjusted by respectively rotating the leveling studs 136.

[0111] Optionally, the number of the leveling studs 136 can be 3, however, it is not limited thereto. The number of the leveling studs 136 can also be two, 4, 5 or more.

[0112] Preferably, as Figures 1 to 3 shown, the above-mentioned rotating assembly can include a rotating part 121 and multiple lifting parts 122 extending along the first direction F1. The lifting parts 122 penetrate through the rotating part 121 along the first direction F1. The rotating part 121 is arranged in the placement hole 111. Multiple suction parts 130 are correspondingly arranged at the lower ends of the multiple lifting parts 122, so that each suction part 130 can be lifted relative to the placement part 110 under the drive of the corresponding lifting part 122 to realize the action of picking up / putting down the mask plate by the suction part 130.

[0113] Preferably, the above-mentioned lifting part 122 can be a linear driving device extending along the first direction F1. For example, a cylinder, a linear motor or a combination of a lead screw nut and a rotating motor in cooperation, etc.

[0114] Preferably, as Figure 2 shown, the above-mentioned rotating part 121 can include a rotating turntable 1211 and a torque motor 1212. The torque motor 1212 and the rotating turntable 1211 can both be arranged in the above-mentioned placement hole 111. The above-mentioned lifting part 122 penetrates through the rotating turntable 1211 along the first direction F1. In this way, the torque motor 1212 drives the rotating turntable 1211 to rotate, and then drives the lifting part 122 to rotate.

[0115] Preferably, not shown in the figure, the above-mentioned exchange plate manipulator can further include a control part. The control part is respectively communicatively connected with the above-mentioned torque motor 1212 and each lifting part 122 to control the exchange manipulator to perform rotation and lifting actions.

[0116] Preferably, each suction part 130 can include multiple force sensors 137. The force sensors 137 are used to detect the stress point conditions of the connection plane 1311. Taking the above-mentioned suction part 130 as an example, the force sensor 137 can be an inductive proximity switch, as Figure 4As shown, the force sensor 137 can be disposed at the upper end of the above-mentioned clamping cover 135. By detecting the change in the distance between the clamping cover 135 and the leveling plate 134, the force condition of the connection plane 1311 can be reflected. During the process of the suction part 130 contacting the inclined mask plate, when the suction part 130 just contacts the mask plate, the connection plane 1311 on one side close to the contact point will tilt, causing the distance between the clamping cover 135 and the leveling plate 134 on this side to decrease first, and the force sensor 137 on this side is triggered; during the process of the suction part 130 continuing to move towards the mask plate, the connection plane 1311 and the mask plate gradually become parallel, causing other force sensors 137 to be triggered. Furthermore, the force application point of the connection plane 1311 can be judged based on the number of triggered force sensors 137, and then the state of the suction part 130 sucking the mask plate can be judged.

[0117] Optionally, the number of the above-mentioned force sensors 137 can be 3, 4, 5 or more.

[0118] Preferably, the control part is respectively communicatively connected to each force sensor 137, so that the control part can obtain the state information of the suction part 130 sucking the mask plate through the triggering condition of the force sensor 137.

[0119] See Figures 1 to 14 , the embodiment of the second aspect of the present application also provides a method for using an exchange version manipulator, including the adjustment method of the exchange version manipulator described in any of the above embodiments to adjust all the above-mentioned suction parts 130 to the initial station 01. The method for using the exchange version manipulator has all the beneficial technical effects of the adjustment method of the exchange version manipulator, and will not be elaborated here.

[0120] The method for using the exchange version manipulator may further include the steps:

[0121] S020 Calibration step, marking the first deceleration station 02 and the second deceleration station 03 for each of the above-mentioned suction parts 130 one by one.

[0122] S030 Use step, adjusting the parameters of the control part so that when the suction part 130 moves to the first deceleration station 02, the falling speed of the suction part 130 is the first running speed, and when the suction part 130 moves to the second detection station, the falling speed of the suction part 130 is the second running speed.

[0123] According to the above technical features, the suction part 130 decelerates twice during the process of falling and picking up the mask plate. While ensuring the working efficiency of the suction part 130 performing the picking action, the impact force of the suction part 130 on the mask plate during the process of falling and contacting the mask plate is effectively reduced, and further damage to the mask plate during the process of the suction part 130 picking up the mask plate is avoided.

[0124] Preferably, the first operating speed is greater than the second operating speed to ensure the working efficiency of the suction unit 130 in performing the picking action.

[0125] Preferably, for each of the suction units 130, the S020 calibration step may further include:

[0126] S021 Mark the predetermined handover station 04, drive the suction unit 130 to fall at the first marking speed until one of the plurality of force sensors 137 is triggered. The control unit controls the suction unit 130 to stop moving and marks the position of the suction unit 130 at this time as the predetermined handover station 04. In this way, the position where the suction unit 130 just touches the reticle is set as the predetermined handover station 04, reducing the probability of damaging the reticle during the calibration process.

[0127] Preferably, the first marking speed can be 0.1 mm / s to ensure that the suction unit 130 can fall slowly during the marking of the predetermined handover station 04 and prevent the suction unit 130 from impacting the reticle during the marking process.

[0128] S022 Mark the handover station 04, drive the suction unit 130 to rise from the predetermined handover station 04 to the first calibration position, and make the suction unit 130 fall from the first calibration position at the second marking speed until two of the plurality of force sensors 137 are triggered. The control unit marks the position of the suction unit 130 at this time as the handover station 04.

[0129] Preferably, the distance between the first calibration position and the predetermined handover station 04 can be 1 mm, and the second marking speed can be 0.1 mm / s to ensure that the controller can accurately capture the position of the handover station 04 and ensure the contact safety between the suction unit 130 and the reticle.

[0130] S023 Mark the first deceleration station 02 and the second deceleration station 03. Taking the handover station 04 as a reference, mark the position above the handover station 04 and at a first deceleration distance from the handover station 04 as the first deceleration station 02, and mark the position above the handover station 04 and at a second deceleration distance from the handover station 04 as the second deceleration station 03.

[0131] Preferably, the above-mentioned first deceleration distance can be 7 mm to ensure that there is enough deceleration distance between the first deceleration station 02 and the handover station 04, further ensuring the picking safety of the suction unit 130.

[0132] Preferably, the second operating speed can be less than or equal to 0.1 mm / s.

[0133] Preferably, the second deceleration distance may be 0 to 0.8 mm.

[0134] Preferably, the second deceleration distance may be 0.5 mm.

[0135] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, rather than limiting them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. An adjustment method for an exchange version manipulator, characterized in that, The exchange version manipulator includes a rotating assembly, a placement part, and a plurality of suction parts. Each suction part includes a connection plane and a plurality of suction cups, and the plurality of suction cups are all arranged on the connection plane; The placement part includes a placement hole penetrating the placement part along a first direction. The rotating assembly penetrates the placement hole along the first direction, and the plurality of suction parts are all arranged at one end of the rotating assembly; The adjustment method of the exchange version manipulator includes the following steps: Adjust the levelness of each suction part one by one. Fit a leveling tool with a level to the connection plane, and adjust the levelness of the connection plane through the reading of the level, so that the levelness of the connection plane reaches a predetermined levelness range; Adjust the relative positions between the plurality of suction parts. Set a central marking hole group on each connection plane, and connect the positioning tooling to the central marking hole groups of the plurality of suction parts respectively; Adjust the rotating assembly to the initial position. Set a first initial positioning part on the end face of the rotating assembly where the suction part is located, and set a second initial positioning part on the side of the placement part where the suction part is located, so that the zeroing tooling is respectively connected to the first initial positioning part and the second initial positioning part; The leveling tooling includes a fitting convex part, and the fitting convex part includes a fitting surface. The leveling tooling is fitted to the connection plane through the fitting surface; the level is arranged parallel to the fitting surface; The leveling tooling further includes: A connecting part, arranged on the fitting surface, the connecting part is adapted to the central marking hole group and protrudes relative to the fitting surface; A marking platform, arranged parallel to the fitting surface, and the fitting convex part and the level are both arranged on the marking platform; The predetermined levelness includes X-direction levelness and Y-direction levelness. The number of levels is two. The first of the two levels extends along a second direction, and the first one is the Y-direction level for detecting the Y-direction levelness; the second of the two levels extends along a third direction, and the second one is the X-direction level for detecting the X-direction levelness; The central marking hole group includes a plurality of positioning holes extending along the first direction, and the plurality of positioning holes are arranged on the same positioning circle, and the center of the positioning circle is the center point of the connection plane; The positioning tooling includes a connecting plate part and a plurality of limiting parts. The number of the limiting parts is equal to the number of the suction parts, and the plurality of limiting parts are distributed on the same side of the connecting plate part according to the preset relative positions of the plurality of suction parts; Each limiting part can cooperate with the central marking hole group. When the positioning tooling is used, the plurality of limiting parts respectively correspond to the central marking hole groups of the suction parts one by one; The connecting plate part includes a connecting rod and a connecting platform. The number of the connecting rods and the number of the connecting platforms are both equal to the number of the limiting parts. The first ends of the plurality of connecting rods are connected to the same place, and the second ends of the connecting rods are connected to the connecting platform; The limiting parts are arranged on the same side of the connecting platform one by one, so that the plurality of limiting parts are coplanar.

2. The adjustment method for the exchange version manipulator according to claim 1, characterized in that, Before the step of adjusting the level of the suction part one by one, it also includes leveling the placement part and grinding the exchange plate manipulator to make the level of the placement part reach the predetermined level range; The predetermined level range is less than or equal to 100 μrad.

3. The adjustment method for the exchange version manipulator according to claim 1, characterized in that, The suction part includes: A leveling plate, A connecting part, which is oppositely arranged to the leveling plate in the first direction, and the connecting plane is the side of the connecting part facing away from the leveling plate; A clamping cover, which covers the connecting part, the rotating assembly penetrates through the clamping cover along the first direction and is connected to the leveling plate, and the leveling plate is arranged between the clamping cover and the connecting part; A plurality of leveling studs, which are arranged at one end of the clamping cover where the rotating assembly is located, and the leveling studs penetrate through the clamping cover along the first direction and abut against the leveling plate.

4. The adjustment method for the exchange version manipulator according to claim 1, characterized in that, The number of the first initial positioning parts is multiple, and the multiple first initial positioning parts are arranged at intervals along the radial direction of the end face of the rotating assembly; The zeroing tooling includes a diameter marking part and a clamping part connected to each other, the diameter marking part extends along a predetermined direction, and a plurality of positioning protrusions are arranged on one side of the diameter marking part, and the positioning protrusions are arranged at intervals along the predetermined direction; The clamping part is arranged at one end of the diameter marking part in the predetermined direction; when the zeroing tooling is used, the clamping part can clamp the second initial positioning part, and rotate the rotating assembly so that the positioning protrusion is in fit connection with the first initial positioning part, so that the first initial positioning part and the second initial positioning part are collinear.

5. A usage method for an exchange version manipulator, characterized in that, Including the adjustment method of the exchange plate manipulator according to any one of claims 1 to 4 to adjust all the plurality of suction parts to the initial working positions; The rotating assembly includes a rotating part and a plurality of lifting parts extending along the first direction, the lifting parts penetrate through the rotating part along the first direction, the rotating part is arranged in the placement hole, and the plurality of suction parts are correspondingly arranged on the plurality of lifting parts respectively, so that each suction part can lift relative to the placement part under the drive of the corresponding lifting part; The exchange plate manipulator further includes a control part, and the control part is respectively in communication connection with the rotating part and each lifting part; The usage method of the exchange plate manipulator further includes the steps: A calibration step of marking the first deceleration working position and the second deceleration working position for each of the plurality of suction parts one by one; A usage step of adjusting the parameters of the control part so that when the suction part moves to the first deceleration working position, the falling speed of the suction part is the first running speed, and when the suction part moves to the second deceleration working position, the falling speed of the suction part is the second running speed.

6. The method for using the exchangeable manipulator according to claim 5, wherein, Each suction part includes a plurality of force sensors, and the force sensors are used to detect the force point conditions of the connecting plane; The control part is respectively in communication connection with each force sensor; For each suction part, the calibration step further includes: Mark the predetermined handover station, drive the suction part to fall at the first marking speed until one of the plurality of force sensors is triggered, and the control part controls the suction part to stop moving and marks the position of the suction part at this time as the predetermined handover station; Mark the handover station, drive the suction part to rise from the predetermined handover station to the first calibration position, so that the suction part falls from the first calibration position at the second marking speed until two of the plurality of force sensors are triggered, and the control part marks the position of the suction part at this time as the handover station; Mark the first deceleration station and the second deceleration station. Based on the handover station, mark the position that is at a first deceleration distance from the handover station and above the handover station as the first deceleration station, and mark the position that is at a second deceleration distance from the handover station and above the handover station as the second deceleration station.

7. The method for using the exchangeable manipulator according to claim 6, wherein, The maximum values of the first marking speed, the second marking speed, and the second operating speed are all 0.1 mm / s, and the first operating speed is greater than the second operating speed; The distance between the first calibration position and the predetermined handover station is 1 mm; The first deceleration distance is 7 mm; The second deceleration distance is 0 to 0.8 mm, or the second deceleration distance is 0.5 mm.

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