Tft substrate glass deformation on-line detection and regulation system and working method thereof

Abstract

The application discloses a TFT substrate glass deformation on-line detection and regulation system and a working method thereof, comprising a forming furnace steel structure, a traction roller mechanism, a traction mechanism motor, a high-temperature thermometer and a measurement temperature module. The high-temperature thermometer is arranged on both sides of the forming furnace steel structure, the high-temperature thermometer is connected with the measurement temperature module, the traction mechanism motor is arranged at both ends of the forming furnace steel structure, and the traction mechanism motor is connected with the traction roller mechanism. The system can detect the non-flow direction and flow direction temperature difference ΔT change of the TFT substrate glass, give an early warning of glass deformation, adjust the temperature difference, adjust the position included angle θ0, and restore the glass deformation. The system has the technical advantages that the structure design and control method are reasonable, the deformation amount of the glass can be detected on-line in time, accurate regulation and control, early intervention, interruption of abnormal production is avoided, the production line can be stably operated, automatic and scientific management of the production line is facilitated, and quality fluctuation is prevented.

Description

Technical Field

[0001] This invention belongs to the field of overflow pull-down substrate glass manufacturing, specifically relating to an online detection and control system for TFT substrate glass deformation and its working method. Background Technology

[0002] During the TFT glass overflow pull-down process, after the glass leaves the tip of the overflow brick, the glass enters the thin-drawable zone, at which point the glass strip is pulled into shape by the traction mechanism.

[0003] During the formation of thin glass sheets, the temperature difference between the two sides of the furnace causes interactive changes in regional tensile and compressive stresses, resulting in stress and warping variations, i.e., glass deformation. Therefore, a certain bow shape needs to be maintained during the production and drawing of thin glass sheets. This bow shape is mainly manifested in the width direction (commonly known as the non-flow direction) and the length direction (commonly known as the flow direction). Current processes adjust the angle θ between the traction mechanism and the glass by deviating the rollers from the centerline by a certain angle to create the desired bow shape. However, with the increase in the sheet size of high-generation glass and the acceleration of the traction speed, the wear of the clamping mechanism increases during production, causing changes in the position angle θ, and increasing the difficulty of controlling glass deformation. Summary of the Invention

[0004] The purpose of this invention is to overcome the above-mentioned shortcomings and provide an online detection and control system for TFT substrate glass deformation and its working method. The system has a reasonable structural design and control method, which can detect the amount of glass deformation online in a timely manner, facilitate precise control, early intervention, prevent abnormal production interruptions, enable stable operation of the production line, facilitate automated and scientific management of the production line, and has the technical advantage of preventing quality fluctuations.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] An online detection and control system for deformation of TFT substrate glass includes a forming furnace steel structure, a traction roller mechanism, a traction mechanism motor, a high-temperature thermometer, and a temperature measurement module.

[0007] High-temperature thermometers are installed on both sides of the steel structure of the forming furnace, and the high-temperature thermometers are connected to the temperature measurement module.

[0008] Traction mechanism motors are installed at both ends of the steel structure of the forming furnace, and the traction mechanism motors are connected to the traction roller mechanism.

[0009] At least one row of elliptical grooves is provided on both sides of the steel structure of the forming furnace, with at least one elliptical groove in each row. The elliptical grooves are symmetrically arranged about the axis of the steel structure of the forming furnace. There are positioning holes in the elliptical grooves, and the high-temperature thermometer is set in the elliptical groove through the positioning holes.

[0010] The high-temperature thermometer is connected to the temperature measurement module via an electrical fiber optic cable. The operating temperature range of the high-temperature thermometer is 500-850℃.

[0011] The traction mechanism motor is located inside the traction mechanism base. A traction mechanism cooling cover is installed on the outside of the traction mechanism motor. One end of the traction mechanism cooling shaft is connected to the inside of the traction mechanism motor, and the other end of the traction mechanism cooling shaft is connected to the traction roller mechanism.

[0012] The traction roller mechanism consists of two traction roller mechanisms arranged symmetrically about the steel structure axis of the forming furnace and cooperating with each other.

[0013] Two sets of traction roller mechanisms are set at one end of the steel structure of the forming furnace. The two sets of traction roller mechanisms are set symmetrically. The same traction roller mechanisms are set symmetrically at the other end of the steel structure of the forming furnace. The traction roller mechanisms are set inside the steel structure of the forming furnace.

[0014] The traction mechanism bases at both ends of the steel structure of the forming furnace are symmetrically arranged, and the traction mechanism bases are located outside the steel structure of the forming furnace.

[0015] A method for operating a TFT substrate glass deformation online detection and control system includes the following steps:

[0016] S1: Record the temperature T on the left and right sides along the width of the glass. n Calculate the difference ΔT between its left and right sides. n , △T n =T n-1 -T n+1 ,n is the sequence number of the detection point in the non-flow direction, from left to right: 1, 2, 3, ..., n, △T n As a baseline control, namely the standard arc shape in the non-flow direction, the temperature T above and below the glass along its length is recorded. m Calculate the difference between its upper and lower values, ΔT. m , △T m =T m-1 -T m+1 ,m is the sequence number of the flow direction detection point, numbered 1, 2, 3, ..., m from front to back, △T m As a reference control, namely the standard arc shape in the flow direction, the angle θ0 between the center line of the traction roller mechanism and the glass is simultaneously calibrated as a reference control;

[0017] S2: Non-flowing glass deformation is characterized using measurement data from a high-temperature thermometer: △T 非流向n =△T n-1 -△T n+1 The temperature difference between the left and right positions of each equally spaced temperature measuring point in the non-flow direction is calculated and connected in sequence to form a curve, which is the morphological characterization of the non-flow direction of the glass. The temperature characterization when the product quality meets the shipping conditions is the standard non-flow temperature difference curve.

[0018] S3: The glass deformation in the flow direction is characterized using measurement data from a high-temperature thermometer: △T 流向m =△T m-1 -△T m+1 The temperature difference between the upper and lower positions of the equally spaced temperature measuring points in the same flow direction is calculated and connected in sequence to form a curve, which is the shape representation of the glass flow direction. The temperature representation when the product quality meets the shipping conditions is the standard flow direction temperature difference curve.

[0019] S4: Under the standard non-flowing temperature difference curve and the quasi-flowing temperature difference curve, define the position angle θ0 between the center line of the traction roller mechanism and the glass, and mark it as the standard position angle.

[0020] S5: Temperature difference △T 非流向n or △T 流向m When changes occur and the warning glass deforms, the temperature difference is adjusted, thereby adjusting the position angle θ0 to restore the glass to its original state.

[0021] This system can ensure that the deformation of non-flowing glass is controlled within 4mm and the deformation of flowing glass is controlled within 3mm. An alarm will be triggered if these values ​​are exceeded.

[0022] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0023] This invention discloses an online detection and control system for TFT substrate glass deformation. A high-temperature thermometer is reasonably installed on the steel structure of the forming furnace to accurately detect the temperature change of the glass strip. In conjunction with the temperature measurement module, traction roller mechanism, and traction mechanism motor, the system can detect and precisely control the deformation of the glass in a timely manner online. This allows for early prevention and intervention in the production line, eliminates abnormal production interruptions, ensures stable operation of the production line, facilitates automated and scientific management of the production line, and has the technical advantage of preventing quality fluctuations.

[0024] The system has a symmetrical overall structure, a reasonable layout, and a simple structure. Each traction roller mechanism is connected to a traction mechanism motor, making the control more sensitive and accurate.

[0025] The method of this invention measures the temperature difference between the non-flow direction and the flow direction of the TFT substrate glass, uses this system to warn of glass deformation, and adjusts the position angle θ0 by adjusting the temperature difference to restore the glass from deformation. This achieves the goal of controlling problems such as warping and stress caused by glass deformation. At the same time, it further enhances the accuracy and timeliness of detection and control, improves the level of automation, and effectively prevents quality fluctuations.

[0026] In addition, this system can ensure that the deformation of non-flowing glass is controlled within 4mm and the deformation of flowing glass is controlled within 3mm. If these values ​​are exceeded, the alarm system will issue an alarm, which further improves the stability of the system. Attached Figure Description

[0027] Figure 1 This is a schematic diagram showing the positions of the traction device and the glass belt of the present invention;

[0028] Figure 2 This is a schematic diagram of the installation of the high-temperature thermometer of the present invention;

[0029] Figure 3 Figure 1 shows the characterization of the non-flowing glass deformation of the glass edge plate of the present invention. Figure 2a shows the normal shape under non-flowing glass clamping, and Figure 3b shows the detection method of deformation under non-flowing glass clamping.

[0030] Figure 4 The present invention provides a schematic diagram of the deformation of non-flowing glass, wherein Figure a shows the normal shape under non-flowing glass clamping and Figure b shows the deformed shape under non-flowing glass clamping.

[0031] Figure 5 Figure a is a schematic diagram of the position angle between the traction roller mechanism and the glass plate of the present invention, wherein Figure a is a left view of the position angle between the traction roller mechanism and the glass plate, and Figure b is a partial front view of the position angle between the traction roller mechanism and the glass plate.

[0032] Figure 6 A schematic diagram illustrating the change in glass deformation in this invention;

[0033] In the diagram, 1-forming furnace steel structure; 2-traction roller mechanism; 3-traction mechanism cooling shaft; 4-traction mechanism base; 5-traction mechanism motor; 6-traction mechanism cooling cover; 7-elliptical groove; 8-high temperature thermometer; 9-electrical cable; 10-temperature measurement module; 11-positioning hole. Detailed Implementation

[0034] The following is in conjunction with the appendix Figure 1-6 The present invention will be further described below.

[0035] A TFT substrate glass deformation online detection and control system includes a forming furnace steel structure 1, a traction roller mechanism 2, a traction mechanism motor 5, a high temperature thermometer 8, and a temperature measurement module 10.

[0036] High-temperature thermometers 8 are installed on both sides of the steel structure 1 of the forming furnace, and the high-temperature thermometers 8 are connected to the temperature measurement module 10.

[0037] Traction mechanism motors 5 are installed at both ends of the steel structure 1 of the forming furnace, and the traction mechanism motors 5 are connected to the traction roller mechanism 2.

[0038] At least one row of elliptical grooves 7 is provided on both sides of the steel structure 1 of the forming furnace, and at least one elliptical groove 7 is provided in each row. The elliptical grooves 7 are symmetrically arranged about the axis of the steel structure 1 of the forming furnace. There are positioning holes 11 in the elliptical grooves 7, and the high temperature measuring instrument 8 is set in the elliptical grooves 7 through the positioning holes 11.

[0039] Preferably, the elliptical groove 7 is set according to the length of the glass.

[0040] Preferably, two positioning holes 11 are provided inside the elliptical groove 7.

[0041] The high-temperature thermometer 8 is connected to the temperature measurement module 10 via an electrical optical cable 9. The operating temperature of the high-temperature thermometer 8 is 500-850℃.

[0042] The traction mechanism motor 5 is located inside the traction mechanism base 4. A traction mechanism cooling cover 6 is provided on the outside of the traction mechanism motor 5. One end of the traction mechanism cooling shaft 3 is connected to the inside of the traction mechanism motor 5, and the other end of the traction mechanism cooling shaft 3 is connected to the traction roller mechanism 2.

[0043] Two traction roller mechanisms 2 are arranged as a group, and the two traction roller mechanisms 2 are symmetrically arranged about the axis of the forming furnace steel structure 1 and cooperate with each other.

[0044] Two sets of traction roller mechanisms 2 are set at one end of the forming furnace steel structure 1. The two sets of traction roller mechanisms 2 are symmetrically arranged. The same traction roller mechanisms 2 are symmetrically arranged at the other end of the forming furnace steel structure 1. The traction roller mechanisms 2 are located inside the forming furnace steel structure 1.

[0045] The traction mechanism bases 4 at both ends of the forming furnace steel structure 1 are symmetrically arranged, and the traction mechanism bases 4 are located outside the forming furnace steel structure 1.

[0046] A method for operating a TFT substrate glass deformation online detection and control system includes the following steps:

[0047] S1: Record the temperature T on the left and right sides along the width of the glass. n Calculate the difference ΔT between its left and right sides. n , △T n =T n-1 -T n+1 ,n is the sequence number of the detection point in the non-flow direction, from left to right: 1, 2, 3, ..., n, △T n As a baseline control, namely the standard arc shape in the non-flow direction, the temperature T above and below the glass along its length is recorded. m Calculate the difference between its upper and lower values, ΔT. m , △T m =T m-1 -T m+1 ,m is the sequence number of the flow direction detection point, numbered 1, 2, 3, ..., m from front to back, △T m As a reference control, namely the standard arc shape in the flow direction, the angle θ0 between the center line of the traction roller mechanism 2 and the glass is simultaneously calibrated as a reference control;

[0048] S2: The non-flowing glass deformation is characterized using measurement data from the high-temperature thermometer 8: △T非流向n =△T n-1 -△T n+1 The temperature difference between the left and right positions of each equally spaced temperature measuring point in the non-flow direction is calculated and connected in sequence to form a curve, which is the morphological characterization of the non-flow direction of the glass. The temperature characterization when the product quality meets the shipping conditions is the standard non-flow temperature difference curve.

[0049] S3: The glass deformation in the flow direction is characterized using measurement data from the high-temperature thermometer 8: △T 流向m =△T m-1 -△T m+1 The temperature difference between the upper and lower positions of the equally spaced temperature measuring points in the same flow direction is calculated and connected in sequence to form a curve, which is the shape representation of the glass flow direction. The temperature representation when the product quality meets the shipping conditions is the standard flow direction temperature difference curve.

[0050] S4: Under the standard non-flowing temperature difference curve and the quasi-flowing temperature difference curve, define the position angle θ0 between the center line of the traction roller mechanism 2 and the glass, and mark it as the standard position angle.

[0051] S5: Temperature difference △T 非流向n or △T 流向m When changes occur and the warning glass deforms, the temperature difference is adjusted, thereby adjusting the position angle θ0 to restore the glass to its original state.

[0052] Furthermore, the relative relationship between the temperature difference variation corresponding to different glass types and production line processes, the position angle θ0 between the center line of the traction roller mechanism 2 and the glass, and the amount of glass deformation is known.

[0053] Furthermore, this system can ensure that the deformation of non-flowing glass is controlled within 4mm and the deformation of flowing glass is controlled within 3mm, and an alarm will be triggered if these values ​​are exceeded.

[0054] Preferably, the high-temperature thermometer 8 collects temperature data in real time and transmits the data to the temperature measurement module via electrical cable 9. After further processing by the system, it issues a warning when glass deformation occurs. By adjusting the temperature difference within the furnace, the position angle θ0 is adjusted to restore the glass from deformation, thereby controlling warping, stress, and other problems caused by glass deformation. This system can detect the amount of glass deformation online in a timely manner, facilitating precise control, enabling early prevention and intervention on the production line, preventing abnormal production interruptions, ensuring stable production line operation, facilitating automated and scientific management of the production line, and possessing the technical advantage of preventing quality fluctuations.

[0055] Example:

[0056] When the glass is clamped by the traction mechanism, the temperature difference ΔT (°C) between the two sides of the glass plate is monitored as a process parameter to monitor the wear of the traction mechanism, i.e., the change in angle θ0. If θ0 wears out, the angle θ is adjusted (0.1° corresponds to 1.5°C of the temperature difference ΔT) to restore the glass to its original shape and size, i.e., minimal glass deformation, resulting in the best glass quality. Figure 6 As shown.

[0057] In summary, the above are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for operating a TFT substrate glass deformation online detection and control system, characterized in that: A TFT substrate glass deformation online detection and control system includes a molding furnace steel structure (1), a traction roller mechanism (2), a traction mechanism motor (5), a high temperature thermometer (8), and a temperature measurement module (10). High-temperature thermometers (8) are installed on both sides of the steel structure (1) of the forming furnace, and the high-temperature thermometers (8) are connected to the temperature measurement module (10). Traction mechanism motors (5) are installed at both ends of the steel structure (1) of the forming furnace, and the traction mechanism motors (5) are connected to the traction roller mechanism (2). A method for operating a TFT substrate glass deformation online detection and control system includes the following steps: S1: Record the temperature T on the left and right sides along the width of the glass. n Calculate the difference ΔT between its left and right sides. n , △T n =T n-1 -T n+1 ,n is the sequence number of the detection point in the non-flow direction, from left to right: 1, 2, 3, ..., n, △T n As a baseline control, a standard arc shape is used in the non-flow direction, while the temperature T above and below the glass along its length is recorded. m Calculate the difference between its upper and lower values, ΔT. m , △T m =T m-1 -T m+1 ,m is the sequence number of the flow direction detection point, numbered 1, 2, 3, ..., m from front to back, △T m As a reference control, namely the standard arc shape in the flow direction, the angle θ0 between the center line of the traction roller mechanism (2) and the glass is simultaneously calibrated as a reference control; S2: Non-flowing glass deformation is characterized using measurement data from a high-temperature thermometer (8): △T 非流向n =△T n-1 -△T n+1 The temperature difference between the left and right positions of each equally spaced temperature measuring point in the non-flow direction is calculated and connected in sequence to form a curve, which is the morphological characterization of the non-flow direction of the glass. The temperature characterization when the product quality meets the shipping conditions is the standard non-flow temperature difference curve. S3: The glass deformation in the flow direction is characterized by the measurement data of a high-temperature thermometer (8): △T 流向m =△T m-1 -△T m+1 The temperature difference between the upper and lower positions of the equally spaced temperature measuring points in the same flow direction is calculated and connected in sequence to form a curve, which is the shape representation of the glass flow direction. The temperature representation when the product quality meets the shipping conditions is the standard flow direction temperature difference curve. S4: Under the standard non-flowing temperature difference curve and the quasi-flowing temperature difference curve, define the position angle θ0 between the center line of the traction roller mechanism (2) and the glass, and mark it as the standard position angle; S5: Temperature difference △T 非流向n or △T 流向m When changes occur and the warning glass deforms, the temperature difference is adjusted, thereby adjusting the position angle θ0 to restore the glass to its original state.

2. The working method of the online detection and control system for deformation of TFT substrate glass as described in claim 1, characterized in that: At least one row of elliptical grooves (7) is provided on both sides of the steel structure (1) of the forming furnace, and at least one elliptical groove (7) is provided in each row. The elliptical grooves (7) are symmetrically arranged about the axis of the steel structure (1) of the forming furnace. There are positioning holes (11) in the elliptical grooves (7). The high temperature measuring instrument (8) is set in the elliptical grooves (7) through the positioning holes (11).

3. The working method of the online detection and control system for deformation of TFT substrate glass as described in claim 1 or 2, characterized in that: The high-temperature thermometer (8) is connected to the temperature measurement module (10) via an electrical optical cable (9), and the operating temperature of the high-temperature thermometer (8) is 500-850℃.

4. The working method of the online detection and control system for deformation of TFT substrate glass as described in claim 1, characterized in that: The traction mechanism motor (5) is located inside the traction mechanism base (4). A traction mechanism cooling cover (6) is provided on the outside of the traction mechanism motor (5). One end of the traction mechanism cooling shaft (3) is connected to the inside of the traction mechanism motor (5), and the other end of the traction mechanism cooling shaft (3) is connected to the traction roller mechanism (2).

5. The working method of the online detection and control system for deformation of TFT substrate glass as described in claim 1 or 4, characterized in that: The traction roller mechanism (2) consists of two rollers as a group. The two traction roller mechanisms (2) are symmetrically arranged about the axis of the forming furnace steel structure (1) and cooperate with each other.

6. The working method of the online detection and control system for deformation of TFT substrate glass as described in claim 1 or 4, characterized in that: Two sets of traction roller mechanisms (2) are provided at one end of the forming furnace steel structure (1). The two sets of traction roller mechanisms (2) are symmetrically arranged. The same traction roller mechanism (2) is symmetrically arranged at the other end of the forming furnace steel structure (1). The traction roller mechanism (2) is located inside the forming furnace steel structure (1).

7. The working method of the online detection and control system for deformation of TFT substrate glass as described in claim 4, characterized in that: The traction mechanism bases (4) at both ends of the forming furnace steel structure (1) are symmetrically arranged, and the traction mechanism bases (4) are located outside the forming furnace steel structure (1).

8. The working method of the online detection and control system for deformation of TFT substrate glass as described in claim 1, characterized in that: This system can ensure that the deformation of non-flowing glass is controlled within 4mm and the deformation of flowing glass is controlled within 3mm. An alarm will be triggered if these values ​​are exceeded.

Images