Circulation type ultrasonic scanning detection system

Abstract

The present invention relates to a circulating operation type ultrasonic scanning detection system. It comprises a scanning detection liquid tank, an ultrasonic scanning microscopic detection device and a sealing box circulating operation mechanism, wherein, for any device sealing box adapted to be connected to the sealing box circulating operation mechanism, the device sealing box is driven to circulate along the device loading and unloading area above the scanning detection platform, the scanning detection liquid tank, the sealing box deliquescence area above the scanning detection platform and the platform operation area inside the scanning detection platform. The present invention can effectively realize ultrasonic scanning detection of power semiconductor devices, improve the stability and reliability of ultrasonic scanning detection, reduce the cost of ultrasonic scanning detection, and has a high degree of automation.

Description

Technical Field

[0001] The invention relates to an ultrasonic scanning detection system, in particular to a circulating operation type ultrasonic scanning detection system. Background Art

[0002] Ultrasonic scanning is a very important means of detecting defects such as solder delamination, voids, and cracks inside power semiconductor devices. When performing ultrasonic scanning on power semiconductor devices, the power semiconductor device under test needs to be exposed to or immersed in a coupling medium. However, power semiconductor devices do not allow coupling media to enter their interior, so the device needs to be sealed and waterproofed, exposing only the part of the device used for ultrasonic scanning. The coupling medium is generally anhydrous alcohol or deionized water.

[0003] At present, when ultrasonic scanning is performed on power semiconductor devices, the loading and unloading methods of power semiconductor devices during scanning and testing are mainly: manual loading and unloading and robot loading and unloading. The following is a specific description of manual loading and unloading and robot loading and unloading.

[0004] When manual loading and unloading is adopted, the loading and unloading process includes:

[0005] 1) Place the power semiconductor device to be tested in a sealed box and lock it; 2) Manually place the sealed box on the ultrasonic scanning microscope inspection station and start scanning and inspecting the entire sealed box; 3) After the inspection is completed, use a water absorption tool to handle the residual water on the surface of the sealed box. The corresponding post-processing (such as drying operation, etc.) needs to be completed on a separate device; 4) Open the sealed box and take the device out of the sealed box.

[0006] From the above manual loading and unloading process, it can be seen that the main deficiencies are as follows:

[0007] 1) High labor intensity. For the sealed box containing the power semiconductor device to be tested, the operator uses a sliding rod device or directly places it in the ultrasonic scanning microscope detection station, which is labor-intensive.

[0008] 2) Waste of effective working time. After the ultrasonic scanning microscope test is completed, it is necessary to manually take out the sealed box containing the tested device, dry it, and then put the new power semiconductor device to be tested into the sealed box and place it in the ultrasonic scanning microscope test position. During the whole process, the ultrasonic scanning microscope is in a non-testing state.

[0009] 3) It does not have automation and integration functions. After the ultrasonic scanning test is completed, the residual coupling medium on the surface of the sealed box containing the power semiconductor device to be tested must be treated with a water absorption tool, and then the corresponding subsequent treatment (such as drying) must be carried out by independent equipment.

[0010] When robots are used for loading and unloading, the loading and unloading process includes:

[0011] 1) The robot grabs the power semiconductor device to be tested and places it in the fixture carrier at the detection position of the ultrasonic scanning microscope; 2) When the sample detection is completed, the robot takes the power semiconductor device out of the fixture carrier at the detection position.

[0012] From the above process of robot loading and unloading, we can see that the main shortcomings of robot loading and unloading are as follows:

[0013] 1) The types of devices that can be tested are limited. The robot cannot pick up the sealed box containing the power semiconductor device to be tested, so the equipment can only detect power semiconductor devices with waterproof performance.

[0014] 2) It is difficult to change models. Since the jig carrier for ultrasonic scanning microscope detection position, the fixture of the robot gripping device, and the corresponding operation control program all require a long time to switch, the equipment is only suitable for detecting large quantities of a single variety of power semiconductor devices.

[0015] 3) The production cycle is low. Due to the difference in the size of power semiconductor devices, the ultrasonic scanning microscope can simultaneously detect multiple devices within the effective detection range. For the power semiconductor devices to be tested, the robot can only be placed in the fixture carrier at the ultrasonic scanning microscope detection position.

[0016] 4) Waste of effective working time: after the ultrasonic scanning microscope inspection is completed, it is necessary to wait for the robot to take out the inspected device and then place the new device under test in the fixture carrier. During the whole process, the ultrasonic scanning microscope is in a stopped working state.

[0017] In summary, the current ultrasonic scanning detection of power semiconductor devices is difficult to meet actual testing needs. Summary of the invention

[0018] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a circulating ultrasonic scanning detection system, which can effectively realize ultrasonic scanning detection of power semiconductor devices, improve the stability and reliability of ultrasonic scanning detection, reduce the cost of ultrasonic scanning detection, and has a high degree of automation.

[0019] According to the technical solution provided by the present invention, the circulating operation type ultrasonic scanning detection system comprises:

[0020] A scanning and testing liquid tank, supported on the scanning and testing platform, for receiving a coupling medium, so as to form a coupling medium liquid pool for performing liquid immersion ultrasonic scanning testing on power semiconductor devices by utilizing the received coupling medium;

[0021] An ultrasonic scanning microscopic detection device, arranged on the scanning detection platform, is used to perform the required ultrasonic scanning detection on the power semiconductor device carried by the device sealing box and immersed in the coupling medium liquid pool;

[0022] The sealing box circulation operation mechanism is used for the operation of ultrasonic scanning and testing of at least one device sealing box, wherein:

[0023] For any device sealing box adapted to be connected to the sealing box circulating operation mechanism, the device sealing box is driven to circulate along the device loading and unloading area above the scanning and testing platform, the scanning and testing liquid tank, the sealing box deliquescence area above the scanning and testing platform, and the platform operation area inside the scanning and testing platform;

[0024] When the device sealing box passes through the device loading and unloading area, the device sealing box is loaded and unloaded as required;

[0025] When the device sealing box moves through the scanning and testing liquid tank, the power semiconductor device in the device sealing box is subjected to liquid immersion ultrasonic scanning by using an ultrasonic scanning microscopic testing device;

[0026] When the device sealing box moves through the sealing box deliquescence zone, the coupling medium carried on the surface of the device sealing box is removed.

[0027] The sealed box circulation operation mechanism includes a sealed box circulation conveying track adapted to the scanning detection platform and a sealed box transmission mechanism for driving the device sealed box to operate along the sealed box circulation conveying track, wherein:

[0028] The sealed box circulation conveying track includes symmetrically distributed conveying track bodies, the conveying track bodies are ring-shaped, and the length direction of the conveying track bodies is consistent with the length direction of the scanning and detection liquid tank;

[0029] For the conveying track body corresponding to the scanning and detecting liquid tank and located above the scanning and detecting platform, the conveying track body is fixed to the corresponding inner side wall of the scanning and detecting liquid tank.

[0030] The sealing box transmission mechanism includes a transmission connection body detachably connected to the device sealing box and a transmission drive unit for driving the transmission connection body to rotate in the conveying track body, wherein:

[0031] The transmission connection body corresponds to the conveying track body one by one;

[0032] When the transmission connector is adapted to be connected with the outer edge corresponding to the device sealing box, the device sealing box is driven to circulate along the sealing box circulatory conveying track by the transmission connector;

[0033] When the transmission connector is separated from the device sealing box, the device sealing box is configured to be loaded and unloaded, or the power semiconductor device in the device sealing box is subjected to the required ultrasonic scanning and detection.

[0034] The transmission connection body includes a transmission chain;

[0035] When the transmission connection body adopts a transmission chain, the transmission drive unit includes transmission sprockets respectively arranged at both ends of the conveying track body, and the transmission sprockets at both ends of the same conveying track body are adapted and connected through the corresponding transmission chain;

[0036] The driving sprockets at the same end of the two conveying track bodies are connected by adapting the driving sprocket shafts.

[0037] A buckle is arranged on the transmission chain, and a buckle opening groove is arranged on the buckle;

[0038] A plurality of sealing box hanging pins are arranged on the device sealing box, and the sealing box hanging pins can be embedded in the buckle opening groove, wherein:

[0039] The sealing box hook pin corresponds to the buckle opening groove on the buckle one by one. When the sealing box hook pin is embedded in the buckle opening groove, the device sealing box is adaptively connected to the transmission connecting body;

[0040] When the device sealing box is lifted up and the sealing box hanging pin is disengaged from the buckle opening groove, the device sealing box is separated from the transmission connecting body.

[0041] It also includes a plurality of follower guide cams adapted to be connected with the device sealing box, wherein:

[0042] The follower guide cam can be embedded in the track body guide groove in the corresponding conveying track body. When the device sealing box is driven by the transmission connecting body, the follower guide cam rolls in contact with the track body guide groove.

[0043] A track body limiting mechanism for limiting the position of the device sealing box is provided on the conveying track body, wherein:

[0044] The track body limiting mechanism includes a track rising limiting body corresponding to the track limiting groove provided on the conveying track body;

[0045] When the device sealing box is lifted, the follower guide cam can enter the track limit groove, and the track limit groove cooperates with the follower guide cam to limit the operation of the device sealing box, and the track rising limit body is used to limit the lifting of the device sealing box.

[0046] It also includes an infiltration impact spray mechanism for injecting coupling medium into the scanning detection liquid tank, wherein:

[0047] The infiltration impact spray mechanism is located at the junction area of ​​the device loading area and the scanning detection liquid tank, and the infiltration impact spray mechanism can also perform infiltration spray and impact spray of the coupling medium on the device sealing box entering the coupling medium liquid pool to remove bubbles on the surface of the device sealing box when it enters the coupling medium liquid pool.

[0048] The infiltration impact spray mechanism comprises:

[0049] The wetting unit is used to spray the coupling medium on the surface of the power semiconductor device before entering the coupling medium liquid pool, so as to use the sprayed coupling medium to wet the upper surface of the device sealing box;

[0050] The bubble impact unit is used to spray the coupling medium on the surface of the device sealing box after entering the coupling medium liquid pool to impact the bubbles attached to the surface of the power semiconductor device, wherein:

[0051] The flow rate of the coupling medium sprayed by the bubble impact unit is greater than the flow rate of the coupling medium sprayed by the infiltration unit.

[0052] The infiltration unit includes an infiltration shunt pipe and a plurality of infiltration nozzles arranged on the infiltration shunt pipe, wherein:

[0053] A plurality of infiltration nozzles are evenly distributed on the infiltration shunt pipe along the length direction of the infiltration shunt pipe, and the infiltration nozzles are connected to the infiltration shunt pipe;

[0054] The nozzle of the wetting nozzle is flat, wherein the length direction of the nozzle of the wetting nozzle is perpendicular to the running direction of the device sealing box.

[0055] It also includes a liquid storage box for providing the coupling medium required for ultrasonic scanning detection, wherein:

[0056] The liquid storage and receiving box is located in the scanning and testing platform, and the coupling medium in the liquid storage and receiving box is extracted and enters the scanning and testing liquid tank through the infiltration impact spray mechanism;

[0057] The coupling medium in the scanning and detecting liquid tank flows back into the liquid storage and receiving box through the liquid tank discharge ratio regulating valve, and the opening of the liquid tank discharge ratio regulating valve is adjusted based on the liquid level of the coupling medium in the scanning and detecting liquid tank, and the liquid tank discharge ratio regulating valve is used to adjust the state of the coupling medium in the scanning and detecting liquid tank flowing back into the liquid storage and receiving box.

[0058] Sealed box for any device, including:

[0059] The sealed box body is used to store power semiconductor devices, including a box body supported on the sealed box chain plate and a box cover hinged on the box body, wherein the box body can move on the sealed box chain plate;

[0060] The box body opening and locking mechanism is used to control the opening and locking of the device sealed box, is distributed on at least one side of the device sealed box, and is adapted to be connected with the box body and the box cover of the device sealed box, wherein:

[0061] When the box body opening locking mechanism drives the box body to move in the first direction on the sealing box chain plate, the sealing locking state between the box cover and the box body is released, so that the device sealing box is in an openable state;

[0062] When the device sealing box is closed, the box body opens and the locking mechanism drives the box body to move in the second direction on the sealing box chain plate to seal and lock the box cover on the box body;

[0063] The second direction in which the box body moves on the sealing box chain plate is opposite to the first direction in which the box body moves on the sealing box chain plate.

[0064] The box body opening and locking mechanism includes a slide groove fixing plate fixed on the sealing box chain plate, a slider body fixedly connected to the box body, a box body power mechanism for driving the slider body to move in the slide groove fixing plate, and a box cover connecting mechanism for controlling the position state of the box cover, wherein:

[0065] The slide groove fixing plate is located on the outer side of one end of the box body, and the box cover is adapted and connected to the slide groove fixing plate through a box cover connecting mechanism;

[0066] When the box body power mechanism drives the box body to move in the first direction through the slider body, the contact and matching state between the box cover and the slide groove fixing plate is gradually released through the box cover connecting mechanism;

[0067] When the device sealing box is closed, the box cover is adapted to be connected with the slide groove fixing plate through the box cover connecting mechanism. When the box body power mechanism drives the box body to move in the second direction through the slider body, the box cover utilizes the contact cooperation between the box cover connecting mechanism and the slide groove fixing plate to lock the box cover on the box body.

[0068] The box cover connection mechanism includes a box cover connecting rod distributed on the box cover and a box cover connecting rod groove arranged on the slide groove fixing plate, wherein:

[0069] The box cover connecting rod groove comprises a connecting rod inlet and outlet groove and a connecting rod locking groove connected with the connecting rod inlet and outlet groove, and the connecting rod inlet and outlet groove and the connecting rod locking groove are adapted to the box cover connecting rod;

[0070] When the box body moves in the first direction on the sealing box chain plate, the box cover connecting rod enters the connecting rod inlet and outlet groove from the connecting rod locking groove to release the locking state between the box cover and the box body;

[0071] When the box body moves in the second direction on the sealing box chain plate, the box cover connecting rod enters the connecting rod locking groove from the connecting rod inlet and outlet groove to lock the box cover to the box body.

[0072] The sealing box deliquoring area and the device loading and unloading area correspond to the two ends of the scanning and detection liquid tank respectively;

[0073] In the sealing box deliquating area, a plurality of air knife groups are arranged for blowing air and deliquating the device sealing box, wherein:

[0074] The wind knife group includes at least one wind knife for blowing air to the upper surface of the device sealing box and at least one wind knife for blowing air to the lower surface of the device sealing box at the same time, so as to use the gas blown by the wind knife to blow away the coupling medium carried on the surface of the device sealing box.

[0075] The advantages of the present invention are as follows: the device sealing box is driven to circulate along the device loading and unloading area above the scanning and testing platform, the scanning and testing liquid tank, the sealing box deliquidation area above the scanning and testing platform, and the platform operation area inside the scanning and testing platform; when the device sealing box runs through the device loading and unloading area, the required loading and unloading of the device sealing box is performed; when the device sealing box runs through the scanning and testing liquid tank, the power semiconductor device in the device sealing box is subjected to liquid immersion ultrasonic scanning by using an ultrasonic scanning microscopic detection device; when the device sealing box runs through the sealing box deliquidation area, the coupling medium carried on the surface of the device sealing box is removed, so that ultrasonic scanning detection of power semiconductor devices can be effectively realized, the stability and reliability of ultrasonic scanning detection are improved, the cost of ultrasonic scanning detection is reduced, and the degree of automation is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0076] Figure 1 A schematic diagram of an embodiment of the present invention.

[0077] Figure 2 It is a schematic diagram of an embodiment of the scanning detection liquid tank and the sealing box circulation conveying track of the present invention.

[0078] Figure 3 It is a schematic diagram of an embodiment of the circular conveying direction of the device sealing box of the present invention.

[0079] Figure 4 It is a schematic diagram of an embodiment of the cooperation between the device sealing box and the sealing box circulating conveying track of the present invention.

[0080] Figure 5 It is a schematic diagram of an embodiment of the device sealing box of the present invention.

[0081] Figure 6 It is a schematic diagram of an embodiment of the cooperation between the device sealing box, the sealing box circulating conveying track and the transmission chain of the present invention.

[0082] Figure 7 It is a schematic diagram of an embodiment of the cooperation between the buckle and the transmission chain of the present invention.

[0083] Figure 8It is a schematic diagram of an embodiment of the present invention in which the device sealing box cooperates with the lever power unit to realize opening and locking.

[0084] Fig. 9 for Figure 8 A schematic diagram of an embodiment in which the device sealing box is in an open state.

[0085] Fig.10 for Figure 8 A schematic diagram of an embodiment of the middle box opening locking mechanism.

[0086] Fig.11 It is a schematic diagram of an embodiment of the infiltration impact spray mechanism of the present invention.

[0087] Fig.12 for Fig.11 Side view of the mid-immersion impact spray mechanism.

[0088] Fig.13 for Fig.12 A schematic diagram of an embodiment of a medium bubble impact nozzle.

[0089] Explanation of the reference numerals: 1-scanning and testing platform, 2-sealed box circulating conveying track, 3-feeding area track bracket, 4-driven sprocket, 5-device sealing box, 6-infiltration impact spray mechanism, 7-ultrasonic scanning microscopic detection seat, 8-ultrasonic scanning detection head, 9-servo motor, 10-air knife, 11-de-liquidation area track bracket, 12-liquid tank discharge ratio regulating valve, 13-overflow reflux pipe, 14-liquid storage and collection box, 15-filter, 16-coupling medium pump, 17-scanning and testing platform pad, 18-scanning and testing liquid tank, 19-overflow tank, 20-push rod power unit, 21-driving sprocket, 22-transmission chain, 23-intermediate sprocket, 24-track rising limiter, 25-track limiter groove, 26-transmission track body, 27-track body guide groove, 28-follow-up guide cam, 29-seal box chain plate, 30-seal box body, 31-transmission sprocket shaft , 32-follow-up cam frame, 33-sealed box hook pin, 34-buckle, 35-buckle opening groove, 36-box body, 37-box cover, 38-box cover hole, 39-box cover connecting rod hole, 40-slider lever, 41-slide fixing plate, 42-box cover connecting rod groove, 43-power semiconductor device, 44-elastic body, 45-elastic fixing seat, 46-guide groove, 47-box body guide rod, 48-main body end block, 49-slider body slot, 50-box cover connecting rod, 51-slider body, 52-box body connecting column, 53-connecting rod locking slot, 54-bubble impact unit, 55-infiltration unit, 56-infiltration liquid inlet joint pipe, 57-impact liquid inlet joint pipe, 58-bubble impact nozzle, 59-connecting rod inlet and outlet slot, 60-infiltration shunt pipe, 61-bubble impact shunt pipe, 62-infiltration nozzle, 63-connector threaded pipe, 64-flat part, 65-spray bracket. DETAILED DESCRIPTION

[0090] The present invention will be further described below in conjunction with specific drawings and embodiments.

[0091] In order to effectively implement ultrasonic scanning detection of power semiconductor devices 43, improve the stability and reliability of ultrasonic scanning detection, and reduce the cost of ultrasonic scanning detection, a cyclic operation ultrasonic scanning detection system, in one embodiment of the present invention, includes:

[0092] The scanning and testing liquid tank 18 is supported on the scanning and testing platform 1 and is used to receive the coupling medium so as to form a coupling medium liquid pool for performing liquid immersion ultrasonic scanning and testing on the power semiconductor device 43 by using the received coupling medium;

[0093] An ultrasonic scanning microscopic detection device, arranged on the scanning detection platform 1, is used to perform the required ultrasonic scanning detection on the power semiconductor device 43 carried by the device sealing box 5 and immersed in the coupling medium liquid pool;

[0094] The sealing box circulation operation mechanism is used for the operation of at least one device sealing box 5 during ultrasonic scanning and detection, wherein:

[0095] For any device sealing box 5 that is adapted to be connected to the sealing box circulating operation mechanism, the device sealing box 5 is driven to circulate along the device loading and unloading area above the scanning and testing platform 1, the scanning and testing liquid tank 18, the sealing box deliquescence area above the scanning and testing platform 1, and the platform operation area inside the scanning and testing platform 1;

[0096] When the device sealing box 5 runs through the device loading and unloading area, the device sealing box 5 is loaded and unloaded as required;

[0097] When the device sealing box 5 runs through the scanning and testing liquid tank 18, the power semiconductor device in the device sealing box 5 is subjected to liquid immersion ultrasonic scanning by using an ultrasonic scanning microscopic testing device;

[0098] When the device sealing box 5 moves through the sealing box deliquescence zone, the coupling medium carried on the surface of the device sealing box 5 is removed.

[0099] The scanning and testing platform 1 is used to support the scanning and testing tank 18. The scanning and testing platform 1 can adopt an existing commonly used platform form to meet the needs of supporting the scanning and testing tank 18 and ultrasonic scanning and testing. A number of evenly distributed scanning and testing platform feet 17 and scanning and testing platform muffle wheels are set at the bottom of the scanning and testing platform 1, such as Figure 1As shown, the scanning and testing platform 1 can be supported by using the scanning and testing platform feet 17, so that the scanning and testing platform 1 can be stably placed in the desired position, and the scanning and testing platform 1 can be conveniently moved to the desired position by using the scanning and testing platform Muffle wheels.

[0100] The scanning detection liquid tank 18 is generally rectangular in shape. The scanning detection liquid tank 18 can store the coupling medium to form a coupling medium liquid pool in the scanning detection liquid tank 18, that is, the coupling medium liquid pool in the scanning detection liquid tank 18 is used to realize liquid immersion ultrasonic scanning detection of the power semiconductor device 43, and thus the power semiconductor device 43 can be subjected to ultrasonic scanning detection.

[0101] The power semiconductor device 43 can be an existing common power device, such as a MOSFET type device, an IGBT type device and other power device forms. The form of the power semiconductor device 43 can be selected as needed, so as to meet the requirements of ultrasonic scanning detection. In order to improve the efficiency of ultrasonic scanning detection of the power semiconductor device 43, the power semiconductor device 43 is sealed and stored using a device sealing box 5. Generally, the device sealing box 5 can store multiple power semiconductor devices 43 at a time. When multiple power semiconductor devices 43 are sealed and stored in the device sealing box 5, it specifically means that the power semiconductor device 43 is located in the device sealing box 5, and during ultrasonic scanning detection, it can meet the sealing requirements and expose the parts of the power semiconductor device 43 that need ultrasonic scanning detection. At this time, liquid will not enter the power semiconductor device 43. The liquid inflow refers to the coupling medium entering the power semiconductor device 43, and the coupling medium is the anhydrous alcohol or deionized water mentioned above.

[0102] In order to improve the stability of ultrasonic scanning detection, an ultrasonic scanning microscopic detection device is set on the scanning detection platform 1. The ultrasonic scanning microscopic detection device is fixedly assembled on the scanning detection platform 1. The ultrasonic scanning microscopic detection device can be used to perform the required ultrasonic scanning detection on the power semiconductor device 43 carried by the device sealing box 5 and immersed in the coupling medium liquid pool.

[0103] Figure 1 and Figure 3 In the figure, an embodiment of an ultrasonic scanning microscopic detection device is shown, wherein the ultrasonic scanning microscopic detection device includes an ultrasonic scanning microscopic detection seat 7 and an ultrasonic scanning detection head 8 arranged on the ultrasonic scanning microscopic detection seat 7, and the ultrasonic scanning microscopic detection seat 7 is fixed on the scanning detection platform 1 and spans the scanning detection liquid tank 18.

[0104] Figure 1 and Figure 3In the embodiment, two ultrasonic scanning detection heads 8 are arranged on the ultrasonic scanning microscopic detection seat 7, and each ultrasonic scanning detection head 8 is located directly above the scanning detection liquid tank 18. In the scanning detection liquid tank 18, the area directly corresponding to an ultrasonic scanning detection head 8 forms a scanning detection station. When the device sealing box 5 is located directly below an ultrasonic scanning detection head 8, the ultrasonic scanning detection head 8 can be used to realize ultrasonic scanning detection of the power semiconductor device 43 in the device sealing box 5. The method and process of ultrasonic scanning detection of the power semiconductor device 43 using the ultrasonic scanning detection head 8 can be consistent with the existing ones, so as to meet the required ultrasonic scanning detection. Of course, in the specific implementation, the number and distribution state of the ultrasonic scanning detection heads 8 on the ultrasonic scanning microscopic detection seat 7 can be selected according to actual needs, so as to meet the ultrasonic scanning detection of the power semiconductor device 43.

[0105] In order to improve the efficiency and automation of ultrasonic scanning detection, in one embodiment of the present invention, a sealing box circulation mechanism is used to circulate at least one device sealing box 5. When working, the sealing box circulation mechanism generally circulates multiple device sealing boxes 5 at the same time. Of course, when the device sealing box 5 is circulated, the device sealing box 5 needs to be connected with the sealing box circulation mechanism. The connection is specifically to meet the circulatory operation of the device sealing box 5.

[0106] According to the process of ultrasonic scanning and testing the power semiconductor device 43, the area where the device sealing box 5 circulates can generally include the device loading and unloading area, the scanning and testing liquid tank 18, the sealing box deliquescence area, and the platform operation area in the scanning and testing platform 1. Generally, the device loading and unloading area, the sealing box deliquescence area and the two ends of the scanning and testing liquid tank 18 correspond to each other.

[0107] When the device sealed box 5 is moved to the device loading and unloading area, the required loading and unloading can be performed, wherein loading refers to placing the power semiconductor device 43 into the device sealed box 5, and unloading refers to taking out the power semiconductor device 43 in the device sealed box 5. Moving the device sealed box 5 into the scanning and testing liquid tank 18 specifically refers to moving the device sealed box 5 to the scanning and testing station. Moving the device sealed box 5 to the sealed box deliquescence area specifically refers to removing the coupling medium on the device sealed box 5 that is moved out of the scanning and testing liquid tank 18, so as to avoid carrying the coupling medium to contaminate the environment of ultrasonic scanning and testing.

[0108] From the above description, it can be seen that the device loading and unloading area, the scanning and detection liquid tank 18, and the sealing box deliquidation area are all located on the scanning and detection platform 1. In order to realize the circulation operation, an intra-platform operation area is set in the scanning and detection platform 1. The intra-platform operation area corresponds to the device loading and unloading area, the scanning and detection liquid tank 18, and the sealing box deliquidation area, and the specific operation is based on whether the circulation operation can be achieved. Figure 3 FIG. 2 shows an embodiment of a circulation direction for circulating the device sealing box 5 .

[0109] When multiple device sealing boxes 5 are in circulation, when one device sealing box 5 is in the device loading and unloading area, another device sealing box 5 can be in the scanning and testing station in the scanning and testing liquid tank 18, the sealing box deliquidation area or in the operating area in the platform, which can effectively improve the efficiency of ultrasonic scanning detection.

[0110] In one embodiment of the present invention, the sealed box circulation operation mechanism includes a sealed box circulation conveying track 2 adapted to the scanning detection platform 1 and a sealed box transmission mechanism for driving the device sealed box 5 to operate along the sealed box circulation conveying track 2, wherein:

[0111] The sealed box circulation conveying track 2 includes a symmetrically distributed conveying track body 26, the conveying track body 26 is annular, and the length direction of the conveying track body 26 is consistent with the length direction of the scanning detection liquid tank 18;

[0112] The conveying track body 26 corresponding to the scanning and detecting liquid tank 18 and located above the scanning and detecting platform 1 is fixed to the corresponding inner wall of the scanning and detecting liquid tank 18 .

[0113] In order to meet the cyclic operation of multiple device sealing boxes 5, it is generally necessary to set a sealing box circulation conveying track 2. Figure 1 , Figure 2 , Figure 3 and Figure 4 , an embodiment of the sealed box circulating conveying track 2 is shown, that is, the sealed box circulating conveying track 2 includes symmetrically distributed conveying track bodies 26 , the two conveying track bodies 26 are parallel to each other and correspond to the two sides of the scanning detection liquid tank 18 .

[0114] In order to realize the circulation operation, the conveying track body 26 is annular. Figure 1 to Figure 4 In the embodiment, the cross section of the conveying track body 26 is elliptical. In order to immerse the device sealing box 5 in the coupling medium liquid pool during the circulation operation, the area of ​​the conveying track body 26 corresponding to the scanning and detecting liquid tank 18 is fixed to the inner side wall of the scanning and detecting liquid tank 18.

[0115] For the conveying track body 26 corresponding to the device loading and unloading area and the sealing box deliquoring area, a part thereof protrudes out of the scanning and detecting platform 1 , and a part thereof is located inside the scanning and detecting platform 1 . Figure 1 In the figure, the loading area track bracket 3 and the deliquescence area track bracket 11 are used to respectively realize the support and fixation of the conveying track body 26 corresponding to the device loading and unloading area and the sealing box deliquescence area. The support and fixation specifically refers to the ability to meet the assembly and fixation of the entire sealing box circulation conveying track 2, that is, to meet the circulation operation of the device sealing box 5.

[0116] In specific implementation, the ultrasonic scanning microscopic detection seat 7 is located between the device loading area and the sealing box deliquating area. Generally, the height of the device sealing box 5 in the device loading and unloading area and the sealing box deliquating area is higher than the height of the device sealing box 5 in the coupling medium liquid pool. Therefore, the conveying track body 26 is inclined in the combined area corresponding to the device loading and unloading area, the sealing box deliquating area and the scanning detection liquid tank 18.

[0117] In one embodiment of the present invention, a plurality of air knife groups for blowing air and removing liquid from the device sealing box 5 are arranged in the sealing box deliquating area, wherein:

[0118] The wind knife group includes at least one wind knife 10 for blowing air to the upper surface of the device sealing box 5 and at least one wind knife 10 for blowing air to the lower surface of the device sealing box 5 at the same time, so as to use the gas blown by the wind knife 10 to blow away the coupling medium carried on the surface of the device sealing box 5.

[0119] Figure 1 2 shows an embodiment of setting an air knife group in the deliquidation area of ​​the sealing box, and the air knife group is adapted and fixedly connected with the conveying track body 26 or the deliquidation area track bracket 11. The air knife group includes a plurality of air knives 10, and the plurality of air knives 10 can be used to remove the coupling medium carried by the scanning detection liquid tank 18 on the outer surface of the device sealing box 5, that is, to blow away the coupling medium.

[0120] In order to blow away the coupling medium on the device sealing box 5, an external high-pressure gas source is generally required, that is, the high-pressure gas source provides the high-pressure gas to be blown out by the air knife 10, and the coupling medium can be blown away by the blown high-pressure gas. The air knife 10 can adopt an existing commonly used form, specifically, it is based on the ability to blow out high-pressure gas and blow away the coupling medium on the device sealing box 5.

[0121] In specific implementation, the coupling medium blown away by the air knife group needs to be collected by a coupling medium collection box, and the collected coupling medium can eventually flow back to the liquid storage and collection box 14, so as to realize the circulation of the coupling medium and avoid polluting the on-site environment. The specific situation of the coupling medium collection box can be selected according to needs, so as to meet the collection of the blown coupling medium and flow back to the liquid storage and collection box 14.

[0122] In one embodiment of the present invention, the sealing box transmission mechanism includes a transmission connection body detachably connected to the device sealing box 5 and a transmission drive unit for driving the transmission connection body to rotate in the conveying track body 26, wherein:

[0123] The transmission connection body corresponds to the conveying track body 26 one by one;

[0124] When the transmission connector is adapted to be connected with the outer edge corresponding to the device sealing box 5, the transmission connector is used to drive the device sealing box 5 to circulate along the sealing box circulation conveying track 2;

[0125] When the transmission connector is separated from the device sealing box 5 , the device sealing box 5 is configured to be loaded and unloaded, or the power semiconductor device 43 in the device sealing box 5 is subjected to the required ultrasonic scanning detection.

[0126] In specific implementation, the device sealing box 5 is driven to circulate along the sealing box circulating conveying track 2 by the sealing box transmission mechanism, wherein the sealing box transmission mechanism is adaptively connected to the device sealing box 5 through a transmission connector, and the movement of the transmission connector is driven by the transmission drive unit.

[0127] The transmission connection body corresponds to the conveying track body 26 one by one. As can be seen from the above description, the sealed box circulation conveying track 2 composed of two conveying track bodies 26 also has two transmission connection bodies. The two transmission connection bodies are detachably connected to the device sealed box 5, and the position where the transmission connection body is connected and matched with the device sealed box 5 is generally located at the outer edge of the device sealed box 5.

[0128] It can be seen from the above description that when multiple device sealed boxes 5 are circulated, different device sealed boxes 5 generally need to be in different areas or states. Therefore, when a device sealed box 5 needs to maintain a circulated operation state, it is necessary to maintain the adaptive connection state between the device sealed box 5 and the transmission connection body. When loading and unloading or ultrasonic scanning detection is required, since the device sealed box 5 needs to be in a relatively static state at this time, that is, it needs to be separated from the transmission connection body, after separation, it will not affect the circulated operation state of other device sealed boxes 5, thereby improving the efficiency and automation of detection.

[0129] In one embodiment of the present invention, the transmission connection body includes a transmission chain 22;

[0130] When the transmission connection body adopts a transmission chain 22, the transmission drive unit includes transmission sprockets respectively arranged at both ends of the conveying track body 26, and the transmission sprockets at both ends of the same conveying track body 26 are adapted and connected through the corresponding transmission chain 22;

[0131] The transmission sprockets at the same end of the two conveying track bodies 26 are adapted to be connected via a transmission sprocket shaft 31 .

[0132] Figure 1 to Figure 4 In the figure, an embodiment of the transmission connection body using a transmission chain 22 is shown. Of course, the transmission connection body can also adopt other forms, such as a transmission form such as a belt, which can be selected according to needs. The two transmission chains 22 correspond to the two conveying track bodies 26 respectively, and the transmission chains 22 are generally located in the conveying track body 26.

[0133] When the transmission connection body adopts the transmission chain 22, the transmission drive unit includes a transmission sprocket, and a transmission sprocket is arranged at both ends of each conveying track body 26, and the transmission sprockets at both ends of the conveying track body 26 are adapted and connected through the corresponding transmission chain 22. In order to drive the rotation of the transmission sprocket, Figure 1 In the scanning and detection platform 1, a servo motor 9 for providing power is arranged, and the servo motor 9 corresponds to the transmission sprocket of the sealing box deliquidation area. At this time, the transmission sprocket of the sealing box deliquidation area forms the driving sprocket 21, and the transmission sprocket of the device loading and unloading area forms the driven sprocket 4.

[0134] The two driving sprockets 21 and the two driven sprockets 4 are respectively connected by a transmission sprocket shaft 31, so that a servo motor 9 can simultaneously drive the driving sprocket 21 and the driven sprocket 4 to rotate, so as to drive the transmission chain 22 to move after rotation. After the transmission chain 22 moves, the circulation operation of the driving adapter connection device sealing box 5 can be realized. Figure 2 When the transmission chain 22 is relatively long, it can generally be transferred through the intermediate sprocket 23 to improve the stability and reliability of the cyclic operation of the device sealing box 5 driven by the transmission chain 22.

[0135] In order to realize the detachable connection between the device sealing box 5 and the transmission chain 22, in one embodiment of the present invention, a buckle 34 is provided on the transmission chain 22, and a buckle opening groove 35 is provided on the buckle 34;

[0136] A plurality of sealing box hanging pins 33 are arranged on the device sealing box 5, and the sealing box hanging pins 33 can be embedded in the buckle opening groove 35, wherein:

[0137] The sealing box hanging pin 33 corresponds to the buckle opening groove 35 on the buckle 34 one by one. When the sealing box hanging pin 33 is embedded in the buckle opening groove 35, the device sealing box 5 is adaptively connected to the transmission connecting body;

[0138] When the device sealing box 5 is lifted up and the sealing box hanging pin 33 is disengaged from the buckle opening groove 35, the device sealing box 5 is separated from the transmission connecting body.

[0139] Figure 5 , Figure 6 and Figure 7 In the embodiment, a buckle 34 is provided on one side of the transmission chain 22 , and the buckle 34 is connected to the transmission chain 22 , and the buckle 34 is on the transmission chain 22 , so as not to affect the movement of the transmission chain 22 and to be adaptably connected to the device sealing box 5 .

[0140] Generally, the device sealing box 5 is rectangular, and four evenly and symmetrically distributed sealing box hanging pins 33 are arranged on the device sealing box 5, and one sealing box hanging pin 33 corresponds to one buckle 34. Therefore, when a device sealing box 5 is adapted to be connected with a transmission chain 22, two buckles 34 need to be arranged on one transmission chain 22, and the two buckles 34 on the same transmission chain 22 correspond to the sealing box hanging pin 33 at the same end of the device sealing box 5. Generally, the length direction of the sealing box hanging pin 33 is perpendicular to the length direction of the transmission chain 22.

[0141] A buckle opening groove 35 is provided in the buckle 34, and the opening direction of the buckle opening groove 35 is based on the convenience of embedding the sealing box hanging pin 33 and the support of the sealing box hanging pin 33 by the bottom of the buckle opening groove 35. In specific implementation, when the sealing box hanging pin 33 is located in the buckle opening groove 35, the device sealing box 5 is adapted to be connected with the transmission chain 22. When the sealing box hanging pin 33 is withdrawn or disengaged from the buckle opening groove 35, the separation of the device sealing box 5 from the transmission chain 22 is achieved.

[0142] In one embodiment of the present invention, a plurality of follower guide cams 28 are also included which are adapted to be connected to the device sealing box 5, wherein:

[0143] The follower guide cam 28 can be embedded in the track body guide groove 27 in the corresponding conveying track body 26. When the device sealing box 5 is driven by the transmission connection body, the follower guide cam 28 rolls in contact with the track body guide groove 27.

[0144] In order to ensure that the device sealed box 5 circulates along the sealed box circulating conveying track 2, a track body guide groove 27 is provided in each conveying track body 26, and the track body guide groove 27 is distributed along the conveying track body 26. A follower guide cam 28 is provided on the device sealed box 5. Generally, a corresponding follower guide cam 28 is provided at each of the four end corners of the device sealed box 5. The follower guide cam 28 is adapted and connected to the device sealed box 5 through a follower cam frame 32, and the follower guide cam 28 can rotate relative to the follower cam frame 32. Of course, in a specific implementation, the sealed box hook pin 33 can also be provided on the follower cam frame 32.

[0145] When the device sealed box 5 is in circulation, the follower guide cam 28 is located in the track body guide groove 27 and is in rolling contact with the track body guide groove 27. That is, the follower guide cam 28 and the track body guide groove 27 are in rolling contact with each other to guide the circulation of the device sealed box 5, so as to ensure that the device sealed box 5 is in circulation along the sealed box circulation conveying track 2. Figure 6 shown.

[0146] In one embodiment of the present invention, a track body limiting mechanism for limiting the position of the device sealing box 5 is provided on the conveying track body 26, wherein:

[0147] The track body limiting mechanism includes a track rising limiting body 24 corresponding to a track limiting groove 25 provided on a conveying track body 26;

[0148] When the device sealing box 5 is lifted, the follower guide cam 28 can enter the track limit groove 25, and the track limit groove 25 cooperates with the follower guide cam 28 to limit the operation of the device sealing box 5, and the track rising limit body 24 is used to limit the lifting of the device sealing box 5.

[0149] As can be seen from the above description, when the circulating device sealing box 5 needs to be separated from the transmission chain 22, the device sealing box 5 generally needs to be lifted up so that the sealing box hanging pin 33 can be withdrawn or disengaged from the buckle opening groove 35 after the lifting up.

[0150] In order to ensure the reliability of lifting the device sealing box 5, it is necessary to use a track body limiting mechanism for limiting, which includes limiting the lifting and limiting the movement of the device sealing box 5 after lifting. The movement limit after lifting specifically refers to preventing the device sealing box 5 from following the movement of the transmission chain 22 in the lifting state.

[0151] Figure 1 , Figure 2 and Figure 4 In the figure, an embodiment of a track body limiting mechanism is shown. Specifically, a track limiting groove 25 and a track rising limiting body 24 corresponding to the track limiting groove 25 are provided on the conveying track body 26. Generally, the track limiting groove 25 is provided in a position area where the device sealing box 5 needs to be lifted and separated from the transmission chain 22, such as the device loading and unloading area and the scanning and detection station mentioned above.

[0152] As can be seen from the above description, two follower guide cams 28 are provided at each end of the device sealing box 5. Therefore, in the corresponding area, two track limit grooves 25 need to be provided on a conveying track body 26. When the device sealing box 5 is lifted, the follower guide cam 28 on the device sealing box 5 is aligned with the track limit groove 25, and the follower guide cam 28 can enter the track limit groove 25. At this time, the lifting limit of the follower guide cam 28 can be achieved by using the track lifting limit body 24, and the separation between the device sealing box 5 and the transmission chain 22 can be ensured. The cooperation between the track limit groove 25 and the follower guide cam 28 can avoid malfunction caused by the contact between the device sealing box 5 and the transmission chain 22.

[0153] When lifting the device sealing box 5, a cylinder or the like can be used. The lifting method of the device sealing box 5 can be selected according to the needs, so as to meet the lifting of the device sealing box 5. When the device sealing box 5 needs to be operated, the lifting of the device sealing box 5 is removed. At this time, the follower guide cam 28 can be withdrawn from the track limit groove 25 and resume rolling contact with the track body guide groove 27.

[0154] In specific implementation, the movement of the transmission chain 22 can be configured to control the device sealing box 5 to be adapted and connected with the transmission chain 22 again, that is, to allow the sealing box hanging pin 33 to extend into the buckle opening groove 35 of a buckle 34 again. The above process is repeated cyclically to realize the cyclic operation of the device sealing box 5 and the separation from the transmission chain 22 during the cyclic operation to meet the requirements of loading, unloading and ultrasonic scanning detection.

[0155] In one embodiment of the present invention, it further comprises an infiltration impact spray mechanism 6 for injecting coupling medium into the scanning detection liquid tank 18, wherein:

[0156] The infiltration impact spray mechanism 6 is located at the junction area of ​​the device loading area and the scanning detection liquid tank 18, and the infiltration impact spray mechanism 6 can also perform infiltration spray and impact spray of the coupling medium on the device sealing box 5 entering the coupling medium liquid pool to remove bubbles on the surface of the device sealing box 5 when it enters the coupling medium liquid pool.

[0157] During the ultrasonic scanning detection process, the coupling medium in the scanning detection tank 18 will be in a dynamic change process. In order to improve the reliability of ultrasonic scanning detection, the device sealing box 5 entering the coupling medium liquid pool must ensure that there are no bubbles in the ultrasonic scanning part of the power semiconductor device 43, that is, it is necessary to avoid the presence of bubbles affecting the effect of ultrasonic scanning detection. In order to achieve the desired purpose, an infiltration impact spray mechanism 6 is set at the first end of the scanning detection tank 18, and the infiltration impact spray mechanism 6 is used to infiltrate and impact the surface of the power semiconductor device 43 entering the coupling medium liquid pool, so as to reduce or avoid the presence of bubbles in the power semiconductor device 43 after entering the coupling medium liquid pool. Of course, in the specific implementation, the coupling medium in the scanning detection tank 18 is also injected through the infiltration impact spray mechanism 6.

[0158] In order to realize the circulation of coupling medium, an embodiment of the present invention further includes a liquid storage tank 14 for providing coupling medium required for ultrasonic scanning detection, wherein:

[0159] The liquid storage and receiving box 14 is located in the scanning and testing platform 1, and the coupling medium in the liquid storage and receiving box 14 is extracted and enters the scanning and testing liquid tank 18 through the infiltration impact spray mechanism 6;

[0160] The coupling medium in the scanning and detecting liquid tank 18 flows back into the liquid storage and receiving tank 14 through the liquid tank discharge proportional regulating valve 12, and the opening of the liquid tank discharge proportional regulating valve 12 is adjusted based on the liquid level of the coupling medium in the scanning and detecting liquid tank 18, so that the liquid tank discharge proportional regulating valve 12 regulates the state of the coupling medium in the scanning and detecting liquid tank 18 flowing back into the liquid storage and receiving tank 14.

[0161] In order to make the coupling medium liquid pool in the scanning and testing liquid tank 18 meet the requirements of ultrasonic scanning and testing, a liquid storage and receiving box 14 is provided in the scanning and testing platform 1. At this time, the liquid storage and receiving box 14 is located below the scanning and testing liquid tank 18. The liquid storage and receiving box 14 is used to store the coupling medium, and the stored coupling medium includes the coupling medium injected from the outside and the coupling medium circulated and refluxed during the scanning and testing process.

[0162] After the coupling medium is sprayed on the device sealing box 5, the coupling medium sprayed by the infiltration impact spray mechanism 6 will enter the scanning detection liquid tank 18. At this time, the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 18 will change. In order to improve the stability of the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 18, the coupling medium in the scanning detection liquid tank 18 can be released and flowed back into the liquid storage tank 14 by using the liquid tank discharge ratio regulating valve 12. At this time, the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 18 can reach a dynamic balance, such as Figure 1 shown.

[0163] In specific implementation, the liquid tank discharge proportional regulating valve 12 can adopt an existing commonly used proportional regulating solenoid valve. The opening of the liquid tank discharge proportional regulating valve 12 is related to the liquid level of the coupling medium in the scanning detection liquid tank 18. For example, a reference liquid level can be set for the coupling medium liquid pool in the scanning detection liquid tank 18. When the liquid level of the coupling medium liquid pool is higher than the reference liquid level, the opening of the liquid tank discharge proportional regulating valve 12 is increased. Otherwise, the opening of the liquid tank discharge proportional regulating valve 12 is maintained or reduced, specifically so that the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 18 can be kept stable and the power semiconductor device 43 can be located in the coupling medium liquid pool for the required ultrasonic scanning detection.

[0164] The liquid level in the scanning and detecting liquid tank 18 can be detected by using a scanning and detecting liquid tank level meter. The scanning and detecting liquid tank level meter can adopt existing commonly used forms. For example, the scanning and detecting liquid tank level meter can be used to detect the lowest liquid level, the highest liquid level or the real-time liquid level in the scanning and detecting liquid tank 18. The liquid level in the scanning and detecting liquid tank 18 detected by the scanning and detecting liquid tank level meter can be selected according to needs, so as to meet the purpose of dynamically controlling the dynamic balance of the liquid level of the coupling medium liquid pool in the scanning and detecting liquid tank 18 by using the liquid tank discharge ratio regulating valve 12.

[0165] Figure 1 , Figure 2 and Figure 3The scanning detection liquid tank 18 also includes an overflow tank 19 corresponding to the scanning detection liquid tank 18. The overflow tank 19 can be used to store the overflow coupling medium. The coupling medium stored in the overflow tank 19 can flow back to the liquid storage tank 14 through the overflow return pipe 13.

[0166] In specific implementation, the coupling medium sprayed by the infiltration impact spray mechanism 6 is provided by the liquid storage and liquid collection box 14, and a coupling medium pump 16 is provided in the scanning detection platform 1. The coupling medium in the liquid storage and liquid collection box 14 is extracted by the coupling medium pump 16, and the extracted coupling medium is sent to the infiltration impact spray mechanism 6 for spraying. In order to improve the reliability of ultrasonic scanning detection, when the coupling medium is extracted by the coupling medium pump 16, the filter 15 is used to filter it to prevent impurities from entering the scanning detection liquid tank 18.

[0167] like Fig.11 As shown, in one embodiment of the present invention, the infiltration impact spray mechanism 6 includes:

[0168] The wetting unit 55 is used to spray the coupling medium on the surface of the power semiconductor device before entering the coupling medium liquid pool, so as to use the sprayed coupling medium to wet the upper surface of the device sealing box 5;

[0169] The bubble impact unit 54 is used to spray the coupling medium on the surface of the device sealing box 5 after entering the coupling medium liquid pool to impact the bubbles attached to the surface of the power semiconductor device, wherein:

[0170] The flow rate of the coupling medium sprayed by the bubble impact unit 54 is greater than the flow rate of the coupling medium sprayed by the infiltration unit 55 .

[0171] During ultrasonic scanning detection, the power semiconductor device 43 needs to be located in the coupling medium liquid pool through the device sealing box 5, that is, the ultrasonic scanning part of the power semiconductor device 43 is located below the liquid surface of the coupling medium liquid pool. In order to avoid the influence of bubbles attached to the surface of the power semiconductor device 43 on the ultrasonic scanning detection, before the power semiconductor device 43 enters the coupling medium liquid pool, the coupling medium is first sprayed on the upper surface of the device sealing box 5 by the infiltration unit 55. At this time, the sprayed coupling medium will also cover the surface of the power semiconductor device 43, and the sprayed coupling medium and the coupling medium liquid pool can be of the same type.

[0172] After the wetting unit 55 sprays the coupling medium on the surface of the power semiconductor device 43, it wets the surface of the power semiconductor device 43 to smooth and even the surface of the power semiconductor device 43, and prevents the power semiconductor device 43 from entering the coupling medium liquid pool with a dry surface. This can avoid the problem caused by the dry surface of the power semiconductor device 43 entering the coupling medium liquid pool, that is, when entering the coupling medium liquid pool, it can reduce the bubbles attached to the surface of the power semiconductor device 43.

[0173] After the power semiconductor device 43 enters the coupling medium liquid pool, since there may be a small amount of bubbles adsorbed on the surface of the power semiconductor device 43, at this time, the bubble impact unit 54 is used to spray the surface of the power semiconductor device 43, and the sprayed coupling medium is used to impact the bubbles attached to the surface of the power semiconductor device 43, further eliminating the bubbles attached to the surface of the power semiconductor device 43, thereby improving the reliability of the power semiconductor device 43 in ultrasonic scanning detection.

[0174] In specific implementation, the coupling medium sprayed by the bubble impact unit 54 is generally the same as the coupling medium sprayed by the immersion unit 55 and the coupling medium in the coupling medium liquid pool. The flow rate and flow velocity of the coupling medium sprayed by the bubble impact unit 54 are greater than the corresponding flow rate and flow velocity of the coupling medium sprayed by the immersion unit 55. The corresponding flow rate and flow velocity of the coupling medium sprayed by the immersion unit 55 and the bubble impact unit 54 are specifically related to the speed at which the power semiconductor device enters the coupling medium liquid pool, etc. The specific flow rate and flow velocity are set to meet the requirement of effectively removing bubbles attached to the surface of the power semiconductor device 43. Specifically, a proportional valve or the like can be used to control the corresponding flow rate and flow velocity of the coupling medium sprayed by the immersion unit 55 and the bubble impact unit 54.

[0175] In one embodiment of the present invention, the infiltration unit 55 and the bubble impact unit 54 are mounted on the spray bracket 65, wherein:

[0176] The spray bracket 65 spans across the end of the scanning and detecting liquid tank 18 to fix the infiltration and impact spray mechanism 6 to the end of the scanning and detecting liquid tank 18;

[0177] The infiltration unit 55 and the bubble impact unit 54 are distributed on both sides of the spray bracket 65, and the infiltration unit 55 and the bubble impact unit 54 are parallel to each other;

[0178] When spraying the coupling medium, the infiltration unit 55 sprays above the liquid surface of the coupling medium liquid pool in the scanning and detecting liquid tank 18 , and the bubble impact unit 54 sprays below the liquid surface of the coupling medium liquid pool in the scanning and detecting liquid tank 18 .

[0179] Fig.11 and Fig.12 , a schematic diagram of an embodiment of the cooperation between the infiltration unit 55 and the bubble impact unit 54 and the spray bracket 65 is shown. The infiltration unit 55 and the bubble impact unit 54 are distributed on both sides of the spray bracket 65. The corresponding length directions of the infiltration unit 55 and the bubble impact unit 54 are consistent with the length direction of the spray bracket 65. The infiltration unit 55 and the bubble impact unit 54 are parallel to each other. When the infiltration unit 55 and the bubble impact unit 54 are fixed to the spray bracket 65, the spray bracket 65 can be adapted to connect with the scanning detection liquid tank 18.

[0180] In order to improve the reliability of spraying, the immersion unit 55 sprays the coupling medium above the liquid surface of the coupling medium liquid pool, while the bubble impact unit 54 sprays below the liquid surface of the coupling medium liquid pool. When the bubble impact unit 54 is arranged to spray below the liquid surface of the coupling medium liquid pool, air can be prevented from being brought into the coupling medium liquid pool.

[0181] In one embodiment of the present invention, the bubble impact unit 54 includes a bubble impact shunt pipe 61 and a plurality of bubble impact nozzles 58 disposed on the bubble impact shunt pipe 61, wherein:

[0182] A plurality of bubble impact nozzles 58 are evenly distributed on the bubble impact shunt pipe 61 along the length direction of the bubble impact shunt pipe 61 , and the bubble impact nozzles 58 and the bubble impact shunt pipe 61 are interconnected.

[0183] Fig.11 and Fig.12 In the embodiment, the main body of the spray bracket 65 is columnar, and the bubble impact unit 54 includes a bubble impact shunt pipe 61 and a plurality of bubble impact nozzles 58. The bubble impact shunt pipe 61 is tubular, and a columnar pipe similar to the spray bracket 65 can be used. The specific shape of the bubble impact shunt pipe 61 can be selected as required. The bubble impact shunt pipe 61 is fixedly attached to one side of the spray bracket 65, and the length direction of the bubble impact shunt pipe 61 is consistent with the length direction of the spray bracket 65.

[0184] The plurality of bubble impact nozzles 58 are evenly distributed along the length direction of the bubble impact shunt pipe 61, so that the plurality of bubble impact nozzles 58 can be used to spray a plurality of power semiconductor devices at a time. Of course, the distribution of the bubble impact nozzles 58 on the bubble impact shunt pipe 61 can be selected as required to meet the required spraying requirements. The bubble impact nozzles 58 are connected to the bubble impact shunt pipe 61, so the coupling medium to be sprayed needs to first enter the bubble impact shunt pipe 61 and then be sprayed out by the bubble impact nozzles 58.

[0185] In order to improve the efficiency of installation and replacement of the bubble impact nozzle 58, a joint threaded tube 63 is provided on the bubble impact shunt tube 61, and the bubble impact nozzle 58 is threadedly connected with the joint threaded tube 63 in a threaded manner, so that after being connected and matched with the joint threaded tube 63, it is connected with the bubble impact shunt tube 61. Of course, the bubble impact nozzle 58 can also adopt other forms of connection and matching with the bubble impact shunt tube 61, which can be selected according to needs, so as to meet the requirements of quick and convenient connection and matching between the bubble impact nozzle 58 and the bubble impact shunt tube 61.

[0186] In order to improve the spraying effect, the nozzle of the bubble impact nozzle 58 is flat, wherein the length direction of the nozzle of the bubble impact nozzle 58 is perpendicular to the movement direction of the device sealing box 5 gradually entering the coupling medium liquid pool.

[0187] In one embodiment of the present invention, the bubble impact nozzle 58 has a flat portion 64, and the flat portion 64 is located at the head of the bubble impact nozzle 58, so that the nozzle of the bubble impact nozzle 58 is flat. When the nozzle of the bubble impact nozzle 58 is flat, the length direction of the nozzle of the bubble impact nozzle 58 is perpendicular to the movement direction of the power semiconductor device gradually entering the coupling medium liquid pool. Fig.13 In the embodiment, the length direction of the nozzle of the bubble impact nozzle 58 is consistent with the length direction of the bubble impact diverter pipe 61.

[0188] In one embodiment of the present invention, the infiltration unit 55 includes an infiltration shunt pipe 60 and a plurality of infiltration nozzles 62 disposed on the infiltration shunt pipe 60, wherein:

[0189] A plurality of wetting nozzles 62 are evenly distributed on the wetting manifold 60 along the length direction of the wetting manifold 60 , and the wetting nozzles 62 and the wetting manifold 60 are interconnected.

[0190] In a specific implementation, the nozzle of the immersion nozzle 62 is flat, wherein the length direction of the nozzle of the immersion nozzle 62 is perpendicular to the movement direction of the device sealing box 5 gradually entering the coupling medium liquid pool. The specific conditions of the immersion shunt pipe 60 and the immersion nozzle 62 can refer to the corresponding description of the above-mentioned bubble impact shunt pipe 61 and the bubble impact nozzle 58, that is, the same matching form as the bubble impact unit 54 can be adopted, which will not be repeated here.

[0191] Fig.12 , a schematic diagram of the height of the wetting nozzle 62 and the bubble impact nozzle 58 on both sides of the spray bracket 65 is shown, and the height difference between the wetting nozzle 62 and the bubble impact nozzle 58 is utilized to meet the above-mentioned coupling medium spraying. Fig.12 The height difference H in the figure can be selected according to actual needs, so as to meet the requirement of spraying the coupling medium onto the surface of the power semiconductor device.

[0192] Fig.11 In the embodiment, an infiltration liquid inlet joint tube 56 is provided on the infiltration shunt tube 60, and an impact liquid inlet joint tube 57 is provided on the bubble impact shunt tube 61, and the infiltration liquid inlet joint tube 56 and the impact liquid inlet joint tube 57 are used to receive the extracted coupling medium.

[0193] In one embodiment of the present invention, a sealing box 5 for any device includes:

[0194] The sealed box body 30 is used to store the power semiconductor device 43, and includes a box body 36 supported on the sealed box chain plate 29 and a box cover 37 hinged on the box body 36, wherein the box body 36 can move on the sealed box chain plate 29;

[0195] The box body opening and locking mechanism is used to control the opening and locking of the device sealed box 5, and is distributed on at least one side of the device sealed box 5, and is adaptively connected with the box body 36 and the box cover 37 of the device sealed box 5, wherein:

[0196] When the box body opening locking mechanism drives the box body 36 to move in the first direction on the sealing box chain plate 29, the sealing locking state between the box cover 37 and the box body 36 is released, so that the device sealing box 5 is in an openable state;

[0197] When the device sealing box 5 is closed, the box body opens and the locking mechanism drives the box body 36 to move in the second direction on the sealing box chain plate 29, so as to seal and lock the box cover 37 on the box body 36;

[0198] The second direction in which the box body 36 moves on the sealing box chain plate 29 is opposite to the first direction in which the box body 36 moves on the sealing box chain plate 29 .

[0199] Figure 8 to Figure 10 In the device sealing box 5 shown in the figure, the follower guide cam 28, the sealing box hanging pin 33, etc. are hidden, that is, only the sealing of the power semiconductor device 43 by the device sealing box 5, and the locking and opening of the device sealing box 5 during operation are shown. For the specific coordination with the follower guide cam 28, the sealing box hanging pin 33, etc., please refer to the above description and will not be repeated here.

[0200] In a specific implementation, the sealed box body 30 of the device sealed box 5 includes a box body 36 and a box cover 37, the box cover 37 is hinged to the box body 36, when the box cover 37 is pressed on the box body 36, the sealed box is in a closed state, and when the box cover 37 is pulled away from the box body 36, the device sealed box 5 is in an open state. In an embodiment of the present invention, the box body 36 is arranged on a sealed box chain plate 29, and the sealed box chain plate 29 is in a flat plate shape, and the sealed box body 30 can be supported by the sealed box chain plate 29.

[0201] In order to meet the opening and locking requirements of the device sealing box 5 in an automatic state, the box body 36 can move on the sealing box chain plate 29. The movement of the box body 36 on the sealing box chain plate 29 is movement along the first direction or the second direction, that is, the box body 36 can reciprocate on the sealing box chain plate 29.

[0202] It can be seen from the above description that during the ultrasonic scanning and detection of the power semiconductor device 43 in the sealed box, the device sealed box 5 needs to be in a locked state; and when the power semiconductor device 43 is assembled in the device sealed box 5 or taken out of the device sealed box 5, the locked state of the device sealed box 5 needs to be released. In order to meet the adjustment and control of the opening or locking state of the device sealed box 5, it is necessary to use the box body opening locking mechanism to cooperate with the sealed box chain plate 29 and the device sealed box 5, that is, to use the box body opening locking mechanism to realize the opening or locking of the device sealed box 5. Here, the opening or locking of the device sealed box 5 specifically refers to the opening or locking of the sealed box body 30, and the same is true below.

[0203] In one embodiment of the present invention, opening the device sealing box 5 at least includes releasing the locking state of the sealing box. Of course, it is also possible to drive the box cover 37 and the box body 36 to separate after releasing the locking state. The specific selection can be based on actual needs to meet the control of the working state of the device sealing box 5.

[0204] It can be seen from the above description that the reciprocating motion of the box body 36 on the sealed box chain plate 29 is the motion in the first direction or the motion in the second direction after the motion in the first direction. The reciprocating motion of the box body 36 on the sealed box chain plate 29 is powered by the box body opening locking mechanism. In specific implementation, the box body 36 moves in the first direction on the sealed box chain plate 29, which is the motion direction of releasing the locked state of the box cover 37 and the box body 36, and the box body 36 moves in the second direction on the sealed box chain plate 29, which is the motion of the box cover 37 locked on the box body 36. Through the movement of the box body 36 on the sealed box chain plate 29, and the cooperation with the box body 36 and the box cover 37, the working state of the sealed box can be effectively controlled to meet the ultrasonic scanning detection requirements of the power semiconductor device 43, and improve the efficiency and automation of ultrasonic scanning detection.

[0205] In one embodiment of the present invention, the box body opening and locking mechanism includes a slide groove fixing plate 41 fixed on the sealing box chain plate 29, a slider body fixedly connected to the box body 36, a box body power mechanism for driving the slider body to move in the slide groove fixing plate 41, and a box cover connecting mechanism for controlling the position state of the box cover 37, wherein:

[0206] The slide groove fixing plate 41 is located outside one end of the box body 36, and the box cover 37 is adaptively connected to the slide groove fixing plate 41 through a box cover connecting mechanism;

[0207] When the box body power mechanism drives the box body 36 to move in the first direction through the slider body, the contact and matching state between the box cover 37 and the slide groove fixing plate 41 is gradually released through the box cover connection mechanism;

[0208] When the device sealing box 5 is closed, the box cover 37 is adapted to be connected with the slide groove fixing plate 41 through the box cover connecting mechanism. When the box body power mechanism drives the box body 36 to move in the second direction through the slider body, the box cover 37 utilizes the contact cooperation between the box cover connecting mechanism and the slide groove fixing plate 41 to lock the box cover 37 on the box body 36.

[0209] Figure 8 and Fig. 9 In the illustrated embodiment, the box body 36 and the box cover 37 are both in the shape of a rectangular parallelepiped. Of course, the corresponding shapes of the box body 36 and the box cover 37 are based on the requirements for sealing and accommodating the power semiconductor device 43 . Figure 8 and Fig. 9 In the embodiment, a plurality of box cover holes 38 are provided on the box cover 37, and the ultrasonic scanning part of the power semiconductor device 43 sealed and stored in the sealed box is exposed by using the box cover holes 38. In a specific implementation, the box cover holes 38 pass through the box cover 37, and the number and distribution of the box cover holes 38 on the box cover 37 are based on the requirements of storing the power semiconductor device 43 and ultrasonic scanning of the power semiconductor device 43 during ultrasonic scanning detection.

[0210] Of course, in the specific implementation, when the corresponding ultrasonic scanning part of the power semiconductor device 43 is exposed by utilizing the box cover hole 38, it is still necessary to maintain a sealed state, that is, to prevent liquids such as water from entering the box body 36 through the box cover hole 38. The method for maintaining the sealed state can adopt existing commonly used technical means, such as providing a sealing ring in the inner circle of the box cover hole 38 or other sealing forms, and the specific sealing form shall be based on whether it can meet the requirements of sealed storage.

[0211] Figure 8 and Fig. 9 In the figure, a case where a box body opening and locking mechanism is provided at both ends of the sealed box body 30 is shown. When a box body opening and locking mechanism is provided at both ends of the sealed box body 30, the stability and reliability when the sealed box is opened or locked can be improved. Generally, the box body opening and locking mechanisms at both ends of the sealed box body 30 can adopt the same form.

[0212] In one embodiment of the present invention, the slide groove fixing plate 41 is fixed on the sealing box chain plate 29 and is located outside the corresponding end of the sealing box body 30. The slider body is fixed to the box body 36 and is adaptively connected to the slide groove fixing plate 41. The box body power mechanism can provide power for the slider body to move in the slide groove fixing plate 41, that is, it also provides power for the box body 36 to move on the sealing box chain plate 29.

[0213] The box cover 37 is connected with the slide groove fixing plate 41 at one end of the sealed box through the box cover connection mechanism. When there are two box bodies opening locking mechanisms, the box cover 37 is connected with the corresponding slide groove fixing plates 41 at both ends of the sealed box through the two box cover connection mechanisms. The contact connection state between the box cover connection mechanism and the slide groove fixing plate 41 is used to realize the locking state between the box cover 37 and the box body 36, or release the locking state between the box cover 37 and the box body 36.

[0214] In one embodiment of the present invention, the box cover connection mechanism includes a box cover connecting rod 50 distributed on the box cover 37 and a box cover connecting rod groove 42 arranged on the slide groove fixing plate 41, wherein:

[0215] The box cover connecting rod groove 42 includes a connecting rod inlet and outlet groove 59 and a connecting rod locking groove 53 connected to the connecting rod inlet and outlet groove 59. The connecting rod inlet and outlet groove 59 and the connecting rod locking groove 53 are adapted to the box cover connecting rod 50.

[0216] When the box body 36 moves in the first direction on the sealing box chain plate 29, the box cover connecting rod 50 enters the connecting rod inlet and outlet groove 59 from the connecting rod locking groove 53 to release the locking state between the box cover 37 and the box body 36;

[0217] When the box body 36 moves in the second direction on the sealing box chain plate 29 , the box cover connecting rod 50 enters the connecting rod locking groove 53 from the connecting rod entry and exit groove 59 to lock the box cover 37 to the box body 36 .

[0218] Fig.10 , an embodiment using the cooperation between the box cover connection mechanism and the slide slot fixing plate 41 is shown, a box cover connecting rod groove 42 is provided on the slide slot fixing plate 41, and a box cover connecting rod 50 corresponding to the box cover connecting rod groove 42 is provided on the box cover 37. When there are slide slot fixing plates 41 on both sides of the box cover 37, two box cover connecting rods 50 need to be provided on the box cover 37, and the box cover connecting rod 50 is fixedly assembled on the box cover 37 through the box cover connecting rod hole 39 on the box cover 37. Generally, the two box cover connecting rods 50 on the box cover 37 are coaxially distributed. The axial direction of the box cover connecting rod 50 is perpendicular to the direction of reciprocating motion of the box body 36 on the sealing box chain plate 29.

[0219] In one embodiment of the present invention, the box cover connecting rod groove 42 includes a connecting rod inlet and outlet groove 59 and a connecting rod locking groove 53, the connecting rod inlet and outlet groove 59 and the connecting rod locking groove 53 are interconnected, and the box cover connecting rod groove 42 formed by the connecting rod inlet and outlet groove 59 and the connecting rod locking groove 53 is L-shaped in the slide groove fixing plate 41. The connecting rod inlet and outlet groove 59 and the connecting rod locking groove 53 are adapted to the box cover connecting rod 50, specifically, the box cover connecting rod 50 can be embedded in the connecting rod inlet and outlet groove 59 and the connecting rod locking groove 53, and can move along the connecting rod inlet and outlet groove 59 and the connecting rod locking groove 53.

[0220] Fig.10 In the embodiment, the connecting rod in-and-out groove 59 is obliquely distributed on the slide groove fixing plate 41, and the opening of the connecting rod in-and-out groove 59 is at the end surface of the slide groove fixing plate 41 away from the sealing box chain plate 29. The notch of the connecting rod in-and-out groove 59 is located on the upper side of the slide groove fixing plate 41. When the box cover 37 needs to be locked on the box body 36, the box cover connecting rod 50 enters the connecting rod locking groove 53 through the connecting rod in-and-out groove 59; when the locking state of the box cover 37 and the box body 36 is released and the box cover 37 is opened, the box cover connecting rod 50 enters the connecting rod in-and-out groove 59 through the connecting rod locking groove 53, and is separated from the slide groove fixing plate 41 through the connecting rod in-and-out groove 59.

[0221] As can be seen from the above description, the locked state of the box cover 37 and the box body 36 is released to prepare for opening the sealed box. When opening the sealed box, the box cover 37 can be manually pulled to separate the box cover 37 from the box body 36, or other opening forms that separate the box cover 37 from the box body 36 are used. The specific way to open the sealed box can be selected according to actual needs to meet the requirements of opening the sealed box. A box cover handle groove is provided on the box cover 37. When manually opening the sealed box, the box cover handle groove can be used to conveniently pull the box cover 37.

[0222] In one embodiment of the present invention, the slider body includes a slider body 51 and a body end block 48 disposed on the slider body 51, wherein:

[0223] The slider body 51 is embedded in the slider body groove 49 in the slide groove fixing plate 41, and the slider body 51 is fixedly connected to the end of the adjacent box body 36, and the slider body 51 can move in the slider body groove 49;

[0224] The box body power mechanism is connected through the main body end block 48, and drives the slider body 51 to move in the slider body groove 49 through the main body end block 48, so as to drive the box body 36 to move in the first direction or the second direction through the slider body 51.

[0225] Fig.10 , wherein the slider body includes a slider body 51 and a body end block 48, wherein the width of the body end block 48 is smaller than the width of the slider body 51. The slider body 51 is embedded in the slider body groove 49, and the body end block 48 is located outside the slide groove fixing plate 41. The movement direction of the slider body 51 in the slider body groove 49 is the first direction or the second direction in which the box body 36 moves on the sealing box chain plate 29.

[0226] The box body 36 is fixedly connected to the slider body, specifically, the box body 36 is fixedly connected to the slider body 51. Fig.10, it is shown that the end of the box body 36 is fixedly connected to the slider body 51 by the box body connecting column 52. The box body connecting column 52 can be a commonly used bolt or the like. When the box body 36 is fixedly connected to the slider body 51 by the box body connecting column 52, the movement of the slider body 51 in the slider body groove 49 is not affected; that is, it can ensure that the movement of the slider body 51 drives the box body 36 to move on the sealing box chain plate 29.

[0227] The box body power mechanism is connected to the slider body, specifically, the box body power mechanism is fixedly connected to the main body end block 48. Figure 8 to Figure 10 An embodiment of the box body power mechanism is shown in FIG. 1 , specifically, the box body power mechanism includes a slider lever 40 and a lever power unit 20 for providing power, wherein:

[0228] The slider lever 40 is fixedly connected to the slider body, and the lever power unit 20 drives the slider body to move through the slider lever 40 .

[0229] In the embodiment of the present invention, the lever power unit 20 can be in the form of an existing commonly used air cylinder, oil cylinder, etc. that can provide linear motion. The specific form of the lever power unit 20 can be selected according to needs to meet the reciprocating motion of the drive box body 36 on the sealing box chain plate 29. The lever power unit 20 contacts the main body end block 48 through the slider lever 40. Figure 1 In the figure, an embodiment is shown in which the lever power unit 20 is installed on the sealing box circulating conveying track 2 in the device loading and unloading area. The lever power unit 20 can provide power for opening or locking all the device sealing boxes 5 in the device loading and unloading area.

[0230] In one embodiment of the present invention, when the box body 36 moves on the sealing box chain plate 29, the box body movement guiding mechanism is used to guide the movement of the box body 36.

[0231] Specifically, the box body movement guide mechanism includes a box body movement guide groove 46 provided on the slide groove fixing plate 41 and a box body guide rod 47 fixedly connected to the end of the box body 36, wherein:

[0232] The length direction of the box body movement guide groove 46 is consistent with the first direction or the second direction of movement of the box body 36. The box body guide rod 47 is embedded in the box body movement guide groove 46 and can move along the length direction of the box body movement guide groove 46. In specific implementation, the box body movement guide mechanism can guide the movement of the box body 36 on the sealing box chain plate 29, thereby improving the stability and reliability of the movement of the box body 36.

[0233] Fig.10, an implementation of the box body motion guide mechanism is shown in FIG. 4 , in which two box body motion guide grooves 46 are provided on a slide groove fixing plate 41, and the box body motion guide grooves 46 are located at both ends of the slide groove fixing plate 41 adjacent to the box body 36, and the slider body 51 is located between the two box body motion guide grooves 46. The box body motion guide grooves 46 are elliptical. In each box body motion guide groove 46, a box body guide rod 47 corresponding to the end of the box body 36 is allowed to be embedded, and the box body guide rod 47 can move in the box body motion guide groove 46. That is, when the box body 36 moves on the sealing box chain plate 29, the movement of the box body guide rod 47 in the box body motion guide groove 46 is used to achieve the movement guidance of the box body 36.

[0234] In one embodiment of the present invention, a box body elastic mechanism is provided on the sealing box chain plate 29, wherein:

[0235] The box body elastic mechanism includes an elastic fixing seat 45 disposed on the sealing box chain plate 29 and an elastic body 44 disposed on the elastic fixing seat 45, one end of the elastic body 44 is connected to the elastic fixing seat 45, and the other end of the elastic body 44 is fixedly connected to the box body 36;

[0236] When the box body 36 moves in the first direction, the box body 36 causes the elastic body 44 to be in a compressed state;

[0237] The elastic body 44 in the compressed state provides a force for the box body 36 to move in the second direction.

[0238] Figure 8 and Fig. 9 2 shows an embodiment of a box body elastic mechanism provided on the sealing box chain plate 29, the box body elastic mechanism is symmetrically distributed on the sealing box chain plate 29 and corresponds to the two ends of the box body 36. The elastic fixing seat 45 in the box body elastic mechanism is fixed on the sealing box chain plate 29 and is located outside the box body 36. Two elastic bodies 44 are provided on each elastic fixing seat 45. The elastic body 44 can be a commonly used elastic component such as a spring, and the form of the elastic body 44 can be selected according to actual needs.

[0239] In a specific implementation, when the box body 36 moves in the first direction, that is, the box body 36 moves in the direction close to the elastic fixing seat 45, at this time, the box body 36 compresses the elastic body 44. When the box body 36 moves in the second direction, the box body 36 moves in the direction away from the elastic fixing seat 45. At this time, the elastic force of the elastic body 44 in the compressed state can be used to push the box body 36 to move, thereby improving the sealing efficiency of the sealing box.

Claims

1. A circulating ultrasonic scanning detection system, characterized in that: include: A scanning detection liquid tank (18) supported on the scanning detection platform (1) and used to receive a coupling medium, so as to use the received coupling medium to form a coupling medium liquid pool for performing liquid immersion ultrasonic scanning detection on a power semiconductor device (43); An ultrasonic scanning microscopic detection device, arranged on the scanning detection platform (1), and used to perform the required ultrasonic scanning detection on the power semiconductor device (43) carried by the device sealing box (5) and immersed in the coupling medium liquid pool; The sealing box circulation operation mechanism is used for operating when performing ultrasonic scanning detection on at least one device sealing box (5), wherein: For any device sealing box (5) that is adaptably connected to the sealing box circulating operation mechanism, the device sealing box (5) is driven to circulate along the device loading and unloading area above the scanning and testing platform (1), the scanning and testing liquid tank (18), the sealing box deliquescence area above the scanning and testing platform (1), and the platform operation area inside the scanning and testing platform (1); When the device sealing box (5) moves through the device loading and unloading area, the device sealing box (5) is loaded and unloaded as required; When the device sealing box (5) moves through the scanning detection liquid tank (18), an ultrasonic scanning microscopic detection device is used to perform liquid immersion ultrasonic scanning on the power semiconductor device in the device sealing box (5); When the device sealing box (5) moves through the sealing box deliquescence zone, the coupling medium carried on the surface of the device sealing box (5) is removed; The sealed box circulating operation mechanism comprises a sealed box circulating conveying track (2) adapted to the scanning detection platform (1) and a sealed box transmission mechanism for driving the device sealed box (5) to operate along the sealed box circulating conveying track (2), wherein: The sealed box circulation conveying track (2) comprises symmetrically distributed conveying track bodies (26), the conveying track bodies (26) are ring-shaped, and the length direction of the conveying track bodies (26) is consistent with the length direction of the scanning detection liquid tank (18); A conveying track body (26) corresponding to the scanning and testing liquid tank (18) and located above the scanning and testing platform (1), wherein the conveying track body (26) is fixed to a corresponding inner wall of the scanning and testing liquid tank (18); The sealing box transmission mechanism comprises a transmission connection body detachably connected to the device sealing box (5) and a transmission drive unit for driving the transmission connection body to rotate in a conveying track body (26), wherein: The transmission connection body and the conveying track body (26) are in one-to-one correspondence; When the transmission connection body is adapted to be connected to the corresponding outer edge of the device sealing box (5), the transmission connection body is used to drive the device sealing box (5) to circulate along the sealing box circulatory conveying track (2); When the transmission connector is separated from the device sealing box (5), the device sealing box (5) is configured to be loaded and unloaded, or the power semiconductor device (43) in the device sealing box (5) is subjected to the required ultrasonic scanning test.

2. The circulating ultrasonic scanning detection system according to claim 1 is characterized in that: The transmission connection body comprises a transmission chain (22); When the transmission connection body adopts a transmission chain (22), the transmission drive unit includes transmission sprockets respectively arranged at two ends of the conveying track body (26), and the transmission sprockets at two ends of the same conveying track body (26) are adaptively connected through the corresponding transmission chain (22); The transmission sprockets at the same end of the two conveying track bodies (26) are adapted to be connected via a transmission sprocket shaft.

3. The circulating operation type ultrasonic scanning detection system according to claim 2 is characterized in that: A buckle (34) is provided on the transmission chain (22), and a buckle opening groove (35) is provided on the buckle (34); A plurality of sealing box hanging pins (33) are provided on the device sealing box (5), and the sealing box hanging pins (33) can be embedded in the buckle opening grooves (35), wherein: The sealing box hanging pin (33) and the buckle opening groove (35) on the buckle (34) are in one-to-one correspondence, and when the sealing box hanging pin (33) is embedded in the buckle opening groove (35), the device sealing box (5) is adaptively connected to the transmission connecting body; When the device sealing box (5) is lifted and the sealing box hanging pin (33) is disengaged from the buckle opening groove (35), the device sealing box (5) is separated from the transmission connection body.

4. The circulating operation type ultrasonic scanning detection system according to claim 3 is characterized in that: It also includes a plurality of follower guide cams (28) adapted to be connected to the device sealing box (5), wherein: The follower guide cam (28) can be embedded in a track body guide groove (27) in a corresponding conveying track body (26); when the device sealing box (5) is driven to operate by the transmission connection body, the follower guide cam (28) is in rolling contact with the track body guide groove (27) where it is located.

5. The circulating operation type ultrasonic scanning detection system according to claim 4 is characterized in that: The conveying track body (26) is provided with a track body limiting mechanism for limiting the position of the device sealing box (5), wherein: The track body limiting mechanism comprises a track rising limiting body (24) which corresponds to a track limiting groove (25) formed on the conveying track body (26); When the device sealing box (5) is lifted, the follower guide cam (28) can enter the track limit groove (25), and the track limit groove (25) cooperates with the follower guide cam (28) to limit the operation of the device sealing box (5), and the track lifting limit body (24) limits the lifting of the device sealing box (5).

6. The circulating operation type ultrasonic scanning detection system according to any one of claims 1 to 5, characterized in that: It also includes an infiltration impact spray mechanism (6) for injecting a coupling medium into the scanning detection liquid tank (18), wherein: The infiltration impact spray mechanism (6) is located at the junction of the device loading area and the scanning detection liquid tank (18), and the infiltration impact spray mechanism (6) can also perform infiltration spray and impact spray of the coupling medium on the device sealing box (5) entering the coupling medium liquid pool, so as to remove bubbles on the surface of the device sealing box (5) when entering the coupling medium liquid pool.

7. The circulating operation type ultrasonic scanning detection system according to claim 6 is characterized in that: The infiltration impact spray mechanism (6) comprises: An infiltration unit (55) is used to spray the coupling medium onto the surface of the power semiconductor device before it enters the coupling medium liquid pool, so as to utilize the sprayed coupling medium to infiltrate the upper surface of the device sealing box (5); The bubble impact unit (54) is used to spray the coupling medium on the surface of the device sealing box (5) after entering the coupling medium liquid pool, so as to impact the bubbles attached to the surface of the power semiconductor device, wherein: The flow rate of the coupling medium sprayed by the bubble impact unit (54) is greater than the flow rate of the coupling medium sprayed by the infiltration unit (55).

8. The circulating operation type ultrasonic scanning detection system according to claim 7 is characterized in that: The infiltration unit (55) comprises an infiltration shunt pipe (60) and a plurality of infiltration nozzles (62) arranged on the infiltration shunt pipe (60), wherein: A plurality of infiltration nozzles (62) are evenly distributed on the infiltration shunt pipe (60) along the length direction of the infiltration shunt pipe (60), and the infiltration nozzles (62) and the infiltration shunt pipe (60) are interconnected; The nozzle of the wetting nozzle (62) is flat, wherein the length direction of the nozzle of the wetting nozzle (62) is perpendicular to the running direction of the device sealing box (5).

9. The circulating operation type ultrasonic scanning detection system according to claim 7 is characterized in that: It also includes a liquid storage box (14) for providing a coupling medium required for ultrasonic scanning detection, wherein: The liquid storage and receiving box (14) is located in the scanning and testing platform (1), and the coupling medium in the liquid storage and receiving box (14) is extracted and enters the scanning and testing liquid tank (18) through the infiltration impact spray mechanism (6); The coupling medium in the scanning detection liquid tank (18) flows back into the liquid storage and receiving tank (14) through the liquid tank discharge ratio regulating valve (12), and the opening of the liquid tank discharge ratio regulating valve (12) is adjusted based on the liquid level of the coupling medium in the scanning detection liquid tank (18), so that the liquid tank discharge ratio regulating valve (12) regulates the state of the coupling medium in the scanning detection liquid tank (18) flowing back into the liquid storage and receiving tank (14).

10. The circulating operation type ultrasonic scanning detection system according to any one of claims 1 to 5, characterized in that: A sealing box (5) for any device, comprising: A sealed box body (30) is used to accommodate a power semiconductor device (43), comprising a box body (36) supported on a sealed box chain plate (29) and a box cover (37) hinged on the box body (36), wherein the box body (36) can move on the sealed box chain plate (29); The box body opening and locking mechanism is used to control the opening and locking of the device sealing box (5), is distributed on at least one side of the device sealing box (5), and is adaptively connected to the box body (36) and the box cover (37) of the device sealing box (5), wherein: When the box body opening locking mechanism drives the box body (36) to move in a first direction on the sealing box chain plate (29), the sealing locking state between the box cover (37) and the box body (36) is released, so that the device sealing box (5) is in an openable state; When the device sealing box (5) is closed, the box body opens and the locking mechanism drives the box body (36) to move in a second direction on the sealing box chain plate (29) so as to seal and lock the box cover (37) on the box body (36); The second direction in which the box body (36) moves on the sealing box chain plate (29) is opposite to the first direction in which the box body (36) moves on the sealing box chain plate (29).

11. The circulating operation type ultrasonic scanning detection system according to claim 10, characterized in that: The box body opening and locking mechanism comprises a slide groove fixing plate (41) fixed on the sealing box chain plate (29), a slider body fixedly connected to the box body (36), a box body power mechanism for driving the slider body to move in the slide groove fixing plate (41), and a box cover connecting mechanism for controlling the position state of the box cover (37), wherein: The slide groove fixing plate (41) is located outside one end of the box body (36), and the box cover (37) is adaptively connected to the slide groove fixing plate (41) via a box cover connecting mechanism; When the box body power mechanism drives the box body (36) to move in the first direction via the slider body, the contact and matching state between the box cover (37) and the slide groove fixing plate (41) is gradually released via the box cover connection mechanism; When the device sealing box (5) is closed, the box cover (37) is adaptively connected to the slide groove fixing plate (41) via the box cover connecting mechanism, and when the box body power mechanism drives the box body (36) to move in the second direction via the slider body, the box cover (37) utilizes the contact and cooperation between the box cover connecting mechanism and the slide groove fixing plate (41) so that the box cover (37) is locked on the box body (36).

12. The circulating operation type ultrasonic scanning detection system according to claim 11, characterized in that: The box cover connection mechanism comprises a box cover connecting rod (50) distributed on the box cover (37) and a box cover connecting rod groove (42) arranged on the slide groove fixing plate (41), wherein: The box cover connecting rod groove (42) comprises a connecting rod inlet and outlet groove (59) and a connecting rod locking groove (53) connected to the connecting rod inlet and outlet groove (59), and the connecting rod inlet and outlet groove (59) and the connecting rod locking groove (53) are adapted to the box cover connecting rod (50); When the box body (36) moves in a first direction on the sealing box chain plate (29), the box cover connecting rod (50) enters the connecting rod entry and exit groove (59) from the connecting rod locking groove (53) to release the locking state between the box cover (37) and the box body (36); When the box body (36) moves in the second direction on the sealing box chain plate (29), the box cover connecting rod (50) enters the connecting rod locking groove (53) from the connecting rod entry and exit groove (59) to lock the box cover (37) to the box body (36).

13. The circulating operation type ultrasonic scanning detection system according to any one of claims 1 to 5, characterized in that: The sealing box deliquescence area and the device loading and unloading area correspond to the two ends of the scanning detection liquid tank (18) respectively; A plurality of air knife groups for blowing air and removing liquid from the device sealing box (5) are arranged in the sealing box deliquescence area, wherein: The air knife group comprises at least one air knife (10) for blowing air onto the upper surface of the device sealing box (5) and at least one air knife (10) for simultaneously blowing air onto the lower surface of the device sealing box (5), so as to use the gas blown by the air knife (10) to blow away the coupling medium carried on the surface of the device sealing box (5).

Images