A high-precision water-cooled temperature control device for full-frequency filtering under high flow rate

Abstract

The present invention discloses a high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates, comprising: a filtering module, including two-stage filtering units, each of the two-stage filtering units includes a water tank and a microchannel heat exchanger group arranged in the water tank, and circulating pumps or capillary tube circuits for filtering medium circulation are provided on the side walls of both water tanks; a refrigeration module, including a plate heat exchanger and a three-way flow regulating valve A; a heating module, including a pipe heater, the external load end HCW circulating water inlet is sequentially connected to the inlet of the aluminum microchannel heat exchanger group in the secondary filtering unit through a circulating pipeline, a plate heat exchanger, a pipe heater, and a circulating water pump, and the outlet of the aluminum microchannel heat exchanger group is respectively connected to the load end HCW circulating water outlet and one end of a pre-circulation branch through a three-way flow regulating valve B, and the other end of the pre-circulation branch is communicated with the circulating pipeline. The present invention can adapt to the circulating water filtering and heat exchange requirements under large flow rates and can achieve a temperature stability of the mk level.

Description

Technical Field

[0001] The present invention belongs to the technical field of temperature control, and more specifically, relates to a high-precision water-cooled temperature control device with full-frequency domain filtering under large flow rates. Background Art

[0002] Currently, a circulating fluid temperature control system using water or air as a circulating medium is generally adopted to achieve high-precision constant temperature control of temperature-sensitive components and areas in ultra-precision measurement and processing equipment. The temperature stability of directly using plant water as the cold source of an immersion lithography machine is generally on the order of ±0.1K; while semiconductor refrigeration devices are limited by materials, with low power, high energy consumption and high costs, and cannot well meet the need for ultra-precision filtering of the water temperature in each frequency domain of the circulating water under large flow rates.

[0003] Chinese Patent CN201711095898.5 and the research on ultra-precision temperature control technology of circulating cooling water based on dynamic heat capacity filtering (Doctoral Dissertation of Engineering, Harbin Institute of Technology) propose that the temperature dynamic response speed and temperature stability index of traditional refrigeration units restrict each other and cannot be taken into account simultaneously. However, the temperature dynamic response speed is far less important than the temperature stability index for ultra-precision devices, and improving the temperature stability index does not necessarily need to be achieved from the perspective of active closed-loop feedback control. Therefore, a refrigeration module based on semiconductor refrigeration devices is used to replace the traditional compression refrigeration system, and the circulating fluid itself is directly used as the heat capacity filtering medium to achieve a temperature stability of about ±0.01K. However, this technology has two deficiencies: First, the filtering medium is provided by shunting the original refrigeration system once and introduced into the same heat exchanger, emphasizing the temperature dynamic response speed at the expense of the temperature stability of the controlled medium, that is, the filtering performance. As a result, the heat capacities of the filtering medium and the controlled medium are restricted by the structure of the heat exchanger, and the structure of the heat exchanger for filtering is not optimized, and a temperature stability of the mk level cannot be achieved; Second, because this technology uses the heat exchanger itself to load the filtering medium, the filtering medium hardly flows on one side of the pipe. Compared with the controlled medium with the same volume flow rate and low thermal diffusivity, its heat transfer efficiency is low and the total volume heat capacity of the filtering medium is small, making it difficult to attenuate the temperature drift of the filtering medium caused by filtering and not being suitable for the high filtering heat transfer requirements of large-flow water-cooled temperature control devices.

[0004] Therefore, how to set up a water-cooled temperature control device that can adapt to the filtering heat transfer requirements of circulating water under large flow rates and can achieve a temperature stability of the mk level is an urgent problem to be solved. Summary of the Invention

[0005] Aiming at the defects of the prior art, the purpose of the present invention is to provide a high-precision water-cooled temperature control device with full-frequency domain filtering under large flow rates, which can adapt to the filtering heat transfer requirements of circulating water under large flow rates and can achieve a temperature stability of the mk level.

[0006] To achieve the above object, the present invention provides a high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates, which is used for controlling the temperature of the HCW circulating water at the load end to be constant, and includes:

[0007] A filtering module, including an expansion tank and a two-stage filtering unit. Both two-stage filtering units include a water tank and a microchannel heat exchanger group arranged in the water tank. The expansion tank is filled with circulating water as a filtering medium, which is used to supply water to the water tanks and the circulating pipelines in the two-stage filtering units. Circulation pumps or capillary tube circuits for circulating the filtering medium are provided on the side walls of the water tanks in the two-stage filtering units;

[0008] A refrigeration module, including a plate heat exchanger and a three-way flow regulating valve A. The PCW cooling water inlet is connected to the inlet of the aluminum microchannel heat exchanger group in the first-stage filtering unit. The outlet of the aluminum microchannel heat exchanger group is respectively connected to the refrigerant inlet of the plate heat exchanger and the PCW water outlet through the three-way flow regulating valve A;

[0009] A heating module, including a pipeline heater. The external load end HCW circulating water inlet is connected to the water inlet of the plate heat exchanger through a circulating pipeline. The water outlet of the plate heat exchanger is connected to the inlet of the pipeline heater. The outlet of the pipeline heater is connected to the inlet of the aluminum microchannel heat exchanger group in the second-stage filtering unit through a circulating water pump. The outlet of the aluminum microchannel heat exchanger group is respectively connected to the load end HCW circulating water outlet and one end of a pre-circulation branch through a three-way flow regulating valve B. The other end of the pre-circulation branch is connected to the circulating pipeline; During initialization, the load end HCW circulating water inlet and outlet are closed, and the internal circulating water in the high-precision water-cooled temperature control device is circulated through the pre-circulation branch. When the water temperature of the internal circulating water reaches the set value, the external circulation in the high-precision water-cooled temperature control device is started to provide constant temperature water for the load end.

[0010] The high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates provided by the present invention is provided with circulation pumps or capillary tube circuits for circulating the filtering medium on the water tanks of the two-stage filtering units in the filtering module, which can effectively increase the heat exchange efficiency of the filtering medium for absorbing the controlled medium through the aluminum microchannel heat exchanger group, significantly improve the filtering effect of the high-frequency part. At the same time, a heating module is added to the device, which can effectively suppress the temperature fluctuation of the circulating water in the low-frequency band and significantly improve the filtering effect of the low-frequency part, so as to achieve full-frequency domain filtering and achieve a temperature stability of mK level for the HCW circulating water; In addition, the volume heat capacity of the internal water in the water tanks of the two-stage filtering units provided in this embodiment can be flexibly adjusted, and the number of heat exchangers, the heat exchange area and the arrangement mode can be calculated according to the engineering structure size and filtering performance, which can better adapt to the filtering requirements of the controlled medium in various flow ranges including large flow rates (200 L / min and above).

[0011] In one embodiment, the heat exchangers in the microchannel heat exchanger group all adopt cold row radiators with a pressure bearing less than 2 bar, aluminum coolers with a pressure bearing greater than 5 bar, or stainless steel heat exchangers.

[0012] In one embodiment, the high-precision water-cooled temperature control device further includes a PLC module, and temperature sensors are provided at the PCW cooling water inlet, the HCW circulating water inlet, and the HCW circulating water outlet;

[0013] The PLC module is used to control the opening degree of the three-way flow regulating valve A according to the water temperature changes measured by the temperature sensors at the PCW cooling water inlet and the HCW circulating water inlet, bypass a part of the PCW cooling water flow and then send it to the refrigeration inlet of the plate heat exchanger; at the same time, the PLC module is also used to control the heating current of the pipe heater according to the water temperature changes measured by the temperature sensor at the HCW circulating water outlet, and finally control the stability of the HCW circulating water supply temperature.

[0014] In one embodiment, the heating module includes two pipe heaters connected in series, and each pipe heater is equipped with an overheat protection switch, a flanged heating pipe, and a temperature sensor. The heating power of the two pipe heaters is 2 kw to 6 kw.

[0015] In one embodiment, the volume of the water tank in the two-stage filtering unit is 50 L to 200 L according to the required heat capacity filtering effect.

[0016] In one embodiment, the circulating water pump adopts a vertical multistage centrifugal pump.

[0017] In one embodiment, a throttle valve is provided on the pre-circulation branch.

[0018] In one embodiment, the expansion tank is connected to the circulating pipeline through a one-way valve.

[0019] In one embodiment, filters are provided at the PCW cooling water inlet and the load end HCW circulating water inlet. Description of the Drawings

[0020] Figure 1 is a schematic structural diagram of a high-precision water-cooled temperature control device for full-frequency domain filtering under large flow provided by an embodiment of the present invention;

[0021] Figure 2 is a schematic structural diagram of a high-precision water-cooled temperature control device for full-frequency domain filtering under large flow provided by another embodiment of the present invention. Detailed Embodiments

[0022] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0023] To solve the problem that traditional water-cooled temperature control devices cannot be applied to the circulating water filtering and heat exchange requirements under large flow rates and cannot achieve temperature stability at the mk level, the present invention provides a high-precision water-cooled temperature control device with full-frequency filtering under large flow rates, which is connected to the external load-end circulating water system and is used for constant temperature control of the external load-end HCW circulating water. As Figure 1 shown, the water-cooled temperature control device includes a filtering module, a refrigeration module and a heating module. Among them, the refrigeration module uses the plant PCW cooling water as a cold source and is used for heat exchange and cooling with the return water of the external load-end HCW circulating water; the heating module is used for controlling the temperature of the HCW water after heat exchange and cooling; the filtering module is used for filtering the plant PCW cooling water to reduce the temperature fluctuation of the PCW cooling water, and is also used for filtering the HCW water after temperature control to reduce the temperature fluctuation of the HCW water.

[0024] Specifically, the filtering module provided in this embodiment includes an expansion tank and a two-stage filtering unit. Both two-stage filtering units include a water tank and a microchannel heat exchanger group arranged in the water tank. Among them, the first-stage filtering unit in the two-stage filtering unit is used for filtering the PCW cooling water, and the water tank in this unit is called a buffer water tank; the second-stage filtering unit in the two-stage filtering unit is used for filtering the HCW circulating water after temperature control, and the water tank in this unit is called a secondary water tank. The expansion tank is filled with circulating water as a filtering medium. This circulating water is non-homologous to the external load-end HCW circulating water and is used to replenish water for the buffer water tank and the secondary water tank to ensure the normal circulation of the filtering medium in the buffer water tank and the secondary water tank.

[0025] The filtering principle of the two-stage filtering unit provided in this embodiment is as follows: The water tank outside the tubes of the microchannel heat exchanger group is filled with water whose temperature is within the range of the temperature fluctuation of the circulating fluid as a temperature fluctuation suppression medium (filtering medium), and the circulating fluid is allowed to pass through the tubes. When the temperature of the circulating fluid fluctuates, the medium will absorb or release heat depending on its own heat capacity to suppress its temperature fluctuation.

[0026] Among them, the volumes of the buffer water tank and the secondary water tank provided in this embodiment can vary from 50L to 200L according to the required heat capacity filtering effect. The larger the volume of the filtering medium submerging the microchannel heat exchanger in the water tank, the better the filtering effect for each frequency band, but it is not linear.

[0027] In addition, as Figure 1 and Figure 2As shown, circulation pumps or capillary circuits for filtering medium circulation are provided on the side walls of the buffer water tank and the secondary water tank provided in this embodiment. The equipment only has a stirring effect without additional control. The heat capacity of the filtering medium stored in the sufficiently large volume of the water tank can be well absorbed by the large-scale microchannel heat exchanger group with a high heat transfer coefficient made of aluminum, including temperature fluctuations caused by temperature control media, environmental changes, and pipeline heat dissipation. The huge thermal hysteresis can suppress the slow drift of the temperature of the filtering medium after absorbing heat. Compared with the prior art, the volume heat capacity of the water in the water tank provided in this embodiment can be flexibly adjusted. The number, heat transfer area, and arrangement method of the heat exchangers in the microchannel heat exchanger group can be calculated according to the engineering structure size and filtering performance, and can better adapt to the filtering requirements of controlled media in various flow ranges, including large flow rates (200 L / min and above).

[0028] Specifically, the microchannel heat exchanger group provided in this embodiment can be combined with a dynamic heat transfer simplified model. By performing engineering calculation simulations on the required heat exchanger structure, the structure parameters and materials of the filtering heat exchanger, as well as the relationship between the water flow rates and volumes outside and inside the pipes and the filtering effect, can be obtained, that is, increasing the heat transfer area increases the filtering effect on high-frequency temperature fluctuations but decreases the filtering effect on low-frequency ones; if the volume of water outside the pipe is increased, the opposite is true, and there are optimal engineering parameters for the filtering effect of the filtering heat exchanger at a specific frequency, but the filtering effect on other frequencies will decrease accordingly. In this embodiment, it is preferably to use a standard large-scale microchannel heat exchanger as the design basis to improve the structure size, such as a standard 1080 cold row radiator with dimensions of 385*364*54 mm, or an aluminum cooler with a higher pressure resistance (greater than 5 bar) can also be used. When the ion conductivity of the HCW circulating water is not greater than 0.1 μS / cm, a stainless steel small pipe heat exchanger with a smaller concentration effect but a relatively reduced heat transfer area can be used for the heat exchanger. The specific filtering effect changes with the heat exchanger design structure and the number of parallel heat exchangers, but all have the following characteristics: for temperature fluctuations at a fixed frequency, there is an optimal heat transfer area that maximizes the filtering effect under the materials used; but under this structure, the attenuation effect of temperature fluctuations at other frequencies decreases, and corresponding adjustments can be made according to the high-frequency filtering requirements at different frequencies; for temperature fluctuations in the full frequency range, the lower the frequency, the smaller the filtering effect, and temperature fluctuations below 1.6 mHz are mainly controlled and attenuated by the above-mentioned pipeline heater with a faster response speed.

[0029] The refrigeration module provided in this embodiment includes a plate heat exchanger and a three-way flow regulating valve A. Among them, the plate heat exchanger is used to exchange heat and cool the PCW cooling water and the HCW circulating water inlet, and the three-way flow regulating valve A is used to bypass the excess flow of the PCW cooling water filtered by the primary filtering unit to the PCW water outlet to adjust the flow rate of the PCW cooling water leading to the plate heat exchanger.

[0030] To accurately adjust the flow rate of PCW cooling water leading to the plate heat exchanger, the high-precision water-cooled temperature control device provided in this embodiment further includes a PLC module. Temperature sensors are provided at the PCW cooling water inlet, the HCW circulating water inlet, and the HCW circulating water outlet.

[0031] Among them, the PLC module is used to control the opening degree of the three-way flow regulating valve A according to the water temperature changes measured by the temperature sensors at the PCW cooling water inlet and the HCW circulating water inlet, bypass a part of the PCW cooling water flow rate and then send it to the refrigeration inlet of the plate heat exchanger; at the same time, the PLC module is also used to control the heating current of the pipe heater according to the water temperature changes measured by the temperature sensor at the HCW circulating water outlet, and finally control the stable temperature of the HCW circulating water supply.

[0032] Furthermore, a ball valve for switching the liquid path and a filter for protecting the refrigeration module can also be provided at the PCW cooling water inlet provided in this embodiment.

[0033] The heating module provided in this embodiment includes a pipe heater. Preferably, 2 series-connected pipe heaters can be used. Each pipe heater is equipped with an overheat protection switch, a flanged heating pipe, and a temperature sensor. The 2 pipe heaters can work independently, and the heating power ranges from 2kw to 6kw. Among them, 2 heaters are used to raise the water temperature during the initialization of the internal circulation stage. After the external circulation works, the heater with a higher power is turned off, and the other heater is used to adjust the water temperature to ensure meeting the heating requirements and energy-saving requirements. The temperature fluctuations below 1.6mHz are mainly controlled by the above-mentioned pipe heater with a faster response speed for temperature control attenuation.

[0034] It should be noted that according to the definition of the sensitivity function S of the temperature control system in "Principles of Automatic Control":

[0035]

[0036] Among them, G c1 is the transfer function of the controller, is the controlled process of the heater, S is a function of the frequency ω. From the perspective of sensitivity, within the considered frequency range, to improve the robustness of the system, the smaller S(jω) is, the better. Usually in the low-frequency band is a high gain, so that the sensitivity function S(jω) is smaller, and the robustness of the system, that is, the anti-interference ability, is higher. Therefore, the heating module provided in this embodiment can effectively suppress the temperature fluctuations of the circulating water in the low-frequency band.

[0037] Among them, the connection relationship between the pipeline heater provided in this embodiment and the refrigeration module and the filtering module is as follows: the external load end HCW circulating water inlet is connected to the water inlet of the plate heat exchanger through a circulating pipeline, the water outlet of the plate heat exchanger is connected to the inlet of the pipeline heater, the outlet of the pipeline heater is connected to the inlet of the aluminum microchannel heat exchanger group in the secondary filtering unit through a circulating water pump, the outlet of the aluminum microchannel heat exchanger group is respectively connected to the load end HCW circulating water outlet and one end of the pre-circulation branch through a three-way flow regulating valve B, and the other end of the pre-circulation branch is connected to the circulating pipeline. During the initialization process, the load end inlet and outlet are closed, and the internal circulating water in the high-precision water-cooled temperature control device is circulated through the pre-circulation branch. When the water temperature of the internal circulating water reaches the set value, the external circulation in the high-precision water-cooled temperature control device is started to provide constant temperature water for the load end.

[0038] Preferably, the circulating water pump provided in this embodiment can adopt a vertical multi-stage centrifugal pump. This type of pump has a large output head and flow rate, occupies a small area, and has low noise and vibration, which is suitable for equipment integration. A frequency converter can be configured to adjust the constant temperature water flow of the entire system equipment cycle. In addition, the water inlet of the expansion tank, the HCW circulating water inlet, and the PCW cooling water inlet provided in this embodiment can all be set at the top of the equipment, and filters are equipped at each water inlet to protect the pipelines and components inside the equipment; overflow ports are provided on both the expansion tank and the secondary tank, and drain ports are provided on the secondary tank, the buffer tank, and the pipeline heater. The three are gathered into a drainage pipeline and discharged from the Drain drain port at the bottom of the equipment. Ball valves are provided on all drainage branches to control the opening and closing of the drainage branches.

[0039] Combined with the above analysis, the working principle of the water-cooled temperature control device provided in this embodiment is as follows: the HCW circulating water inlet first enters the plate heat exchanger to exchange heat and cool down with the PCW cooling water inlet, then passes through the pipeline heater in the heating module for temperature control, is pumped into the aluminum microchannel heat exchanger group in the secondary tank by a vertical multi-stage centrifugal pump for filtering, and then the outlet flow is controlled by the three-way flow regulating valve B to be stable, finally meeting the requirements of the equipment HCW circulating water outlet flow, temperature, and pressure, and being sent out from the top; the PCW cooling water enters from the top of the equipment and first passes through the buffer tank for filtering. According to the feedback value controlled by the sensor PID, a part of the flow is bypassed by the three-way flow regulating valve A and mixed with the PCW cooling water return to be sent to the PCW water outlet at the top of the equipment, and the remaining PCW inlet flow is sent into the plate heat exchanger to exchange heat and warm up with the HCW return water and then sent out as the PCW cooling water return.

[0040] The high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates provided in this embodiment is provided with a circulation pump or a capillary tube circuit for filtering medium circulation on the water tanks of the two-stage filtering units in the filtering module, which can effectively increase the heat exchange efficiency of the filtering medium absorbing the controlled medium through the aluminum microchannel heat exchanger group, significantly improving the filtering effect of the high-frequency part. At the same time, a heating module is added to the device, which can effectively suppress the temperature fluctuation of the circulating water in the low-frequency band, significantly improving the filtering effect of the low-frequency part, thereby realizing full-frequency domain filtering and achieving a temperature stability of mK level for the HCW circulating water. In addition, the volume heat capacity of the water in the water tank of the two-stage filtering unit provided in this embodiment can be flexibly adjusted, and the number, heat exchange area, and arrangement method of the heat exchangers can be calculated according to the engineering structure size and filtering performance, better adapting to the filtering requirements of the controlled medium in various flow rate ranges including large flow rates (200 L / min and above).

[0041] In one embodiment, temperature sensors, pressure sensors, liquid level sensors, flow sensors, flow switches, temperature protection switches, leak detection, and three-way flow regulating valves that can accurately distribute and control the main path and bypass flow rates can be provided in the refrigeration module, heating module, and filtering module provided by the present invention. Among them, the temperature sensors and other sensors and fluid control valves can be communicatively connected to the PLC module using RS485; the PLC module is provided with a module for storing the data of each sensor and feeding it back to the touch display screen, and the touch display screen outputs a signal to the PLC module to complete function switches such as starting, stopping, and debugging of the device.

[0042] The following will combine specific embodiments to detail the high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates provided by the present invention.

[0043] This device has 6 waterway interfaces, where the waterways are the HCW circulating water inlet and outlet, PCW cooling water inlet and outlet, DRAIN drain outlet, and HTCU makeup water inlet; among them, the drain outlet is located at the bottom of the device, and the rest of the interfaces are located at the top of the device.

[0044] The PCW cooling water is provided by the plant service water. This section of the pipeline sequentially connects with a filter, a water flow switch, a sensor, a ball valve, a buffer water tank with an exhaust valve and a drain outlet of the filtering module from the PCW water inlet, and then the three-way flow regulating valve A distributes the water flow rate into the plate heat exchanger of the refrigeration module, and the excess flow rate flows to the PCW water outlet; the PCW water after heat exchange at the outlet of the plate heat exchanger passes through a flow sensor, which monitors the PCW water flow rate in real time and is used as the feedback of the flow regulating valve, and finally connects to the PCW water outlet.

[0045] The HTCU water replenishment port needs to introduce circulating water to provide the initial amount of water for pre-circulation of the initialization equipment. The water replenishment port is sequentially connected to a filter and a pressure reducing valve, and then connected to an expansion tank with an exhaust valve and an overflow port. The expansion tank replenishes water for the buffer tank and the secondary tank of the filtering tank as well as the circulating pipeline respectively. A check valve is connected to the water replenishment path leading to the circulating pipeline to prevent backflow when the water pump stops.

[0046] The DRAIN drain port is finally discharged from the confluence of the overflow port of the expansion tank, the drain port of the buffer tank, the drain port of the system circulating pipeline, the overflow port and the drain port of the secondary tank.

[0047] The HCW circulating water inlet is connected to the load end outlet. After entering the equipment, it is sequentially connected to a filter, a check valve and a sensor. The sensor mainly monitors the return water temperature of the HCW circulating water for control. After passing through the plate heat exchanger of the refrigeration module, it is connected to the sensor again to monitor the refrigeration outlet temperature of the HCW water for control. Then it is connected to two pipeline heaters of the heating module. The outlet of the pipeline heater is connected to a water pump and a sensor. The sensor monitors the heating outlet temperature of the HCW water for control. Then it is connected to the secondary tank of the filtering module. The HCW circulating water does not directly enter the tank, but is divided into four microchannel heat exchangers immersed in the tank and then converges and flows out of the tank. The water in the tank is only replenished by the expansion tank. The outlet of the secondary tank is connected to a sensor to detect the outlet temperature of the HCW water filtering module for control. Then it is connected to a flow regulating valve and connected to the initialization pre-circulation branch. A throttle valve and a sensor are sequentially connected to this branch and finally connected to the HCW circulating water inlet. The main path is connected to a sensor and the HCW circulating water outlet to finally ensure the stability of the circulating water temperature and flow at the equipment outlet. During the initialization process, it is necessary to close the HCW water inlet and outlet, circulate the circulating water in the equipment through the pre-circulation branch, and then start the external circulation to provide constant temperature water for the load end after the water temperature is close to a certain value of the target point.

[0048] After completing the equipment structure and electrical installation according to this embodiment, connecting this embodiment to the circulating water system, this equipment can finally achieve the temperature stability of the circulating water at the mK level at the load end through a series of control algorithms.

[0049] It is easy for those skilled in the art to understand that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-precision water-cooled temperature control device with full-frequency filtering under high flow rate, which is used for constant temperature control of the HCW circulating water at the load end, and is characterized in that, Comprising: A filtering module, including an expansion water tank and two-stage filtering units. Each two-stage filtering unit includes a water tank and a microchannel heat exchanger group disposed within the water tank. The expansion water tank is filled with circulating water as a filtering medium, which is used to supply water to the water tanks and the circulating pipelines in the two-stage filtering units. Circulation pumps or capillary loops for circulating the filtering medium are provided on the side walls of the water tanks in the two-stage filtering units; A refrigeration module, including a plate heat exchanger and a three-way flow regulating valve A. The PCW cooling water inlet is connected to the inlet of the aluminum microchannel heat exchanger group in the first-stage filtering unit. The outlet of the aluminum microchannel heat exchanger group is connected to the refrigerant inlet of the plate heat exchanger and the PCW water outlet respectively through the three-way flow regulating valve A; A heating module, including a pipeline heater. The external load end HCW circulating water inlet is connected to the water inlet of the plate heat exchanger through a circulating pipeline. The water outlet of the plate heat exchanger is connected to the inlet of the pipeline heater. The outlet of the pipeline heater is connected to the inlet of the aluminum microchannel heat exchanger group in the second-stage filtering unit through a circulating water pump. The outlet of the aluminum microchannel heat exchanger group is connected to the load end HCW circulating water outlet and one end of a pre-circulation branch respectively through a three-way flow regulating valve B. The other end of the pre-circulation branch is communicated with the circulating pipeline; During initialization, the HCW circulating water inlet and outlet at the load end are closed, and the internal circulating water in the high-precision water-cooled temperature control device is circulated through the pre-circulation branch. When the water temperature of the internal circulating water reaches the set value, the external circulation in the high-precision water-cooled temperature control device is started to provide constant temperature water for the load end.

2. The high-precision water-cooled temperature control device for full-frequency domain filtering under high flow rate according to claim 1, wherein, The heat exchangers in the microchannel heat exchanger group all adopt cold row radiators with a pressure bearing less than 2 bar, aluminum coolers with a pressure bearing greater than 5 bar, or stainless steel heat exchangers.

3. The high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates according to claim 1, wherein, The high-precision water-cooled temperature control device further includes a PLC module. Temperature sensors are provided at the PCW cooling water inlet, the HCW circulating water inlet, and the HCW circulating water outlet; The PLC module is used to control the opening degree of the three-way flow regulating valve A according to the water temperature changes measured by the temperature sensors at the PCW cooling water inlet and the HCW circulating water inlet, and bypass a part of the PCW cooling water flow and send it to the refrigeration inlet of the plate heat exchanger; At the same time, the PLC module is also used to control the heating current of the pipeline heater according to the water temperature changes measured by the temperature sensor at the HCW circulating water outlet, and finally control the stability of the HCW circulating water supply temperature.

4. The high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates according to claim 1, characterized in that, The heating module includes two series-connected pipeline heaters. Each pipeline heater is equipped with an overheat protection switch, a flanged heating pipe, and a temperature sensor. The heating power of the two pipeline heaters is 2 kw to 6 kw.

5. The high-precision water-cooled temperature control device for full-frequency domain filtering under high flow rate according to claim 1, wherein The volume of the water tanks in the two-stage filtering units is 50 L to 200 L according to the required heat capacity filtering effect.

6. The high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates according to claim 1, characterized in that, The circulating water pump adopts a vertical multi-stage centrifugal pump.

7. The high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates according to claim 1, characterized in that, A throttle valve is provided on the pre-circulation branch.

8. The high-precision water-cooled temperature control device for full-frequency domain filtering under high flow rate according to claim 1, wherein The expansion water tank is communicated with the circulating pipeline through a one-way valve.

9. The high-precision water-cooled temperature control device for full-frequency domain filtering under large flow rates according to claim 1, wherein, Filters are provided at the PCW cooling water inlet and the load end HCW circulating water inlet.

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