Laser light output window dust-proof structure and laser

Abstract

The present invention provides a laser light-emitting window dust-proof structure and a laser. The laser light-emitting window dust-proof structure comprises a discharge cavity body, a gas purifier, a dust-proof pipeline and a fan; an intermediate cavity is provided between the light-emitting window and the slit; an air inlet end of the dust-proof pipeline is connected to the gas purifier, passing through the intermediate cavity in the middle; an air outlet end of the dust-proof pipeline is connected to the fan; at least part of the working gas purified by the gas purifier flows through the intermediate cavity through the dust-proof pipeline; the fan drains the working gas, increases the gas flow rate flowing through the intermediate cavity, strengthens the purge of the clean gas on the light-emitting window, and effectively prevents particulate matter in the working gas that enters the intermediate cavity from the cavity through the window on the slit from approaching and contaminating the light-emitting window.

Description

Technical Field

[0001] The present invention relates to the technical field of lasers, and in particular to a dust-proof structure of a laser light-emitting window and a laser. Background Art

[0002] The discharge process of the excimer laser discharge cavity is accompanied by electrode loss, which continuously generates dust. This dust circulates with the airflow and is dispersed to various locations in the cavity. It causes the greatest damage to the light-emitting window of the lens laser and the bearings of the cross-flow fan. Special protective devices need to be designed to protect and extend the normal operation and service life of the lens light-emitting window and bearings.

[0003] Specifically, Figure 1 As shown, the working gas 1 in the laser discharge chamber 10 enters the gas purifier 20 (i.e., the metal fluoride trap MFT) through the gas outlet in the laser upper chamber for filtration to remove dust. The gas then passes through the gas inlet and inlet flow channel provided in the upper chamber, and returns to the discharge chamber 10 through the light inlet of the slit 60 to continue working, thus circulating in this manner. The arrows in the figure indicate the flow direction of the working gas 1. The inlet flow channel in the laser upper chamber is the exhaust flow channel of the metal fluoride trap.

[0004] The laser's light-exit window 50 is positioned outside the adjacent slit 60, with a certain distance between them, which can be considered a cavity. Slit 60 has an opening for light to enter. Clean gas passing through the metal fluoride trap flows into the cavity between the light-exit window 50 and slit 60 due to only a slight pressure difference, and then returns to the discharge chamber 10 through the slit. This results in a low gas flow rate and is prone to clogging.

[0005] Because the slit 60 has an opening for light to enter, the light exit window 50 cannot be completely isolated from the interior of the discharge chamber 10. Dust in the discharge chamber 10 can easily enter the space between the light exit window 50 and the slit 60 through the light exit of the slit 60 and contaminate the inner surface of the light exit window 50. Summary of the Invention

[0006] The object of the present invention is to provide a dust-proof structure for a laser light-emitting window to solve at least one of the above-mentioned technical problems existing in the prior art.

[0007] In order to solve the above technical problems, the present invention provides a dust-proof structure for a laser light-emitting window, comprising: a discharge cavity, a gas purifier, a dust-proof pipeline and a fan;

[0008] The gas purifier is used to purify the working gas in the discharge chamber;

[0009] The discharge cavity body is provided with a light emitting window and a slit;

[0010] An intermediate cavity is provided between the light exit window and the slit;

[0011] The air inlet end of the dustproof pipeline is connected to the gas purifier, passing through the intermediate cavity. The air outlet end of the dustproof pipeline is connected to the fan. At least a portion of the working gas purified by the gas purifier flows through the intermediate cavity through the dustproof pipeline, forming a dust-proof air curtain inside the light-emitting window, thereby preventing the working gas entering the intermediate cavity from the cavity through the window on the slit from approaching and contaminating the light-emitting window. The fan guides the working gas, increasing the flow rate of clean gas flowing through the intermediate cavity, strengthening the purge of the clean gas on the light-emitting window, and effectively preventing particulate matter in the working gas entering the intermediate cavity from the cavity through the window on the slit from approaching and contaminating the light-emitting window.

[0012] Furthermore, the gas pressure in the intermediate cavity is less than or equal to the pressure in the discharge cavity.

[0013] Furthermore, the working gas in the dustproof pipeline flows back into the cavity directly or through a pipeline after passing through the fan.

[0014] Among them, the fan rotates, forming a certain negative pressure near the air outlet end of the dust-proof pipeline, thereby forming a suction force, which prompts the working gas in the dust-proof pipeline to flow and outflow, and finally enters the air flow channel in the fan and is blown into the cavity.

[0015] Furthermore, the fan is a cross-flow fan, and shaft discs are provided at both ends of the cross-flow fan; the air outlet end of the dust-proof pipeline is arranged facing the shaft disc, and a through hole (or called a slot) connecting the inside and outside of the middle cavity of the cross-flow fan is provided on the shaft disc, and the working gas discharged from the dust-proof pipeline enters the middle cavity of the cross-flow fan through the through hole.

[0016] Furthermore, the through hole is arranged to be spirally inclined so as to force the gas outside the shaft disc to flow into the cavity of the cross-flow blower through the through hole when the motor drives the shaft disc to rotate.

[0017] Preferably, the impeller is connected to the intermediate shaft through a connecting rib plate, and the through hole or slot is formed between two adjacent connecting rib plates, wherein the connecting rib plates are spirally or inclined like blades, thereby forcing the gas to flow from the outside to the inside into the cavity during rotation; and then utilizing negative pressure to force the working gas in the dustproof pipeline to flow out.

[0018] The dust-proof pipeline may be a gas flow channel arranged inside the side wall or bottom plate of the discharge chamber, or may be a pipe arranged outside the discharge chamber.

[0019] Furthermore, the slit includes a main body and a plurality of spoilers; on a projection plane perpendicular to the laser emission direction, the spoilers are symmetrically arranged on the main body left and right or up and down, thereby enclosing a laser channel (i.e., a slit) for the laser to pass through; in the laser emission direction, the spoilers on the left and right or up and down sides are staggered.

[0020] Furthermore, in the direction of laser emission, the cross section of the laser channel gradually decreases. That is, in the direction from the light emitting window toward the inside of the cavity, the laser channel is in a trumpet-shaped shape with a gradually increasing opening.

[0021] Furthermore, the shafts at both ends of the cross-flow fan are rotatably arranged on the cavity through bearings; a threaded structure, a tooth structure or a blade structure is provided on the outer circle of the shaft near the outer end face of the bearing. When the motor drives the shaft and the impeller to rotate, the threaded structure, the tooth structure or the blade structure forces the gas outside the bearing to move in a direction away from the bearing (generally toward the inside of the cross-flow fan and the inside of the cavity), thereby preventing dust in the cavity from approaching and entering the bearing.

[0022] Furthermore, a mounting hole is provided on the cavity, and the threaded structure, tooth structure or blade structure on the shaft is inserted into the mounting hole; when the cross-flow blower rotates, a dynamic sealing structure is formed between the threaded structure, tooth structure or blade structure and the mounting hole.

[0023] The gap between the inner wall of the mounting hole and the thread structure, tooth structure or blade structure is small, for example, not more than 0.5 mm. When the cross-flow blower rotates at high speed, the thread structure, tooth structure or blade structure rotates to generate a cyclonic vortex, forcing the gas to flow toward the outside of the mounting hole and the cavity. As a result, the mounting hole and the thread structure, tooth structure or blade structure are combined with each other to form a good dynamic sealing structure, preventing dust from entering the bearing.

[0024] Furthermore, a plurality of blades are provided on the outer end surface of the shaft disc of the cross-flow blower and on the circumference of the shaft body. When the motor drives the bearing, shaft disc and blades to rotate, the blades tend to force the gas near the bearing and the shaft body to flow in a direction away from the bearing and the shaft body (i.e., a low-pressure area is formed near the bearing and the shaft body).

[0025] Furthermore, a through hole is provided on the outer end surface of the shaft disc between the shaft body and the blades; and a plurality of through holes are spaced apart in the circumferential direction of the shaft body.

[0026] Furthermore, an annular radially protruding baffle is provided on the outer end surface of the shaft disc between the through hole and the blades.

[0027] The baffle is as close to the side of the cavity as possible, thereby forming a relatively closed annular cavity, which has a drainage effect on the working gas discharged from the dust-proof pipeline.

[0028] Among them, the cross-flow fan is an existing technology, which includes an impeller formed by a ring-shaped blade grid, an intermediate cavity is provided inside the impeller; and a shaft disk and a shaft body are provided at both ends of the impeller.

[0029] The present invention also provides a laser including the light-emitting window dust-proof structure described above.

[0030] By adopting the above technical solution, the present invention has the following beneficial effects:

[0031] The present invention provides a dust-proof structure for a laser light-emitting window. The structure is simple. The air outlet end of the dust-proof pipeline is connected to a fan, and the air inlet end of the dust-proof pipeline is connected to the gas purifier. At least part of the working gas purified by the gas purifier flows through the intermediate cavity between the light-emitting window and the slit through the dust-proof pipeline. The working gas after clean treatment flows through the intermediate cavity. The fan drains the working gas, increases the gas flow rate flowing through the intermediate cavity, strengthens the purge of the clean gas on the light-emitting window, and effectively prevents particulate matter in the working gas that enters the intermediate cavity from the cavity through the window on the slit from approaching and contaminating the light-emitting window. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0033] Figure 1 Schematic diagram (top view) of the exhaust channel of the laser metal fluoride trap, the laser light output window and the slit in the prior art;

[0034] Figure 2 A schematic structural diagram of the dust-proof structure of the laser light-emitting window provided in Example 1 of the present invention;

[0035] Figure 3 This is a three-dimensional cross-sectional view of the dust-proof pipeline;

[0036] Figure 4 Schematic diagram of the structure of the dust-proof pipeline and the intermediate cavity in Example 1;

[0037] Figure 5 Schematic diagram of the partial structure of the light-emitting window, the middle cavity and the slit in Example 1;

[0038] Figure 6 This is a schematic diagram of the working gas flowing back to the cavity through the cross-flow fan;

[0039] Figure 7 A three-dimensional diagram of the slit in Example 1

[0040] Figure 8 This is a schematic diagram of the structure in which the spoilers are arranged in a staggered manner in the slits in Example 1;

[0041] Figure 9 This is a schematic diagram of the partial structure of the bearing and shaft in Example 1;

[0042] Figure 10 This is a partial three-dimensional schematic diagram of the shaft body and shaft disc in Example 1;

[0043] Figure 11 This is a partially enlarged schematic diagram of the mounting hole in Example 1;

[0044] Figure 12 This is a schematic diagram of an external independent fan in Example 2;

[0045] Figure 13 This is a diagram of the working principle when the working gas refluxes into the gas purifier in Example 2.

[0046] Figure 14 Schematic diagram of the laser of Example 3.

[0047] Reference numerals:

[0048] 1-working gas; 10-cavity; 10a-upper cavity; 10b-lower cavity; 11-dust-proof pipeline; 11a-gas outlet; 11b-tube body; 12-middle cavity; 13-bearing; 14-mounting hole; 20-gas purifier; 30-cross-flow fan; 31-impeller; 32-shaft; 33-shaft disc; 34-threaded structure; 35-blade; 36-through hole; 37-baffle; 40-motor; 50-light-emitting window; 60-slit; 61-spoiler; 62-laser channel; 63-body. DETAILED DESCRIPTION

[0049] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0050] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0051] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0052] The present invention will be further explained below with reference to specific embodiments.

[0053] Example 1

[0054] like Figure 2-5 As shown, the present embodiment provides a dust-proof structure for a laser light-emitting window, comprising: a discharge chamber body 10, a gas purifier 20, a dust-proof pipeline 11, and a cross-flow fan 30; the gas purifier 20 is used to purify the working gas 1 in the discharge chamber 10; a light-emitting window 50 and a slit 60 are provided on the discharge chamber 10 and on the laser output side; an intermediate cavity 12 is provided between the light-emitting window 50 and the slit 60; an air inlet end of the dust-proof pipeline 11 is connected to the gas purifier 20, passing through the intermediate cavity 12 in the middle, and an air outlet end 11a of the dust-proof pipeline 11 is connected to the cross-flow fan 30, and at least part of the working gas 1 purified by the gas purifier 20 flows through the intermediate cavity 12 through the dust-proof pipeline 11, so as to form a dust-proof air curtain on the inner side of the light-emitting window 50, thereby preventing the working gas 1 from entering the intermediate cavity 12 from the cavity 10 through the window on the slit 60 and approaching and contaminating the light-emitting window 50. The cross-flow blower 30 serves to guide the working gas, increasing the flow rate of clean gas flowing through the intermediate cavity 12, thereby strengthening the purge of the light-emitting window 50 by the clean gas, strengthening the purification of the light-emitting window 50, and effectively preventing particulate matter in the working gas from entering the intermediate cavity 12 from the cavity 10 through the window on the slit 60 from approaching and contaminating the light-emitting window 50.

[0055] Reference Figure 2As shown, the chamber 10 includes an upper chamber 10a and a lower chamber 10b, the cross-flow blower 30 and its motor 40 are arranged on the lower chamber 10b, and the gas purifier 20 is fixedly arranged on the upper chamber 10a.

[0056] Preferably, the pressure in the intermediate cavity 12 is less than or equal to the pressure in the discharge chamber body 10. During operation, the suction force of a fan such as the crossflow fan 30 is utilized to maintain a set pressure in the intermediate cavity 12 through the dustproof pipe 11. This set pressure is less than or equal to the pressure inside the discharge chamber 10. Even if a small amount of particulate matter enters the intermediate cavity 12, it will be carried away by the gas in the dustproof pipe 11 and will not contaminate the light output window 50. The pressure difference on both sides of the slit 60 is greatly reduced, greatly reducing the impact on beam quality caused by the large pressure gradient in the prior art.

[0057] Reference Figure 5 and 6 As shown, the working gas 1 in the dustproof pipe 11 flows back into the cavity 10 directly or through the pipe after passing through the fan. The rotation of the fan creates a certain negative pressure near the outlet end 11a of the dustproof pipe 11, thereby creating a suction force, which promotes the flow and outflow of the working gas 1 in the dustproof pipe 11, and finally enters the air flow channel of the fan and is blown into the cavity 10.

[0058] Specifically, the impeller 31 of the crossflow blower 30 is provided with shaft discs 33 at both ends; these are fixedly connected to the shaft 32. The outlet end 11a of the dustproof duct 11 faces the shaft discs 33. The shaft discs 33 are provided with through holes 36 (or notches) that connect the interior and exterior of the central cavity of the crossflow blower 30. The working gas 1 discharged from the dustproof duct 11 enters the central cavity of the crossflow blower 30 through the through holes 36.

[0059] Preferably, the through hole 36 is arranged in a spiral manner so as to force the gas outside the shaft disc 33 to flow into the cavity of the cross-flow blower 30 through the through hole 36 when the motor 40 drives the shaft disc 33 to rotate.

[0060] Preferably, the impeller 31 of the cross-flow fan 30 is connected to the intermediate shaft 32 through a connecting rib plate, and a through hole 36 or a slot is formed between two adjacent connecting rib plates, wherein the connecting rib plates are spirally or inclined like blades, thereby forcing the gas to flow from the outside to the inside into the cavity during rotation; and then utilizing negative pressure to force the working gas 1 in the dustproof pipeline 11 to flow out.

[0061] The dust-proof pipeline 11 may be a gas flow channel arranged inside the side wall or bottom plate of the discharge chamber, or may be a pipe arranged outside the discharge chamber.

[0062] Reference Figure 7 and 8As shown, the slit 60 comprises a body 63 and a plurality of spoilers 61. On a projection plane perpendicular to the laser emission direction, the spoilers 61 are symmetrically arranged on the body 63, either left-right or top-bottom, to enclose a laser channel 62 (i.e., the slit 60) for the laser to pass through. The spoilers 61 are staggered in the direction of laser emission. The cross-section of the laser channel 62 gradually decreases in the direction of laser emission. That is, from the light exit window 50 toward the interior of the cavity 10, the laser channel 62 forms a trumpet-shaped opening with a gradually increasing size.

[0063] The present invention improves the structure of the slit and changes the spoiler 61 of the slit from a symmetrical arrangement on the left and right / upper and lower sides to a staggered arrangement on the left and right / upper and lower sides, which can effectively reduce the spacing between the spoiler 61, thereby effectively increasing the resistance of dust in the cavity 10 to enter the middle cavity 11, that is, effectively reducing the amount of dust entering the middle cavity 12.

[0064] Reference Figure 9-10 As shown, the shaft 32 at both ends of the impeller 31 of the cross-flow fan 30 is rotatably arranged on the cavity 10 through the bearing 13; a threaded structure 34 is provided on the outer circle of the shaft 32 near the outer end surface of the bearing 13. When the motor 40 drives the shaft 32, the shaft disc 33 and the cross-flow fan 30 to rotate, the threaded structure 34 forces the gas outside the bearing 13 to move in the direction away from the bearing 13 (generally moving toward the inside of the cross-flow fan 30 and the inside of the cavity 10), thereby preventing the dust in the cavity 10 from approaching and entering the bearing 13.

[0065] Reference Figure 11 As shown, a mounting hole 14 is provided on the side wall of the cavity 10 , and a threaded structure 34 on the shaft 32 is inserted into the mounting hole 14 ; when the cross-flow blower 30 rotates, a dynamic sealing structure is formed between the threaded structure 34 and the mounting hole 14 .

[0066] The gap between the inner wall of the mounting hole 14 and the threaded structure 34 is small, for example, not greater than 0.5 mm. When the cross-flow blower 30 rotates at high speed, the threaded structure 34 rotates to generate a cyclonic vortex, forcing the gas to flow toward the outside of the mounting hole 14 and the direction of the cavity 10, so that the mounting hole 14 and the threaded structure 34 are combined with each other to form a good dynamic sealing structure, preventing dust from entering the bearing 13.

[0067] Reference Figure 10 As shown, a plurality of blades 35 are provided on the outer end surface of the shaft disc 33 of the cross-flow blower 30 and on the circumference of the shaft body 32. When the motor 40 drives the bearing 13, the shaft disc 33 and the blades 35 to rotate, the blades 35 tend to force the gas near the bearing 13 and the shaft body 32 to flow in a direction away from the bearing 13 and the shaft body 32 (i.e., a low-pressure area is formed near the bearing 13 and the shaft body 32).

[0068] Furthermore, a through hole 36 is provided on the outer end surface of the shaft disc 33 between the shaft body 32 and the blades 35; multiple through holes 36 are spaced apart circumferentially around the shaft body 32. An annular, radially protruding baffle 37 is provided on the outer end surface of the shaft disc 33 between the through holes 36 and the blades 35. More preferably, an annular groove is provided on the side surface of the cavity 10, and the baffle 37 is rotatably inserted into the groove. A dynamic seal structure is provided between the baffle 37 and the groove.

[0069] Also, as shown in Figures 3 and 4, the cross flow fan 30 may be provided on the lower cavity 10b, or, as shown in Figures Figure 5 As shown in FIG. 1 (horizontal cross-sectional view), the cross-flow blower 30 may be disposed on the upper cavity 10 a.

[0070] Example 2

[0071] The structure of this embodiment is basically the same as that of embodiment 1, except that:

[0072] Reference Figure 12 As shown, the fan is an external fan 30a, and the dust-proof pipe 11 is a delivery pipe arranged outside the cavity 10. The delivery pipe is connected in series with the intermediate cavity 12 and the external fan 30a. The air outlet of the external fan 30a is connected to the cavity 10 through a pipe body, which is used to introduce the working gas into the cavity 10. The dust-proof pipe 11 can be a gas branch, which only introduces a portion of the purified working gas into the intermediate cavity 12 to prevent dust from the light-emitting window 50.

[0073] Another implementation method of this embodiment is to refer to Figure 13 As shown, the air outlet of the external fan 30 a is connected to the air inlet of the gas purifier 20 through the pipe body 11 b , and the working gas used to remove dust from the intermediate cavity 12 is finally returned to the gas purifier 20 .

[0074] The present invention provides a dust-proof structure for a laser light-emitting window, which has a simple structure. An intermediate cavity 12 is provided between the light-emitting window 50 and the slit 60. The cleaned working gas 1 flows through the intermediate cavity 12, forming an air wall or air curtain on the inner side of the light-emitting window 50, thereby effectively preventing particulate matter in the cavity 10 from contaminating the light-emitting window 50.

[0075] The cross-flow blower 30 serves to guide the working gas, increasing the flow rate of clean gas flowing through the intermediate cavity 12, thereby strengthening the purge of the light-emitting window 50 by the clean gas, strengthening the purification of the light-emitting window 50, and effectively preventing particulate matter in the working gas from entering the intermediate cavity 12 from the cavity 10 through the window on the slit 60 from approaching and contaminating the light-emitting window 50.

[0076] Example 3

[0077] The present invention also discloses a laser, such as Figure 14As shown in the schematic diagram, it includes a discharge chamber 10, a cross-flow fan 30, a light-emitting window 50, two relatively arranged discharge electrodes 70, and the dust-proof structure of the light-emitting window in the above-mentioned embodiment 1 or 2 (not shown in the figure).

[0078] The light-emitting window 50 of the laser of this embodiment is not easily contaminated and has a long service life.

[0079] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A dust-proof structure for a laser light-emitting window, characterized in that: include: A discharge chamber body (10), a gas purifier (20), a dust-proof pipeline (11) and a fan; The gas purifier (20) is used to purify the working gas (1) in the discharge chamber (10); The discharge chamber body (10) is provided with a light-emitting window (50) and a slit (60); An intermediate cavity (12) is provided between the light-emitting window (50) and the slit (60); The air inlet end of the dustproof pipe (11) is connected to the gas purifier (20) and passes through the intermediate cavity (12). The air outlet end (11a) of the dustproof pipe (11) is connected to the fan. At least part of the working gas (1) purified by the gas purifier (20) flows through the intermediate cavity (12) through the dustproof pipe (11), and is used to form a dustproof air curtain inside the light-emitting window (50), thereby preventing the working gas (1) from entering the intermediate cavity (12) from the cavity (10) through the window on the slit (60) and approaching and contaminating the light-emitting window (50); The fan is a cross-flow fan (30), The shafts (32) at both ends of the cross-flow fan (30) are rotatably arranged on the cavity (10) through bearings (13); a thread structure (34), a tooth structure or a blade structure is arranged on the outer circle of the shaft (32) close to the outer end surface of the bearing (13); when the motor (40) drives the shaft (32) and the cross-flow fan (30) to rotate, the thread structure (34), the tooth structure or the blade structure forces the gas outside the bearing (13) to move in a direction away from the bearing (13), thereby preventing dust in the cavity (10) from approaching and entering the bearing (13).

2. The laser light output window dust-proof structure according to claim 1, characterized in that: The gas pressure in the intermediate cavity (12) is less than or equal to the pressure in the discharge cavity body (10).

3. The laser light output window dust-proof structure according to claim 1, characterized in that: The working gas (1) in the dustproof pipeline (11) flows back into the cavity (10) directly or through a pipeline after passing through the fan.

4. The laser light output window dust-proof structure according to claim 1, characterized in that: Both ends of the cross-flow fan (30) are provided with shaft discs (33); the air outlet end (11a) of the dustproof pipeline (11) is arranged facing the shaft disc (33); the shaft disc (33) is provided with a through hole (36) communicating with the inside and outside of the middle cavity of the cross-flow fan (30); the working gas (1) discharged from the dustproof pipeline (11) enters the middle cavity of the cross-flow fan (30) through the through hole (36).

5. The laser light output window dust-proof structure according to claim 4, characterized in that: The through hole (36) is arranged in a spiral inclination so as to force the gas outside the shaft disc (33) to flow into the cavity of the cross-flow fan (30) through the through hole (36) when the motor (40) drives the shaft disc (33) to rotate.

6. The laser light output window dust-proof structure according to claim 1, characterized in that: The slit (60) includes a main body (63) and a plurality of spoilers (61); on a projection plane perpendicular to the laser emission direction, the spoilers (61) are symmetrically arranged on the main body (63) in a left-right or up-down manner, thereby enclosing a laser channel (62) for the laser to pass through; in the laser emission direction, the spoilers (61) on the left and right sides or the up-down sides are staggered.

7. The laser light output window dust-proof structure according to claim 1, characterized in that: A mounting hole (14) is provided on the side wall of the cavity (10), and a threaded structure (34), a toothed structure, or a blade structure on the shaft (32) is inserted into the mounting hole (14); when the cross-flow blower (30) rotates, a dynamic sealing structure is formed between the threaded structure (34), the toothed structure, or the blade structure and the mounting hole (14).

8. The laser light output window dust-proof structure according to claim 1, characterized in that: A plurality of blades are provided on the outer end surface of the shaft disc (33) of the cross-flow fan (30) and in the circumferential direction of the shaft body (32). When the motor (40) drives the bearing (13), the shaft disc (33) and the blades to rotate, the blades tend to force the gas near the bearing (13) and the shaft body (32) to flow in a direction away from the bearing (13) and the shaft body (32).

9. A laser, characterized in that: The light-emitting window comprises the dust-proof structure according to any one of claims 1 to 8.

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