A research method and system for the mechanism of the reflecting mirror surface shape - driving force

Abstract

The present invention provides a research method and system for the mechanism of the reflecting mirror surface shape - driving force, which are used to solve the technical problems that the current active adjustment device has a high hardware cost, a complex structure, and it is difficult to perform closed-loop control due to the lack of relevant quantitative indicators during the control process. The method includes: detecting the initial surface shape of the reflecting mirror to be measured to obtain detection data; performing data conversion on the detection data to obtain the initial surface shape data format; using the expected surface shape as the optimization target, performing inverse operations on the initial surface shape data to obtain multiple positions for applying the driving force and the corresponding magnitudes of the driving force; applying the corresponding driving force to the reflecting mirror to be measured according to the multiple positions for applying the driving force and the corresponding magnitudes of the driving force; performing surface shape detection again, if the expected surface shape is achieved, the control is completed; otherwise, return to step 1 for iteration until the expected surface shape is achieved; obtaining the mechanism relationship between the surface shape of the reflecting mirror to be measured and the action of the driving force.

Description

Technical Field

[0001] The invention relates to a reflector control device, and in particular to a reflector surface shape-driving force action mechanism research method and system. Background Art

[0002] At present, in order to obtain higher resolution and light-gathering capability, the aperture of optical components and systems is getting larger and larger. Relevant research shows that when the diameter-to-thickness ratio of the reflector remains unchanged, as the aperture increases, the deformation caused by the reflector's own weight increases with the square of the aperture, which will seriously affect the surface shape of the reflector and further affect the imaging quality of the optical system.

[0003] There are currently two ways to solve this problem: the first is to conduct sufficient simulation optimization in the early stage of structural design, and design a reasonable lightweight structure of the reflector and its supporting structure to avoid deformation of the reflector; the other is to adopt the control idea of ​​active optics, and set a multi-point active adjustment device on the back of the main mirror of the large-aperture optical system as the wavefront compensation link of the optical system, and actively adjust the main reflector surface shape according to the actual imaging effect of the optical system to improve the imaging quality of the system. At present, the existing multi-point active adjustment devices mainly use hydraulic systems and piezoelectric ceramic systems, which have high hardware costs and complex structures, and lack relevant quantitative indicators in the control process, making it difficult to perform closed-loop control. Summary of the invention

[0004] The purpose of the present invention is to solve the technical problems of high hardware cost and complex structure of the current multi-point active adjustment device, as well as the lack of relevant quantitative indicators in the control process, which makes it difficult to perform closed-loop control, and to provide a method and system for studying the surface shape-driving force mechanism of a reflector.

[0005] In order to achieve the above purpose, the technical solution of the present invention is as follows:

[0006] A method for studying the surface shape-actuating force mechanism of a reflector is used to provide quantitative indicators for the surface shape control of the reflector, that is, the position and magnitude of the actuating force applied to the reflector. The method is special in that it includes the following steps:

[0007] 1] Detect the initial surface shape of the reflector to be tested and obtain the test data;

[0008] 2] Convert and process the acquired detection data to obtain the required initial surface data format;

[0009] 3] Taking the expected face shape as the optimization target, the initial face shape data is inversely calculated to obtain multiple positions where the actuating force is applied and the magnitude of the actuating force at the corresponding positions;

[0010] 4】Apply corresponding driving forces to multiple positions of the mirror to be measured according to the multiple obtained positions where the driving forces are applied and the magnitudes of the driving forces at the corresponding positions;

[0011] 5】Perform surface shape detection on the mirror to be measured to which the driving force is applied. If the expected surface shape is achieved, the surface shape adjustment is completed; otherwise, return to step 1 to re-perform the detection and adjustment until the requirements of the expected surface shape are met;

[0012] 6】Obtain the mechanism relationship between the surface shape of the mirror to be measured and the action of the driving force.

[0013] To implement the above research method for the mechanism of the mirror surface shape - driving force action, the present invention also provides a research system for the mechanism of the mirror surface shape - driving force action, which is characterized in that it includes a metrological surface shape adjustment device, a stress and strain test system, and a mirror surface shape detection device;

[0014] The metrological surface shape adjustment device, as the main component of the system, is mainly used to provide support for the mirror to be measured and apply a driving force to change the surface shape of the mirror to be measured. It includes a base, a turntable rotatably arranged horizontally on the base, two support frames fixed on both sides of the turntable, and a metrological mirror frame adjustably arranged in a pitching manner between the two support frames;

[0015] The metrological mirror frame is a hollow cylinder for installing the mirror to be measured; at least three pressing plates are arranged on the front end face of the metrological mirror frame for axial positioning of the mirror to be measured, and an actuator mounting frame is arranged on the rear end face; the actuator mounting frame is a radioactive frame structure, a fixed actuator assembly is arranged at its central position, and at least 3 branches evenly distributed along the circumference radiate outward from its central position. Each branch is provided with a movable actuator assembly that can move along the extending direction of the branch; one end of the fixed actuator assembly and one end of the movable actuator assembly are both used to connect with the rear end face of the mirror to be measured, and pressure or tension is applied to the mirror to be measured through its rear end face to obtain the expected surface shape;

[0016] The stress and strain test system is a multi-channel real-time detection and processing device, which is electrically connected to the fixed actuator assembly and the movable actuator assembly respectively, and is used to monitor and display the magnitude of the driving force in real time;

[0017] At least one azimuth adjustment component is arranged on the base, and the acting end of the azimuth adjustment component abuts against the turntable, and is used to drive the turntable to rotate horizontally to adjust and lock the azimuth angle of the mirror to be measured; at least one pitching adjustment component is arranged on the turntable, and the acting end of the pitching adjustment component abuts against the metrological mirror frame, and is used to drive the metrological mirror frame to rotate in a pitching manner to adjust and lock the pitching angle of the mirror to be measured;

[0018] The reflection mirror surface shape detection device is located in front of the reflection mirror to be measured, and the optical axis of the reflection mirror surface shape detection device coincides with the optical axis of the reflection mirror to be measured, and is used to detect the surface shape of the reflection mirror to be measured; usually, a laser interferometer or a wavefront sensor is used for the reflection mirror surface shape detection device;

[0019] Further, the movable actuator assembly includes a first handwheel, a first double-headed stud, a sliding seat, a first slider, a first guiding pin, a first micro force sensor, a first actuator rod, a first tension plate, and a first bonding plate;

[0020] A long slot is provided on the branch of the actuator mounting bracket;

[0021] The sliding seat is arranged as a hollow boss, the opening of its hollow end faces the direction of the long slot, and the sliding seat is slidably connected to the branch of the actuator mounting bracket;

[0022] One end of the first slider is in small clearance sliding fit with the inner wall of the hollow boss of the sliding seat, and the other end passes through the long slot and is fixedly connected to one end of the first micro force sensor;

[0023] At least one first long slot is provided on the sliding seat, the head of the first guiding pin matches the first long slot, and its threaded end is connected to the first slider, and is used for guiding when the first slider moves;

[0024] The first double-headed stud includes a left shaft end and a right shaft end. There are two sections of threads with opposite directions on its left shaft end, namely a first left-handed thread and a first right-handed thread. The first left-handed thread is in threaded fit with the first slider, and the first right-handed thread is in threaded fit with the sliding seat; the right shaft section of the first double-headed stud is used to connect the first handwheel;

[0025] The other end of the first micro force sensor is connected to one end of the first actuator rod; the other end of the first actuator rod is connected to one end of the first bonding plate through the first tension plate, and the other end of the first bonding plate is used for bonding to the corresponding position of the reflection mirror to be measured.

[0026] Further, the fixed actuator assembly includes a second handwheel, a second double-headed stud, a fixed seat, a second slider, a second guiding pin, a second micro force sensor, a second actuator rod, a second tension plate, and a second bonding plate;

[0027] A central hole is provided at the central position of the actuator mounting bracket;

[0028] The fixed seat is arranged as a hollow boss, the opening of its hollow end faces the direction of the central hole of the actuator mounting bracket, and the fixed seat is fixedly connected to the actuator mounting bracket;

[0029] One end of the second slider is in small clearance sliding fit with the inner wall of the hollow boss of the fixed seat, and the other end passes through the central hole of the actuator mounting bracket and is fixedly connected to one end of the second micro force sensor;

[0030] At least one second single-slot is formed on the fixed seat. The head of the second guide pin is matched with the second single-slot, and its threaded end is matched with the second slider, which is used for guiding when the second slider moves;

[0031] The second double-headed stud includes a left shaft end and a right shaft end. There are two sections of threads with opposite directions on its left shaft end, namely the second left-handed thread and the second right-handed thread. The second left-handed thread is in threaded cooperation with the second slider, and the second right-handed thread is in threaded cooperation with the fixed seat; the right shaft section of the second double-headed stud is used to connect the second handwheel;

[0032] The other end of the second micro-force sensor is connected to one end of the second actuator rod. The other end of the second actuator rod is connected to one end of the second tension plate through the second tension plate, and the other end of the second bonding plate is used for bonding with the central position of the mirror to be measured.

[0033] Furthermore, the metrological surface shape control device further includes a quick-release bushing;

[0034] A plurality of supporting cylindrical surfaces, cementing cylindrical surfaces and installation and adjustment surfaces are radially staggered on the inner wall of the metrological mirror frame;

[0035] The quick-release bushing is in threaded cooperation with the side wall of the metrological mirror frame and is connected to the inner surface of the cementing cylindrical surface; the quick-release bushing is arranged as a hollow structure, which is used to inject adhesive through its hollow structure and make the adhesive bond the mirror to be measured on the inner wall of the metrological mirror frame. During the assembly process, when the stress generated by the curing and shrinkage of the adhesive requires the separation of the mirror to be measured and the metrological mirror frame, the quick disassembly of the glue column can be realized;

[0036] The central angle of the supporting cylindrical surface is larger than the central angle of the cementing cylindrical surface, that is, the width of the supporting cylindrical surface is larger than the width of the cementing cylindrical surface, which is used to stably support the mirror to be measured;

[0037] Installation and adjustment holes are formed on the installation and adjustment surfaces, which are used to install and adjust the mirror to be measured through the installation and adjustment holes.

[0038] Furthermore, a polytetrafluoroethylene backing plate is arranged on the supporting cylindrical surface of the metrological mirror frame, which is used to form a V-shaped circumferential positioning on the supporting cylindrical surface of the metrological mirror frame through the elasticity of the polytetrafluoroethylene backing plate when installing the mirror to be measured.

[0039] Furthermore, it further includes a multi-dimensional adjustment table located below the base, which is used to drive the mirror to be measured on the metrological surface shape control device to perform multi-dimensional attitude adjustment through the adjustment of the multi-dimensional adjustment table, so as to realize the alignment of the optical axis of the mirror to be measured and the optical axis of the reflection surface shape detection device.

[0040] Furthermore, the metering surface shape control device further includes an azimuth axis;

[0041] At least one first through hole is provided in the turntable;

[0042] A set of radial ball bearings are provided at corresponding positions on the base;

[0043] The upper section of the azimuth axis is in transitional fit with the first through hole, and the lower section of the azimuth axis is in fit with the radial ball bearings, so that the turntable can rotate relative to the base.

[0044] Furthermore, the metering surface shape control device further includes two horizontal axes;

[0045] A second through hole with an opening is provided on the upper side surface of the support frame, and a screw is provided at a position corresponding to the opening of the second through hole on the support frame. The screws are distributed in a horizontal cross shape with the second through hole;

[0046] One end of the horizontal axis is positioned by a stop fit with the side wall of the metering mirror frame, and the other end is in fit with the second through hole on the support frame. The aperture of the second through hole is adjusted by screwing down to change the tightness of the shaft-hole fit, so that the hole and the shaft are tightly held.

[0047] Furthermore, the metering surface shape control device further includes at least two sets of limit screws;

[0048] Each set of limit screws includes a screw, two polytetrafluoroethylene gaskets and a steel gasket;

[0049] At least two arc-shaped grooves are provided in the turntable. The screws pass through the steel gasket, the two polytetrafluoroethylene gaskets and the arc-shaped grooves in sequence and are threadedly connected to the base for limiting after the turntable completes rotation.

[0050] The beneficial effects of the present invention are as follows:

[0051] 1. A research method for the reflection mirror surface shape - actuator force action mechanism provided by the present invention takes the expected surface shape as the optimization target, performs inverse operations on the obtained initial surface shape data, and obtains the positions where the actuator forces are applied and the magnitudes of the actuator forces at the corresponding positions, that is, provides quantitative indicators in the regulation process to determine the positions and magnitudes of the actuator forces that need to be applied to the reflection mirror to be measured, providing a basis for the precise regulation of the reflection mirror surface shape in a complex environment and having significant applications in the optical system.

[0052] 2. A research system for the mechanism of the reflecting mirror surface shape - driving force action provided by the present invention is provided with a reflecting mirror surface shape detection device for initial surface shape detection of the reflecting mirror to be measured; a fixed actuator assembly and a plurality of movable actuator assemblies are arranged on the rear end surface of the metering frame, which are used to apply driving forces according to the obtained driving force application positions and corresponding driving force magnitudes. By moving the plurality of movable actuator assemblies, the driving force application positions of the reflecting mirror to be measured can be accurately adjusted. At the same time, the applied driving forces are monitored and displayed in real time through a stress - strain test system, so that the accurate application of the driving force magnitudes can be realized, and the surface shape regulation of the reflecting mirror to be measured is more accurate.

[0053] 3. A research system for the mechanism of the reflecting mirror surface shape - driving force action provided by the present invention, an azimuth adjustment assembly is arranged on the base, and a pitch adjustment assembly is arranged on the turntable, which can adjust the azimuth angle and pitch angle of the reflecting mirror to be measured to realize the attitude regulation of the reflecting mirror to be measured and achieve the optical axis alignment during closed - loop regulation.

[0054] 4. A research system for the mechanism of the reflecting mirror surface shape - driving force action provided by the present invention, in which the metering type surface shape regulation device innovatively adopts a mechanical multi - point active regulation device. A fixed actuator assembly and a plurality of movable actuator assemblies are arranged on the rear end surface of the metering frame for surface shape regulation. The mechanical multi - point active regulation device greatly reduces the hardware cost of the regulation device, and has a simple structure, convenient operation, and high controllability during the regulation process.

[0055] 5. A research system for the mechanism of the reflecting mirror surface shape - driving force action provided by the present invention, a quick - release screw sleeve connected to the surface of the cylindrical surface for cementing is arranged on the metering frame. The quick - release screw sleeve is set as a hollow structure, which is used to inject adhesive through its hollow structure and make the adhesive bond the reflecting mirror to be measured on the inner wall of the metering frame. During the assembly process, when the reflecting mirror to be measured needs to be disassembled from the metering frame due to the stress generated by the curing and shrinkage of the adhesive, the rapid disassembly of the glue column can be realized.

[0056] 6. A research system for the mechanism of the reflecting mirror surface shape - driving force action provided by the present invention, a polytetrafluoroethylene backing plate is arranged on the supporting cylindrical surface of the metering frame. When installing the reflecting mirror to be measured, through the elasticity of the polytetrafluoroethylene backing plate, a V - shaped circumferential positioning can be formed on the supporting cylindrical surface of the metering frame. Combining the positioning of the pressing plate, the movable actuator assembly and the fixed actuator assembly for the reflecting mirror to be measured, the micro - stress assembly of the reflecting mirror to be measured can be realized, providing a good initial surface shape for the research.

[0057] 7. A research system for the mechanism of the reflecting mirror surface shape - driving force action provided by the present invention is also provided with a multi - dimensional adjustment table, which is convenient for realizing the alignment of the optical axis of the reflecting mirror to be measured and the optical axis of the reflecting mirror surface shape detection device. Description of the Drawings

[0058] Figure 1 Schematic structural diagram of an embodiment of a research system for the mechanism of the reflective mirror surface shape - driving force

[0059] Figure 2 Front structural diagram of the metering surface shape control device in the embodiment of the present invention

[0060] Figure 3 Front view of the metering surface shape control device in the embodiment of the present invention

[0061] Figure 4 Schematic structural diagram of the metering mirror frame in the embodiment of the present invention

[0062] Figure 5 Schematic structural diagram of the quick - release bushing and the cylindrical surface for cementing in the embodiment of the present invention

[0063] Figure 6 Back structural diagram of the metering surface shape control device in the embodiment of the present invention

[0064] Figure 7 is Figure 3 left view of

[0065] Figure 8 Schematic structural diagram of the movable actuator assembly in the embodiment of the present invention

[0066] Figure 9 Schematic structural diagram of the fixed actuator assembly in the embodiment of the present invention

[0067] Figure 10 Flow chart of a research method for the mechanism of the reflective mirror surface shape - driving force of the present invention

[0068] Specific reference numerals are as follows:

[0069] 1 - Reflective mirror to be measured

[0070] 2-Measuring type surface shape control device, 21-Base, 211-Azimuth adjustment component, 2111-Azimuth fine adjustment nut, 2112-Azimuth fine adjustment screw, 212-Radial ball bearing, 22-Rotating table, 221-Pitch adjustment component, 2211-Pitch fine adjustment nut, 2212-Pitch fine adjustment screw, 222-First through hole, 223-Arc-shaped groove, 23-Support frame, 231-Second through hole, 232-Screw, 24-Measuring frame, 241-Clamping plate, 242-Actuator mounting bracket, 243-Fixed actuator assembly, 2431-Second handwheel, 2432-Second double-headed stud, 2433-Fixed seat, 24331-Second slotted crosshead, 2434-Second slider, 2435-Second guide pin, 2436-Second micro force sensor, 2437-Second actuator rod, 2438-Second tension plate, 2439-Second bonding plate, 244-Movable actuator assembly, 2441-First handwheel, 2442-First double-headed stud, 2443-Slide seat, 24431-First slotted crosshead, 2444-First slider, 2445-First guide pin, 2446-First micro force sensor, 2447-First actuator rod, 2448-First tension plate, 2449-First bonding plate, 2450-T-shaped screw assembly, 245-Support cylindrical surface, 246-Bonding cylindrical surface, 247-Installation and calibration surface, 2471-Installation and calibration hole, 248-T-shaped chute, 249-Slotted long hole, 250-Third installation interface; 25-Quick-release bushing, 26-Azimuth axis, 27-Horizontal axis, 28-Limit screw set; 29-Sunk slot hole;

[0071] 3-Stress-strain test system; 4-Reflecting mirror surface shape detection device; 5-Multi-dimensional adjustment table. Detailed implementation mode

[0072] To make the advantages and features of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0073] A research method for the acting mechanism of reflecting mirror surface shape-actuating force is used to provide quantitative indicators for the surface shape control of a reflecting mirror, that is, to study the position and magnitude of the actuating force applied to the reflecting mirror, and specifically includes the following steps:

[0074] 1】Detect the initial surface shape of the reflecting mirror 1 to be measured to obtain detection data;

[0075] 2】Perform data conversion and processing on the obtained detection data to obtain the required initial surface shape data format;

[0076] 3】Taking the expected surface shape as the optimization target, perform inverse operations on the obtained initial surface shape data to obtain the positions of multiple applied actuating forces and the magnitudes of the actuating forces at the corresponding positions;

[0077] 4】Apply corresponding driving forces to multiple positions of the mirror to be measured according to the multiple obtained positions where the driving forces are applied and the magnitudes of the driving forces at the corresponding positions;

[0078] 5】Perform surface shape detection on the mirror 1 to be measured to which the driving force is applied. If the expected surface shape is achieved, the surface shape adjustment is completed; otherwise, return to step 1 to re-perform detection and adjustment until the requirements of the expected surface shape are met;

[0079] 6】Obtain the mechanism relationship between the surface shape of the mirror 1 to be measured and the action of the driving force.

[0080] To implement the above method for studying the mechanism of the mirror surface shape - driving force action, the present invention also provides a system for studying the mechanism of the mirror surface shape - driving force action, as Figure 1 shown, which includes a metrological surface shape adjustment device 2, a stress - strain test system 3, a mirror surface shape detection device 4, and a multi - dimensional adjustment table 5. In this embodiment, the mirror 1 to be measured is a plane mirror, with a diameter of 40 mm thick, diameter - to - thickness ratio: 10:1, mirror surface shape RMS < λ / 50 (λ = 632.8 μm). In other embodiments of the present invention, the mirror 1 to be measured can also be a spherical mirror or an aspherical mirror, and the parameters are not limited to this.

[0081] The metrological surface shape adjustment device 2, as the main component of this system, is mainly used to provide support for the mirror 1 to be measured and apply a driving force to change the surface shape of the mirror 1 to be measured. As Figure 2 、 Figure 3As shown in the figure, the metering surface shape control device 2 includes a base 21, a turntable 22, two support frames 23, a metering mirror frame 24, a quick-release screw sleeve 25, an azimuth axis 26, two horizontal axes 27, and two groups of limit screw sets 28. A first through hole 222 is provided in the turntable 22, and a set of radial ball bearings 212 is provided at the corresponding position on the base 21. The upper section of the azimuth axis 26 is in transitional fit with the first through hole 222, and the lower section of the azimuth axis 26 is in fit with the radial ball bearings 212. The turntable 22 and the base 21 are in surface contact, and their contact surface is partially contacted through milling processing, and finally the turntable 22 can rotate relative to the base 21. In order to fix the turntable 22 relative to the base 21 after rotating to a suitable position, in this embodiment, two arc-shaped grooves 223 are provided in the turntable 22. The limit screw set 28 includes a screw, two polytetrafluoroethylene gaskets, and a steel gasket. The screw passes through the steel gasket, two polytetrafluoroethylene gaskets, and the arc-shaped groove 223 in sequence and is threadedly connected to the base 21 for limiting after the turntable 22 completes rotation; the setting of the polytetrafluoroethylene gasket and the steel gasket can keep the turntable 22 stable while reducing the damping. Particularly, the base 21 of the present invention is also provided with a plurality of counterbore holes 29 for connecting with an external optical platform. The two support frames 23 are respectively fixed at both ends of the turntable 22, and a second through hole 231 with an opening is provided on the side surface of the upper end of the support frame 23. A screw 232 is provided at the position corresponding to the opening of the second through hole 231 on the support frame 23; the screw 232 and the second through hole 231 are distributed in a horizontal cross shape; one end of each of the two horizontal axes 27 is positioned by a spigot fit with the side wall of the metering mirror frame 24, and the other end is in fit with the second through hole 231 on the support frame 23. The aperture size of the second through hole 231 is adjusted by pressing the screw 232 to change the tightness of the shaft-hole fit, so that the hole and the shaft are tightly held. As Figure 4 shown, the metering mirror frame 24 is a hollow cylinder for installing the mirror 1 to be measured. A plurality of support cylindrical surfaces 245, cementing cylindrical surfaces 246, and installation and adjustment surfaces 247 are radially arranged in a staggered manner on its inner wall. The quick-release screw sleeve 25 is threadedly connected to the side wall of the metering mirror frame 24 and extends into the inner surface of the cementing cylindrical surface 246. As Figure 5As shown, the quick-release bushing 25 is provided with a hollow structure for injecting an adhesive through its hollow structure, and the adhesive is used to bond the mirror under test 1 to the inner wall of the metering frame 24. During the assembly process, when the mirror under test 1 needs to be disassembled from the metering frame 24 due to the stress generated by the curing and shrinkage of the adhesive, the rapid disassembly of the glue column can be achieved. The central angle of the cylindrical surface 245 for support is greater than the central angle of the cylindrical surface 246 for bonding, that is, the width of the cylindrical surface 245 for support is greater than the width of the cylindrical surface 246 for bonding, which is used to stably support the mirror under test 1. A polytetrafluoroethylene backing plate is provided on the cylindrical surface 245 for support, and when installing the mirror under test 1, a V-shaped circumferential positioning is formed on the cylindrical surface 245 for support of the metering frame 24 through the elasticity of the polytetrafluoroethylene backing plate. Installation adjustment holes 2471 are provided in the installation adjustment surface 247, and after the installation is completed, the mirror under test 1 can be adjusted through the installation adjustment holes 2471. Three first installation interfaces are provided on the front end surface of the metering frame 24, which are respectively used to install three pressure plates 241 for realizing the axial positioning of the mirror under test 1; preferably, in this embodiment, the three pressure plates 241 extend into the inner wall of the metering frame 24 through the first installation interfaces, and a polytetrafluoroethylene gasket with a thickness of 0.1 mm is bonded to the end of the pressure plate 241 extending into the inner wall of the metering frame 24, which is used to reduce the damping when abutting against the mirror under test 1. As Figure 6 , Figure 7As shown in the figure, a second mounting interface is provided on the rear end face of the metering frame 24 for mounting the actuator mounting bracket 242; a third mounting interface 250 is provided above the metering frame 24 for mounting an extended reference mirror group during later extended applications. The actuator mounting bracket 242 is a radioactive frame structure, with a central hole provided at its central position, and 6 branches radially radiating outward from its central position and evenly distributed along the circumference; a fixed actuator assembly 243 is provided on the central hole, and the fixed actuator assembly 243 is fixedly connected to the actuator mounting bracket 242 through connecting screw holes; a pair of radial T-shaped chutes 248 and a slot 249 located in the middle of each pair of T-shaped chutes 248 are provided on each branch; a movable actuator assembly 244 that can move along the slot 249 is provided in the slot 249, and T-shaped screw assemblies 2450 corresponding to the positions of the T-shaped chutes 248 are provided on the movable actuator assembly 244 for slidingly connecting it with the T-shaped chutes 248 to drive the movable actuator assembly 244 to move radially along the slot 249. The fixed actuator assembly 243, three circumferentially evenly distributed pressing plates 241, and 6 movable actuator assemblies 244 are used to form end face positioning for the mirror 1 to be measured. Combining the end face positioning with the above-mentioned V-shaped circumferential positioning can achieve micro-stress assembly of the mirror to be measured, providing a good initial surface shape for the research. Two azimuth adjustment assemblies 211 are provided on the base 21. In this embodiment, they are set as two azimuth fine adjustment nuts 2111 and corresponding two azimuth fine adjustment screws 2112 located at one end of the base 1. Among them, the two azimuth fine adjustment nuts 2111 are respectively located on the front and rear sides of the turntable 22, and the two azimuth fine adjustment screws 2112 are screwed into the corresponding azimuth fine adjustment nuts 2111 and abut against the turntable 22, for driving the turntable 22 to rotate horizontally to adjust and lock the azimuth angle of the mirror 1 to be measured. Two pitch adjustment assemblies 221 are provided on the turntable 22. In this embodiment, they are set as two pitch fine adjustment nuts 2211 and corresponding two pitch fine adjustment screws 2212 located in the middle of the turntable. Among them, the two pitch fine adjustment nuts 2211 are respectively located on the front and rear sides of the metering frame 24, and the two pitch fine adjustment screws 2212 are screwed into the corresponding pitch fine adjustment nuts 2211 and abut against the metering frame 24, for driving the metering frame 24 to rotate in pitch to adjust and lock the pitch angle of the mirror 1 to be measured.

[0082] Among them, the fixed actuator assembly 243 and the movable actuator assembly 244, as important components of the metering surface shape control device 2, are further described below in terms of their specific structures.

[0083] Such as Figure 8As shown, the movable actuator assembly 244 includes a first handwheel 2441, a first double-headed stud 2442, a slide base 2443, a first slider 2444, a first guide pin 2445, a first micro-force sensor 2446, a first actuator rod 2447, a first tension plate 2448, and a first bonding plate 2449. The slide base 2443 is provided as a hollow boss, the hollow end of which opens towards the direction of the long slot 249, and both sides of the slide base 2443 are respectively slidably connected and matched with the T-shaped chute 248 on the branch path through the T-shaped screw component 2450, so that the movable actuator assembly 244 can move radially along the long slot 249 and be locked at a predetermined position; specifically, the T-shaped screw component 2450 is composed of a T-shaped screw, a hexagonal nut, and a flat washer. One end of the first slider 2444 is slidably matched with a small clearance on the inner wall of the hollow boss of the slide base 2443, and the other end passes through the long slot 249 and is fixedly connected to one end of the first micro-force sensor 2446; the head of the first guide pin 2445 is a cylindrical section, and first one-word slots 24431 are respectively opened on two side walls of the slide base 2443. The cylindrical section of the head of the first guide pin 2445 is matched with the first one-word slot 24431, and its threaded end is connected to the first slider 2444, which is used for guiding when the first slider 2444 moves; the first double-headed stud 2442 includes a left shaft end and a right shaft end. There are two threads with opposite directions on the left shaft end of the first double-headed stud 2442, namely a first left-handed thread and a first right-handed thread. The first left-handed thread is threadedly matched with the first slider 2444, and the first right-handed thread is threadedly matched with the slide base 2443; the right shaft section of the first double-headed stud 2442 is used to connect the first handwheel 2441. The first handwheel 2441 is in small clearance fit with the right shaft section of the first double-headed stud 2442 and transmits torque through a pin; the other end of the first micro-force sensor 2446 is connected to one end of the first actuator rod 2447; the other end of the first actuator rod 2447 is connected to one end of the first bonding plate 2449 through the first tension plate 2448. In this embodiment, the first tension plate 2448 is composed of two upper and lower cover plates, which are used to enable the first actuator rod 2447 to pass through and be bonded to the first bonding plate 2449; the other end of the first bonding plate 2449 is used to be bonded to the corresponding position of the mirror 1 to be measured. The specific implementation principle of the movable actuator assembly 244 is as follows: Rotate the first handwheel 2441 of the movable actuator assembly 244. Since the thread directions of the left shaft end and the right shaft end of the first double-headed stud 2442 are opposite, the first handwheel 2441 drives the first double-headed stud 2442 to rotate, causing the first slider 2444 to move forward or backward. Pressure or tension is transmitted to the corresponding position of the mirror 1 to be measured through the first micro-force sensor 2446, the first actuator rod 2447, the first bonding plate 2449, and the first tension plate 2448, resulting in a change in the surface shape of the mirror 1 to be measured.

[0084] As Figure 9As shown, in the fixed actuator assembly 243, except that the fixed seat 2433 is used to replace the slide seat 2443 in the movable actuator assembly 244, the other structures are basically the same. The fixed actuator assembly 243 specifically includes a second handwheel 2431, a second double-headed stud 2432, a fixed seat 2433, a second slider 2434, a second guide pin 2435, a second micro-force sensor 2436, a second actuator rod 2437, a second tension plate 2438, and a second bonding plate 2439; a central hole is provided at the center of the actuator mounting bracket 242; the fixed seat 2433 is provided as a hollow boss, the opening of its hollow end faces the central hole of the actuator mounting bracket 242, and the fixed seat 2433 is fixedly connected to the actuator mounting bracket 242; one end of the second slider 2434 is in small-gap sliding fit with the inner wall of the hollow boss of the fixed seat 2433, and the other end passes through the central hole of the actuator mounting bracket 242 and is fixedly connected to one end of the second micro-force sensor 2436; the head of the second guide pin 2435 is a cylindrical section, and second one-word grooves 24331 are respectively provided on two side walls of the fixed seat 2433. The cylindrical section of the head of the second guide pin 2435 is matched with the second one-word groove 24331, and its threaded end is matched with the second slider 2434 for guiding during movement; the second double-headed stud 2432 includes a left shaft end and a right shaft end. There are two sections of threads with opposite directions on its left shaft end, namely a second left-handed thread and a second right-handed thread. The second left-handed thread is in threaded fit with the second slider 2434, and the second right-handed thread is in threaded fit with the fixed seat 2433; the right shaft section of the second double-headed stud 2432 is used to connect the second handwheel 2431, and the second handwheel 2431 is in small-gap fit with the right shaft section of the first double-headed stud 2432 and transmits torque through a pin; the other end of the second micro-force sensor 2436 is connected to one end of the second actuator rod 2437, and the other end of the second actuator rod 2437 is connected to one end of the second bonding plate 2439 through the second tension plate 2438. In this embodiment, the second tension plate 2438 is composed of two upper and lower cover plates, which are used to allow the second actuator rod 2437 to pass through and bond with the second bonding plate 2439; the other end of the second bonding plate 2439 is used to bond with the central position of the mirror 1 to be measured. The specific implementation principle of the fixed actuator assembly 243 is as follows: Rotate the second handwheel 2431 of the fixed actuator assembly 243. Since the thread directions of the left shaft end and the right shaft end of the second double-headed stud 2432 are opposite, the second handwheel 2431 drives the second double-headed stud 2432 to rotate, causing the second slider 2434 to move forward or backward. Pressure or tension is transmitted to the central position of the mirror 1 to be measured through the second micro-force sensor 2436, the second actuator rod 2437, the second bonding plate 2439, and the second tension plate 2438, resulting in a change in the surface shape of the mirror 1 to be measured.

[0085] The stress-strain test system 3 is a multi-channel real-time detection and processing device, which is respectively connected to the second micro tension-compression sensor 2436 in the fixed actuator assembly 243 and the first micro tension-compression sensor 2446 in the movable actuator assembly 244, and is used to monitor and display the magnitude of the driving force in real time. The reflecting mirror surface shape detection device 4 is mainly used to detect the surface shape of the reflecting mirror 1 to be measured. Usually, a laser interferometer or a wavefront sensor is used. It is located in front of the reflecting mirror 1 to be measured, and the optical axis of the reflecting mirror surface shape detection device 4 coincides with the optical axis of the reflecting mirror 1 to be measured. The multi-dimensional adjustment table 5 is arranged at the lower part of the base 21 and is used to drive the reflecting mirror 1 on the metrological surface shape control device 2 to perform multi-dimensional attitude adjustment through adjusting the multi-dimensional adjustment table 5, so as to align the optical axis of the reflecting mirror 1 to be measured with the optical axis of the reflecting mirror surface shape detection device 4.

[0086] Specifically, for a reflecting mirror surface shape-actuating force action mechanism research system of the present invention, the method for realizing the research on the reflecting mirror surface shape-actuating force action mechanism is as Figure 10 shown, and the specific steps are as follows:

[0087] 1. Install the reflecting mirror 1 to be measured

[0088] Install the reflecting mirror 1 to be measured in the metrological mirror frame 24. During installation, make the reflecting mirror 1 to be measured abut against the polytetrafluoroethylene backing plate on the supporting cylindrical surface 245 of the metrological mirror frame 24 to achieve V-shaped circumferential positioning. Then, combined with the positioning of the reflecting mirror 1 by the front-end surface pressing plate 241 of the metrological mirror frame 24 and the positioning of the reflecting mirror 1 by the movable actuator assembly 244 and the fixed actuator assembly 243 arranged on the rear end surface, the micro-stress assembly of the reflecting mirror 1 to be measured is realized, providing a good initial surface shape for the research.

[0089] 2. Build a self-collimation detection optical path between the reflecting mirror surface shape detection device 4 and the reflecting mirror 1 to be measured, and adjust the azimuth angle and pitch angle of the reflecting mirror 1 to be measured through the azimuth adjustment assembly 211 and the pitch adjustment assembly 221. After the adjustment is completed, use the collimation interference method to detect the initial surface shape of the reflecting mirror 1 to be measured.

[0090] 3. Import the detection data of the reflecting mirror surface shape detection device 4 into the optical-mechanical integrated analysis software, and perform data conversion through the optical-mechanical integrated analysis software to obtain the initial surface shape data.

[0091] 4. Take the expected surface shape as the optimization target, and use the optical-mechanical integrated analysis software to perform inverse operation on the obtained initial surface shape data to obtain the positions of multiple applied driving forces and the magnitudes of the driving forces at the corresponding positions.

[0092] 5】Adjust the movement of the 6 movable actuator components 244 according to multiple positions for applying actuation force, and apply the actuation force according to the magnitude of the actuation force at the corresponding positions through the 6 movable actuator components 244 and the fixed actuator component 243. During the application of the actuation force, the change in the magnitude of the actuation force is monitored in real time through the stress-strain test system 3;

[0093] 6】Perform a surface shape detection on the mirror 1 to be tested for which the actuation force is applied. If the expected surface shape is achieved, the surface shape regulation of the mirror 1 to be tested is completed; otherwise, return to step 2 to perform iterative detection calculation and adjustment again until the expected surface shape requirement is met;

[0094] 7】Obtain the mechanism relationship between the surface shape of the mirror 1 to be tested and the action of the actuation force.

[0095] By studying the mechanism relationship between the surface shape of the mirror and the action of the actuation force, the present invention provides a quantitative index for the subsequent surface shape regulation of the mirror in a complex environment, and provides a basis for the position and magnitude of the actuation force applied to the mirror.

[0096] As described above, it is only used to illustrate the technical solution of the present invention, rather than to limit it. For those of ordinary professional skills in the art, the specific technical solution recorded in the above embodiments can be modified, or some of the technical features can be equivalently replaced, and these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution protected by the present invention.

Claims

1. A research method for the mechanism of the reflecting mirror surface shape - driving force action, characterized in that, it is realized by using a research system for the mechanism of the reflecting mirror surface shape - driving force action. The research system for the mechanism of the reflecting mirror surface shape - driving force action includes a metering surface shape regulation device (2), a stress and strain test system (3), and a reflecting mirror surface shape detection device (4); the metering surface shape regulation device (2) includes a base (21), a turntable (22) rotatably arranged horizontally on the base (21), two support frames (23) fixed on both sides of the turntable (22), and a metering mirror frame (24) arranged between the two support frames (23) and adjustable in pitch; the metering mirror frame (24) is a hollow cylinder for installing the reflecting mirror to be measured (1); at least three pressing plates (241) are arranged on the front end face of the metering mirror frame (24), and an actuator mounting frame (242) is arranged on the rear end face; the actuator mounting frame (242) is a radioactive frame structure, a fixed actuator assembly (243) is arranged at its central position, at least 3 branches are radially radiated outward from its central position and are evenly distributed along the circumference, and a movable actuator assembly (244) movable along the extending direction of the branch is arranged on each branch; one end of the fixed actuator assembly (243) and one end of the movable actuator assembly (244) are both used for connecting with the rear end face of the reflecting mirror to be measured (1); the stress and strain test system (3) is a multi - channel real - time detection and processing device, which is electrically connected with the fixed actuator assembly (243) and the movable actuator assembly (244) respectively and is used for real - time monitoring and displaying the magnitude of the driving force; at least one azimuth adjustment component (211) is arranged on the base (21), and the acting end of the azimuth adjustment component (211) abuts against the turntable (22) for adjusting and locking the azimuth angle of the reflecting mirror to be measured (1); at least one pitch adjustment component (221) is arranged on the turntable (22), and the acting end of the pitch adjustment component (221) abuts against the metering mirror frame (24) for adjusting and locking the pitch angle of the reflecting mirror to be measured (1); the reflecting mirror surface shape detection device (4) is located in front of the reflecting mirror to be measured (1), and the optical axis of the reflecting mirror surface shape detection device (4) coincides with the optical axis of the reflecting mirror to be measured (1); This method includes the following steps: 1】Detect the initial surface shape of the reflecting mirror to be measured (1) to obtain detection data; 2】Perform data conversion and processing on the obtained detection data to obtain the required initial surface shape data format; 3】Taking the expected surface shape as the optimization target, perform inverse operation on the obtained initial surface shape data to obtain the positions where the driving force is applied and the magnitude of the driving force at the corresponding positions; 4】According to the positions where the driving force is applied and the magnitude of the driving force at the corresponding positions obtained, apply the corresponding driving forces to multiple positions of the reflecting mirror to be measured; 5】Detect the surface shape of the reflecting mirror to be measured (1) to which the driving force is applied. If the expected surface shape is reached, the surface shape regulation is completed; otherwise, return to step 1 to re - perform detection and adjustment until the requirements of the expected surface shape are met; 6】Obtain the mechanism relationship between the surface shape of the reflecting mirror to be measured (1) and the action of the driving force.

2. A research method for the reflection mirror surface shape - actuator force - acting mechanism according to claim 1, characterized in that: the movable actuator assembly (244) includes a first handwheel (2441), a first double - headed stud (2442), a slide base (2443), a first slider (2444), a first guide pin (2445), a first micro - force sensor (2446), a first actuator rod (2447), a first tension plate (2448), and a first bonding plate (2449); a slot (249) is provided on the branch of the actuator mounting bracket (242); the slide base (2443) is arranged as a hollow boss, the opening of its hollow end faces the direction of the slot (249), and the slide base (2443) is slidably connected to the branch of the actuator mounting bracket (242); one end of the first slider (2444) is in small - clearance sliding fit with the inner wall of the hollow boss of the slide base (2443), and the other end passes through the slot (249) and is fixedly connected to one end of the first micro - force sensor (2446); at least one first slot (24431) is provided on the slide base (2443), the head of the first guide pin (2445) mates with the first slot (24431), and its threaded end is connected to the first slider (2444) for guiding the movement of the first slider (2444); the first double - headed stud (2442) includes a left shaft end and a right shaft end. There are two threads with opposite directions on its left shaft end, namely a first left - hand thread and a first right - hand thread. The first left - hand thread is in threaded fit with the first slider (2444), and the first right - hand thread is in threaded fit with the slide base (2443); the right shaft section of the first double - headed stud (2442) is used to connect the first handwheel (2441); the other end of the first micro - force sensor (2446) is connected to one end of the first actuator rod (2447); the other end of the first actuator rod (2447) is connected to one end of the first tension plate (2448) through the first tension plate (2448), and the other end of the first bonding plate (2449) is used for bonding to the corresponding position of the mirror to be measured (1).

3. A research method for the reflection mirror surface shape - actuator force - acting mechanism according to claim 2, characterized in that: the fixed actuator assembly (243) includes a second handwheel (2431), a second double - headed stud (2432), a fixed seat (2433), a second slider (2434), a second guide pin (2435), a second micro - force sensor (2436), a second actuator rod (2437), a second tension plate (2438), and a second bonding plate (2439); a central hole is provided at the center of the actuator mounting bracket (242); the fixed seat (2433) is arranged as a hollow boss, the opening of its hollow end faces the direction of the central hole of the actuator mounting bracket (242), and the fixed seat (2433) is fixedly connected to the actuator mounting bracket (242); One end of the second slider (2434) is in sliding fit with a small clearance with the inner wall of the hollow boss of the fixed seat (2433), and the other end passes through the central hole of the actuator mounting bracket (242) and is fixedly connected to one end of the second micro-force sensor (2436); At least one second slotted crosshead (24331) is provided on the fixed seat (2433). The head of the second guide pin (2435) is matched with the second slotted crosshead (24331), and its threaded end is matched with the second slider (2434) for guiding when the second slider (2434) moves; The second double-headed stud (2432) includes a left shaft end and a right shaft end. There are two sections of threads with opposite directions on its left shaft end, namely the second left-handed thread and the second right-handed thread. The second left-handed thread is in threaded fit with the second slider (2434), and the second right-handed thread is in threaded fit with the fixed seat (2433); the right shaft section of the second double-headed stud (2432) is used to connect the second handwheel (2431); The other end of the second micro-force sensor (2436) is connected to one end of the second actuator rod (2437). The other end of the second actuator rod (2437) is connected to one end of the second bonding plate (2439) through the second tension plate (2438). The other end of the second bonding plate (2439) is used to bond to the central position of the mirror to be measured (1).

4. A method for studying the mechanism of the actuating force on the mirror surface shape according to any one of claims 1-3, characterized in that: The metering type surface shape control device (2) further includes a quick-release screw sleeve (25); A plurality of supporting cylindrical surfaces (245), cementing cylindrical surfaces (246) and installation and adjustment surfaces (247) are radially arranged in a staggered manner on the inner wall of the metering mirror frame (24); The quick-release screw sleeve (25) is threadedly connected to the side wall of the metering mirror frame (24) and extends into the inner surface of the cementing cylindrical surface (246); the quick-release screw sleeve (25) is provided with a hollow structure for injecting an adhesive through its hollow structure and bonding the mirror to be measured (1) to the inner wall of the metering mirror frame (24) with the adhesive; The central angle of the supporting cylindrical surface (245) is larger than the central angle of the cementing cylindrical surface (246) for stably supporting the mirror to be measured (1); An installation and adjustment hole (2471) is provided on the installation and adjustment surface (247) for installing and adjusting the mirror to be measured (1) through the installation and adjustment hole (2471).

5. A method for studying the mechanism of the actuating force on the mirror surface shape according to claim 4, characterized in that: A polytetrafluoroethylene backing plate is provided on the supporting cylindrical surface (245) of the metering mirror frame (24) for forming a V-shaped circumferential positioning when installing the mirror to be measured (1).

6. A method for studying the mechanism of the actuating force on the mirror surface shape according to claim 5, characterized in that: It further includes a multi-dimensional adjustment table (5) located below the base (21) for aligning the optical axis of the mirror to be measured (1) with the optical axis of the mirror surface shape detection device (4).

7. A method for studying the mechanism of the actuating force on the mirror surface shape according to claim 6, characterized in that: The metering surface shape control device (2) further includes an azimuth axis (26); At least one first through hole (222) is formed in the turntable (22); A set of radial ball bearings (212) are arranged at corresponding positions on the base (21); The upper section of the azimuth axis (26) is in transitional fit with the first through hole (222), and the lower section of the azimuth axis (26) is in fit with the radial ball bearing (212).

8. A research method for the reflection mirror surface shape - driving force action mechanism according to claim 7, characterized in that: The metering surface shape control device (2) further includes two horizontal axes (27); An opening - provided second through hole (231) is formed in the upper - end side surface of the support frame (23). A screw (232) is arranged at a position corresponding to the opening of the second through hole (231) on the support frame (23), and the screw (232) and the second through hole (231) are distributed in a horizontal cross - shape; One end of the horizontal axis (27) is positioned by a stop - groove fit with the side wall of the metering mirror frame (24), and the other end is in fit with the second through hole (231) on the support frame (23). By pressing the screw (232) to adjust the aperture size of the second through hole (231) to change the tightness of the shaft - hole fit, so that the hole and the shaft are tightly held.

9. A research method for the reflection mirror surface shape - driving force action mechanism according to claim 8, characterized in that: The metering surface shape control device (2) further includes at least two limit screw groups (28); Each limit screw group (28) includes a screw, two polytetrafluoroethylene gaskets and a steel gasket; At least two arc - shaped grooves (223) are formed in the turntable (22); The screw sequentially passes through the steel gasket, the two polytetrafluoroethylene gaskets and the arc - shaped groove (223) and then is threadedly connected to the base (21).

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