sensor
By using a flat portion and an inclined surface structure in the support component of the sensor, the problem of accuracy in shape control of the sensor element on the inclined surface is solved, achieving higher sensitivity and detection accuracy.
CN115840175BActive Publication Date: 2026-04-24TDK CORP
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Patent Information
- Application Number
- CN202211154919.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2022-09-01
- Filing Date
- 2022-09-21
- Publication Date
- 2026-04-24
- Estimated Expiration
- 2042-09-21
AI Technical Summary
Technical Problem
When forming sensor elements on an inclined surface, existing technologies struggle to achieve high-precision shape control, especially near the end of the inclined surface of the sensor, where the flow of photoresist leads to insufficient precision in the formation of metal films or magnetoresistive elements.
Method used
The support component comprises a flat portion and an inclined surface to support the sensor element, wherein at least one protrusion has multiple recesses to ensure precise positioning and shape control of the sensor element on the inclined surface.
Benefits of technology
This improved the shape accuracy of the sensor element on the inclined surface, thereby enhancing the sensor's sensitivity and detection accuracy.
✦ Generated by Eureka AI based on patent content.
Abstract
A sensor includes an insulating layer including a flat portion and a protruding portion, a first MR element, and a second MR element. The protruding portion has a first inclined surface and a second inclined surface. The first MR element is disposed on the first inclined surface. The second MR element is disposed on the second inclined surface. The protruding portion extends in a first direction parallel to an upper surface of a substrate, and end portions of the first direction included in the protruding portion are respectively recessed in a plurality of recesses recessed in a direction parallel to the upper surface of the substrate.
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